Explosion-proof cabinet, chemical management system, method and device and computer program product

Abstract

The invention provides an explosion-proof cabinet, a chemical management system, a chemical management method, a chemical management device and a computer program product. The explosion-proof cabinet comprises a cabinet body, a radio frequency reader and a control unit, the radio frequency reader is arranged outside the cabinet body, and the radio frequency reader can read tag information in a radio frequency tag from the radio frequency tag in the cabinet body and can obtain intensity information of a radio frequency signal fed back by the radio frequency tag; the control unit is connected with the radio frequency reader and used for obtaining and processing information, and the information comprises the label information and the strength information corresponding to the label information. The explosion-proof cabinet can read the label information recorded by the radio frequency label in the cabinet body and the corresponding intensity information in real time, so that the label in the cabinet body and the position in the cabinet body can be detected in real time, the workload of managing articles in the cabinet body is reduced, and missing detection and false detection are avoided.

Description

Technical Field

[0001] The present application relates to the field of photoresist management technology, and more specifically to an explosion-proof cabinet, a chemical management system, a method, a device and a computer program product. Background Art

[0002] Photoresist is a photosensitive material used in photolithography, specifically, to form a patterned mask layer on the surface of a substrate. In the integrated circuit manufacturing process, photoresists are usually stored in photoresist bottles, which are stored in explosion-proof cabinets. Accurate information statistics and management of photoresists during the production process play an important role in the photolithography stage of semiconductor manufacturing.

[0003] The existing chemical management system cannot collect the photoresist information in the explosion-proof cabinet in real time. It can only collect the photoresist information in the cabinet through manual scanning when opening the cabinet door and accessing the photoresist. The photoresist management workload is large, and it is easy to cause information mismatch due to missed scans, increasing the risk of production abnormalities. Summary of the invention

[0004] The present application is proposed in view of the above problems. The present application provides an explosion-proof cabinet, a chemical management system, a method, a device and a computer program product, which can detect labels in the cabinet and their positions in the cabinet in real time, reduce the workload of managing items in the cabinet, and avoid missed detection and false detection.

[0005] According to a first aspect of the present application, there is provided an explosion-proof cabinet, comprising a cabinet body, a radio frequency reader and a control unit;

[0006] The RF reader is arranged outside the cabinet, and the RF reader can read the tag information in the RF tag from the RF tag in the cabinet, and can obtain the strength information of the RF signal fed back by the RF tag;

[0007] The control unit is connected to the radio frequency reader and is used to obtain and process information, where the information includes the tag information and the strength information corresponding to the tag information.

[0008] In one embodiment of the present application, the maximum reading distance of the radio frequency reader is 1m-3m.

[0009] In one embodiment of the present application, a wireless signal shielding layer is further included on the side wall of the cabinet, and the wireless signal shielding layer is configured to prevent the radio frequency tag outside the cabinet from being read by the radio frequency reader.

[0010] In one embodiment of the present application, the explosion-proof cabinet includes a control lock, which is used to control the opening and closing of the cabinet, and the control lock is connected to the control unit.

[0011] In one embodiment of the present application, the explosion-proof cabinet includes a plurality of cabinets and a plurality of radio frequency readers, the cabinets correspond to the radio frequency readers one by one, and the plurality of radio frequency readers are all connected to the control unit; the information acquired and processed by the control unit also includes cabinet information.

[0012] According to a second aspect of the present application, a chemical management system is provided, which is used to connect to the explosion-proof cabinet as described in any one of the first aspects above, the cabinet can accommodate chemical containers, the chemical containers are bound to the radio frequency tags, the chemical management system is connected to the explosion-proof cabinet, including the chemical management system being connected to the control unit, and the processing includes the control unit sending the information to the chemical management system, characterized in that

[0013] The chemical management system can obtain preset storage information and real-time storage information, and confirm whether the real-time storage information of the cabinet matches the preset storage information;

[0014] The preset storage information includes preset label information and preset strength information and preset explosion-proof cabinet information corresponding to the preset label information, and the preset explosion-proof cabinet information corresponds to the preset cabinet body; the real-time storage information includes the label information, the strength information corresponding to the label information, and explosion-proof cabinet information, and the explosion-proof cabinet information corresponds to the cabinet body.

[0015] In one embodiment of the present application, the confirming whether the real-time storage information of the cabinet matches the preset storage information includes:

[0016] If the explosion-proof cabinet information is consistent with the preset explosion-proof cabinet information, and the label information and the strength information corresponding to the label information correspond to the preset label information, and there is a one-to-one correspondence between the preset label information and the preset strength information corresponding to the preset label information, then it is confirmed that the real-time storage information of the cabinet corresponding to the consistent explosion-proof cabinet information matches the preset storage information, otherwise it is confirmed that the real-time storage information of the explosion-proof cabinet corresponding to the consistent cabinet information does not match the preset storage information.

[0017] In one embodiment of the present application, the explosion-proof cabinet includes a control lock, the control lock is used to control the opening and closing of the cabinet, and the control lock is connected to the control unit;

[0018] The chemical management system can send a control signal to a control unit, and the control unit can control the control lock based on the control signal.

[0019] In one embodiment of the present application, when the chemical management system confirms that the real-time storage information of the explosion-proof cabinet does not match the preset storage information, the control signal sent to the mismatched explosion-proof cabinet includes a mismatch signal, and the mismatch signal includes mismatched cabinet information. The control unit can control the control lock based on the mismatch signal so that the cabinet cannot be closed.

[0020] In one embodiment of the present application, the chemical management system is capable of acquiring access instructions, wherein the access instructions include information of the explosion-proof cabinet to be accessed;

[0021] The chemical management system can, based on the access instruction, before confirming whether the real-time storage information of the cabinet matches the preset storage information:

[0022] The preset storage information is reacquired, and the control signal sent to the explosion-proof cabinet corresponding to the explosion-proof cabinet information to be accessed includes an opening signal, and the opening signal corresponds to the explosion-proof cabinet information; the control unit of the explosion-proof cabinet can control the control lock based on the opening signal so that the cabinet body corresponding to the explosion-proof cabinet information can be opened.

