Device for solving the problem of electrode sparking in coaxial cable adapter in low-pressure plasma environment

Abstract

The present invention discloses a device for solving the problem of electrode ignition of a coaxial cable adapter in a low-pressure plasma environment, relates to the field of coaxial cable adapters, and solves the problem of improving the high-voltage ignition and insulation protection capabilities of the adapter that transmits high-voltage and high-current coaxial cables to discrete electrode columns penetrating the cabin in a low-pressure plasma environment in a vacuum cabin. The electrode blocks in the two electrode insulation boxes of the present invention clamp the coaxial cable; the electrode insulation boxes are arranged at both ends of the middle insulation block, and the coaxial cable passes through the middle insulation block; the upper ends of the electrode insulation boxes and the middle insulation block are embedded in the insulation cover box, and one end of the coaxial cable extends out of the insulation cover box; the middle insulation block and the insulation cover box are both fixed to the inner wall of the vacuum tank body by an insulation fixing structure; the through-wall electrode passes through the inner wall of the vacuum tank body and is connected to the electrode block. The present invention enables the adapter to meet the use requirements under low pressure, plasma, electromagnetic waves and high voltage conditions.

Description

Technical Field

[0001] The invention relates to the technical field of coaxial cable adapters, in particular to a device for solving the problem of electrode ignition of a coaxial cable adapter in a low-pressure plasma environment. Background Art

[0002] High voltage and high current pulse coils are one of the important components of magnetic confinement plasma devices. Plasma experiments usually generate plasma by gas ionization under high vacuum conditions. In the vacuum chamber, the pulse coil generates a strong magnetic field or ionizes the working gas to generate plasma under the excitation of the pulse power supply. The plasma is confined by the strong magnetic field and moves away from the coil as the magnetic field increases, and moves toward the coil as the magnetic field weakens. In order to achieve a high magnetic field peak, the pulse excitation current peak usually needs to reach the order of tens of kiloamperes or even hundreds of kiloamperes. In the high current pulse power system, coaxial cables are usually used to transmit current from the coil load to the pulse power supply. Coaxial cables can effectively avoid electromagnetic forces between large current single-core cables and can achieve effective electromagnetic shielding. The coaxial cable used for current transmission in the vacuum chamber is composed of a coaxial inner core cable and an outer core cable to achieve one-in-one current transmission. The positive and negative poles of the pulse power source located outside the vacuum chamber need to be connected to the load circuit in the vacuum chamber through a cabin penetration mechanism. In order to meet the cabin penetration requirements of large current pulse circuits, cabin penetration electrodes that meet the airtightness requirements are usually installed on the flange of the vacuum cabin, and electrode columns for current transmission are installed on them. At the same time, the spacing between the electrode columns meets the insulation requirements of high-voltage discharge, and the spacing between the electrode columns usually needs to reach more than ten centimeters to several dozen centimeters. The electrode columns are connected to the positive and negative poles of the pulse power supply outside the vacuum cabin, and are connected to the coaxial cable used for current transmission inside the vacuum cabin. Therefore, it is necessary to use a coaxial cable adapter to connect the positive and negative electrode columns with a certain spacing to the inner core cable and the outer core cable of the coaxial cable in the vacuum cabin. The coaxial cable adapter works in a low-pressure plasma environment, especially in an experimental device running a microwave plasma source. The low pressure, plasma, electromagnetic waves and high voltage conditions pose severe challenges to the high-voltage spark protection and insulation performance of the adapter. Therefore, it is an urgent problem to find a method to solve the high voltage sparking of the coaxial cable to discrete electrode column adapter in the low-pressure plasma environment in the vacuum cabin, improve the low-pressure and high-voltage insulation capability of the adapter, and realize the safe transfer of the high-voltage coaxial cable and the discrete electrode column through the cabin in the low-pressure plasma environment in the vacuum cabin. Summary of the invention

[0003] In order to solve the above-mentioned problem of high voltage ignition and insulation protection improvement of the adapter from the high voltage and high current transmission coaxial cable to the through-cabin discrete electrode column in the low pressure plasma environment in the vacuum cabin, the present invention proposes a device to solve the ignition of the electrode of the coaxial cable adapter in the low pressure plasma environment. The present invention effectively improves the insulation protection capability of the adapter, so that the adapter can meet the use requirements under low pressure, plasma, electromagnetic waves and high voltage conditions.

