Drilling detection device and method for laser drilling machine, and laser drilling machine

Abstract

The application discloses a drilling detection device and method of a laser drilling machine and the laser drilling machine, and the device comprises: a camera, which is installed close to the optical axis of the laser drilling machine and is used for collecting the image of the processing result of the laser drilling machine on a substrate; and a processing module, which is used for performing operation analysis based on the image to determine whether the processing result of the laser drilling machine on the substrate is abnormal. According to the application, the camera is installed close to the optical axis of the laser drilling machine, and the camera can collect the image of the processing result of the laser drilling machine on the substrate in real time along with the movement of the laser drilling. Meanwhile, the processing module performs operation analysis on the collected image to timely detect abnormal conditions possibly occurring in the processing process, realizes the real-time detection and calibration functions, improves the confidence of users on the processing quality, shortens the import and authentication time of the equipment, and reduces the cost and the complexity of the whole machine.

Description

Technical Field

[0001] This invention relates to the field of drilling machine technology, and in particular to a drilling inspection device, method, and laser drilling machine for laser drilling. Background Technology

[0002] With the development of technology, machine vision technology is being used more and more widely in the manufacturing industry. Laser drilling machines are an important piece of equipment in manufacturing, and their processing quality has a significant impact on the quality and performance of products.

[0003] Regarding drilling inspection of laser drilling machines, many existing technologies lack real-time feedback and calibration systems, making it impossible to perform closed-loop control of galvanometer position and laser output energy, and also lacking online real-time detection capabilities for processing results. Furthermore, even if processing abnormalities are prevented through random inspection after the entire board is processed, abnormal boards cannot be detected in time during subsequent process inspections, which may lead to board scrapping and losses. At the same time, users have concerns about the processing quality of laser drilling machines, which increases the difficulty and time required for equipment implementation and certification. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art.

[0005] Therefore, one objective of this invention is to provide a drilling inspection device for a laser drilling machine, which can promptly detect problems such as missing holes, incorrect holes, poor hole diameter, and out-of-tolerance position of the laser drilling machine, and realize detection and calibration functions.

[0006] Therefore, the second objective of this invention is to provide a drilling inspection method for a laser drilling machine.

[0007] Therefore, a third objective of this invention is to provide a laser drilling machine.

[0008] To achieve the above objectives, an embodiment of the first aspect of the present invention discloses a drilling detection device for a laser drilling machine, comprising: a camera, mounted close to the optical axis of the laser drilling machine, for acquiring an image of the processing result of the laser drilling machine on a substrate; and a processing module, for performing calculations and analysis based on the image to determine whether there are any abnormalities in the processing result of the laser drilling machine on the substrate.

[0009] According to an embodiment of the present invention, a drilling inspection device for a laser drilling machine is provided. This device installs a camera near the optical axis of the laser drilling machine. As the laser drilling motion proceeds, the camera can acquire images of the processing results of the laser drilling machine on the substrate in real time. At the same time, the processing module performs calculations and analysis on the acquired images to detect any abnormalities that may occur during the processing, such as missing holes, misaligned holes, abnormal hole diameters, and abnormal positions. This enables real-time detection and calibration, enhances user confidence in processing quality, shortens equipment introduction and certification time, and reduces costs and overall machine complexity.

[0010] In addition, the drilling inspection device of the laser drilling machine according to the above embodiments of the present invention may also have the following additional technical features:

[0011] In some embodiments, the simulation module is used to receive the current input spectral amplitude ratio, obtain the target initial position corresponding to the current input spectral amplitude ratio through the relationship curve, determine the offset of the target initial position, and obtain the corresponding exposure surface offset based on the offset of the target initial position.

[0012] In some embodiments, the processing module includes: a first calculation unit, configured to perform calculations based on the image to obtain target position information of all processed holes in the image under ideal conditions, wherein the target position information includes the center coordinates and diameter of the holes; a second calculation unit, configured to perform calculations based on the image to obtain actual position information of all processed holes in the image under actual conditions, wherein the actual position information includes the suction cup coordinates and diameter of the holes; and a judgment unit, configured to compare the target position information corresponding to each hole with its actual position information, and determine whether the hole is abnormal based on the comparison result.

[0013] In some embodiments, the first processing unit is specifically used for: obtaining the suction cup coordinates corresponding to the current center point of the camera based on the starting position of the camera; determining the suction cup coordinate range based on the suction cup coordinates and the field of view of the camera; determining the coordinate range in the source image corresponding to the suction cup coordinate range based on the suction cup coordinate range and the alignment transformation parameters of the substrate; extracting a set of position information of all holes in the suction cup coordinate range from the source image, the set of position information including the position and diameter of each hole; applying the alignment transformation parameters to the obtained set of position information to obtain the target position information of all processed holes in the image under ideal conditions.

[0014] In some embodiments, when determining the range of suction cup coordinates based on the suction cup coordinates and the field of view of the camera, the first calculation module is specifically used to perform the calculation using the following formula:

[0015] Viewbox = (xw / 2, yh / 2, w, h)

[0016] Wherein, Viewbox is the range of suction cup coordinates, x is the x-axis of the suction cup coordinates corresponding to the current center point of the camera, y is the y-axis of the suction cup coordinates corresponding to the current center point of the camera, and (w,h) is the field of view of the camera.

