Etching device

Abstract

This invention discloses an etching apparatus comprising a first chamber, a second chamber, and a bonding region. The first / second chambers are equipped with multiple active conveying shafts. The first chamber, bonding region, and second chamber are adjacent to each other. The bonding region is equipped with a first driven wheel module and a second driven wheel module. Within the second chamber, the active conveying shafts adjacent to the second driven wheel module are the first and second active conveying shafts, with the first active conveying shaft located between the second active conveying shaft and the second driven wheel module. The first and second driven wheel modules have a first distance h1, the first and second active conveying shafts have a second distance h2, and the second active conveying shaft has a third distance h3, where h1 < h2 < h3. The apex of the first driven wheel module is located on a first plane, and the apex of the second driven wheel module is located on a second plane. The first plane is lower than the second plane. This invention can improve conveying stability.

Description

Technical Field

[0001] This invention relates to the field of etching and thinning of plate-shaped elements, and more particularly to an etching apparatus used in the thinning process. Background Technology

[0002] Currently, display devices are widely used in many electronic products, such as mobile phones, tablets, and watches. As users' demands for electronic products increase, these products are increasingly trending towards thinner and lighter designs. Taking display panels as an example, after cell assembly, the chemical reaction between the glass substrate and acid is used to etch and thin the upper and lower glass substrates, thus reducing the overall thickness of the display panel. During this etching and thinning process, the active transport shaft normally used within the cavity cannot be installed in the bonding area between adjacent chambers, affecting the normal transport of the display panel in the bonding area.

[0003] Therefore, how to design an etching device that can achieve normal transfer of the display panel in the bonding area during the etching process is one of the technical problems that the industry needs to solve. Summary of the Invention

[0004] Therefore, the object of the present invention is to provide an etching apparatus to solve the above-mentioned problems.

[0005] To achieve the above objectives, the present invention provides an etching apparatus for thinning plate-shaped elements. The etching apparatus includes a first chamber, a second chamber, and a bonding region. Each of the first and second chambers is provided with a plurality of active conveying shafts arranged along a first direction and extending along a second direction, the first direction being perpendicular to the second direction. The plurality of active conveying shafts are used to convey the plate-shaped element from the second chamber to the first chamber. The first chamber, the bonding region, and the second chamber are adjacent to each other along the first direction. The bonding region is provided with a first driven wheel module adjacent to the first chamber and a second driven wheel module adjacent to the second chamber, spaced apart along the first direction. Within the two chambers, the active transmission shafts adjacent to the second driven wheel module are a first active transmission shaft and a second active transmission shaft. The first active transmission shaft is located between the second active transmission shaft and the second driven wheel module. Along the first direction, the first driven wheel module and the second driven wheel module have a first distance h1, the first active transmission shaft and the second driven wheel module have a second distance h2, and the second active transmission shaft and the first active transmission shaft have a third distance h3, where h1 < h2 < h3. The apex of the first driven wheel module is located on a first plane, and the apex of the second driven wheel module is located on a second plane. The first plane is lower than the second plane.

[0006] As an optional technical solution, the first driven wheel module includes a plurality of first driven wheel assemblies arranged along the second direction. Each first driven wheel assembly includes a first driven wheel and a second driven wheel arranged at intervals along the first direction. There is a fourth distance h4 between the first driven wheel and the second driven wheel, where h4 < h1.

[0007] As an optional technical solution, along the first direction, the active transmission shaft adjacent to the first driven wheel module in the first cavity is defined as the third active transmission shaft. There is a fifth distance h5 between each second driven wheel and the third active transmission shaft, and a sixth distance h6 between the third active transmission shaft and the first active transmission shaft, wherein h4 < h5 < h2, 2*h3 < h6 < 3*h3.

[0008] As an optional technical solution, the vertex of the third active transmission axis is located in a third plane, which is lower than the first plane.

