Heat dissipation device and epitaxial wafer heating device

Abstract

The present invention provides a heat dissipation device and an epitaxial wafer heating device, which relate to the technical field of lasers. The heat dissipation device comprises: a base, a heat sink and a crossbeam, wherein the crossbeam is connected to the base; a limiting portion is arranged on the crossbeam, and at least a part of the heat sink is located between the limiting portion and the base, so that the heat sink is pressed and fixed on the base by the limiting portion, and the heat sink, the crossbeam and the base are relatively fixedly arranged.

Description

Technical Field

[0001] The invention relates to the technical field of lasers, and in particular to a heat dissipation device and an epitaxial wafer heating device. Background Art

[0002] In the existing epitaxial wafer heating device, a plurality of heat sinks arranged in an array are mounted on the top surface of the heat sink, and a chip is mounted on each heat sink.

[0003] The heat sink and the top surface are provided with corresponding connection structures, so that the bottom surface of the heat sink is fixedly connected to the top surface. However, the connection structure provided on the top surface will affect the water channel setting inside the heat sink, and connecting the heat sinks one by one is inefficient. Summary of the invention

[0004] The object of the present invention is to provide a heat dissipation device and an epitaxial wafer heating device to alleviate the technical problem that the existing heat dissipation seat fixation affects the internal water channel of the base.

[0005] In a first aspect, an embodiment of the present invention provides a heat dissipation device, comprising: a base, a heat dissipation base and a beam, wherein the beam is connected to the base;

[0006] A limiting portion is arranged on the crossbeam, and at least a part of the heat sink is located between the limiting portion and the base, so that the heat sink is pressed and fixed on the base by the limiting portion, and the heat sink, the crossbeam and the base are relatively fixedly arranged.

[0007] Furthermore, the limiting portion on the same crossbeam can press and fix at least one heat sink.

[0008] Furthermore, the limiting portion can press at least two heat sinks arranged in a transverse manner.

[0009] Furthermore, a limiting groove extending in the transverse direction is provided on the side wall of the heat sink;

[0010] The limiting portion is located in the limiting groove, and the limiting portion is used to prevent the heat sink from moving vertically.

[0011] Furthermore, a fixed end is provided at the end of the limiting portion, and the fixed end is connected to the base.

[0012] Furthermore, the number of the fixed ends on the crossbeam is at least two, and a lateral space for accommodating the heat sink is formed between the two fixed ends to limit the lateral movement range of the heat sink.

[0013] Furthermore, the fixed end is detachably connected to the limiting portion.

[0014] Furthermore, at least two of the cross beams are arranged longitudinally so that the plurality of compressed heat sinks are arranged in an array.

[0015] Furthermore, the limiting portions of the two longitudinally adjacent beams prevent the heat sink from moving in the longitudinal direction.

[0016] Furthermore, the heat dissipation device further comprises a transverse limiting member, which extends in the longitudinal direction; the transverse limiting member is connected to the base and / or the crossbeam so that the transverse limiting member is fixed relative to the base;

[0017] The transverse limiting member is arranged on the side of the heat sink to prevent the heat sink from moving transversely relative to the base.

[0018] Furthermore, the two side walls of the heat sink separated in the transverse direction are respectively provided with a first limiting half groove and a second limiting half groove, and the first limiting half groove and the second limiting half groove both extend in the longitudinal direction;

[0019] Of the two heat sinks adjacent in the transverse direction, the first limiting half groove on one of the heat sinks and the second limiting half groove on the other heat sink form a complete combined hole;

[0020] A limit hole is provided on the crossbeam, and in the assembled state, the limit hole is longitudinally aligned and connected with the combination hole;

[0021] The transverse limiting member is in the shape of a rod and passes through the combination hole and the limiting through hole in the longitudinal direction.

[0022] Furthermore, the number of the first limiting half groove and the second limiting half groove on the heat sink is at least two, so that at least two combination holes are formed when two adjacent heat sinks in the transverse direction are combined.