[0017] In some embodiments, when determining the coordinate range in the source image corresponding to the suction cup coordinate range based on the suction cup coordinate range and the alignment transformation parameters of the substrate, the first calculation module is specifically used to perform the calculation using the following formula:

[0018] Sourcebox=T -1 (Viewbox)

[0019] Wherein, Sourcebox is the coordinate range in the source image corresponding to the suction cup coordinate range, T is the alignment transformation parameter, and Viewbox is the suction cup coordinate range.

[0020] In some embodiments, the second computing unit is specifically used to: identify the center image coordinates and diameter of all holes in the image using a target detection algorithm; and calculate the actual position information of all processed holes in the image under actual conditions based on the center image coordinates and diameter, the current center position of the camera, and the lens magnification.

[0021] In some embodiments, the determination unit is used to: determine that the hole is normal when the target position information corresponding to each hole is the same as its actual position information; and determine that the hole is abnormal when the target position information corresponding to each hole is different from its actual position information.

[0022] In some embodiments, the processing module further includes a handling unit, configured to output alarm information and / or output hole repair instructions when the judgment unit determines that one or more holes are abnormal.

[0023] In some embodiments, the processing unit is further configured to: when the judgment unit determines that one or more holes are abnormal, calculate the difference between the target position information corresponding to each hole and its actual position information; when all the obtained differences are within a preset difference range, compensate the relative position between the camera and the optical axis according to the differences.

[0024] In some embodiments, the camera and the optical axis have the same focal plane and their relative positions remain unchanged.

[0025] In some embodiments, the camera includes an area scan camera or a line scan camera.

[0026] In some embodiments, the camera is mounted on the side of the optical axis opposite to the direction of movement of the optical axis.

[0027] In some embodiments, the camera is the alignment camera of the laser drilling machine.

[0028] To achieve the above objectives, a second aspect of the present invention discloses a drilling detection method for a laser drilling machine, comprising: acquiring an image of the processing result of the laser drilling machine on a substrate using a camera, wherein the camera is mounted close to the optical axis of the laser drilling machine; and performing calculation and analysis based on the image to determine whether there is any abnormality in the processing result of the laser drilling machine on the substrate.

[0029] According to an embodiment of the present invention, a drilling inspection method for a laser drilling machine involves mounting a camera near the optical axis of the laser drilling machine. As the laser drilling process proceeds, the camera can acquire images of the processing results on the substrate in real time. Simultaneously, a processing module analyzes the acquired images to detect any anomalies that may occur during processing, such as missing holes, misaligned holes, abnormal hole diameters, and abnormal hole positions, and provides timely alarms and repair prompts. Real-time detection allows for the timely identification and repair of problems during processing, enabling real-time detection and calibration, enhancing user confidence in processing quality, shortening equipment implementation and certification time, and reducing costs and overall machine complexity.

[0030] To achieve the above objectives, a third aspect of the present invention discloses a laser drilling machine, comprising: a drilling detection device for the laser drilling machine described in the first aspect of the present invention.

[0031] According to an embodiment of the laser drilling machine of the present invention, by mounting a camera near the optical axis of the laser drilling machine, the camera can acquire images of the processing results on the substrate in real time as the laser drilling motion proceeds. Simultaneously, the processing module performs calculations and analysis on the acquired images, promptly detecting any anomalies that may occur during processing, such as missing holes, misaligned holes, abnormal hole diameters, and abnormal hole positions, and providing timely alarms and repair prompts. Through real-time detection, problems in the processing process can be identified and repaired promptly, achieving real-time detection and calibration functions, enhancing user confidence in processing quality, shortening equipment implementation and certification time, and reducing costs and overall machine complexity.

[0032] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0033] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0034] Figure 1 This is a structural block diagram of a drilling inspection device for a laser drilling machine according to an embodiment of the present invention;

[0035] Figure 2 This is a structural block diagram of a processing module according to an embodiment of the present invention;

[0036] Figure 3 This is a schematic diagram of the processing area according to an embodiment of the present invention;

[0037] Figure 4 This is a flowchart of a drilling inspection method using a laser drilling machine according to an embodiment of the present invention;

[0038] Figure 5 This is a structural block diagram of a laser drilling machine according to an embodiment of the present invention. Detailed Implementation

[0039] The embodiments of the present invention are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. The embodiments of the present invention are described in detail below.

[0040] The following is for reference. Figures 1-3 A drilling inspection device for a laser drilling machine according to an embodiment of the present invention is described.

[0041] Figure 1 This is a structural block diagram of a drilling inspection device for a laser drilling machine according to an embodiment of the present invention. Figure 1 As shown, the drilling detection device of the laser drilling machine includes: a camera 110 and a processing module 120.

[0042] Specifically, camera 110 is mounted near the optical axis of the laser drilling machine to acquire images of the processing results of the laser drilling machine on the substrate.

[0043] In this embodiment, the camera 110 is positioned close to the optical axis (also known as a galvanometer or field lens) of the laser drilling machine. This allows the camera 110 to clearly capture images of the substrate surface simultaneously with laser drilling. As the drilling progresses, the camera 110 continuously observes changes across the entire substrate surface, enabling it to record complete images of the processing process. This ensures that the images captured by the camera 110 include newly drilled holes and are transmitted in real-time to the processing module 120 for analysis and judgment. By employing the camera 110 for real-time image detection, the processing of the laser drilling machine can be effectively monitored, and images of the processing results on the substrate can be acquired in real-time, improving processing quality. Furthermore, it can be used for real-time calibration and feedback of the laser drilling machine's parameters, enabling automated control and anomaly alarm functions.