[0023] According to a third aspect of the present application, a chemical management method is provided, comprising:

[0024] Acquire preset storage information and real-time storage information, wherein the preset storage information includes preset label information and preset strength information and preset explosion-proof cabinet information corresponding to the preset label information, wherein the preset explosion-proof cabinet information corresponds to the preset cabinet body; the real-time storage information includes label information collected in real time, strength information corresponding to the label information, and explosion-proof cabinet information, wherein the explosion-proof cabinet information corresponds to the cabinet body of the explosion-proof cabinet;

[0025] Based on the preset storage information and the real-time storage information, it is confirmed whether the real-time storage information of the cabinet matches the preset storage information to obtain a matching result.

[0026] In one embodiment of the present application, the explosion-proof cabinet includes a control unit, and the chemical management method further includes:

[0027] Based on the matching result, a first control signal is sent to the control unit, and the control unit controls the opening and closing of the cabinet based on the first control signal.

[0028] In one embodiment of the present application, before obtaining the preset storage information and the real-time storage information, the chemical management method further includes:

[0029] Obtaining an access instruction, wherein the access instruction includes information of the explosion-proof cabinet to be accessed;

[0030] Reacquire the preset storage information, and send a second control signal to the explosion-proof cabinet corresponding to the explosion-proof cabinet information to be accessed based on the preset storage information, wherein the second control signal includes an opening signal, and the opening signal corresponds to the explosion-proof cabinet information to be accessed; the control unit of the explosion-proof cabinet can control the cabinet body corresponding to the explosion-proof cabinet information to be accessed to open based on the opening signal.

[0031] According to a fourth aspect of the present application, a chemical management device is provided, comprising:

[0032] An acquisition module is used to acquire preset storage information and real-time storage information, wherein the preset storage information includes preset label information and preset strength information and preset explosion-proof cabinet information corresponding to the preset label information, wherein the preset explosion-proof cabinet information corresponds to a preset cabinet body; the real-time storage information includes label information collected in real time, strength information corresponding to the label information, and explosion-proof cabinet information, wherein the explosion-proof cabinet information corresponds to a cabinet body of the explosion-proof cabinet;

[0033] The matching module is used to confirm whether the real-time storage information of the cabinet matches the preset storage information based on the preset storage information and the real-time storage information, and obtain a matching result.

[0034] According to a fifth aspect of the present application, a computer program product is provided, comprising a computer program or instructions, which implement the above-mentioned method for generating a video with sound when executed by a processor.

[0035] The explosion-proof cabinet of the present application can read the tag information and corresponding strength information recorded by the radio frequency tags in the cabinet in real time, so that the tags in the cabinet and their positions in the cabinet can be detected in real time, reducing the workload of managing items in the cabinet and avoiding missed detection and false detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The above and other purposes, features and advantages of the present invention will become more apparent by describing the embodiments of the present invention in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0037] Figure 1 is a schematic structural diagram of an explosion-proof cabinet according to an embodiment of the present application;

[0038] Figure 2 is a schematic diagram of the structure of a chemical management system according to an embodiment of the present application;

[0039] Figure 3 is a schematic diagram of the connection between a chemical management system and an explosion-proof cabinet according to an embodiment of the present application;

[0040] Figure 4 is a schematic flow chart of a chemical management method according to an embodiment of the present application;

[0041] Figure 5 is a schematic flow chart of a chemical management method according to another embodiment of the present application;

[0042] Figure 6 It is a schematic diagram of the structure of a chemical management device according to an embodiment of the present application. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical scheme and advantages of the present invention more obvious, the exemplary embodiments according to the present invention will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments of the present invention, and it should be understood that the present invention is not limited to the exemplary embodiments described herein. Based on the embodiments of the present invention described in the present invention, all other embodiments obtained by those skilled in the art without creative work should fall within the protection scope of the present invention.

[0044] In the prior art, it is usually impossible to collect label information in explosion-proof cabinets in real time. The main reason is that the recognition distance of the commonly used radio frequency readers is short. In order to achieve real-time collection, the radio frequency reader needs to be set inside the explosion-proof cabinet, but this will affect the reliability of the explosion-proof cabinet; if the radio frequency reader is set outside the explosion-proof cabinet, the reading operation can only be performed during the access process, which is labor-intensive and has the risk of errors and omissions.

[0045] Therefore, the present application proposes an explosion-proof cabinet, a chemical management system, a method, an apparatus and a computer program product, which are described in detail below.

[0046] First, refer to Figure 1 The explosion-proof cabinet 10 according to the embodiment of the present application is described, including a cabinet 11, a radio frequency reader 12 and a control unit 13; the radio frequency reader 12 is arranged outside the cabinet 11, and the radio frequency reader 12 can read the tag information in the radio frequency tag 21 from the radio frequency tag 21 in the cabinet 11, and can obtain the strength information of the radio frequency signal fed back by the radio frequency tag 21; the control unit 13 is connected to the radio frequency reader 12, and is used to obtain and process information, and the information includes tag information and strength information corresponding to the tag information.

[0047] In the present application, the RF reader 12 can read the tag information in the RF tag 21 in the cabinet 10. It can be understood that RF readers 12 with different working frequency bands, or with different types of tags and different protocols can achieve different reading distances. In one embodiment of the present application, the working frequency of the RF reader 12 is configured to adjust its reading range, so that the RF reader 12 outside the cabinet 11 can read the information in the RF tag 21 in the cabinet 11, but it is not limited to this. The method for achieving the reading distance can be determined according to the specific situation.

[0048] The RFID tag 21 can communicate with the RFID reader 12 at a frequency of dozens of times per second. As long as the RFID tag 21 appears within the effective identification range of the RFID reader 12, its position can be dynamically tracked and monitored, that is, the RFID reader 12 can read the tag information in the RFID tag 21 in real time from the RFID tag 21 in the explosion-proof cabinet 10. Specifically, the reading frequency of the RFID reader 12 can be set to achieve real-time reading, for example, 10-100 times / second, but not limited thereto, and the reading frequency can be specifically set according to actual needs.

