Automatic photoresist replacing device, control method and control device thereof, and storage medium

Abstract

The application relates to a photoresist automatic replacement device and a control method, a control device and a storage medium thereof. When the photoresist needs to be replaced, the bottle body of a containing bottle is first clamped and fixed by a first clamping assembly, then the second clamping assembly is driven to move to the bottle cap position of the containing bottle by a moving assembly, the bottle cap is clamped, the bottle cap and the suction pipe are pulled out together by the moving assembly, the first clamping assembly is loosened, a new bottle body filled with photoresist is replaced, the new bottle body is clamped and fixed by the first clamping assembly, the suction pipe is inserted into the new bottle body by the moving assembly, and the bottle cap is capped on the new bottle body. In this way, the photoresist can be automatically replaced, the work efficiency is high, and the phenomenon that the photoresist is polluted by particles during the manual pipe pulling and pipe inserting replacement process can be avoided.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to an automatic photoresist replacement device, its control method, control device, and storage medium. Background Technology

[0002] Photoresist, also known as photoresist agent, is a photosensitive material used in many industrial processes. For example, photolithography can etch a pattern onto the surface of a material. Photoresist is typically stored in a sealed container with a cap that has a straw attached. When needed, the photoresist is drawn out using the straw. Traditionally, replacing photoresist involves manually pulling the straw out of the old container, replacing it with a new container filled with photoresist, and then inserting the straw into the new container. However, manually pulling the straw out of the container and inserting it into the new container can easily cause the straw to come into contact with the container's opening and outer wall, leading to contamination of the photoresist with particulate impurities. Summary of the Invention

[0003] Therefore, it is necessary to overcome the shortcomings of the existing technology and provide an automatic photoresist replacement device, its control method, control device and storage medium, which can realize automatic photoresist replacement and avoid photoresist contamination.

[0004] The technical solution is as follows: An automatic photoresist replacement device, the automatic photoresist replacement device comprising:

[0005] A first clamping assembly is used to clamp, fix, and release the bottle body containing the bottle;

[0006] The insertion and removal mechanism includes a moving component and a second clamping component. The moving component is connected to the second clamping component. The moving component is used to drive the second clamping component to perform lifting and lowering actions. The second clamping component is used to clamp and fix the bottle cap containing the bottle and to release it.

[0007] In one embodiment, the first clamping assembly includes a push-pull mechanism, a first positioning block, and a second positioning block; the automatic photoresist changing device further includes a worktable for supporting the bottle body, the first positioning block being disposed on the worktable and for abutting against a first sidewall of the bottle body, the push-pull mechanism being disposed on the worktable and connected to the second positioning block, the push-pull mechanism being used to drive the second positioning block to move, such that the second positioning block abuts against and moves away from a second sidewall of the bottle body that is opposite to the first sidewall.

[0008] In one embodiment, the automatic photoresist replacement device further includes a distance sensor and a controller; the distance sensor is used to sense the actual distance between the second positioning block and the bottle body, and the controller is used to control the push-pull mechanism to perform push-pull actions and stop push-pull actions according to the actual distance; the controller is also used to control the insertion and removal mechanism to perform actions; the controller is electrically connected to the distance sensor, the push-pull mechanism, and the insertion and removal mechanism respectively.

[0009] In one embodiment, the automatic photoresist replacement device further includes a controller and an image capture device; the controller is electrically connected to the image capture device and the insertion / removal mechanism respectively; the image capture device is used to acquire first image information of the container bottle, the moving component includes a lifting mechanism, the controller is used to determine the coordinate position of the bottle cap according to the position of the bottle cap in the first image information, and to control the lifting mechanism to lift and lower according to the coordinate position.

[0010] In one embodiment, the moving component further includes an x-axis moving mechanism connected to the lifting mechanism, the x-axis moving mechanism being used to drive the lifting mechanism to move along the x-axis; the image capture device is also used to acquire second image information of the distance between the straw containing the bottle and the center of the bottle opening, and the controller is used to control the x-axis moving mechanism to perform actions based on the distance between the straw and the center of the bottle opening in the x-axis direction in the second image information.

[0011] In one embodiment, the moving component further includes a y-axis moving mechanism connected to the x-axis moving mechanism, the y-axis moving mechanism being used to drive the x-axis moving mechanism to move along the y-axis; the controller is also used to control the y-axis moving mechanism to perform actions based on the distance between the straw and the center of the bottle opening in the y-axis direction in the second image information.

[0012] A control method for automatically replacing a photoresist device, the control method comprising the following steps:

[0013] Control the first clamping assembly to clamp and fix the first bottle body containing the bottle;

[0014] The control moving component drives the second clamping component to move up and down to the clamping position, and controls the second clamping component to clamp and fix the bottle cap containing the bottle;

[0015] The lifting and lowering motion of the control moving component causes the bottle cap and straw to be pulled out from inside the first bottle body;

[0016] Control the first clamping component to release the first bottle body and replace it with a second bottle body equipped with photoresist;

[0017] After replacing the second bottle with the photoresist, control the first clamping assembly to clamp and fix the second bottle body containing the bottle;

[0018] The moving component is controlled to drive the second clamping component to move up and down, so that the straw is inserted into the second bottle and the bottle cap is placed on the second bottle.

[0019] Control the first clamping component to release the second bottle body, and control the second clamping component to release the bottle cap.

[0020] In one embodiment, the step of controlling the moving component to drive the second clamping component to move to the clamping position includes:

[0021] Obtain the first coordinate position of the bottle cap;

[0022] Calculate the second distance that the second clamping component needs to descend based on the second coordinate position of the second clamping component and the first coordinate position of the bottle cap;

[0023] The second clamping component is driven to descend based on the second distance, causing the second clamping component to move to the clamping position.

