Positioning device, mounting device, positioning method, and mounting method

Abstract

The positioning device includes a camera, a lens disposed along an imaging direction of the camera, a light synthesis unit, and a calculation device. When the first member and the second member are positioned, the light synthesis unit is disposed between the bonding head and the stage, synthesizes light incident from the bonding head side and light incident from the stage side, and reflects the synthesized light toward the lens side. The camera captures a camera image based on light incident through the lens. The arithmetic device obtains a position correction amount for the first member and the second member on the basis of the camera image.

Description

Technical Field

[0001] The present disclosure relates to a positioning device, a mounting device, a positioning method, and a mounting method used when positioning electronic components or the like, for example. Background Art

[0002] Conventionally, when manufacturing electronic components, cameras are used to grasp the positions of components such as substrates and chip components, and to position each component. At this time, the movement for correcting the positional deviation of each component is performed based on the positional deviation amount recognized by the camera, and the movement amount of the bonding head and the worktable after recognition and correction is minimized, which can reduce the movement error.

[0003] For example, in Patent Document 1, an optical system is used that arranges the components just above the mounting position of the substrate and can identify the positioning marks on the back of the chip and the surface of the substrate that serve as the bonding surfaces to each other. In particular, Patent Document 1 separately constitutes an optical system for an upper field of view that photographs the positioning marks on the back of the chip and an optical system for a lower field of view that photographs the positioning marks on the surface of the substrate, so that the optical axis of the upper field of view and the optical axis of the lower field of view after reflection by the prism become coaxial, and the upper field of view and the lower field of view can be photographed coaxially. With such a structure, if the horizontal position of the chip and the substrate is aligned according to the information photographed by the optical system, the chip can be mounted on the substrate only by lowering the movement of the bonding head, thereby minimizing the error caused by the movement of the device and enabling high-precision mounting.

[0004] Prior Art Literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent No. 4642565 Summary of the invention

[0007] However, when ultra-high-precision positioning is performed below 10 μm, if a part of the optical system for chip recognition and the optical system for substrate recognition, such as the prism, reflector, camera, or multiple components, undergoes slight thermal expansion, a deviation will occur in the optical path. As a result, the coaxiality of the optical path for chip recognition and the optical path for substrate recognition will be destroyed, and the positioning accuracy will deteriorate.

[0008] Therefore, an object of the present disclosure is to provide a positioning device, a mounting device, a positioning method, and a mounting method that can suppress a decrease in positioning accuracy.

[0009] In order to achieve the above-mentioned purpose, an embodiment of the present invention involves a positioning device that positions the first component and the second component when the first component held by a bonding head is installed on the second component placed on a workbench. The positioning device includes a camera, a lens arranged along the optical axis direction of the camera, an optical element and a computing device. When positioning the first component and the second component, the optical element is arranged between the bonding head and the workbench, synthesizes the light incident from the bonding head side and the light incident from the workbench side, and reflects them toward the lens side. The camera captures a camera image based on the light incident through the lens, and the computing device calculates the position correction amount of the first component and the second component based on the camera image.

[0010] According to the present disclosure, it is possible to suppress a decrease in positioning accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a side view of the positioning device according to the first embodiment.

[0012] Figure 2 This is a flowchart for explaining the operation of the positioning device according to the first embodiment.

[0013] Figure 3 This is an example of a camera image.

[0014] Figure 4 It is a side view of the positioning device according to the second embodiment.

[0015] Figure 5 It is a side view of the positioning device according to the third embodiment.

[0016] Figure 6 It is a side view of the positioning device involved in the fourth embodiment.

[0017] Figure 7 It is a side view of the positioning device involved in the fifth embodiment.

[0018] Figure 8 It is a side view of the positioning device involved in the sixth embodiment.

[0019] Fig. 9 It is a side view of the positioning device involved in the seventh embodiment.

[0020] Fig.10 It is a side view of the positioning device involved in the eighth embodiment.

[0021] Fig.11 It is a side view of the positioning device involved in the ninth embodiment. DETAILED DESCRIPTION

[0022] Hereinafter, embodiments of the present invention will be described in detail based on the drawings. The following description of the preferred embodiments is merely illustrative in nature and is not intended to limit the present invention, its applications, or its uses.

[0023] (First embodiment)

[0024] Figure 1 In the following description, the imaging direction of the camera 1 (optical axis direction of the lens 2) is the Y direction, the vertical direction is the Z direction, and the direction perpendicular to the Y and Z directions is the X direction.

[0025] like Figure 1 As shown, the positioning device 100 according to the first embodiment includes a camera 1, a lens 2, a light synthesis unit 3 (optical element), and a computing device 8. An example of the computing device 8 is a computer having a processor. Figure 1 As shown, the first component P1 is held by the bonding head 5, and the second component P2 is placed on the table 6. The positioning device 100, the bonding head 5, and the table 6 correspond to a mounting device.

[0026] The camera 1 captures an image of the first component P1 held by the bonding head 5 and the second component P2 placed on the table 6 via the lens 2 and the light combining unit 3 (details will be described later). The camera 1 outputs the captured camera image to the computing device 8 .

