Sensor module, shah optical system, and electronic device

Abstract

The present disclosure relates to the field of optical technology, and particularly to a sensor module, a SHIM optical system and an electronic device. The present disclosure aims to solve the technical problem that the existing light-transmitting cover plate is inclined to the optical axis to generate astigmatism, affecting the imaging clarity. The sensor module of the present disclosure is applied to a SHIM optical path, which includes a photosensitive chip and a correction module arranged in sequence along the optical axis, coaxially arranged, easy to assemble and adjust; the correction module includes a light-transmitting cover plate and at least one light-transmitting flat plate, the light-transmitting cover plate is arranged on the light-incident side of the photosensitive chip, and the at least one light-transmitting flat plate is arranged on the side of the light-transmitting cover plate away from the photosensitive chip; wherein the first included angle between the at least one light-transmitting flat plate and the first reference surface is an acute angle. Before the light enters the light-transmitting cover plate and the photosensitive chip, the light passes through the light-transmitting flat plate for refraction, thereby reducing the optical path difference between the meridional beam and the sagittal beam of the light, correcting the astigmatism, and improving the imaging clarity.

Description

Technical Field

[0001] This disclosure relates to the field of optical technology, and in particular to a sensor module, a SAM optical system, and electronic equipment. Background Technology

[0002] The Scham optical system is an imaging system that utilizes Scham's law. According to Scham's law, when the extensions of the target plane, the principal plane of the lens, and the detector plane intersect on a single line, a clear image can be obtained across the entire field of view of the tilted target.

[0003] The detector surface is typically covered by a thin, flat glass plate parallel to it, called the cover glass, which protects the detector. In a Sham optical system, the detector surface is not parallel to the lens principal plane, resulting in a non-zero predetermined angle between the cover glass and the lens principal plane. This tilted cover glass relative to the lens principal plane causes astigmatism and coma, leading to unclear imaging and affecting the imaging quality of the Sham optical system. Summary of the Invention

[0004] This disclosure provides a sensor module, a SAM optical system, and an electronic device to solve the technical problem of astigmatism caused by the light-transmitting cover plate of existing detectors being tilted to the optical axis, which affects the image clarity.

[0005] To solve the above-mentioned technical problems, the present disclosure adopts the following technical solution:

[0006] The first aspect of this disclosure provides a sensor module for use in a SAM optical path, comprising a calibration module and a photosensitive chip arranged sequentially along an optical axis. The calibration module is disposed on the light-incident side of the photosensitive chip. The calibration module includes a light-transmitting cover plate and at least one light-transmitting plate. The light-transmitting cover plate is disposed on the light-incident side of the photosensitive chip, and the at least one light-transmitting plate is disposed on the side of the light-transmitting cover plate opposite to the photosensitive chip. The incident surface and the exit surface of the light-transmitting cover plate are parallel planes, and the incident surface and the exit surface of the at least one light-transmitting plate are parallel planes. At least one of the light-transmitting plates forms a first angle with a first reference plane, the first angle being acute. The first reference plane is perpendicular to the photosensitive surface of the photosensitive chip and parallel to the optical axis. Object-side light is imaged onto the photosensitive chip via the calibration module.

[0007] Compared with the prior art, the sensor module provided by the first aspect of this disclosure has the following advantages:

[0008] The sensor module provided in this disclosure has a calibration module coaxially arranged on the light-incident side of the photosensitive chip. The coaxial arrangement makes it easy to assemble and adjust. The calibration module includes a light-transmitting cover plate and at least one light-transmitting flat plate. Both the light-transmitting cover plate and the light-transmitting flat plate are flat plate structures, which are simple in structure, easy to process, and low in cost. The light-transmitting flat plate forms an acute angle with respect to the first reference plane. Before the light enters the light-transmitting cover plate and the photosensitive chip, it is refracted by the light-transmitting flat plate, thereby reducing the optical path difference between the meridional beam and the sagittal beam in the light, correcting the astigmatism in the SAM optical path, improving the imaging quality and imaging clarity of the photosensitive chip, and thus improving the detection accuracy of the SAM optical system.

[0009] As an improvement to the sensor module described above, the light-transmitting cover is parallel to the photosensitive surface of the photosensitive chip.

[0010] As an improvement to the sensor module disclosed herein, a second angle is formed between the photosensitive chip and the second reference surface; at least one of the light-transmitting flat plates forms a third angle with the second reference surface; the difference between the third angle and the second angle is 5° to 15°; wherein, the second reference surface is perpendicular to the first reference surface and the second reference surface is perpendicular to the optical axis.

[0011] As an improvement to the sensor module disclosed herein, the light-transmitting plate is perpendicular to the third reference plane, and the third reference plane, the second reference plane, and the first reference plane are perpendicular to each other.

[0012] As an improvement to the sensor module described above, the object-side light is imaged onto the photosensitive chip via the correction module, and the difference dv between the meridional component and the sagittal component of the modulation transfer function at 110 lp / mm for each field of view satisfies 0 ≤ dv ≤ 0.15.

[0013] As an improvement to the sensor module described above, multiple light-transmitting flat plates are provided, and the multiple light-transmitting flat plates are arranged sequentially along the optical axis.

[0014] As an improvement to the sensor module described above, the light-transmitting cover and the light-transmitting flat plate are made of the same material and have the same thickness.

[0015] As an improvement to the sensor module described above, the correction module further includes a reflective element, which is coaxially disposed on the light-incident side of the light-transmitting plate; the reflective element forms a set angle with the optical axis before reflection; the correction module and the photosensitive chip are arranged sequentially along the optical axis after reflection.

[0016] A second aspect of this disclosure provides a SAM optical system, comprising a SAM lens and a correction module arranged sequentially from the object side to the image side along the optical axis; the SAM lens includes at least one lens; the correction module includes a light-transmitting cover plate and at least one light-transmitting plate, wherein the SAM lens, the light-transmitting plate, and the light-transmitting cover plate are arranged sequentially from the object side to the image side along the optical axis; the incident surface and the exit surface of the light-transmitting cover plate are parallel planes, and the incident surface and the exit surface of the light-transmitting plate are parallel planes; wherein at least one of the light-transmitting plates forms a first angle with a first reference plane, the first reference plane being perpendicular to the lens principal surface of the SAM lens and parallel to the optical axis of the SAM lens.

[0017] Compared with the prior art, the Sham optical system provided in the second aspect of this disclosure has the following advantages:

[0018] The SAM optical system disclosed herein includes a SAM lens and a correction module arranged sequentially along the optical axis from the object side to the image side. The coaxial arrangement facilitates assembly and adjustment, reducing costs. Object-side light rays pass sequentially through the SAM lens and correction module. After correction by the light-transmitting plate, the optical path difference between the meridional and sagittal beams in the light rays is reduced, thus decreasing the distance between the convergence points of the meridional and sagittal beams. This corrects the astigmatism caused by the light-transmitting cover plate, improving the imaging quality of the SAM optical system and consequently enhancing its detection accuracy. Furthermore, the SAM lens in this embodiment features high resolution, high contrast, and low distortion.

[0019] As an improvement to the SAM optical system disclosed herein, the SAM optical system further includes a photosensitive chip. The SAM lens, the light-transmitting plate, the light-transmitting cover plate, and the photosensitive chip are arranged sequentially from the object side to the image side along the optical axis. Object-side light rays pass sequentially through the SAM lens, the light-transmitting plate, and the light-transmitting cover plate to form an image on the photosensitive chip. The light-transmitting cover plate is parallel to the photosensitive surface of the photosensitive chip.

[0020] As an improvement to the SAM optical system disclosed herein, the light-transmitting cover plate and the photosensitive chip are packaged to form an image sensor; the light-transmitting plate is packaged on the light-emitting side of the SAM lens; or, both the light-transmitting cover plate and the light-transmitting plate are packaged on the light-incident side of the photosensitive chip.

[0021] As an improvement to the SAM optical system disclosed herein, the light-transmitting cover plate forms a second angle between the main lens surface of the SAM lens; at least one of the light-transmitting flat plates forms a third angle between the main lens surface of the SAM lens; the difference between the third angle and the second angle is 5° to 15°.

[0022] As an improvement to the SAM optical system disclosed herein, the object-side light is imaged onto the photosensitive chip via the SAM lens and the correction module, and the difference dv between the meridional and sagittal components of the modulation transfer function at 110 lp / mm for each field of view satisfies 0 ≤ dv ≤ 0.15.

[0023] As an improvement to the SAM optical system disclosed herein, at least one of the light-transmitting plates is perpendicular to a third reference plane; the third reference plane is perpendicular to the main lens surface of the SAM lens, and the third reference plane is perpendicular to the first reference plane.

[0024] As an improvement to the Sham optical system disclosed herein, multiple light-transmitting plates are provided, and the multiple light-transmitting plates are arranged sequentially along the optical axis.

[0025] As an improvement to the SAM optical system disclosed herein, the light-transmitting cover and the light-transmitting flat plate are made of the same material and have the same thickness.

[0026] As an improvement to the Sham optical system disclosed herein, the correction module further includes a reflective element, which is coaxially disposed on the light-incident side of the light-transmitting plate; the reflective element forms a set angle with the optical axis before reflection; and the correction module pieces are arranged sequentially along the optical axis after reflection.

[0027] As an improvement to the SAM optical system disclosed herein, the focal length f of the SAM lens satisfies 40mm≤f≤100mm; the aperture number Fno satisfies F1.2≤Fno≤F6.0; the operating wavelength WL satisfies 385mm≤WL≤700mm; the total optical length TTL of the system satisfies 50mm≤TTL≤140mm; the field of view FOV satisfies 15mm≤FOV≤30mm; and the magnification PMAG satisfies 0.2<PMAG<1.1.

[0028] As an improvement to the SAM optical system disclosed herein, the SAM lens includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, and a tenth lens arranged coaxially from the object side to the image side; an aperture stop is provided between the fifth lens and the sixth lens; the sixth lens and the seventh lens are cemented lenses; wherein, the first lens is a biconvex lens, the second lens is a convex-concave lens, the third lens is a convex-concave lens, the fourth lens is a concave-convex lens, the fifth lens is a convex-concave lens, the sixth lens is a concave-convex lens, the seventh lens is a concave-convex lens, the eighth lens is a concave-convex lens, the ninth lens is a concave-convex lens, and the tenth lens is a biconvex lens.

