Galvanometer correction method adaptive to circular scanning area

Abstract

The invention relates to and discloses a galvanometer correction method adaptive to a circular scanning area. The method comprises the following steps: determining a scanning area, a first correction area and a central point of a field lens; and drawing a plurality of auxiliary right triangles along the clockwise or anticlockwise direction by taking the central point as a reference, drawing a plurality of auxiliary squares by taking the short right-angle side of each auxiliary right triangle as the side length, and fitting areas formed by splicing all the auxiliary squares which are completely positioned in the scanning area of the field lens into a block to form a second correction area. According to the scheme, a correction method of performing regional multiple correction and then performing fitting is designed, so that the correction range can be effectively increased, the whole field lens circular region is filled with the correction region, and region waste is effectively avoided.

Description

Technical Field

[0001] The invention relates to the field of laser processing, and in particular to a galvanometer correction method adapted to a circular scanning area. Background Art

[0002] In the field of laser applications, especially when the system processing requires the use of F-Theta field mirrors and galvanometers, the galvanometers need to be calibrated to ensure that the position and size of the laser processing are accurate, and then a calibration file is generated and called during processing. In the conventional calibration method, since the F-Theta field mirror is circular, and the processing range used in actual production is rectangular, the correction range of the two is usually the inscribed square of the field mirror circle. This kind of calibration of the inscribed square in the circle is currently a commonly used calibration method. The effective area of ​​this calibration is limited, and the areas that cannot be calibrated cannot be used normally, resulting in a certain amount of waste. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a galvanometer correction method for adapting a circular scanning area.

[0004] The present invention also provides a galvanometer correction method and device having the above-mentioned adaptive circular scanning area.

[0005] On the one hand, according to the galvanometer correction method adapted to the circular scanning area of ​​the embodiment of the present invention, it is applied to the galvanometer correction device, the galvanometer correction device includes a laser, a galvanometer and a field lens connected in sequence, the laser emits laser light and passes through the galvanometer and the field lens in sequence and then irradiates on the processing platform, the part of the processing platform irradiated by the field lens is the scanning area, and also includes a correction area that needs to be corrected, the correction area is set in the scanning area, and the area of ​​the correction area is not larger than the area of ​​the scanning area, the galvanometer correction method adapted to the circular scanning area includes the following steps:

[0006] S100, determining a scanning area, a first correction area and a center point of a field lens;

[0007] S200, taking the center point as a reference, make a plurality of auxiliary right triangles in a clockwise or counterclockwise direction, and make a plurality of auxiliary squares with the short right-angled side of each auxiliary right triangle as the side length, and fit the area formed by splicing all the auxiliary squares that are completely in the scanning area of ​​the field lens into one piece to form a second correction area.

[0008] According to some embodiments of the present invention, the galvanometer calibration method adapted to the circular scanning area further comprises the following steps:

[0009] S300, dividing the auxiliary squares based on the plurality of auxiliary squares to obtain new auxiliary squares and new correction areas;

[0010] S400, based on a preset accuracy threshold, iteratively execute step S300 to iteratively obtain a new correction area, and stop iterating until the side length of the new auxiliary square is less than or equal to the preset accuracy threshold, and fit the area formed by splicing the new auxiliary squares that are completely within the scanning area of ​​the field lens into one piece to obtain a final correction area;

[0011] S500: Calibrate the field lens based on the new calibration area.

[0012] According to some embodiments of the present invention, step S100 includes:

[0013] S110, determining an area where a light spot appears on the processing platform after the laser emitted from the laser passes through the field lens, wherein the area of ​​the light spot is a scanning area of ​​the field lens, and the scanning area of ​​the field lens is a circular scanning area;

[0014] S120, constructing an inscribed square in the scanning area of ​​the field lens, where the area enclosed by the inscribed square is a first calibration area;

[0015] S130: Determine the position of the center point based on the intersection of the diagonals of the square inscribed in the circle.

