Edge resistance grading method and device for monocrystalline silicon round rod and storage medium

Abstract

The invention relates to the technical field of monocrystalline silicon production, and discloses an edge resistance grading method and device for a monocrystalline silicon round rod and a storage medium, and the method comprises the following steps: measuring the resistivity of two corners of a second end face of an edge cut from the monocrystalline silicon round rod; according to the segregation principle, the resistivity at the two corners of the first end face of the edge piece is calculated in combination with the length of the monocrystalline silicon round rod and the resistivity at the two corners of the second end face of the edge piece; calculating the mean value of the resistivity at the two corners of the first end face and the two corners of the second end face of the flaw piece, and taking the mean value as the resistivity of the flaw piece; and grading the flaw pieces according to the calculated resistivity of the flaw pieces. According to the grading method, the situation that a four-probe method is adopted manually to measure the resistivity of the edge skin is avoided, the manpower consumption of edge skin grading is reduced, and the grading efficiency is improved. And meanwhile, inaccurate grading caused by inaccurate resistivity of the edge skin measured manually is avoided, so that inaccurate grading of the edge skin is prevented from influencing the control precision of the resistivity of the product.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal silicon production, and in particular to a method, a device and a storage medium for grading the edge skin resistance of a single crystal silicon round rod. Background Art

[0002] In order to save costs, after the monocrystalline silicon round rod is cut into square rods, the cut edge material will be used as recycled material to be re-produced in the furnace. In order to facilitate the precise control of the doping amount of the edge material when it is recycled, and to avoid the influence of the recycled material on the control accuracy of the resistivity of the newly manufactured monocrystalline silicon round rod, it is necessary to measure and grade the resistivity of the cut edge material. In the current production process, the measurement and grading of the resistivity of the edge material is completely completed manually. The resistivity of the edge material is measured by the measurement personnel using the four-probe method, and the gear to which the resistivity belongs is engraved on the edge material according to the resistance value obtained by the measurement. This grading method requires a lot of human resources, and the accuracy of the resistivity obtained by the four-probe method is affected by the measurement technique of the measurement personnel, and the accuracy of the measured resistivity is affected by human factors, thereby affecting the production quality of the monocrystalline silicon round rod with the edge material. For this reason, it is necessary to design a more efficient and accurate resistivity measurement and grading method for edge materials. Summary of the invention

[0003] In order to overcome the shortcomings of the prior art, the purpose of the present invention is to provide a method, device and storage medium for grading the edge resistance of single crystal silicon round rods, which can reduce the manpower consumption in measuring and grading the resistivity of edge materials, improve the grading efficiency and improve the accuracy of the grading results, thereby avoiding the recycling of edge materials.

[0004] To solve the above problems, the technical solution adopted by the present invention is as follows: A method for grading the edge resistance of a single crystal silicon round rod comprises the following steps:

[0005] Measuring the resistivity at two corners of the second end surface of the edge skin cut from the single crystal silicon rod;

[0006] According to the segregation principle, the resistivity at the two corners of the first end face of the edge skin is calculated by combining the length of the single crystal silicon round rod and the resistivity at the two corners of the second end face of the edge skin;

[0007] Calculate the average of the resistivity at two corners of the first end surface and two corners of the second end surface of the edge skin, and use the average as the resistivity of the edge skin;

[0008] The side skins are classified into different grades according to the calculated resistivity of the side skins.

[0009] Compared with the prior art, the beneficial effect of the present invention is that: the method is based on the principle of segregation, and the resistivity at the two corners of the other end is inferred by the resistivity at the two corners of the leading end or the trailing end of the edge skin, and the edge skin is graded by taking the average of the resistivity at the four corners as the resistivity of the edge skin, thereby avoiding the artificial measurement of the resistivity of the edge skin by the four-probe method, reducing the human resource consumption of the edge skin grading, and improving the efficiency of the edge skin grading. And because the use of the four-probe method is avoided, the impact of the test method on the accuracy of the resistivity measurement is also avoided, and the grading result is more accurate, avoiding the impact of the recycling of edge skin materials on the resistivity control accuracy of the single crystal silicon round rod.