[0029] As an improvement to the Sham optical system disclosed herein, the first lens, the second lens, the third lens, the fourth lens, and the fifth lens form a first lens group, and the sixth lens, the seventh lens, the eighth lens, the ninth lens, and the tenth lens form a second lens group; the focal length fa of the first lens group satisfies 30mm≤fa≤90mm, the focal length fb of the second lens group satisfies 10mm≤fb≤60mm, the air gap d11 between the first lens group and the second lens group along the optical axis satisfies 3mm≤d11≤16mm, and the air gap d12 between the second lens group and the correction module along the optical axis satisfies 10mm≤d12≤70mm.

[0030] As an improvement to the Sham optical system disclosed herein, the first lens has positive optical power, the second lens has positive optical power, the third lens has positive optical power, the fourth lens has positive optical power, the fifth lens has negative optical power, the sixth lens has negative optical power, the seventh lens has positive optical power, the eighth lens has positive optical power, the ninth lens has positive optical power, and the tenth lens has positive optical power.

[0031] As an improvement to the SAM optical system disclosed herein, the focal length f of the SAM lens satisfies 45mm≤f≤55mm; the aperture number Fno satisfies F1.7≤Fno≤F5.0; the working wavelength WL satisfies 390mm≤WL≤485mm; the total optical length TTL of the system satisfies 90mm≤TTL≤130mm; and the back focal length BFL of the system satisfies 30mm≤BFL≤80mm.

[0032] As an improvement to the SAM optical system disclosed herein, the first lens, the second lens, the third lens, the fourth lens, and the fifth lens form a first lens group, and the sixth lens, the seventh lens, the eighth lens, the ninth lens, and the tenth lens form a second lens group; the focal length fa of the first lens group satisfies 40mm≤fa≤80mm, the focal length fb of the second lens group satisfies 20mm≤fb≤50mm, the air gap d11 between the first lens group and the second lens group along the optical axis satisfies 5mm≤d11≤14mm, and the air gap d12 between the second lens group and the correction module along the optical axis satisfies 20mm≤d12≤60mm.

[0033] As an improvement to the Sham optical system disclosed herein, the focal length f1 of the first lens satisfies 65mm ≤ f1 ≤ 75mm; the focal length f2 of the second lens satisfies 50mm ≤ f2 ≤ 60mm; the focal length f3 of the third lens satisfies 190mm ≤ f3 ≤ 200mm; the focal length f4 of the fourth lens satisfies 590mm ≤ f4 ≤ 600mm; the focal length f5 of the fifth lens satisfies -30mm ≤ f5 ≤ -20mm; the focal length f6 of the sixth lens satisfies -25mm ≤ f6 ≤ -15mm; the focal length f7 of the seventh lens satisfies 60mm ≤ f7 ≤ 70mm; the focal length f8 of the eighth lens satisfies 95mm ≤ f8 ≤ 105mm; the focal length f9 of the ninth lens satisfies 45mm ≤ f9 ≤ 55mm; and the focal length f10 of the tenth lens satisfies 55mm ≤ f10 ≤ 65mm.

[0034] As an improvement to the Sham optical system disclosed herein, the refractive index N1 of the first lens satisfies 1.7 ≤ N1 ≤ 1.8, and the Abbe number V1 satisfies 35 ≤ V1 ≤ 40; the refractive index N2 of the second lens satisfies 1.7 ≤ N2 ≤ 1.8, and the Abbe number V2 satisfies 50 ≤ V2 ≤ 55; the refractive index N3 of the third lens satisfies 1.6 ≤ N3 ≤ 1.7, and the Abbe number V3 satisfies 55 ≤ V3 ≤ 60; the refractive index N4 of the fourth lens satisfies 1.5 ≤ N4 ≤ 1.6, and the Abbe number V4 satisfies 55 ≤ V4 ≤ 60; the refractive index N5 of the fifth lens satisfies 1.8 ≤ N5 ≤ 1.9, and the Abbe number V5 satisfies 2 The refractive index N6 of the sixth lens satisfies 1.8≤N6≤1.9, and the Abbe number V6 satisfies 25≤V6≤30; the refractive index N7 of the seventh lens satisfies 1.4≤N7≤1.5, and the Abbe number V7 satisfies 65≤V7≤70; the refractive index N8 of the eighth lens satisfies 1.7≤N8≤1.8, and the Abbe number V8 satisfies 45≤V8≤50; the refractive index N9 of the ninth lens satisfies 1.7≤N9≤1.8, and the Abbe number V9 satisfies 35≤V9≤40; the refractive index N10 of the tenth lens satisfies 1.7≤N10≤1.8, and the Abbe number V10 satisfies 55≤V10≤60.

[0035] As an improvement to the Sham optical system disclosed herein, the radius of curvature R11 of the incident surface of the first lens satisfies 145mm ≤ R11 ≤ 155mm, and the radius of curvature R12 of the exit surface satisfies -95mm ≤ R12 ≤ -85mm; the radius of curvature R21 of the incident surface of the second lens satisfies 25mm ≤ R21 ≤ 35mm, and the radius of curvature R22 of the exit surface satisfies 80mm ≤ R22 ≤ 90mm; the radius of curvature R31 of the incident surface of the third lens satisfies 3... 0mm≤R31≤40mm, the radius of curvature R32 of the exit surface satisfies 40mm≤R32≤50mm; the radius of curvature R41 of the incident surface of the fourth lens satisfies -45mm≤R41≤-35mm, and the radius of curvature R42 of the exit surface satisfies -45mm≤R42≤-35mm; the radius of curvature R51 of the incident surface of the fifth lens satisfies 90mm≤R51≤100mm, and the radius of curvature R52 of the exit surface satisfies 10mm≤R52≤20mm; The radius of curvature R61 of the incident surface of the sixth lens satisfies -20mm ≤ R61 ≤ -10mm, and the radius of curvature R62 of the exit surface satisfies -230mm ≤ R62 ≤ -220mm; the radius of curvature R71 of the incident surface of the seventh lens satisfies -230mm ≤ R71 ≤ -220mm, and the radius of curvature R72 of the exit surface satisfies -40mm ≤ R72 ≤ -30mm; the radius of curvature R81 of the incident surface of the eighth lens satisfies -40mm ≤ R81 ≤ -30mm. The radius of curvature R82 of the exit surface of the ninth lens satisfies -30mm≤R82≤-20mm; the radius of curvature R91 of the incident surface of the ninth lens satisfies -130mm≤R91≤-120mm, and the radius of curvature R92 of the exit surface satisfies -40mm≤R92≤-30mm; the radius of curvature R101 of the incident surface of the tenth lens satisfies 50mm≤R101≤60mm, and the radius of curvature R12 of the exit surface satisfies -190mm≤R102≤-180mm.

[0036] As an improvement to the Sham optical system disclosed herein, the center thickness GT1 of the first lens satisfies 3mm ≤ GT1 ≤ 6mm; the center thickness GT2 of the second lens satisfies 3mm ≤ GT2 ≤ 6mm; the center thickness GT3 of the third lens satisfies 2mm ≤ GT3 ≤ 5mm; the center thickness GT4 of the fourth lens satisfies 2mm ≤ GT4 ≤ 5mm; the center thickness GT5 of the fifth lens satisfies 2mm ≤ GT5 ≤ 5mm; the center thickness GT6 of the sixth lens satisfies 3mm ≤ GT6 ≤ 6mm; the center thickness GT7 of the seventh lens satisfies 3mm ≤ GT7 ≤ 6mm; the center thickness GT8 of the eighth lens satisfies 3mm ≤ GT8 ≤ 6mm; the center thickness GT9 of the ninth lens satisfies 4mm ≤ GT9 ≤ 7mm; and the center thickness GT10 of the tenth lens satisfies 4mm ≤ GT10 ≤ 7mm.

[0037] As an improvement to the Sham optical system disclosed herein, the air gap distance AT1 between the first lens and the second lens along the optical axis satisfies 0mm ≤ AT1 ≤ 2mm; the air gap distance AT2 between the second lens and the third lens along the optical axis satisfies 0mm ≤ AT2 ≤ 2mm; the air gap distance AT3 between the third lens and the fourth lens along the optical axis satisfies 3mm ≤ AT3 ≤ 5mm; the air gap distance AT4 between the fourth lens and the fifth lens along the optical axis satisfies 0mm ≤ AT4 ≤ 2mm; the air gap distance AT3 between the fifth lens and the aperture stop along the optical axis satisfies 0mm ≤ AT4 ≤ 2mm; The air gap AT5 satisfies 3mm≤AT5≤5mm; the air gap AT6 between the aperture stop and the sixth lens along the optical axis satisfies 5mm≤AT6≤7mm; the sixth lens and the seventh lens are cemented lenses; the air gap AT7 between the seventh lens and the eighth lens along the optical axis satisfies 0mm≤AT7≤2mm; the air gap AT8 between the eighth lens and the ninth lens along the optical axis satisfies 0mm≤AT8≤2mm; the air gap AT9 between the ninth lens and the tenth lens along the optical axis satisfies 0mm≤AT9≤2mm.

[0038] As an improvement to the Sham optical system disclosed herein, the air gap AT5 between the fifth lens and the aperture stop along the optical axis and the air gap AT6 between the aperture stop and the sixth lens along the optical axis satisfy 9mm < AT5 + AT6 < 11mm; and / or, the Abbe number difference between the sixth lens and the seventh lens is greater than 10.