[0009] As an optional technical solution, the second driven wheel module includes a plurality of second driven wheel assemblies arranged along the second direction. The engagement area is also provided with a first fixing frame and a second fixing frame extending along the second direction. The plurality of first driven wheel assemblies are uniformly fixed on the first fixing frame, and the plurality of second driven wheel assemblies are uniformly fixed on the second fixing frame.

[0010] As an optional technical solution, each first driven wheel assembly includes a first base, two opposing first limiting plates, the first driven wheel, the second driven wheel, and two first locking fasteners. The first base is fixed on the first fixing frame, and the two first limiting plates are disposed opposite to each other and spaced apart on the first base to form a first limiting space. The first driven wheel and the second driven wheel are located in the first limiting space and are locked to the two first limiting plates by the two first locking fasteners respectively.

[0011] As an optional technical solution, the first base has a first engaging portion, and each first driven wheel assembly also has a second locking fastener. The first engaging portion engages with the first fixed frame, and the second locking fastener locks the first base to the first fixed frame.

[0012] As an optional technical solution, the second driven wheel module includes a plurality of second driven wheel assemblies arranged along the second direction. Each second driven wheel assembly includes a second base, two second limiting members, a third driven wheel, and a third locking member. The third driven wheel has the third distance h3 with the first driven wheel module. The second base is fixed on the second fixing frame. The two second limiting members are opposite to each other and spaced apart on the second base to form a second limiting space. The third driven wheel is located in the second limiting space and is locked to the two second limiting members by the third locking member.

[0013] As an optional technical solution, each first driven wheel and each second driven wheel has a first diameter d1, and the first driving transmission shaft has a second diameter d2, wherein d1 < d2.

[0014] As an optional technical solution, 1 < d2 / d1 < 1.5.

[0015] The etching apparatus of the present invention has two driven wheel modules disposed in the joint area adjacent to two chambers. The distance between adjacent active conveyor shafts, the distance between the driven wheel module and the adjacent active conveyor shaft, and the distance between the two driven wheel modules decrease sequentially. This increases the support of the joint area, reduces the degree of bending of the plate-shaped element (especially the front end) under gravity, and avoids interference between the plate-shaped element and the driven wheel module during the conveying process, which could lead to damage to the driven wheel module or breakage of the plate-shaped element and affect normal conveying. Furthermore, along the conveying direction, the vertices of the two driven wheel modules are not on the same plane. Even if the front end of the plate-shaped element bends slightly due to gravity, it can prevent the plate-shaped element from being lower than the vertices of the driven wheel modules during the conveying process, thus avoiding interference between the two and further improving the conveying stability of the plate-shaped element in the etching apparatus.

[0016] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this is not intended to limit the present invention. Attached Figure Description

[0017] Figure 1 This is a top view of the etching apparatus of the present invention;

[0018] Figure 2 This is a partially enlarged schematic diagram of the etching apparatus of the present invention;

[0019] Figure 3 This is a top view of the first driven wheel assembly of the present invention;

[0020] Figure 4A This is a top view of the second driven wheel assembly of the present invention;

[0021] Figure 4B This is a perspective view of the second driven wheel assembly of the present invention. Detailed Implementation

[0022] The following descriptions of the embodiments are with reference to the accompanying drawings, illustrating specific embodiments in which the invention can be implemented. Directional terms used in this invention, such as "up," "down," "front," "back," "left," "right," and "side," are merely directional references to the accompanying drawings. Therefore, the directional terms used are for illustrative and understanding purposes only, and not for limiting the invention.

[0023] Please refer to Figures 1 to 4B , Figure 1This is a top view of the etching apparatus of the present invention. Figure 2 This is a partially enlarged schematic diagram of the etching apparatus of the present invention. Figure 3 This is a top view of the first driven wheel assembly of the present invention. Figure 4A This is a top view of the second driven wheel assembly of the present invention. Figure 4B This is a perspective view of the second driven wheel assembly of the present invention.