[0049] The radio frequency tag 21 is used to mark the items to be monitored placed in the explosion-proof cabinet 10. The radio frequency tag 21 can be set on the items to be monitored, such as chemical containers. Figure 1 The object to be monitored is a photoresist bottle 22. Specifically, the radio frequency tag 21 can be an active tag or a passive tag.

[0050] Preferably, the radio frequency tag 21 is a passive tag. The passive tag is composed of a chip, an antenna and a substrate. The antenna is used to transmit data, and the chip is used to store tag information. The antenna and the chip are attached to the substrate. The chip contains an electrically erasable programmable read-only memory, which can store data for a long time without power supply, and can also write or erase data. When using the explosion-proof cabinet 10, the information of the item to be monitored corresponding to the radio frequency tag 21 can be written into the radio frequency tag.

[0051] The RF reader 12 can also obtain the strength information of the RF signal fed back by the RF tag 21. It can be understood that the strength information of the RF signal fed back by the RF tag 21 attenuates with the distance between the RF tag 21 and the RF reader 12, and the distance information can be obtained based on the strength information, thereby obtaining the position of the RF tag 21 and the object to be monitored corresponding to the RF tag 21.

[0052] There are two types of radio frequency readers: fixed and mobile. In the present application, the radio frequency reader 12 can be a fixed radio frequency reader, that is, during use, the radio frequency reader 12 and the cabinet 11, at least the storage position in the cabinet 11, are relatively stationary. When using the explosion-proof cabinet, the distance or distance range between different storage positions in the cabinet 11 and the radio frequency reader 12 can be different. For example, there are three layers of storage positions in the cabinet 11, and the radio frequency reader 12 is arranged above the cabinet 11. Therefore, for each layer of storage positions, the strength information is different, and based on the strength information, it can be confirmed which layer the radio frequency tag 21 is located in; in another embodiment, each layer of the cabinet 11 has a plurality of storage positions distributed horizontally, and each storage position is at a different distance from the radio frequency reader 12. Therefore, for each storage position in the layer, the strength information is different, and based on the strength information, it can be confirmed which storage position in the layer the radio frequency tag 21 is located in. The way to make the storage positions in the cabinet 11 and the radio frequency reader 12 different in distance can be determined according to the situation, and it is not exhaustive here.

[0053] Since the items in the cabinet will change only when the cabinet 11 is open, preferably, the RF reader 12 can be set to read the tag information in the RF tag 21 when the cabinet 11 is open. However, it is not limited to this. In some embodiments, the RF reader 12 continues to read the tag information in the RF tag 21 when the cabinet 11 is open and closed. In some embodiments, the RF reader 12 performs a reading operation based on a reading instruction of the control unit 13, depending on the specific situation.

[0054] In the present application, the control unit 13 may be a PLC, a single-chip microcomputer, an industrial microcomputer, etc. The control unit 13 may include a processor, a memory, and a communication interface. The processor, the memory, and the communication interface may be interconnected and communicated through a communication bus and / or other forms of connection mechanisms.

[0055] The processor can be a microcontroller unit (MCU), a central processing unit (CPU), a digital signal processor (DSP), a single-chip microcomputer and an embedded device, or other forms of processing units with data processing capabilities and / or instruction execution capabilities.

[0056] The memory may be various forms of computer-readable storage media, such as volatile memory and / or non-volatile memory. Volatile memory may include, for example, random access memory (RAM), cache memory, synchronous dynamic random access memory (SDRAM), etc. Non-volatile memory may include, for example, read-only memory (ROM), hard disk, flash memory, etc. One or more computer program instructions may also be stored on the computer-readable storage medium, and the memory 120 may run the program instructions to implement the relevant functions of the control unit described below.

[0057] The control unit 13 is connected to the radio frequency reader 12 to obtain information and process it. The control unit 13 can send the information to the relevant management system, so that the management system can manage the monitored items based on the information, but is not limited to this. In some embodiments, the explosion-proof cabinet is equipped with a display unit, and the control unit 13 can generate corresponding real-time storage status display information of the items based on the tag information and strength information, and send it to the display unit; or, the control unit 13 can judge the storage and placement status of the items based on the tag information, thereby generating prompts or alarm information, depending on the specific situation.

[0058] The explosion-proof cabinet 10 of the present application includes a radio frequency reader 12 to read the label information recorded by the radio frequency tag 21 in the cabinet 11 in real time, and to detect the items to be monitored in the cabinet 11 in real time. The radio frequency tag 21 can be bound to the photoresist bottle 22 and stored together with the explosion-proof cabinet 10, which can reduce the workload of photoresist management and avoid missed detection and false detection. The radio frequency tag 21 is bound to the photoresist bottle 22, including writing the information corresponding to the photoresist bottle 22 into the radio frequency tag 21 to form the label information, and setting the radio frequency tag 21 on the photoresist bottle 22.

[0059] According to one embodiment of the present application, the maximum reading distance of the RF reader 12 is 1m-3m. For example, the RF reader 12 can at least read all RF tags 21 within a distance of 1m. Preferably, the RF reader 12 can at least read all RF tags 21 within a distance of 3m. It can be understood that the reading distance of the RF reader 12 can be set according to the size of the cabinet 11.

[0060] For example, by configuring the working frequency band of the RF reader 12 to obtain the corresponding reading distance, the RF reader uses a medium frequency (3-30 MHz, a typical working frequency is 13.56 MHz) or high frequency (above 400 MHz) band as long as the required reading range can be achieved.

[0061] According to an embodiment of the present application, a wireless signal shielding layer (not shown) is further included on the side wall of the cabinet 11 , and the wireless signal shielding layer is configured to prevent the radio frequency tag outside the cabinet 11 from being read by the radio frequency reader.