[0039] As an improvement to the SAM optical system disclosed herein, the correction module includes the light-transmitting cover plate, a light-transmitting plate, and a reflective element, the reflective element being coaxially disposed on the light-incident side of the light-transmitting plate; the fourth included angle A4 formed between the light-transmitting cover plate and the optical axis satisfies 30°≤A4≤60°; the first included angle A1 satisfies 30°≤A1≤60°; the fifth included angle formed between the reflective element and the optical axis is 30°≤A5≤60°; and / or, the light-transmitting plate and the main lens surface of the SAM lens form a third included angle A3, and the third included angle A3 satisfies 25°≤A3≤60°; the light-transmitting cover plate and the main lens surface of the SAM lens form a second included angle A2, and the second included angle A2 satisfies 25°≤A2≤60°; and / or, the light-transmitting plate and the main lens surface of the SAM lens form a third included angle A3, and the third included angle A3 satisfies 25°≤A3≤60°; and / or, the light-transmitting plate and the main lens surface of the SAM lens form a third included angle A4, and the second included angle A2 satisfies 25°≤A2≤60°; and / or, the light-transmitting plate and the main lens surface of the SAM lens form a third included angle A4, the first included angle A4 satisfies 30°≤A4≤60°; and / or, the light-transmitting plate and the main lens surface of the SAM lens form a third included angle A4, the second included angle A4 satisfies 25°≤A2 ... The cover plate and the light-transmitting plate are made of the same material. The refractive index N11 of the cover plate and the light-transmitting plate satisfies 1.5≤N11≤1.6, and the Abbe number V11 of the cover plate and the light-transmitting plate satisfies 60≤V11≤65; and / or, the thickness NT1 of the cover plate satisfies 0.3mm≤NT1≤3mm, and the thickness NT2 of the light-transmitting plate satisfies 0.3mm≤NT2≤3mm; and / or, the air gap AT10 between the tenth lens and the reflecting element along the optical axis satisfies 15mm≤AT10≤25mm; the air gap AT11 between the reflecting element and the light-transmitting plate along the optical axis satisfies 10mm≤AT11≤20mm, and the spatial gap AT12 between the light-transmitting plate and the cover plate along the optical axis satisfies 7mm≤AT12≤9mm.

[0040] A third aspect of this disclosure provides an electronic device that includes the sensor module described in the first aspect of this disclosure; or, includes the SAM optical system provided in the second aspect.

[0041] The electronic device of the fourth aspect of this disclosure, since it includes the sensor module described in the first aspect of this disclosure; or, includes the SAM optical system provided in the second aspect, also has the same advantages as the sensor module described in the first aspect, or the SAM optical system described in the second aspect.

[0042] As an improvement to the electronic device described in this disclosure, the electronic device is a 3D camera. Attached Figure Description

[0043] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the accompanying drawings used in the description of the embodiments of this disclosure or the prior art will be briefly introduced below. Obviously, the accompanying drawings described below are only a part of the embodiments of this disclosure. These drawings and text descriptions are not intended to limit the scope of the concept of this disclosure in any way, but to illustrate the concept of this disclosure to those skilled in the art by referring to specific embodiments. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 This is a diagram of the principle of Scham's Law.

[0045] Figure 2 This is a schematic diagram of the structure of the sensor module provided in the embodiments of this disclosure;

[0046] Figure 3 This is a schematic diagram of the sensor module provided in the embodiments of this disclosure in the XZ plane;

[0047] Figure 4 This is a schematic diagram of the sensor module provided in the embodiment of this disclosure in the YZ plane;

[0048] Figure 5 This is a schematic diagram of the optical path of one of the Sham optical systems provided in this embodiment of the disclosure;

[0049] Figure 6 This is a schematic diagram of another Sham optical system provided in an embodiment of the present disclosure;

[0050] Figure 7 Schematic diagram of another Sham optical system provided in this disclosure embodiment Figure 1 ;

[0051] Figure 8 Schematic diagram of another Sham optical system provided in this disclosure embodiment Figure 2 ;

[0052] Figure 9 Field curvature diagram of the Schahm optical system provided in the embodiments of this disclosure;

[0053] Figure 10 Distortion diagram of the Schahm optical system provided in the embodiments of this disclosure;

[0054] Figure 11 MTF curve for the Schahm optical system without a calibration module;

[0055] Figure 12 MTF curve of the Sham optical system provided in the embodiments of this disclosure.

[0056] Explanation of reference numerals in the attached figures:

[0057] 10: Image sensor;

[0058] 20: Correction module; 21: Light-transmitting cover plate; 22: Light-transmitting flat plate; 23: Reflective element;

[0059] 31: First lens group; 32: Second lens group; 33: Aperture stop. Detailed Implementation

[0060] With the iterative updates of measurement technology, visual inspection technology has gradually matured, and 3D visual inspection technology has emerged. This technology uses industrial cameras to capture image information, processes the image information to extract the required information, and realizes the measurement of the three-dimensional surface and depth information of the target being measured.

[0061] In high-precision 3D measurement imaging systems, the limited working distance restricts the depth of field, making it difficult to achieve clear imaging over a large depth range using traditional lenses. A Schahm lens is typically used to address this issue. A Schahm lens is designed for imaging optical paths that conform to the Schahm's Law principle. Its characteristic is that the object plane, the lens principal plane, and the image plane intersect, meaning the detector and the lens principal plane are no longer parallel.

[0062] A Scham optical system is a system that utilizes Scham's law for imaging. Figure 1 According to Schamer's Law, when the extensions of the target plane, the principal plane of the lens, and the detector plane intersect on a single line, a clear image can be formed over the entire field of view of the tilted target. The angle of the optical path must satisfy the following relationship:

[0063] tanα / tanβ=b' / a'

[0064] Where α is the angle between the target plane and the lens optical axis, β is the angle between the detector plane and the lens optical axis; a' is the object distance of point D on the lens optical axis, b' is the image distance of point D on the optical axis, and b' / a' is the magnification of the lens.

[0065] The angle β between the detector plane and the lens optical axis must satisfy the following relationship:

[0066]

[0067] Where f' is the focal length of the lens.

[0068] For ease of installation, the detector surface is typically covered with a thin, parallel flat glass plate, commonly called a cover glass, which protects the detector. In a SAM optical system, the detector surface is not parallel to the lens principal plane, resulting in a non-zero set angle θ between the cover glass and the lens principal plane. This tilted cover glass relative to the lens principal plane causes astigmatism and coma. When the cover glass thickness, refractive index, and optical path aperture angle are constant, astigmatism is proportional to the square of the cosine of the set angle θ, and coma is also proportional to the cosine of the set angle θ. Astigmatism and coma degrade the imaging quality of the SAM optical path and cause significant differences in imaging quality in the meridional and sagittal directions. This results in large contrast differences in different directions, preventing different areas and directions in the image from simultaneously achieving sharpness, leading to unclear imaging and affecting image quality. When the SAM optical system is applied in the field of detection, it affects detection accuracy and efficiency.

[0069] In related technologies, some methods involve removing the cover glass to eliminate astigmatism and coma caused by the cover glass. However, this can lead to dust and other contamination of the detector, affecting its lifespan and making the solution less feasible. Other methods involve placing asymmetric optical elements such as off-axis cylindrical mirrors on the incident light side of the detector. This requires optimized design based on the lens, making it difficult to achieve universality. Asymmetric optical elements are also expensive and require high assembly and adjustment precision.

[0070] In view of this, the present invention adds two flat glass plates along the optical axis of the Sham optical path to correct astigmatism. The two flat glass plates are set at a set angle to the light-incident side of the photosensitive chip, which not only protects the photosensitive chip but also corrects the astigmatism of the Sham optical system.

[0071] In some designs, a flat glass plate close to the photosensitive chip is positioned parallel to the photosensitive chip, while another flat glass plate forms a first angle with a first reference plane. The first reference plane is perpendicular to the photosensitive surface of the photosensitive chip and parallel to the optical axis. With this arrangement, the tilt direction of the other flat glass plate, which differs from that of the photosensitive chip, corrects the astigmatism caused by the flat glass plate parallel to the photosensitive chip, thereby improving image clarity.

[0072] Embodiments of this disclosure are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this disclosure, and should not be construed as limiting this disclosure.

[0073] Example 1

[0074] Combination Figure 2This disclosure provides a sensor module for use in a Sham optical path. The sensor module includes a correction module 20 and a photosensitive chip 10 arranged sequentially along the optical axis from the object side to the image side. The correction module 20 is located on the light-incident side of the photosensitive chip 10, so that the light from the object side is imaged onto the photosensitive chip 10 after being corrected by the correction module 20.

[0075] The correction module 20 includes a light-transmitting cover plate 21 and at least one light-transmitting flat plate 22. The light-transmitting cover plate 21 is disposed on the light-incident side of the photosensitive chip 10, and at least one light-transmitting flat plate 22 is disposed on the side of the light-transmitting cover plate 21 away from the photosensitive chip 10. That is, the light-transmitting flat plate 22, the light-transmitting cover plate 21 and the photosensitive chip 10 are arranged sequentially from the object side to the image side along the optical axis O.

[0076] In this embodiment, the incident surface and the exit surface of the light-transmitting cover plate 21 are parallel planes, and the incident surface and the exit surface of at least one light-transmitting flat plate 22 are parallel planes. It can be understood that both the light-transmitting cover plate 21 and the light-transmitting flat plate 22 are flat and light-transmitting structures. For example, both the light-transmitting cover plate 21 and the light-transmitting flat plate 22 are optical glass, which is low in cost and has high transmittance, stable mechanical properties, and thermal properties.

[0077] Combination Figures 2 to 4 ,in, Figure 3 for Figure 2 The diagram shows the shape formed when viewed from the positive Y-axis direction towards the negative Y-axis direction. Figure 4 for Figure 2 The diagram shows the view formed by looking from the negative X-axis towards the positive X-axis. For ease of description and understanding, an XYZ coordinate system is established; it is assumed that the optical axis O of the Schahm optical path coincides with the Z-axis in the XYZ coordinate system. The principal plane of the Schahm lens in the Schahm optical path is parallel to the XY plane. (See appendix...) Figure 2 In the coordinate system shown, the position of the SAM optical system is moved along the optical axis O so that the principal surface of the lens of the SAM optical system coincides with the XY plane. In the SAM optical path, the photosensitive surface of the photosensitive chip 10 forms an angle with the principal surface of the lens; in the coordinate system, the photosensitive surface of the photosensitive chip 10 is perpendicular to the YZ plane.

[0078] In this embodiment, a first reference plane, a second reference plane, and a third reference plane are defined. The first reference plane is perpendicular to the photosensitive surface of the photosensitive chip 10 and parallel to the optical axis O. In the SAM optical system, the first reference plane is perpendicular to the main lens surface of the SAM lens of the SAM optical system. The second reference plane is perpendicular to the first reference plane and the first reference plane is perpendicular to the optical axis O. The third reference plane is perpendicular to both the first and second reference planes. The intersection of the first, second, and third reference planes is defined as the origin.