[0044] The processing module 120 is used to perform computational analysis based on the image to determine whether there are any abnormalities in the processing results of the laser drilling machine on the substrate.

[0045] In this embodiment, the processing module 120 performs calculations and analysis on the images acquired by the camera 110. For example, it uses a target detection algorithm to analyze and identify the acquired images, extracts information about holes in the images, such as the position and diameter of the holes, and compares and judges them to determine whether there are any abnormalities in the processing results of the laser drilling machine on the substrate. This enables real-time detection of the processing results of the laser drilling machine on the substrate and improves the real-time detection and calibration function of the processing process.

[0046] Therefore, the embodiments of the present invention mainly acquire images of the processing results on the substrate through a camera, and the processing module performs calculations and analysis on the images to determine whether there are any abnormalities in the processing results. This device can monitor the processing process of the laser drilling machine in real time, detect abnormalities in a timely manner, and realize the parallel execution of detection and calibration.

[0047] Therefore, the aforementioned laser drilling machine drilling inspection device, by installing a camera near the optical axis of the laser drilling machine, can acquire images of the processing results on the substrate in real time as the laser drilling motion proceeds. Simultaneously, the processing module performs calculations and analysis on the acquired images to promptly detect any abnormalities that may occur during the processing, such as missing holes, misaligned holes, abnormal hole diameters, and abnormal positions. This enables real-time detection and calibration functions, enhancing user confidence in processing quality, shortening equipment implementation and certification time, and reducing costs and overall machine complexity.

[0048] In one embodiment of the present invention, such as Figure 2 As shown, the processing module 120 includes: a first calculation unit 121, used to perform calculations based on the image to obtain the target position information of all processed holes in the image under ideal conditions, wherein the target position information includes the center coordinates and diameter of the hole; a second calculation unit 122, used to perform calculations based on the image to obtain the actual position information of all processed holes in the image under actual conditions, wherein the actual position information includes the suction cup coordinates and diameter of the hole; and a judgment unit 123, used to compare the target position information corresponding to each hole with its actual position information, and judge whether the hole is abnormal based on the comparison result.

[0049] In this embodiment, the camera 110 transmits the images of the processing results of the laser drilling machine on the substrate to the processing module 120 in real time. After receiving these image data, the processing module 120 performs a series of calculations and processing to detect the processing quality of the hole.

[0050] Specifically, the first calculation unit 121 and the second calculation unit 122 perform calculations based on these images. The first calculation unit 121 analyzes the characteristics of the holes in the image based on the processing result image of the laser drilling machine on the substrate, thereby calculating the target position information of all processed holes in the image under ideal conditions, such as the center coordinates and diameter of the holes. The second calculation unit 122, based on image calculations, obtains the actual position information of all processed holes in the image under actual conditions, such as the suction cup coordinates and diameter of the holes, which can be calculated based on parameters such as the center position of the camera 110 and the lens magnification. The judgment unit 123 compares the target position information corresponding to each hole with its actual position information. Based on the comparison result, the judgment unit 123 can determine whether there is an anomaly in the hole, such as hole position offset, hole diameter deviation, and missing holes. Through the collaborative work of the first calculation unit 121, the second calculation unit 122, and the judgment unit 123, real-time monitoring and anomaly detection of the laser drilling machine processing process can be realized, which is conducive to timely detection of problems and improvement of the processing quality of the laser drilling machine.

[0051] In one embodiment of the present invention, the first calculation unit 121 is specifically used for: obtaining the suction cup coordinates corresponding to the current center point of the camera 110 according to the starting position of the camera 110; determining the suction cup coordinate range according to the suction cup coordinates and the field of view size of the camera 110; determining the coordinate range in the source image corresponding to the suction cup coordinate range according to the suction cup coordinate range and the alignment transformation parameters of the substrate; extracting the set of position information of all holes in the suction cup coordinate range from the source image, the set of position information including the position and diameter of each hole; applying the alignment transformation parameters to the obtained set of position information to obtain the target position information of all processed holes in the image under ideal conditions.

[0052] In this embodiment, the suction cup coordinates corresponding to the current center point of the camera 110 are obtained based on the starting position of the camera 110. The starting position of the camera 110 has been determined during the machine debugging process. Based on the suction cup coordinates and the field of view of camera 110, the range of suction cup coordinates can be determined. This can be understood as determining the visible processing area within the field of view of camera 110. Then, based on the range of suction cup coordinates and the alignment transformation parameters of the substrate, the corresponding coordinate range in the source image within the range of suction cup coordinates is determined. This process can be understood as aligning the coordinate system of camera 110's field of view with the coordinate system of the substrate, extracting the set of position information of all holes within the range of suction cup coordinates from the source image. For example, the set of position information of holes is denoted as C = {c1, c2, c3, ..., cn}, where each hole contains its position and diameter information. Image processing and analysis are performed on the source image to extract the position information of holes. Then, the obtained set of position information of holes C is applied to the alignment transformation parameters to obtain the target position information of all processed holes in the image under ideal conditions. For example, the target position information of holes is denoted as A = {a1, a2, a3, ..., an}, that is, the target position information A of holes obtained by transforming from the coordinate system of the source image to the coordinate system of the substrate is calculated based on a preset standard or template. Based on the above process, the first calculation unit 121 can calculate the target position information of all processed holes in the image under ideal conditions, providing basic data for subsequent anomaly detection. By comparing these data with the actual position information, it can determine whether there are any anomalies in the holes, which is conducive to real-time calibration and feedback, timely detection of problems, and improvement of the processing quality and production efficiency of the laser drilling machine.

