A processing line for quartz crystal resonators

Abstract

The application relates to the field of processing equipment, in particular to a quartz crystal resonator processing pipeline. The processing pipeline comprises a first table plate, a base insertion device, a first controller, a second table plate, a base glue coating device, a jig butt joint device, a base jig feeding device one, a wafer insertion device, a glue melting device, a feeding system and a second controller. The base insertion device is used for inserting a base into a base jig, and the first controller is connected with the base insertion device. The base glue coating device is used for coating adhesive on the base jig. The jig butt joint device is used for butt joining the base jig and a wafer jig to form a composite jig. The base jig feeding device one is used for conveying the base jig to the jig butt joint device. The wafer insertion device is used for inserting a wafer into a wafer jig. The glue melting device is used for melting the adhesive on the base. The feeding system is used for conveying the composite jig. The processing pipeline has the advantages of high processing efficiency and the like.

Description

Technical Field

[0001] This application relates to the field of processing equipment, and in particular to a processing line for quartz crystal resonators. Background Technology

[0002] See Figure 1 As shown, a quartz crystal resonator typically includes a base 01, a crystal 02 on one side of the base 01, and a pin 03 on the other side of the base 01. When a certain voltage electrical signal is applied to the pin 03, the crystal 02 will generate mechanical oscillation and output an oscillation signal with a fixed frequency. This fixed oscillation frequency is called the resonant frequency.

[0003] The processing of quartz crystal resonators in related technologies requires multiple machines to complete, each working independently, requiring multiple workers, and the processing efficiency is low. Summary of the Invention

[0004] To improve the processing efficiency of quartz crystal resonators, this application provides a quartz crystal resonator processing line.

[0005] The processing line for a quartz crystal resonator provided in this application adopts the following technical solution: A quartz crystal resonator manufacturing line, comprising The first board; A base insertion device, set on the first plate, is used to insert the base of the quartz crystal resonator into the base fixture; The first controller is connected to the base plug-in device; The second board; A base adhesive application device, mounted on the second plate, is used to apply adhesive to the base of the base fixture. A fixture docking device, set on the second plate, is used to dock the base fixture that has been coated with adhesive with the unloaded wafer fixture to form a composite fixture; A base fixture feeding device 1 is set on the second platform and is used to transport the base fixture from the base glue applicator to the fixture docking device. A wafer insertion device, mounted on the second plate, is used to insert the wafer in the quartz crystal resonator onto the wafer fixture in the composite fixture, so that the base in the composite fixture fits the wafer. The adhesive melting device, set on the second plate, is used to melt the adhesive on the substrate and bond the substrate to the wafer; The feeding system, located on the second plate, is used to transport the composite fixture from the fixture docking device to the wafer insertion device and then to the melting device. The second controller is connected to the base coating device, the base fixture feeding device, the fixture docking device, the feeding device, the wafer insertion device, and the glue melting device.

[0006] By adopting the above technical solution, the base of the quartz crystal resonator is inserted into the base fixture via the base insertion device. Then, the base fixture with the inserted base is placed on the second plate. The base gluing device applies adhesive to the base on the base fixture. The base fixture feeding device transports the glued base fixture to the fixture docking device, and the fixture docking device docks the glued base fixture with the unloaded wafer fixture to form a composite fixture. The feeding system transports the composite fixture from the fixture docking device to the wafer insertion device. The wafer insertion device inserts the wafer from the quartz crystal resonator into the wafer fixture in the composite fixture, so that the base and the wafer in the composite fixture are bonded together. The operation of the above devices is coordinated by the first controller and the second controller, resulting in high processing efficiency.

[0007] Preferably, the base insertion device includes a base fixture clamping unit, a base feeding unit, a robot, a base insertion station, and a detection and correction station. The base fixture clamping unit, the robot, the base insertion station, and the detection and correction station are all located on the first platform. The base fixture clamping unit, the base feeding unit, and the robot are all connected to the first controller. The base fixture clamping unit can clamp an unloaded base fixture at the base insertion station. The base feeding unit can transport the base to the detection and correction station, which is close to the base insertion station. The robot can adsorb the base on the detection and correction station and insert the base onto the base fixture on the base insertion station.

[0008] By adopting the above technical solution, the base fixture clamping unit clamps the base fixture at the base insertion station, the base feeding unit transports the base to the inspection and correction station, and then the robot arm adsorbs the base at the inspection and correction station and inserts the base into the base fixture.

[0009] Preferably, the processing line further includes a base fixture loading device, a base fixture conveying device, and a base fixture unloading device disposed on the first platform. The base fixture loading device, the base fixture conveying device, and the base fixture unloading device are all connected to the first controller. The base fixture conveying device can sequentially convey the base fixture from the base fixture loading device to the base insertion device and the base fixture unloading device. The base fixture unloading device can convey the base fixture to the base fixture holding plate on the first platform.

[0010] By adopting the above technical solution, the base fixture conveying device can transport the unloaded base fixture from the base fixture loading device to the base fixture insertion device, complete the insertion, and then transport the base fixture to the base fixture unloading device, and then transport it to the base fixture holding plate through the base fixture unloading device.

[0011] Preferably, the processing line further includes a base fixture detection device mounted on the second platform. The base fixture detection device can detect missing base fixtures and move the missing base fixtures to the base fixture scrap area. The base fixture feeding device can transport the base fixtures from the base fixture feeding device through the base fixture detection device to the base glue application device. The base fixture detection device is connected to the second controller.