[0016] Further, in step S210,

[0017] The hypotenuse of the auxiliary right triangle is the radius of the scanning area of ​​the field lens, the long right side of the auxiliary right triangle is a horizontal line or a vertical line based on the center point, and the short right side of the auxiliary right triangle is a perpendicular line from the intersection of the hypotenuse and the scanning area of ​​the field lens to the horizontal line or the vertical line, and the tangent value of the minimum angle of each auxiliary right triangle is 0.5.

[0018] Further, in step S200,

[0019] The number of the auxiliary right triangles is 8, the length of the long right-angled side of the auxiliary right triangle is twice the length of the short right-angled side, and the length of the hypotenuse of the auxiliary right triangle is the radius of the field lens scanning area.

[0020] Further, in step S200,

[0021] The number of the auxiliary squares is 16, and the 16 auxiliary squares are spliced ​​into a large square. In the large square, except for the 4 auxiliary squares at the 4 vertices which are not completely in the scanning area of ​​the field lens, the other 12 auxiliary squares are completely in the scanning area of ​​the field lens.

[0022] Further, the step S300 includes:

[0023] S310, taking multiple auxiliary squares as a reference, evenly cutting each auxiliary square into 4 new auxiliary squares;

[0024] S320: In the new auxiliary square, an area formed by splicing the new auxiliary squares that are completely within the scanning area of ​​the field lens is fitted into one piece to form a new correction area.

[0025] Further, the step S500 includes:

[0026] S510, determining the ideal coordinate information of each intersection point based on the combined standard figure formed by splicing multiple new auxiliary squares;

[0027] S520, placing the standard combination graphic on the processing platform so that the center of the combination standard graphic coincides with the center point;

[0028] S530, obtaining a proofreading image through an image acquisition device on the processing platform, calculating the actual coordinate information of each intersection, then comparing the actual coordinate information with the ideal coordinate information and generating a proofreading file, and finally generating a proofreading file in a corresponding format through a proofreading conversion program.

[0029] On the other hand, a galvanometer correction device according to an embodiment of the present invention includes a galvanometer correction method for adapting a circular scanning area according to the above embodiment of the present invention, and the galvanometer correction device includes:

[0030] Lasers;

[0031] A galvanometer, the galvanometer is connected to the laser, and the galvanometer includes two groups of reflecting mirrors respectively controlled by independent motors;

[0032] A field mirror, the field mirror is connected to the galvanometer;

[0033] A processing platform, the processing platform is arranged within the effective irradiation range of the field lens, the processing platform includes a scanning area and a correction area, the scanning area is the part irradiated by the field lens, the correction area is the area where the coordinates need to be corrected, and the correction area is arranged within the scanning area;

[0034] A processing device, wherein the laser, the galvanometer, the field lens and the processing platform are respectively connected to the processing device.

[0035] Furthermore, the present invention also proposes a computer-readable storage medium on which program instructions are stored. When the program instructions are executed by a processor, the galvanometer correction method for adapting a circular scanning area is implemented.

[0036] The embodiments of the present invention have at least the following beneficial effects: the present solution designs a correction method that performs multiple corrections in different regions and then performs fitting, which can effectively increase the correction range and make the correction area fill the entire field mirror circular area, effectively avoiding area waste.

[0037] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0039] Figure 1 A flow chart of a galvanometer calibration method for adapting a circular scanning area according to an embodiment of the present invention;

[0040] Figure 2 The present invention is a flow chart of determining the scanning area, the first correction area and the center point of the field mirror in the galvanometer correction method for adapting the circular scanning area according to an embodiment of the present invention.

[0041] Figure 3 This is a flow chart of a galvanometer correction method for adapting a circular scanning area in an embodiment of the present invention, in which multiple auxiliary squares are used as references to divide the auxiliary squares to obtain new auxiliary squares and a new correction area.

[0042] Figure 4 It is a schematic diagram of the relative positions of the scanning area and the correction area on the processing platform in the galvanometer correction method adapted to the circular scanning area according to an embodiment of the present invention.

[0043] Figure 5 It is a schematic diagram of the scanning area, the first correction area and the center point of the field mirror in the galvanometer correction method adapted to the circular scanning area according to an embodiment of the present invention.

[0044] Figure 6 This is a schematic diagram of partitioning the scanning area of ​​the field mirror in the galvanometer correction method adapted to the circular scanning area in an embodiment of the present invention to obtain multiple auxiliary right-angled triangles and multiple auxiliary squares.

