Sealing surface stroke compensation mechanism and transmission valve device

Abstract

The invention discloses a sealing surface stroke compensation mechanism and a transmission valve device.The sealing surface stroke compensation mechanism comprises a telescopic part which is installed at the inlet end of a to-be-sealed cavity in a sealed and telescopic mode, a transmission opening communicating with the to-be-sealed cavity is formed in the telescopic part, and the telescopic part is used for being attached to a sealing structure; the sealing structure can seal the transmission port; the detection structure is used for detecting the distance between the sealing structure and the telescopic part; the telescopic driving part drives the telescopic part to stretch out and draw back, and the telescopic driving part is in signal connection with the detection structure to drive the telescopic part to be attached to the sealing structure so as to seal the transmission port. According to the invention, the stroke of the sealing structure is compensated, and the influence on wafer transmission caused by improper sealing of the sealing structure of a transmission valve and the like is avoided.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a sealing surface stroke compensation mechanism and a transmission valve device. Background Art

[0002] In the semiconductor field, the transfer valve is an important component for achieving transfer. Its function is to seal between adjacent chambers and transform the chamber pressure between chambers so that wafers can be transferred between adjacent chambers.

[0003] At present, the sealing form of the transfer valve is mostly sealed directly through the sealing structure. However, after the transfer valve is sealed for multiple times, the sealing structure (such as the guide rod or the direction-changing mechanism, etc.) will produce a gap between the transfer port of the chamber due to excessive deformation, causing the transfer valve to lose its sealing function. In addition, if the compressed air supplied at the factory service end experiences pressure fluctuations, the travel of the sealing structure cannot reach the predetermined position, which will also affect the transmission of the wafer.

[0004] The emergence of the above problems has greatly affected the wafer production efficiency, and the leakage points in the chamber are relatively hidden and time-consuming. Once the valve body is disassembled for inspection, the atmosphere will be poured into the chamber, which will destroy the vacuum of the chambers at both ends, thereby bringing about the negative impact of increasing particles in the chamber. In addition, the destroyed chamber environment is difficult to restore to the original state, which will have an irreversible impact on the process and wafer etching.

[0005] In summary, how to compensate for the stroke of the sealing structure and avoid the impact on wafer transmission caused by the sealing structure of the transfer valve etc. not being properly sealed is an urgent problem to be solved by technical personnel in this field. Summary of the invention

[0006] In view of this, the first object of the present invention is to provide a sealing surface stroke compensation mechanism to compensate for the stroke of the sealing structure and avoid the impact on wafer transmission caused by the sealing structure of the transfer valve etc. not being properly sealed.

[0007] A second object of the present invention is to provide a transfer valve device.

[0008] In order to achieve the above first object, the present invention provides the following scheme:

[0009] A sealing surface stroke compensation mechanism, comprising:

[0010] A retractable seal is retractably mounted on the inlet end of the chamber to be sealed, the retractable seal is provided with a transmission port communicating with the chamber to be sealed, and the retractable seal is used to fit with the sealing structure so that the sealing structure can seal the transmission port;

[0011] a detection structure for detecting the distance between the sealing structure and the retractable member; and

[0012] A telescopic driving member drives the telescopic member to be telescopic, and the telescopic driving member is connected to the detection structure signal to drive the telescopic member to fit with the sealing structure to seal the transmission port.

[0013] In a specific embodiment, the detection structure comprises:

[0014] an excitation light source installed at one end of the retractable member away from the chamber to be sealed and located on one side of the transmission port; and

[0015] An optical signal receiving component is installed at one end of the retractable component away from the chamber to be sealed and located on the other side of the transmission port. The optical signal receiving component is used to receive the optical signal emitted by the excitation light source. The light emitting port of the excitation light source and the receiving light port of the optical signal receiving component are both located on the fitting surface of the retractable component and the sealing structure.