[0079] For ease of description, the origins defined by the three reference planes are moved to the origin of the XYZ coordinate system. At this point, the first reference plane coincides with the YZ plane, the second reference plane coincides with the XY plane, and the third reference plane coincides with the XZ plane. Through the above settings, as... Figure 2 As shown, the first reference plane is the YZ plane, the second reference plane is the XY plane, which is the principal plane of the lens in the Schahm optical system; and the third reference plane is the XZ plane. In the following description, the first reference plane, the second reference plane, and the third reference plane will be used consistently.

[0080] Combination Figure 2 and Figure 3 In this embodiment, at least one light-transmitting flat plate 22 forms a first included angle A1 with the first reference plane (i.e., the YZ plane in the attached figure). The first included angle A1 is an acute angle, and the first included angle A1 satisfies 0° < A1 < 90°. It should be noted that in the attached figure... Figure 2 In the diagram, the green dashed line L1 represents the projection of the light-transmitting flat plate 22 onto the XZ plane; the red dashed line L2 represents the projection of the light-transmitting cover plate 21 onto the YZ plane.

[0081] Combination Figure 2 and Figure 4 The photosensitive chip 10 forms a second included angle A2 with the second reference plane, which can also be understood as the photosensitive chip 10 being tilted relative to the X-axis by the second included angle A2. For example, the second included angle A2 satisfies 21° ≤ A2 ≤ 59°. In the prior art, a cover glass plate parallel to the light-incident side of the photosensitive chip 10 is provided, and the cover glass plate forms a second included angle A2 with the second reference plane. Light refraction through the cover glass plate causes astigmatism problems.

[0082] During their research on astigmatism, researchers discovered that when the thickness, refractive index, and aperture angle of the cover glass are constant, astigmatism is directly proportional to the square of the cosine of the second included angle A2. The sign of the second included angle A2 is irrelevant. Therefore, setting a light-transmitting plate 22 with an angle opposite to the second included angle A2—that is, setting the light-transmitting plate 22 to an angle opposite to the X-axis—is meaningless for astigmatism correction.

[0083] Researchers continued their study and set the light-transmitting plate 22 to rotate around the Z-axis and tilt at a preset angle. That is, they set the light-transmitting plate 22 to rotate around the optical axis O and tilt at a preset angle. However, this could not achieve the refraction of all light rays and could not correct astigmatism.

[0084] Therefore, the researchers set the light-transmitting plate 22 to be tilted around the Y-axis, so that the light-transmitting plate 22 and the first reference plane (i.e., the YZ plane in the attached figure) form a first angle A1, which refracts the light and changes the optical path of the meridional beam and the sagittal beam in the light, thereby correcting the astigmatism caused by the light-transmitting cover plate 21 in the SAM optical path and improving the imaging quality of the SAM optical path.

[0085] In some possible implementations, the light-transmitting cover 21 is arranged parallel to the photosensitive surface of the photosensitive chip 10, which not only helps to protect the photosensitive chip 10 but also facilitates assembly; it can also directly utilize existing image sensors, which helps to reduce costs.

[0086] Of course, this is not a limitation on the tilt angle of the light-transmitting cover 21 of the sensor module in this embodiment. The light-transmitting cover 21 may not be parallel to the photosensitive surface of the photosensitive chip 10. For example, the tilt angle of the light-transmitting cover 21 relative to X may be different from the second included angle A2, or the tilt direction of the light-transmitting cover 21 relative to X may be different from the tilt direction of the second included angle A2; for another example, the light-transmitting cover 21 may also be tilted relative to both the X-axis and the Z-axis at the same time.

[0087] Continue to refer to Figure 2 In this embodiment, the photosensitive chip 10 forms a second included angle A2 with the second reference plane (corresponding to the XY plane in the figures), that is, the tilt angle of the photosensitive chip 10 around the X-axis is the second included angle A2. The photosensitive chip 10 is perpendicular to the first reference plane, and the photosensitive chip 10 forms a fourth included angle A4 with the third reference plane (corresponding to the XZ plane in the figures), that is, the photosensitive chip 10 forms a fourth included angle A4 with the optical axis O. The fourth included angle A4 and the second included angle A2 satisfy A2 + A4 = 90°.

[0088] At least one light-transmitting plate 22 forms a third included angle A3 with the second reference plane (corresponding to the XY plane in the attached figure), that is, the light-transmitting plate 22 is tilted around the Y-axis at the third included angle A3; for example, the third included angle A3 satisfies 25°≤A2≤68°. The light-transmitting plate 22 forms a first included angle A1 with the first reference plane (corresponding to the YZ plane in the attached figure), that is, the light-transmitting plate 22 forms a first included angle A1 with the optical axis O. The first included angle A1 and the third included angle A3 satisfy A1+A3=90°. In this embodiment, the light-transmitting plate 22 is perpendicular to the third reference plane (corresponding to the XZ plane in the attached figure). This arrangement facilitates the angle design of the light-transmitting plate 22 and the assembly of the sensor module. Of course, this is not a limitation on the relative position of the light-transmitting plate 22 and the third reference plane; the included angle between the light-transmitting plate 22 and the third reference plane can also be an acute angle.

[0089] In some possible implementations, the difference between the third included angle A3 and the second included angle A2 is 5° to 15°. This setting is beneficial because it allows the object-side light to pass through the light-transmitting plate 22 and the light-transmitting cover plate 21 and then be imaged onto the photosensitive chip 10, which is beneficial to improving the astigmatism correction effect of the Sham optical system.

[0090] In this embodiment of the present disclosure, the light-transmitting plate 22 and the light-transmitting cover plate 21 are not parallel, and an angle is formed between the light-transmitting plate 22 and the light-transmitting cover plate 21, which can range from 21° to 68°.

[0091] In this embodiment, by providing a correction module 20 on the light-incident side of the photosensitive chip 10, object-side light is imaged onto the photosensitive chip 10 via the correction module 20, and the difference dv between the meridional and sagittal components of the modulation transfer function (MTF) at 110 lp / mm for each field of view satisfies 0 ≤ dv ≤ 0.15. Therefore, in the MTF curve, the difference dv between the meridional and sagittal components of the contrast at 110 lp / mm for each field of view satisfies 0 ≤ dv ≤ 0.15, reducing the optical path difference between the meridional and sagittal beams in the light, thereby reducing astigmatism in the Sham optical system and improving the imaging quality of the photosensitive chip 10.

[0092] In the appendix Figure 2 In the sensor module shown, there is one light-transmitting plate 22; however, this is not a limitation on the number of light-transmitting plates 22. In some possible implementations, multiple light-transmitting plates 22 are arranged sequentially along the optical axis O. Depending on the SAM lens in the actual SAM optical path, the number of light-transmitting plates 22, the angle of the first included angle A1, the thickness of the light-transmitting plates 22, the refractive index, and other parameters can be adjusted to reduce the astigmatism of the SAM imaging system, improve the imaging quality of the SAM optical system, and thus improve the detection accuracy of the SAM optical system.

[0093] The material of the light-transmitting flat plate 22 and the light-transmitting cover plate 21 can be the same or different; the thickness of the light-transmitting flat plate 22 and the thickness of the light-transmitting cover plate 21 can be the same or different. In some possible embodiments, the light-transmitting flat plate 22 and the light-transmitting cover plate 21 are made of the same material and have the same thickness. This arrangement facilitates the design of the angle of the light-transmitting cover plate 21, is easy to process, and helps to reduce costs. For example, the thickness of both the light-transmitting flat plate 22 and the light-transmitting cover plate 21 is 1.1 mm, and the thickness range of the light-transmitting flat plate 22 and the light-transmitting cover plate 21 can be 0.3 mm to 3 mm.

[0094] Combination Figure 6 In some implementations of the sensor module, the calibration module 20 also includes a reflective element 23. The reflective element 23 is coaxially disposed on the light-incident side of the light-transmitting plate 22. The reflective element 23 forms a set angle with the optical axis O before reflection, so that the light changes direction under the reflection of the reflective element 23.

[0095] The correction module 20 and the photosensitive chip 10 are arranged sequentially along the reflected optical axis O. After being reflected by the reflective element 23, the object-side light is imaged onto the photosensitive chip 10 via the light-transmitting plate 22 and the light-transmitting cover plate 21. In this embodiment, by setting the reflective element 23, the light is refracted, which helps to reduce the length of the SAM optical system and thus reduce the volume of the SAM optical system.

[0096] The reflective element 23 in this embodiment can be a reflector, such as a reflector with a single-sided reflective coating or a reflector with a double-sided reflective coating.

[0097] It should be noted that the sensor module provided in Embodiment 1 of this disclosure can be applied to any SAM lens to form a SAM optical system, and can play the role of correcting astigmatism.

[0098] It should also be noted that, in the appendix Figures 2 to 4 In the middle, the light-transmitting flat plate 22, the light-transmitting cover plate 21, and the photosensitive chip 10 are all rectangular, with attached... Figure 7 The light-transmitting plate 22 shown is a circular plate, but this is not a limitation on the shape of the light-transmitting plate 22, the light-transmitting cover plate 21, and the photosensitive chip 10.

[0099] Example 2

[0100] Reference Figures 5 to 8 This disclosure provides a Sham optical system. It should be noted that, in... Figures 5 to 8 The accompanying drawings only illustrate the position of the correction module 20 on the optical axis, and do not represent the tilt angle of the correction module 20.

[0101] The Sham optical system of this disclosure includes a Sham lens and a correction module 20 arranged sequentially from the object side to the image side along the optical axis. The Sham lens includes at least one lens. The structure, function, and effect of the correction module 20 are the same as those in Embodiment 1 above, and can be referred to the above embodiments for details, which will not be repeated here.