[0023] Furthermore, an outer wall of at least one end of the transverse limiting member has an external thread, and a screw hole threadably connected to the external thread is provided on the base.

[0024] Furthermore, the crossbeam is provided with a first tooth groove, and in the transverse direction, the number of the first tooth grooves is multiple; in the longitudinal direction, the first tooth grooves on the multiple crossbeams are aligned;

[0025] The transverse limit member is provided with a plurality of second tooth grooves distributed in the longitudinal direction, and the portion between two adjacent second tooth grooves forms a transverse limit plate; the transverse limit member is connected to the plurality of the cross beams, the first tooth grooves are plugged into the second tooth grooves, and the transverse limit plate is located on the side of the heat sink to prevent the heat sink from moving in the transverse direction.

[0026] Furthermore, dovetail grooves and dovetail slide rails are respectively provided on two opposite side walls of two laterally adjacent heat sinks, and the dovetail grooves and dovetail slide rails both extend longitudinally, and the dovetail grooves are connected to the dovetail slide rails to fix the two laterally adjacent heat sinks in the laterally and vertical directions.

[0027] Furthermore, the fixed end has a hollow weight-reducing cavity.

[0028] Furthermore, in the longitudinal direction, the cross beams at the head end and the tail end are provided with reinforcing connection parts, and the reinforcing connection parts are connected to the base.

[0029] In a second aspect, the present invention provides an epitaxial wafer heating device, comprising the above-mentioned heat dissipation device.

[0030] The heat dissipation device provided in an embodiment of the present invention includes: a base, a heat sink and a crossbeam, wherein the crossbeam is connected to the base; a limiting portion is provided on the crossbeam, and at least a portion of the heat sink is located between the limiting portion and the base, so that the heat sink is pressed and fixed on the base by the limiting portion, and the heat sink, the crossbeam and the base are relatively fixedly arranged.

[0031] In this embodiment, the heat sink is pressed and fixed on the base by a crossbeam to facilitate disassembly. Therefore, there is no need to process a connecting structure at a position on the base corresponding to the heat sink, thereby ensuring the integrity of the water channel under the heat sink.

[0032] The epitaxial wafer heating device provided by the present invention includes the above-mentioned heat dissipation device. Because the epitaxial wafer heating device provided by the embodiment of the present invention uses the above-mentioned heat dissipation device, the epitaxial wafer heating device provided by the embodiment of the present invention also has the advantages of the heat dissipation device. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A top view of the heat dissipation device provided in Embodiment 1 of the present invention;

[0034] Figure 2 A partial cross-sectional view of a heat dissipation device provided in Embodiment 1 of the present invention;

[0035] Figure 3 for Figure 2 A partial enlarged view of position A in the middle;

[0036] Figure 4 A schematic diagram of a heat sink of a heat sink device provided in Embodiment 1 of the present invention;

[0037] Figure 5 A top view of the heat dissipation device provided in Embodiment 2 of the present invention after three cross beams and two cross limiters are connected;

[0038] Figure 6A front view of a crossbeam of a heat dissipation device provided in Embodiment 2 of the present invention;

[0039] Figure 7 A side view of a beam of a heat dissipation device provided in Embodiment 2 of the present invention;

[0040] Figure 8 A schematic diagram of a heat sink of a heat dissipation device provided in Example 3 of the present invention.

[0041] Icon: 100-base;

[0042] 200-heat sink; 210-limiting slot; 220-first limiting half slot; 230-second limiting half slot; 240-combination hole;

[0043] 300-crossbeam; 310-fixed end; 320-limiting portion; 321-limiting through hole;

[0044] 410-first tooth groove; 420-second tooth groove;

[0045] 510- dovetail groove; 520- dovetail slide rail;

[0046] 600-Lateral limiter. DETAILED DESCRIPTION

[0047] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0048] In the description of the present invention, it should be noted that, if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, if the terms "first", "second", "third" appear, they are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0049] In addition, in the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] Example 1

[0051] like Figure 1-Figure 4 As shown, the heat dissipation device provided by the embodiment of the present invention comprises: a base 100, a heat dissipation base 200 and a crossbeam 300. The top surface of the base 100 can be circular or square.