[0062] The wireless signal shielding layer is used to shield electromagnetic signals and generally comprises a metal material. In one embodiment, the wireless signal shielding layer comprises a lead (Pb) layer.

[0063] In this embodiment, the wireless signal shielding layer is disposed on at least one side wall surface of the cabinet 11. The side wall can be any side wall of the top surface, bottom surface and side surface of the cabinet 11, depending on the location of the radio frequency tag that needs to be shielded from interference. The wireless signal shielding layer is located on the side wall, including being located on the inner surface or outer surface of the side wall. Preferably, the wireless signal shielding layer is disposed on the inner surface of the side wall of the cabinet 11.

[0064] In a specific implementation, a lead wireless signal shielding layer is set on the front, back, left and right sides of the cabinet 11 to isolate the electronic tag information on the front, back, left and right sides outside the cabinet 11, preventing the radio frequency reader 12 from reading the tag information of the radio frequency tag 21 in the explosion-proof cabinet next door, thereby improving the accuracy of tag information monitoring.

[0065] Please continue reading Figure 1 According to an embodiment of the present application, a control lock 14 is further included to control the opening and closing of the cabinet 11, and the control lock 14 is connected to the control unit 13. Optionally, the control unit 13 can control the opening and closing of the control lock 14 according to a signal of a related management system.

[0066] The control lock 14 can be arranged at any position in the explosion-proof cabinet 10 as long as the cabinet door switch of the control cabinet body 11 can be realized. Optionally, the control lock 14 is arranged at the lower part outside the cabinet body 11.

[0067] An embodiment of the present application also provides a chemical management system, which is used to connect to the above-mentioned explosion-proof cabinet 10. The explosion-proof cabinet 10 can accommodate chemical containers, and the chemical containers are bound to radio frequency tags 21. The chemical management system connected to the explosion-proof cabinet 10 includes a chemical management system connected to a control unit 13. The processing performed by the control unit 13 includes the control unit 13 sending information to the chemical management system.

[0068] The chemical management system can obtain preset storage information and real-time storage information, and confirm whether the real-time storage information of the cabinet 11 matches the preset storage information.

[0069] The preset storage information includes preset label information, strength information corresponding to the preset label information, and preset explosion-proof cabinet information, and the preset explosion-proof cabinet information corresponds to the preset cabinet body 11; the real-time storage information includes label information, strength information corresponding to the label information, and explosion-proof cabinet information, and the explosion-proof cabinet information corresponds to the cabinet body 11.

[0070] Specifically, Figure 2 As shown, the chemical management system 30 includes a storage module 31, a communication module 32, a processing module 33 and an execution module 34. The processing module 33 is electrically connected to the storage module 31, the communication module 32 and the execution module 34 respectively.

[0071] The storage module 31 is used to store preset storage information of chemicals, which may include preset label information and preset strength information and preset explosion-proof cabinet information corresponding to the preset label information, wherein the label information may include the type of chemicals, production batch number, expiration date, etc.

[0072] The communication module 32 is used to receive real-time storage information from the explosion-proof cabinet and send the real-time storage information to the processing module 33. Here, the real-time storage information may include label information, strength information corresponding to the label information, and explosion-proof cabinet information.

[0073] The processing module 33 is used to obtain the preset storage information from the storage module 31 , confirm whether the real-time storage information matches the preset storage information, and send the matching result to the execution module 34 .

[0074] The execution module 34 is used to generate a control signal based on the matching result and send the control signal to the communication module 32 .

[0075] The communication module 32 is also used to send the control signal to the explosion-proof cabinet.

[0076] In the present application, the chemical management system can be implemented by software set on a server, and the server can be a network server, a cloud server, etc. The type of the server is not specifically limited in the present application. The connection between the chemical management system and the control unit 13 can be in the form of wired communication or wireless communication. For example, wireless communication can use any communication standard or protocol, including but not limited to wireless local area network, global system of mobile communications (Global System of Mobile communication, GSM), general packet radio service (General Packet Radio Service, GPRS), Code Division Multiple Access 2000 (Code Division Multiple Access 2000, CDMA2000), broadband code division multiple access (Wi deband Code Division Multiple Access, WCDMA), time division synchronous code division multiple access (Time Division-Synchronous Code Division Multiple Access, TD-SCDMA), etc. It can be understood that the communication interface of the control unit 13 includes a transmitter and a receiver supporting any of the above protocols, so that the control unit can send label information, strength information corresponding to the label information, and explosion-proof cabinet information to the chemical management system, and receive instructions from the chemical management system.

[0077] The chemical container is, for example, a light-resistance bottle 22 . Binding the light-resistance bottle 22 to the radio frequency tag 21 includes making the tag information stored in the radio frequency tag 21 include corresponding light-resistance information, and setting the radio frequency tag 21 on the light-resistance bottle 22 .

[0078] The chemical management system of the present application can determine whether the real-time position of the radio frequency tag 21 is consistent with the preset position, so as to determine the real-time storage status of the item to be monitored, that is, the photoresist bottle 22, including whether it is misplaced, missed, or not taken away as required, etc. The "position" includes the cabinet 11 where the radio frequency tag 21 is located, and the storage position of the radio frequency tag 21 in the explosion-proof cabinet 10.

[0079] Next, see Figure 3 A chemical management system and an explosion-proof cabinet according to an embodiment of the present application are described.

[0080] In this embodiment, the chemical management system is a photoresist foolproof management system 40, the control unit is an industrial microcomputer 15, the object to be monitored, that is, the chemical container is a photoresist bottle 22, the photoresist bottle 22 stores photoresist, and the label information in the radio frequency tag 21 is associated with the photoresist stored in the photoresist bottle 22 bound thereto. Figure 2 As shown, the industrial microcomputer 15 is respectively connected to the radio frequency reader 12, the control lock 14 and the light resistance fool-proof management system 40. However, it is not limited thereto, and one or more explosion-proof cabinets 10 may be connected to the light resistance fool-proof management system 40, depending on the specific situation.