[0004] The invention proposes a device for solving the problem of electrode ignition of a coaxial cable adapter in a low-pressure plasma environment. The device specifically comprises two electrode insulation boxes, an intermediate insulation block, an insulation cover box, a coaxial cable and an insulation fixing structure. A plurality of electrode blocks are arranged in the electrode insulation box; the plurality of electrode blocks clamp the coaxial cable; the two electrode insulation boxes are respectively arranged at the left and right ends of the intermediate insulation block, and the coaxial cable passes through the intermediate insulation block; the upper ends of the two electrode insulation boxes and the intermediate insulation block are embedded in the lower end of the insulation cover box, and one end of the coaxial cable extends out of the insulation cover box; the intermediate insulation block and the insulation cover box are both fixedly arranged on the inner wall of a vacuum tank body through the insulation fixing structure; two through-wall electrodes pass through the inner wall of the vacuum tank body and the insulation fixing structure and are respectively connected to an electrode block in an electrode insulation box.

[0005] Furthermore, the coaxial cable is sleeved with an inner core connector and an outer core connector, and the electrode block clamps the coaxial cable through the inner core connector and the outer core connector.

[0006] Furthermore, the electrode insulation box includes a main body and two baffles, the main body includes an insulating sleeve and a U-shaped shell, a through hole is provided on the side wall of the U-shaped shell and is connected to the insulating sleeve; baffles are provided at the front and rear ends of the U-shaped shell to form a rectangular box body with one side open, and a plurality of electrode blocks are arranged in the rectangular box body; the through-wall electrode passes through the insulating sleeve and is connected to the electrode block.

[0007] Furthermore, two insulating support blocks are arranged between the coaxial cable and the insulating fixing structure at positions corresponding to the middle of the inner core connector and the outer core connector.

[0008] Furthermore, the position between the coaxial cable and the insulating fixing structure corresponding to the middle of the two insulating support blocks is filled with insulating glue.

[0009] Furthermore, the insulating fixing structure includes a plurality of metal bases with bolts, a plurality of insulating columns and an insulating base, and the inner wall of the vacuum tank, the metal base with bolts, the insulating columns and the insulating base are connected in sequence; and the middle insulating block is arranged on the insulating base.

[0010] Furthermore, a sinking groove is arranged on the upper surface of the insulating base, and the middle insulating block is arranged in the sinking groove.

[0011] Furthermore, a plurality of long strip-shaped sunken grooves are arranged on the upper surface of the middle insulating block, and a plurality of long strip-shaped protrusions are arranged in the rectangular groove of the insulating cover box, and the long strip-shaped protrusions cooperate with the long strip-shaped sunken grooves.

[0012] Furthermore, the device for solving the sparking of the coaxial cable adapter electrode in a low-pressure plasma environment also includes a metal protection box, which is arranged on the outside of the electrode insulation box, the middle insulation block, the insulation cover box and the insulation fixing structure and is connected to the inner wall of the vacuum tank, and one end of the coaxial cable passes through one side of the metal protection box.

[0013] Furthermore, the upper surfaces of the insulating cover box and the metal protection box are provided with a plurality of through holes.

[0014] The beneficial effects of the device for solving the problem of electrode ignition of a coaxial cable adapter in a low-pressure plasma environment described in the present invention are as follows:

[0015] (1) The device for solving the problem of electrode sparking in a coaxial cable adapter in a low-pressure plasma environment described in the present invention separates the electrodes (including the through-wall electrode, the electrode block, the inner core joint and the outer core joint) by providing an intermediate insulating block and an electrode insulating box, thereby increasing the creepage distance between the electrodes in the two electrode insulating boxes and improving the insulation capacity;

[0016] (2) The device for solving the problem of sparking of electrodes in a coaxial cable adapter in a low-pressure plasma environment described in the present invention provides support for the entire device through the provision of an insulating fixed structure, thereby improving the ability to resist the electromagnetic force between the electrodes and improving the insulation capacity of the coaxial cable and the inner wall of the vacuum tank;