[0045] Figure 7 It is a schematic diagram of multiple auxiliary squares and a second correction area in a galvanometer correction method adapted to a circular scanning area according to an embodiment of the present invention.

[0046] Figure 8 It is a schematic diagram of a new calibration area in the calibration method for a galvanometer mirror adapted to a circular scanning area according to an embodiment of the present invention (third calibration).

[0047] Fig. 9It is a schematic diagram of a new calibration area in the calibration method for a galvanometer mirror adapted to a circular scanning area according to an embodiment of the present invention (the fourth calibration).

[0048] Fig.10 Schematic diagram of a galvanometer correction device according to an embodiment of the present invention.

[0049] Fig.11 It is a schematic diagram of an image before correction in the galvanometer correction method for adapting a circular scanning area according to an embodiment of the present invention.

[0050] Fig.12 It is a schematic diagram of an image after correction in the galvanometer correction method for adapting a circular scanning area according to an embodiment of the present invention.

[0051] Reference numerals:

[0052] Label name Label name 100 Laser 200 Galvanometer 300 Field lens 400 Processing platform 410 Scan area 420 Correction area 421 First calibration area 422 Center Point 423 Auxiliary right triangle 424 Auxiliary square 425 Second calibration area 426 New auxiliary square 427 New calibration area DETAILED DESCRIPTION

[0053] The following will be combined with the embodiments and drawings to clearly and completely describe the concept, specific structure and technical effects of the present invention, so as to fully understand the purpose, scheme and effect of the present invention. It should be noted that the embodiments and features in the embodiments of this application can be combined with each other without conflict.

[0054] It should be noted that, unless otherwise specified, when a feature is referred to as being "fixed" or "connected" to another feature, it may be directly fixed or connected to the other feature, or it may be indirectly fixed or connected to the other feature. In addition, the descriptions of up, down, left, right, top, bottom, etc. used in the present invention are only relative to the relative positional relationship of the components of the present invention in the drawings.

[0055] It should be noted that, unless otherwise specified, when a feature is referred to as being "electrically connected" or "electrically connected" to another feature, the two features may be directly connected via pins, or connected via cables, or connected via wireless transmission. The specific electrical connection method is a common method for those skilled in the art, and those skilled in the art can achieve the connection as needed.

[0056] In addition, unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art. The terms used in this specification are only for describing specific embodiments, not for limiting the present invention. The term "and / or" used herein includes any combination of one or more related listed items.

[0057] It should be understood that, although the terms first, second, third, etc. may be used to describe various elements in the present disclosure, these elements should not be limited to these terms. These terms are only used to distinguish elements of the same type from each other. For example, without departing from the scope of the present disclosure, the first element may also be referred to as the second element, and similarly, the second element may also be referred to as the first element.

[0058] On the one hand, referring to Figures 1 to 12 According to the galvanometer correction method for adapting a circular scanning area according to an embodiment of the present invention,

[0059] According to the galvanometer correction method adapted to the circular scanning area of ​​the embodiment of the present invention, it is applied to the galvanometer correction device, which includes a laser 100, a galvanometer 200 and a field lens 300 (focusing lens) connected in sequence. The laser 100 emits a laser which passes through the galvanometer 200 and the field lens 300 (focusing lens) in sequence and then irradiates the processing platform 400. The portion of the processing platform 400 irradiated by the field lens 300 (focusing lens) is the scanning area 410, and also includes a correction area 420 which needs to be corrected. The correction area 420 is arranged in the scanning area 410, and the area of ​​the correction area 420 is not larger than the area of ​​the scanning area 410. Figure 1 The galvanometer correction method for adapting the circular scanning area comprises the following steps:

[0060] S100, determining a scanning area 410, a first correction area 421 and a center point 422 of the field lens 300 (focusing lens);

[0061] S200, taking the center point 422 as a reference, make multiple auxiliary right triangles 423 in a clockwise or counterclockwise direction, and make multiple auxiliary squares 424 with the short right-angled side of each auxiliary right triangle 423 as the side length, and fit the area formed by splicing all the auxiliary squares 424 that are completely in the scanning area 410 of the field lens 300 into one piece to form a second correction area 425.