[0102] The SAM optical system of this embodiment further includes a photosensitive chip 10. A SAM lens, a light-transmitting plate 22, a light-transmitting cover plate 21, and the photosensitive chip 10 are arranged sequentially from the object side to the image side along the optical axis O. Object-side light rays sequentially pass through the SAM lens, the light-transmitting plate 22, and the light-transmitting cover plate 21 to form an image on the photosensitive chip 10. After passing through the SAM lens, the object-side light rays are adjusted by the light-transmitting plate 22, reducing the optical path difference between the meridional and sagittal beams, correcting the astigmatism caused by the light-transmitting cover plate 21, improving the imaging quality of the SAM optical system, and thus improving the detection accuracy of the SAM optical system.

[0103] Combination Figure 5 The Sham optical system shown includes a correction module 20 comprising a light-transmitting cover plate 21 and a light-transmitting flat plate 22; combined with Figures 6 to 8 The Sham optical system shown includes a correction module 20 comprising a reflective element 23, a light-transmitting cover plate 21, and a light-transmitting flat plate 22.

[0104] In some embodiments, the light-transmitting cover plate 21 of the correction module 20 can be packaged with the photosensitive chip 10 to form an image sensor, and the light-transmitting plate 22 is packaged on the light-emitting side of the SAM lens. In this case, the light-transmitting cover plate 21 is arranged parallel to the photosensitive chip 10, which not only facilitates the packaging of the light-transmitting cover plate 21, but also allows the use of existing image sensors, thus helping to reduce costs.

[0105] In other embodiments, the light-transmitting cover plate 21 and the light-transmitting flat plate 22 of the correction module 20 are both encapsulated on the light-incident side of the photosensitive chip 10. This arrangement of the adjustment-free Sham lens helps to improve the applicability of the correction module.

[0106] The Sham lens of this disclosure includes a first lens group 31 and a second lens group 32 arranged sequentially along the optical axis O from the object side to the image side. The first lens group 31 and the second lens group 32 each include at least one lens. Both the first lens group 31 and the second lens group 32 can be composed of lenses with different positive and negative optical powers; both can be composed of a single lens, a cemented lens, or a combination of a single lens and a cemented lens; and both can be composed of a spherical lens, an aspherical lens, or a combination of spherical and aspherical lenses.

[0107] The Sham lens of this disclosure has the following characteristics: focal length f satisfies 40mm≤f≤100mm; aperture number Fno satisfies F1.2≤Fno≤F6.0; working wavelength WL satisfies 385mm≤WL≤700mm; total optical length TTL of the system satisfies 50mm≤TTL≤140mm; and field of view FOV satisfies 15mm≤FOV≤30mm.

[0108] The target surface size IMG of the photosensitive chip 10 in this embodiment satisfies 8mm≤IMG≤25mm, and the fourth included angle A4 between the photosensitive chip 10 and the optical axis O satisfies 20°≤A4≤70°.

[0109] In some embodiments, the first lens group 31 includes five spherical lenses, and the second lens group 32 includes five spherical lenses. The focal length fa of the first lens group satisfies 30mm≤fa≤90mm, the focal length fb of the second lens group satisfies 10mm≤fb≤60mm, the air gap d11 between the first and second lens groups along the optical axis satisfies 3mm≤d11≤16mm, and the air gap d12 between the second lens group and the correction module along the optical axis satisfies 10mm≤d12≤70mm.

[0110] Combination Figures 5 to 8The SAM lens of this embodiment includes a first lens G1, a second lens G2, a third lens G3, a fourth lens G4, a fifth lens G5, a sixth lens G6, a seventh lens G7, an eighth lens G8, a ninth lens G9, and a tenth lens G10 arranged coaxially from the object side to the image side; the first lens G1 is the lens closest to the object side, and the tenth lens G10 is the lens closest to the image side. An aperture stop 33 is provided between the fifth lens G5 and the sixth lens G6; the sixth lens G6 and the seventh lens G7 are cemented lenses, and the sixth lens G6 and the seventh lens G7 are composed of materials with different Abbe numbers and refractive indices, and the difference in Abbe number between the sixth lens G6 and the seventh lens G7 is greater than 10; the first lens G1, the second lens G2, the third lens G3, the fourth lens G4, and the fifth lens G5 form the first lens group G1 31, and the sixth lens G6, the seventh lens G7, the eighth lens G8, the ninth lens G9, and the tenth lens G10 form the second lens group G2 32.

[0111] Among them, the first lens G1 is a biconvex lens, the second lens G2 is a convex-concave lens, the third lens G3 is a convex-concave lens, the fourth lens G4 is a concave-convex lens, the fifth lens G5 is a convex-concave lens, the sixth lens G6 is a concave-convex lens, the seventh lens G7 is a concave-convex lens, the eighth lens G8 is a concave-convex lens, the ninth lens G9 is a concave-convex lens, and the tenth lens G10 is a biconvex lens.

[0112] The first lens G1 has positive optical power, the second lens G2 has positive optical power, the third lens G3 has positive optical power, the fourth lens G4 has positive optical power, the fifth lens G5 has negative optical power, the sixth lens G6 has negative optical power, the seventh lens G7 has positive optical power, the eighth lens G8 has positive optical power, the ninth lens G9 has positive optical power, and the tenth lens G10 has positive optical power.

[0113] With the above configuration, the first lens G1, the second lens G2, and the third lens G3 have positive optical power, which can effectively reduce the aperture while converging the light beam, thereby reducing the size and volume of the optical system; the fourth lens G4 has positive optical power and the fifth lens G5 has negative optical power. The two lenses are used together to quickly achieve small-angle deflection of the light, allowing the light to enter the aperture stop 33 at a small angle; the sixth lens G6 and the seventh lens G7 are cemented lenses with negative optical power, which can diverge the light passing through the aperture stop, allowing the light to pass smoothly through subsequent lenses; the eighth lens G8, the ninth lens G9, and the tenth lens G10 all have positive optical power. Each lens bears a portion of the optical power, which can converge the light while reducing the light deflection angle, thus reducing aberrations caused by excessive light deflection angle.

[0114] The different components of the Sham optical system in this disclosure have different functional characteristics, which can effectively balance various aberrations and enable the system to achieve better imaging quality.

[0115] The number of lenses before and after the aperture stop 33 of the Sham lens in this embodiment is the same, and their shapes are approximately symmetrical. By utilizing the approximately symmetrical structure, the imaging quality of the optical system can be effectively improved, and the optical distortion and astigmatism of the optical system can be effectively reduced, thereby improving the imaging quality.

[0116] In this embodiment, all lenses, light-transmitting plates 22, and light-transmitting covers 21 can be colorless optical glass or optical plastic. Optical plastic is low-cost, easy to process into aspherical surfaces, and lightweight during mass production. Optical glass has stable mechanical and thermal properties, and chromatic aberration can be eliminated and image quality improved by combining different refractive indices and Abbe numbers. Industrial robots are used in diverse environments and require high environmental temperature stability. Optical glass has high transmittance, stable mechanical and thermal properties, and can be combined with different refractive indices and Abbe numbers to eliminate chromatic aberration and improve image quality. Therefore, all lenses, light-transmitting plates 22, and light-transmitting covers 21 in this embodiment are made of optical glass.

[0117] The parameters of the Sham lens in this embodiment can be found in Table 1.

[0118] Table 1

[0119]

[0120] Wherein, the axial spacing is the air gap along the optical axis; the diameter of the lens group is the maximum outer diameter of the lens in the lens group. In the table above, the range indicated by "~" includes the endpoint values.

[0121] In some specific embodiments, the SAM lens has the following characteristics: focal length f satisfies 45mm≤f≤55mm; aperture number Fno satisfies F1.7≤Fno≤F5.0; working wavelength WL satisfies 390mm≤WL≤485mm; total optical length TTL of the system satisfies 90mm≤TTL≤130mm; and system back focal length BFL satisfies 30mm≤BFL≤80mm.

[0122] The target surface size (IMG) of the photosensitive chip 10 satisfies 8mm ≤ IMG ≤ 11mm. In this embodiment, the correction module 20 includes a light-transmitting plate 22, a light-transmitting cover plate 21, and a reflective element 23, which is coaxially disposed on the light-incident side of the light-transmitting plate 22. The reflective element 23 can effectively reduce the size of the optical system, achieving system miniaturization. The light-transmitting plate 22 can significantly improve the astigmatism caused by the light-transmitting cover plate 21, thereby improving the system's imaging quality.

[0123] The angle A5 between the reflective element 23 and the optical axis O satisfies 30°≤A5≤60°, and the angle A6 between the incident surface and the exit surface of the reflective element 23 is 30°~60°.

[0124] The second included angle A2 of the light-transmitting cover plate 21 tilting around the X-axis, that is, the second included angle A2 between the light-transmitting cover plate 21 and the main surface of the lens, satisfies 25°≤A2≤60°; the third included angle A3 of the light-transmitting plate 22 tilting around the Y-axis, that is, the third included angle A3 between the light-transmitting plate 22 and the main surface of the lens, satisfies 25°≤A3≤60°.

[0125] The first angle A1 between the light-transmitting plate 22 and the optical axis O satisfies 30°≤A1≤60°, and the fourth angle A4 between the light-transmitting cover plate 21 and the optical axis O satisfies 30°≤A4≤60°.

[0126] The total optical length (TTL) of the SAM optical system and the target surface size (IMG) of the photosensitive chip 10 satisfy 8 < TTL / IMG < 16.

[0127] The focal length fa of the first lens group G1 satisfies 40mm≤fa≤80mm, the focal length fb of the second lens group G2 satisfies 20mm≤fb≤50mm, the air gap d11 between the first lens group G1 and the second lens group G2 along the optical axis satisfies 5mm≤d11≤14mm, and the air gap d12 between the second lens group G2 and the correction module along the optical axis satisfies 20mm≤d12≤60mm.

[0128] The focal length f1 of the first lens G1 satisfies 65mm≤f1≤75mm; the focal length f2 of the second lens G2 satisfies 50mm≤f2≤60mm; the focal length f3 of the third lens G3 satisfies 190mm≤f3≤200mm; the focal length f4 of the fourth lens G4 satisfies 590mm≤f4≤600mm; the focal length f5 of the fifth lens G5 satisfies -30mm≤f5≤-20mm; the focal length f6 of the sixth lens G6 satisfies -25mm≤f6≤-15mm; the focal length f7 of the seventh lens G7 satisfies 60mm≤f7≤70mm; the focal length f8 of the eighth lens G8 satisfies 95mm≤f8≤105mm; the focal length f9 of the ninth lens G9 satisfies 45mm≤f9≤55mm; and the focal length f10 of the tenth lens G10 satisfies 55mm≤f10≤65mm.