[0016] In another specific embodiment, the detection structure includes a pressure sensor installed on the end of the retractable member facing away from the chamber to be sealed, the pressure sensor is located on one side of the transmission port, and the pressure sensor is located on the fitting surface of the retractable member and the sealing structure.

[0017] In another specific embodiment, the sealing surface stroke compensation mechanism further includes a signal conversion module;

[0018] The signal conversion module is respectively connected to the detection structure and the telescopic driving member for signals, and is used to convert the signal of the detection structure into a signal for driving the telescopic driving member to move.

[0019] In another specific embodiment, the telescopic drive member includes a first telescopic cylinder and a signalizer;

[0020] The cylinder rod of the first telescopic cylinder is connected to the telescopic member, and the signal device is installed on the cylinder body of the first telescopic cylinder and is connected to the detection structure signal.

[0021] The various embodiments according to the present invention can be arbitrarily combined as needed, and the embodiments obtained after these combinations are also within the scope of the present invention and are part of the specific implementation methods of the present invention.

[0022] In order to achieve the above second object, the present invention provides the following solution:

[0023] A transmission valve device comprises a sealing surface stroke compensation mechanism as described in any one of the above.

[0024] In another specific embodiment, the transfer valve device further comprises a pre-pumping chamber, a transfer chamber, and a sealing structure;

[0025] The retractable seal of the sealing surface stroke compensation mechanism is retractably installed at the inlet end of the transfer chamber, and a sealing structure is provided between the outlet of the pre-pumping chamber and the transfer port of the sealing surface stroke compensation mechanism, and the sealing structure is used to seal the transfer port.

[0026] In another specific embodiment, the transfer valve device further comprises a first housing;

[0027] The first shell is placed between the pre-pumping chamber and the transfer chamber, and is connected to the outlet of the pre-pumping chamber and the inlet of the transfer chamber respectively;

[0028] The sealing surface stroke compensation mechanism is located in the first housing;

[0029] The sealing structure can enter the first shell and seal the transmission port.

[0030] In another specific embodiment, the transfer valve device further comprises a sealing drive assembly that drives the sealing structure to seal the transfer port;

[0031] The driving end of the sealing driving assembly is connected to the sealing structure.

[0032] In another specific embodiment, the seal drive assembly includes a second telescopic cylinder;

[0033] The cylinder rod of the second telescopic cylinder is connected to the sealing structure, and the telescopic direction of the second telescopic cylinder is perpendicular or inclined to the telescopic direction of the first telescopic cylinder of the sealing surface stroke compensation mechanism.

[0034] In another specific embodiment, the seal drive assembly further comprises a connecting plate;

[0035] The connecting plate is vertically or obliquely mounted on the cylinder rod of the second telescopic cylinder;

[0036] The sealing structure is installed vertically or obliquely on the connecting plate.

[0037] In another specific embodiment, the sealing structure is mounted on the connecting plate in an adjustable position along a direction parallel to the extension and retraction direction of the first telescopic cylinder.

[0038] In another specific embodiment, the seal drive assembly further comprises a support rod;

[0039] The support rod is connected to the connecting plate, and the sealing structure is installed on the support rod.

[0040] In another specific embodiment, the transfer valve device further comprises a second housing;

[0041] The second shell is connected to the first shell, and the sealing drive assembly is installed in the second shell.

[0042] In another specific embodiment, a cleaning hole is provided on the first shell.

[0043] The various embodiments according to the present invention can be arbitrarily combined as needed, and the embodiments obtained after these combinations are also within the scope of the present invention and are part of the specific implementation methods of the present invention.