[0053] In one embodiment of the present invention, when determining the range of suction cup coordinates based on the suction cup coordinates and the field of view of the camera 110, the first calculation module 121 is specifically used to perform the calculation using the following formula:

[0054] Viewbox = (xw / 2, yh / 2, w, h)

[0055] Wherein, Viewbox is the range of suction cup coordinates, x is the x-axis of the suction cup coordinates corresponding to the current center point of camera 110, y is the y-axis of the suction cup coordinates corresponding to the current center point of camera 110, and (w,h) is the field of view size of camera 110.

[0056] In this embodiment, since the starting position of the camera 110 is determined during debugging, the suction cup coordinates corresponding to the current center point of the camera 110 can be obtained and recorded as (x, y). Combined with the field of view (w, h) of the camera 110, i.e., the maximum width and height of the image that the camera 110 can capture, the suction cup coordinate range Viewbox can be calculated according to the formula Viewbox = (xw / 2, yh / 2, w, h), which is the range that the camera 110 can observe and monitor. Specifically, the suction cup coordinate range Viewbox is calculated based on the field of view (w, h) of the camera 110 and the suction cup coordinates (x, y) corresponding to the center point of the camera 110. Therefore, as the laser drilling motion proceeds, the camera 110 can acquire and monitor the image of the processing result on the substrate in real time to determine the visible processing area within the current field of view of the camera 110, providing basic data for subsequent image processing and analysis. At the same time, by setting the suction cup coordinate range, the range of image processing and analysis can be limited, thereby improving processing efficiency.

[0057] In one embodiment of the present invention, when determining the coordinate range in the source image corresponding to the suction cup coordinate range based on the suction cup coordinate range and the alignment transformation parameters of the substrate, the first calculation module 121 is specifically used to perform the calculation using the following formula:

[0058] Sourcebox=T -1 (Viewbox)

[0059] Wherein, Sourcebox is the coordinate range of the suction cup in the source image, T is the alignment transformation parameter, and Viewbox is the suction cup coordinate range.

[0060] In this embodiment, when transforming the suction cup coordinate range Viewbox to the corresponding coordinate range Sourcebox in the source image, this can be achieved by applying the alignment transformation parameter T. The alignment transformation parameter T is a parameter describing the geometric relationship between the camera 110 and the substrate, including transformations such as rotation, translation, and scaling. By applying the alignment transformation parameter T, the formula Sourcebox = T can be used. -1 (Viewbox) transforms the suction cup coordinate range (Viewbox) from the camera coordinate system to the substrate coordinate system, thus obtaining the corresponding coordinate range (Sourcebox) in the source image. By transforming the suction cup coordinate range (Viewbox) to the corresponding coordinate range (Sourcebox) in the source image, the region corresponding to the set of all hole position information extracted from the suction cup coordinate range in the source image can be determined. This facilitates subsequent anomaly detection and judgment, improving real-time detection and anomaly alarm functions during the drilling process.

[0061] In one embodiment of the present invention, the second arithmetic unit 122 is specifically used to: identify the center image coordinates and diameter of all holes in the image through a target detection algorithm; and calculate the actual position information of all processed holes in the image under actual conditions based on the center image coordinates and diameter, the current center position of the camera 110 and the lens magnification.

[0062] In this embodiment, alignment transformation parameters are applied to obtain the target position information A = {a1, a2, a3, ..., an} of all processed holes in the image under ideal conditions. Then, target detection algorithms such as filtering, edge detection, and circular fitting are used to identify the center coordinates and diameter R = {r1, r2, r3, ..., rn} of all holes in the image. Based on the current center position of the camera 110 and parameters such as lens magnification, the actual position information of all processed holes in the image under actual conditions is calculated, resulting in a set B = {b1, b2, b3, ..., bn}, where the diameter is in millimeters. Each element bi in the set represents the suction cup coordinates and diameter of a hole in the image. Extracting the actual position information of all processed holes in the image facilitates subsequent detection and anomaly judgment, thereby improving the processing quality of the laser drilling machine.

[0063] In one embodiment of the present invention, the judgment unit 123 is used to: determine that the hole is normal when the target position information corresponding to each hole is the same as its actual position information; and determine that the hole is abnormal when the target position information corresponding to each hole is different from its actual position information.

