A near-ultraviolet multi-band high-power direct writing lithography lens

Abstract

The invention discloses a near-ultraviolet multi-band high-power direct-write lithography lens. The imaging part comprises twelve lenses in total, which are arranged from the object plane to the image plane in order: a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens and a ninth lens. The focal length of the first lens is f1, the focal length of the second lens is f2, the focal length of the third lens is f3, the focal length of the fourth lens is f4, the focal length of the fifth lens is f5, the focal length of the sixth lens is f6, the focal length of the seventh lens is f7, the focal length of the eighth lens is defined as f8, the focal length of the ninth lens is defined as f9, the focal length of the tenth lens is defined as f10, the focal length of the eleventh lens is defined as f11, and the focal length of the twelfth lens is defined as f12. The lens structure of the invention is applied to the direct-write lithography lens, and has the characteristics of high power, high precision, good uniformity and low distortion.

Description

Technical Field

[0001] The invention belongs to the technical field of optical lenses, and in particular is a near-ultraviolet multi-band high-power direct-writing lithography lens. Background Art

[0002] Photolithography is used to print a characteristic pattern on the surface of a substrate. UV exposure machines and photolithography machines have very important applications in micro-processing fields such as microelectronics, optics, and circuit boards. The working principle of a photolithography machine is that the ultraviolet light is emitted by a plasma light source, collected by a collection system, and irradiated onto a mask plate by a transmission system. The ultraviolet spectrum pattern on the mask plate is accurately reduced to a silicon wafer coated with photoresist by a UV lens at a certain ratio. After being processed by related subsequent processes, the required micro-pattern or circuit structure is left. The precision of the circuit structure mainly depends on the UV lens, which naturally becomes a key component of the photolithography machine.

[0003] The UV lens currently used in the market is composed of a lens group composed of multiple lenses assembled through a lens barrel according to a certain spacing size. Although it can basically realize the lithography function, the traditional mask exposure machine uses a large-size parallel UV light source plus a mask exposure form. The exposure surface illumination and uniformity of the current maskless lithography machine are not good. With the development of technology and the continuous improvement of the system's requirements for lens edge distortion, the existing traditional mask exposure machine is likely to cause the final prepared circuit to be difficult to meet the requirements. Therefore, in the design direction of lithography direct writing lenses, there is an urgent need for a lens group design with good exposure surface illumination, uniformity, and low distortion. Summary of the invention

[0004] The object of the present invention is to provide a near-ultraviolet multi-band high-power direct-writing lithography lens to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A near-ultraviolet multi-band high-power direct writing lithography lens comprises a lens housing, wherein the lens housing is provided with an incident port, an exit port, a reflection port, and a reflection assembly is arranged inside the lens housing, a DMD chip is arranged at a position corresponding to the reflection port on the outside of the lens housing, and an imaging unit is arranged at the exit port, wherein the imaging unit comprises twelve lenses in total, which are arranged in order from the object plane to the image plane: a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, and a twelfth lens;

[0007] The focal length of the first lens is defined as f1, the focal length of the second lens is defined as f2, the focal length of the third lens is defined as f3, the focal length of the fourth lens is defined as f4, the focal length of the fifth lens is defined as f5, the focal length of the sixth lens is defined as f6, the focal length of the seventh lens is defined as f7, the focal length of the eighth lens is defined as f8, the focal length of the ninth lens is defined as f9, the focal length of the tenth lens is defined as f10, the focal length of the eleventh lens is defined as f11, and the focal length of the twelfth lens is defined as f12;

[0008] The following relationship is satisfied:

[0009] f1=0mm; f2=0mm;

[0010] 112mm≤f3≤114mm;

[0011] 77mm≤f4≤80mm;

[0012] -119mm≤f5≤-117mm;

[0013] -29mm≤f6≤-25mm;

[0014] 25mm≤f7≤28mm;

[0015] -24mm≤f8≤-23mm;

[0016] 42mm≤f9≤45mm;

[0017] -98mm≤f10≤-97mm;

[0018] 337mm≤f11≤339mm;

[0019] f12=0mm.

[0020] In a further technical solution, the third lens is a convex lens, the curvature radius of the object side of the third lens is defined as R5, the curvature radius of the image side of the third lens is defined as R6, and the following relationship is satisfied:

[0021] 277mm≤R5≤279mm, -74mm≤R6≤-72mm.

[0022] In a further technical solution, the fourth lens is a meniscus convex lens, the curvature radius R7 of the object side of the fourth lens is defined, the curvature radius R8 of the image side of the fourth lens is defined, and the following relationship is satisfied:

[0023] 37mm≤R7≤39mm, 124mm≤R8≤125mm.