[0044] The sealing surface stroke compensation mechanism provided by the present invention, when the sealing structure seals the transmission port on the retractable part, detects whether the sealing structure and the retractable part are sealed through the detection structure, and if a gap is detected between the two, the retractable driving part drives the retractable part to move in the direction close to the sealing structure, so that the sealing structure completely seals the transmission port. The present invention compensates for the stroke of the sealing structure, and avoids the influence on wafer transmission caused by the sealing structure of the transmission valve and the like not being properly sealed. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0046] Figure 1 A schematic diagram of the three-dimensional structure of the transmission valve device provided by the present invention;

[0047] Figure 2 A schematic diagram of a partial three-dimensional structure of a transmission valve device provided by the present invention;

[0048] Figure 3 A schematic diagram of the three-dimensional structure of the sealing surface stroke compensation mechanism provided by the present invention;

[0049] Figure 4 This is a schematic diagram of a three-dimensional structure in which the sealing surface stroke compensation mechanism provided by the present invention is assembled together with the sealing drive assembly and is exposed at the transmission port.

[0050] in, Figure 1-Figure 4 middle:

[0051] Sealing surface stroke compensation mechanism 100, telescopic part 101, transmission port 101a, sealing structure 200, detection structure 102, telescopic driving part 103, excitation light source 102a, optical signal receiving part 102b, transmission valve device 1000, pre-vacuum chamber 300, transmission chamber 400, first shell 500, sealing drive assembly 600, second telescopic cylinder 601, connecting plate 602, support rod 603, second shell 700, cleaning hole 501. DETAILED DESCRIPTION

[0052] The following will be combined with the attached embodiment of the present invention Figure 1-4 , the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0053] In the description of the present invention, it should be understood that the terms "upper", "lower", "top surface", "bottom surface" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the positions or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations of the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0054] Combination Figure 1-Figure 4 As shown, the first aspect of the present invention provides a sealing surface stroke compensation mechanism 100 for stroke compensation of a sealing structure 200 to avoid the influence on wafer transmission caused by inadequate sealing of the sealing structure 200 such as a transfer valve.

[0055] Specifically, Figure 3 As shown, the sealing surface stroke compensation mechanism 100 includes a telescopic member 101 , a detection structure 102 and a telescopic driving member 103 .

[0056] like Figure 2 As shown, taking the chamber to be sealed as the transfer chamber 400 as an example, the retractable member 101 is sealed and retractably installed at the inlet end of the chamber to be sealed, that is, the retractable member 101 is sealed and retractably installed at the inlet end of the transfer chamber 400.

[0057] The retractable member 101 is provided with a transmission port 101a which is connected to the chamber to be sealed. Figure 3As shown; the retractable member 101 is used to fit with the sealing structure 200 so that the sealing structure 200 can seal the transmission port 101a. It can be understood that the size of the inlet end of the chamber to be sealed is larger than the size of the transmission port 101a, and the telescopic direction of the retractable member 101 is the direction of the spacing formed between the transmission port 101a and the sealing structure 200 when the transmission port 101a is sealed. It should be noted that the retractable member 101 can be retractably installed at the inlet end of the chamber to be sealed, which can be: the retractable member 101 can be slidably installed at the inlet end of the chamber to be sealed; it can also be: the first end of the retractable member 101 is fixedly connected to the inlet end of the chamber to be sealed, and the second end is slidably connected to the first end; it can also be: the retractable member 101 is an elastic member, and the first end is fixedly connected to the inlet end of the chamber to be sealed, and the other end is used to abut against the sealing structure 200, etc.

[0058] The detection structure 102 is used to detect the distance between the sealing structure 200 and the retractable member 101, so as to adjust the retractable member 101 according to the distance detected by the detection structure 102, so that the sealing structure 200 can seal the transmission port 101a.

[0059] The telescopic driving member 103 drives the telescopic member 101 to telescope. Specifically, a driving end of the telescopic driving member 103 is connected to the telescopic member 101 to drive the telescopic movement of the telescopic member 101.

[0060] In order to facilitate the telescopic driving member 103 to drive the telescopic member 101 to move into place, the present invention discloses that the telescopic driving member 103 is connected to the detection structure 102 by signal, so as to drive the telescopic member 101 to fit with the sealing structure 200 to seal the transmission port 101a. The present invention compensates for the stroke of the sealing structure 200, and avoids the influence on the wafer transmission caused by the sealing structure 200 such as the transmission valve not being sealed in place.