[0062] The embodiments of the present invention have at least the following beneficial effects: the present scheme designs a correction method that performs multiple corrections in different areas and then performs fitting, which can effectively increase the correction range and make the correction area 420 fill the entire circular area of ​​the field lens 300 (focusing lens), effectively avoiding area waste.

[0063] In the actual processing process, the processing results obtained usually have deviations, which have a more obvious impact on our processing results. This error mainly comes from the error in principle, linear error, nonlinear error and system error, among which the error in principle mainly leads to geometric distortions such as pincushion distortion and barrel distortion. Therefore, before using the laser 100 system for processing, the laser 100 system needs to be calibrated, but the conventional calibration is the calibration of the inscribed square in the circle. The effective area of ​​this calibration is limited, and the places that cannot be calibrated cannot be used normally, resulting in a certain amount of waste.

[0064] The present invention gradually increases the number of squares and reduces the area of ​​a single square, thereby increasing the area of ​​the correction area 420 and improving the effective utilization area, and finally making the correction area 420 as close to the scanning area 410 as possible to avoid waste.

[0065] According to some embodiments of the present invention, referring to Figure 1 The galvanometer correction method adapted to the circular scanning area also includes the following steps:

[0066] S300, dividing the auxiliary squares 424 based on the plurality of auxiliary squares 424 to obtain new auxiliary squares 426 and new correction areas 427;

[0067] S400, based on a preset accuracy threshold, iteratively execute step S300 to iteratively obtain a new correction area 427, and stop iterating until the side length of the new auxiliary square 426 is less than or equal to the preset accuracy threshold, and fit the area formed by the new auxiliary squares 426 that are completely within the scanning area 410 of the field lens 300 (focusing lens) into one piece to obtain a final correction area 420;

[0068] S500 , calibrating the field lens 200 based on the new calibration area 420 .

[0069] According to some embodiments of the present invention, referring to Figure 1 and Figure 2 , the step S100 comprises:

[0070] S110, determining that after the laser light emitted from the laser 100 passes through the field lens 300 (focusing lens), the area where a light spot appears on the processing platform 400 is irradiated, and the area of ​​the light spot is the scanning area 410 of the field lens 300 (focusing lens), and the scanning area 410 of the field lens 300 (focusing lens) is a circular scanning area 410;

[0071] S120, constructing an inscribed square in the scanning area 410 of the field lens 300 (focusing lens), and the area surrounded by the inscribed square is the first calibration area 421;

[0072] S130. Determine the position of the center point 422 based on the intersection of the diagonals of the square inscribed in the circle.

[0073] Specifically, refer to Figure 4 and Figure 5 For step S110 and step S120, the area within the circular region is the scanning area 410 of the field lens 300 (focusing lens), and the square is the square inscribed in the circle, which is initialized as the first correction area 421. The conventional correction method is the inscribed square of the processing range of the field lens 300, that is, the shadow area. In addition, other areas of the scanning area 410 of the field lens 300 (focusing lens) cannot be corrected and cannot be used, which wastes these areas and reduces the processing format.

[0074] For step S130, since the geometric distortion of the center point 422 is almost 0, it can be considered to be without deviation, and the more the area deviates from the center point 422, the more obvious the distortion is, so determining the position of the center point 422 lays the foundation for subsequent steps.

[0075] Further, refer to Figure 1 In step S200,

[0076] The hypotenuse of the auxiliary right triangle 423 is the radius of the scanning area 410 of the field lens 300 (focusing lens), the long right side of the auxiliary right triangle 423 is a horizontal line or a vertical line based on the center point 422, and the short right side of the auxiliary right triangle 423 is a perpendicular line from the intersection of the hypotenuse and the scanning area 410 of the field lens 300 (focusing lens) to the horizontal line or the vertical line, and the tangent value of the minimum angle of each auxiliary right triangle 423 is 0.5.