[0027] The lens 2 is installed so that the optical axis coincides with the imaging direction of the camera 1. The lens 2 is preferably a telecentric optical system in which the position change is small even if the focal position is slightly deviated, but is not limited thereto if the workpiece conveyance accuracy to the focal position is high.

[0028] The photosynthesis unit 3 is arranged on the optical axis of the lens 2 (in the imaging direction of the camera 1 ).

[0029] The photosynthesizing unit 3 includes a half mirror 3 a and a reflecting mirror 3 b .

[0030] like Figure 1As shown, the half mirror 3a reflects the light incident from the bonding head 5 toward the optical axis direction of the lens 2. In addition, the half mirror 3a reflects the light incident from the workbench 6 toward the reflector 3b. The reflector 3b reflects the light incident from the half mirror 3a toward the optical axis direction of the lens 2. That is, the half mirror 3a and the reflector 3b synthesize the light incident from the bonding head 5 and the light incident from the workbench 6, and reflect them toward the lens 2 side. For example, the half mirror 3a is configured to have an inclination of 45° relative to the XZ plane. In addition, the half mirror 3a can also reflect the light incident from the bonding head 5 toward the reflector 3b, and reflect the light incident from the workbench 6 toward the optical axis direction of the lens 2. In addition, the half mirror 3a does not necessarily have to be box-shaped, and can also be a flat plate type.

[0031] like Figure 1 As shown, the lens 2 and the light synthesizing unit 3 are held by the optical unit base 9. In addition, a position adjustment mechanism such as a focus may be placed between the lens 2 and the optical unit base 9. In addition, a position fine adjustment mechanism may be placed between the light synthesizing unit 3 and the optical unit base 9. In addition, in the present embodiment, the lens 2 and the light synthesizing unit 3 are fixed by the same optical unit base 9, but the optical unit base 9 may be provided separately for the lens 2 and the light synthesizing unit 3.

[0032] As described above, the first component P1 is held by the bonding head 5, and the second component P2 is placed on the workbench 6. For example, the first component P1 is a chip component, and the second component P2 is a substrate. The first component P1 and the second component P2 are parts of finished products such as electronic components. The first component P1 and the second component P2 are held by the bonding head 5 and placed on the workbench 6, respectively, after being picked up by, for example, a supply head or the like (not shown).

[0033] In addition, although not shown in the figure, the joint head 5 and the workbench 6 can be changed in position by a moving mechanism. Specifically, the joint head 5 and the workbench 6 can change their relative positions in the XY direction as the horizontal direction, the Z direction as the vertical direction, and the direction of θ relative to the Z axis. Regarding the joint head 5 and the workbench 6, during the installation operation, the joint head 5 moves toward the workbench 6 in the -Z direction. In this case, the optical system (camera 1, lens 2, photosynthesis unit 3, etc.) moves in the Y direction or the X direction (forward and backward) so that the joint head 5 does not collide with the photosynthesis unit 3. At this time, the optical system can be moved as a whole, or only the photosynthesis unit 3 can be moved backward.

[0034] (Regarding the operation of the positioning device)

[0035] Figure 2 This is a flowchart for explaining the operation of the positioning device according to the first embodiment.

[0036] First, the workpiece is set in the positioning device (step S1). Specifically, the bonding head 5 holds the first component P1 through the supply head (not shown), and the second component P2 is placed on the workbench 6. At this time, position alignment points are given on the surfaces of the first component P1 and the second component P2, respectively. The first component P1 is held by the bonding head 5 and the second component P2 is placed on the workbench 6 in a manner that these position alignment points are opposite to each other. In addition, for example, if it is a flip chip bonder, the position alignment point is a mark or an electrode. In addition, if it is a flip chip bonder, the first component P1 is held by the bonding head 5 after being picked up by the supply head and turned upside down. On the other hand, if it is a die bonder, it is held by the bonding head 5 without being turned upside down after being picked up by the supply head. At this time, it is often temporarily placed on a dedicated workbench (not shown in the figure), etc., but the path until the bonding head 5 holds the first component is not limited. In addition, in the die bonder type, the first component P1 may be directly picked up from the wafer by the bonding head 5 without using a supply head.

[0037] The camera 1 photographs the first component P1 and the second component P2 (step S2). Specifically, the camera 1, the lens 2, and the light synthesizing unit 3 are moved, and the light synthesizing unit 3 is arranged between the first component P1 (joining head 5) and the second component P2 (work table 6). Furthermore, the camera 1 outputs the camera image A obtained by photographing the first component P1 and the second component P2 to the computing device 8.

[0038] The computing device 8 obtains the relative position of the first component P1 and the second component P2 based on the camera image A, and calculates the position correction amount of the first component P1 and the second component P2 (step S3 ). Specifically, the positioning mark included in the camera image A is detected. Figure 3 (a) is an example of a camera image according to the first embodiment. Figure 3 In (a), the marks M1 and M2 are marks used for positioning the first part P1 and the second part P2, respectively. The position where the marks M1 and M2 overlap each other becomes the reference position of the first part P1 and the second part P2. That is, the distance between the marks M1 and M2 becomes the position correction amount of the first part P1 and the second part P2. Figure 3 In FIG. 1 , the mark M1 is set to a cross shape and the mark M2 is set to a square shape, but the shapes of the marks M1 and M2 can be set arbitrarily.