[0012] By adopting the above technical solution, the base fixture after the base is inserted is inspected, which prevents the base fixture with missing base from flowing to the subsequent process and improves the product qualification rate.

[0013] Preferably, the second platform is further provided with a base positioning device, which is located between the base fixture detection device and the base gluing device. The base positioning device can apply downward pressure to the base on the base fixture to push the base to a predetermined position. The base fixture feeding device passes through the base positioning device.

[0014] By adopting the above technical solution, when the base is inserted into the positioning hole on the base fixture, the base may not be inserted into place. After designing the base positioning device, downward pressure can be applied to the base to press the base into the predetermined position.

[0015] Preferably, the processing line further includes a wafer loading device disposed on the second plate, and the wafer insertion device includes an air suction device disposed on the second plate, the air suction device being able to adsorb the wafer in the wafer loading device and insert the wafer into the wafer fixture.

[0016] By adopting the above technical solution, the wafer loading device can transport the wafer to a predetermined position, and the air suction device can adsorb the wafer and insert it into the wafer fixture.

[0017] Preferably, the second platform is further provided with a wafer positioning device. The feeding device can transport the composite fixture at the wafer insertion device to the wafer positioning device. The wafer positioning device can push the wafer on the composite fixture to move towards the base on the composite fixture.

[0018] By adopting the above technical solution, the wafer positioning device can drive the wafer to move, so that the wafer reaches the predetermined position and adheres well to the base.

[0019] Preferably, the second platform is further provided with a fixture separation device. The feeding system can transport the composite fixture from the melting device to the fixture separation device. The fixture separation device can separate the wafer fixture from the base fixture in the composite fixture and move the wafer fixture to the wafer fixture unloading area.

[0020] By adopting the above technical solution, the jig separation device can separate the wafer jig from the base jig in the composite jig and move the wafer jig to the wafer jig unloading area for easy recycling.

[0021] Preferably, the processing line further includes a base fixture recovery station, and the feeding system can transport the base fixture separated by the fixture separation device to the base fixture recovery station, and the base fixture recovery station can move the base fixture to the base fixture holding plate.

[0022] By adopting the above technical solution, after the jig separation device separates the wafer jig and the base jig, the bonded base and wafer are on the base jig. The feeding device transports the base jig separated by the jig separation device to the base jig recycling table. The moving device moves the base jig to the base jig holding plate for recycling, thus obtaining the finished product after the base and wafer are bonded. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of a quartz crystal resonator.

[0024] Figure 2 This is a structural schematic diagram of an embodiment of this application.

[0025] Figure 3 yes Figure 2 Enlarged view of part A.

[0026] Figure 4 This is a schematic diagram of the structure of the base feeding unit according to an embodiment of this application.

[0027] Figure 5 This is a schematic diagram of the structure of the base fixture conveying device according to an embodiment of this application.

[0028] Figure 6 yes Figure 2 Enlarged view of part B.

[0029] Figure 7 yes Figure 2 Enlarged view of part C.

[0030] Figure 8 yes Figure 2 Enlarged view of part D.

[0031] Figure 9 yes Figure 2 Enlarged view of part E.

[0032] Figure 10 This is a schematic diagram of the structure of the first flipping unit in the embodiment of this application.

[0033] Figure 11 yes Figure 2 Enlarged view of part F.

[0034] Explanation of reference numerals in the attached drawings: 01, Base; 02, Wafer; 03, Pin; 04, First Platform; 05, Second Platform; 06, Base Fixture; 1, Base Fixture Loading Device; 1a, Base Fixture Loading Belt; 1b, Base Fixture Loading Rail; 2, Base Fixture Conveying Device; 2a, First Base Fixture Conveying Rail; 2b, First Base Fixture Conveying Belt; 2c, First Lifting Component; 2d, First Blocking Component; 3, Base Insertion Device; 3a, First Clamp; 3b, First Clamping Plate; 3c, First Connecting Rod; 3d, First Slide Groove; 3e, First Pin; 3f, First Cylinder; 3g, Vibratory Feeder; 3h, First Loading Rail; 3i, Feeding Section 1; 3j, Feeding... Section 2; 3k, Feeding Section 3; 3l, First Correcting Clamp; 3m, First Correcting Seat; 3n, Robotic Arm; 3o, Mechanical Seat; 3p, First Air Suction Head; 3q, Second Air Suction Head; 3r, Third Air Suction Head; 3s, First Slide; 4, Base Fixture Unloading Device; 4, Base Fixture Unloading Device; 4a, First Unloading Push Rod; 4b, Second Cylinder; 4c, Base Fixture Holding Plate; 5, Base Glue Coating Device; 5a, Glue Coating Support; 5b, Glue Coating Wheel; 5c, Glue Coating Motor; 5d, Glue Coating Drive Wheel; 5e, Glue Coating Driven Wheel; 5f, Glue Coating Transmission Belt; 6, Fixture Docking Device; 6a, Longitudinal Wafer Fixture Loading Rail; 6b, Transverse Wafer Fixture Loading Rail 6c, fifth cylinder; 6d, sixth cylinder; 6e, seventh cylinder; 6f, wafer jig loading baffle one; 6g, wafer jig loading baffle two; 6h, docking station; 6i, discharge hole; 6k, bracket; 6l, flipping shaft one; 6m, pallet; 6n, through slot; 6o, eighth cylinder; 6p, transfer plate; 6q, transfer groove; 6r, wafer insertion station; 6s, wafer positioning station; 6t, ninth cylinder; 7, base jig feeding device one; 7a, base jig feeding rail one; 7b, base jig feeding belt one; 8, wafer insertion device; 8a, tenth cylinder; 8b, eleventh cylinder; 8c, suction head; 8d, wafer loading groove; 9, melting... 10. Glue feeding device; 11. Base fixture detection device; 11a. Base fixture scrap area; 11b. Second camera; 11c. Third cylinder; 11d. Detection push plate; 12. Wafer loading device; 14. Base positioning device; 14a. Pressurizing mechanism; 14c. Second blocking component; 14d. Second clamp; 14e. Second clamping plate; 14f. Second connecting rod; 14g. Pressurizing seat; 14h. Fourth cylinder; 14i. Pressing seat; 14j. Pressing head; 15. Wafer positioning device; 15a. Twelfth cylinder; 16. Second flipping unit; 17. Fixture separation device; 18. Base fixture recycling table; 18a. Fifteenth cylinder. Detailed Implementation