[0064] In this embodiment, the calculated target position information A corresponding to the hole is compared with the actual position information B. A = B is used as the ideal comparison condition. Based on this condition, it is determined whether the target position information A and the actual position information B are the same. This can be understood as follows: each element in the target position information A = {a1, a2, a3, ..., an} represents the position and diameter of the hole in the original design value; each element in the actual position information B = {b1, b2, b3, ..., bn} represents the diameter of the hole at the actual machined position. If the elements in A and B are the same, it is considered that the position and diameter of the hole at each location are the same as the original design value, and the hole can be judged to be without abnormality. If the elements in A and B are different, for example, a1 and b1 are different, the hole can be judged to have an abnormality. By using the comparison of target position information and actual position information for detection and judgment, problems such as abnormal hole diameter and abnormal position can be detected in a timely manner, improving the real-time performance of the detection.

[0065] In one embodiment of the present invention, such as Figure 2As shown, the processing module 120 further includes a handling unit 124, which is used to output alarm information and / or output hole repair instructions when the judgment unit 123 determines that one or more holes are abnormal.

[0066] In this embodiment, the calculated target position information A corresponding to the hole is compared with the actual position information B to determine if there is an anomaly. When one or more elements in the target position information A and the actual position information B are different, it can be determined that one or more holes are abnormal. An alarm message will be output to remind the user or operator that a hole processing abnormality has occurred, and / or a hole repair instruction will be output, such as attempting automatic repair (re-drilling). This effectively detects anomalies during the processing and provides timely alarm reminders and / or repairs, ensuring that the actual position information and target position information of each hole are the same, reducing the hole anomaly rate, and increasing user confidence in the processing quality of the equipment. Simultaneously, automated detection for alarms and / or repairs reduces the workload of manual detection and repair, improving production efficiency.

[0067] In one embodiment of the present invention, the processing unit 124 is further configured to: when the judgment unit 123 determines that one or more holes are abnormal, calculate the difference between the target position information corresponding to each hole and its actual position information; when the obtained differences are all within the preset difference range, compensate the relative position between the camera 110 and the optical axis according to the difference.

[0068] In this embodiment, when it is determined that one or more holes are abnormal, the translation error value AB between the target position information A and the actual position information B of each hole is also calculated. If the translation error values ​​AB of the holes in multiple images are close or equal, that is, the calculated differences are all within the preset range, the error can be automatically compensated by the relative position between the camera 110 and the optical axis to achieve automatic calibration of the system.

[0069] For example, in the processing of a laser drilling machine, each hole is processed according to the target position information A. The target detection algorithm identifies a deviation between the actual position information B of one or more holes and the target position information A. For example, if the actual position information B is offset by 5 pixels from the target position information A, the error can be compensated by adjusting the relative position between the camera 110 and the optical axis, so as to achieve automatic calibration of the system, making the position more accurate in the next processing and improving production efficiency.

[0070] In one embodiment of the present invention, the camera 110 has the same focal plane as the optical axis and their relative positions remain unchanged.

[0071] In this embodiment, the camera 110 has the same focal plane as the optical axis and its relative position remains unchanged. While the laser is drilling, the camera 110 can acquire an image of the processing result on the substrate surface. As the drilling motion continues, the camera 110 can also acquire an image of the entire substrate surface. Therefore, image offset errors caused by position changes can be avoided, improving the accuracy and reliability of detection. At the same time, the fact that the relative position of the camera 110 and the optical axis remains unchanged can avoid frequent adjustments to the positional relationship between the two, improving the stability of the whole machine, reducing the complexity of the whole machine and maintenance costs.

[0072] In one embodiment of the present invention, camera 110 includes an area scan camera or a line scan camera.

[0073] In this embodiment, camera 110 can be either an area scan camera or a line scan camera. An area scan camera can simultaneously acquire images of the entire field of view, making it suitable for real-time monitoring of the entire processing area and providing images with high clarity. A line scan camera is a progressive scan camera that captures images line by line during continuous scanning, making it suitable for monitoring dynamically changing processes. Therefore, selecting the appropriate camera type for monitoring based on actual processing requirements, such as the laser processing speed, substrate size, and shape, can improve the reliability of the entire processing and enable parallel execution of drilling and inspection.

[0074] In one embodiment of the present invention, the camera 110 is mounted on the side of the optical axis opposite to the direction of movement of the optical axis.

[0075] In this embodiment, the camera 110 can observe the image of the processing area as the optical axis moves. The camera 110 is mounted on the side of the optical axis opposite to the direction of optical axis movement. When the optical axis moves forward, the camera 110 can capture the image of the newly processed hole, so that the camera 110 can capture the image of the processing area in real time and realize the real-time detection function.

[0076] In one embodiment of the present invention, camera 110 is an alignment camera for a laser drilling machine.

[0077] In this embodiment, camera 110 is the alignment camera of the laser drilling machine, which can avoid the need to install an additional inspection camera, reducing the overall cost and complexity of the machine. Using camera 110 as an alignment camera can also be used to view the processing results, and can also perform partial area inspection and system calibration functions.

[0078] In specific embodiments, laser drilling machines typically use the synchronization of a galvanometer and a laser to achieve high-speed drilling on a substrate. Due to the limited coverage of the field lens, relative motion between the field lens and the substrate is necessary when drilling on large substrates. Commonly used relative motion methods include stepping, flying (single-axis scanning), and infinite field of view (four-axis linkage). The galvanometer is located above the field lens, and the two are connected by an optical axis. The positions of the three components in the laser drilling machine are interconnected. Therefore, a camera is installed near the optical axis, and simultaneously, a detection camera is installed near the field lens. This camera can be an area scan camera or a line scan camera, ensuring that the working distance (focal plane) of the camera and the field lens is the same and their relative positions remain unchanged. Figure 3 As shown, at any given moment, when the galvanometer is in processing area N+1, the camera can see the image of area N. When processing area N+2 begins, the camera can see the image of area N+1. Therefore, in order for the camera to capture images of all processing areas on the substrate, the substrate needs to move one more time than the camera.