[0024] In one embodiment, the step of driving the second clamping component to descend based on the second distance is further included:

[0025] Adjust the position of the second clamping component according to the second coordinate position of the second clamping component and the first coordinate position of the bottle cap, so that the second clamping component is located directly above the bottle cap.

[0026] In one embodiment, the step of controlling the lifting and lowering action of the moving component to pull the bottle cap and straw outward from the inside of the bottle includes:

[0027] Obtain the first offset between the central axis of the straw and the central axis of the first bottle;

[0028] When the first offset exceeds the preset offset, the positions of the bottle cap and the straw are adjusted according to the first offset so that the first offset is less than or equal to the preset offset.

[0029] In one embodiment, the step of controlling the first clamping assembly to clamp and fix the second bottle body containing the photoresist after replacing the bottle with one equipped with photoresist includes:

[0030] Obtain the third distance between the abutting surface of the second positioning block of the first clamping assembly and the second side wall of the second bottle body, wherein the second bottle body is placed on the worktable and the first side wall of the second bottle body is positioned to abut against the first positioning block of the first clamping assembly.

[0031] The second positioning block of the first clamping assembly is moved a third distance toward the second bottle body so that the abutting surface of the second positioning block abuts against the second side wall of the second bottle body.

[0032] In one embodiment, controlling the moving component to drive the second clamping component to move up and down, so that the straw is inserted into the second bottle body, and so that the bottle cap is placed on the second bottle body, includes the following steps:

[0033] Obtain the third coordinate position of the bottle cap and the fourth coordinate position of the bottle opening of the second bottle body;

[0034] Adjust the position of the second clamping component according to the third coordinate position and the fourth coordinate position, so that the bottle cap is located directly above the bottle opening of the second bottle body.

[0035] In one embodiment, controlling the moving component to drive the second clamping component to move up and down, so that the straw is inserted into the second bottle body, and so that the bottle cap is placed on the second bottle body, includes the following steps:

[0036] Obtain the second offset between the central axis of the straw and the central axis of the second bottle;

[0037] When the second offset exceeds the preset offset, the positions of the bottle cap and the straw are adjusted according to the second offset so that the second offset is less than or equal to the preset offset.

[0038] A control device for automatically changing photoresist, the control device for automatically changing photoresist includes:

[0039] A first control module is used to control a first clamping component to clamp and fix the first bottle body containing the bottle.

[0040] The second control module is used to control the moving component to drive the second clamping component to move up and down to the clamping position, and to control the second clamping component to clamp and fix the bottle cap containing the bottle.

[0041] The third control module is used to control the lifting and lowering action of the moving component to pull the bottle cap and straw outward from the inside of the first bottle body.

[0042] The fourth control module is used to control the first clamping component to release the first bottle body and replace it with a second bottle body equipped with photoresist.

[0043] The fifth control module is used to control the first clamping component to clamp and fix the second bottle body containing the bottle after the second bottle equipped with photoresist is replaced;

[0044] The sixth control module is used to control the moving component to drive the second clamping component to move up and down, so that the straw is inserted into the second bottle body and the bottle cap is placed on the second bottle body;

[0045] The seventh control module is used to control the first clamping component to release the second bottle body and to control the second clamping component to release the bottle cap.

[0046] A computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the method.

[0047] The aforementioned automatic photoresist replacement device, control method, control unit, and storage medium, when photoresist needs to be replaced, firstly, the first clamping component clamps and fixes the bottle body of the container bottle. Then, the moving component drives the second clamping component to move up and down, moving it to the bottle cap position and clamping the cap. Next, the moving component drives the second clamping component to move up and down, pulling the cap and straw outward together. The first clamping component releases the original bottle body and replaces it with a new bottle body filled with photoresist. The first clamping component clamps and fixes the new bottle body, and then the moving component drives the second clamping component to move up and down, inserting the straw into the new bottle body and placing the cap on the new bottle body. In this way, automatic photoresist replacement can be achieved, with high work efficiency, and the phenomenon of photoresist contamination by particulate impurities during manual tube removal and insertion can be avoided. Attached Figure Description

[0048] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0049] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0050] Figure 1This is a schematic diagram of the structure of the first clamping component in the automatic photoresist changing device according to an embodiment of the present invention, which is used to clamp and fix the first bottle body.

[0051] Figure 2 This is a schematic diagram of the structure of the first clamping component clamping and fixing the first bottle body in an automatic photoresist changing device according to an embodiment of the present invention;

[0052] Figure 3 This is a schematic diagram of the structure of the second clamping component clamping and fixing the bottle cap in an automatic photoresist replacement device according to an embodiment of the present invention;

[0053] Figure 4 This is a schematic diagram of the process in which the second clamping component pulls the straw outward from the first bottle body in the automatic photoresist replacement device according to an embodiment of the present invention.

[0054] Figure 5 This is a schematic diagram of the structure of an automatic photoresist replacement device according to an embodiment of the present invention, in which the second clamping component drives the straw to be completely pulled outward from the first bottle body.

[0055] Figure 6 This is a schematic diagram of the process of an automatic photoresist replacement device according to an embodiment of the present invention;

[0056] Figure 7 This is a schematic diagram illustrating the specific process of an automatic photoresist replacement device according to a specific embodiment of the present invention.