[0081] In this embodiment, a plurality of storage positions (corresponding to the positions of the photoresist bottles 22) are distributed in the cabinet 11 in an unequally spaced manner (for example, the cabinet 11 has a layered structure), so that when each photoresist bottle 22 is in its storage position, the distance between the RFID tag 21 bound to the photoresist bottle 22 and the RFID reader 12 is different, and the strength information of the fed-back RFID signal is different, thereby determining its storage position based on the strength information. However, it is not limited to this, and a storage position can be used to store one or more photoresist bottles 22, depending on the specific situation. Optionally, a unique position coordinate number can be set for each storage position so that the position can be easily and accurately determined. The photoresist foolproofing management system 40 can obtain the corresponding relationship between the position coordinate number and the label information, which can be used to prompt the user during the access process to simplify the storage process. It can be understood that obtaining the correspondence between the position coordinate number and the label information can be to obtain the position coordinate number of the storage position input by the user. After the user puts the photoresist bottle 22 into the corresponding storage position in the cabinet 11, the radio frequency reader 12 reads the radio frequency tag information of the inserted photoresist bottle, establishes the correspondence between the position coordinate number and the radio frequency tag information, and stores it in the photoresist fool-proofing management system 40; or, the correspondence between the position coordinate number and the label information is pre-generated and stored in a storage device connected to the photoresist fool-proofing management system 40, so that the photoresist fool-proofing management system 40 can directly import relevant data from the storage device to obtain the correspondence between the position coordinate number and the label information.

[0082] The light resistance foolproofing management system 40 can obtain preset storage information, which includes preset tag information and preset strength information and preset explosion-proof cabinet information corresponding to the preset tag information. The preset tag information corresponds to the tag information in the radio frequency tag 21 that should be stored in the explosion-proof cabinet 10; the preset strength information includes the radio frequency signal strength information that can be fed back to the radio frequency reader 12 when the corresponding radio frequency tag 21 presets the storage position in the cabinet 11, or its associated information, which can be the distance information or position information corresponding to the strength, etc., depending on the specific situation; the preset explosion-proof cabinet information corresponds to the preset cabinet 11.

[0083] The real-time stored information includes label information, strength information corresponding to the label information, and explosion-proof cabinet information corresponding to the control unit 13 that sends the label information. Label information includes label information sent by the control unit 13 to the light-blocking fool-proofing management system 40, or its associated information; strength information includes strength information sent by the control unit 13 to the light-blocking fool-proofing management system 40, or its associated information, and the associated information may be distance information or position information corresponding to the strength, etc., depending on the specific situation; explosion-proof cabinet information corresponds to the cabinet 11, and for example, the light-blocking fool-proofing management system 40 obtains the explosion-proof cabinet information by identifying the control unit 13 that sends the label information, or the information obtained and processed by the processing unit 13 includes cabinet information.

[0084] In some embodiments, the explosion-proof cabinet 10 includes a plurality of cabinets 11, and radio frequency readers 12 corresponding to the cabinets 11 one by one, each radio frequency reader 12 is connected to the control unit 13, and the information acquired and processed by the control unit 13 also includes the information of the cabinet 11. It can be understood that the information of the cabinet 11 is associated with the corresponding radio frequency reader 12, and the control unit 13 can acquire the cabinet information according to the radio frequency reader 12 that reads the tag information from the radio frequency tag 21. In this embodiment, the preset explosion-proof cabinet information includes the preset cabinet information, and optionally, also includes the control unit information; the explosion-proof cabinet information includes the cabinet information sent by the control unit 13 to the photoresistance foolproofing management system 40, and optionally, also includes the control unit 13 information. It can be understood that in the embodiment in which the explosion-proof cabinet 10 includes one or more cabinets 11, the preset explosion-proof cabinet information and the explosion-proof cabinet information both correspond to the cabinet 11 in the explosion-proof cabinet 10. Specifically, when the explosion-proof cabinet 10 includes one cabinet 11 , the preset explosion-proof cabinet information and the explosion-proof cabinet information are associated with the one cabinet 11 ; when the explosion-proof cabinet 10 includes multiple cabinets 11 , the preset explosion-proof cabinet information and the explosion-proof cabinet information are associated with one of the multiple cabinets 11 .

[0085] Optionally, confirming whether the real-time storage information matches the preset storage information includes: if the explosion-proof cabinet information is consistent with the preset explosion-proof cabinet information, and the strength information corresponding to the label information, and the preset label information and the preset strength information corresponding to the preset label information correspond one to one, then confirming that the real-time storage information of the cabinet 11 corresponding to the consistent explosion-proof cabinet information matches the preset storage information, otherwise confirming that the real-time storage information of the cabinet 11 corresponding to the consistent explosion-proof cabinet information does not match the preset storage information. In this way, it can be confirmed that the real-time storage information of the cabinet 11 corresponding to the consistent explosion-proof cabinet information matches or does not match the preset storage information, thereby realizing confirmation of whether the storage of each cabinet 11 is correct.

[0086] In some embodiments, the explosion-proof cabinet 10 includes a control lock 14, which is used to control the opening and closing of the cabinet 11. The control lock 14 is connected to the control unit 13, and the light resistance fool-proofing management system 40 can send a control signal to the control unit 13, and the control unit 13 can control the control lock 14 based on the control signal. In this way, the light resistance fool-proofing management system 30 can control the opening and closing of the cabinet 11.

[0087] In some embodiments, when the light resistance foolproofing management system 40 determines that there is no match, the control signal includes a mismatch signal, and the mismatch signal includes mismatched cabinet information. The control unit 13 can control the control lock 14 based on the mismatch signal to prevent the cabinet 11 from being closed. In this way, the position of the light resistance bottle 22 can be monitored in real time. When the real-time storage information in the cabinet 11 is inconsistent with the preset storage information, there must be an access operation error. By preventing the cabinet 11 from being closed, the position placement error and the wrong operation in the placement can be discovered in time, which reduces the workload of light resistance management and avoids missed detection and false detection.