[0129] The optical material parameters of each lens are as follows: For the first lens G1, the refractive index N1 satisfies 1.7 ≤ N1 ≤ 1.8, and the Abbe number V1 satisfies 35 ≤ V1 ≤ 40; for the second lens G2, the refractive index N2 satisfies 1.7 ≤ N2 ≤ 1.8, and the Abbe number V2 satisfies 50 ≤ V2 ≤ 55; for the third lens G3, the refractive index N3 satisfies 1.6 ≤ N3 ≤ 1.7, and the Abbe number V3 satisfies 55 ≤ V3 ≤ 60; for the fourth lens G4, the refractive index N4 satisfies 1.5 ≤ N4 ≤ 1.6, and the Abbe number V4 satisfies 55 ≤ V4 ≤ 60; for the fifth lens G5, the refractive index N5 satisfies 1.8 ≤ N5 ≤ 1.9, and the Abbe number V5 satisfies 25 ≤ V1 ≤ 40. The refractive index N6 of the sixth lens G6 satisfies 1.8≤N6≤1.9, and the Abbe number V6 satisfies 25≤V6≤30; the refractive index N7 of the seventh lens G7 satisfies 1.4≤N7≤1.5, and the Abbe number V7 satisfies 65≤V7≤70; the refractive index N8 of the eighth lens G8 satisfies 1.7≤N8≤1.8, and the Abbe number V8 satisfies 45≤V8≤50; the refractive index N9 of the ninth lens G9 satisfies 1.7≤N9≤1.8, and the Abbe number V9 satisfies 35≤V9≤40; the refractive index N10 of the tenth lens G10 satisfies 1.7≤N10≤1.8, and the Abbe number V10 satisfies 55≤V10≤60.

[0130] The light-transmitting cover plate and the light-transmitting plate are made of the same material. The refractive index N11 of the light-transmitting cover plate and the light-transmitting plate satisfies 1.5≤N11≤1.6, and the Abbe number V11 of the light-transmitting cover plate and the light-transmitting plate satisfies 60≤V11≤65.

[0131] The thickness of the light-transmitting cover plate NT1 satisfies 0.3mm≤NT1≤3mm, and the thickness of the light-transmitting flat plate NT2 satisfies 0.3mm≤NT2≤3mm.

[0132] The curvature radii of curvature parameters of each lens are as follows: The object-facing side of each lens is the incident surface, and the image-facing side is the exit surface. For the first lens G1, the incident surface radius of curvature R11 satisfies 145mm ≤ R11 ≤ 155mm, and the exit surface radius of curvature R12 satisfies -95mm ≤ R12 ≤ -85mm; for the second lens G2, the incident surface radius of curvature R21 satisfies 25mm ≤ R21 ≤ 35mm, and the exit surface radius of curvature R22 satisfies 80mm ≤ R22 ≤ 90mm; for the third lens G3, the incident surface radius of curvature R31 satisfies 30mm ≤ R31 ≤ 40mm, and the exit surface radius of curvature R12 satisfies -95mm ≤ R12 ≤ -85mm. The radius of curvature R32 of the incident surface of the fourth lens G4 satisfies 40mm ≤ R32 ≤ 50mm; the radius of curvature R41 of the incident surface of the fifth lens G5 satisfies -45mm ≤ R41 ≤ -35mm, and the radius of curvature R42 of the exit surface satisfies -45mm ≤ R42 ≤ -35mm; the radius of curvature R51 of the incident surface of the fifth lens G5 satisfies 90mm ≤ R51 ≤ 100mm, and the radius of curvature R52 of the exit surface satisfies 10mm ≤ R52 ≤ 20mm; the radius of curvature R52 of the incident surface of the sixth lens G6 satisfies 40mm ≤ R32 ≤ 50mm. The radius of curvature R61 of the incident surface of the seventh lens G7 satisfies -20mm≤R61≤-10mm, and the radius of curvature R62 of the exit surface satisfies -230mm≤R62≤-220mm; the radius of curvature R71 of the incident surface of the eighth lens G8 satisfies -230mm≤R71≤-220mm, and the radius of curvature R72 of the exit surface satisfies -40mm≤R72≤-30mm; the radius of curvature R81 of the incident surface of the eighth lens G8 satisfies -40mm≤R81≤-30mm, and the radius of curvature R61 of the exit surface satisfies -230mm≤R61≤-220mm, and the radius of curvature R72 of the exit surface satisfies -40mm≤R72≤-30mm. The radius of curvature R82 of the incident surface of the ninth lens G9 satisfies -30mm≤R82≤-20mm; the radius of curvature R91 of the incident surface of the ninth lens G9 satisfies -130mm≤R91≤-120mm, and the radius of curvature R92 of the exit surface satisfies -40mm≤R92≤-30mm; the radius of curvature R101 of the incident surface of the tenth lens G10 satisfies 50mm≤R101≤60mm, and the radius of curvature R12 of the exit surface satisfies -190mm≤R102≤-180mm.

[0133] The center thicknesses of each lens are as follows: where the center thickness is the thickness of the lens along the optical axis. The center thickness GT1 of the first lens G1 satisfies 3mm ≤ GT1 ≤ 6mm; the center thickness GT2 of the second lens G2 satisfies 3mm ≤ GT2 ≤ 6mm; the center thickness GT3 of the third lens G3 satisfies 2mm ≤ GT3 ≤ 5mm; the center thickness GT4 of the fourth lens G4 satisfies 2mm ≤ GT4 ≤ 5mm; the center thickness GT5 of the fifth lens G5 satisfies 2mm ≤ GT5 ≤ 5mm; the center thickness GT6 of the sixth lens G6 satisfies 3mm ≤ GT6 ≤ 6mm; the center thickness GT7 of the seventh lens G7 satisfies 3mm ≤ GT7 ≤ 6mm; the center thickness GT8 of the eighth lens G8 satisfies 3mm ≤ GT8 ≤ 6mm; the center thickness GT9 of the ninth lens G9 satisfies 4mm ≤ GT9 ≤ 7mm; and the center thickness GT10 of the tenth lens G10 satisfies 4mm ≤ GT10 ≤ 7mm.

[0134] The air gap AT1 between the first lens G1 and the second lens G2 along the optical axis satisfies 0mm ≤ AT1 ≤ 2mm; the air gap AT2 between the second lens G2 and the third lens G3 along the optical axis satisfies 0mm ≤ AT2 ≤ 2mm; the air gap AT3 between the third lens G3 and the fourth lens G4 along the optical axis satisfies 3mm ≤ AT3 ≤ 5mm; the air gap AT4 between the fourth lens G4 and the fifth lens G5 along the optical axis satisfies 0mm ≤ AT4 ≤ 2mm; the air gap AT5 between the fifth lens G5 and the aperture stop 33 along the optical axis satisfies 3mm. m≤AT5≤5mm; the air gap AT6 between aperture stop 33 and sixth lens G6 along the optical axis satisfies 5mm≤AT6≤7mm; sixth lens G6 and seventh lens G7 are cemented lenses; the air gap AT7 between seventh lens G7 and eighth lens G8 along the optical axis satisfies 0mm≤AT7≤2mm; the air gap AT8 between eighth lens G8 and ninth lens G9 along the optical axis satisfies 0mm≤AT8≤2mm; the air gap AT9 between ninth lens G9 and tenth lens G10 along the optical axis satisfies 0mm≤AT9≤2mm. The air gap BFL between tenth lens G10 and the image plane of photosensitive chip 10 along the optical axis satisfies 45mm≤BFL≤55mm.

[0135] The air gap AT10 between the tenth lens G10 and the reflective element 23 along the optical axis satisfies 15mm≤AT10≤25mm; the air gap AT11 between the reflective element 23 and the light-transmitting plate 22 along the optical axis satisfies 10mm≤AT11≤20mm; the air gap AT12 between the light-transmitting plate 22 and the light-transmitting cover plate 21 along the optical axis satisfies 7mm≤AT12≤9mm; and the air gap AT13 between the light-transmitting cover plate 21 and the photosensitive surface of the photosensitive chip 10 along the optical axis satisfies 0mm≤AT13≤2mm.

[0136] The air gap AT5 between the fifth lens G5 and the aperture stop along the optical axis and the air gap AT6 between the aperture stop and the sixth lens G6 along the optical axis satisfy 9mm < AT5 + AT6 < 11mm.

[0137] The air gap BFL between the image plane of the tenth lens G10 and the photosensitive chip 10 along the optical axis satisfies 0.4 < BFL / TTL < 0.9 with respect to the total optical length TTL of the system.

[0138] Combination Figures 5 to 8 While ensuring the size and volume of the lens optical path, the SAM lens of this disclosure has the characteristics of miniaturization, and each lens and correction module has good manufacturability.

[0139] Figure 9 and Figure 10 Field curvature and distortion diagrams of the Schahm optical system according to embodiments of this disclosure are shown respectively. In the field curvature diagram, the vertical axis represents the field of view, and the horizontal axis represents the astigmatism value, with units in millimeters. Solid and dashed lines represent the meridional and sagittal components of the field curvature at different wavelengths within the operating band. The solid line represents the field curvature and astigmatism value of the meridional beam on the meridional plane, and the plane formed by the principal ray of the off-axis object point and the optical axis is called the meridional plane. The dashed line represents the field curvature and astigmatism value of the sagittal beam on the sagittal plane, and the plane passing through the off-axis object point and perpendicular to the meridional plane is called the sagittal plane. The Schahm optical system of this disclosure has a field curvature value of less than 0.05 mm across the entire field of view, exhibiting excellent astigmatism correction capability.

[0140] In the distortion diagram, the vertical axis represents the field of view, and the horizontal axis represents the distortion value. The optical distortion of the SAM optical system disclosed in this invention is linear distortion, and the distortion value is less than 3%. Linear distortion can ensure that the entire imaging image can be well processed, increasing the accuracy of subsequent detection.