[0035] The following is in conjunction with the appendix Figure 2-11 This application will be described in further detail.

[0036] like Figure 2 As shown, the processing line for this quartz crystal resonator includes a first platform 04, a base fixture loading device 1, a base fixture conveying device 2, a base insertion device 3, a base fixture unloading device 4, a first controller, a second platform 05, a base adhesive application device 5, a fixture docking device 6, a base fixture feeding device 7, a wafer insertion device 8, an adhesive melting device 9, a feeding system 10, a second controller, a base fixture detection device 11, a wafer loading device 12, and a base fixture recycling platform 13.

[0037] like Figure 3 , Figure 4 As shown, the base insertion device 3 is disposed on the first plate 04 and is used to insert the base 01 of the quartz crystal resonator into the base fixture 06. The first controller is connected to the base insertion device 3.

[0038] Specifically, the base insertion device 3 includes a base fixture clamping unit, a base feeding unit, a robot arm 3n, a base insertion station, and a detection and correction station. The base fixture clamping unit, the robot arm 3n, the base insertion station, and the detection and correction station are all located on the first platform 04. The base fixture clamping unit, the base feeding unit, and the robot arm 3n are all connected to the first controller. The base fixture clamping unit can clamp the unloaded base fixture 06 at the base insertion station. The base feeding unit can transport the base 01 to the detection and correction station, which is close to the base insertion station. The robot arm 3n can adsorb the base 01 on the detection and correction station and insert the base 01 into the base fixture 06 on the base insertion station.

[0039] The base fixture clamping unit includes two spaced-apart first clamps 3a, which are fixed to the first slide 3s. The first slide 3s is slidably disposed on the first platform 04. A linear motor capable of driving the first slide 3s to move is provided between the first platform 04 and the first slide 3s, so that multiple insertion holes on the base fixture 06 can move and sequentially align with the base 01 on the robot arm 3n. Two first clamping plates 3b are arranged between two first clamping seats 3a. The two first clamping plates 3b are parallel to each other and of equal size. A first connecting rod 3c is provided between the ends of each first clamping seat 3a and the two first clamping plates 3b. One end of the two first connecting rods 3c is provided with a coaxial first through hole. A first sliding groove 3d is provided on the first clamping seat 3a and communicates with the first through hole. The lower end of the first pin 3e extends through the two first through holes into the first sliding groove 3d and is movably engaged with the first sliding groove 3d. The other end of the first connecting rod 3c is hinged to the first clamping plate 3b. The base fixture clamping unit includes a first cylinder 3f. The output end of the first cylinder 3f is connected to the outer wall of one of the first clamping plates 3b. The output end of the first cylinder 3f extends and retracts, driving one of the first clamping plates 3b to move.

[0040] Alternatively, the base fixture clamping unit can also adopt the robotic arm 3n solution, or a gripper, etc.

[0041] The base feeding unit includes a vibratory feeder 3g and a first feeding rail 3h. The base 01 is placed on the vibratory feeder 3g, and the first feeding rail 3h is connected to the vibratory feeder 3g, conveying the base 01 to the inspection and correction station. The first feeding rail 3h includes a first feeding section 3i, a second feeding section 3j, and a third feeding section 3k. The first feeding section 3i and the third feeding section 3k are both groove structures with a bottom and two side walls. The second feeding section 3j is located between the two sections and has only one side wall, and is connected to the first feeding section 3i and the third feeding section 3k. The base 01 has... There is a cylindrical base body and pins 03 designed on the base body. The base is placed horizontally in the first feeding section 3i. When the base moves to the second feeding section 3j, it will become vertical under the action of gravity. At this time, if the base body is facing upward, the base 01 can easily hang on the second feeding section 3j and continue to move to the third feeding section 3k. If the base body is facing downward, the base 01 will fall directly on the vibrating plate 3g, ensuring that the base conveyed to the third feeding section 3k is in the state of the base body facing upward. Therefore, the height of the side wall of the third feeding section 3k is greater than the length of the base.