[0088] In some embodiments, the light-resistance fool-proofing management system 40 can obtain access instructions, and the access instructions include the explosion-proof cabinet information to be accessed. The light-resistance fool-proofing management system 40 can, based on the access instructions: before confirming whether the real-time storage information of the cabinet 11 matches the preset storage information, re-acquire the preset storage information, and make the control signal sent to the explosion-proof cabinet 10 corresponding to the explosion-proof cabinet information to be accessed include an opening signal, and the opening signal corresponds to the explosion-proof cabinet information; the control unit 13 of the explosion-proof cabinet 10 can control the control lock 14 based on the opening signal, so that the cabinet 11 corresponding to the explosion-proof cabinet information can be opened.

[0089] It can be understood that the access instruction includes the explosion-proof cabinet information to be accessed, that is, the access instruction includes the cabinet information of the cabinet 11 to be opened. Optionally, the access instruction also includes relevant information about the change of the preset storage information of the photoresist bottle 22 in the cabinet 11, for example, including the changed explosion-proof cabinet 10, the label information of the radio frequency tag 21 bound to the photoresist bottle 22 after access, and the strength information of the radio frequency tag 21 at the corresponding storage position, so that the photoresist foolproofing management system 40 can directly re-acquire the preset storage information based on the access instruction.

[0090] The storage status of the photoresist bottle 22 in the cabinet 11 will change only when the cabinet 11 is open. The photoresist foolproof management system 40 of this embodiment can perform the following operations: re-acquire the preset storage information based on the access instruction, open the corresponding cabinet 11 based on the opening signal, and open the corresponding explosion-proof cabinet 10 for easy access during access, and then confirm whether the real-time storage information is correct based on the updated preset storage information during the cabinet 11 opening. However, it is not limited to this. In some embodiments, the photoresist foolproof management system 40 can obtain and verify whether the real-time storage information is correct in real time, or verify based on the instruction, and generate an alarm when it is incorrect.

[0091] In the explosion-proof cabinet 10, the radio frequency reader 12 is arranged outside the cabinet 11. For example, the radio frequency reader 12 can be located on one side of the upper surface of the explosion-proof cabinet 11. The radio frequency reader 12 is used to read the label information from the radio frequency tag 21. The signal collection end of the radio frequency reader 12 faces the photoresist bottle 22 so that the label information of the radio frequency tag 21 on the photoresist bottle can be accurately read. By arranging the radio frequency reader 12 outside the cabinet 11, the label information in the cabinet 11 can be detected in real time without destroying the structure of the cabinet 11 and affecting the explosion-proof effect.

[0092] The industrial microcomputer 15 is connected to the radio frequency reader 12 for acquiring information, including tag information and strength information corresponding to the tag information. Optionally, the information also includes cabinet information. The industrial microcomputer 15 sends the information to the light resistance foolproofing management system 40.

[0093] Through the photoresist fool-proof management system 40 of this embodiment, the label information and strength information recorded by the radio frequency tag 12 on the photoresist bottle 22 in the explosion-proof cabinet body 11 can be read in real time, so that the position of the photoresist bottle 22 can be monitored in real time, and the positioning error and the wrong operation in taking and placing can be discovered in time; the workload of photoresist management is reduced, and missed detection and false detection are avoided.

[0094] Preferably, the explosion-proof cabinet 10 also includes an indicator light (not shown), which is arranged outside the cabinet 11 and connected to the control unit 13. The indicator light may include two indicator lights of different colors, or may include an indicator light that can display two different colors respectively; the two colors may be arbitrarily set, such as red and green. In one embodiment, when there is a mismatch in the cabinet 11, the control unit can drive the indicator light based on the mismatch signal to prompt the user, for example, by lighting a red light to remind the user that the position is incorrect. When the explosion-proof cabinet is closed normally, the control unit controls the indicator light to display green.

[0095] According to an embodiment of the present application, when it is determined that the cabinet 11 does not match, the light resistance fool-proofing management system 40 can generate an alarm. In a specific implementation, the light resistance fool-proofing management system 40 generates an alarm message after determining that the duration of the cabinet 11 mismatching meets a preset time threshold. Preferably, the preset time threshold value ranges from 5 seconds to 1 minute, which is not specifically limited in the present application. Optionally, the alarm message includes the mismatched cabinet information, and optionally, the alarm message can be displayed on the light resistance fool-proofing management system 40.

[0096] Through the photoresist fool-proofing management system 40 of the present embodiment, it is possible to confirm whether the real-time storage information of the cabinet 11 matches the preset storage information, so that the position of the photoresist bottle 22 can be monitored in real time, and erroneous operations during picking and placing can be discovered in time, ensuring that the photoresist can be detected in real time at each link of the wafer factory, reducing the risk of inconsistent photoresist materials and wrong machines, and reducing losses in the wafer factory.

[0097] The present application also provides a method for managing chemicals. Figure 4 A chemical management method according to one embodiment of the present application is described.

[0098] like Figure 4 As shown, the chemical management method may include the following steps S410 to S420.

[0099] Step S410, obtaining preset storage information and real-time storage information, wherein the preset storage information includes preset label information and preset strength information and preset explosion-proof cabinet information corresponding to the preset label information, wherein the preset explosion-proof cabinet information corresponds to the preset cabinet body; the real-time storage information includes label information collected in real time, strength information corresponding to the label information, and explosion-proof cabinet information, wherein the explosion-proof cabinet information corresponds to the cabinet body of the explosion-proof cabinet;

[0100] Step S420: confirm whether the real-time storage information of the cabinet matches the preset storage information based on the preset storage information and the real-time storage information, and obtain a matching result.

[0101] In one embodiment of the present application, the explosion-proof cabinet includes a control unit, and the chemical management method further includes:

[0102] Based on the matching result, a first control signal is sent to the control unit, and the control unit controls the opening and closing of the cabinet based on the first control signal.

[0103] Here, the first control signal may be an opening signal to control the opening of the cabinet; or may be a closing signal to control the closing of the cabinet.

[0104] Next, see Figure 5To describe a chemical management method according to another embodiment of the present application.