[0141] Figure 11 The MTF curve of the Schahm optical system without a correction module is shown. Figure 12 The MTF curve of the Schahm optical system with a correction module is shown. In the MTF curve, the horizontal axis represents spatial frequency in line pairs per millimeter (lp / mm), and the vertical axis represents contrast in the range of 0-1. Solid and dashed lines represent the meridional and sagittal components of the MTF at different fields of view. The solid line represents the contrast component of the meridional beam on the meridional plane, and the plane formed by the principal ray from the off-axis object point and the optical axis is called the meridional plane. The dashed line represents the contrast component of the sagittal beam on the sagittal plane, and the plane passing through the off-axis object point and perpendicular to the meridional plane is called the sagittal plane. (See attached diagram.) Figure 11 It can be seen that the Schahm optical system without a correction module exhibits significant astigmatism across its entire field of view, with large intervals between solid and dashed lines, and substantial differences in imaging quality between the meridional and sagittal directions; combined with Figure 12After setting the correction module 20 in the Sham optical system, the interval between solid and dashed lines is reduced, and the contrast of each MTF value at 110 lp / mm is greater than 0.3. It can be seen that the Sham optical system has high resolution and contrast after setting the correction module 20.

[0142] In summary, the SAM optical system of this disclosure has the characteristics of high resolution and high contrast, as well as low distortion and low astigmatism, and has good astigmatism correction capability compared with similar SAM lenses currently used in industry.

[0143] Example 3

[0144] This disclosure also provides an electronic device that includes a sensor module of Embodiment 1, or a Sham optical system of Embodiment 2.

[0145] In some embodiments, the electronic device is a 3D camera. Line laser profilometry is a technique that uses a laser source to emit a line laser and illuminate the surface of the target to be measured. The 3D camera determines the contour of the target surface by obtaining the laser reflected back from the target surface. It has the advantages of high accuracy, high speed, and high stability.

[0146] The sensor module or SAM optical system provided in this embodiment has the same structure, function, and effect as the above embodiments, and can be referred to the above embodiments for details, which will not be repeated here. The electronic device of this disclosure embodiment has the same advantages as the above sensor module and SAM optical system, which will not be repeated here.

[0147] In the above description, the use of terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refers to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of this disclosure. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0148] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this disclosure, and are not intended to limit them. Although this disclosure has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this disclosure.

Claims

1. A sensor module applied to a SAM optical path, characterized in that, It includes a correction module and a photosensitive chip arranged sequentially along the optical axis, wherein the correction module is disposed on the light-incident side of the photosensitive chip; The correction module includes a light-transmitting cover plate and at least one light-transmitting flat plate. The light-transmitting cover plate is disposed on the light-incident side of the photosensitive chip, and the at least one light-transmitting flat plate is disposed on the side of the light-transmitting cover plate away from the photosensitive chip. The incident surface and the exit surface of the light-transmitting cover plate are parallel planes, and the incident surface and the exit surface of the at least one light-transmitting flat plate are parallel planes. At least one of the light-transmitting flat plates forms a first angle with the first reference plane, the first angle being an acute angle; the first reference plane is perpendicular to the photosensitive surface of the photosensitive chip and parallel to the optical axis; The object-side light is imaged onto the photosensitive chip via the correction module; The light-transmitting cover is parallel to the photosensitive surface of the photosensitive chip; A second angle is formed between the photosensitive chip and the second reference surface; at least one of the light-transmitting plates forms a third angle with the second reference surface; the difference between the third angle and the second angle is 5° to 15°; wherein, the second reference surface is perpendicular to the first reference surface and the second reference surface is perpendicular to the optical axis; The light-transmitting cover and the light-transmitting flat plate are made of the same material and have the same thickness.

2. The sensor module according to claim 1, characterized in that, The light-transmitting flat plate is perpendicular to the third reference plane, and the third reference plane, the second reference plane, and the first reference plane are all perpendicular to each other.

3. The sensor module according to claim 1, characterized in that, The object-side light rays are imaged onto the photosensitive chip via the correction module, and the difference dv between the meridional and sagittal components of the modulation transfer function at 110 lp / mm for each field of view satisfies 0 ≤ dv ≤ 0.

15.

4. The sensor module according to any one of claims 1-3, characterized in that, Multiple light-transmitting flat plates are provided, and the multiple light-transmitting flat plates are arranged sequentially along the optical axis.

5. The sensor module according to any one of claims 1-3, characterized in that, The correction module also includes a reflective element, which is coaxially disposed on the light-incident side of the light-transmitting plate; the reflective element forms a set angle with the optical axis before reflection; The correction module and the photosensitive chip are arranged sequentially along the reflected optical axis.

6. A Schamm optical system, characterized in that, This includes a SAM lens and a correction module arranged sequentially from the object side to the image side along the optical axis. The SAM lens includes at least one lens; the correction module includes a light-transmitting cover plate and at least one light-transmitting plate, wherein the SAM lens, the light-transmitting plate and the light-transmitting cover plate are arranged sequentially from the object side to the image side along the optical axis; the incident surface and the exit surface of the light-transmitting cover plate are parallel planes, and the incident surface and the exit surface of the light-transmitting plate are parallel planes. At least one of the light-transmitting flat plates forms a first angle with the first reference plane, the first reference plane being perpendicular to the main lens surface of the SAM lens and parallel to the optical axis of the SAM lens. The SAM optical system further includes a photosensitive chip. The SAM lens, the light-transmitting plate, the light-transmitting cover plate, and the photosensitive chip are arranged sequentially from the object side to the image side along the optical axis. The object-side light rays pass sequentially through the SAM lens, the light-transmitting plate, and the light-transmitting cover plate and are imaged onto the photosensitive chip. The light-transmitting cover is parallel to the photosensitive surface of the photosensitive chip; The light-transmitting cover plate forms a second angle with the main lens surface of the SAM lens; at least one light-transmitting flat plate forms a third angle with the main lens surface of the SAM lens; the difference between the third angle and the second angle is 5° to 15°. The light-transmitting cover and the light-transmitting flat plate are made of the same material and have the same thickness.

7. The Schamm optical system according to claim 6, characterized in that, The light-transmitting cover and the photosensitive chip are packaged to form an image sensor; the light-transmitting flat plate is packaged on the light-emitting side of the Sham lens; or... Both the light-transmitting cover and the light-transmitting flat plate are encapsulated on the light-incident side of the photosensitive chip.

8. The Schamm optical system according to claim 6, characterized in that, The object-side light rays are imaged onto the photosensitive chip via the Sham lens and the correction module, and the difference dv between the meridional component and the sagittal component of the modulation transfer function at 110 lp / mm for each field of view satisfies 0 ≤ dv ≤ 0.

15.

9. The Schamm optical system according to claim 6, characterized in that, At least one of the light-transmitting flat plates is perpendicular to the third reference plane; the third reference plane is perpendicular to the main lens surface of the Sham lens, and the third reference plane is perpendicular to the first reference plane.

10. The Schamm optical system according to claim 6, characterized in that, Multiple light-transmitting flat plates are provided, and the multiple light-transmitting flat plates are arranged sequentially along the optical axis.

11. The Schamm optical system according to claim 6, characterized in that, The correction module also includes a reflective element, which is coaxially disposed on the light-incident side of the light-transmitting plate; the reflective element forms a set angle with the optical axis before reflection; The correction module chips are arranged sequentially along the reflected optical axis.

12. The Schamm optical system according to any one of claims 6-11, characterized in that, The focal length f of the SAM lens satisfies 40mm≤f≤100mm; the aperture number Fno satisfies F1.2≤Fno≤F6.0; the working wavelength WL satisfies 385mm≤WL≤700mm; the total optical length TTL of the system satisfies 50mm≤TTL≤140mm; the field of view FOV satisfies 15mm≤FOV≤30mm; and the magnification PMAG satisfies 0.2<PMAG<1.

1.

13. The Schamm optical system according to claim 12, characterized in that, The SAM lens includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, and a tenth lens arranged coaxially from the object side to the image side; an aperture stop is provided between the fifth lens and the sixth lens; the sixth lens and the seventh lens are cemented lenses; Wherein, the first lens is a biconvex lens, the second lens is a convex-concave lens, the third lens is a convex-concave lens, the fourth lens is a concave-convex lens, the fifth lens is a convex-concave lens, the sixth lens is a concave-convex lens, the seventh lens is a concave-convex lens, the eighth lens is a concave-convex lens, the ninth lens is a concave-convex lens, and the tenth lens is a biconvex lens.

14. The Schamm optical system according to claim 13, characterized in that, The first lens, the second lens, the third lens, the fourth lens, and the fifth lens form a first lens group, and the sixth lens, the seventh lens, the eighth lens, the ninth lens, and the tenth lens form a second lens group; The focal length fa of the first lens group satisfies 30mm≤fa≤90mm, the focal length fb of the second lens group satisfies 10mm≤fb≤60mm, the air gap d11 between the first lens group and the second lens group along the optical axis satisfies 3mm≤d11≤16mm, and the air gap d12 between the second lens group and the correction module along the optical axis satisfies 10mm≤d12≤70mm.

15. The Schamm optical system according to claim 13, characterized in that, The first lens has positive optical power, the second lens has positive optical power, the third lens has positive optical power, the fourth lens has positive optical power, the fifth lens has negative optical power, the sixth lens has negative optical power, the seventh lens has positive optical power, the eighth lens has positive optical power, the ninth lens has positive optical power, and the tenth lens has positive optical power.

16. The Schamm optical system according to claim 13, characterized in that, The focal length f of the Sham lens satisfies 45mm≤f≤55mm; the aperture number Fno satisfies F1.7≤Fno≤F5.0; the working wavelength WL satisfies 390mm≤WL≤485mm; the total optical length TTL of the system satisfies 90mm≤TTL≤130mm; and the back focal length BFL of the system satisfies 30mm≤BFL≤80mm.

17. The Schamm optical system according to claim 16, characterized in that, The first lens, the second lens, the third lens, the fourth lens, and the fifth lens form a first lens group, and the sixth lens, the seventh lens, the eighth lens, the ninth lens, and the tenth lens form a second lens group; The focal length fa of the first lens group satisfies 40mm≤fa≤80mm, the focal length fb of the second lens group satisfies 20mm≤fb≤50mm, the air gap d11 between the first lens group and the second lens group along the optical axis satisfies 5mm≤d11≤14mm, and the air gap d12 between the second lens group and the correction module along the optical axis satisfies 20mm≤d12≤60mm.