[0039] The computing device 8 determines whether position correction is required based on the calculated position correction amount (step S4). When the position correction amount is greater than a given value, the computing device 8 determines that position correction is required (yes in step S4), and corrects (moves) the positions of the first component P1 and the second component P2 based on the position correction amount calculated in step S3 (step S5). Then, the process returns to step S2.

[0040] On the other hand, when the position correction amount is less than the given value, the computing device 8 determines that position correction is not required (Yes in step S4), and performs the mounting operation (step S6). Specifically, the bonding head 5 is moved toward the workbench 6 in the Z direction to place the first component P1 on the second component P2.

[0041] As described above, the positioning device 100 according to the first embodiment includes a camera 1, a lens 2 arranged along the shooting direction of the camera 1, a light synthesis unit 3 (optical element), and an operation device 8. When positioning the first component P1 and the second component P2, the light synthesis unit 3 is arranged between the joint head 5 and the workbench 6, synthesizes the light incident from the joint head 5 side and the light incident from the workbench 6 side, and reflects it to the lens 2 side. The camera 1 captures the camera image A based on the light incident through the lens 2. The operation device 8 calculates the position correction amount of the first component P1 and the second component P2 based on the camera image A. As a result, the positions of the first component P1 and the second component P2 can be recognized by one camera, so that the number of components constituting the optical system can be reduced. Therefore, the occurrence of thermal expansion of the components constituting the optical system can be suppressed, and the decrease in positioning accuracy can be suppressed.

[0042] (Second embodiment)

[0043] Figure 4 A side view of a positioning device according to a second embodiment is shown. Figure 4 The positioning device and Figure 1 The structure is substantially the same, but the coaxial illumination 11 and oblique illuminations 12 a and 12 b (second illumination and third illumination) are further provided.

[0044] The coaxial illumination 11 (first illumination, fourth illumination) irradiates the light to the first component P1 and the second component P2 from the Z direction by irradiating the light to the photosynthesizing unit 3 in the Y direction via the half mirror 13. The oblique illumination 12a (second illumination) irradiates the light to the first component P1 from an oblique direction (a direction oblique to the direction from the photosynthesizing unit 3 to the first component P1). The oblique illumination 12b (third illumination) irradiates the light to the second component P2 from an oblique direction (a direction oblique to the direction from the photosynthesizing unit 3 to the second component P2).

[0045] In the second embodiment, the coaxial illumination 11 and the oblique illumination 12a, 12b are used to more clearly display the marks M1, M2 respectively assigned to the first component P1 and the second component P2 on the camera image A. Therefore, the position correction amount of the first component P1 and the second component P2 can be more accurately obtained. In addition, the positioning device 100 involved in the present embodiment may also include the coaxial illumination 11, but not the oblique illumination 12a, 12b. In addition, the positioning device 100 involved in the present embodiment may also include the oblique illumination 12a, 12b instead of the coaxial illumination 11. Regardless of the structure, the marks M1, M2 respectively assigned to the first component P1 and the second component P2 can be more clearly displayed on the camera image A. Therefore, the position correction amount of the first component P1 and the second component P2 can be more accurately obtained.

[0046] (Third embodiment)

[0047] Figure 5 A side view of a positioning device according to a third embodiment is shown. Figure 5 The positioning device and Figure 4 The structure is substantially the same, but mechanical shutters 21 and 22 are further provided.

[0048] The mechanical shutter 21 (first shielding unit, third shielding unit) is arranged between the photosynthesis unit 3 and the bonding head 5. The mechanical shutter 22 (first shielding unit, fourth shielding unit) is arranged between the photosynthesis unit 3 and the workbench 6. The mechanical shutters 21 and 22 are driven by a shutter driving unit (not shown) to be opened and closed. Specifically, when the mechanical shutter 21 is closed, the incoming light from the bonding head 5 to the photosynthesis unit 3 (half mirror 3a) is blocked. In addition, when the mechanical shutter 22 is closed, the incoming light from the workbench 6 to the photosynthesis unit 3 (half mirror 3a) is blocked.

[0049] Next, the operation of the positioning device in the third embodiment will be described. Figure 2 The flowchart has the same actions, but the actions of steps S2 and S3 are different.

[0050] In step S2, two camera images A are captured. Specifically, the camera 1 captures the camera image A1 (the first camera image, see FIG. 1 ) with the mechanical shutter 21 opened and the mechanical shutter 22 closed. Figure 3 Next, the camera 1 performs shooting with the mechanical shutter 21 closed and the mechanical shutter 22 opened, and shoots a camera image A2 (a second camera image, see Figure 3(c)). At this time, the first component P1 is captured in the camera image A1, and the second component P2 is captured in the camera image A2.

[0051] Then, in step S3 , the marks used for positioning are detected from the camera images A1 and A2 , respectively, and the position correction amounts of the first component P1 and the second component P2 are calculated.

[0052] In the third embodiment, the first component P1 and the second component P2 are photographed in different camera images A (camera images A1 and A2) by opening and closing the mechanical shutters 21 and 22 (first shielding means). Therefore, by changing the photographing conditions for each of the camera images A1 and A2, the marks M1 and M2 respectively given to the first component P1 and the second component P2 can be photographed more clearly. Therefore, the position correction amounts of the first component P1 and the second component P2 can be obtained more accurately.