[0042] The detection and correction station is equipped with a first photoelectric sensor, a first camera, and a first corrector, all located near the base insertion station. The first photoelectric sensor, first camera, and first corrector are all connected to the controller. The first photoelectric sensor is located below the end of the first feeding rail 3h and is used to detect whether there is a base 01 at the end of the first feeding rail 3h. The first camera is facing upwards and is used to take a picture of the pin 03 of the base, which is then compared with a pre-defined picture from the controller to determine whether the pin 03 of the base 01 is qualified. The first corrector includes two spaced-apart first correction clamps 3l and a first correction cylinder capable of moving the two first correction clamps 3l closer together and further apart. Specifically, a first correction seat 3m can be designed on the first platform 04, with the two first correction clamps 3l slidably mounted on the first correction seat 3m. The first correction cylinder can be designed as a double-headed cylinder, with both ends connected to the two first correction clamps 3l, moving them closer or further apart to correct the pin 03 of the base 01.

[0043] The robotic arm 3n includes a mechanical base 3o. A first air suction head 3p, a second air suction head 3q, and a third air suction head 3r are spaced apart on the lower surface of the mechanical base 3o. These air suction heads 3p, 3q, and 3r are distributed sequentially from far to near the insertion station of the base 01. The robotic arm 3n also includes a drive source capable of moving the mechanical base 3o and achieving the following two working conditions: Operating Condition 1: The first air suction head 3p is located above the first photoelectric sensor, the second air suction head 3q is located above the first camera, and the third air suction head 3r is located above the first corrector; Operating Condition 2: The first air suction head 3p is located above the first camera, the second air suction head 3q is located above the first corrector, and the third air suction head 3r is located above the base insertion station.

[0044] The movement trajectory of the mechanical base 3o is roughly a reciprocating swing state. Specifically, it is a swing that combines the horizontal and vertical directions. In order to achieve the swing, the drive source can be designed as a combination of a motor and a linkage mechanism, or it can be designed as a multi-axis mechanical arm.

[0045] like Figure 2 , Figure 5 As shown, the first plate 04 is equipped with a base fixture loading device 1, a base fixture conveying device 2, and a base fixture unloading device 4. The base fixture loading device 1, the base fixture conveying device 2, and the base fixture unloading device 4 are all connected to the first controller. The base fixture conveying device 2 can sequentially convey the base fixture 06 from the base fixture loading device 1 to the base insertion device 3 and the base fixture unloading device 4. The base fixture unloading device 4 can convey the base fixture 06 to the base fixture holding plate 4c on the first plate 04.

[0046] Specifically, the base fixture feeding device 1 includes a base fixture feeding belt 1a and a base fixture feeding rail 1b. Both the base fixture feeding belt 1a and the base fixture feeding rail 1b are mounted on the first platform 04. The base fixture feeding belt 1a is perpendicular to the base fixture feeding rail 1b and is driven by a motor, which can transport the base fixture 06 to the base fixture feeding rail 1b. A first push rod is slidably mounted above the base fixture feeding rail 1b. The first push rod can push the base fixture 06 to move in the direction of the base fixture conveying device 2. The first push rod can be driven by a linear motor, cylinder, or other means.

[0047] The base fixture conveying device 2 includes a first base fixture conveying rail 2a, the feed end of which is connected to the base fixture loading rail 1b. A first base fixture conveyor belt 2b is provided on the first base fixture conveying rail 2a. The fixture on the base fixture loading rail 1b can be pushed onto the first base fixture conveyor belt 2b. The first base fixture conveyor belt 2b can transport the base fixture 06 to the bottom of the base fixture clamping unit. A second through hole is provided on the first base fixture conveying rail 2a opposite the base fixture clamping unit. A first lifting member 2c is provided on the first platform 04. The output end of the first lifting member 2c can pass through the second through hole to lift the base fixture 06 on the first base fixture conveyor belt 2b to the base fixture clamping unit and clamp it by two first clamping plates. Therefore, in order to enable the base fixture 06 to be lifted, there are two first base fixture conveyor belts 2b, which are parallel to each other and spaced apart, so that the output end of the first lifting member 2c can pass through. The first lifting member 2c can be designed as a cylinder, electromagnet, linear motor, etc. The output end of the first lifting member 2c can fix the lifting plate, and the width of the lifting plate is less than the distance between the two first base fixture conveyor belts 2b.

[0048] A first blocking member 2d is also provided near the base fixture clamping unit on the first base fixture conveying rail 2a. The first blocking member 2d is arranged in a horizontal direction. A third through hole is opened on the side wall of the first base fixture conveying rail 2a. The output end of the first blocking member 2d can extend through the third through hole into the first base fixture conveying rail 2a and contact the end of the base fixture 06 near the base fixture clamping unit, blocking the base fixture 06. After the previous base fixture 06 completes the base insertion, the output end of the first blocking member 2d retracts, causing the base fixture 06 to move to the base fixture clamping unit.

[0049] Alternatively, the first blocking member 2d can also extend out and contact the side wall of the base fixture 06 to press the base fixture 06 against it, thus achieving the same blocking effect.

[0050] The first blocking element 2d may include a cylinder, the output end of which is connected to a stop rod that can pass through the third through hole. If the first blocking element 2d is not designed, the base fixture 06 can also be intermittently conveyed to the bottom of the base fixture clamping unit by controlling the feeding frequency of the first base fixture conveyor belt 2b.