[0052] There is no connection structure between the base 100 and the heat sink 200. The beam 300 is connected to the base 100, and then the limiting portion 320 on the beam 300 is used to press and fix the heat sink 200 to ensure that the heat sink 200, the beam 300 and the base 100 are relatively fixed.

[0053] The limiting portion 320 on the same crossbeam 300 can at least press and fix one heat sink 200 (200).

[0054] There are multiple heat sinks 200, and the bottom of the heat sink 200 has water inlet and water return joints, and the two joints are connected to the water inlet hole and the water return hole on the top surface of the base 100. One, two, three or more heat sinks 200 can be fixed by the same crossbeam 300. All heat sinks 200 are fixed by multiple crossbeams 300, and the limiting parts 320 on the crossbeam 300 can extend in a straight line. The multiple heat sinks 200 fixed can be arranged in an array, and the crossbeam 300 extends in the lateral direction of the array.

[0055] Of course, in other feasible solutions, the limiting portion 320 may also be in other shapes, such as an “L” shape, to fix a plurality of heat sinks 200 that are arranged non-linearly.

[0056] At least two of the beams 300 are arranged longitudinally so that the compressed plurality of heat sinks 200 (200) are arranged in an array. The array formed by the plurality of heat sinks 200 has a number of transverse columns greater than or equal to 2 and a number of longitudinal rows greater than or equal to 2, and the number of heat sinks 200 in different transverse rows may be the same or different.

[0057] The limiting portions 320 of two longitudinally adjacent beams 300 prevent the heat sink 200 from moving in the longitudinal direction.

[0058] After two longitudinally adjacent crossbeams 300 are fixed to the base 100 , the longitudinal distance between the two crossbeams 300 is substantially equal to the longitudinal length of the heat sink 200 , and the heat sink 200 located between the two crossbeams 300 is limited in the longitudinal direction.

[0059] A fixing end 310 is disposed at an end of the limiting portion 320 , and the fixing end 310 is connected to the base 100 .

[0060] The end of the crossbeam 300 may have a fixed end 310, and the fixed end 310 is connected to the base 100. The fixed end 310 may be provided with a mounting hole, and the mounting hole extends vertically. After a screw passes through the mounting hole, the fixed end 310 is connected to the base 100.

[0061] The number of the fixed ends 310 on the crossbeam 300 is at least two, and a lateral space for accommodating the heat sink 200 is formed between the two fixed ends 310 to limit the lateral movement range of the heat sink 200 .

[0062] A transverse space for accommodating the heat sink 200 is formed between the two fixed ends 310 of the crossbeam 300, and the transverse space accommodates at least two heat sinks 200 distributed in the transverse direction. In this embodiment, there are two crossbeams 300, and the transverse spaces on the two crossbeams 300 have different lengths. For example, one transverse space can accommodate five heat sinks 200 in the transverse direction, while the transverse space on the other crossbeam 300 can only accommodate three heat sinks 200.

[0063] The lateral length of the lateral space is substantially equal to the sum of the lengths of all the heat sinks 200 accommodated in the lateral space, so as to reduce the lateral displacement of the heat sink 200 between the two fixed ends 310 .

[0064] The side wall of the heat sink 200 is provided with a limit groove 210 extending in the horizontal direction, and the bottom surface of the limit groove 210 is perpendicular to the longitudinal direction. The cross beam 300 also includes a limit portion 320 connected between the two fixed ends 310; the limit portion 320 is connected to the limit groove 210 on the side wall of the heat sink 200, and the two groove walls of the limit groove 210 act as a stopper for the limit portion 320, which is used to prevent the heat sink 200 from moving vertically.