[0024] like Figure 1 and Figure 2 As shown, the etching apparatus 10 of the present invention is used to thin a plate-shaped element A. In one embodiment, the plate-shaped element A is a display panel, which may have a color filter substrate, an array substrate, and a display molecular layer disposed between them, disposed opposite to each other. The etching apparatus 10 can etch and thin the color filter substrate and / or the array substrate of the plate-shaped element A to reduce the overall thickness of the plate-shaped element A. The etching apparatus 10 includes a first chamber 100, a second chamber 200, and a bonding region 300. A plurality of active transport shafts 400 arranged along a first direction F1 and extending along a second direction F2 are disposed in the first chamber 100 and the second chamber 200, the first direction F1 being perpendicular to the second direction F2. The plurality of active transport shafts 400 are used to transport the plate-shaped element A from the second chamber 200 to the first chamber 100 via the bonding region 300. Figure 1 As shown, the first chamber 100, the engagement area 300 and the second chamber 200 are adjacent to each other along the first direction F1. The engagement area 300 is provided with a first driven wheel module 500 adjacent to the first chamber 100 and a second driven wheel module 600 adjacent to the second chamber 200 at intervals along the first direction F1.

[0025] In one embodiment, multiple nozzles may be provided at the top and bottom of the first chamber 100 and the second chamber 200. During the etching stage, the multiple nozzles may be used to spray a first solution (e.g., acid) onto the two opposing surfaces of the plate-shaped element A facing top and bottom, to etch and thin the plate-shaped element A. During the maintenance stage, the multiple nozzles may be used to spray a second solution different from the first solution, to clean the substrate residue generated by the multiple active conveyor shafts 400, the first driven wheel module 500, and the second driven wheel module 600 during the etching and thinning process of the plate-shaped element A.

[0026] The active transmission shaft 400 adjacent to the second driven wheel module 600 in the second chamber 200 is defined as the first active transmission shaft 410 and the second active transmission shaft 420, with the first active transmission shaft 410 located between the second active transmission shaft 420 and the second driven wheel module 600. Along the first direction F1, there is a first distance h1 between the first driven wheel module 500 and the second driven wheel module 600, a second distance h2 between the first active transmission shaft 410 and the second driven wheel module 600, and a third distance h3 between the second active transmission shaft 420 and the first active transmission shaft 410, where h1 < h2 < h3. In one embodiment, 0.72 < h1 / h2 < 0.75, for example, h1 is 32.5 mm and h2 is 45 mm. And 0.85 < h2 / h3 < 1, for example, when h2 is 45 mm, h3 is 50 mm. Furthermore, the vertex of the first driven wheel module 500 is located on the first plane, and the vertex of the second driven wheel module 600 is located on the second plane, with the first plane being lower than the second plane. In one embodiment, the distance between the first plane and the second plane is not less than 0.5 mm.

[0027] like Figure 1 As shown, the first chamber 100 and the second chamber 200 are joined together via a joining area 300. Specifically, at both ends of the joining area 300 along the second direction F2, the inner walls of the first chamber 100 and the second chamber 200 are recessed at the joining area 300 to weld them together. Because of this, the size of the joining area 300 in the second direction F2 is smaller than the size of the first chamber 100 and the second chamber 200, making it impossible to install multiple active transmission shafts 400 within the joining area 300 as in the first chamber 100 and the second chamber 200. Generally, the size of the joint area 300 in the first direction F1 is larger than the first distance h1 between the two adjacent active transmission shafts 400. In order to enable the plate-shaped element A to be smoothly transmitted from the second chamber 200 to the first chamber 100, the present invention provides a first driven wheel module 500 adjacent to the first chamber 100 and a second driven wheel module 600 adjacent to the second chamber 200 in the joint area 300, so that when the plate-shaped element A passes through the joint area 300, the first driven wheel module 500 and the second driven wheel module 600 support and assist in the transmission, so as to smoothly support the plate-shaped element A to pass through.

