Substrate carrying device and carrying method thereof

Abstract

A substrate transport apparatus and a transport method thereof are disclosed. The substrate transport apparatus includes a placement station, a workstation, and a transport unit disposed between the placement station and the workstation. The placement station is used to place the substrate. The workstation has a platform and a displacement stage. The displacement stage moves between at least two spatial positions. The platform has a working part located at one of the spatial positions. The working part is used to perform a working purpose on the substrate so that the transport unit can pick up the substrate and transport it between the placement station and the workstation. When the displacement stage moves to another spatial position, the platform performs a reciprocating motion relatively away from the transport unit, so that the displacement stage can return.

Description

Technical Field

[0001] This invention relates to a working device, and more particularly to an apparatus and method for carrying semiconductor substrates such as wafers and glass plates during operation. Background Technology

[0002] Note that in the manufacturing processes of semiconductor materials such as wafers or glass plates, it is often necessary to perform inspections on the semiconductor materials. The existing inspection process mainly uses two robotic arms to pick up substrates back and forth between the storage area and the inspection area. That is, one robotic arm is responsible for picking up the substrates from the storage area and transporting them to the inspection area, while the other robotic arm is responsible for picking up the substrates from the inspection area and transporting them back to the storage area, thereby reducing the time required for a single arm to transport the substrates back and forth.

[0003] However, although the above approach can shorten the time required for a single arm to carry a load, in reality, each of the two robotic arms does not actually move any substrate during half of its operation. Therefore, the work done in the overall transport is more energy-intensive and not economically efficient.

[0004] In view of this, in order to improve and solve the above-mentioned deficiencies, the applicant has devoted himself to research and applied theoretical knowledge, and finally proposed an invention that is reasonably designed and effectively improves the above-mentioned deficiencies. Summary of the Invention

[0005] The main objective of this invention is to provide a substrate transport device and its transport method, which can be carried out by a single robotic arm or other transport unit, and the substrate or base material is transported during the round trip, without waiting time, thereby saving time and reducing labor.

[0006] To achieve the above objectives, the present invention provides a substrate transport device, including a placement station, a workstation, and a transport unit disposed between the placement station and the workstation; the placement station is used to place a substrate, the workstation has a platform and a displacement stage, the displacement stage moves between at least two spatial positions, and the platform has a working part located at one of the spatial positions, the working part is used to perform a working purpose on the substrate, so that the transport unit can pick up the substrate and transport it between the placement station and the workstation; wherein, when the displacement stage moves to another spatial position, the platform performs a reciprocating motion relatively away from the transport unit, and the displacement stage returns to one of the spatial positions during the reciprocating motion of the platform.

[0007] To achieve the above objectives, the present invention provides a substrate transport method, the steps of which are as follows:

[0008] a) Prepare a workstation for performing work on a substrate, and the workstation has a stage and a displacement stage, the displacement stage moving between at least two spatial positions, and the stage for performing work on the substrate.

[0009] b) The transport unit carries the substrate to one of the spatial locations to perform the work purpose, and the transport unit picks up the next substrate while the substrate is performing the work purpose;

[0010] c) When the displacement stage moves the previous substrate to another spatial position, the transport unit transports the next substrate to the platform in one of the spatial positions, and the platform makes one reciprocating motion relatively away from the transport unit.

[0011] In step c), the displacement stage returns to one of the spatial positions during the reciprocating motion of the stage, so that the transport unit can extract the previous substrate.

[0012] The above overview is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features of this application will become readily apparent from the accompanying drawings and the following detailed description. Attached Figure Description

[0013] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the various drawings denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings depict only some embodiments disclosed in this application and should not be construed as limiting the scope of this application.

[0014] Figure 1 This is a top view of the present invention.

[0015] Figure 2 This is a plan view of the transport unit of the present invention taking the substrate from the waiting station.

[0016] Figure 3 for Figure 2 A top-down view.

[0017] Figure 4 This is a top view schematic diagram of the transport unit of the present invention transporting the substrate to the workstation.

[0018] Figure 5 for Figure 4 A plan view.

[0019] Figure 6 This is a schematic diagram of the transport unit of the present invention returning to the waiting station to retrieve the substrate.

[0020] Figure 7 This is a planar schematic diagram of the substrate displacement of the workstation of the present invention.

[0021] Figure 8 This is a plan view of the transport unit of the present invention transporting the substrate to the workstation.