[0010] In the above-mentioned edge skin resistance grading method, in the step of measuring the resistivity at the two corners of the second end surface of the edge skin cut from the single crystal silicon round rod, the resistivity at the two corners of the second end surface of the edge skin cut from the single crystal silicon round rod is measured by a minority carrier lifetime tester, and the measured resistivity is uploaded to the MES system.

[0011] In the above-mentioned method for grading the edge skin resistance, in the step of calculating the resistivity at the two corners of the first end face of the edge skin based on the principle of condensation, combining the length of the single crystal silicon round rod and the resistivity at the two corners of the second end face of the edge skin, the resistivity a1 and a2 at the two corners of the first end face of the edge skin are calculated by the following formula:

[0012]

[0013] In the formula, m and n are maintenance parameters, c1 = -m*b1 2 -n*b1+h,c2=-m*b2 2 -n*b2+h, h is the length of the single crystal silicon rod to which the edge skin belongs, and b1 and b2 are the resistivities at the two corners of the first end surface of the edge skin obtained by measurement.

[0014] The above-mentioned method for grading the edge skin resistance, the step of calculating the resistivity at the two corners of the first end face of the edge skin based on the principle of condensation and combining the length of the single crystal silicon round rod and the resistance values ​​at the two corners of the second end face of the edge skin, further includes:

[0015] The coding information of the edge skin is obtained, and the resistivity at the two corners of the second end surface of the edge skin, the type and length of the single crystal silicon round rod to which the edge skin belongs are queried according to the coding information of the edge skin.

[0016] The above-mentioned side skin resistance grading method further includes:

[0017] Generate a code based on the grading results and laser-engraved it onto the edge of the leather.

[0018] A computer-readable storage medium stores a computer program, which implements the above-mentioned edge skin resistance grading method when called and executed by a processor.

[0019] A device for grading the resistance of the edge skin of a single crystal silicon round rod comprises: an acquisition module for acquiring coding information of the edge skin, and querying the resistivity at the two corners of the second end face of the edge skin, the type and length of the single crystal silicon round rod to which the edge skin belongs according to the coding information; a resistivity calculation module for calculating the resistivity at the two corners of the first end face of the edge skin based on a segregation principle model, in combination with the resistivity at the two corners of the second end face of the edge skin acquired by the acquisition module and the length of the single crystal silicon round rod; an edge skin resistance calculation module for calculating the average of the resistivity at the two corners of the first end face of the edge skin and the two corners of the second end face of the edge skin, and using the average as the resistivity of the edge skin; and a grading module for grading the edge skin according to the resistivity of the edge skin calculated by the edge skin calculation module.

[0020] The above-mentioned edge skin resistor grading device also includes: a code generation module, which is used to generate a code according to the grading result of the grading module.

[0021] In the above-mentioned edge skin resistance grading device, the resistivity estimation module is further used to calculate the resistivities a1 and a2 at the two corners of the first end surface of the edge skin by the following formula:

[0022]

[0023] In the formula, m and n are maintenance parameters, c1 = -m*b1 2 -n*b1+h,c2=-m*b2 2 -n*b2+h, h is the length of the single crystal silicon rod to which the edge skin belongs, and b1 and b2 are the resistivities at the two corners of the first end surface of the edge skin obtained by querying the acquisition module.

[0024] A side skin resistance grading device for a single crystal silicon round rod comprises the above-mentioned side skin resistance grading device, a barcode scanning gun and a laser coding device, wherein the barcode scanning gun and the laser coding device are both electrically connected to the side skin grading device, the barcode scanning gun is used to scan the QR code on the side skin, and the laser coding device is used to engrave the code generated by the side skin resistance grading device onto the side skin.