[0053] (Fourth embodiment)

[0054] Figure 6 A side view of a positioning device according to a fourth embodiment is shown. Figure 6 The positioning device and Figure 4 The configuration is substantially the same, but electronic shutters 23 and 24 (first blocking means) are further provided.

[0055] The electronic shutter 23 is arranged between the photosynthesis unit 3 and the bonding head 5. The electronic shutter 24 is arranged between the photosynthesis unit 3 and the workbench 6. The electronic shutters 23 and 24 are respectively composed of, for example, liquid crystal, polarizing plates, etc., and allow light to pass or block light according to the electrical signal input from the computing device 8. That is, the electronic shutters 23 and 24 are opened and closed according to the electrical signal input from the computing device 8. Specifically, if the electronic shutter 23 is closed, the incoming light from the bonding head 5 to the photosynthesis unit 3 (half mirror 3a) is blocked. In addition, if the electronic shutter 24 is closed, the incoming light from the workbench 6 to the photosynthesis unit 3 (half mirror 3a) is blocked.

[0056] Next, the operation of the positioning device in the fourth embodiment will be described. Figure 2 The flowchart has the same actions, but the actions of steps S2 and S3 are different.

[0057] In step S2, two camera images A are captured. Specifically, the camera 1 captures the camera image A1 (see FIG. 1 ) with the electronic shutter 23 opened and the electronic shutter 24 closed. Figure 3 Next, the camera 1 performs image capture with the electronic shutter 23 closed and the electronic shutter 24 open, capturing a camera image A2 (see Figure 3(c)). At this time, the first component P1 is captured in the camera image A1, and the second component P2 is captured in the camera image A2.

[0058] Then, in step S3, marks for positioning are detected from the camera images A3 and A4, respectively, and the position correction amounts of the first component P1 and the second component P2 are calculated.

[0059] In the fourth embodiment, the electronic shutters 23 and 24 (first shielding means) are opened and closed, so that the first component P1 and the second component P2 are photographed in different camera images A (camera images A1 and A2). Therefore, the marks M1 and M2 respectively given to the first component P1 and the second component P2 can be photographed more clearly. Therefore, the position correction amount of the first component P1 and the second component P2 can be obtained more accurately.

[0060] Furthermore, since the electronic shutters 23 and 24 can be opened and closed without physical movement, deformation and vibration of the positioning device caused by the opening and closing of the shutters can be suppressed. This enables more accurate positioning.

[0061] (Fifth embodiment)

[0062] Figure 7 A side view of a positioning device according to a fifth embodiment is shown. Figure 7 The positioning device and Figure 4 The structure is substantially the same, but color filters 25 and 26 are further provided. In addition, coaxial illumination 11a and 11b are arranged instead of the coaxial illumination 11.

[0063] The coaxial illumination 11a is illumination for irradiating light of the first wavelength band. The coaxial illumination 11b is illumination for irradiating light of the second wavelength band. The first wavelength band and the second wavelength band are different wavelength bands (spectral bands that do not overlap with each other). For example, the first wavelength band is a region of visible light from red to near infrared, and the second wavelength band is a region near the blue color of visible light on the short wavelength side. In addition, the first wavelength band and the second wavelength band can be set arbitrarily as long as there is no region that overlaps with each other.

[0064] The coaxial illuminations 11a and 11b irradiate the light to the photosynthesis unit 3 in the Y direction via the half mirrors 13 and 14. The oblique illumination 12a irradiates the light in the first wavelength band, and the oblique illumination 12b irradiates the light in the second wavelength band.

[0065] The color filter 25 (first color filter) is arranged between the light combining unit 3 and the joint head 5. The color filter 26 (second color filter) is arranged between the light combining unit 3 and the stage 6. The color filters 25 and 26 transmit the light of the first wavelength band and the light of the second wavelength band, respectively. That is, the joint head 5 (first component P1) is irradiated with the light of the first wavelength band, and the stage 6 (second component P2) is irradiated with the light of the second wavelength band. Therefore, in the camera image A, the image of the first component P1 is displayed based on the light of the first wavelength band, and the image of the second component P2 is displayed based on the light of the second wavelength band.

[0066] In the fifth embodiment, the color filters 25 and 26 (the first color filter and the second color filter) are used to display the images of the first component P1 and the second component P2 in the camera image A based on light of different wavelength bands. Therefore, the marks M1 and M2 respectively given to the first component P1 and the second component P2 can be more clearly photographed. Therefore, the position correction amounts of the first component P1 and the second component P2 can be obtained more accurately.

[0067] In addition, only one of the coaxial illumination devices 11a and 11b may be used to irradiate light. That is, by using the coaxial illumination devices 11a and 11b, the first component P1 and the second component P2 can be irradiated by switching between the light of the first wavelength band and the light of the second wavelength band. Thus, a camera image of the first component P1 and a camera image of the second component P2 can be generated, and thus the position correction amount of the first component P1 and the second component P2 can be obtained by performing the same processing as the fourth embodiment.