[0105] like Figure 5 As shown, in one embodiment of the present application, the chemical management method includes:

[0106] Obtaining an access instruction, wherein the access instruction includes information of the explosion-proof cabinet to be accessed;

[0107] Acquiring the preset storage information;

[0108] Sending a control signal to the explosion-proof cabinet corresponding to the explosion-proof cabinet information to be accessed based on the preset storage information, wherein the control signal includes an opening signal, and the opening signal corresponds to the explosion-proof cabinet information to be accessed; the control unit of the explosion-proof cabinet can control the cabinet body corresponding to the explosion-proof cabinet information to be accessed to open based on the opening signal;

[0109] Get real-time storage information;

[0110] confirming whether the real-time storage information of the cabinet matches the preset storage information based on the preset storage information and the real-time storage information;

[0111] If they match, a closing signal is sent to the control unit, and the control unit controls the closing of the cabinet based on the first control signal;

[0112] If there is no match, an opening signal is sent to the control unit, and the control unit controls the opening of the cabinet based on the opener signal.

[0113] The present application also provides a chemical management device. Figure 6 A chemical management device according to one embodiment of the present application is described.

[0114] like Figure 6 As shown, the chemical management device 600 may include:

[0115] The acquisition module 610 is used to acquire preset storage information and real-time storage information, wherein the preset storage information includes preset label information and preset strength information and preset explosion-proof cabinet information corresponding to the preset label information, wherein the preset explosion-proof cabinet information corresponds to the preset cabinet body; the real-time storage information includes label information collected in real time, strength information corresponding to the label information, and explosion-proof cabinet information, wherein the explosion-proof cabinet information corresponds to the cabinet body of the explosion-proof cabinet;

[0116] The matching module 620 is used to confirm whether the real-time storage information of the cabinet matches the preset storage information based on the preset storage information and the real-time storage information, and obtain a matching result.

[0117] The chemical management device 500 provided in this embodiment is used to execute the technical solution in any of the aforementioned method embodiments, and its implementation principle and technical effects are similar and will not be repeated here.

[0118] According to a fifth aspect of the present application, a computer program product is provided, comprising a computer program or instructions, which implement the above-mentioned method for generating a video with sound when executed by a processor.

[0119] The computer program product provided in this embodiment is used to execute the technical solution in any of the aforementioned method embodiments. Its implementation principle and technical effects are similar and will not be repeated here.

[0120] Although example embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above example embodiments are merely exemplary and are not intended to limit the scope of the present invention thereto. Various changes and modifications may be made therein by one of ordinary skill in the art without departing from the scope and spirit of the present invention. All such changes and modifications are intended to be included within the scope of the present invention as required by the appended claims.

[0121] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of the present invention.

[0122] In the several embodiments provided in this application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic, for example, the division of the units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another device, or some features can be ignored or not executed.

[0123] In the description provided herein, a large number of specific details are described. However, it is understood that embodiments of the present invention can be practiced without these specific details. In some instances, well-known methods, structures and techniques are not shown in detail so as not to obscure the understanding of this description.

[0124] Similarly, it should be understood that in order to streamline the present invention and help understand one or more of the various inventive aspects, in the description of the exemplary embodiments of the present invention, the various features of the present invention are sometimes grouped together into a single embodiment, figure, or description thereof. However, the method of the present invention should not be interpreted as reflecting the following intention: the claimed invention requires more features than the features explicitly stated in each claim. More specifically, as reflected in the corresponding claims, the inventive point is that the corresponding technical problem can be solved with less than all the features of a single disclosed embodiment. Therefore, the claims following the specific embodiment are hereby expressly incorporated into the specific embodiment, wherein each claim itself serves as a separate embodiment of the present invention.

[0125] It will be understood by those skilled in the art that, except for mutually exclusive features, all features disclosed in this specification (including the accompanying claims, abstracts and drawings) and all processes or units of any method or device disclosed in this specification may be combined in any combination. Unless otherwise expressly stated, each feature disclosed in this specification (including the accompanying claims, abstracts and drawings) may be replaced by an alternative feature that provides the same, equivalent or similar purpose.

[0126] In addition, those skilled in the art will appreciate that, although some embodiments described herein include certain features included in other embodiments but not other features, the combination of features of different embodiments is meant to be within the scope of the present invention and form different embodiments. For example, in the claims, any one of the claimed embodiments may be used in any combination.

[0127] The various component embodiments of the present invention may be implemented in hardware, or in software modules running on one or more processors, or in a combination thereof. It should be understood by those skilled in the art that a microprocessor or digital signal processor (DSP) may be used in practice to implement some or all of the functions of some modules in the article analysis device according to an embodiment of the present invention. The present invention may also be implemented as a device program (e.g., a computer program and a computer program product) for executing part or all of the methods described herein. Such a program implementing the present invention may be stored on a computer-readable medium, or may be in the form of one or more signals. Such a signal may be downloaded from an Internet website, or provided on a carrier signal, or provided in any other form.

[0128] It should be noted that the above embodiments illustrate the present invention rather than limit it, and that those skilled in the art may devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference symbol between brackets shall not be construed as a limitation on the claims. The word "comprising" does not exclude the presence of elements or steps not listed in the claims. The word "one" or "an" preceding an element does not exclude the presence of a plurality of such elements. The present invention may be implemented by means of hardware comprising a number of different elements and by means of a suitably programmed computer. In a unit claim enumerating a number of devices, several of these devices may be embodied by the same hardware item. The use of the words first, second, and third, etc., does not indicate any order. These words may be interpreted as names.

[0129] The above is only a specific embodiment of the present invention or an explanation of a specific embodiment. The protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. The protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. An explosion-proof cabinet, characterized in that: It includes a cabinet, a radio frequency reader and a control unit; The RF reader is arranged outside the cabinet, and the RF reader can read the tag information in the RF tag from the RF tag in the cabinet, and can obtain the strength information of the RF signal fed back by the RF tag; The control unit is connected to the radio frequency reader and is used to obtain and process information, where the information includes the tag information and the strength information corresponding to the tag information.