[0051] The base fixture unloading device 4 includes a first unloading push rod 4a and a second cylinder 4b. The second cylinder 4b is mounted on the first platform 04. The output end of the second cylinder 4b is connected to the first unloading push rod 4a. The position of the first base fixture conveying rail 2a corresponding to the base fixture unloading device 4 is a single-side wall structure. The side wall is close to the base fixture unloading device 4 and has a through hole. The first unloading push rod 4a can pass through the through hole and extend into the first base fixture conveying rail 2a to push the base fixture 06 into the base fixture holding plate 4c.

[0052] like Figure 2 As shown, the base adhesive application device 5 is disposed on the second plate 05 and is used to apply adhesive to the base 01 on the base fixture 06; the fixture docking device 6 is disposed on the second plate 05 and is used to dock the adhesive-coated base fixture 06 with an unloaded wafer fixture to form a composite fixture; the base fixture feeding device 7 is disposed on the second plate 05 and is used to transport the base fixture 06 from the base adhesive application device 5 to the fixture docking device 6.

[0053] like Figure 2 , Figure 6 As shown, the base fixture feeding device 7 includes a base fixture feeding rail 7a, which is mounted on the second platform 05. A base fixture feeding belt 7b is mounted on the base fixture feeding rail 7a. The feed end of the base fixture feeding rail 7a is also connected to another base fixture loading device 1, which is used to transport the base fixture 06 after the base insertion is completed.

[0054] like Figure 2 , Figure 6 As shown, the base gluing device 5 includes a gluing bracket 5a mounted on the second platform 05, and a gluing wheel 5b mounted on the gluing bracket 5a. A gluing motor 5c is mounted on the second platform 05, and a gluing drive wheel 5d is mounted on the output shaft of the gluing motor 5c. One end of the gluing shaft is connected to a gluing driven wheel 5e. The gluing drive wheel 5d and the gluing driven wheel 5e are connected by a gluing transmission belt 5f. When the gluing motor 5c rotates, it drives the gluing wheel 5b to make uniform contact with the upper surface of the base fixture 06, thereby achieving gluing.

[0055] Preferably, in order to enable the glue-applying wheel 5b to apply a certain pressure to the base fixture 06, the glue-applying bracket 5a is provided with a glue-applying groove in the vertical direction, and a glue-applying slider is slidably arranged in the glue-applying groove. A compression spring is provided between the glue-applying slider and the upper end of the glue-applying groove. The compression spring applies downward pressure to the glue-applying slider, so that the glue-applying wheel 5b can be pressed tightly against the upper surface of the base fixture 06. The glue-applying wheel 5b rotates and cooperates with the glue-applying slider through a glue-applying shaft.

[0056] The adhesive source for the coating wheel 5b can be achieved through the following structure: the coating bracket 5a is provided with a coating plate, and the lower end of the coating plate is provided with a glue strip. The glue strip is in contact with the circular surface of the coating wheel 5b. When the coating wheel 5b rotates, it can pick up the adhesive on the glue strip and then contact the upper surface of the base fixture 06 to apply it to the base fixture 06.

[0057] like Figure 2 , Figure 7As shown, the base fixture detection device 11 is installed on the second plate 05. It can detect missing base fixtures 06 and move the missing base fixtures 06 to the base fixture scrap area 11a. The base fixture feeding device 7 can transport the base fixtures 06 from the base fixture feeding device 1 through the base fixture detection device 11 to the base adhesive application device 5.

[0058] Specifically, a second camera 11b is installed on the second platform 05. The second camera 11b is located above the base fixture feeding rail 7a and is used to send the image of the base fixture in the base fixture feeding rail 7a to the second controller. If the base of the base fixture is detected to be improperly connected, the second controller sends a command to the third cylinder 11c. The third cylinder 11c is installed on the second platform 05 and connected to the detection push plate 11d. The detection push plate 11d moves to push the defective base fixture in the base fixture feeding rail 7a to the base fixture scrap area 11a.

[0059] like Figure 2 , Figure 8 As shown, a base positioning device 14 is also provided on the second plate 05. The base positioning device 14 is located between the base fixture detection device 11 and the base gluing device 5. The base positioning device 14 can apply downward pressure to the base on the base fixture 06 and push the base to a predetermined position. The base fixture feeding device 7 passes through the base positioning device 14.

[0060] The base positioning device 14 includes a pressurizing mechanism 14a, a second lifting member, a second blocking member 14c, a second clamping seat 14d, a second clamping plate 14e, and a second connecting rod 14f. The structure of the second lifting member, the second blocking member 14c, the second clamping seat 14d, the second clamping plate 14e, and the second connecting rod 14f is similar to... Figure 3 , Figure 5 The first lifting component 2c, the first blocking component 2d, the first clamping seat 3a, the first clamping plate 3b, and the first connecting rod 3c are the same, and are used to transport and clamp the base fixture 06 on the base fixture feeding rail 7a.

[0061] The pressurizing mechanism 14a includes a pressurizing seat 14g disposed on the second platform 05. A fourth cylinder 14h is disposed on the pressurizing seat 14g in the vertical direction. The output end of the fourth cylinder 14h is connected to a pressure seat 14i. A pressure head 14j is disposed on the lower surface of the pressure seat 14i. The pressure head 14j can contact the base 01 on the base fixture 06 and push the base 01 to a predetermined position.