[0028] In one embodiment, during the process of conveying the plate-shaped element A from the second chamber 200 to the mating area 300, the area of ​​the plate-shaped element A, except for the front end adjacent to the mating area 300, can be stably supported on multiple active conveying shafts 400 and move along the first direction F1 under the drive of the multiple active conveying shafts 400. After the front end of the plate-shaped element A contacts the second driven wheel module 600, the second driven wheel module 600 participates in supporting and assisting in the conveying of the plate-shaped element A. After the front end of the plate-shaped element A contacts the first driven wheel module 500, both the first driven wheel module 500 and the second driven wheel module 600 participate in supporting and assisting in the conveying of the plate-shaped element A.

[0029] like Figure 1 and Figure 2 As shown, the active conveyor shafts 400 and driven wheel modules are spaced apart. When the front end of the plate-shaped element A leaves the previous support element (e.g., an active conveyor shaft 400) and is conveyed to the next support element (e.g., another active conveyor shaft 400, a second driven wheel module 600, or a second driven wheel module 500), the front end will slightly bend and descend due to gravity. If the next support element is an active conveyor shaft 400, since it has its own active driving capability (it is constantly rotating during operation), when the front end of the plate-shaped element A reaches the active conveyor shaft 400, the front end will be smoothly driven and conveyed by the active conveyor shaft 400. However, the first driven wheel module 500 and the second driven wheel module 600 themselves do not have active driving capability, and some substrate residue generated during the etching process easily remains in the first driven wheel module 500 and the second driven wheel module 600, further increasing the resistance of the plate-shaped element A as it passes through the bonding area 300. Taking the front end of plate-shaped element A as close to the first driven wheel module 500 as an example, if the distance between the second driven wheel module 600 and the first driven wheel module 500 is large, the front end of plate-shaped element A will bend significantly under the action of gravity. When plate-shaped element A reaches the first driven wheel module 500, its lower surface is lower than the top surface of the first driven wheel module 500. Under the drive of multiple active transmission shafts 400 in the second chamber 200, plate-shaped element A applies a force to the first driven wheel module 500. In addition, plate-shaped element A itself is relatively thin (for example, its thickness is less than 0.4 mm or even 0.3 mm before thinning, and it is relatively sharp), which causes the part of interference between the first driven wheel module 500 and plate-shaped element A to be cut off, and then it is impossible to continue to transmit plate-shaped element A normally, causing transmission abnormality or even equipment shutdown.

[0030] Therefore, in this invention, along the first direction F1, the second driven wheel module 600 and the first driven wheel module 500 have a first distance h1, the first active transmission shaft 410 and the second driven wheel module 600 have a second distance h2, and the first active transmission shaft 410 and the second active transmission shaft 420 have a third distance h3, where h1 < h2 < h3. That is, the distance between the second driven wheel module 600 and the first driven wheel module 500, and the distance between the second driven wheel module 600 and the first active transmission shaft 410 are both set to be smaller than the distance between adjacent active transmission shafts 400, and further, the distance between two driven wheel modules is smaller than the distance between the driven wheel and the adjacent active transmission shaft 400. In this way, the density of the support structure within the joint area 300 is ensured, guaranteeing the support capacity of the plate element A when it passes through the joint area 300. Furthermore, the spacing between adjacent support structures (between driven wheel modules and between the first driven wheel module and the first active transmission shaft) is small, reducing the degree to which the front end of the plate element A bends and descends due to gravity during transmission. This avoids the probability of the front end of the plate element A cutting the first driven wheel module 500, thereby improving the stability of the etching device 10 in transmitting the plate element A.

[0031] Furthermore, the apex of the first driven wheel module 500 is located on the first plane, and the apex of the second driven wheel module 600 is located on the second plane, with the first plane being lower than the second plane. Thus, even if the front end of the plate-shaped element A slightly bends and descends during transport due to gravity, the lower first plane prevents interference and abnormalities such as impact or cutting when the plate-shaped element A reaches the first driven wheel module 500, as the top surface of the first driven wheel module 500 is higher than the plate-shaped element A. This further improves the stability of the etching apparatus 10 in transporting the plate-shaped element A.