[0057] 10. First clamping assembly; 11. Push-pull mechanism; 12. First positioning block; 13. Second positioning block; 14. First slide rail; 20. Insertion and removal mechanism; 21. Moving assembly; 211. Lifting mechanism; 212. X-axis moving mechanism; 213. Y-axis moving mechanism; 22. Second clamping assembly; 31. Bottle body; 32. Bottle cap; 33. Straw; 40. Controller; 50. Image capture device; 60. Cabinet; 61. Workbench; 62. Roller; 63. Battery. Detailed Implementation

[0058] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0059] As described in the background section, photoresist in the prior art has the problem of being contaminated by particulate impurities. The inventors have found that the reason for this problem is that there is no monitoring mechanism and the photoresist replacement process cannot be traced.

[0060] For the reasons mentioned above, the present invention provides an automatic photoresist replacement device and its control method, control device and storage medium scheme, which can realize automatic photoresist replacement and avoid photoresist contamination.

[0061] See Figures 1 to 5 , Figure 1 This diagram illustrates the structure of the first clamping assembly 10 in an automatic photoresist changing device according to an embodiment of the present invention, which is prepared to clamp and fix the first bottle body. Figure 2 This diagram illustrates the structure of the first clamping assembly 10 clamping and fixing the first bottle body in an automatic photoresist changing device according to an embodiment of the present invention. Figure 3 This diagram illustrates the structure of the second clamping assembly 22 clamping and fixing the bottle cap 32 in an automatic photoresist changing device according to an embodiment of the present invention. Figure 4 This diagram illustrates the structure of an automatic photoresist replacement device according to an embodiment of the present invention, showing the process by which the second clamping assembly 22 pulls the straw 33 outward from the first bottle. Figure 5 This diagram illustrates the structure of an automatic photoresist replacement device according to an embodiment of the present invention, in which the second clamping component 22 drives the straw 33 to be completely pulled outward from the first bottle body. An embodiment of the present invention provides an automatic photoresist replacement device, comprising: a first clamping component 10 and a insertion / removal mechanism 20. The first clamping component 10 is used to clamp and fix the bottle body 31 containing the bottle. The insertion / removal mechanism 20 includes a moving component 21 and a second clamping component 22. The moving component 21 is connected to the second clamping component 22 and is used to drive the second clamping component 22 to perform a lifting and lowering action. The second clamping component 22 is used to clamp and fix the bottle cap 32 containing the bottle.

[0062] The aforementioned automatic photoresist replacement device, when it is necessary to replace the photoresist, such as... Figures 1 to 5As shown, it is necessary to first completely pull the bottle cap 32 and straw 33 outward from the inside of the bottle body 31. This involves first clamping and fixing the bottle body 31 containing the bottle using the first clamping component 10, then driving the second clamping component 22 to move up and down via the moving component 21. When the second clamping component 22 moves to the position of the bottle cap 32, it clamps the cap. Next, the moving component 21 drives the second clamping component 22 to move up and down, pulling the cap 32 and straw 33 outward together. The first clamping component 10 then releases the original bottle body 31 (also...). The process involves replacing the first bottle body with a new bottle body 31 (i.e., the second bottle body) filled with photoresist. Then, a straw 33 is inserted into the second bottle body, and a cap 32 is attached. This process is the reverse of the action of pulling the straw 33 outwards. First, the first clamping component 10 clamps and secures the new bottle body 31 (i.e., the second bottle body). Then, the moving component 21 drives the second clamping component 22 to move up and down, causing the straw 33 to be inserted into the new bottle body 31 and the cap 32 to be placed on it. This allows for automatic photoresist replacement, resulting in high efficiency and avoiding particle contamination of the photoresist during manual insertion and removal of the straw.

[0063] It should be noted that the above-mentioned automatic photoresist replacement device is applicable to all photoresist replacements, as well as the replacement of photoresist rigid tubes and flexible tubes; in addition, the entire photoresist replacement process is recorded, which allows for complete traceability of defects.

[0064] Please see Figure 1In one embodiment, the first clamping assembly 10 includes a push-pull mechanism 11, a first positioning block 12, and a second positioning block 13. The automatic photoresist changing device also includes a worktable 61. The worktable 61 supports the bottle body 31, and the first positioning block 12 is disposed on the worktable 61 and abuts against the first sidewall of the bottle body 31. The push-pull mechanism 11 is disposed on the worktable 61 and connected to the second positioning block 13. The push-pull mechanism 11 drives the second positioning block 13 to move, so that the second positioning block 13 abuts against and moves away from the second sidewall of the bottle body 31 opposite to the first sidewall. Thus, the first clamping assembly 10 is designed as a quick-clamping structure. Specifically, when the first clamping assembly 10 needs to clamp and fix the bottle body 31 containing the bottle, the bottle body 31 is placed on the worktable 61 with its first sidewall abutting against the first positioning block 12. The push-pull mechanism 11 drives the second positioning block 13 to move towards the bottle body 31, so that the second positioning block 13 abuts against the second sidewall of the bottle body 31, thereby clamping and fixing the bottle body 31. When the first clamping assembly 10 needs to release the bottle body 31 containing the bottle, the push-pull mechanism 11 drives the second positioning block 13 to move away from the bottle body 31, so that the second positioning block 13 releases the bottle body 31. The first clamping assembly 10 adopts this method of clamping and fixing the bottle body 31. The clamping force and clamping strength of the bottle body 31 are flexibly controlled by controlling the moving distance of the second positioning block 13. This makes it easy to clamp and fix the bottle body 31, while also avoiding damage to the bottle body 31.

[0065] As some alternative solutions, the first clamping component 10 can also clamp and fix the bottle body 31 by means of claws, or by means of suction cups, or by means of magnetic fixation, etc. The specific configuration can be flexibly adjusted and set according to actual needs, and is not limited here.