[0065] In this embodiment, the heat sink 200 is fixed by a crossbeam 300, and multiple heat sinks 200 distributed in the same horizontal direction are fixed by one crossbeam 300. The two fixed ends 310 on the crossbeam 300 limit the heat sink 200 in the horizontal direction, and the limiting portion 320 on the crossbeam 300 is located in the limiting groove 210 of the heat sink 200, limiting the heat sink 200 in the vertical direction, and the two adjacent crossbeams 300 are distributed in the longitudinal direction, clamping a horizontal row of heat sinks 200, and limiting the heat sink 200 in the longitudinal direction. The heat sink 200 that is limited in the horizontal, vertical and longitudinal directions is relatively fixed to the base 100. However, only the fixed ends 310 at both ends of the crossbeam 300 are connected to the base 100, avoiding the waterway in the middle part of the base 100. Therefore, the method of fixing the heat sink 200 by the crossbeam 300 will not affect the setting of the waterway. In addition, the same crossbeam 300 can fix multiple heat sinks 200 at one time, and the fixing efficiency is higher.

[0066] During assembly, a horizontal row of heat sinks 200 can be installed on the base 100 first, and the multiple limiting grooves 210 on the multiple heat sinks 200 distributed laterally are connected into one, and then the limiting portion 320 of a beam 300 is placed into the limiting groove 210, and then the two ends of the beam 300 are fixed, wherein the distance between the two fixed ends 310 of the beam 300 corresponds to the total horizontal length of all the heat sinks 200 in the horizontal row. Subsequently, the next adjacent horizontal row of heat sinks 200 is fixed according to the above method. The heat sink 200 cannot move vertically due to the obstruction of the limiting portion 320. Two longitudinally adjacent limiting portions 320 clamp a horizontal row of heat sinks 200 to limit the heat sink 200 in the longitudinal direction.

[0067] Furthermore, at least one fixing end 310 may be detachably connected to the limiting portion 320 .

[0068] The fixed end 310 is connected to the base 100 by screws, and the fixed end 310 and the limiting portion 320 can also be connected by screws. During assembly, all the heat sinks 200 can be installed on the base 100, and the limiting grooves 210 on all the heat sinks 200 are oriented in the same direction. Remove one of the fixed ends 310 on the beam 300, and then insert the limiting portion 320 along the limiting groove 210 of a heat sink 200 arranged laterally, and after completely passing through all the limiting grooves 210, connect with the previously removed fixed end 310, and finally fix the fixed end 310 on the base 100. When a heat sink 200 needs to be replaced, the fixed end 310 can be separated from the base 100 first, and then the limiting portion 320 can be separated from one of the fixed ends 310, and finally the limiting portion 320 can be pulled out laterally to facilitate the removal of the heat sink 200.

[0069] The heat dissipation device also includes a transverse limit member 600, which extends longitudinally; the transverse limit member 600 is connected to the base 100 and / or the beam 300 to fix the transverse limit member 600 relative to the base 100; the transverse limit member 600 is arranged on the side of the heat dissipation seat 200 to prevent the heat dissipation seat 200 from moving laterally relative to the base 100.

[0070] Among all the heat sinks 200 arranged in a matrix, the heat sinks 200 may be arranged discontinuously in each horizontal row or vertical column. In the longitudinal direction, each heat sink 200 is limited by two adjacent beams 300 in the longitudinal direction. Even if there is no heat sink 200 in the adjacent longitudinal position, it will not affect the longitudinal fixation of other heat sinks 200.

[0071] In each horizontal row, the heat sinks 200 may be arranged discontinuously, that is, there is a gap between two heat sinks 200 in the horizontal direction, and each heat sink 200 may be laterally fixed by the horizontal limiting members 600 on its two horizontal sides.