[0024] In a further technical solution, the fifth lens is a concave lens, and the curvature radius of the object side of the fifth lens is defined as R9, and the curvature radius of the image side is defined as R10, and the following relationship is satisfied:

[0025] -86mm≤R9≤-85mm, 152mm≤R10≤154mm.

[0026] In a further technical solution, the sixth lens is a concave lens, and the curvature radius of the object side of the sixth lens is defined as R11, and the curvature radius of the image side is defined as R12, and the following relationship is satisfied:

[0027] -50mm≤R11≤-48mm, 23mm≤R12≤25mm.

[0028] In a further technical solution, the seventh lens is a convex lens, the curvature radius of the object side of the seventh lens is defined as R13, the curvature radius of the image side of the third lens is defined as R14, and the following relationship is satisfied:

[0029] 27mm≤R13≤29mm, -29mm≤R14≤-28mm.

[0030] In a further technical solution, the eighth lens is a concave lens, and the curvature radius of the object side of the eighth lens is defined as R16, and the curvature radius of the image side is defined as R17, and the following relationship is satisfied:

[0031] -19mm≤R16≤-17mm, 51mm≤R17≤53mm.

[0032] In a further technical solution, the ninth lens is a convex lens, the curvature radius of the object side of the ninth lens is defined as R18, the curvature radius of the image side of the ninth lens is defined as R19, and the following relationship is satisfied:

[0033] 93mm≤R18≤95mm, -30mm≤R19≤-28mm.

[0034] In a further technical solution, the tenth lens is a meniscus convex lens, the curvature radius R20 of the object side of the tenth lens is defined, the curvature radius R21 of the image side of the tenth lens is defined, and the following relationship is satisfied:

[0035] -63mm≤R20≤-62mm, -39mm≤R21≤-37mm.

[0036] In a further technical solution, the eleventh lens is a plano-convex lens, and the curvature radius R22 of the object side of the eleventh lens is defined to satisfy the following relationship:

[0037] 220mm≤R22≤222mm.

[0038] According to a further technical solution, an incident part, a reflection component and a conversion component are provided on the lens housing, wherein the incident part, the reflection component and the conversion component form a straight first light path, the conversion component faces the DMD chip and reflects the first light path to the DMD chip, and the DMD chip reflects the first light path to form a second light path toward the exit, and the second light path does not overlap with the first light path.

[0039] A stray light removal structure is arranged in the lens housing.

[0040] According to a further technical solution, the incident part is connected to a side surface of the reflecting part at an angle, a reflector is arranged in the incident part, a conversion element is arranged in the reflecting part, and a surface of the conversion element faces the DMD chip.

[0041] According to a further technical solution, the incident part and the DMD chip are eccentrically arranged, a reflector assembly and a conversion member are arranged in the lens housing, the reflector assembly, the conversion member and the lens housing are fixedly connected, and the surface of the conversion member faces the DMD chip.

[0042] Beneficial effects of the present invention:

[0043] The present invention has the characteristics of high power, high precision, good uniformity and low distortion when applied to a direct writing lithography lens through the lens structure of the present invention.

[0044] Other features and advantages of the present invention will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 : The overall structure diagram of the lens of the present invention.

[0046] Figure 2 : The internal structure of the lens cutaway of the present invention Figure 1 .

[0047] Figure 3 : The internal structure of the lens cutaway of the present invention Figure 2 .

[0048] Figure 4 : Light path diagram of the lens DMD chip in the off state of the present invention.

[0049] Figure 5 : Optical path diagram of the lens DMD chip working state of the present invention.

[0050] Figure 6 : Distribution diagram of each lens of the molding part of the present invention.

[0051] Figure 7 : Field curvature and distortion of the first embodiment of the present invention Figure 1 .

[0052] Figure 8 : Field curvature and distortion of the first embodiment of the present invention Figure 2 .

[0053] Fig. 9 : The OTF modulus value change intention of the first embodiment of the present invention.

[0054] Fig.10 : Field curvature and distortion diagram of the second embodiment of the present invention Figure 1 .

[0055] Fig.11 : Field curvature and distortion diagram of the second embodiment of the present invention Figure 2 .

[0056] Fig.12 : The OTF modulus value change intention of the second embodiment of the present invention.

[0057] Fig.13 : Field curvature and distortion diagram of the third embodiment of the present invention Figure 1 .

[0058] Fig.14 : Field curvature and distortion diagram of the third embodiment of the present invention Figure 2 .

[0059] Fig.15 : The OTF modulus value change intention of the third embodiment of the present invention.

[0060] Fig.16 : Lens housing embodiment 1 structure of the present invention Figure 1 .

[0061] Fig.17 : Lens housing embodiment 1 structure of the present invention Figure 2 .