[0062] like Figure 2 , Figure 8As shown, the fixture docking device 6 includes a wafer fixture loading unit, which includes a vertical wafer fixture loading rail 6a and a horizontal wafer fixture loading rail 6b. The vertical wafer fixture loading rail 6a and the horizontal wafer fixture loading rail 6b are mounted on the second platform 05 and are perpendicular to each other. The vertical wafer fixture loading rail 6a is provided with a vertical wafer fixture loading belt, and the horizontal wafer fixture loading rail 6b is provided with a horizontal wafer fixture loading belt. An opening is provided on one side of the vertical wafer fixture loading rail 6a, and one end of the horizontal wafer fixture loading belt extends to the opening. The wafer jig can move from the transverse wafer jig feeding belt to the longitudinal wafer jig feeding belt, and then to the other end of the longitudinal wafer jig feeding belt. In order to enable the wafer jig to move better from the transverse wafer jig feeding belt to the longitudinal wafer jig feeding belt, a cylinder is provided on the longitudinal wafer jig feeding rail 6a. The cylinder is set in the horizontal direction. A support plate is also provided on the longitudinal wafer jig feeding rail 6a. The support plate is flush with the bottom of the notch. The wafer jig is transported to the support plate by the transverse wafer jig feeding belt, and then pushed to the longitudinal wafer jig feeding belt by the output end of the cylinder.

[0063] like Figure 2 , Figure 9 As shown, the wafer jig loading unit also includes a fifth cylinder 6c, a sixth cylinder 6d, and a seventh cylinder 6e. The fifth cylinder 6c is fixed vertically on the longitudinal wafer jig loading rail 6a, with its output end facing downwards and a wafer jig loading baffle 6f fixed thereon to block the wafer jig. The sixth cylinder 6d is fixed horizontally on the longitudinal wafer jig loading rail 6a, with its output end facing the fifth cylinder 6c and a wafer jig loading baffle 6g fixed thereon to block the wafer jig on the longitudinal wafer jig loading belt 6a. The seventh cylinder is fixed horizontally on the longitudinal wafer jig loading rail 6a, and a push rod is connected to the output end of the seventh cylinder 6e.

[0064] The wafer fixture moves on the longitudinal wafer fixture loading rail 6a. When a wafer fixture passes the fifth cylinder 6c, the fifth cylinder 6c drives the wafer fixture loading baffle 6f to descend, blocking the next wafer fixture and temporarily stopping the movement of the wafer fixtures on the subsequent longitudinal wafer fixture loading rail 6a. The wafer fixture that has passed the fifth cylinder 6c is aligned with the seventh cylinder 6e under the action of the sixth cylinder 6d and the wafer fixture loading baffle 6g. The seventh cylinder 6e pushes the wafer fixture to the docking station 6h through the push rod.

[0065] like Figure 9 , Figure 10As shown, a discharge hole 6i is provided at the docking station 6h. The base fixture feeding rail 7a passes under the second platform 05 and extends to the vicinity of the discharge hole 6i. A first flipping unit 6j is fixed under the second platform 05. The first flipping unit 6j includes a bracket 6k and a flipping shaft 6l. The flipping shaft 6l is rotatably mounted on the bracket 6k. Four L-shaped support plates 6m are spaced apart along the circumference of the flipping shaft 6l. Every 90 degrees that the flipping shaft 6l rotates, one support plate 6m can be flush with the base fixture feeding rail 7a. The rotation of the flipping shaft 6l is achieved by a motor. The support plate 6m is also provided with a through groove 6n. The length of the through groove 6n is less than the length of the base fixture, and the discharge hole 6i is greater than the length of the base fixture. When a support plate 6m is flush with the base fixture feeding rail 7a, the through groove 6n on the support plate 6m is aligned with the discharge hole 6i.

[0066] After the base fixture on the base fixture feeding rail 7a is transported to the pallet 6m, the motor drives the flipping shaft 6l to rotate 90 degrees, so that the base on the base fixture is oriented in a horizontal direction, so as to cooperate with the subsequent wafer insertion.

[0067] Below the second plate 05, there is also a fixed eighth cylinder 6o. The eighth cylinder 6o is set in a vertical direction and a push plate is fixed at its upper end. The push plate can rise and push the base fixture on the support plate 6m to the surface of the second plate 05, reaching the docking position 6h.

[0068] The second board 05 is also equipped with a feeding system 10. The feeding system 10 includes a transfer plate 6p set above the second board 05. The transfer plate 6p can move laterally and longitudinally along the second board 05. Its movement can be achieved by two sets of mutually perpendicular linear drive sources, such as two sets of linear motors or cylinders. The transfer plate 6p has multiple transfer slots 6q. The transfer slots 6q are distributed at intervals along the length direction of the second board 05, and the slot openings face the docking station 6h, the wafer insertion station 6r, and the wafer positioning station 6s.

[0069] The transfer plate 6p moves longitudinally along the second platform 05, which can first push the base fixture above the discharge hole 6i onto the platform of the second platform 05. The wafer fixture moves toward the base fixture under the action of the ninth cylinder 6t. The two dock to form a composite fixture. The transfer plate 6p moves laterally along the second platform 05 to transport the composite fixture to the wafer insertion station 6r.