[0066] The push-pull mechanism 11 includes, but is not limited to, a motor screw drive structure, a cylinder drive structure, a hydraulic cylinder drive structure, a motor pulley drive structure, a motor gear drive structure, a telescopic mechanism, etc., as long as it can provide power to drive the second positioning block 13 to move. Its specific structural form is not limited here and can be flexibly adjusted and set according to actual needs.

[0067] Please see Figure 1In one embodiment, the automatic photoresist replacement device further includes a distance sensor (not shown) and a controller 40. The distance sensor is used to sense the actual distance between the second positioning block 13 and the bottle body 31, and the controller 40 is used to control the push-pull mechanism 11 to perform push-pull actions and stop push-pull actions according to the actual distance. The controller 40 is also used to control the insertion and removal mechanism 20 to perform actions. The controller 40 is electrically connected to the distance sensor, the push-pull mechanism 11, and the insertion and removal mechanism 20, respectively. In this way, the distance sensor can sense the actual distance between the second positioning block 13 and the bottle body 31, and the controller 40 controls the push-pull mechanism 11 to perform push-pull actions and stop push-pull actions according to the actual distance. This allows for precise control of the forward movement distance of the second positioning block 13, enabling a stable clamping and fixing of the bottle body 31, while avoiding damage to the bottle body 31 due to excessive forward movement of the second positioning block 13, and avoiding instability in clamping the bottle body 31 due to insufficient forward movement of the second positioning block 13.

[0068] Please see Figure 1 In one embodiment, the portion of the first positioning block 12 and / or the second positioning block 13 that abuts against the bottle body 31 has an abutment surface adapted to the outer wall of the bottle body 31. The bottle body 31 is generally cylindrical, prismatic, etc., and the abutment surface is typically concave. Specifically, the concave surface includes, but is not limited to, a V-shaped surface, a U-shaped surface, or an arc-shaped surface. Thus, the first positioning block 12 and / or the second positioning block 13, through the concave surface, tightly abut against the bottle body 31, achieving stable clamping and fixing of the bottle body 31.

[0069] Please see Figure 1 In one embodiment, the first clamping assembly 10 further includes a first slide rail 14 disposed on the worktable 61. The second positioning block 13 is slidably disposed on the first slide rail 14. Thus, during the clamping and releasing of the bottle body 31, the push-pull mechanism 11 drives the second positioning block 13 to move along the first slide rail 14, resulting in more stable and reliable operation and better positioning effect.

[0070] Please see Figure 1In one embodiment, the automatic photoresist replacement device further includes a controller 40 and an image capture device 50. The controller 40 is electrically connected to the image capture device 50 and the insertion / removal mechanism 20, respectively. The image capture device 50 is used to acquire first image information of the container bottle. The moving component 21 includes a lifting mechanism 211. The controller 40 is used to determine the coordinate position of the bottle cap 32 based on the position of the bottle cap 32 in the first image information, and to control the lifting mechanism 211 to lift and lower based on the coordinate position. Thus, after the image capture device 50 acquires the first image information of the container bottle, the controller 40 obtains the coordinate position of the bottle cap 32 based on the first image information. By controlling the lifting mechanism 211 to lift and lower based on the coordinate position, it is ensured that when the moving component 21 drives the second clamping component 22 to descend and approach the bottle cap 32, the second clamping component 22 can just clamp and fix the bottle cap 32. In addition, it is also ensured that the lifting mechanism 211 drives the second clamping component 22 to move up and down to completely remove the straw 33 from the inside of the bottle body 31.

[0071] Please see Figure 1 In one embodiment, the moving component 21 further includes an x-axis moving mechanism 212 connected to the lifting mechanism 211. The x-axis moving mechanism 212 is used to drive the lifting mechanism 211 to move along the x-axis. The image capture device 50 is also used to acquire second image information about the distance between the straw 33 containing the bottle and the center of the bottle opening. The controller 40 is used to control the x-axis moving mechanism 212 to operate according to the distance between the straw 33 and the center of the bottle opening in the x-axis direction in the second image information. Thus, when the distance between the straw 33 and the center of the bottle opening in the x-axis direction is less than a first preset value, the x-axis moving mechanism 212 does not operate; conversely, when the distance between the straw 33 and the center of the bottle opening in the x-axis direction is greater than the first preset value, it indicates that the straw 33 is far from the center of the bottle opening and there is a greater risk of contact with the bottle opening. The x-axis moving mechanism 212 promptly moves to adjust the position of the straw 33 in the bottle opening to ensure that the straw 33 does not contact the inner wall of the bottle opening during insertion and removal.

[0072] Please see Figure 1In one embodiment, the moving component 21 further includes a y-axis moving mechanism 213 connected to the x-axis moving mechanism 212, which drives the x-axis moving mechanism 212 to move along the y-axis. The controller 40 is also used to control the y-axis moving mechanism 213 to move according to the distance between the straw 33 and the center of the bottle opening in the y-axis direction as shown in the second image information. Thus, similar to the x-axis moving mechanism 212, when the distance between the straw 33 and the center of the bottle opening in the y-axis direction is less than a second preset value, the y-axis moving mechanism 213 does not move; conversely, when the distance between the straw 33 and the center of the bottle opening in the y-axis direction is greater than the second preset value, it indicates that the straw 33 is far from the center of the bottle opening and there is a greater risk of contact with the bottle opening. The y-axis moving mechanism 213 promptly moves to adjust the position of the straw 33 in the bottle opening to ensure that the straw 33 does not contact the inner wall of the bottle opening during insertion and removal.