[0022] Figure 9 This is a planar schematic diagram of the workstation of the present invention removing the substrate.

[0023] Figure 10 This is a planar schematic diagram of the workstation of the present invention moving the substrate back.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1: Pending station;

[0026] 10: Placement box;

[0027] 11: Opening;

[0028] 2: Workstation;

[0029] 20: Platform;

[0030] 200: Work Department;

[0031] 201: Track;

[0032] 21: Displacement stage;

[0033] 210: Work location;

[0034] 211: Temporary storage location;

[0035] 3: Transport unit;

[0036] 30: Rotation axis;

[0037] 31: Extraction facility;

[0038] 310: Arm;

[0039] 311: Carrier disk;

[0040] 4: Platform;

[0041] 5:Substrate;

[0042] 5a: substrate;

[0043] 5b: substrate;

[0044] 5c: Substrate. Detailed Implementation

[0045] To enable your review committee to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings are provided for reference and illustration only and are not intended to limit the present invention.

[0046] Please see Figure 1This is a top view schematic diagram of the present invention. The present invention provides a substrate transport device and a transport method thereof. The substrate transport device includes a placement station 1, a workstation 2, and a transport unit 3 for transporting substrates 5 between the placement station 1 and the workstation 2. The transport unit 3 is used to transport substrates 5, enabling the transported substrates 5 to be carried between the placement station 1 and the workstation 2. The substrate 5 may be a semiconductor material such as a wafer or a glass plate; wherein:

[0047] The aforementioned waiting station 1, workstation 2, and transport unit 3 can be carried by platform 4. Platform 4 can be a machine tool of general machinery or a flat place such as the ground in a factory. In the embodiments of the present invention, platform 4 can be a machine tool on any machine, and the waiting station 1, transport unit 3, and workstation 2 are arranged in sequence to form a machine or equipment that can perform its work purpose independently.

[0048] Please refer to the following: Figure 2 and Figure 3 As shown, the aforementioned placement station 1 has a placement box 10 for arranging substrates 5 at intervals in direction F. The placement box 10 may have an opening 11 relative to the aforementioned transport unit 3, so that the substrates 5 can be placed into or removed from the placement box 10 through the opening 11. The aforementioned workstation 2 may be a processing device for performing operations such as inspection on the substrates 5, and has a stage 20 and a displacement stage 21. The displacement stage 21 may move between at least two spatial positions 210 and 211 (e.g., two spatial levels that do not overlap with each other), and the two spatial positions 210 and 211 may be a working position 210 and a temporary storage position 211, respectively. The platform 20 has a working part 200, which can be driven by a track 201 or similar means to perform a reciprocating motion relatively away from the transport unit 3. The working part 200 is used to perform its working purpose on the substrate 5, such as to perform testing. When the platform 20 is close to the transport unit 3, the working part 200 is located at the aforementioned working position 210.

[0049] As described above, the aforementioned transport unit 3 is located between the waiting station 1 and the work station 2. The transport unit 3 has a rotating shaft 30 that moves up and down in the direction F, and an extraction mechanism 31 provided on the rotating shaft 30. The extraction mechanism 31 further includes a flexible or telescopic arm 310 and a carrier plate 311 provided at the end of the arm 310. The carrier plate 311 is used to support the substrate 5 from below, so that the substrate 5 to be transported can be extracted and then the substrate 5 can be turned from the waiting station 1 to the work station 2 or from the work station 2 to the waiting station 1 via the rotating shaft 30.

[0050] Therefore, the substrate carrier device of the present invention can be obtained by means of the above-described structure.

[0051] Accordingly, Figure 3 and Figure 4 As shown, when it is to transport the substrate 5 (substrate 5 in sequence, 5a, 5b, 5c, etc., representing the working order) on the waiting station 1 to the workstation 2 for testing, the transport unit 3 uses the carrier tray 311 to extract the substrate 5a from the waiting station 1 and turns the substrate 5a to the workstation 2 so as to place the substrate 5a at the working position 210 on the workstation 2.

[0052] At this time, as Figure 5 and Figure 6 As shown, while the workpiece 200 on the stage 20 of workstation 2 is performing operations such as inspection on the substrate 5a, the transport unit 3 can simultaneously leave workstation 2 and return to the waiting station 1 to prepare for retrieving the next substrate 5b. Next, as... Figure 7 As shown, after the workstation 2 completes the inspection of the first substrate 5a, the previous substrate 5a can be moved from the working position 210 to the temporary storage position 211 by the displacement stage 21. The moving direction can be the aforementioned direction F, so as to free up the working position 210 on the working part 200.