[0061] In some embodiments, Figure 3 and Figure 4 As shown, the detection structure 102 includes an excitation light source 102a and an optical signal receiving element 102b, wherein the excitation light source 102a is installed at one end of the retractable element 101 away from the chamber to be sealed, and the excitation light source 102a located on one side of the transmission port 101a can emit an optical signal to the other side of the transmission port 101a. It can be understood that the side of the transmission port 101a here refers to the side of the transmission port 101a along the direction perpendicular to the transmission port 101a transmitting the wafer, etc.

[0062] The optical signal receiving element 102b is installed at one end of the retractable element 101 away from the chamber to be sealed, and is located on the other side of the transmission port 101a, and is used to receive the optical signal emitted by the excitation light source 102a. Specifically, the optical signal receiving device includes a CCD (charge coupled device) detector or a CMOS (complementary metal oxide semiconductor) detector, etc. The optical signal receiving element 102b can dynamically feedback the retractable element 101 according to the intensity of the received light to control its adjustment range, that is, when the intensity of the transmitted light is high, the adjustment range of the retractable element 101 is large; when the intensity of the transmitted light is weak, the adjustment range of the retractable element 101 is small. Realizing efficient and fast real-time dynamic feedback based on the light intensity can shorten the compensation time and improve the compensation efficiency.

[0063] In order to facilitate the detection of whether the sealing structure 200 has sealed the transmission port 101a well, the valve discloses that the light-emitting port of the excitation light source 102a and the light-receiving port of the light signal receiving element 102b are both located on the sealing surface of the telescopic element 101 and the sealing structure 200. It can be understood that the sealing surface of the telescopic element 101 and the sealing structure 200 refers to the surface where the transmission port 101a on the telescopic element 101 is sealed by the sealing structure 200.

[0064] It should be noted that, one of the excitation light source 102a and the optical signal receiving element 102b can be installed at the end of the telescopic element 101 away from the chamber to be sealed, and the other can be installed at the end of the sealing structure 200 used to seal the transmission port 101a. In this case, grooves can be respectively opened at the end of the telescopic element 101 away from the chamber to be sealed and the end of the sealing structure 200 used to seal the transmission port 101a to respectively install the excitation light source 102a or the optical signal receiving element 102b, so as to avoid collision and interference between the excitation light source 102a and the optical signal receiving element 102b.

[0065] In some other embodiments, the detection structure 102 includes a pressure sensor, wherein the pressure sensor is installed at one end of the telescopic member 101 away from the chamber to be sealed and located on one side of the transmission port 101a, and the pressure sensor is located on the sealing surface of the telescopic member 101 for fitting with the sealing structure 200. When the sealing structure 200 is pressed on the telescopic member 101, the sealing structure 200 exerts pressure on the pressure sensor, and at this time, the pressure sensor detects a pressure signal, indicating that the sealing structure 200 completely seals the transmission port 101a; when there is a gap between the sealing structure 200 and the telescopic member 101, the sealing structure 200 cannot apply force to the pressure sensor, and at this time, the pressure sensor cannot detect a pressure signal, indicating that the sealing structure 200 does not completely seal the transmission port 101a.

[0066] In some embodiments, the sealing surface stroke compensation mechanism 100 further includes a signal conversion module, which is respectively connected to the detection structure 102 and the telescopic drive member 103 for converting the signal of the detection structure 102 into a signal for driving the telescopic drive member 103 to move.

[0067] Taking the detection structure 102 including the excitation light source 102 a and the optical signal receiving element 102 b as an example, the signal conversion module is a photoelectric signal converter, which is used to convert the optical signal into an electrical signal and output it to the telescopic driving element 103 .

[0068] In some embodiments, the telescopic driving member 103 includes a first telescopic cylinder and a signal device, the cylinder rod of the first telescopic cylinder is connected to the telescopic member 101 , the signal device is installed on the cylinder body of the first telescopic cylinder and is connected to the detection structure 102 by signal.