[0077] Specifically, refer to Figure 6 , with the center point 422 as the center of the circle and the radius as the hypotenuse, rotate clockwise or counterclockwise for one circle, and from the intersection of the radius with the outer edge of the scanning area 410 of the field lens 300 to the perpendicular line of the horizontal line or the vertical line, countless right triangles will appear. However, the auxiliary right triangle 423 is only needed when the tangent value of the minimum angle of the right triangle is 0.5.

[0078] In actual operation, the judgment condition for drawing a perpendicular line from the intersection point to the horizontal line or the intersection point to the vertical line is whether the vertex of the smallest angle of the right triangle is the center point after drawing the perpendicular line. If the vertex of the smallest angle is not the center point after drawing the perpendicular line, it is necessary to draw a perpendicular line in the other direction.

[0079] Further, refer to Figure 1 and Figure 6 In step S200,

[0080] The number of the auxiliary right triangles 423 is 8, the length of the long right-angled side of the auxiliary right triangle 423 is twice the length of the short right-angled side, and the length of the hypotenuse of the auxiliary right triangle 423 is the radius of the scanning area 410 of the field lens 300 (focusing lens).

[0081] Specifically, refer to Figure 6 The number of the auxiliary right triangles 423 is 8. With the short sides of the auxiliary right triangles 423 as the side length, a square is made in the direction of the center point 422 to obtain 8 squares. These 8 squares are copied in a mirrored manner to the intersection of the center point 422 and the four edges to obtain 16 auxiliary squares 424.

[0082] Further, refer to Figure 1 and Figure 6 In step S200,

[0083] The number of the auxiliary squares 424 is 16, and the 16 auxiliary squares 424 are spliced ​​into a large square. In the large square, except for the 4 auxiliary squares 424 at the 4 vertices which are not completely in the scanning area 410 of the field lens 300 (focusing lens), the other 12 auxiliary squares 424 are completely in the scanning area 410 of the field lens 300 (focusing lens).

[0084] Specifically, refer to Figure 6 and Figure 7 , 12 auxiliary squares 424 that are completely within the scanning area 410 of the field lens 300 (focusing lens) are fitted into one piece to obtain a second correction area 425.

[0085] Further, refer to Figure 3 and Fig. 9 , the step S300 comprises:

[0086] S310, taking the multiple auxiliary squares 424 as a reference, evenly cutting each auxiliary square 424 into four new auxiliary squares 426;

[0087] S320 , in the new auxiliary square 426 , the area formed by splicing the new auxiliary squares 426 that are completely within the scanning area 410 of the field lens 300 (focusing lens) is fitted into one piece to form a new correction area 427 .

[0088] Specifically, refer to Figure 8, based on the division of the second correction area 425, that is, the third correction, each auxiliary square 424 is equally divided into four small squares, and a small square is added at each of the four vertex positions of the original second correction area 425, which is completely included in the range of the scanning area 410. Therefore, the technical effect of increasing the correction area 420 is achieved by dividing the auxiliary squares 424.

[0089] In the first step of step S400, referring to Fig. 9 If the side length of the new auxiliary square 426 is greater than the accuracy threshold, the iteration is continued randomly, and the fourth correction is performed again based on the third correction, and the auxiliary square 424 is cut into four equal parts again, so that the area of ​​the new correction area 427 is increased by four small squares compared to the area of ​​the original correction area 420, thereby achieving the technical effect of continuing to increase the area of ​​the correction area 420.

[0090] After multiple iterations, the area of ​​the correction region 420 gradually approaches the area of ​​the scanning region 410 , thereby achieving the technical effect of utilizing the area of ​​the scanning region 410 as much as possible.

[0091] However, due to the existence of the accuracy threshold, the area of ​​the correction area 420 cannot be greater than or equal to the area of ​​the scanning area 410 .

[0092] In addition, after step S400 is performed, the area of ​​the calibration region 420 is no longer increased, and the calibration work of the field lens 300 (focusing lens) is performed on this basis.