[0032] The etching apparatus 10 of the present invention has a first driven wheel module 500 and a second driven wheel module 600 disposed in a joint area 300 adjacent to the first chamber 100 and the second chamber 200. The spacing between adjacent active conveying shafts 400, the spacing between the driven wheel modules and adjacent active conveying shafts 400, and the spacing between the two driven wheel modules decrease sequentially. This increases the support of the joint area 300, reduces the degree of bending of the plate-shaped element A (especially the front end) under gravity, and avoids interference between the plate-shaped element A and the driven wheel modules during the conveying process, which could lead to damage to the driven wheel modules or breakage of the plate-shaped element A, affecting normal conveying. Furthermore, along the conveying direction, the vertices of the two driven wheel modules are not on the same plane. Even if the front end of the plate-shaped element A bends due to gravity, it can be prevented that the plate-shaped element A is lower than the vertices of the driven wheel modules during the conveying process, thus avoiding interference between them. This further improves the conveying stability of the plate-shaped element A within the etching apparatus 10.

[0033] like Figure 1 As shown, the first driven wheel module 500 includes a plurality of first driven wheel assemblies 510 evenly arranged along the second direction F2, and the second driven wheel module 600 includes a plurality of second driven wheel assemblies 610 evenly arranged along the second direction F2. Figure 1 As shown, the number of multiple first driven wheel assemblies 510 and multiple second driven wheel assemblies 610 may be equal. In the first direction F1, the corresponding first driven wheel assemblies 510 and second driven wheel assemblies 610 are aligned and arranged. In other embodiments, this is not a limitation.

[0034] like Figure 2 and Figure 3 As shown, in this embodiment, each first driven wheel assembly 510 includes a first driven wheel 511 and a second driven wheel 512 arranged at intervals along a first direction F1. A fourth distance h4 exists between the first driven wheel 511 and the second driven wheel 51, where h4 < h1. In one embodiment, 0.75 < h4 / h1 < 0.8, for example, h1 is 32.5 mm and h4 is 25 mm. In this embodiment, each first driven wheel assembly 510 includes a first driven wheel 511 and a second driven wheel 512 arranged along a first direction F1, ensuring sufficient density of the driven wheels within the engagement area 300, providing adequate support, and avoiding the problem of excessive spacing between adjacent driven wheels causing the end of the plate-shaped element A to bend and cut the driven wheels. Simultaneously, the engagement area 300 does not contain excessive driven wheels to avoid excessive resistance (or even transmission abnormalities, equipment malfunctions, etc.) when the plate-shaped element A moves to the engagement area 300 due to the need for auxiliary driving of too many driven wheels. For example, the fourth distance h4 between the first driven wheel 511 and the second driven wheel 512 is set to be no less than 50% of the third distance h3 of the adjacent drive shaft 400. In addition, by including two driven wheels on the same driven wheel assembly, the design of the overall driven wheel module can be simplified.

[0035] In one embodiment, along the first direction F1, the active transmission shaft 400 adjacent to the first driven wheel module 500 within the first chamber 100 is defined as the third active transmission shaft 430, such as... Figure 2As shown, each of the second driven wheels 512 and the third active transmission shaft 430 has a fifth distance h5, where h4 < h5 < h2. That is, the distance between the second driven wheel 512 and the third active transmission shaft 430 is between the distance between the first and second driven wheels and the distance between the second driven wheel module 600 and the first active transmission shaft 410. In one embodiment, h5 can be equal to the first distance h1, for example, both h5 and h1 are 32.5 mm. Further, the third active transmission shaft 430 and the first active transmission shaft 410 have a sixth distance h6, where 2*h3 < h6 < 3*h3. That is, the minimum distance between the active transmission shafts 400 between the first chamber 100 and the second chamber 200 is the sixth distance h6, which is between twice the distance between adjacent active transmission shafts 400 and three times the distance between adjacent active transmission shafts 400. In one embodiment, h3 is 50 mm and h6 is 135 mm.