[0017] (3) The device described in the present invention is a device for solving the problem of sparking of electrodes of a coaxial cable adapter in a low-pressure plasma environment. Through the through holes provided on the insulating cover box and the metal protection box, the air pressure inside and outside the device is ensured to remain consistent, thereby preventing the gas inside the metal protection box from being unable to be effectively evacuated by the vacuum system, thereby avoiding the increase in high air pressure inside the metal protection box, which may cause the risk of sparking of the electrodes arranged in the metal protection box. At the same time, the insulating cover box realizes the overall fastening of the device, which can resist the strong electromagnetic force between the electrodes, and has the advantage of improving the operating capability under high current conditions. The metal protection box realizes the overall shielding of the device, which has the advantage of improving the operating capability in strong electromagnetic waves and plasma environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0019] In the attached picture:

[0020] Figure 1It is a three-dimensional structural schematic diagram of a device for solving the problem of electrode ignition of a coaxial cable adapter in a low-pressure plasma environment according to the present invention;

[0021] Figure 2 It is a structural exploded view of a device for solving the problem of electrode sparking of a coaxial cable adapter in a low-pressure plasma environment according to the present invention;

[0022] Figure 3 It is a three-dimensional structural diagram of an electrode insulation box of a device for solving the problem of electrode ignition of a coaxial cable adapter in a low-pressure plasma environment according to the present invention;

[0023] Figure 4 It is a structural exploded view of an electrode insulation box of a device for solving the problem of electrode sparking in a coaxial cable adapter in a low-pressure plasma environment according to the present invention;

[0024] Figure 5 It is a three-dimensional structural schematic diagram of an insulating cover box of a device for solving the problem of electrode ignition of a coaxial cable adapter in a low-pressure plasma environment according to the present invention;

[0025] Figure 6 It is a three-dimensional structural schematic diagram of the middle insulating block of a device for solving the problem of electrode sparking in a coaxial cable adapter in a low-pressure plasma environment according to the present invention;

[0026] Among them: 1-electrode block one, 2-electrode block two, 3-electrode block three, 4-electrode block four, 5-electrode block five, 6-electrode block six, 7-coaxial cable, 8-inner core connector, 9-outer core connector, 10-through-wall electrode one, 11-through-wall electrode two, 12-electrode insulation box one, 13-electrode insulation box two, 14-main body, 15-baffle, 16-metal base with bolts, 17-insulating column, 18-insulating base, 19-middle insulating block, 20-insulating support block, 21-insulating cover box, 22-metal protection box. DETAILED DESCRIPTION

[0027] The specific implementation of the present invention is further described in detail below with reference to the accompanying drawings:

[0028] Specific implementation method 1: See Figure 1-Figure 6 The present embodiment is described in detail. The device for solving the problem of electrode sparking in a coaxial cable adapter in a low-pressure plasma environment described in the present embodiment specifically comprises two electrode insulation boxes, an intermediate insulation block 19, an insulation cover box 21, a coaxial cable 7, an inner core connector 8, an outer core connector 9 and an insulation fixing structure. The coaxial cable 7 is provided with an inner core connector 8 and an outer core connector 9, wherein the outer core connector 9 is provided at the end of the coaxial cable 7, such as Figure 2As shown; a plurality of electrode blocks are arranged in the electrode insulating box; the two electrode insulating boxes clamp the inner core joint 8 and the outer core joint 9 respectively through the plurality of electrode blocks inside each of them; the two electrode insulating boxes are respectively arranged at the left and right ends of the middle insulating block 19, and the coaxial cable 7 passes through the arched through groove arranged on the middle insulating block 19; a rectangular groove is arranged at the lower end of the insulating cover box 21, and the upper ends of the two electrode insulating boxes and the middle insulating block 19 are embedded in the rectangular groove, and one end of the coaxial cable 7 extends out of the insulating cover box 21; the middle insulating block 19 and the insulating cover box 21 are both fixed on the inner wall of the vacuum tank body through an insulating fixing structure; two through-wall electrodes pass through the inner wall of the vacuum tank body and the insulating fixing structure and are respectively connected to an electrode block in an electrode insulating box.