[0073] Among them, the push-pull mechanism 11, the lifting mechanism 211, the x-axis moving mechanism 212 and the y-axis moving mechanism 213 are each independently set to include, but are not limited to, a motor screw drive structure, a cylinder drive structure, a hydraulic cylinder drive structure, a motor pulley drive structure, a motor gear drive structure, a telescopic mechanism, etc., as long as they can provide power to drive the movement. Their specific structural forms are not limited here and can be flexibly adjusted and set according to actual needs.

[0074] Please see Figure 1 In one embodiment, the automatic photoresist replacement device further includes a cabinet 60. The cabinet 60 has an openable door (not shown). Specifically, the door may include, but is not limited to, a transparent panel, allowing easy observation of the interior of the cabinet 60. A workbench 61 is located inside the cabinet 60, and the first clamping assembly 10 is located inside the cabinet 60 and mounted on the workbench 61. Furthermore, a plug-in / plug-out mechanism 20 is located inside the cabinet 60 and above the workbench 61.

[0075] Please see Figure 1 In one embodiment, the controller 40 is located inside the cabinet 60.

[0076] Please see Figure 1 In one embodiment, the bottom of the cabinet 60 is provided with casters 62. Optionally, the casters 62 may include, but are not limited to, casters, so as to facilitate easy and free movement.

[0077] In addition, the cabinet 60 houses a battery 63 or power supply, which is electrically connected to the first clamping assembly 10, the insertion / removal mechanism 20, and the controller 40. The battery 63 may be, for example, a rechargeable or non-rechargeable battery. The power supply may be, for example, a DC or AC power supply.

[0078] Please see Figures 1 to 6 , Figure 6 A schematic flowchart of an automatic photoresist replacement device according to an embodiment of the present invention is shown. In one embodiment, a control method for the automatic photoresist replacement device includes the following steps:

[0079] Step S110: Control the first clamping assembly 10 to clamp and fix the first bottle body containing the bottle;

[0080] Thus, the first bottle body is clamped and fixed by the first clamping component 10, so that the cap can be removed in subsequent steps.

[0081] Step S120: Control the moving component 21 to drive the second clamping component 22 to move up and down to the clamping position, and control the second clamping component 22 to clamp and fix the bottle cap 32 containing the bottle.

[0082] Step S130: Control the lifting action of the moving component 21 to pull the bottle cap 32 and straw 33 outward from the inside of the first bottle;

[0083] Step S140: Control the first clamping component 10 to release the first bottle body and replace it with the second bottle body equipped with photoresist;

[0084] The first bottle contains photoresist that is either completely or almost completely used up, while the second bottle contains photoresist that is either fully filled or contains at least a preset amount of photoresist. Therefore, the first bottle needs to be replaced with the second bottle.

[0085] Step S150: After replacing the second bottle with the one containing the photoresist, control the first clamping assembly 10 to clamp and fix the second bottle body containing the bottle.

[0086] Step S160: Control the moving component 21 to drive the second clamping component 22 to move up and down, so that the straw 33 is inserted into the second bottle body and the bottle cap 32 is placed on the second bottle body.

[0087] Step S170: Control the first clamping component 10 to release the second bottle body, and control the second clamping component 22 to release the bottle cap 32.

[0088] The control method for the above-mentioned automatic photoresist replacement device can achieve automatic photoresist replacement, with high working efficiency, and can avoid the phenomenon of photoresist contamination by particles during the process of manually removing and inserting tubes to replace photoresist.

[0089] Please see Figures 1 to 5 and Figure 7 , Figure 7 A schematic flowchart of an automatic photoresist replacement device according to an embodiment of the present invention is shown. In one embodiment, the step of controlling the first clamping assembly 10 to clamp and fix the first bottle body containing the bottle includes:

[0090] Step S111: Obtain the first distance between the abutting surface of the second positioning block 13 of the first clamping assembly 10 and the second side wall of the first bottle body, wherein the first bottle body is placed on the workbench 61 and the first side wall of the first bottle body is positioned to abut against the first positioning block 12 of the first clamping assembly 10.

[0091] Step S112: Control the second positioning block 13 of the first clamping assembly 10 to move a first distance toward the first bottle body, so that the abutting surface of the second positioning block 13 abuts against the second side wall.

[0092] In one embodiment, the step of controlling the moving component 21 to drive the second clamping component 22 to move to the clamping position includes:

[0093] Step S121: Obtain the first coordinate position of the bottle cap 32 and the second coordinate position of the second clamping component 22;

[0094] Specifically, a six-point teaching method coordinate system is used to position the bottle cap 32: a spatial rectangular coordinate system is established with respect to the X, Y, and Z axes. The origin of the coordinate system is selected from a point on the central axis of the bottle body 31 that intersects with the top surface of the bottle cap 32, and the central axis is regarded as the Z-axis. A direction parallel to, for example, the direction of movement of the push-pull mechanism 11 is regarded as the X-axis, and directions perpendicular to the X and Z axes are regarded as the Y-axis. In the spatial rectangular coordinate system, the bottle cap 32 has six degrees of freedom: three degrees of freedom for movement along the X, Y, and Z axes, and three degrees of freedom for rotation about these three axes. The six degrees of freedom of the bottle cap 32 are measured using six reasonably distributed support points (i.e., for example, a hexagon is defined on the end face of the bottle cap 32, the center of which coincides with the center of the end face of the bottle cap 32, and the six vertices of the hexagon serve as the six support points), thus locking the correct position of the bottle cap 32. Points a1, a2, and a3 represent the main positioning surface A, restricting the rotational degrees of freedom in the X and Y directions and the translational degrees of freedom in the Z direction; points a4 and a5 represent the side surface B, positioning the translational degrees of freedom in the X direction and the rotational degrees of freedom in the Z direction; point a6 represents the thrust surface C, positioning the translational degree of freedom in the Y direction. In this way, all six degrees of freedom of the bottle cap 32 are restricted, and the positioning is complete.