[0069] Taking the detection structure 102 including an excitation light source 102a and an optical signal receiving element 102b, and the signal conversion module being a photoelectric signal converter as an example, the signal device is connected to the photoelectric signal converter signal, and the signal device controls the extension and retraction of the cylinder rod of the first telescopic cylinder according to the signal transmitted by the photoelectric signal converter.

[0070] Specifically, the first telescopic cylinder may be a pneumatic cylinder, or a hydraulic cylinder, etc. Of course, an electric push rod, etc. may be provided to replace the first telescopic cylinder.

[0071] like Figure 1 As shown, a second aspect of the present invention provides a transmission valve device 1000, comprising a sealing surface stroke compensation mechanism 100 as in any one of the above embodiments.

[0072] Since the transmission valve device 1000 provided by the present invention includes the sealing surface stroke compensation mechanism 100 in any one of the above-mentioned embodiments, the beneficial effects of the sealing surface stroke compensation mechanism 100 are all included in the transmission valve device 1000 provided by the present invention.

[0073] In some embodiments, the transfer valve device 1000 also includes a pre-pumping chamber 300, a transfer chamber 400 and a sealing structure 200. The retractable part 101 of the sealing surface stroke compensation mechanism 100 is sealably and retractably installed at the inlet end of the transfer chamber 400. A sealing structure 200 is arranged between the outlet of the pre-pumping chamber 300 and the transfer port 101a of the sealing surface stroke compensation mechanism 100. The sealing structure 200 is used to seal the transfer port 101a.

[0074] Specifically, the transfer port 101 a and the outlet of the pre-evacuation chamber 300 are in a straight line to facilitate the transportation of materials such as wafers.

[0075] Wafers and other materials first enter the pre-evacuation chamber 300, and the sealing structure 200 is opened to expose the transfer port 101a, so that the pre-evacuation chamber 300 is connected to the transfer chamber 400, and wafers and other materials enter the transfer chamber 400 through the transfer port 101a.

[0076] Furthermore, if Figure 1 As shown, the transfer valve device 1000 also includes a first shell 500, which is placed between the pre-pumping chamber 300 and the transfer chamber 400, and is respectively connected to the outlet of the pre-pumping chamber 300 and the inlet of the transfer chamber 400. The sealing surface stroke compensation mechanism 100 is located in the first shell 500, that is, the first shell 500 provides a protective cavity for the sealing surface to form a supplementary mechanism.

[0077] The sealing structure 200 can enter the first housing 500 and seal the transmission port 101a. It can be understood that the sealing structure 200 can always be located in the first housing 500, or can enter the first housing 500 only when sealing the transmission port 101a.

[0078] Furthermore, if Figure 2 and Figure 4 As shown, the transfer valve device 1000 further includes a sealing drive assembly 600, and the sealing drive assembly 600 is used to drive the sealing structure 200 to seal the transfer port 101a.

[0079] The driving end of the sealing driving assembly 600 is connected to the sealing structure 200 , and the sealing driving assembly 600 drives the sealing structure 200 to seal or expose the transmission port 101 a .

[0080] Specifically, the sealing drive assembly 600 includes a second telescopic cylinder 601, a cylinder rod of the second telescopic cylinder 601 is connected to the sealing structure 200, and the telescopic direction of the second telescopic cylinder 601 is perpendicular or inclined to the telescopic direction of the first telescopic cylinder of the sealing surface stroke compensation mechanism 100, so as to avoid the sealing structure 200 interfering with the transportation of materials such as wafers due to the same telescopic direction of the first telescopic cylinder and the second telescopic cylinder 601.