[0062] Fig.18 : Lens housing embodiment 1 structure of the present invention Figure 3 .

[0063] Fig.19 : Lens housing embodiment 1 structure of the present invention Figure 4 .

[0064] Fig. 20 : Schematic diagram of the usage state of the lens housing embodiment 1 of the present invention.

[0065] Fig.21 : Lens housing embodiment 2 structure of the present invention Figure 1 .

[0066] Fig. 22 : Lens housing embodiment 2 structure of the present invention Figure 2 .

[0067] Fig.23 : Lens housing embodiment 2 structure of the present invention Figure 3 .

[0068] Fig.24 : Schematic diagram of the usage status of the second embodiment of the lens housing of the present invention.

[0069] Figure numerals: 1-lens housing, 11-incident part, 12-reflection part, 13-stray light elimination cavity, 14-protrusion, 15-avoidance position, 2-incident port, 3-reflection component, 4-DMD chip, , 6-exit port, 7-reflection port, 5-extinction pattern, 8-conversion part, 101-first lens, 102-second lens, 103-third lens, 104-fourth lens, 105-fifth lens, 106-sixth lens, 107-seventh lens, 108-eighth lens, 109-ninth lens, 110-tenth lens, 111-eleventh lens, 112-twelfth lens. DETAILED DESCRIPTION

[0070] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0071] Please refer to Figure 1-15 ;

[0072] The present invention aims to further improve the structure of the lens, which has the advantages of multi-band, high power, good uniformity and low distortion; Figure 1-5 Before entering the imaging part, the light will first enter the lens and be reflected by the DMD chip. The lens housing 1 is provided with an incident port 2, an exit port 6, a reflection port 7, and a reflection component 3 is provided inside the lens housing 1. A DMD chip 4 is provided at a position corresponding to the reflection port 7 on the outside of the lens housing 1. The DMD chip 4 and the reflection component 3 form a reflection light path. The light enters the lens housing 1 from the incident port 2, and is reflected to the DMD chip 4 by the reflection component 3. The DMD chip 4 processes the light source to generate imaging light, and the imaging light is then emitted from the exit port 6 and enters the imaging part.

[0073] In addition, since stray light enters when the DMD chip 4 is in the off state, the DMD chip 4 will reflect the stray light. The light in the OFF state includes the original light remaining in the lens housing 1 and the light entering from the external lens or the lens gap. This light will be reflected by other structures inside the lens. These stray lights will form a fixed reflection path. When the lens is in use, these stray lights will affect the imaging quality of the DMD chip 4. Therefore, a stray light elimination cavity 13 is provided in the lens housing 1. The entrance of the stray light elimination cavity 13 corresponds to the stray light directional reflection path of the DMD chip 4. The DMD chip 4 injects the stray light into the stray light elimination cavity 13, and the stray light is absorbed and eliminated by the stray light elimination cavity 13, thereby achieving the effect of eliminating the stray light, so that the required imaging light is emitted from the exit 6, thereby improving the contrast of the lens imaging and the imaging quality.

[0074] Specifically, refer to Figure 6 ; Light enters from the incident port 2, and the incident light is reflected by the reflecting component 3 to the DMD chip 4. Part of the unnecessary stray light is reflected by the DMD chip 4 into the stray light elimination cavity 13, and the stray light is absorbed and eliminated, while the other part of the light is reflected by the DMD chip 4 to the exit port 6 and is imaged after passing through the lens. When the lens is not needed, the DMD chip 4 is set to the off state, and the DMD chip 4 directly reflects the unnecessary stray light into the stray light elimination cavity 13, and does not reflect the stray light out. When the lens is used, the DMD chip 4 is in the ON state, and the DMD chip 4 reflects the stray light into the stray light elimination cavity 13, and emits the required imaging light from the exit port 6, and the imaging light is imaged after passing through the lens.

[0075] In this embodiment, an extinction pattern 5 is provided at the bottom of the stray light elimination cavity 13, and the extinction pattern 5 is perpendicular to the direction of the incident light. The extinction pattern 5 can scatter the stray light reflected in the stray light elimination cavity 13 to achieve extinction. The reflection direction of the stray light is always toward the closed area and will not be reflected back to the lens, so that the stray light will not be projected together with the light imaged by the DMD chip 4, thereby improving the contrast of the lens imaging.

[0076] Furthermore, the inner wall of the stray light elimination cavity 13 is provided with a black coating, which can strongly absorb light effects to eliminate stray light or reduce light effect scattering.