[0025] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A flow chart of a method for grading edge skin resistance according to an embodiment of the present invention;

[0027] Figure 2 It is a principle block diagram of the edge skin resistance grading device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0028] The embodiments of the present invention are described in detail below. Figure 1The embodiment of the present invention provides a method for grading the resistance of the edge skin of a single crystal silicon round rod, which is used to measure the resistivity of the edge skin material cut from the single crystal silicon round rod and grade it according to the resistivity, so that it can be selected according to the doping rate or resistivity parameter when it is subsequently recycled into the furnace, and includes the following steps:

[0029] Measuring the resistivity at two corners of the second end surface of the edge skin cut from the single crystal silicon rod;

[0030] According to the segregation principle, the resistivity at the two corners of the first end face of the edge skin is calculated by combining the length of the single crystal silicon round rod and the resistivity at the two corners of the second end face of the edge skin;

[0031] Calculate the average of the resistivity at two corners of the first end surface and two corners of the second end surface of the edge skin, and use the average as the resistivity of the edge skin;

[0032] The side skins are classified into different grades according to the calculated resistivity of the side skins.

[0033] The single crystal silicon round rod is mainly made by the crystal pulling process, and the crystal pulling process is mainly realized by the segregation phenomenon, so its manufacturing process follows the segregation principle, and the doping rate at different positions of each layer can be simulated according to the segregation principle. Since there is a specific mapping relationship between the doping rate and the resistivity, the resistance at each position of the single crystal silicon round rod can be simulated and calculated according to the segregation principle, and the mapping relationship between the resistivity and the length can be obtained. The edge skin resistance grading method of the embodiment of the present invention utilizes the above principle, measures the resistivity of the two corners of one end of the cut edge skin, and calculates the resistivity of the two corners of the other end according to the length of the edge skin through the mapping relationship between the resistivity and the length obtained according to the segregation principle, and uses the average of the resistivity of the four corners as the grading basis to grade the edge skin. This method avoids the manual measurement of the resistivity of the edge skin by the four-probe method, thereby reducing the human resource consumption of the edge skin grading, and also avoids the problem of inaccurate measurement results caused by the inaccurate probe position selected and the difficulty in ensuring the consistency of the measurement method in manual measurement, thereby improving the accuracy of grading and avoiding the grading results affecting the resistivity control accuracy in the production process of single crystal silicon round rods.

[0034] It is understandable that, in actual implementation, the resistivity at the two corners of the head end face of the edge skin can be measured, and the resistivity at the two corners of the tail end face can be inferred based on the segregation principle; the resistivity at the two corners of the tail end face of the edge skin can also be measured to infer the resistivity at the two corners of the head end face. In this embodiment, the resistivity b1 and b2 at the two corners of the tail end face of the edge skin are measured by a minority carrier lifetime tester model BCT-400 of Si nton Company of the United States. After the measurement is completed, the measurement results are uploaded to the MES system for query by the grading device, and the resistivity a1 and a2 at the two corners of the head end face of the edge skin are calculated by combining a large amount of data according to the segregation principle and simplifying the following formula:

[0035]

[0036] In the formula, m and n are maintenance parameters, c1 = -m*b1 2 -n*b1+h,c2=-m*b2 2 -n*b2+h, where h is the length of the single crystal silicon rod to which the edge skin belongs. The values ​​of m and n need to be adjusted according to the type of the single crystal silicon rod. In the actual implementation process, the values ​​of m and n of different types of products can be stored in the database. When classifying, the type of product is obtained according to the scanned QR code on the edge skin, and the maintenance parameters are substituted into equations (1) and (2) according to the type query to deduce the resistivities a1 and a2 at the two corners of the end face of the edge skin head.

[0037] In order to facilitate direct distinction of the gear positions of each edge skin after the grading, a corresponding engraved code is generated according to the grading result after the grading is completed, and the engraved code is engraved on the surface of the edge skin by laser or other means. In this embodiment, the gear position of the edge skin is represented by letters such as A, B, and C, each letter corresponds to a different resistivity range, and finally the gear position of the edge skin is determined according to the range into which the average of the resistivity at the four diagonal points of the calculated edge skin falls.