[0068] (Sixth embodiment)

[0069] Figure 8 A side view of a positioning device according to a sixth embodiment is shown. Figure 8 The positioning device and Figure 4 The structure is substantially the same, but a polarization camera 1a is provided in place of the camera 1. In addition, a polarization beam splitter 3c is provided in place of the half mirror 3a. In addition, a quarter wavelength plate 3d is provided between the polarization beam splitter 3c and the mirror 3b.

[0070] The polarization beam splitter 3c is an optical element that transmits S polarized light (first polarized light) among incident light and reflects P polarized light (second polarized light). The quarter-wave plate 3d is an optical element that generates a phase difference of λ / 4 between orthogonal polarization components of incident light. That is, the quarter-wave plate 3d changes the polarization direction of the transmitted light.

[0071] The polarization camera 1a is a camera that generates a camera image based on the polarization direction of incident light. In the present embodiment, the polarization camera 1a generates one camera image based on S-polarized light and generates one camera image based on P-polarized light.

[0072] In the sixth embodiment, S-polarized light (hereinafter referred to as "first light") among the light irradiated from the coaxial illumination 11 to the polarization beam splitter 3c is reflected by the polarization beam splitter 3c and irradiated to the bonding head 5. Furthermore, the third light, which is a part of the first light, is reflected by the surface of the first component P1, further reflected by the polarization beam splitter 3c, and enters the polarization camera 1a.

[0073] In addition, among the irradiation light irradiated from the coaxial illumination 11 to the polarization beam splitter 3c, the P polarized light (hereinafter referred to as "the second light") passes through the polarization beam splitter 3c and enters the reflector 3b. At this time, the second light passes through the 1 / 4 wavelength plate 3d, thereby changing from the P polarized light to the circularly polarized light. Thereafter, the second light is reflected by the reflector 3b and enters the polarization beam splitter 3c. At this time, the second light passes through the 1 / 4 wavelength plate 3d again, thereby changing from the circularly polarized light to the S polarized light. Therefore, the second light is reflected by the polarization beam splitter 3c and irradiated to the workbench 6. Moreover, the fourth light, which is a part of the second light, is reflected by the surface of the first component P1, and is further reflected by the polarization beam splitter 3c and enters the reflector 3b. At this time, the fourth light passes through the 1 / 4 wavelength plate 3d, thereby changing from the S polarized light to the circularly polarized light. Thereafter, the fourth light is reflected by the reflector 3b and enters the polarization beam splitter 3c. At this time, the fourth light is transmitted through the quarter wavelength plate 3 d again, and is changed from circularly polarized light to P-polarized light. Therefore, the fourth light is transmitted through the polarization beam splitter 3 c and enters the camera 1 .

[0074] That is, the image of the first component P1 is generated by the S-polarized light (third light) among the irradiation light of the coaxial illumination 11, and the image of the second component P2 is generated by the P-polarized light (fourth light) among the irradiation light of the coaxial illumination 11. Therefore, the polarization camera 1a captures (generates) the camera image A for each of the first component P1 and the second component P2.

[0075] In the sixth embodiment, the polarization beam splitter 3c and the quarter wavelength plate 3d are used to display the images of the first component P1 and the second component P2 in the camera image A based on light of different polarization directions. Therefore, the marks M1 and M2 respectively given to the first component P1 and the second component P2 can be more clearly photographed. Therefore, the position correction amounts of the first component P1 and the second component P2 can be obtained more accurately.

[0076] (Seventh Implementation Method)

[0077] Fig. 9A side view of a positioning device according to a seventh embodiment is shown. Fig. 9 The positioning device and Figure 8 The structure is substantially the same, but polarizing plates 27 and 28 are further provided.

[0078] The polarizing plate 27 (first polarizing plate, third polarizing plate) is arranged between the photosynthesis unit 3 and the bonding head 5. The polarizing plate 28 (first polarizing plate, third polarizing plate) is arranged between the photosynthesis unit 3 and the workbench 6. The polarizing plates 27 and 28 are optical elements that transmit light of a given polarization direction. In addition, the polarizing plates 27 and 28 change their respective orientations by the driving units 27a and 28a (first driving unit). That is, the polarizing plates 27 and 28 change the polarization direction of the transmitted light by the driving units 27a and 28a.

[0079] Next, the operation of the positioning device in the seventh embodiment will be described. Figure 2 The flowchart has the same actions, but the actions of steps S2 and S3 are different.

[0080] In step S2, two camera images A are captured. Specifically, the camera 1 captures the camera image A2 (the third camera image, see FIG. 3 ) while changing the orientation so that the polarizing plate 27 transmits the first light and the polarizing plate 28 does not transmit the second light. Figure 3 Next, the camera 1 takes a picture while changing the orientation so that the polarizing plate 27 does not transmit the first light and the polarizing plate 28 transmits the second light, and takes a picture of the camera image A3 (the fourth camera image, see Figure 3 (c)). As described above, the first light and the second light become S-polarized light when they pass through the polarizing plates 27 and 28, respectively.

[0081] Then, in step S3, marks for positioning are detected from the camera images A3 and A4, respectively, and the position correction amounts of the first component P1 and the second component P2 are calculated.

[0082] In the third embodiment, the first component P1 and the second component P2 are captured in different camera images A (camera images A1 and A2) by changing the orientation of the polarizing plates 27 and 28 (first polarizing plates). Therefore, the marks M1 and M2 respectively given to the first component P1 and the second component P2 can be captured more clearly. Therefore, the position correction amounts of the first component P1 and the second component P2 can be obtained more accurately.