[0029] The electrode insulation box includes a main body 14 and two baffles 15. The main body 14 includes an insulating sleeve and a U-shaped shell. The side wall of the U-shaped shell is provided with a through hole and connected to the insulating sleeve. The front and rear ends of the U-shaped shell are provided with baffles 15 to form a rectangular box body with one side open, and a plurality of electrode blocks are provided in the rectangular box body. The through-wall electrode passes through the insulating sleeve and is connected to the electrode block. In this embodiment, electrode block 1, electrode block 2, and electrode block 3 are provided on electrode insulation box 12. Electrode block 1 and electrode block 2 are fixed with bolts after clamping the inner core joint 8, and the bolt hole is a sink hole. Electrode block 2 and electrode block 3 are fixed with bolts after clamping the through-wall electrode 10, and the bolt hole is a sink hole. Electrode block 4, electrode block 5, and electrode block 6 are provided on electrode insulation box 2 13, wherein electrode block 4 and electrode block 5 are fixed with bolts after clamping the outer core joint 9 on the coaxial cable 7, and the bolt hole is a sink hole. After the electrode block 5 and the electrode block 6 clamp the through-wall electrode 11, they are fixed with bolts, and the bolt holes are sink holes. During installation, the through-wall electrode is inserted into the insulating sleeve of the main body 14, and the electrode block is installed in the U-shaped shell to clamp the through-wall electrode and the coaxial cable 7, and finally the baffle 15 is attached to the front and rear ends of the U-shaped shell through insulating glue. Through holes are provided on the electrode block 1, the electrode block 2, the electrode block 5, the electrode block 6 and the bottom plate of the U-shaped shell. Bolts pass through the through holes to fix the electrode insulation box on the middle insulation block 19, and the bottom plate of the U-shaped shell is in contact with the middle insulation block 19.

[0030] Two insulating support blocks 20 are arranged between the coaxial cable 7 and the insulating fixing structure at the position corresponding to the middle of the inner core joint 8 and the outer core joint 9, which play a supporting role for the coaxial cable 7. The position between the coaxial cable 7 and the insulating fixing structure corresponding to the middle of the two insulating support blocks 20 is filled with insulating glue, thereby reducing the risk of surface discharge between the electrode blocks in the two electrode insulating boxes and the inner core joint 8 and the outer core joint 9.

[0031] The insulating fixing structure includes a plurality of metal bases 16 with bolts, a plurality of insulating columns 17 and an insulating base 18. One end of the metal base 16 with bolts is connected to the inner wall of the vacuum tank body by welding, and the other end is connected to the insulating column 17 by threading. The insulating base 18 is provided with a plurality of sunken through holes. Bolts pass through the sunken through holes on the insulating base 18 and are threadedly connected to the upper ends of the insulating columns 17, thereby fastening the insulating base 18 to the insulating columns 17. While ensuring the supporting and fixing strength of the support columns, the adapter as a whole is insulated from the vacuum tank body, thereby reducing the risk of ignition. The intermediate insulating block 19 is arranged on the insulating base 18.

[0032] The upper surface of the insulating base 18 is provided with a sinking groove, and the middle insulating block 19 is arranged in the sinking groove to limit the middle insulating block 19. The lower surface of the insulating base 18 is provided with a sinking groove corresponding to the insulating column 17, and the upper end of the insulating column 17 is embedded in the sinking groove of the lower surface of the insulating base 18 for limiting, so as to ensure the fixing strength.

[0033] The upper surface of the intermediate insulating block 19 is provided with three long strip sunken grooves, and the rectangular groove of the insulating cover box 21 is provided with three long strip protrusions. The long strip protrusions and the long strip sunken grooves cooperate to increase the creepage distance between the electrode blocks in the two electrode insulating boxes and the inner core joint 8 and the outer core joint 9, thereby improving the insulation strength. Two sunken grooves are also provided between the three long strip sunken grooves on the upper surface of the intermediate insulating block 19. The sides of the left and right ends of the intermediate insulating block 19 in the groove are provided with horizontal sunken through holes, which are connected to the electrode blocks in the electrode insulating box by bolts. Four vertical through holes are provided in and outside the groove on the upper surface of the intermediate insulating block 19, respectively, and are fixed to the lower insulating base 18 by bolts. The overall height of the intermediate insulating block 19 is slightly higher than the electrode insulating cover, which reduces the risk of high-voltage surface discharge between the electrode blocks in the two electrode insulating covers and the inner core joint 8 and the outer core joint 9.