[0038] Based on the same inventive concept, an embodiment of the present invention further provides a computer-readable storage medium, in which a computer program is stored. When the computer program is executed by a processor, the above-mentioned edge skin resistance grading method can be implemented.

[0039] In some possible embodiments, various aspects of the side-skin resistance grading method provided by the present invention can also be implemented in the form of a program product, which includes a program code. When the program product is run on an apparatus, the program code is used to enable the control device to execute the steps of the side-skin resistance grading method according to various exemplary embodiments of the present application described above in this specification.

[0040] As a non-volatile computer-readable storage medium, the memory can be used to store non-volatile software programs, non-volatile computer executable programs and modules. The memory can include at least one type of storage medium, such as a flash memory, a hard disk, a multimedia card, a card-type memory, a random access memory (Random Access Memory, RAM), a static random access memory (Static Random Access Memory, SRAM), a programmable read-only memory (Programmab le Read On ly Memory, PROM), a read-only memory (Read On ly Memory, ROM), an electrically erasable programmable read-only memory (Electrically Erasable Programmab l eRead-Only Memory, EEPROM), a magnetic memory, a disk, an optical disk, etc. The memory is any other medium that can be used to carry or store a desired program code in the form of an instruction or data structure and can be accessed by a computer, but is not limited thereto. The memory in the embodiment of the present application can also be a circuit or any other device that can realize a storage function, for storing program instructions and / or data.

[0041] Based on the same inventive concept, an embodiment of the present invention also provides a device for implementing the above-mentioned edge skin resistance grading method, including an acquisition module, a resistivity estimation module, an edge skin resistance calculation module, a grading module and an engraving code generation module. The acquisition module is used to acquire the coding information of the edge skin, and query the resistivity at the two corners of the second end face of the edge skin, as well as the type and length of the single crystal silicon round rod to which the edge skin belongs from the MES system according to the coding information. The resistivity estimation module is used to calculate the resistivity at the two corners of the first end face of the edge skin according to the segregation principle model, combined with the resistivity at the two corners of the second end face of the edge skin acquired by the acquisition module and the length of the single crystal silicon round rod. The edge skin resistance calculation module is used to calculate the average of the resistivity at the four corners of the two end faces of the edge skin, and use the average as the resistivity of the edge skin. The grading module is used to grade the edge skin according to the preset grading rules according to the resistivity of the edge skin calculated by the edge skin resistance calculation module. The engraving code generation module is used to generate an engraving code according to the grading result and the preset engraving code generation rules, and transmit the engraving code to the engraving device.

[0042] In some embodiments, the resistivity calculation module uses the above-mentioned formula (1) and formula (2) to calculate the resistivity at the two corners of the first end face, and the maintenance parameters m and n in the formula need to be determined according to the coding information obtained by the acquisition module to determine the type of the single crystal silicon round rod to which the edge skin belongs, and are obtained by querying the pre-stored maintenance parameter table according to the type of the single crystal silicon round rod to ensure the accuracy of the grading results.

[0043] Based on the same inventive concept, an embodiment of the present invention further provides a side skin resistance grading device, comprising the above-mentioned side skin resistance grading device, a barcode scanning gun and a laser coding device, wherein the barcode scanning gun and the laser coding device are both electrically connected to the side skin grading device. The barcode scanning gun is used to scan the QR code on the side skin to read the coding information of the side skin from the QR code, and send the read coding information to the side skin resistance grading device. The laser coding device is used to engrave the code generated by the side skin resistance grading device on the surface of the side skin by laser.

[0044] The present application is described with reference to the flowcharts and / or block diagrams of the methods, apparatus (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of the processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0045] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0046] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0047] In the description of the present invention, "several" means one or more, "more" means two or more, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0048] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0049] The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and substitutions made by technicians in this field on the basis of the present invention shall fall within the scope of protection required by the present invention.