[0083] Furthermore, since the amount of displacement of the center of gravity of the polarizing plates 27 and 28 is small, it is possible to suppress deformation of the positioning device caused by a change in the orientation of the polarizing plates 27 and 28. This enables more accurate positioning.

[0084] In addition, Fig. 9 In the embodiment, a polarizing element that changes the polarization direction of the transmitted light according to an electrical signal may be provided instead of the polarizing plates 27 and 28 .

[0085] (Eighth Implementation Method)

[0086] Fig.10 A side view of a positioning device according to an eighth embodiment is shown. Fig.10 The positioning device and Figure 8 The configuration is substantially the same, but electronic shutters 29 and 30 (second blocking means) are further provided.

[0087] The electronic shutter 29 is arranged between the photosynthesis unit 3 and the bonding head 5. The electronic shutter 30 is arranged between the photosynthesis unit 3 and the workbench 6. The electronic shutters 29 and 30 are respectively composed of, for example, liquid crystal, polarizing plates, etc., and allow light to pass or block light according to an electrical signal from the computing device 8. That is, the electronic shutters 29 and 30 are opened and closed according to a given signal. Specifically, if the electronic shutter 29 is closed, the incoming light from the bonding head 5 to the photosynthesis unit 3 (half mirror 3a) is blocked. In addition, if the electronic shutter 30 is closed, the incoming light from the workbench 6 to the photosynthesis unit 3 (half mirror 3a) is blocked.

[0088] When liquid crystal is used for the electronic shutter 29, it can also be used by a group of a polarizing plate and a liquid crystal that switches the polarization direction, and opened and closed (transmitted and blocked) by a combination of a polarization beam splitter 3c and a polarization direction. For example, after the light from the workpiece side is set to S polarized light using a polarizing plate, it can remain as S polarized light without changing the polarization direction through liquid crystal (electronic shutter 29), and be reflected by the polarization beam splitter 3c, thereby shooting. On the other hand, after the light from the workpiece side is set to S polarized light using a polarizing plate, the voltage applied to the liquid crystal is changed to change the polarization direction, and the light that has passed through the liquid crystal is set to P polarized light. In this case, shooting is not possible because it passes through the polarization beam splitter 3c. Through such a principle, it is also possible to electrically select whether shooting is possible.

[0089] Next, the operation of the positioning device in the eighth embodiment will be described. Figure 2 The flowchart has the same actions, but the actions of steps S2 and S3 are different.

[0090] In step S2, two camera images A are captured. Specifically, the camera 1 captures the camera image A1 (see FIG. 1 ) with the electronic shutter 29 opened and the electronic shutter 30 closed. Figure 3Next, the camera 1 performs image capture with the electronic shutter 29 closed and the electronic shutter 30 open, capturing a camera image A2 (see Figure 3 (c)). At this time, the first component P1 is captured in the camera image A1, and the second component P2 is captured in the camera image A2.

[0091] Then, in step S3, marks for positioning are detected from the camera images A1 and A2, respectively, and the position correction amounts of the first component P1 and the second component P2 are calculated.

[0092] In the eighth embodiment, the first component P1 and the second component P2 are captured in different camera images A (camera images A1 and A2) by opening and closing the electronic shutters 29 and 30 (second shielding means). Therefore, the marks M1 and M2 respectively given to the first component P1 and the second component P2 can be captured more clearly. Therefore, the position correction amounts of the first component P1 and the second component P2 can be obtained more accurately.

[0093] Furthermore, since the electronic shutters 29 and 30 can be opened and closed without physical movement, deformation of the positioning device caused by the opening and closing of the shutters can be suppressed. This enables more accurate positioning.

[0094] (Ninth embodiment)

[0095] Fig.11 (a) is a side view of a positioning device according to a ninth embodiment. Fig.11 (a) The positioning device is Figure 8 The structure is substantially the same, but a polarizing plate 3 is further provided.

[0096] The polarizing plate 31 (second polarizing plate) is disposed between the lens 2 and the photosynthesis unit 3. The polarizing plate 31 is an optical element that transmits light of a given polarization direction. In addition, the polarizing plate 31 is changed in direction by the driving unit 31a (second driving unit). That is, the polarizing plate 31 changes the polarization direction of the transmitted light by the driving unit 31a.

[0097] Next, the operation of the positioning device in the tenth embodiment will be described. Figure 2 The flowchart has the same actions, but the actions of steps S2 and S3 are different.

[0098] In step S2, two camera images A are captured. Specifically, the camera 1 captures the camera image A1 (the fifth camera image, see FIG. 5 ) while changing the orientation of the polarizing plate 31 so that the polarizing plate 31 transmits S polarized light and blocks P polarized light. Figure 3(b)). At this time, the S polarized light passes through the polarizing plate 31, so the first component P1 is captured in the camera image A1. Next, the camera 1 captures the camera image A2 (the fifth camera image, see FIG. 5 ) by changing the orientation of the polarizing plate 31 so that the polarizing plate 31 blocks the S polarized light and transmits the P polarized light. Figure 3 (c)). At this time, the P-polarized light passes through the polarizing plate 31, so the second component P2 is captured in the camera image A2.