[0077] The imaging unit of the present invention includes twelve lenses, specifically, from the object plane to the image plane, the first lens 101, the second lens 102, the third lens 103, the fourth lens 104, the fifth lens 105, the sixth lens 106, the seventh lens 107, the eighth lens 108, the ninth lens 109, the tenth lens 110, the eleventh lens 111 and the twelfth lens 112; the imaging unit includes a plurality of lens lenses, and a spacer (not shown in the figure) is arranged between each lens lens, and the spacer is preferably a spacer ring;

[0078] The focal length of the first lens 101 is defined as f1, the focal length of the second lens 102 is defined as f2, the focal length of the third lens 103 is defined as f3, the focal length of the fourth lens 104 is defined as f4, the focal length of the fifth lens 105 is defined as f5, the focal length of the sixth lens 106 is defined as f6, the focal length of the seventh lens 107 is defined as f7, the focal length of the eighth lens 108 is defined as f8, the focal length of the ninth lens 109 is defined as f9, the focal length of the tenth lens 110 is defined as f10, and the focal length of the eleventh lens 111 is defined as f12. f11, defines the focal length of the twelfth lens 112 as f12; satisfies the following relationship: f1=0mm; f2=0mm; 112mm≤f3≤114mm; 77mm≤f4≤80mm; -119mm≤f5≤-117mm; -29mm≤f6≤-25mm; 25mm≤f7≤28mm; -24mm≤f8≤-23mm; 42mm≤f9≤45mm; -98mm≤f10≤-97mm; 337mm≤f11≤339mm; f12=0mm.

[0079] Embodiment 1;

[0080] The focal length of the third lens 103 is defined as f3, and f3 satisfies the following relationship: 112 mm ≤ f3 ≤ 114 mm. Within the range specified by the conditional formula, preferably, 112 mm ≤ f3 ≤ 113 mm. The radius of curvature of the object side surface of the third lens 103 is defined as R5, and the radius of curvature of the image side surface of the third lens 103 is defined as R6, and the following relationship is satisfied: 277 mm ≤ R5 ≤ 279 mm, -74 mm ≤ R6 ≤ -72 mm.

[0081] The focal length of the fourth lens 104 is defined as f4, and f4 satisfies the following relationship: 77 mm ≤ f4 ≤ 80 mm. Within the range specified by the conditional expression, preferably, 77 mm ≤ f4 ≤ 79 mm. The curvature radius R7 of the object side surface of the fourth lens 104 is defined, and the curvature radius R8 of the image side surface of the fourth lens 104 is defined, and the following relationship is satisfied: 37 mm ≤ R7 ≤ 39 mm, 124 mm ≤ R8 ≤ 125 mm.

[0082] The focal length of the fifth lens 105 is defined as f5, and f5 satisfies the following relationship: -119 mm ≤ f5 ≤ -117 mm, which is within the range specified by the conditional expression; the curvature radius R9 of the object side surface of the fifth lens 105 and the curvature radius R10 of the image side surface are defined, and the following relationship is satisfied: -86 mm ≤ R9 ≤ -85 mm, 152 mm ≤ R10 ≤ 154 mm;

[0083] The focal length of the sixth lens 106 is defined as f6, and f6 satisfies the following relationship: -29mm≤f6≤-25mm, which is within the range specified by the conditional expression; the curvature radius R11 of the object side surface of the sixth lens 106 and the curvature radius R12 of the image side surface are defined, and the following relationship is satisfied: -50mm≤R11≤-48mm, 23mm≤R12≤25mm;

[0084] The focal length of the seventh lens 107 is defined as f7, and f7 satisfies the following relationship: 25 mm ≤ f7 ≤ 28 mm, which is within the range specified by the conditional expression; the curvature radius of the object side surface of the seventh lens 107 is defined as R13, and the curvature radius of the image side surface of the third lens 103 is defined as R14, and the following relationship is satisfied: 27 mm ≤ R13 ≤ 29 mm, -29 mm ≤ R14 ≤ -28 mm;

[0085] The focal length of the eighth lens 108 is defined as f8, and f8 satisfies the following relationship: -24mm≤f8≤-23mm, which is within the range specified by the conditional expression; the curvature radius R16 of the object side surface of the eighth lens 108 is defined as R17, and the curvature radius R17 of the image side surface satisfies the following relationship: -19mm≤R16≤-17mm, 51mm≤R17≤53mm;

[0086] The focal length of the ninth lens 109 is defined as f9, and f9 satisfies the following relationship: 42mm≤f9≤45mm, which is within the range specified by the conditional formula; preferably 43mm≤f9≤44mm; the curvature radius of the object side surface of the ninth lens 109 is defined as R18, and the curvature radius of the image side surface of the ninth lens 109 is defined as R19, and the following relationship is satisfied: 93mm≤R18≤95mm, -30mm≤R19≤-28mm;