Claims

1. A method for grading the edge resistance of a single crystal silicon round rod, characterized in that: The steps include: Measuring the resistivity at two corners of the second end surface of the edge skin cut from the single crystal silicon rod; According to the segregation principle, the resistivity at the two corners of the first end face of the edge skin is calculated by combining the length of the single crystal silicon round rod and the resistivity at the two corners of the second end face of the edge skin; Calculate the average of the resistivity at two corners of the first end surface and two corners of the second end surface of the edge skin, and use the average as the resistivity of the edge skin; The side skins are classified into different grades according to the calculated resistivity of the side skins.

2. The method for grading the edge skin resistance according to claim 1, characterized in that: In the step of measuring the resistivity at the two corners of the second end surface of the edge skin cut from the single crystal silicon round rod, the resistivity at the two corners of the second end surface of the edge skin cut from the single crystal silicon round rod is measured by a minority carrier lifetime tester, and the measured resistivity is uploaded to the MES system.

3. The method for grading the edge skin resistance according to claim 1, characterized in that: In the step of calculating the resistivity at the two corners of the first end face of the edge skin based on the segregation principle and combining the length of the single crystal silicon round rod and the resistivity at the two corners of the second end face of the edge skin, the resistivity a1 and a2 at the two corners of the first end face of the edge skin are calculated by the following formula: In the formula, m and n are maintenance parameters, c1 = -m*b1 2 -n*b1+h,c2=-m*b2 2 -n*b1+h, h is the length of the single crystal silicon rod to which the edge skin belongs, and b1 and b2 are the resistivities at the two corners of the first end surface of the edge skin obtained by measurement.

4. The method for grading the edge skin resistance according to claim 1, characterized in that: The step of calculating the resistivity at the two corners of the first end face of the edge skin based on the segregation principle and combining the length of the single crystal silicon round rod and the resistance values ​​at the two corners of the second end face of the edge skin also includes: The coding information of the edge skin is obtained, and the resistivity at two corners of the second end surface of the edge skin and the length of the single crystal silicon round rod to which the edge skin belongs are queried according to the coding information of the edge skin.

5. The method for grading the edge skin resistance according to claim 1, characterized in that: Also includes: Generate a code based on the grading results and laser-engraved it onto the edge of the leather.

6. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is called and executed by the processor, the method for grading the edge skin resistance according to any one of claims 1 to 5 is implemented.

7. A device for dividing the edge resistance of a single crystal silicon round rod, characterized in that: include: An acquisition module is used to acquire the coding information of the edge skin, and query the resistivity at the two corners of the second end surface of the edge skin and the length of the single crystal silicon round rod to which the edge skin belongs according to the coding information; A resistivity calculation module, for calculating the resistivity at the two corners of the first end face of the edge skin according to the segregation principle model, in combination with the resistivity at the two corners of the second end face of the edge skin obtained by the acquisition module and the length of the single crystal silicon round rod; The edge skin resistance calculation module is used to calculate the average of the resistivity at the two corners of the first end face and the two corners of the second end face of the edge skin, and use the average as the resistivity of the edge skin; The grading module is used to grade the edge skin according to the resistivity of the edge skin calculated by the edge skin calculation module.

8. The edge skin resistance grading device according to claim 7, characterized in that: Also includes: The engraving code generating module is used to generate the engraving code according to the binning result of the binning module.

9. The skin resistance grading device according to claim 7, characterized in that: The resistivity calculation module is also used to calculate the resistivities a1 and a2 at the two corners of the first end surface of the edge skin by the following formula: In the formula, m and n are maintenance parameters, c1 = -m*b1 2 -n*b1+h,c2=-m*b2 2 -n*b2+h, h is the length of the single crystal silicon rod to which the edge skin belongs, and b1 and b2 are the resistivities at the two corners of the first end surface of the edge skin obtained by querying the acquisition module.

10. A device for grading the edge resistance of a single crystal silicon round bar, characterized in that: It comprises a side skin resistance grading device, a barcode scanning gun and a laser coding device according to any one of claims 7 to 9, wherein the barcode scanning gun and the laser coding device are both electrically connected to the side skin grading device, the barcode scanning gun is used to scan the QR code on the side skin, and the laser coding device is used to engrave the code generated by the side skin resistance grading device onto the side skin.

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