[0036] In one embodiment, the vertex of the third active conveying shaft 430 is located on a third plane, which is lower than the first plane. That is, the vertex of the third active conveying shaft 430 is lower than the plane where the vertex of the first driven wheel module 500 is located. In this way, by making the distance between the third active conveying shaft 430 and the first driven wheel module 500 smaller than the distance between adjacent active conveying shafts 400 to reduce the degree of bending and descent of the front end of the plate-shaped element A during the conveying process, and by making the third plane lower than the first plane (for example, the difference between the two planes is at least 0.5 mm), it is further ensured that when the front end of the plate-shaped element A reaches the third active conveying shaft 430, interference or collision with the third active conveying shaft 430 can be avoided because the front end of the plate-shaped element A is lower than the vertex of the third active conveying shaft 430, thereby improving the conveying stability of the etching apparatus 10.

[0037] like Figure 1 and Figure 2 As shown, the joining area 300 is further provided with a first fixing frame 310 and a second fixing frame 320 extending along the second direction F2. A plurality of first driven wheel assemblies 510 are uniformly fixed to the first fixing frame 310, and a plurality of second driven wheel assemblies 610 are uniformly fixed to the second fixing frame 320. In one embodiment, to prevent the first fixing frame 310 and the second fixing frame 320 from deforming due to long-term load (e.g., the middle portion sinking), affecting the support flatness of the joining area 300, the etching apparatus 10 further includes a first reinforcing member (not shown) and a second reinforcing member (not shown) extending along the second direction F2. The first reinforcing member is fixedly connected to the first fixing frame 310, and the second reinforcing member is fixedly connected to the second fixing member 320. The first and second reinforcing members maintain the flatness stability of the first fixing frame 310 and the second fixing frame 320, preventing localized depressions that could affect the support and transmission of the joining area. In one embodiment, the first and second reinforcing members may be carbon fiber tubes, but are not limited thereto.

[0038] like Figure 2 and Figure 3 As shown, in one embodiment, in addition to the first driven wheel 511 and the second driven wheel 512, each first driven wheel assembly 510 also includes a first base 520, two opposing first limiting plates 530, and two first locking fasteners 540. The first base 520 is fixed to the first fixing frame 310. The two first limiting plates 530 are positioned opposite each other and spaced apart on the first base 520 to form a first limiting space r1. The first driven wheel 511 and the second driven wheel 512 are located within the first limiting space r1 and are locked to the two first limiting plates 530 by the two first locking fasteners 540. For example, holes are provided on the first driven wheel 511 and the two first limiting plates 530. The first locking fasteners 540 include, for example, studs and nuts. The studs pass through the holes on the first driven wheel 511 and the two first limiting plates 530 and are locked to the nuts. The fixing of the second driven wheel 512 is similar and will not be described in detail.

[0039] like Figure 2 As shown, the first base 520 has a first engaging portion 521, and each first driven wheel assembly 510 also has a second locking fastener 550. The first engaging portion 521 engages with the first fixing frame 310, and the second locking fastener 550 locks the first base 520 to the first fixing frame 310. The first engaging portion 521 is, for example, a notch extending along a first direction F1 on the base 520, through which the first base 520 engages with the upper surface and side surface of the first fixing frame 310. When the first driven wheel assembly 510 is fixed to the first fixing frame 310, one first locking fastener 540 locks the first driven wheel 511 along a second direction F2, and another first locking fastener 540 locks the second driven wheel 512 along a second direction F2, while the second locking fastener 550 locks the first base 520 along a first direction F1.

[0040] like Figure 4A and Figure 4B As shown, in one embodiment, each second driven wheel assembly 610 includes a third driven wheel 611. The third driven wheel 611 and the first driven wheel module 510 have the aforementioned first distance h1. Each second driven wheel assembly also includes a second base 620, two second limiting members 630, and a third locking member 640. The second base 620 is fixed on the second fixing frame 320. The two second limiting members 630 are opposite to each other and spaced apart on the second base 620 to form a second limiting space r2. The third driven wheel 611 is located in the second limiting space r2 and is locked to the two second limiting members 630 via the third locking member 640. For example, the third driven wheel 611 and the two second limiting members 630 are provided with corresponding holes. The third locking member 640 includes, for example, a stud and a nut. The stud passes through the holes on the third driven wheel 611 and the two second limiting members 630 and is locked to the nut.