[0070] The wafer insertion device 8 is a pneumatic suction device fixed to the upper surface of the second platform 05. Specifically, the pneumatic suction device is located at the insertion station 6r and includes a tenth cylinder 8a, an eleventh cylinder 8b, and a suction head 8c. The tenth cylinder 8a is longitudinally positioned on the platform of the second platform 05, and the eleventh cylinder 8b is vertically positioned at the output end of the tenth cylinder 8a. The output end of the eleventh cylinder 8b is connected to the suction head 8c, which operates using pneumatic suction. The wafer loading device includes a wafer loading slot 8d. The suction head 8c can adsorb the wafers in the wafer loading slot 8d onto the wafer fixture to achieve wafer insertion. The wafers in the wafer loading slot 8d can be manually placed to ensure consistent orientation, or the wafers can be adjusted to consistent orientation using a multi-segment feeding slot.

[0071] The second board 05 is also equipped with a wafer positioning device 15. The transfer board 6p can transport the composite fixture at the wafer insertion device to the wafer positioning device 15. The wafer positioning device 15 can push the wafer on the composite fixture to move towards the base on the composite fixture.

[0072] Specifically, the wafer positioning device 15 includes a twelfth cylinder 15a disposed on the second plate 05. The output end of the twelfth cylinder 15a has multiple push plates corresponding to the slots on the reset fixture. The transfer plate 6p can transport the reset fixture after wafer insertion to the wafer positioning station 6s. The push plates can push the wafer to a predetermined position.

[0073] The second platform 05 is also equipped with a second flipping unit 16, which has the same structure as the first flipping unit 6j, and converts the horizontally oriented composite fixture into a vertically oriented one.

[0074] The feeding system 10 also includes a conveyor belt set on the second plate 05, which can transport the composite fixture at the wafer positioning station 6s to the melting device 9. The melting device 9 is set on the second plate 05 and has a channel for the composite fixture to pass through. The channel has a heating rod for heating to melt the adhesive between the base and the wafer to achieve bonding.

[0075] like Figure 2 , Figure 11 As shown, the second board 05 is also equipped with a jig separation device 17. The feeding system 10 can transport the composite jig from the melting device 9 to the jig separation device 17. The jig separation device 17 can separate the wafer jig from the base jig in the composite jig and move the wafer jig to the wafer jig unloading area.

[0076] Specifically, the fixture separation device 17 includes a lower clamp 17a for holding the base fixture and an upper clamp 17b for holding the wafer fixture. The lower clamp 17a includes two spaced-apart lower clamping plates 17c, which can move closer and further apart. In the composite fixture on the feeding system 10, the base fixture is located at the bottom, and the wafer fixture is located on the upper surface of the base fixture. The feeding system 10 passes between the two lower clamping plates 17c. When the two lower clamping plates 17c move closer together, they can clamp the base fixture. Its movement is achieved by a cylinder. The wafer fixture is clamped by an upper clamp 17b, which can be a pneumatic chuck. The second platform 05 is also equipped with a thirteenth cylinder 17d and a wafer fixture return belt 17e. The thirteenth cylinder 17d is arranged longitudinally, and a fourteenth cylinder 17f is located at its output end. The fourteenth cylinder 17f is arranged vertically and connected to the lower clamp 17c. The thirteenth cylinder 17d and the fourteenth cylinder 17f work together to clamp the wafer fixture into the wafer fixture return belt 17e. The wafer fixture return belt 17e and... Figure 2 , Figure 8 The transverse wafer jig loading rail 6b is connected to the cylinder, which can transport the wafer jig to the transverse wafer jig loading rail 6b for repeated use.

[0077] like Figure 2 As shown, the processing line also includes a base fixture recycling station 18. The feeding system 10 can transport the base fixture separated by the fixture separation device 17 to the base fixture recycling station 18. The base fixture recycling station 18 can move the base fixture onto the base fixture holding plate 4c through the cooperation of the fifteenth cylinder 18a and the push plate for recycling, thus obtaining the finished product after the base and the wafer are bonded.

[0078] The second controller is connected to various devices on the second board 05, such as cylinders.

[0079] The working principle of this embodiment is as follows: The base fixture feeding device 1 transports the unloaded base fixture 06 to the base fixture conveying device 2. The base fixture conveying device 2 transports the unloaded base fixture 06 to the base insertion device 3. The robot arm 3n inserts the base 01 on the first feeding rail 3h into the base fixture 06. The base fixture conveying device 2 transports the inserted base fixture 06 to the base fixture holding plate 4c of the base fixture unloading device 4. The operator places the base fixture holding plate 4c on another base fixture feeding device 1. The base fixture feeding device 7 transports the base fixture 06 at this location to the base fixture detection device 11 for detection. The qualified base fixture 06 continues to be transported to the base positioning device 14, pushing the base 01 to the predetermined position. The base fixture feeding device 7 transports the base 01 to the base fixture positioning device 14. At the adhesive application device 5, adhesive is applied to the base 01 of the base fixture 06. The base 01 is then conveyed to the fixture docking device 6. Under the action of the longitudinal wafer fixture loading rail 6a, the transverse wafer fixture loading rail 6b, and the transfer plate 6p, the wafer fixture docks with the base fixture 06 to form a composite fixture. The suction head 8c inserts the wafer into the composite fixture. The transfer plate 6p pushes the composite fixture to move. The conveyor belt of the feeding system 10 conveys the composite fixture to the melting adhesive device 9 to melt the adhesive, so that the base 01 and the wafer 02 are bonded. The feeding system 10 conveys the composite fixture to the fixture separation device 17. The separated base fixture 06 is conveyed to the base fixture recycling table 18. Under the action of the upper clamp 17b, the wafer fixture return belt 17e finally moves to the transverse wafer fixture loading rail 6b for recycling.