[0079] In an embodiment of the present invention, the actual position of the camera is determined during machine debugging. Therefore, the suction cup coordinates corresponding to the current camera center point can be obtained as (x, y). Combined with the camera's field of view (w, h), the suction cup coordinate range Viewbox (xw / 2, yh / 2, w, h) can be obtained. Assuming the alignment transformation parameter of the substrate is T, the coordinate range Sourcebox in the source image corresponding to the suction cup coordinate range can be calculated as Sourcebox = T. -1 (Viewbox) From the source image, the coordinate range of the suction cup can be extracted to obtain the set C = {c1,c2,c3,......,cn} of all holes in the Sourcebox corresponding to the coordinate range of the source image. Each hole contains its position and diameter information. Then, the obtained set C is applied with alignment parameters to obtain the target position information A = {a1,a2,a3,......,an} of all holes in the ideal region. For example, through target detection algorithms such as filtering, edge detection, and circular fitting, the center image coordinates and diameter R = {r1,r2,r3,......,rn} of all circular holes in the image are identified. Based on parameters such as the camera center position and lens magnification, the actual position information B = {b1,b2,b3,......,bn} of each hole in the image is calculated. Ideally, the condition A = B must be satisfied. Based on this condition, it can be determined whether the target position information A and the actual position information B are the same. If they are not the same, the hole is judged to be abnormal and an alarm message and / or a hole repair command is output, such as attempting automatic repair (re-drilling).

[0080] While performing hole position and diameter detection, if it is found that there is a fixed translation error AB between the target position information A corresponding to each hole and its actual position information B, and the error value is close to or equal in multiple areas, it can be considered that there is a relative position error between the optical axis (or galvanometer) and the camera. This error can be automatically compensated to achieve automatic system calibration.

[0081] Adding an extra inspection camera would increase the overall cost and complexity of the machine. However, the machine itself includes an alignment camera. By simply aligning the alignment camera with the processing focal plane of the optical axis (or field lens), the processing results can be viewed during the processing. This allows for partial area inspection and system calibration (generally, the field of view of the alignment camera is smaller than that of the field lens, so the alignment camera cannot cover the entire substrate and can only perform spot checks).

[0082] Therefore, this embodiment mounts the camera near the optical axis of the laser drilling machine. As the laser drilling progresses, the camera can capture images of the processing results on the substrate in real time. Simultaneously, the processing module analyzes the captured images to detect any anomalies that may occur during processing, such as missing holes, misaligned holes, abnormal hole diameters, and abnormal hole positions, and provides timely alarms and repair prompts. Real-time detection allows for the timely identification and repair of problems during processing, enabling real-time detection and calibration, increasing user confidence in processing quality, shortening equipment implementation and certification time, and reducing costs and overall machine complexity.

[0083] The present invention also proposes a drilling detection method for a laser drilling machine in the embodiments.

[0084] Figure 4 This is a flowchart of a drilling inspection method using a laser drilling machine according to an embodiment of the present invention. Figure 4 As shown, the method includes the following steps:

[0085] Step S1: Acquire images of the processing results of the laser drilling machine on the substrate using a camera, with the camera positioned close to the optical axis of the laser drilling machine.

[0086] In this embodiment, the camera continuously acquires images of the processing results of the laser drilling machine on the substrate during the laser drilling process, thereby enabling real-time acquisition and detection of the processing results and improving the processing quality of the laser drilling machine.

[0087] Step S2: Perform computational analysis based on the image to determine whether there are any abnormalities in the processing results of the laser drilling machine on the substrate.

[0088] In this embodiment, the acquired images are processed and analyzed to detect abnormalities that occur during the processing in a timely manner, and alarms and repair prompts are issued, thus realizing real-time detection and calibration functions.

[0089] Therefore, this embodiment primarily involves mounting a camera near the optical axis of the laser drilling machine. As the laser drilling progresses, the camera can capture real-time images of the processing results on the substrate. Simultaneously, the processing module analyzes the captured images, promptly detecting any anomalies that may occur during processing, such as missing holes, misaligned holes, abnormal hole diameters, and abnormal hole positions, and providing timely alarms and repair prompts. Real-time detection allows for the timely identification and repair of problems during processing, enabling real-time detection and calibration functions, enhancing user confidence in processing quality, shortening equipment implementation and certification time, and reducing costs and overall machine complexity.

[0090] In one embodiment of the present invention, when performing computational analysis based on an image to determine whether there is any abnormality in the processing result of the laser drilling machine on the substrate, the method includes: performing computation based on the image to obtain target position information of all processed holes in the image under ideal conditions, wherein the target position information includes the center coordinates and diameter of the hole; performing computation based on the image to obtain actual position information of all processed holes in the image under actual conditions, wherein the actual position information includes the suction cup coordinates and diameter of the hole; comparing the target position information corresponding to each hole with its actual position information, and judging whether the hole is abnormal based on the comparison result.