[0087] The focal length of the tenth lens 110 is defined as f10, and f10 satisfies the following relationship: -98 mm ≤ f10 ≤ -97 mm, which is within the range specified by the conditional expression; the curvature radius R20 of the object side surface of the tenth lens 110 is defined, and the curvature radius R21 of the image side surface of the tenth lens 110 is defined, and the following relationship is satisfied: -63 mm ≤ R20 ≤ -62 mm, -39 mm ≤ R21 ≤ -37 mm;

[0088] The focal length of the eleventh lens 111 is defined as f11, and f11 satisfies the following relationship: 337mm≤f11≤339mm, which is within the range specified by the conditional expression; the curvature radius R22 of the object side surface of the eleventh lens 111 is defined and satisfies the following relationship: 220mm≤R22≤222mm.

[0089] When the focal length of each lens of the imaging part, the axial thickness and the curvature radius of the direct writing lithography lens described in the present invention satisfy the above relationship, the direct writing lithography lens can have exposure surface illumination, good uniformity, and meet the design requirements of low distortion; such a design is used in the direct writing lithography lens with high power, high precision, good uniformity, and meets the characteristics of low distortion.

[0090] The direct writing lithography lens of the present invention will be described below using examples. The symbols recorded in each example are as follows: The focal length, axial distance, radius of curvature, and axial thickness are in units of mm.

[0091] TTL: total optical length (the axial distance from the object side of the first lens 101 to the exposure surface, ie, the sum of d01 to d22), in mm.

[0092] The first lens 101 , the second lens 102 , the third lens 103 , the fourth lens 104 , the fifth lens 105 , the sixth lens 106 , the seventh lens 107 , the eighth lens 108 , the ninth lens 109 , the tenth lens 110 , the eleventh lens 111 , and the twelfth lens 112 are all made of glass.

[0093] Table 1 shows the design data of the lens structure of the first embodiment of the present invention.

[0094]

Table 1

[0095]

[0096] The meanings of the symbols are as follows:

[0097] R: The radius of curvature of the optical surface, and the central radius of curvature for lenses;

[0098] R1: the curvature radius of the object side surface of the first lens 101; R2: the curvature radius of the image side surface of the second lens 102;

[0099] R3: the curvature radius of the object side surface of the first lens 101; R4: the curvature radius of the image side surface of the second lens 102;

[0100] R5: the curvature radius of the object side surface of the third lens 103; R6: the curvature radius of the image side surface of the third lens 103;

[0101] R7: the curvature radius of the object-side surface of the fourth lens 104; R8: the curvature radius of the image-side surface of the fourth lens 104;

[0102] R9: the radius of curvature of the object-side surface of the fifth lens 105; R10: the radius of curvature of the image-side surface of the fifth lens 105;

[0103] R11: the curvature radius of the object-side surface of the sixth lens 106; R12: the curvature radius of the image-side surface of the sixth lens 106;

[0104] R13: the curvature radius of the object-side surface of the seventh lens 107; R14: the curvature radius of the image-side surface of the seventh lens 107;

[0105] R16: the curvature radius of the object-side surface of the eighth lens 108; R17: the curvature radius of the image-side surface of the eighth lens 108;

[0106] R18: the curvature radius of the object side surface of the ninth lens 109; R19: the curvature radius of the image side surface of the ninth lens 109;

[0107] R20: the curvature radius of the object-side surface of the tenth lens 110; R21: the curvature radius of the image-side surface of the tenth lens 110;

[0108] R22: the curvature radius of the object-side surface of the eleventh lens 111; R23: the curvature radius of the image-side surface of the eleventh lens 111;

[0109] R24: the radius of curvature of the object side surface of the twelfth lens 112; R25: the radius of curvature of the image side surface of the twelfth lens 112;

[0110] d: the on-axis thickness of the lens and the on-axis distance between the lenses;

[0111] d1: axial thickness of the first lens 101;

[0112] d2: the axial distance from the image side surface of the first lens 101 to the object side surface of the second lens 102;

[0113] d3: axial thickness of the second lens 102;

[0114] d4: the axial distance from the image side surface of the second lens 102 to the object side surface of the third lens 103;

[0115] d5: axial thickness of the third lens 103;

[0116] d6: the axial distance from the image side surface of the third lens 103 to the object side surface of the fourth lens 104;

[0117] d7: axial thickness of the fourth lens 104;

[0118] d8: the axial distance from the image side surface of the fourth lens 104 to the object side surface of the fifth lens 105;

[0119] d9: axial thickness of the fifth lens 105;

[0120] d10: the axial distance from the image side surface of the fifth lens 105 to the object side surface of the sixth lens 106;

[0121] d11: axial thickness of the sixth lens 106;

[0122] d12: the axial distance from the image side surface of the sixth lens 106 to the object side surface of the seventh lens 107;