[0034] The insulating cover box 21 is designed according to the external structure of the assembly of the electrode insulating box 12, electrode block 1, electrode block 2, electrode block 3, electrode block 4, electrode block 5, electrode block 6, and the middle insulating block 19, so that the electrode insulating box 12, electrode block 1, electrode block 2, electrode block 3, electrode block 4, electrode block 5, electrode block 6, and the middle insulating block 19 are assembled and placed in the insulating cover box 21. The middle of the insulating cover box 21 is a rectangular groove with two ribs, and the middle structure of the rectangular groove matches the middle insulating block 19. There is an indented cuboid on each side of the rectangular groove, and the indented cuboid structure matches the electrode insulating box. An arc arch hole is set on the outlet side of the coaxial cable 7 of the insulating cover box 21 for the outlet of the coaxial cable 7. A plurality of through holes are set on the upper surface of the insulating cover box 21 to prevent the internal gas from being effectively evacuated by the vacuum system, so as to avoid the internal high air pressure from increasing the risk of ignition between the electrodes.

[0035] The device for solving the problem of electrode sparking in a coaxial cable adapter in a low-pressure plasma environment also includes a metal protection box 22, which is covered on the outside of the electrode insulation box, the middle insulation block 19, the insulation cover box 21 and the insulation fixing structure and is fixed to the inner wall of the vacuum tank by multi-point welding. A circular arc arch hole is provided on one side of the metal protection box 22, and one end of the coaxial cable 7 passes through the circular arc arch hole; the metal protection box 22 is used to protect the entire adapter from the influence of the plasma environment and improve its operating ability in a low-pressure plasma environment. At the same time, it is in direct contact with the vacuum chamber to maintain good grounding, which can shield the electromagnetic waves outside the adapter and the electromagnetic radiation generated by the single-core part and the electrode column inside the adapter, thereby improving the operating ability of the adapter in an electromagnetic wave environment, and improving the electromagnetic compatibility of the adapter, and expanding the applicable scope of the adapter.

[0036] A through hole is provided on the upper surface or any side of the metal protection box 22 to make the internal air pressure of the metal protection box 22 consistent with the air pressure in the external vacuum tank, thereby preventing the internal gas of the metal protection box 22 from being effectively evacuated by the vacuum system and avoiding the high air pressure inside the metal protection box 22 to increase the risk of ignition of the electrodes arranged in the metal protection box 22.

[0037] Summarizing the above implementation cases, the device for solving the sparking of electrodes of coaxial cable adapters in low-pressure plasma environments described in the present invention separates the electrodes (including through-wall electrodes, electrode blocks, inner core joints 8 and outer core joints 9) by setting an intermediate insulating block 19 and an electrode insulating box, thereby increasing the creepage distance between the electrodes in the two electrode insulating boxes and improving the insulation capacity; the device for solving the sparking of electrodes of coaxial cable adapters in low-pressure plasma environments described in the present invention provides support for the entire device through an insulating fixing structure, thereby improving the ability to resist the electromagnetic force between the electrodes and simultaneously improving the insulation capacity of the coaxial cable and the inner wall of the vacuum tank; the device of the present invention A device for solving the problem of sparking of electrodes of a coaxial cable adapter in a low-pressure plasma environment. Through the through holes provided on an insulating cover box 21 and a metal protection box 22, the air pressure inside and outside the device is ensured to be consistent, so as to prevent the gas inside the metal protection box 22 from being unable to be effectively evacuated by a vacuum system, and to avoid the risk of sparking of electrodes arranged in the metal protection box due to the increase of high air pressure inside the metal protection box 22. At the same time, the insulating cover box 21 realizes the overall fastening of the device, can resist the strong electromagnetic force between the electrodes, and has the advantage of improving the operating capability under high current conditions. The metal protection box 22 realizes the overall shielding of the device, and has the advantage of improving the operating capability in strong electromagnetic waves and plasma environments.