[0072] Specifically, in the horizontal direction, multiple heat sinks 200 can be clamped by two fixed ends 310 to achieve rough positioning. Because there is an error in the size of the heat sink 200, the total length error of multiple heat sinks 200 arranged horizontally will be larger. In order to achieve the loading of the heat sink 200, the distance between the two fixed ends 310 will be set slightly larger, which will cause the total length of the multiple heat sinks 200 arranged horizontally to be slightly smaller than the distance between the two fixed ends 310. The heat sink 200 is poorly limited in the horizontal direction, and may have a slight sway in the horizontal direction when used. In order to avoid the above problems, in this embodiment, the heat dissipation device also includes a horizontal limiter 600, which extends longitudinally and is connected to the base 100 to limit each heat sink 200 in the horizontal direction. The base 100 and the crossbeam 300 are relatively stationary, so the horizontal limiter 600 can be fixed to one of the two, so that the three have the same motion state. The transverse limiting member 600 is arranged on the transverse side of the heat sink 200 to prevent the heat sink 200 from moving laterally relative to the base 100. A transverse limiting member 600 is arranged on the side of each heat sink 200 to ensure the connection stability of each heat sink 200. It should be noted that the side of the heat sink 200 closest to the fixed end 310 facing the fixed end 310 may not be provided with a transverse limiting member 600, and only the fixed end 310 is relied on for limiting.

[0073] Specifically, the first limiting half groove 220 and the second limiting half groove 230 are respectively provided on the two side walls spaced apart in the transverse direction of the heat sink 200, and the first limiting half groove 220 and the second limiting half groove 230 both extend in the longitudinal direction; among the two adjacent heat sinks 200 in the transverse direction, the first limiting half groove 220 on one heat sink 200 and the second limiting half groove 230 on the other heat sink 200 form a complete combination hole 240; the limiting through hole 321 is provided on the crossbeam 300, and in the assembled state, the limiting through hole 321 is longitudinally aligned and penetrated with the combination hole 240; the transverse limiting member 600 is rod-shaped, and the transverse limiting member 600 passes through the combination hole 240 and the limiting through hole 321 in the longitudinal direction.

[0074] The four circumferential sides of the heat sink 200 are sequentially the first side, the second side, the third side and the fourth side, and the limiting groove 210 is arranged on the first side. The second side and the third side may be provided with a first limiting half groove 220 and a second limiting half groove 230, and the first limiting half groove 220 and the second limiting half groove 230 extend in the longitudinal direction. In two heat sinks 200 adjacent to each other in the transverse direction, the first limiting half groove 220 on one heat sink 200 and the second limiting half groove 230 on the other heat sink 200 form a complete combination hole 240. The limiting portion 320 is provided with a limiting through hole 321 extending in the longitudinal direction, and the limiting through hole 321 is aligned with the position of the combination hole 240. The heat dissipation device also includes a transverse limit member 600 (not shown in the figure), which is inserted into the limit through hole 321 and the combination hole 240 in the longitudinal direction. The transverse limit member 600 is fixedly connected to the base 100. At least one end of the transverse limit member 600 can be provided with an external thread. After passing through the combination hole 240 and the limit through hole 321, the threaded end is threadedly connected to the screw hole on the edge of the base 100. The transverse limit member 600 is used to prevent the heat dissipation seat 200 from moving horizontally and vertically, thereby playing a further positioning role and increasing the structural stability during operation.

[0075] The number of the first limiting half groove 220 and the second limiting half groove 230 on the heat sink 200 is at least two, so that at least two combination holes 240 are formed when two adjacent heat sinks 200 in the transverse direction are combined.

[0076] The purpose of providing at least two combination holes 240 is to prevent the heat sink 200 from rotating and tilting relative to the transverse stopper 600 when a single combination hole 240 stops with the transverse stopper 600. The two combination holes 240 cooperate with the two transverse stoppers 600 to make the stop more stable.