18. The Schamm optical system according to claim 16, characterized in that, The focal length f1 of the first lens satisfies 65mm≤f1≤75mm; the focal length f2 of the second lens satisfies 50mm≤f2≤60mm; the focal length f3 of the third lens satisfies 190mm≤f3≤200mm; the focal length f4 of the fourth lens satisfies 590mm≤f4≤600mm; the focal length f5 of the fifth lens satisfies -30mm≤f5≤-20mm; the focal length f6 of the sixth lens satisfies -25mm≤f6≤-15mm; the focal length f7 of the seventh lens satisfies 60mm≤f7≤70mm; the focal length f8 of the eighth lens satisfies 95mm≤f8≤105mm; the focal length f9 of the ninth lens satisfies 45mm≤f9≤55mm; and the focal length f10 of the tenth lens satisfies 55mm≤f10≤65mm.

19. The Schamm optical system according to claim 16, characterized in that, The first lens has a refractive index N1 satisfying 1.7 ≤ N1 ≤ 1.8 and an Abbe number V1 satisfying 35 ≤ V1 ≤ 40; the second lens has a refractive index N2 satisfying 1.7 ≤ N2 ≤ 1.8 and an Abbe number V2 satisfying 50 ≤ V2 ≤ 55; the third lens has a refractive index N3 satisfying 1.6 ≤ N3 ≤ 1.7 and an Abbe number V3 satisfying 55 ≤ V3 ≤ 60; the fourth lens has a refractive index N4 satisfying 1.5 ≤ N4 ≤ 1.6 and an Abbe number V4 satisfying 55 ≤ V4 ≤ 60; the fifth lens has a refractive index N5 satisfying 1.8 ≤ N5 ≤ 1.9 and an Abbe number V5 satisfying 25 ≤ V5 ≤ 30; The refractive index N6 of the sixth lens satisfies 1.8≤N6≤1.9, and the Abbe number V6 satisfies 25≤V6≤30; the refractive index N7 of the seventh lens satisfies 1.4≤N7≤1.5, and the Abbe number V7 satisfies 65≤V7≤70; the refractive index N8 of the eighth lens satisfies 1.7≤N8≤1.8, and the Abbe number V8 satisfies 45≤V8≤50; the refractive index N9 of the ninth lens satisfies 1.7≤N9≤1.8, and the Abbe number V9 satisfies 35≤V9≤40; the refractive index N10 of the tenth lens satisfies 1.7≤N10≤1.8, and the Abbe number V10 satisfies 55≤V10≤60.

20. The Schamm optical system according to claim 16, characterized in that, The radius of curvature R11 of the incident surface of the first lens satisfies 145mm ≤ R11 ≤ 155mm, and the radius of curvature R12 of the exit surface satisfies -95mm ≤ R12 ≤ -85mm; the radius of curvature R21 of the incident surface of the second lens satisfies 25mm ≤ R21 ≤ 35mm, and the radius of curvature R22 of the exit surface satisfies 80mm ≤ R22 ≤ 90mm; the radius of curvature R31 of the incident surface of the third lens satisfies 30mm ≤ R31 ≤ 40mm, and the radius of curvature R22 of the exit surface satisfies -95mm ≤ R12 ≤ -85mm. The radius of curvature R32 of the incident surface of the fourth lens satisfies 40mm ≤ R32 ≤ 50mm; the radius of curvature R41 of the incident surface of the fourth lens satisfies -45mm ≤ R41 ≤ -35mm, and the radius of curvature R42 of the exit surface satisfies -45mm ≤ R42 ≤ -35mm; the radius of curvature R51 of the incident surface of the fifth lens satisfies 90mm ≤ R51 ≤ 100mm, and the radius of curvature R52 of the exit surface satisfies 10mm ≤ R52 ≤ 20mm; the radius of curvature R51 of the incident surface of the sixth lens satisfies 40mm ≤ R32 ≤ 50mm; the radius of curvature R41 of the incident surface of the fifth lens satisfies -45mm ≤ R41 ≤ -35mm, and the radius of curvature R42 of the exit surface satisfies -45mm ≤ R42 ≤ -35mm; the radius of curvature R51 of the incident surface of the fifth lens satisfies 90mm ≤ R51 ≤ 100mm, and the radius of curvature R52 of the exit surface satisfies 10mm ≤ R52 ≤ 20mm; the radius of curvature R51 of the incident surface of the sixth ... The radius of curvature R61 of the seventh lens satisfies -20mm ≤ R61 ≤ -10mm, and the radius of curvature R62 of the exit surface satisfies -230mm ≤ R62 ≤ -220mm; the radius of curvature R71 of the incident surface of the seventh lens satisfies -230mm ≤ R71 ≤ -220mm, and the radius of curvature R72 of the exit surface satisfies -40mm ≤ R72 ≤ -30mm; the radius of curvature R81 of the incident surface of the eighth lens satisfies -40mm ≤ R81 ≤ -30mm, and the radius of curvature R62 of the exit surface satisfies -230mm ≤ R62 ≤ -220mm. The radius of curvature R82 of the incident surface of the ninth lens satisfies -30mm≤R82≤-20mm; the radius of curvature R91 of the incident surface of the ninth lens satisfies -130mm≤R91≤-120mm, and the radius of curvature R92 of the exit surface satisfies -40mm≤R92≤-30mm; the radius of curvature R101 of the incident surface of the tenth lens satisfies 50mm≤R101≤60mm, and the radius of curvature R12 of the exit surface satisfies -190mm≤R102≤-180mm.

21. The Schamm optical system according to claim 16, characterized in that, The center thickness GT1 of the first lens satisfies 3mm ≤ GT1 ≤ 6mm; the center thickness GT2 of the second lens satisfies 3mm ≤ GT2 ≤ 6mm; the center thickness GT3 of the third lens satisfies 2mm ≤ GT3 ≤ 5mm; the center thickness GT4 of the fourth lens satisfies 2mm ≤ GT4 ≤ 5mm; the center thickness GT5 of the fifth lens satisfies 2mm ≤ GT5 ≤ 5mm; the center thickness GT6 of the sixth lens satisfies 3mm ≤ GT6 ≤ 6mm; the center thickness GT7 of the seventh lens satisfies 3mm ≤ GT7 ≤ 6mm; the center thickness GT8 of the eighth lens satisfies 3mm ≤ GT8 ≤ 6mm; the center thickness GT9 of the ninth lens satisfies 4mm ≤ GT9 ≤ 7mm; and the center thickness GT10 of the tenth lens satisfies 4mm ≤ GT10 ≤ 7mm.

22. The Schamm optical system according to claim 16, characterized in that, The air gap AT1 between the first lens and the second lens along the optical axis satisfies 0mm≤AT1≤2mm; the air gap AT2 between the second lens and the third lens along the optical axis satisfies 0mm≤AT2≤2mm; the air gap AT3 between the third lens and the fourth lens along the optical axis satisfies 3mm≤AT3≤5mm; the air gap AT4 between the fourth lens and the fifth lens along the optical axis satisfies 0mm≤AT4≤2mm; the air gap AT5 between the fifth lens and the aperture stop along the optical axis satisfies 3mm≤AT5≤5mm; the air gap AT6 between the aperture stop and the sixth lens along the optical axis satisfies 5mm≤AT6≤7mm; the sixth lens and the seventh lens are cemented lenses; the air gap AT7 between the seventh lens and the eighth lens along the optical axis satisfies 0mm≤AT7≤2mm; the air gap AT8 between the eighth lens and the ninth lens along the optical axis satisfies 0mm≤AT8≤2mm; the air gap AT9 between the ninth lens and the tenth lens along the optical axis satisfies 0mm≤AT9≤2mm.

23. The Schamm optical system according to claim 16, characterized in that, The air gap AT5 between the fifth lens and the aperture stop along the optical axis and the air gap AT6 between the aperture stop and the sixth lens along the optical axis satisfy 9mm < AT5 + AT6 < 11mm. And / or, the Abbe number difference between the sixth lens and the seventh lens is greater than 10.

24. The Schamm optical system according to any one of claims 13-23, characterized in that, The correction module includes the light-transmitting cover plate, a light-transmitting flat plate, and a reflective element, wherein the reflective element is coaxially disposed on the light-incident side of the light-transmitting flat plate. The fourth included angle A4 formed between the light-transmitting cover and the optical axis satisfies 30°≤A4≤60°; the first included angle A1 satisfies 30°≤A1≤60°; and the fifth included angle formed between the reflective element and the optical axis is 30°≤A5≤60°. And / or, The light-transmitting plate and the main lens surface of the SAM lens form a third included angle A3, and the third included angle A3 satisfies 25°≤A3≤60°; the light-transmitting cover plate and the main lens surface of the SAM lens form a second included angle A2, and the second included angle A2 satisfies 25°≤A2≤60°; And / or, The light-transmitting cover plate and the light-transmitting plate are made of the same material. The refractive index N11 of the light-transmitting cover plate and the light-transmitting plate satisfies 1.5≤N11≤1.6, and the Abbe number V11 of the light-transmitting cover plate and the light-transmitting plate satisfies 60≤V11≤65. And / or, The thickness NT1 of the light-transmitting cover plate satisfies 0.3mm≤NT1≤3mm, and the thickness NT2 of the light-transmitting flat plate satisfies 0.3mm≤NT2≤3mm; And / or, the air gap AT10 between the tenth lens and the reflective element along the optical axis satisfies 15mm≤AT10≤25mm; the air gap AT11 between the reflective element and the light-transmitting plate along the optical axis satisfies 10mm≤AT11≤20mm; and the spatial gap AT12 between the light-transmitting plate and the light-transmitting cover plate along the optical axis satisfies 7mm≤AT12≤9mm.

25. An electronic device, characterized in that, Includes the sensor module according to any one of claims 1-5, or the Sham optical system according to any one of claims 6-24.

26. The electronic device according to claim 25, characterized in that, The electronic device is a 3D camera.

Images