[0038] The specific embodiments described above further illustrate the purpose, technical solutions and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the invention. It can also be a reasonable combination of the features recorded in the above implementation methods. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A device for solving the problem of sparking of electrodes of a coaxial cable adapter in a low-pressure plasma environment, characterized in that: The invention comprises two electrode insulation boxes, an intermediate insulation block (19), an insulation cover box (21), a coaxial cable (7) and an insulation fixing structure, wherein a plurality of electrode blocks are arranged in the electrode insulation boxes; the plurality of electrode blocks clamp the coaxial cable (7); the two electrode insulation boxes are respectively arranged at the left and right ends of the intermediate insulation block (19), and the coaxial cable (7) passes through the intermediate insulation block (19); the upper ends of the two electrode insulation boxes and the intermediate insulation block (19) are embedded in the lower end of the insulation cover box (21), and one end of the coaxial cable (7) extends out of the insulation cover box (21); the intermediate insulation block (19) and the insulation cover box (21) are both fixedly arranged on the inner wall of the vacuum tank body through the insulation fixing structure; two through-wall electrodes pass through the inner wall of the vacuum tank body and the insulation fixing structure and are respectively connected to an electrode block in an electrode insulation box; Two insulating support blocks (20) are arranged between the coaxial cable (7) and the insulating fixing structure at positions corresponding to the middle of the inner core connector (8) and the outer core connector (9); The position between the coaxial cable (7) and the insulating fixing structure corresponding to the middle of the two insulating support blocks (20) is filled with insulating glue; The device for solving the problem of electrode ignition of the coaxial cable adapter in a low-pressure plasma environment also includes a metal protection box (22), which is arranged outside the electrode insulation box, the middle insulation block (19), the insulation cover box (21) and the insulation fixing structure and is connected to the inner wall of the vacuum tank, and one end of the coaxial cable (7) passes through one side of the metal protection box (22); The upper surface of the insulating cover box (21) and the surface of the metal protection box (22) are provided with a plurality of through holes; The electrode insulation box comprises a main body (14) and two baffles (15), the main body (14) comprises an insulating sleeve and a U-shaped shell, a through hole is arranged on the side wall of the U-shaped shell and is connected to the insulating sleeve; baffles (15) are arranged at the front and rear ends of the U-shaped shell to form a rectangular box body with one side open, and a plurality of electrode blocks are arranged in the rectangular box body; The through-wall electrode passes through the insulating sleeve and is connected to the electrode block.

2. The device for solving the problem of electrode sparking of a coaxial cable adapter in a low-pressure plasma environment according to claim 1, characterized in that: The coaxial cable (7) is sleeved with an inner core connector (8) and an outer core connector (9), and the electrode block clamps the coaxial cable (7) via the inner core connector (8) and the outer core connector (9).

3. The device for solving the problem of electrode sparking of a coaxial cable adapter in a low-pressure plasma environment according to claim 1, characterized in that: The insulating fixing structure comprises a plurality of metal bases with bolts (16), a plurality of insulating columns (17) and an insulating base (18); the inner wall of the vacuum tank, the metal base with bolts (16), the insulating columns (17) and the insulating base (18) are connected in sequence; and the intermediate insulating block (19) is arranged on the insulating base (18).

4. The device for solving the problem of sparking of the coaxial cable adapter electrode in a low-pressure plasma environment according to claim 3, characterized in that: The upper surface of the insulating base (18) is provided with a sinking groove, and the middle insulating block (19) is arranged in the sinking groove.

5. The device for solving the problem of electrode sparking of a coaxial cable adapter in a low-pressure plasma environment according to claim 1, characterized in that: The upper surface of the middle insulating block (19) is provided with a plurality of long strip-shaped sinking grooves, and the rectangular groove of the insulating cover box (21) is provided with a plurality of long strip-shaped protrusions, and the long strip-shaped protrusions cooperate with the long strip-shaped sinking grooves.

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