[0123] d13: axial thickness of the seventh lens 107;

[0124] d14: an axial distance from the image side surface of the seventh lens 107 to the object side surface of the eighth lens 108;

[0125] d16: axial thickness of the eighth lens 108;

[0126] d17: the axial distance from the image side surface of the eighth lens 108 to the object side surface of the ninth lens 109;

[0127] d18: axial thickness of the ninth lens 109;

[0128] d19: the axial distance from the image side surface of the ninth lens 109 to the object side surface of the tenth lens 110

[0129] d20: axial thickness of the tenth lens 110;

[0130] d21: an axial distance from the image side surface of the tenth lens 110 to the object side surface of the eleventh lens 111;

[0131] d22: axial thickness of the eleventh lens 111;

[0132] d23: the axial distance from the image side surface of the eleventh lens 111 to the object side surface of the twelfth lens 112

[0133] d24: axial thickness of the twelfth lens 112;

[0134] d25: the axial distance from the image side surface of the twelfth lens 112 to the exposure surface.

[0135] nd: refractive index of d-line;

[0136] nd1: the refractive index of the first lens 101 at the d-line; nd2: the refractive index of the second lens 102 at the d-line

[0137] nd3: the refractive index of the third lens 103 at the d-line; nd4: the refractive index of the fourth lens 104 at the d-line;

[0138] nd5: the refractive index of the fifth lens 105 at the d-line; nd6: the refractive index of the sixth lens 106 at the d-line;

[0139] nd7: the refractive index of the seventh lens 107 at the d-line; nd8: the refractive index of the eighth lens 108 at the d-line;

[0140] nd9: the refractive index of the d-line of the ninth lens 109; nd10: the refractive index of the d-line of the tenth lens 110;

[0141] nd11: the refractive index of the d-line of the eleventh lens 111; nd12: the refractive index of the d-line of the twelfth lens 112;

[0142] vd : Abbe number;

[0143] vd1: Abbe number of the first lens 101; vd2: Abbe number of the second lens 102;

[0144] vd3: Abbe number of the third lens 103; vd4: Abbe number of the fourth lens 104;

[0145] vd5: Abbe number of the fifth lens 105; vd6: Abbe number of the sixth lens 106;

[0146] vd7: Abbe number of the seventh lens 107; vd8: Abbe number of the eighth lens 108;

[0147] vd9: Abbe number of the ninth lens 109; vd10: Abbe number of the tenth lens 110;

[0148] Vd11: Abbe number of the eleventh lens 111; vd12: Abbe number of the twelfth lens 112.

[0149] Figure 7-Figure 9 FIG. 4 is a schematic diagram showing the field curvature and distortion of light passing through the lens structure of the first embodiment.

[0150] Embodiment 2:

[0151] The second embodiment is substantially the same as the first embodiment, and the meanings of the symbols are the same as those of the first embodiment. Only the differences are listed below.

[0152] Table 2 shows design data of the direct writing lithography lens according to the second embodiment of the present invention.

[0153]

Table 2

[0154]

[0155] Figure 10-12 FIG. 4 is a schematic diagram showing the field curvature and distortion of light passing through the lens structure of the second embodiment.

[0156] Embodiment three;

[0157] The third embodiment is substantially the same as the first embodiment, and the meanings of the symbols are the same as those of the first embodiment, and only the differences are listed below.

[0158] Table 3 shows design data of the lens structure of the third embodiment of the present invention.

[0159]

Table 3

[0160]

[0161] Figure 13-Figure 15 FIG. 4 is a schematic diagram showing the field curvature and distortion of light passing through the lens structure of the third embodiment.

[0162] Usually, multiple direct writing lenses are used side by side. In the prior art, the lens housing is usually a cube structure. In the traditional structure, no in-depth study of the optical path has been conducted, and it has been used until now, resulting in no change in the general structure of the lens, so the volume occupied is also relatively large. The present invention achieves a method of reducing the volume of the lens housing by changing the optical path structure;

[0163] Implementation method 1, refer to Figure 16-20 ;