2. The explosion-proof cabinet according to claim 1, characterized in that: The maximum reading distance of the radio frequency reader is 1m-3m.

3. The explosion-proof cabinet according to claim 1, characterized in that: It also includes a wireless signal shielding layer located on the side wall of the cabinet, and the wireless signal shielding layer is configured to prevent the radio frequency tag outside the cabinet from being read by the radio frequency reader.

4. The explosion-proof cabinet according to claim 1, characterized in that: The explosion-proof cabinet comprises a control lock, which is used to control the opening and closing of the cabinet body, and the control lock is connected to the control unit.

5. The explosion-proof cabinet according to claim 1, characterized in that: The explosion-proof cabinet includes a plurality of cabinets and a plurality of radio frequency readers. The cabinets correspond to the radio frequency readers one by one. The plurality of radio frequency readers are all connected to the control unit. The information acquired and processed by the control unit also includes cabinet information.

6. A chemical management system, used for connecting to the explosion-proof cabinet according to claims 1-4, wherein the cabinet can accommodate chemical containers, the chemical containers are bound to the radio frequency tags, the chemical management system is connected to the explosion-proof cabinet including the chemical management system is connected to the control unit, the processing includes the control unit sending the information to the chemical management system, characterized in that: The chemical management system can obtain preset storage information and real-time storage information, and confirm whether the real-time storage information of the cabinet matches the preset storage information; The preset storage information includes preset label information and preset strength information and preset explosion-proof cabinet information corresponding to the preset label information, and the preset explosion-proof cabinet information corresponds to the preset cabinet body; the real-time storage information includes the label information, the strength information corresponding to the label information, and explosion-proof cabinet information, and the explosion-proof cabinet information corresponds to the cabinet body.

7. The chemical management system according to claim 6, characterized in that: The confirming whether the real-time storage information of the cabinet matches the preset storage information includes: If the explosion-proof cabinet information is consistent with the preset explosion-proof cabinet information, and the label information and the strength information corresponding to the label information correspond to the preset label information, and there is a one-to-one correspondence between the preset label information and the preset strength information corresponding to the preset label information, then it is confirmed that the real-time storage information of the cabinet corresponding to the consistent explosion-proof cabinet information matches the preset storage information, otherwise it is confirmed that the real-time storage information of the explosion-proof cabinet corresponding to the consistent cabinet information does not match the preset storage information.

8. The chemical management system according to claim 6, characterized in that: The explosion-proof cabinet includes a control lock, which is used to control the opening and closing of the cabinet, and the control lock is connected to the control unit; The chemical management system can send a control signal to a control unit, and the control unit can control the control lock based on the control signal.

9. The chemical management system according to claim 8, characterized in that: When the chemical management system confirms that the real-time storage information of the explosion-proof cabinet does not match the preset storage information, the control signal sent to the mismatched explosion-proof cabinet includes a mismatch signal, and the mismatch signal includes mismatched cabinet information. The control unit can control the control lock based on the mismatch signal so that the cabinet cannot be closed.

10. The chemical management system according to claim 8, characterized in that: The chemical management system can obtain access instructions, and the access instructions include information of explosion-proof cabinets to be accessed; The chemical management system can, based on the access instruction, before confirming whether the real-time storage information of the cabinet matches the preset storage information: The preset storage information is reacquired, and the control signal sent to the explosion-proof cabinet corresponding to the explosion-proof cabinet information to be accessed includes an opening signal, and the opening signal corresponds to the explosion-proof cabinet information; the control unit of the explosion-proof cabinet can control the control lock based on the opening signal so that the cabinet body corresponding to the explosion-proof cabinet information can be opened.

11. A chemical management method, characterized in that: include: Acquire preset storage information and real-time storage information, wherein the preset storage information includes preset label information and preset strength information and preset explosion-proof cabinet information corresponding to the preset label information, wherein the preset explosion-proof cabinet information corresponds to the preset cabinet body; the real-time storage information includes label information collected in real time, strength information corresponding to the label information, and explosion-proof cabinet information, wherein the explosion-proof cabinet information corresponds to the cabinet body of the explosion-proof cabinet; Based on the preset storage information and the real-time storage information, it is confirmed whether the real-time storage information of the cabinet matches the preset storage information to obtain a matching result.

12. The chemical management method according to claim 11, characterized in that: The explosion-proof cabinet includes a control unit, and the chemical management method further includes: Based on the matching result, a first control signal is sent to the control unit, and the control unit controls the opening and closing of the cabinet based on the first control signal.

13. The chemical management method according to claim 12, characterized in that: Before obtaining the preset storage information and the real-time storage information, the chemical management method further includes: Obtaining an access instruction, wherein the access instruction includes information of the explosion-proof cabinet to be accessed; Reacquire the preset storage information, and send a second control signal to the explosion-proof cabinet corresponding to the explosion-proof cabinet information to be accessed based on the preset storage information, wherein the second control signal includes an opening signal, and the opening signal corresponds to the explosion-proof cabinet information to be accessed; the control unit of the explosion-proof cabinet can control the cabinet body corresponding to the explosion-proof cabinet information to be accessed to open based on the opening signal.

14. A chemical management device, characterized in that: include: An acquisition module is used to acquire preset storage information and real-time storage information, wherein the preset storage information includes preset label information and preset strength information and preset explosion-proof cabinet information corresponding to the preset label information, wherein the preset explosion-proof cabinet information corresponds to a preset cabinet body; the real-time storage information includes label information collected in real time, strength information corresponding to the label information, and explosion-proof cabinet information, wherein the explosion-proof cabinet information corresponds to a cabinet body of the explosion-proof cabinet; The matching module is used to confirm whether the real-time storage information of the cabinet matches the preset storage information based on the preset storage information and the real-time storage information, and obtain a matching result.

15. A computer program product comprising a computer program or instructions, characterized in that When the computer program or instruction is executed by a processor, the chemical management method according to claim 11 or 12 is implemented.

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