[0041] like Figure 2 and Figure 4B As shown, the second base 620 has a second engaging portion 621, and each second driven wheel assembly also has a fourth locking fastener 650. The second engaging portion 621 engages with the second fixing frame 320, and the fourth locking fastener 650 locks the second base 620 to the second fixing frame 310. The second engaging portion 621 is, for example, a notch extending along the first direction F1 on the second base 620, through which the second base 620 engages with the upper surface and side surface of the second fixing frame 320. The notch of the second engaging portion 621 extends in the opposite direction to the notch of the first engaging portion 521. When the second driven wheel assembly 610 is fixed to the second fixing frame 320, the third locking fastener 540 locks the third driven wheel 611 along the second direction F2, while the fourth locking fastener 650 locks the second base 620 along the first direction F1.

[0042] In this embodiment, the structures of each first driven wheel assembly 510 and each second driven wheel assembly 520 are different. Each first driven wheel assembly 510 includes a first driven wheel 511 and a second driven wheel 512 arranged along the first direction F1, and each second driven wheel assembly 520 includes a third driven wheel 611. Thus, three rows of driven wheels are formed in the engagement area 300, and the spacing between the three rows of driven wheels is different along the conveying direction. This ensures both the arrangement density of each driven wheel in the engagement area 300 and the support of each driven wheel in the engagement area 300 for the plate-shaped element A. This avoids the problem of the plate-shaped element A cutting the driven wheel due to excessive spacing between adjacent driven wheels. At the same time, not too many driven wheels are set in the engagement area 300. For example, the fourth spacing h4 between the first driven wheel 511 and the second driven wheel 512 is set to be no less than 50% of the third spacing h3 of the adjacent active transmission shaft 400, and the first spacing h1 between the first driven wheel 511 and the third driven wheel 611 is no less than 80% of the third spacing h4 of the adjacent active transmission shaft 400. This avoids the problem of excessive resistance when the plate-shaped element A moves to the engagement area 300.

[0043] In one embodiment, each first driven wheel 511 and each second driven wheel 512 has a first diameter d1, and the first drive transmission shaft 410 has a second diameter d2, wherein d1 < d2. In one embodiment, each third driven wheel 611 may also have the aforementioned first diameter d1. Further, 1 < d2 / d1 < 1.5, for example, d2 / d1 = 1.2, the first diameter d1 is 15 mm, and the second diameter d2 is 18 mm. The vertices of each first driven wheel 511 and each second driven wheel 512 may all be located on the aforementioned first plane, and the vertices of each third driven wheel 611 may be located on the aforementioned second plane.

[0044] The etching apparatus of the present invention has two driven wheel modules disposed in the joint area adjacent to two chambers. The distance between adjacent active conveying shafts, the distance between the driven wheel module and the adjacent active conveying shaft, and the distance between the two driven wheel modules decrease sequentially. This increases the support of the joint area, reduces the degree of bending of the plate-shaped element (especially the front end) under gravity, and avoids interference between the plate-shaped element and the driven wheel module during the conveying process, which could lead to damage to the driven wheel module or breakage of the plate-shaped element and affect normal conveying. Furthermore, along the conveying direction, the vertices of the two driven wheel modules are not on the same plane. Even if the front end of the plate-shaped element bends due to gravity, it can prevent the plate-shaped element from being lower than the vertices of the driven wheel modules during the conveying process, thus avoiding interference and further improving the conveying stability of the plate-shaped element in the etching apparatus.

[0045] The detailed description of the preferred embodiments above is intended to more clearly illustrate the features and spirit of the present invention, and is not intended to limit the scope of protection of the present invention by means of the preferred embodiments disclosed above. Rather, the aim is to cover various modifications and equivalent arrangements within the scope of protection of the claims of the present invention. Therefore, the scope of protection of the claims of the present invention should be interpreted in the broadest possible sense based on the foregoing description, so as to cover all possible modifications and equivalent arrangements.