[0164] The lens housing 1 includes an incident portion 11 and a reflecting portion 12. The reflecting portion 12 is a rectangular parallelepiped. The incident portion 11 is installed on the side of the rectangular parallelepiped, and the central axis of the incident portion 11 and the side of the reflecting portion 12 is eccentrically arranged. The incident portion 11 is provided with an incident port 2, and the reflecting portion 12 is provided with a reflecting port 7 and an exit port 6. The reflecting port 7 and the exit port 6 are respectively located on the upper surface and the lower surface of the rectangular parallelepiped reflecting portion 12, and the central axis of the reflecting port 7 and the exit port 6 are collinear. A reflector assembly 3 and a lens assembly are also arranged in the reflecting portion 12 of the lens housing 1. The reflector assembly 3 can adjust the path of light and reduce space usage. The reflector assembly 3 and the lens assembly are fixedly connected to the lens housing 1 respectively. The fixed connection between the reflector assembly 3 and the lens assembly 1 requires determining the precise positions of the reflector assembly 3 and the lens assembly; a DMD chip 4 is provided at a position corresponding to the reflection port 7 on the outside of the lens housing 1, and a conversion component 8 is also provided in the lens housing. The surface of the conversion component 8 faces the DMD chip 4. The light path from the incident port 2 to the conversion component 8 forms a first light path. The conversion component 8 reflects the light of the first light path to the DMD chip 4. The light path from the DMD chip 4 to the exit port 6 forms a second light path. The first light path and the second light path form an eccentric arrangement.

[0165] The conversion element 8 and the DMD chip 4 are eccentrically arranged. Assuming that the incident angle entering the DMD chip 4 is 24°, when the angle is constant, the closer the distance between the conversion element 8 and the DMD chip 4 is, the smaller the space occupied. Therefore, the eccentrically arranged DMD chip 4 and the conversion element 8, on the one hand, further reduce the space occupancy and improve the space utilization rate, and on the other hand, the first optical path and the second optical path are staggered, so that the imaging light maintains a relative distance from the incident light, i.e., the first optical path, when entering the exit, i.e., the first optical path and the second optical path are staggered.

[0166] In order to achieve the effect of close arrangement of lenses and further reduce the space occupied by the lenses, a protrusion 14 is provided at one end of the reflecting part 12, and a refuge position 15 is provided at the other end of the reflecting part 12. The protrusions 14 of the two side-by-side reflecting parts 12 are adapted to the refuge position 15, so that the space occupied by the side-by-side reflecting parts 12 can be further reduced.

[0167] Implementation method 2, refer to Figure 21-24 ;

[0168] The lens housing includes an incident portion 11 and a reflecting portion 12. In the present embodiment, the shape of the reflecting portion 12 is not limited. The shape of the reflecting portion 12 is only taken as a rectangular parallelepiped. The incident portion 11 is connected to one side of the rectangular parallelepiped, and the incident portion 11 is hollow. An optical path channel for incident light to pass through is provided in the incident portion 11. The optical path channel is cylindrical, and two steps are provided on the inner wall of the optical path channel. The two steps can be used to accurately control and shape the light beam so that the light can be evenly distributed when passing through different media. The reflecting portion 12 is hollow, and the reflecting portion 12 adopts an arc edge design. The arc edge design can reduce the scattering of the incident light at the edge and Reflection loss, thereby improving the overall efficiency of the structure of this embodiment; the incident part 11 is connected to the reflecting part 12; the incident part 11 is inclined relative to the end face of the lens housing, and the incident part 11 and the reflecting part 12 are inclined. In this embodiment, the angle of inclination of the incident part 11 relative to the side of the reflecting part 12 is not limited; the incident part 11 of the lens housing 3 is provided with an incident port 2, and the reflecting part 12 of the lens housing 1 is provided with a reflection port 7 and an outlet port 6, the reflection port 7 passes through the upper surface of the cuboid, and the outlet port passes through the lower surface of the cuboid, and the central axis of the reflection port and the outlet port are collinear, and a DMD chip 4 is provided at a position corresponding to the reflection port on the outside of the lens housing;

[0169] A reflector is arranged in the incident part 11, and a layer of dielectric film (not shown in the figure) is coated on the surface of the reflector. In the present embodiment, the specific material of the dielectric film is not limited, and the dielectric film is based on whether it can improve the reflectivity of the reflector; a conversion element 8 is arranged in the reflecting part 12, and of course a reflection component can also be arranged between the conversion element 8 and the incident part 11. For details, please refer to the first embodiment, and no further details are given here. The conversion element 8 is used to reflect the light transmitted from the reflector to the DMD chip 4, and the surface of the conversion element 8 faces the DMD chip 4, and the conversion element 8 and the DMD chip 4 are eccentrically arranged. In the present embodiment, strict requirements are made on the angle of the conversion element 8, and the conversion element is accurately fixed in the inner cavity of the reflecting part 12; the light path from the incident port through the reflector and the conversion element to the DMD chip in sequence forms a first light path, and the light path from the DMD chip to the exit port forms a second light path, and the first light path and the second light path form an eccentric arrangement.

[0170] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0171] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementations that can be understood by those skilled in the art.