[0095] The first coordinate position is selected from any point on the bottle cap 32, and specifically, for example, the center of the top surface of the bottle cap 32 is used as a reference point. Similarly, the second coordinate position is selected from any point on the second clamping assembly 22, and specifically, for example, the center position of the clamping part of the second clamping assembly 22 is used as a reference point.

[0096] Step S123: Calculate the second distance that the second clamping component 22 needs to descend based on the second coordinate position and the first coordinate position;

[0097] The second distance is obtained by the difference between the two coordinate values ​​of the second coordinate position and the first coordinate position along the Z-axis.

[0098] Step S124: Drive the second clamping component 22 to descend according to the second distance, so that the second clamping component 22 moves to the clamping position.

[0099] Thus, when the second clamping component 22 moves to the clamping position, the second clamping component 22 can accurately clamp and fix the bottle cap 32.

[0100] In one embodiment, the step of driving the second clamping component 22 to descend based on the second distance is further included:

[0101] Step S122: Adjust the position of the second clamping component 22 according to the second coordinate position of the second clamping component 22 and the first coordinate position of the bottle cap 32, so that the second clamping component 22 is located directly above the bottle cap 32.

[0102] In this way, by adjusting the position of the second clamping component 22 on the two-dimensional plane formed by the X-axis and Y-axis, the second clamping component 22 can be positioned directly above the bottle cap 32, which ensures that when the second clamping component 22 is lowered to the clamping position, it can successfully clamp and fix the bottle cap 32.

[0103] In this case, the order of steps S122 and S123 can be interchanged.

[0104] In one embodiment, the step of controlling the lifting and lowering action of the moving component 21 to pull the bottle cap 32 and straw 33 outward from the inside of the bottle body 31 includes:

[0105] Step S131: Obtain the first offset between the central axis of the straw 33 and the central axis of the first bottle;

[0106] Step S132: When the first offset exceeds the preset offset, adjust the position of the bottle cap 32 and the straw 33 according to the first offset so that the first offset is less than or equal to the preset offset.

[0107] Here, the central axis of the first bottle is taken as the Z-axis, and the coordinates of any point on the central axis of the straw 33 are, for example, (x1, y1), and the coordinates corresponding to the preset offset are, for example, (x2, y2). x1 and y1 need to satisfy x1≦x2 and y1≦y2.

[0108] Thus, during the process of controlling the movement component 21 to pull the bottle cap 32 and straw 33 outward, the position of the straw 33 can be adjusted in time so that the straw 33 is close to the center of the bottle mouth, thereby avoiding contact between the straw 33 and the mouth wall of the bottle during the process of pulling outward, which would cause light-blocking pollution.

[0109] In one embodiment, after replacing the bottle body 31 equipped with photoresist, the step of controlling the first clamping assembly 10 to clamp and fix the second bottle body containing the bottle includes:

[0110] Step S151: Obtain the third distance between the abutting surface of the second positioning block 13 of the first clamping component 10 and the second side wall of the second bottle body, wherein the second bottle body is placed on the worktable 61 and the first side wall of the second bottle body is positioned to abut against the first positioning block 12 of the first clamping component 10.

[0111] Step S152: Control the second positioning block 13 of the first clamping assembly 10 to move a third distance toward the second bottle body, so that the abutting surface of the second positioning block 13 abuts against the second side wall of the second bottle body.

[0112] In one embodiment, controlling the moving component 21 to drive the second clamping component 22 to move up and down, so that the straw 33 is inserted into the second bottle and the bottle cap 32 is placed on the second bottle includes the following steps:

[0113] Step S161: Obtain the third coordinate position of the bottle cap 32 and the fourth coordinate position of the bottle opening of the second bottle body;

[0114] The third coordinate position is selected from any point on the bottle cap 32, specifically, for example, using the center of the top surface of the bottle cap 32 as a reference point. Similarly, the fourth coordinate position is selected from any point on the bottle opening, specifically, for example, using the center of the bottle opening as a reference point.

[0115] Step S162: Adjust the position of the second clamping component 22 according to the third coordinate position and the fourth coordinate position so that the bottle cap 32 is located directly above the bottle opening of the second bottle body.

[0116] Thus, by adjusting the position of the second clamping component 22 on the two-dimensional plane formed by the X-axis and Y-axis, the bottle cap 32 held by the second clamping component 22 can be positioned directly above the bottle opening, which ensures that the bottle cap 32 can be smoothly aligned and placed on the bottle opening.

[0117] In one embodiment, controlling the moving component 21 to drive the second clamping component 22 to move up and down, so that the straw 33 is inserted into the second bottle and the bottle cap 32 is placed on the second bottle includes the following steps:

[0118] Step S163: Obtain the second offset between the central axis of the straw 33 and the central axis of the second bottle;

[0119] Step S164: When the second offset exceeds the preset offset, adjust the position of the bottle cap 32 and the straw 33 according to the second offset so that the second offset is less than or equal to the preset offset.

[0120] Here, the central axis of the bottle opening is taken as the Z-axis, and the coordinates of any point on the central axis of the straw 33 are, for example, (x3, y3). The coordinates corresponding to the preset offset are, for example, (x2, y2). x3 and y3 need to satisfy x3≦x2 and y3≦y2.