[0091] In one embodiment of the present invention, when performing calculations based on an image to obtain the target position information of all processed holes within an image under ideal conditions, the process includes: obtaining the suction cup coordinates corresponding to the current center point of the camera based on the camera's starting position; determining the suction cup coordinate range based on the suction cup coordinates and the camera's field of view size; determining the coordinate range in the source image corresponding to the suction cup coordinate range based on the suction cup coordinate range and the alignment transformation parameters of the substrate; extracting a set of position information for all holes within the suction cup coordinate range from the source image, the set of position information including the position and diameter of each hole; and applying the alignment transformation parameters to the obtained set of position information to obtain the target position information of all processed holes within the image under ideal conditions.

[0092] In another embodiment of the present invention, when determining the range of suction cup coordinates based on the suction cup coordinates and the field of view of the camera, the following formula is used for calculation:

[0093] Viewbox = (xw / 2, yh / 2, w, h)

[0094] Where Viewbox is the range of suction cup coordinates, x is the x-axis of the suction cup coordinates corresponding to the current center point of the camera, y is the y-axis of the suction cup coordinates corresponding to the current center point of the camera, and (w,h) is the field of view of the camera.

[0095] In one embodiment of the present invention, when determining the coordinate range of the suction cup corresponding to the coordinate range in the source image based on the suction cup coordinate range and the alignment transformation parameters of the substrate, the following formula is used for calculation:

[0096] Sourcebox=T -1 (Viewbox)

[0097] Wherein, Sourcebox is the coordinate range of the suction cup in the source image, T is the alignment transformation parameter, and Viewbox is the suction cup coordinate range.

[0098] In one embodiment of the present invention, when performing calculations based on the image to obtain the actual position information of all processed holes in the image under actual conditions, the method includes: identifying the center image coordinates and diameter of all holes in the image through a target detection algorithm; and calculating the actual position information of all processed holes in the image under actual conditions based on the center image coordinates and diameter, the current center position of the camera, and the lens magnification.

[0099] In one embodiment of the present invention, when comparing the target position information corresponding to each hole with its actual position information and determining whether the hole is abnormal based on the comparison result, the method includes: when the target position information corresponding to each hole is the same as its actual position information, the hole is determined to be normal; when the target position information corresponding to each hole is different from its actual position information, the hole is determined to be abnormal.

[0100] In one embodiment of the present invention, the target position information corresponding to each hole is compared with its actual position information. If it is determined that one or more holes are abnormal based on the comparison result, an alarm message and / or a hole repair instruction is output.

[0101] In one embodiment of the present invention, the target position information corresponding to each hole is compared with its actual position information. When it is determined that one or more holes are abnormal based on the comparison result, the method includes: calculating the difference between the target position information corresponding to each hole and its actual position information; when all the obtained differences are within a preset difference range, the relative position between the camera and the optical axis is compensated based on the difference.

[0102] In one embodiment of the invention, the camera and the optical axis have the same focal plane and their relative positions remain unchanged.

[0103] In one embodiment of the present invention, the camera includes an area scan camera or a line scan camera.

[0104] In one embodiment of the invention, the camera is mounted on the side of the optical axis opposite to the direction of movement of the optical axis.

[0105] In one embodiment of the present invention, the camera is an alignment camera of a laser drilling machine.

[0106] It should be noted that when performing drilling inspection of a laser drilling machine, the specific implementation of the drilling inspection method of the laser drilling machine is similar to the specific implementation of the drilling inspection device of the laser drilling machine described in any of the above embodiments of the present invention. Therefore, for a detailed exemplary description of the drilling inspection method of the laser drilling machine, please refer to the aforementioned description of the drilling inspection device of the laser drilling machine. To reduce redundancy, it will not be repeated here.

[0107] The drilling inspection method for a laser drilling machine according to an embodiment of the present invention mainly involves installing a camera near the optical axis of the laser drilling machine. As the laser drilling progresses, the camera can acquire images of the processing results on the substrate in real time. Simultaneously, the processing module performs calculations and analysis on the acquired images to promptly detect any anomalies that may occur during the processing, such as missing holes, misaligned holes, abnormal hole diameters, and abnormal hole positions, and provides timely alarms and repair prompts. Real-time detection allows for the timely identification and repair of problems during the processing, enabling real-time detection and calibration functions, enhancing user confidence in processing quality, shortening equipment implementation and certification time, and reducing costs and overall machine complexity.

[0108] A further embodiment of the present invention provides a laser drilling machine 200.

[0109] like Figure 5 This is a structural block diagram of a laser drilling machine according to an embodiment of the present invention. Figure 5 As shown, the laser drilling machine 200 of this embodiment includes a drilling detection device 100 for the laser drilling machine as described in any of the above embodiments of this invention.

[0110] It should be noted that the specific implementation of the laser drilling machine in performing drilling inspection is similar to that of the drilling inspection device or method of the laser drilling machine in any of the above embodiments of the present invention. Therefore, for a detailed exemplary description of the process of the laser drilling machine performing drilling inspection, please refer to the relevant description of the drilling inspection device or method of the laser drilling machine mentioned above. To reduce redundancy, it will not be repeated here.

