Rotary displacement table for double-grating angle adjustment and method for adjusting gratings to be parallel

By designing a rotary translation stage for dual grating angle adjustment, combined with a telescopic clamp and rotary angle control, the problem of the grating clamping device being unable to be flexibly adjusted is solved, precise adjustment of the grating surface and grating lines is achieved, and the flexibility and efficiency of the optical measurement system are improved.

CN119126322BActive Publication Date: 2025-10-10SHANGHAI METROLOGY & TESTING TECHNOLOGY RESEARCH INSTITUTE CO LTD +1
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Patent Information

Application Number
CN202411327663.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-09-23
Publication Date
2025-10-10
Estimated Expiration
2044-09-23

AI Technical Summary

Technical Problem

The existing grating clamping device cannot flexibly adjust the clamping space and cannot perform precise angle control in multiple degrees of freedom, resulting in the grating system needing to be disassembled for adjustment, which is complicated and tedious, affecting the measurement accuracy.

Method used

A rotary translation stage for dual grating angle adjustment is designed. Combining a telescopic fixture with rotary angle control, micro-vibration displacement technology is used to achieve precise adjustment of the grating surface and lines. The modular design includes a micro-vibration translation stage, a grating adjustment fixture, and a smooth receiving screen. Precise angle adjustment is achieved using a ball head knob and scale lines.

Benefits of technology

It achieves fast and precise alignment of the grating surface and grating lines, improves the flexibility and efficiency of the optical measurement system, and is suitable for grating spacing calibration and other optical precision measurement devices for multi-axial angle control.

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Abstract

The application discloses a rotating displacement table for double-grating angle adjustment and a method for adjusting the parallelism of gratings, the rotating displacement table comprises a micro-vibration displacement table at the bottom, a pair of grating adjustment clamps which are arranged oppositely and are identical in structure and a light surface receiving screen between the two grating adjustment clamps, the two grating adjustment clamps each comprise a telescopic grating clamp fixed on a corresponding grating three-axis adjustment device, and the method for adjusting the parallelism of gratings is realized by adjusting the pitch, roll and yaw angles of a standard grating A and a to-be-measured grating B clamped by the two telescopic grating clamps respectively, so that the reflected light of the two gratings is perpendicular to the collimated linear light formed by a linear light source through a horizontal slit to complete grating surface parallel adjustment, and the connecting line of the diffraction light of the two gratings is parallel to the collimated linear light formed by the linear light source through the horizontal slit to complete grating line parallel adjustment. The application adopts modular design and has compact structure and is convenient to mount and dismount.
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