[0093] Further, step S500 includes the following steps:

[0094] S510, determining the ideal coordinate information of each intersection point based on the combined standard figure formed by splicing multiple new auxiliary squares 426;

[0095] S520, placing the standard combination graphic on the processing platform so that the center of the combination standard graphic coincides with the center point 422;

[0096] S530, obtaining a proofreading image through an image acquisition device on the processing platform, calculating the actual coordinate information of each intersection, then comparing the actual coordinate information with the ideal coordinate information and generating a proofreading file, and finally generating a proofreading file in a corresponding format through a proofreading conversion program.

[0097] Specifically, regarding the calibration point coordinate calculation, after the straight line processing, the straight line information obtained includes vertical lines, horizontal lines, and oblique lines. It is saved in the dictionary (a dictionary is a data structure in Python) Lines. The dictionary Lines has three key-value pairs, corresponding to vertical lines, horizontal lines, and oblique lines. Theoretically, the relationship between the number of all straight lines in Lines and the number of calibration points n is:

[0098] sumline(Lines)=sqrt(n)+sqrt(n)+2*n,

[0099] The ideal calibration points correspond to the first two key-value pairs in Lines. The value of the first key-value pair is the vertical line segment information, and the value of the second key-value pair is the horizontal line segment information, both of which are stored in the array. After image distortion correction, there is basically no tilt between the vertical and horizontal lines, so the array stores the intercept of the line on the X or Y axis. The array listver corresponding to the vertical line is expressed as:

[0100] listver=[x1,x2,x3,…,xm]

[0101] The array listhor corresponding to the horizontal line is expressed as:

[0102] listhor=[y1,y2,y3,…,ym]

[0103] Where m = √n, so the pixel coordinates of the ideal calibration point are the intersection of the vertical line and the horizontal line. The array listideal is used to store the pixel coordinates of the ideal calibration point, where each element is represented by a two-dimensional array:

[0104] listideal=[(x1,y1),(x2,y2),(x3,y4),…,(xm,ym)]

[0105] After obtaining the pixel coordinates of the above ideal calibration points, they are normalized to the center. Taking 3×3 calibration points as an example, the pixel coordinates of the center point are (x5, y5). Refer to Table 1 for the coordinate normalization process of all ideal calibration points:

[0106] Table 1

[0107] (x1,y1)-(x5,y5) (x2,y2)-(x5,y5) (x3,y3)-(x5,y5) (x4,y4)-(x5,y5) (0,0) (x6,y6)-(x5,y5) (x7,y7)-(x5,y5) (x8,y8)-(x5,y5) (x9,y9)-(x5,y5)

[0108] The actual proofreading point corresponds to the last key-value pair in Lines and is saved in the array listreal:

[0109] listreal=[(x1′,y1′),(x2′,y2′),(x3′,y3′),…,(xm′,ym′)]

[0110] When performing calculations, you need to first determine whether the oblique lines are in the same area and have opposite slopes, and find their intersection to obtain the pixel coordinates of the actual proofreading point. It should be noted that the actual proofreading center point must be used as the reference when normalizing the center of the actual proofreading point. Because when acquiring the proofreading image, the center positions of the proofreading pattern and the "standard ruler" are aligned, so ideally, when the proofreading software processes the proofreading image, the two center points should coincide, but since this process is manually manipulated, there may be visual deviations. Therefore, when the actual proofreading point is normalized, using its own center point as the normalization standard can reduce unnecessary errors. Similarly, refer to Table 2, which shows the normalization of the center pixel coordinates of the actual proofreading point.

[0111] Table 2

[0112]

[0113] Specifically, refer to Fig.11 and Fig.12 , through the correction function of the proofreading file, the actual coordinate information is corrected to the ideal coordinate information.

[0114] On the other hand, referring to Fig.10 According to an embodiment of the present invention, a galvanometer correction device includes a galvanometer correction method according to the above embodiment of the present invention, and the galvanometer correction device includes:

[0115] Laser 100;

[0116] A galvanometer 200, the galvanometer 200 is connected to the laser 100, and the galvanometer 200 includes two groups of reflection mirrors respectively controlled by independent motors;

[0117] A field lens 300 (focusing lens), wherein the field lens 300 (focusing lens) is connected to the galvanometer 200;

[0118] A processing platform 400, wherein the processing platform 400 is arranged within the effective irradiation range of the field lens 300 (focusing lens), and the processing platform 400 includes a scanning area 410 and a correction area 420, wherein the scanning area 410 is the portion irradiated by the field lens 300 (focusing lens), and the correction area 420 is the area where coordinates need to be corrected, and the correction area 420 is arranged within the scanning area 410;

[0119] The processing device, the laser 100, the galvanometer 200, the field lens 300 (focusing lens) (focusing lens) and the processing platform 400 are respectively connected to the processing device.