[0121] In this way, during the process of controlling the movement of the moving component 21 to install the bottle cap 32 and the straw 33 into the second bottle body, the position of the straw 33 can be adjusted in time so that the straw 33 is close to the center of the bottle mouth, thereby avoiding the straw 33 from contacting the mouth wall of the bottle during the process of inserting it into the second bottle body, which would cause light-blocking pollution.

[0122] It should be understood that, although Figures 6-7 The steps in the flowchart are shown sequentially as indicated by the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified herein, there is no strict order in which these steps are executed, and they can be performed in other orders. Figures 6-7 At least some of the steps in the process may include multiple steps or multiple stages. These steps or stages are not necessarily completed at the same time, but may be executed at different times. The execution order of these steps or stages is not necessarily sequential, but may be executed in turn or alternately with other steps or at least some of the steps or stages in other steps.

[0123] In one embodiment, a control device for automatically replacing a photoresist device includes: a first control module, a second control module, a third control module, a fourth control module, a fifth control module, a sixth control module, and a seventh control module. The first control module controls the first clamping assembly 10 to clamp the first bottle body of the fixed container bottle. The second control module controls the moving assembly 21 to move the second clamping assembly 22 up and down to the clamping position, and controls the second clamping assembly 22 to clamp the bottle cap 32 of the fixed container bottle. The third control module controls the moving assembly 21 to move the bottle cap 32 and straw 33 outward from the inside of the first bottle body. The fourth control module controls the first clamping assembly 10 to release the first bottle body and replace it with a second bottle body containing the photoresist. The fifth control module controls the first clamping assembly 10 to clamp the second bottle body of the fixed container bottle after replacing it with the second bottle body containing the photoresist. The sixth control module controls the moving assembly 21 to move the second clamping assembly 22 up and down, causing the straw 33 to be inserted into the second bottle body and causing the bottle cap 32 to be placed on the second bottle body. The seventh control module is used to control the first clamping component 10 to release the second bottle body and to control the second clamping component 22 to release the bottle cap 32.

[0124] The control device for the aforementioned automatic photoresist replacement device can automatically replace the photoresist, has high working efficiency, and can avoid the phenomenon of photoresist being contaminated by particles during the process of manually removing and inserting tubes to replace the photoresist.

[0125] Specific limitations regarding the control device for automatically replacing the photoresist can be found in the limitations of the control method for automatically replacing the photoresist described above, and will not be repeated here. Each module in the aforementioned control device for automatically replacing the photoresist can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in or independent of the processor in a computer device in hardware form, or stored in the memory of a computer device in software form, so that the processor can call and execute the operations corresponding to each module. It should be noted that the module division in this embodiment is illustrative and only represents a logical functional division; other division methods may be used in actual implementation.

[0126] In one embodiment, a computer-readable storage medium stores a computer program thereon, which, when executed by a processor, implements the steps of the method described in any of the above embodiments.

[0127] The aforementioned computer-readable storage medium enables automatic replacement of photoresist, resulting in high working efficiency and avoiding the phenomenon of photoresist contamination by particles during manual tube removal and insertion for photoresist replacement.

[0128] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the methods described above. Any references to memory, storage, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, or optical storage, etc. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc.

[0129] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0130] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the disclosed patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this patent should be determined by the appended claims.

[0131] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0132] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0133] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0134] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0135] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

Claims

1. An automatic photoresist replacement device, wherein the photoresist is stored in a container, characterized in that, The automatic photoresist replacement device includes: The first clamping assembly is used to clamp, fix and release the bottle body containing the bottle. The first clamping assembly includes a push-pull mechanism, a first positioning block and a second positioning block. The part of the first positioning block and / or the second positioning block that abuts against the bottle body is provided with a concave abutment surface adapted to the outer wall of the bottle body. The insertion and removal mechanism includes a moving component and a second clamping component. The moving component is connected to the second clamping component. The moving component is used to drive the second clamping component to perform lifting and lowering actions. The second clamping component is used to clamp and fix the bottle cap containing the bottle and to release it. The moving component includes a lifting mechanism and an x-axis moving mechanism connected to the lifting mechanism. The x-axis moving mechanism is used to drive the lifting mechanism to move along the x-axis. A distance sensor, used to sense the actual distance between the second positioning block and the bottle body; An image capture device is used to acquire first image information of the container bottle and second image information of the distance between the straw of the container bottle and the center of the bottle opening; The controller, when the photoresist needs to be replaced, controls the first clamping component to clamp and fix the bottle body of the container bottle. Then, the second clamping component is driven to move up and down through the moving component. When it moves to the position of the bottle cap, it clamps the bottle cap. Then, the second clamping component is driven to move up and down through the moving component, causing the bottle cap and straw to be pulled out together. The first clamping component releases the first bottle body and replaces it with a second bottle body filled with photoresist. Then, the straw is inserted into the second bottle body and the bottle cap is installed on the second bottle body. That is, the second bottle body is first clamped and fixed by the first clamping component, and then the second clamping component is driven to move up and down through the moving component, causing the straw to be inserted into the second bottle body, so that the bottle cap is installed on the second bottle body. The controller is also used to control the x-axis moving mechanism to operate according to the distance between the straw and the center of the bottle mouth in the x-axis direction in the second image information.