[0053] Therefore, as Figure 8 As shown, after workstation 2 completes the inspection of the previous substrate 5a and moves it to the temporary storage position 211, the transport unit 3 also picks up the next substrate 5b and turns to workstation 2 to place the next substrate 5b in the vacated working position 210 on workstation 2. Figure 9 As shown, during the synchronous detection of substrate 5b, the stage 20 of workstation 2 moves away from the transport unit 3 along the track 201. This creates space for the displacement stage 21 to move the previous substrate 5a from the temporary storage position 211 back to the working position 210, and then retrieve it through the transport unit 3 back to the waiting station 1 for storage. At this point, the stage 20 of the workstation returns to the working position 210 along the track 201, completing one reciprocating motion. Figure 10 As shown; in the storage design of the transport unit 3 returning to the waiting station 1, the results of the inspection of each substrate 5 can be classified and stored, for example, qualified and unqualified substrates can be stored separately. After the transport unit 3 completes the storage operation, it will retrieve the next substrate 5c to be inspected and repeat the above operation, and so on.

[0054] Therefore, the substrate transport method of the present invention can be obtained by means of the above-described structure.

[0055] Therefore, by means of the substrate transport device and transport method of the present invention, since the transport unit 3 transports the substrate 5 separately during the round trip between the waiting station 1 and the work station 2 (such as transporting the substrate 5b on the outbound trip and transporting the substrate 5a back on the return trip), the substrate 5 is transported in one round trip, without wasting work; at the same time, by the reciprocating motion of the platform 20 of the work station 2 and the movement of the displacement stage 21 between the two spatial positions, the transport unit 3 can save the time of waiting for the work station 2 to perform work such as detection, so that the transport of two substrates 5 can be completed in one cycle, thus achieving the benefits of saving time and reducing work.

[0056] However, the above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. Therefore, all equivalent techniques and means made using the contents of the present invention specification and drawings are also included in the scope of the present invention and are hereby stated.

Claims

1. A substrate transport method, characterized in that, The steps include: a) Prepare a workstation for performing a working purpose on a substrate, and the workstation has a stage and a displacement stage, the displacement stage moving between at least two spatial positions, and the stage for performing the working purpose on the substrate. b) The substrate is transported to one of the spatial locations by a transport unit to perform the work purpose, and the transport unit extracts the next substrate while the substrate is performing the work purpose; c) When the displacement stage moves the substrate to another spatial position, the transport unit transports the next substrate to the platform at one of the spatial positions, and the platform performs a reciprocating motion relatively away from the transport unit. In step c), the displacement stage returns to one of the spatial positions during the reciprocating motion of the platform, so that the transport unit can extract the substrate.

2. A substrate transport device, characterized in that, include: A placement station, used to place the substrate; A workstation has a stage and a displacement stage that moves between at least two spatial positions, and the stage has a working part located at one of the spatial positions for performing a working purpose on the substrate. as well as A transport unit is located between the waiting station and the workstation, and extracts the substrate for transport between the waiting station and the workstation; When the displacement platform moves to another of the aforementioned spatial positions, the platform makes a reciprocating motion relatively away from the transport unit, and the displacement platform returns to one of the aforementioned spatial positions during the reciprocating motion of the platform. The substrate carrier is used to perform the method as described in claim 1.

3. The substrate transport device according to claim 2, characterized in that, The station to be placed has a placement box for arranging the substrates at intervals.

4. The substrate transport device according to claim 2, characterized in that, The two spatial locations of the workstation are the working location and the temporary storage location, respectively.

5. The substrate transport device according to claim 4, characterized in that, The working part of the platform is located at the working position.

6. The substrate transport device according to claim 2, characterized in that, The conveying unit has a rotating shaft and an extraction mechanism mounted on the rotating shaft.

7. The substrate transport device according to claim 6, characterized in that, The substrates are arranged at intervals in one direction within the station to be placed, and the rotating shaft can move up and down in the direction stated in the rotation axis.

8. The substrate transport device according to claim 6, characterized in that, The extraction mechanism further includes an arm and a carrier plate located at the end of the arm.

9. The substrate transport device according to claim 8, characterized in that, The arm can be bent or extended.

10. The substrate transport device according to claim 2, characterized in that, The working purpose mentioned above refers to the inspection of the substrate by the working part.

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