[0099] Then, in step S3, marks for positioning are detected from the camera images A1 and A2, respectively, and the position correction amounts of the first component P1 and the second component P2 are calculated.

[0100] In the ninth embodiment, the first component P1 and the second component P2 are captured in different camera images A (camera images A1 and A2) by changing the orientation of the polarizing plate 31. Therefore, the marks M1 and M2 respectively given to the first component P1 and the second component P2 can be captured more clearly. Therefore, the position correction amounts of the first component P1 and the second component P2 can be obtained more accurately.

[0101] Fig.11 (b) is a side view showing another example of the positioning device according to the ninth embodiment. Fig.11 (b), with Fig.11 The structure is substantially the same as (a), but a polarizing element 32 is provided in place of the polarizing plate 31 to change the polarization direction of the transmitted light according to an electrical signal. Even with this structure, the same Fig.11 The same effect as (a).

[0102] In the first to fifth embodiments, the half mirror 3a reflects the light incident from the bonding head 5 toward the optical axis direction of the lens 2, and reflects the light incident from the workbench 6 toward the reflector 3b, but the present invention is not limited thereto. For example, the half mirror 3a may reflect the light incident from the bonding head 5 toward the reflector 3b, and reflect the light incident from the workbench 6 toward the optical axis direction of the lens 2.

[0103] In the sixth to ninth embodiments, the polarization beam splitter 3c transmits S polarized light and reflects P polarized light among the incident light, but the present invention is not limited thereto. For example, the polarization beam splitter 3c may transmit P polarized light among the incident light and reflect S polarized light. That is, the light transmitted through the polarization beam splitter 3c may be irradiated to the first component P1, and the light reflected by the polarization beam splitter 3c may be irradiated to the second component P2. In addition, the polarization beam splitter 3c may reflect S polarized light and transmit P polarized light.

[0104] Industrial Applicability

[0105] The positioning device of the present disclosure can be used for positioning during the manufacture of electronic components and the like.

[0106] Description of Reference Numerals

[0107] 1 Camera

[0108] 1a Polarization camera

[0109] 2 Lenses

[0110] 3 Photosynthetic unit (optical element)

[0111] 3a Half mirror

[0112] 3c Polarization Beam Splitter

[0113] 3d 1 / 4 wavelength plate

[0114] 5 Jointing head

[0115] 6 Workbench

[0116] 8 Computing device

[0117] 11 Coaxial lighting (1st lighting, 4th lighting)

[0118] 12a Oblique lighting (second lighting)

[0119] 12b oblique lighting (third lighting)

[0120] 21, 22 Mechanical shutter (1st blocking unit)

[0121] 23 Electronic shutter (1st blocking unit, 3rd blocking unit)

[0122] 24 Electronic shutter (1st blocking unit, 4th blocking unit)

[0123] 25 Color filter (1st color filter)

[0124] 26 Color filter (2nd color filter)

[0125] 27 Polarizing plates (first polarizing plate, third polarizing plate)

[0126] 28 Polarizing plates (first polarizing plate, fourth polarizing plate)

[0127] 27a, 28a Driving unit (first driving unit)

[0128] 29, 30 Electronic shutter (second blocking unit)

[0129] 31 Polarizing plate (second polarizing plate)

[0130] 31a Driving unit (second driving unit)

[0131] 32 Polarization element

[0132] A Camera Image

[0133] A1 Camera images (1st camera image, 3rd camera image, 5th camera image)

[0134] A2 Camera images (2nd camera image, 4th camera image, 6th camera image)

[0135] M1, M2 marking

[0136] P1 Part 1

[0137] P2 Part 2.

Claims

1. A positioning device for positioning the first component and the second component when a first component held by a bonding head is mounted on a second component placed on a worktable, the positioning device comprising: Camera; A lens, arranged along a shooting direction of the camera; Optical components; and computing device, When positioning the first component and the second component, the optical element is arranged between the bonding head and the worktable, synthesizes light incident from the bonding head side and light incident from the worktable side, and reflects the light toward the lens side. The camera captures a camera image based on light incident through the lens, The computing device obtains position correction amounts of the first member and the second member based on the camera image.

2. The positioning device according to claim 1, wherein: The positioning device further includes a first lighting device for irradiating light along a photographing direction of the camera to irradiate light toward at least one of the first component and the second component via the optical element.

3. The positioning device according to claim 1, wherein: The optical element comprises a half mirror and a reflecting mirror. The half mirror reflects light incident from either the bonding head side or the table side toward the lens side, and reflects light incident from either the other side of the bonding head side or the table side toward the reflector side. The reflecting mirror reflects the light incident from the half mirror toward the lens side.

4. The positioning device according to claim 1, wherein: The positioning device further includes a first shielding unit that shields the light between the optical element and at least one of the bonding head and the stage.

5. The positioning device according to claim 4, wherein: The first shielding unit is a mechanical shutter.

6. The positioning device according to claim 4, wherein: The first shielding unit is an electronic shutter that opens and closes according to an input electrical signal.