[0077] The fixing end 310 has a hollow weight-reducing cavity, so that the weight of the beam 300 can be reduced.

[0078] In the longitudinal direction, the two cross beams 300 at the head end and the tail end are provided with a reinforcing connection part, which is connected to the base 100. The reinforcing connection part may be provided with an additional mounting hole, and the two cross beams 300 at the head end and the tail end are connected to the base 100 in the longitudinal direction by more screws.

[0079] Example 2

[0080] like Figure 5-Figure 7 As shown, the difference from Example 1 lies in that a first tooth groove 410 is provided on the cross beam 300, and in the horizontal direction, the number of the first tooth grooves 410 is multiple; in the longitudinal direction, the first tooth grooves 410 on multiple cross beams 300 are aligned; a plurality of second tooth grooves 420 distributed in the longitudinal direction are provided on the transverse limiting member 600, and the portion between two adjacent second tooth grooves 420 forms a transverse limiting plate; the transverse limiting member 600 is connected to multiple cross beams 300, and the first tooth grooves 410 are plugged into the second tooth grooves 420, and the transverse limiting plate is located on the side of the heat sink 200 to prevent the heat sink 200 from moving in the transverse direction.

[0081] The transverse limit member 600 is in the shape of a sheet, and the width of the second tooth groove 420 arranged thereon is consistent with the thickness of the limiting portion 320, so that the second tooth groove 420 can be inserted into the limit after passing through the first tooth groove 410. Under the action of the first tooth groove 410, the transverse limit member 600 will not move laterally. Therefore, the transverse limit plate on the transverse limit member 600 can stop at the side of the heat sink 200 to prevent the heat sink 200 from moving laterally.

[0082] Furthermore, there are at least two types of heat sinks 200 that match the base 100, namely, A and B. The transverse length of A is a1, and the longitudinal length is b1, and the transverse length of B is a2, and the longitudinal length is b2. a1 is not equal to a2, and b1 is not equal to b2.

[0083] like Figure 6 and Figure 7 As shown, on the crossbeam 300, there are two first tooth grooves 410 with a distance equal to a1, and the area between the two first tooth grooves 410 forms a first accommodating portion. When the number of heat sinks 200 to be transversely fixed to the crossbeam 300 is at least two, the number of first accommodating portions on the crossbeam 300 is at least two, and the two first accommodating portions do not overlap with each other. There are also two first tooth grooves 410 on the crossbeam 300 with a distance equal to a2, and the area between the two first tooth grooves 410 forms a second accommodating portion. When the number of heat sinks 200 to be transversely fixed to the crossbeam 300 is at least two, the number of second accommodating portions on the crossbeam 300 is at least two, and the two second accommodating portions do not overlap with each other.

[0084] On the transverse limiter 600, there are two second tooth grooves 420 whose distance is equal to b1, and the area between the two second tooth grooves 420 forms a third accommodating portion. When the number of crossbeams 300 to be longitudinally connected to the transverse limiter 600 is at least two, the number of third accommodating portions on the transverse limiter 600 is at least two, and the two third accommodating portions do not overlap with each other. There are also two second tooth grooves 420 on the transverse limiter 600 whose distance is equal to b2, and the area between the two second tooth grooves 420 forms a fourth accommodating portion. When the number of crossbeams 300 to be longitudinally connected to the transverse limiter 600 is at least two, the number of fourth accommodating portions on the transverse limiter 600 is at least two, and the two fourth accommodating portions do not overlap with each other.