Claims

1. An etching apparatus for thinning plate-shaped elements, characterized in that, The etching apparatus includes, The first chamber and the second chamber are each provided with a plurality of active conveying shafts arranged along a first direction and extending along a second direction. The first direction is perpendicular to the second direction. The plurality of active conveying shafts are used to convey the plate-shaped element from the second chamber to the first chamber. as well as The first chamber, the joint area, and the second chamber are adjacent to each other along the first direction. The joint area is provided with a first driven wheel module adjacent to the first chamber and a second driven wheel module adjacent to the second chamber at intervals along the first direction. The active transmission shaft adjacent to the second driven wheel module in the second chamber is defined as the first active transmission shaft and the second active transmission shaft. The first active transmission shaft is located between the second active transmission shaft and the second driven wheel module. Along the first direction, the first driven wheel module and the second driven wheel module have a first distance h1, the first driving transmission shaft and the second driven wheel module have a second distance h2, and the second driving transmission shaft and the first driving transmission shaft have a third distance h3, where h1 < h2 < h3; the vertex of the first driven wheel module is located on a first plane, the vertex of the second driven wheel module is located on a second plane, and the first plane is lower than the second plane.

2. The etching apparatus according to claim 1, characterized in that, The first driven wheel module includes a plurality of first driven wheel assemblies arranged along the second direction. Each first driven wheel assembly includes a first driven wheel and a second driven wheel arranged at intervals along the first direction. There is a fourth distance h4 between the first driven wheel and the second driven wheel, where h4 < h1.

3. The etching apparatus according to claim 2, characterized in that, Along the first direction, the active transmission shaft adjacent to the first driven wheel module in the first chamber is defined as the third active transmission shaft. There is a fifth distance h5 between each second driven wheel and the third active transmission shaft, and a sixth distance h6 between the third active transmission shaft and the first active transmission shaft, wherein h4 < h5 < h2, 2*h3 < h6 < 3*h3.

4. The etching apparatus according to claim 3, characterized in that, The vertex of the third active transmission axis is located in the third plane, which is lower than the first plane.

5. The etching apparatus according to claim 2, characterized in that, The second driven wheel module includes a plurality of second driven wheel assemblies arranged along the second direction. The engagement area is also provided with a first fixing frame and a second fixing frame extending along the second direction. The plurality of first driven wheel assemblies are uniformly fixed on the first fixing frame, and the plurality of second driven wheel assemblies are uniformly fixed on the second fixing frame.

6. The etching apparatus according to claim 5, characterized in that, Each first driven wheel assembly includes a first base, two opposing first limiting plates, the first driven wheel, the second driven wheel, and two first locking fasteners. The first base is fixed to the first fixing frame. The two first limiting plates are positioned opposite each other and spaced apart on the first base to form a first limiting space. The first driven wheel and the second driven wheel are located within the first limiting space and are locked to the two first limiting plates by the two first locking fasteners.

7. The etching apparatus according to claim 6, characterized in that, The first base has a first engaging portion, and each first driven wheel assembly also has a second locking fastener. The first engaging portion engages with the first fixed frame, and the second locking fastener locks the first base to the first fixed frame.

8. The etching apparatus according to claim 5, characterized in that, The second driven wheel module includes a plurality of second driven wheel assemblies arranged along the second direction. Each second driven wheel assembly includes a second base, two second limiting members, a third driven wheel, and a third locking member. The third driven wheel has the third distance h3 with the first driven wheel module. The second base is fixed on the second fixing frame. The two second limiting members are opposite to each other and spaced apart on the second base to form a second limiting space. The third driven wheel is located in the second limiting space and is locked to the two second limiting members by the third locking member.

9. The etching apparatus according to claim 2, characterized in that, Each first driven wheel and each second driven wheel has a first diameter d1, and the first driving transmission shaft has a second diameter d2, wherein d1 < d2.

10. The etching apparatus according to claim 9, characterized in that, 1 < d2 / d1 < 1.5.

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