7. The positioning device according to claim 1, wherein: The positioning device also has: a first color filter disposed between the bonding head and the optical element and transmitting light in a first wavelength band; a second color filter disposed between the table and the optical element and transmitting light of a second wavelength band which is a wavelength band not overlapping with the first wavelength band; and The third illumination can switch between irradiating the first member and the second member with light of a wavelength band within the first wavelength band and light of a wavelength band within the second wavelength band.

8. The positioning device according to claim 1, wherein: The positioning device further comprises: a fourth lighting device for irradiating light to the optical element along the shooting direction of the camera, The optical element comprises: a polarization beam splitter that receives light from the fourth illumination, reflects the first polarized light among the incident light, and transmits the second polarized light; A reflector reflects incident light; and The wavelength plate is arranged between the polarization beam splitter and the reflector to change the polarization direction of the transmitted light. The polarization beam splitter reflects the first light as the first polarized light among the incident light toward either the bonding head side or the stage side, and transmits the second light as the second polarized light. The wavelength plate changes the second light after passing through the polarization beam splitter from the second polarized light into circularly polarized light, and causes the second light to enter the reflecting mirror. The reflecting mirror reflects the second light toward the wavelength plate side. The wavelength plate changes the second light from the circularly polarized light to the first polarized light and causes the second light to enter the polarization beam splitter. The polarization beam splitter reflects the second light toward either the stage side or the other side of the stage side.

9. The positioning device according to claim 8, wherein: The camera is a polarization camera that captures the camera image based on a third light that is a part of the first light and a fourth light that is a part of the second light. The third light is reflected by the first component and then reflected by the polarization beam splitter toward the camera side, thereby entering the camera. The fourth light is reflected by the second component, reflected toward the reflector side through the polarization beam splitter, and changed from the first polarized light to the circularly polarized light through the wavelength plate. Thereafter, it is reflected toward the polarization beam splitter side through the reflector, changed from the circularly polarized light to the second polarized light through the wavelength plate, and passes through the polarization beam splitter, thereby entering the camera.

10. The positioning device according to claim 8, wherein: The positioning device also has: a first polarizing plate disposed between the optical element and at least one of the bonding head and the stage; and The first driving unit changes the polarization direction of light transmitted through the first polarizing plate by changing the orientation of the first polarizing plate.

11. The positioning device according to claim 8, wherein: The positioning device further includes a second shielding unit that shields the light between the optical element and at least one of the bonding head and the stage.

12. The positioning device according to claim 8, wherein: The positioning device also has: a second polarizing plate disposed between the polarization beam splitter and the lens; and The second driving unit changes the polarization direction of light transmitted through the second polarizing plate by changing the orientation of the second polarizing plate.

13. The positioning device according to claim 8, wherein: The positioning device further includes a polarization element between the polarization beam splitter and the lens, the polarization direction of the transmitted light being changed by an electronic unit.

14. The positioning device according to claim 1, wherein: The positioning device also has: a second illumination for irradiating light toward the first component from a direction inclined with respect to a direction from the optical element toward the first component; and The third illumination irradiates the second member with light from a direction oblique to a direction from the optical element to the second member.

15. A mounting device comprising: The positioning device according to any one of claims 1 to 14; the engagement head; said workbench; and The moving mechanism moves at least one of the bonding head and the stage.

16. A positioning method using the positioning device according to claim 4, The first shielding unit comprises: a third shielding unit disposed between the optical element and the bonding head; and The fourth shielding unit is arranged between the optical element and the workbench, The positioning method comprises: A step of capturing a first camera image as the camera image by the camera in a state where light entering from the bonding head to the optical element is blocked by the third blocking means; A step of capturing a second camera image as the camera image by the camera in a state where light entering from the worktable to the optical element is blocked by the fourth blocking unit; and The step of the arithmetic device obtaining position correction amounts of the first component and the second component based on the first camera image and the second camera image.

17. A positioning method using the positioning device according to claim 10, The first polarizing plate comprises: a third polarizing plate disposed between the optical element and the bonding head; and a fourth polarizing plate, arranged between the optical element and the workbench, The positioning method comprises: A step of capturing a third camera image as the camera image by the camera in a state where the orientations of the third polarizing plate and the fourth polarizing plate are changed by the first driving unit so that the third polarizing plate transmits the first light and the fourth polarizing plate blocks the second light; A step of capturing a fourth camera image as the camera image by the camera in a state where the orientations of the third polarizing plate and the fourth polarizing plate are changed by the first driving unit so that the third polarizing plate blocks the first light and the fourth polarizing plate transmits the second light; and The step of the computing device obtaining position correction amounts of the first component and the second component based on the third camera image and the fourth camera image.

18. A positioning method using the positioning device according to claim 12, comprising: A step of capturing a fifth camera image as the camera image by the camera in a state where the orientation of the second polarizing plate is changed by the second driving unit so that the second polarizing plate transmits the first polarized light among the light incident from the fourth illumination and blocks the second polarized light; A step of capturing a sixth camera image as the camera image by the camera in a state where the orientation of the second polarizing plate is changed by the second driving unit so that the second polarizing plate blocks the first polarized light among the light incident from the fourth illumination and transmits the second polarized light; and The step of causing the computing device to obtain position correction amounts of the first component and the second component based on the fifth camera image and the sixth camera image.

19. An installation method comprising: The positioning method according to any one of claims 16 to 18; and The step of mounting the first component on the second component.

Images