2. The automatic photoresist replacement device according to claim 1, characterized in that, The automatic photoresist replacement device also includes a worktable for supporting the bottle body. The first positioning block is disposed on the worktable and abuts against the first sidewall of the bottle body. The push-pull mechanism is disposed on the worktable and connected to the second positioning block. The push-pull mechanism is used to drive the second positioning block to move so that the second positioning block abuts against and moves away from the second sidewall of the bottle body that is opposite to the first sidewall.

3. The automatic photoresist replacement device according to claim 1, characterized in that, The controller is electrically connected to the distance sensor, the push-pull mechanism, the plug-in mechanism, and the image capture device, respectively.

4. The automatic photoresist replacement device according to claim 1, characterized in that, The moving component also includes a y-axis moving mechanism connected to the x-axis moving mechanism, the y-axis moving mechanism being used to drive the x-axis moving mechanism to move along the y-axis; the controller is also used to control the y-axis moving mechanism to perform actions based on the distance between the straw and the center of the bottle opening in the y-axis direction in the second image information.

5. A control method for an automatic photoresist replacement device, based on the automatic photoresist replacement device of claim 1, to achieve automatic photoresist replacement, characterized in that... The control method for the automatic photoresist replacement device includes the following steps: Control the first clamping assembly to clamp and fix the first bottle body containing the bottle; The control moving component drives the second clamping component to move up and down to the clamping position, and controls the second clamping component to clamp and fix the bottle cap containing the bottle; The lifting and lowering motion of the control moving component causes the bottle cap and straw to be pulled out from inside the first bottle body; Control the first clamping component to release the first bottle body and replace it with a second bottle body equipped with photoresist; After replacing the second bottle with the photoresist, control the first clamping assembly to clamp and fix the second bottle body containing the bottle; The moving component is controlled to drive the second clamping component to move up and down, so that the straw is inserted into the second bottle and the bottle cap is placed on the second bottle. Control the first clamping component to release the second bottle body, and control the second clamping component to release the bottle cap.

6. The control method for automatically changing the photoresist device according to claim 5, characterized in that, The steps for controlling the moving component to drive the second clamping component to move to the clamping position include: Obtain the first coordinate position of the bottle cap; Calculate the second distance that the second clamping component needs to descend based on the second coordinate position of the second clamping component and the first coordinate position of the bottle cap; The second clamping component is driven to descend based on the second distance, causing the second clamping component to move to the clamping position.

7. The control method for automatically replacing the photoresist device according to claim 6, characterized in that, Before the step of driving the second clamping component to descend based on the second distance, the following step is also included: Adjust the position of the second clamping component according to the second coordinate position of the second clamping component and the first coordinate position of the bottle cap, so that the second clamping component is located directly above the bottle cap.

8. The control method for automatically replacing the photoresist device according to claim 5, characterized in that, The step of controlling the lifting and lowering action of the moving component to pull the bottle cap and straw out from inside the bottle includes: Obtain the first offset between the central axis of the straw and the central axis of the first bottle; When the first offset exceeds the preset offset, the positions of the bottle cap and the straw are adjusted according to the first offset so that the first offset is less than or equal to the preset offset.

9. The control method for automatically changing the photoresist device according to claim 5, characterized in that, After replacing the bottle with one equipped with light resist, the step of controlling the first clamping assembly to clamp and fix the second bottle body containing the bottle includes: Obtain the third distance between the abutting surface of the second positioning block of the first clamping assembly and the second side wall of the second bottle body, wherein the second bottle body is placed on the worktable and the first side wall of the second bottle body is positioned to abut against the first positioning block of the first clamping assembly. The second positioning block of the first clamping assembly is moved a third distance toward the second bottle body so that the abutting surface of the second positioning block abuts against the second side wall of the second bottle body.

10. The control method for automatically changing the photoresist device according to claim 5, characterized in that, The steps of controlling the moving component to drive the second clamping component to move up and down, so that the straw is inserted into the second bottle body and the bottle cap is placed on the second bottle body include: Obtain the third coordinate position of the bottle cap and the fourth coordinate position of the bottle opening of the second bottle body; Adjust the position of the second clamping component according to the third coordinate position and the fourth coordinate position, so that the bottle cap is located directly above the bottle opening of the second bottle body.

11. The control method for automatically changing the photoresist device according to claim 5, characterized in that, The steps of controlling the moving component to drive the second clamping component to move up and down, so that the straw is inserted into the second bottle body and the bottle cap is placed on the second bottle body include: Obtain the second offset between the central axis of the straw and the central axis of the second bottle; When the second offset exceeds the preset offset, the positions of the bottle cap and the straw are adjusted according to the second offset so that the second offset is less than or equal to the preset offset.

12. A control device for automatically changing a photoresist device, used to implement the control method according to any one of claims 5-11, characterized in that, The automatic photoresist replacement control device includes: A first control module is used to control a first clamping component to clamp and fix the first bottle body containing the bottle. The second control module is used to control the moving component to drive the second clamping component to move up and down to the clamping position, and to control the second clamping component to clamp and fix the bottle cap containing the bottle. The third control module is used to control the lifting and lowering action of the moving component to pull the bottle cap and straw outward from the inside of the first bottle body. The fourth control module is used to control the first clamping component to release the first bottle body and replace it with a second bottle body equipped with photoresist. The fifth control module is used to control the first clamping component to clamp and fix the second bottle body containing the bottle after the second bottle equipped with photoresist is replaced; The sixth control module is used to control the moving component to drive the second clamping component to move up and down, so that the straw is inserted into the second bottle body and the bottle cap is placed on the second bottle body; The seventh control module is used to control the first clamping component to release the second bottle body and to control the second clamping component to release the bottle cap.

13. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the steps of the method according to any one of claims 5 to 11.

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