[0120] Specifically, the galvanometer scanning system is usually composed of an X-mirror, a Y-mirror, an X-drive motor, a Y-drive motor, a motor servo circuit, and a control circuit. Among them, the control circuit is also called a control card, which is used to receive data transmitted by the host computer software and output a control signal. For the entire laser galvanometer processing system, in addition to the optical galvanometer scanning system, it also includes a light source, a laser 100, a circuit, an objective lens, etc. According to the different positions of the objective lens and the galvanometer, it can be divided into pre-objective lens scanning and post-objective lens scanning. Pre-objective lens scanning refers to the laser beam being focused onto the format by the objective lens after passing through the galvanometer; post-objective lens scanning refers to the laser beam being focused by the objective lens first, and then output onto the format through the galvanometer. Therefore, pre-objective lens scanning is usually used for small-format processing, such as laser marking, etc.; and post-objective lens scanning is usually used for large-format processing.

[0121] In some embodiments of the present invention, a scanning method before the objective lens is adopted. In other embodiments, a scanning method after the objective lens may also be adopted.

[0122] Specifically, the scanning area 410 is the portion irradiated by the field lens 300 (focusing lens), the correction area 420 is the area where coordinates need to be corrected, and the correction area 420 is arranged within the scanning area 410 .

[0123] Further, refer to Figure 1 The present invention further provides a computer-readable storage medium on which program instructions are stored. When the program instructions are executed by a processor, the calibration method of the galvanometer 200 is implemented.

[0124] Other structures and operations of the galvanometer correction device according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0125] According to the embodiments of the present invention, by such configuration, at least the following effects can be achieved:

[0126] The above is only a preferred embodiment of the present invention. The present invention is not limited to the above implementation. As long as the technical effect of the present invention is achieved by the same means, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present disclosure shall be included in the scope of protection of the present disclosure. All should belong to the protection scope of the present invention. Within the protection scope of the present invention, its technical scheme and / or implementation method can have various modifications and changes.

Claims

1. A galvanometer correction method adapted to a circular scanning area, applied to a galvanometer correction device, the galvanometer correction device comprising a laser (100), a galvanometer (200) and a field lens (300) connected in sequence, the laser (100) emits laser light which passes through the galvanometer (200) and the field lens (300) in sequence and then irradiates a processing platform (400), the portion of the processing platform (400) irradiated by the field lens (300) being a scanning area (410), and also comprising a correction area (420) which needs to be corrected, the correction area (420) being arranged in the scanning area (410), the area of ​​the correction area (420) being no greater than the area of ​​the scanning area (410), and characterized in that: The galvanometer (200) calibration method comprises the following steps: S100, determining a scanning area (410), a first correction area (421) and a center point (422) of a field lens (300); S200, taking the center point (422) as a reference, make a plurality of auxiliary right triangles (423) in a clockwise or counterclockwise direction, and make a plurality of auxiliary squares (424) with the short right-angled side of each auxiliary right triangle (423) as the side length, and fit the area formed by splicing all the auxiliary squares (424) completely within the scanning area (410) of the field lens (300) into one piece to form a second correction area (425).

2. The galvanometer correction method for adapting a circular scanning area according to claim 1, characterized in that: The galvanometer correction method for adapting a circular scanning area also includes the following steps: S300, using the plurality of auxiliary squares (424) as a reference, dividing the auxiliary square (424) to obtain new auxiliary squares (426) and a new correction area (427); S400, iteratively executing step S300 based on a preset accuracy threshold, iteratively obtaining a new calibration area (427), and stopping the iteration until the side length of the new auxiliary square (426) is less than or equal to the preset accuracy threshold, and fitting the area formed by splicing the new auxiliary squares (426) completely within the scanning area (410) of the field lens (300) into one piece, to obtain a final calibration area (420); S500: Calibrate the field lens (200) based on the new calibration area (420).