[0085] That is to say, when the A seat is connected to the base 100, two adjacent transverse limiters 600 are respectively connected to the two first tooth grooves 410 forming the first accommodation, and two longitudinally adjacent crossbeams 300 are respectively connected to the two second tooth grooves 420 forming the third accommodation portion, so that the crossbeams 300 and the transverse limiters 600 surround an area with a transverse length of a1 and a longitudinal length of b1. Similarly, when the B seat is connected to the base 100, two adjacent transverse limiters 600 are respectively connected to the two first tooth grooves 410 forming the second accommodation, and two longitudinally adjacent crossbeams 300 are respectively connected to the two second tooth grooves 420 forming the fourth accommodation portion, so that the crossbeams 300 and the transverse limiters 600 surround an area with a transverse length of a2 and a longitudinal length of b3. In this way, the heat dissipation device can adapt to chips of different sizes.

[0086] It should be noted that when the heat sink 200 of different sizes is replaced, the connection position between the beam 300 and the base 100 will also change.

[0087] Example 3

[0088] like Figure 8 As shown, the difference from Example 1 lies in that, among the two laterally adjacent heat sinks 200, one heat sink 200 is the first heat sink 200, and the other heat sink 200 is the second heat sink 200, a dovetail groove 510 is provided on the surface of the first heat sink 200 facing the second heat sink 200, and a dovetail slide rail 520 is provided on the surface of the second heat sink 200 facing the first heat sink 200; the dovetail groove 510 and the dovetail slide rail 520 both extend in the longitudinal direction, and the dovetail groove 510 is connected to the dovetail slide rail 520 so that the first heat sink 200 and the second heat sink 200 have the same movement state in the lateral direction.

[0089] In this embodiment, multiple heat sinks 200 can be connected into a whole in the horizontal direction through the dovetail groove 510 and the dovetail slide rail 520. Since the water inlet joint and the water return joint of each heat sink 200 are connected to the base 100, each heat sink 200 has a certain connection force with the base 100. After multiple heat sinks 200 are connected into a whole, the connection firmness of the whole with the base 100 is enhanced, and the whole is not easy to tilt or deviate.

[0090] The epitaxial wafer heating device provided by the present invention includes the above-mentioned heat dissipation device. Because the epitaxial wafer heating device provided by the embodiment of the present invention uses the above-mentioned heat dissipation device, the epitaxial wafer heating device provided by the embodiment of the present invention also has the advantages of the heat dissipation device.

[0091] Finally, it should be noted that the above embodiments are only specific implementations of the present invention, which are used to illustrate the technical solutions of the present invention, rather than to limit them. The protection scope of the present invention is not limited thereto. Although the present invention is described in detail with reference to the above embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above embodiments within the technical scope disclosed by the present invention, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A heat dissipation device, characterized in that: include: A base (100), a heat sink (200) and a crossbeam (300), wherein the crossbeam (300) is connected to the base (100); A limiting portion (320) is provided on the crossbeam (300), and at least a portion of the heat sink (200) is located between the limiting portion (320) and the base (100), so that the heat sink (200) is pressed and fixed on the base (100) by the limiting portion (320), and the heat sink (200), the crossbeam (300) and the base (100) are relatively fixedly arranged; The heat sink (200) and the crossbeam (300) are both arranged on the surface of the base (100); At least two of the crossbeams (300) are arranged longitudinally, so that the plurality of compressed heat sinks (200) are arranged in an array; The heat sinks (200) in each row are limited by two crossbeams (300).

2. The heat dissipation device according to claim 1, characterized in that: The limiting portion (320) on the same crossbeam (300) can press and fix at least one heat sink (200).

3. The heat dissipation device according to claim 2, characterized in that: The limiting portion (320) is capable of pressing at least two heat dissipation seats (200) arranged in a transverse manner.

4. The heat dissipation device according to claim 1, characterized in that: A limiting groove (210) extending in the transverse direction is provided on the side wall of the heat dissipation seat (200); The limiting portion (320) is located in the limiting groove (210), and the limiting portion (320) is used to prevent the heat sink (200) from moving vertically.

5. The heat dissipation device according to claim 1, characterized in that: A fixed end (310) is provided at the end of the limiting portion (320), and the fixed end (310) is connected to the base (100).