[0081] Furthermore, the sealing drive assembly 600 further includes a connecting plate 602, which is vertically or obliquely mounted on the cylinder rod of the second telescopic cylinder 601, and the sealing structure 200 is vertically or obliquely mounted on the connecting plate 602. In other words, the connection plate 602 is provided to avoid direct connection between the sealing structure 200 and the cylinder rod of the second telescopic cylinder 601, thereby avoiding damage to the cylinder rod of the second telescopic cylinder 601 caused by frequent disassembly and assembly of the sealing structure 200 and the cylinder rod of the second telescopic cylinder 601.

[0082] Furthermore, the sealing structure 200 is mounted on the connecting plate 602 in an adjustable position along the extension direction parallel to the first extension cylinder. When the sealing structure 200 is worn and there is a certain gap between the sealing transmission port 101a and the sealing structure 200, the position compensation can be achieved by adjusting the position of the sealing structure 200 on the connecting plate 602.

[0083] It can be understood that the sealing structure 200 can be installed on the connecting plate 602 with an adjustable position. The sealing structure 200 and the connecting plate 602 can be installed in a manner such that: a slide groove is opened on one of the sealing structure 200 and the connecting plate 602, and a slide rail slidably connected to the slide groove is set on the other, and a long hole is opened in the groove bottom or groove wall of the slide groove, and a threaded hole is opened on the slide rail, and the sealing structure 200 is fixed to the position of the connecting plate 602 by fasteners such as screws passing through the long hole and threadedly fixing with the threaded hole; or, a plurality of through holes arranged at intervals are opened on the connecting plate 602, and a threaded connection hole is set on the sealing structure 200, and the sealing structure 200 is fixed to the position of the connecting plate 602 by fasteners such as screws passing through a through hole on the connecting plate 602 and connecting with the threaded connection hole.

[0084] Furthermore, the sealing drive assembly 600 further includes a support rod 603, wherein the support rod 603 is connected to the connecting plate 602, and the sealing structure 200 is mounted on the support rod 603. In other words, the connection between the sealing structure 200 and the connecting plate 602 is achieved through the support rod 603. The provision of the support rod 603 reduces the height of the sealing structure 200, so that the sealing structure 200 is only used for sealing the transmission port 101a, thereby reducing the overall weight.

[0085] In order to achieve stable support for the sealing structure 200 , the number of the support rods 603 may be 2 or more.

[0086] It can be understood that the support rod 603 can be a rod with a fixed length, and the connecting plate 602 and the sealing structure 200 are respectively welded to the support rod 603. Of course, a plurality of fastening holes connected to the connecting plate 602 or the sealing structure 200 arranged along the height direction can also be opened on the support rod 603; or, the length of the support rod 603 can be adjusted, for example, the support rod 603 is a retractable sleeve structure, etc.

[0087] In some embodiments, the transfer valve device 1000 further includes a second housing 700, which is connected to the first housing 500, and the sealing drive assembly 600 is installed in the second housing 700. The second housing 700 protects the sealing drive assembly 600 on the one hand, and cooperates with the first housing 500, the pre-evacuation chamber 300 and the transfer chamber 400 to form a closed cavity structure on the other hand.

[0088] Furthermore, a cleaning hole 501 is provided on the first shell 500 . Specifically, the cleaning hole 501 is located at the bottom of the first shell 500 , and can clear particles generated by vibration by blowing gas when the sealing structure 200 seals the transmission port 101 a .

[0089] It should be noted that the number of cleaning holes 501 is not limited to one, and two or more cleaning holes may be provided.

[0090] A purge joint is connected to the cleaning hole 501 to facilitate the connection of a negative pressure component and the like.

[0091] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0092] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and inventive features disclosed herein.

[0093] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0094] The preferred embodiments of the present invention disclosed above are only used to help explain the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A sealing surface stroke compensation mechanism, characterized in that: include: A retractable seal is retractably mounted on the inlet end of the chamber to be sealed, the retractable seal is provided with a transmission port communicating with the chamber to be sealed, and the retractable seal is used to fit with the sealing structure so that the sealing structure can seal the transmission port; A detection structure for detecting the distance between the sealing structure and the retractable member; as well as A telescopic driving member drives the telescopic member to be telescopic, and the telescopic driving member is connected to the detection structure signal to drive the telescopic member to fit with the sealing structure to seal the transmission port.