3. The galvanometer calibration method for adapting a circular scanning area according to claim 1, characterized in that: The step S100 includes: S110, determining an area where a light spot appears on the processing platform (400) after the laser light emitted from the laser (100) passes through the field lens (300) and irradiates the processing platform (400), wherein the area of ​​the light spot is a scanning area (410) of the field lens (300), and the scanning area (410) of the field lens (300) is a circular scanning area (410); S120, constructing an inscribed square in a circle within the scanning area (410) of the field lens (300), wherein the area enclosed by the inscribed square is a first calibration area (421); S130. Determine the position of the center point (422) based on the intersection of the diagonals of the square inscribed in the circle.

4. The galvanometer calibration method for adapting a circular scanning area according to claim 1, characterized in that: In the step S200, The hypotenuse of the auxiliary right triangle (423) is the radius of the scanning area (410) of the field lens (300), the long right-angled side of the auxiliary right triangle (423) is a horizontal line or a vertical line based on the center point (422), and the short right-angled side of the auxiliary right triangle (423) is a perpendicular line from the intersection of the hypotenuse and the scanning area (410) of the field lens (300) to the horizontal line or the vertical line, and the tangent value of the minimum angle of each auxiliary right triangle (423) is 0.

5.

5. The galvanometer calibration method for adapting a circular scanning area according to claim 1, characterized in that: In the step S200, The number of the auxiliary right triangles (423) is 8, the length of the long right-angled side of the auxiliary right triangle (423) is twice the length of the short right-angled side, and the length of the hypotenuse of the auxiliary right triangle (423) is the radius of the scanning area (410) of the field lens (300).

6. The galvanometer calibration method for adapting a circular scanning area according to claim 1, characterized in that: In the step S200, The number of the auxiliary squares (424) is 16, and the 16 auxiliary squares (424) are spliced ​​into a large square. In the large square, except for the 4 auxiliary squares (424) at the 4 vertices which are not completely within the scanning area (410) of the field lens (300), the other 12 auxiliary squares (424) are completely within the scanning area (410) of the field lens (300).

7. The galvanometer calibration method for adapting a circular scanning area according to claim 2, characterized in that: The step S300 includes: S310, taking the multiple auxiliary squares (424) as a reference, evenly cutting each auxiliary square (424) into four new auxiliary squares (426); S320, in the new auxiliary square (426), the area formed by splicing the new auxiliary squares (426) that are completely within the scanning area (410) of the field lens (300) is fitted into one piece to form a new correction area (427).

8. The galvanometer calibration method for adapting a circular scanning area according to claim 2, characterized in that: The step S500 includes: S510, determining the ideal coordinate information of each intersection point based on the combined standard figure formed by splicing a plurality of new auxiliary squares (426); S520, placing the standard combination pattern on the processing platform (400) so that the center of the combination standard pattern coincides with the center point (422); S530, acquiring a proofreading image through an image acquisition device on the processing platform (400), calculating the actual coordinate information of each intersection, then comparing the actual coordinate information with the ideal coordinate information and generating a proofreading file, and finally generating a proofreading file of a corresponding format through a proofreading conversion program.

9. A galvanometer correction device, characterized in that: include: Laser (100); A galvanometer (200), the galvanometer (200) being connected to the laser (100), the galvanometer (200) comprising two groups of reflecting mirrors respectively controlled by independent motors; A field lens (300), the field lens (300) being connected to the galvanometer (200); A processing platform (400), the processing platform (400) being arranged within the effective irradiation range of the field lens (300), the processing platform (400) comprising a scanning area (410) and a correction area (420), the scanning area (410) being the portion irradiated by the field lens (300), the correction area (420) being the area where coordinates need to be corrected, and the correction area (420) being arranged within the scanning area (410); A processing device, the laser (100), the galvanometer (200), the field lens (300) and the processing platform (400) are respectively connected to the processing device. 10 . A computer-readable storage medium having program instructions stored thereon, wherein the program instructions are executed by a processor to implement the method according to claim 1 .

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