Claims

1. A near-ultraviolet multi-band high-power direct writing lithography lens, comprising a lens housing, wherein the lens housing is provided with an incident port, an exit port, a reflection port, and a reflection assembly is provided inside the lens housing, a DMD chip is provided at a position corresponding to the reflection port on the outside of the lens housing, and an imaging unit is provided at the exit port, characterized in that: The imaging unit includes twelve lenses in total, which are: a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens and a twelfth lens from the object plane to the image plane; The focal length of the first lens is defined as f1, the focal length of the second lens is defined as f2, the focal length of the third lens is defined as f3, the focal length of the fourth lens is defined as f4, the focal length of the fifth lens is defined as f5, the focal length of the sixth lens is defined as f6, the focal length of the seventh lens is defined as f7, the focal length of the eighth lens is defined as f8, the focal length of the ninth lens is defined as f9, the focal length of the tenth lens is defined as f10, the focal length of the eleventh lens is defined as f11, and the focal length of the twelfth lens is defined as f12; The following relationship is satisfied: f1=0mm; f2=0mm; 112mm≤f3≤114mm; 77mm≤f4≤80mm; -119mm≤f5≤-117mm; -29mm≤f6≤-25mm; 25mm≤f7≤28mm; -24mm≤f8≤-23mm; 42mm≤f9≤45mm; -98mm≤f10≤-97mm; 337mm≤f11≤339mm; f12=0mm.

2. The near-ultraviolet multi-band high-power direct writing lithography lens according to claim 1, characterized in that: The third lens is a convex lens, the curvature radius of the object side of the third lens is defined as R5, the curvature radius of the image side of the third lens is defined as R6, and the following relationship is satisfied: 277mm≤R5≤279mm, -74mm≤R6≤-72mm.

3. The near-ultraviolet multi-band high-power direct writing lithography lens according to claim 1, characterized in that: The fourth lens is a meniscus convex lens, and the curvature radius R7 of the object side of the fourth lens is defined, and the curvature radius R8 of the image side of the fourth lens is defined, and the following relationship is satisfied: 37mm≤R7≤39mm, 124mm≤R8≤125mm.

4. The near-ultraviolet multi-band high-power direct writing lithography lens according to claim 1, characterized in that: The fifth lens is a concave lens, and the curvature radius of the object side of the fifth lens is defined as R9, and the curvature radius of the image side is defined as R10, and the following relationship is satisfied: -86mm≤R9≤-85mm, 152mm≤R10≤154mm.

5. The near-ultraviolet multi-band high-power direct writing lithography lens according to claim 1, characterized in that: The sixth lens is a concave lens, and the curvature radius of the object side of the sixth lens is defined as R11, and the curvature radius of the image side is defined as R12, and the following relationship is satisfied: -50mm≤R11≤-48mm, 23mm≤R12≤25mm.

6. The near-ultraviolet multi-band high-power direct writing lithography lens according to claim 1, characterized in that: The seventh lens is a convex lens, the curvature radius of the object side of the seventh lens is defined as R13, the curvature radius of the image side of the third lens is defined as R14, and the following relationship is satisfied: 27mm≤R13≤29mm, -29mm≤R14≤-28mm.

7. The near-ultraviolet multi-band high-power direct writing lithography lens according to claim 1, characterized in that: The eighth lens is a concave lens, and the curvature radius of the object side of the eighth lens is defined as R16, and the curvature radius of the image side is defined as R17, and the following relationship is satisfied: -19mm≤R16≤-17mm, 51mm≤R17≤53mm; The ninth lens is a convex lens, the curvature radius of the object side of the ninth lens is defined as R18, the curvature radius of the image side of the ninth lens is defined as R19, and the following relationship is satisfied: 93mm≤R18≤95mm, -30mm≤R19≤-28mm.

8. The near-ultraviolet multi-band high-power direct writing lithography lens according to claim 1, characterized in that: The tenth lens is a meniscus convex lens, and the curvature radius R20 of the object side of the tenth lens is defined, and the curvature radius R21 of the image side of the tenth lens is defined, and the following relationship is satisfied: -63mm≤R20≤-62mm, -39mm≤R21≤-37mm.

9. The near-ultraviolet multi-band high-power direct writing lithography lens according to claim 1, characterized in that: The eleventh lens is a plano-convex lens, and the curvature radius R22 of the object side of the eleventh lens is defined to satisfy the following relationship: 220mm≤R22≤222mm.

10. The near-ultraviolet multi-band high-power direct writing lithography lens according to claim 1, characterized in that: The lens housing is provided with an incident part, a reflection component and a conversion part, the incident part, the reflection component and the conversion part form a straight first light path, the conversion part faces the DMD chip and reflects the first light path to the DMD chip, the DMD chip reflects the first light path to form a second light path toward the exit, and the second light path does not overlap with the first light path.

Images