[0111] According to an embodiment of the laser drilling machine 200 of the present invention, by mounting a camera near the optical axis of the laser drilling machine, the camera can acquire images of the processing results on the substrate in real time as the laser drilling motion proceeds. Simultaneously, the processing module performs calculations and analysis on the acquired images, promptly detecting any anomalies that may occur during processing, such as missing holes, misaligned holes, abnormal hole diameters, and abnormal hole positions, and providing timely alarms and repair prompts. Through real-time detection, problems during processing can be identified and repaired promptly, achieving real-time detection and calibration functions, enhancing user confidence in processing quality, shortening equipment implementation and certification time, and reducing costs and overall machine complexity.

[0112] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0113] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A drilling inspection device for a laser drilling machine, characterized in that, include: A camera, located near the optical axis of the laser drilling machine, is used to acquire images of the processing results of the laser drilling machine on the substrate. The processing module is used to perform calculations and analysis based on the image to determine whether there are any abnormalities in the processing results of the laser drilling machine on the substrate; The processing module includes: The first calculation unit is used to perform calculations based on the image to obtain, under ideal conditions, the target position information of all processed holes in the image, wherein the target position information includes the center coordinates and diameter of the holes; The second calculation unit is used to perform calculations based on the image to obtain the actual position information of all processed holes in the image under actual conditions, wherein the actual position information includes the suction cup coordinates and diameter of the hole; The judgment unit is used to compare the target position information corresponding to each hole with its actual position information, and to determine whether the hole is abnormal based on the comparison result. The first arithmetic unit is specifically used for: The suction cup coordinates corresponding to the current center point of the camera are obtained based on the camera's starting position; The range of suction cup coordinates is determined based on the suction cup coordinates and the field of view of the camera; The coordinate range in the source image corresponding to the suction cup coordinate range is determined based on the suction cup coordinate range and the alignment transformation parameters of the substrate; Extract the set of position information of all holes in the coordinate range of the suction cup from the source image, wherein the set of position information includes the position and diameter of each hole; By applying alignment transformation parameters to the obtained set of position information, the target position information of all processed holes in the image can be obtained under ideal conditions. When determining the range of suction cup coordinates based on the suction cup coordinates and the field of view of the camera, the first calculation unit is specifically used to perform the calculation using the following formula: Viewbox=(xw / 2,yh / 2,w,h) Wherein, Viewbox is the range of suction cup coordinates, x is the x-axis of the suction cup coordinates corresponding to the current center point of the camera, y is the y-axis of the suction cup coordinates corresponding to the current center point of the camera, and (w,h) is the field of view of the camera.

2. The drilling inspection device for a laser drilling machine according to claim 1, characterized in that, When determining the coordinate range in the source image corresponding to the suction cup coordinate range based on the suction cup coordinate range and the alignment transformation parameters of the substrate, the first calculation unit is specifically used to perform the calculation using the following formula: Sourcebox=T -1 (Viewbox) Wherein, Sourcebox is the coordinate range in the source image corresponding to the suction cup coordinate range, T is the alignment transformation parameter, and Viewbox is the suction cup coordinate range.

3. The drilling inspection device for a laser drilling machine according to claim 1, characterized in that, The second arithmetic unit is specifically used for: The center coordinates and diameters of all holes in the image are identified using a target detection algorithm. Based on the coordinates and diameter of the center image, the current center position of the camera, and the lens magnification, calculate the actual position information of all processed holes in the image under actual conditions.

4. The drilling inspection device for a laser drilling machine according to claim 1, characterized in that, The determination unit is used for: When the target position information corresponding to each hole is the same as its actual position information, it is determined that the hole is normal. When the target position information corresponding to each hole is different from its actual position information, it is determined that the hole is abnormal.

5. The drilling inspection device for a laser drilling machine according to claim 1, characterized in that, The processing module further includes: The processing unit is used to output alarm information and / or output hole repair instructions when the judgment unit determines that one or more holes are abnormal.

6. The drilling inspection device for a laser drilling machine according to claim 5, characterized in that, The processing unit is also used for: When the judgment unit determines that one or more holes are abnormal, the difference between the target position information and the actual position information of each hole is calculated. When all the obtained differences are within the preset difference range, the relative position between the camera and the optical axis is compensated according to the differences.

7. The drilling inspection device for a laser drilling machine according to claim 1, characterized in that, The camera has the same focal plane as the optical axis, and their relative positions remain unchanged.

8. The drilling detection device for a laser drilling machine according to claim 1, wherein the camera comprises an area scan camera or a line scan camera.

9. The drilling detection device for a laser drilling machine according to claim 1, wherein the camera is mounted on the side of the optical axis opposite to the direction of movement of the optical axis.

10. The drilling detection device for a laser drilling machine according to claim 1, wherein the camera is the alignment camera of the laser drilling machine.

11. A drilling inspection method for a laser drilling machine, characterized in that, include: The laser drilling machine acquires images of the processing results on the substrate using a camera, which is mounted close to the optical axis of the laser drilling machine. The image is used for computational analysis to determine whether there are any abnormalities in the processing results of the laser drilling machine on the substrate.

12. A laser drilling machine, characterized in that, include: The drilling inspection device for a laser drilling machine as described in any one of claims 1-10.

Images