6. The heat dissipation device according to claim 5, characterized in that: The number of the fixed ends (310) on the crossbeam (300) is at least two, and a lateral space for accommodating the heat sink (200) is formed between the two fixed ends (310) to limit the lateral movement range of the heat sink (200).

7. The heat dissipation device according to claim 5, characterized in that: The fixed end (310) is detachably connected to the limiting portion (320).

8. The heat dissipation device according to claim 1, characterized in that: The limiting portions (320) of two longitudinally adjacent cross beams (300) prevent the heat sink (200) from moving in the longitudinal direction.

9. The heat dissipation device according to any one of claims 1 to 8, characterized in that: The heat dissipation device further comprises a transverse limiting member (600), wherein the transverse limiting member (600) extends in the longitudinal direction; the transverse limiting member (600) is connected to the base (100) and / or the crossbeam (300) so that the transverse limiting member (600) is fixed relative to the base (100); The transverse limiting member (600) is arranged on the side of the heat sink (200) to prevent the heat sink (200) from moving in the transverse direction relative to the base (100).

10. The heat dissipation device according to claim 9, characterized in that: A first limiting half groove (220) and a second limiting half groove (230) are respectively provided on two side walls spaced apart in the transverse direction of the heat sink (200), and the first limiting half groove (220) and the second limiting half groove (230) both extend in the longitudinal direction; Of two heat sinks (200) adjacent in the transverse direction, a first limiting half groove (220) on one of the heat sinks (200) and a second limiting half groove (230) on the other heat sink (200) form a complete combined hole (240); A limiting through hole is provided on the crossbeam (300), and in an assembled state, the limiting through hole is longitudinally aligned and connected with the combination hole (240); The transverse limiting member (600) is rod-shaped, and the transverse limiting member (600) passes through the combination hole (240) and the limiting through hole (321) in the longitudinal direction.

11. The heat dissipation device according to claim 10, characterized in that: The number of the first limiting half groove (220) and the second limiting half groove (230) on the heat sink (200) is at least two, so that two adjacent heat sinks (200) in the transverse direction are combined to form at least two combination holes (240).

12. The heat dissipation device according to claim 10, characterized in that: The outer wall of at least one end of the transverse limiting member (600) has an external thread, and the base (100) is provided with a screw hole threadably connected to the external thread.

13. The heat dissipation device according to claim 9, characterized in that: The crossbeam (300) is provided with a first tooth groove (410), and in the transverse direction, there are a plurality of first tooth grooves (410); in the longitudinal direction, the first tooth grooves (410) on the plurality of crossbeams (300) are aligned; The transverse limiting member (600) is provided with a plurality of second tooth grooves (420) distributed in the longitudinal direction, and the portion between two adjacent second tooth grooves (420) forms a transverse limiting piece; the transverse limiting member (600) is connected to the plurality of cross beams (300), the first tooth grooves (410) are plugged into the second tooth grooves (420), and the transverse limiting piece is located on the side of the heat sink (200) to prevent the heat sink (200) from moving in the transverse direction.

14. The heat dissipation device according to claim 1, characterized in that: A dovetail groove (510) and a dovetail slide rail (520) are respectively provided on two opposite side walls of two laterally adjacent heat sinks (200); the dovetail groove (510) and the dovetail slide rail (520) both extend longitudinally; the dovetail groove (510) is connected to the dovetail slide rail (520) so that the two laterally adjacent heat sinks (200) are fixed in the laterally and vertical directions.

15. The heat dissipation device according to any one of claims 5 to 7, characterized in that: The fixed end (310) has a hollow weight-reducing cavity.

16. The heat dissipation device according to any one of claims 1 to 8, characterized in that: In the longitudinal direction, the cross beam (300) at the head end and the tail end is provided with a reinforcement connection part, and the reinforcement connection part is connected to the base (100).

17. An epitaxial wafer heating device, characterized in that: A heat dissipation device comprising any one of claims 1-16.

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