[0080] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A production line for manufacturing quartz crystal resonators, characterized in that, include First board (04); The base insertion device (3) is set on the first plate (04) and is used to insert the base (01) in the quartz crystal resonator into the base fixture (06); The first controller is connected to the base plug-in device (3); Second board (05); The base adhesive applicator (5) is set on the second plate (05) and is used to apply adhesive to the base (01) on the base fixture (06); A fixture docking device (6) is installed on the second plate (05) and is used to dock the base fixture (06) that has been coated with adhesive with the unloaded wafer fixture to form a composite fixture; The base fixture feeding device 1 (7) is set on the second plate (05) and is used to transport the base fixture (06) from the base glue applicator (5) to the fixture docking device (6); A wafer insertion device (8) is set on the second plate (05) for inserting the wafer (02) in the quartz crystal resonator into the wafer fixture in the composite fixture, so that the base (01) in the composite fixture is in contact with the wafer (02); A melting device (9) is set on the second plate (05) for melting the adhesive on the substrate (01) to bond the substrate (01) to the wafer (02); The feeding system (10) is set on the second plate (05) and is used to transport the composite fixture from the fixture docking device (6) to the wafer insertion device (8) to the melting device (9); The second controller is connected to the base coating device (5), the base fixture feeding device (7), the fixture docking device (6), the feeding system (10), the wafer insertion device (8), and the melting device (9).

2. The quartz crystal resonator manufacturing line according to claim 1, characterized in that, The base insertion device (3) includes a base fixture clamping unit, a base feeding unit, a robot (3n), a base insertion station, and a detection and correction station. The base fixture clamping unit, the robot (3n), the base insertion station, and the detection and correction station are all located on the first plate (04). The base fixture clamping unit, the base feeding unit, and the robot (3n) are all connected to the first controller. The base fixture clamping unit can clamp the unloaded base fixture (06) at the base insertion station. The base feeding unit can transport the base to the detection and correction station. The detection and correction station is close to the base insertion station. The robot (3n) can adsorb the base (01) on the detection and correction station and insert the base (01) into the base fixture (06) on the base insertion station.

3. The quartz crystal resonator processing line according to claim 2, characterized in that, The processing line also includes a base fixture loading device (1), a base fixture conveying device (2), and a base fixture unloading device (4) set on the first platform (04). The base fixture loading device (1), the base fixture conveying device (2), and the base fixture unloading device (4) are all connected to the first controller. The base fixture conveying device (2) can transport the base fixture (06) from the base fixture loading device (1) to the base insertion device (3) and the base fixture unloading device (4) in sequence. The base fixture unloading device (4) can transport the base fixture (06) to the base fixture holding plate (4c) on the first platform (04).

4. The quartz crystal resonator manufacturing line according to claim 3, characterized in that, The processing line also includes a base fixture detection device (11) set on the second plate (05). The base fixture detection device (11) can detect missing base fixtures (06) and move the missing base fixtures (06) to the base fixture scrap area (11a). The base fixture feeding device (7) can transport the base fixtures (06) from the base fixture loading device (1) to the base glue application device (5) via the base fixture detection device (11). The base fixture detection device (11) is connected to the second controller.

5. The quartz crystal resonator manufacturing line according to claim 4, characterized in that, The second platform (05) is also provided with a base positioning device (14), which is located between the base fixture detection device (11) and the base gluing device (5). The base positioning device (14) can apply downward pressure to the base (01) on the base fixture (06) and push the base (01) to a predetermined position. The base fixture feeding device (7) passes through the base positioning device (14).

6. The quartz crystal resonator manufacturing line according to claim 5, characterized in that, The processing line also includes a wafer loading device set on the second plate (05), and the wafer insertion device (8) includes an air suction device set on the second plate (05). The air suction device can adsorb the wafer (02) in the wafer loading device and insert the wafer (02) into the wafer fixture.

7. The quartz crystal resonator manufacturing line according to claim 6, characterized in that, The second plate (05) is also provided with a wafer positioning device (15). The feeding system (10) can transport the composite fixture at the wafer insertion device (8) to the wafer positioning device (15). The wafer positioning device (15) can push the wafer (02) on the composite fixture toward the base (01) on the composite fixture.

8. The quartz crystal resonator manufacturing line according to claim 7, characterized in that, The second plate (05) is also provided with a fixture separation device (17). The feeding system (10) can transport the composite fixture at the melting device (9) to the fixture separation device (17). The fixture separation device (17) can separate the wafer fixture in the composite fixture from the base fixture (06) and move the wafer fixture to the wafer fixture unloading area.

9. The quartz crystal resonator processing line according to claim 8, characterized in that, The processing line also includes a base fixture recovery table (18). The feeding system (10) can transport the base fixture (06) separated by the fixture separation device (17) to the base fixture recovery table (18). The base fixture recovery table (18) can move the base fixture (06) onto the base fixture holding plate (4c).

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