2. The sealing surface stroke compensation mechanism according to claim 1, characterized in that: The detection structure comprises: an excitation light source installed at one end of the retractable member away from the chamber to be sealed and located on one side of the transmission port; and An optical signal receiving component is installed at one end of the retractable component away from the chamber to be sealed and located on the other side of the transmission port. The optical signal receiving component is used to receive the optical signal emitted by the excitation light source. The light emitting port of the excitation light source and the receiving light port of the optical signal receiving component are both located on the fitting surface of the retractable component and the sealing structure.

3. The sealing surface stroke compensation mechanism according to claim 1, characterized in that: The detection structure includes a pressure sensor installed at one end of the retractable member away from the chamber to be sealed, the pressure sensor is located on one side of the transmission port, and the pressure sensor is located on the fitting surface of the retractable member and the sealing structure.

4. The sealing surface stroke compensation mechanism according to claim 1, characterized in that: Also includes a signal conversion module; The signal conversion module is respectively connected to the detection structure and the telescopic driving member for signals, and is used to convert the signal of the detection structure into a signal for driving the telescopic driving member to move.

5. The sealing surface stroke compensation mechanism according to any one of claims 1 to 4, characterized in that: The telescopic drive member includes a first telescopic cylinder and a signal device; The cylinder rod of the first telescopic cylinder is connected to the telescopic member, and the signal device is installed on the cylinder body of the first telescopic cylinder and is connected to the detection structure signal.

6. A transmission valve device, characterized in that: It comprises a sealing surface stroke compensation mechanism as described in any one of claims 1 to 5.

7. The transfer valve device according to claim 6, characterized in that It also includes a pre-pumping chamber, a transfer chamber and a sealing structure; The retractable seal of the sealing surface stroke compensation mechanism is retractably installed at the inlet end of the transfer chamber, and a sealing structure is provided between the outlet of the pre-pumping chamber and the transfer port of the sealing surface stroke compensation mechanism, and the sealing structure is used to seal the transfer port.

8. The transfer valve device according to claim 7, characterized in that Also includes a first housing; The first shell is placed between the pre-pumping chamber and the transfer chamber, and is connected to the outlet of the pre-pumping chamber and the inlet of the transfer chamber respectively; The sealing surface stroke compensation mechanism is located in the first housing; The sealing structure can enter the first shell and seal the transmission port.

9. The transfer valve device according to claim 8, characterized in that Also included is a sealing drive assembly for driving the sealing structure to seal the transmission port; The driving end of the sealing driving assembly is connected to the sealing structure.

10. The transfer valve device according to claim 9, characterized in that , the sealing drive assembly includes a second telescopic cylinder; The cylinder rod of the second telescopic cylinder is connected to the sealing structure, and the telescopic direction of the second telescopic cylinder is perpendicular or inclined to the telescopic direction of the first telescopic cylinder of the sealing surface stroke compensation mechanism.

11. The transfer valve device according to claim 10, characterized in that ,The sealing drive assembly also includes a connecting plate; The connecting plate is vertically or obliquely mounted on the cylinder rod of the second telescopic cylinder; The sealing structure is installed vertically or obliquely on the connecting plate.

12. The transfer valve device according to claim 11, characterized in that The sealing structure is installed on the connecting plate in an adjustable position along the telescopic direction parallel to the telescopic direction of the first telescopic cylinder.

13. The transfer valve device according to claim 11, characterized in that ,The sealing drive assembly also includes a support rod; The support rod is connected to the connecting plate, and the sealing structure is installed on the support rod.

14. The transfer valve device according to claim 9, characterized in that , further comprising a second shell; The second shell is connected to the first shell, and the sealing drive assembly is installed in the second shell.

15. The transfer valve device according to any one of claims 8 to 14, characterized in that , a cleaning hole is provided on the first shell.

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