Metamaterial-based design optimization method for terahertz sensor array

Abstract

The present application relates to the technical field of terahertz, and particularly relates to a terahertz sensor array design optimization method based on super surface enhancement, which improves the performance of the terahertz sensor array in terms of sensitivity, resolution and frequency response, etc. through multi-dimensional optimization design, obtains initial parameters of the array based on a physical model, improves the transmission efficiency and phase control ability of terahertz waves by optimizing the structure and arrangement of super surface units and combining electromagnetic simulation analysis, evaluates the performance change of the sensor under high temperature and high stress conditions through thermal effect and stress field simulation, ensures the stability and reliability of the sensor in complex environments, and feeds back the data of key performance indicators such as sensitivity, resolution and response time based on laboratory tests to adjust the design parameters and complete iterative optimization; the present application significantly improves the performance and environmental adaptability of the terahertz sensor array by combining multi-dimensional simulation and experimental feedback, and is suitable for a wide range of terahertz detection applications.

Description

Technical Field

[0001] This invention relates to the field of terahertz technology, and in particular to a method for designing and optimizing terahertz sensor arrays based on metasurface enhancement. Background Technology

[0002] Terahertz technology, with its unique advantages in non-ionization, high penetration, and high resolution, has broad application prospects in fields such as biomedical imaging, non-destructive testing, security, communications, and spectral analysis. Terahertz sensor arrays can efficiently detect terahertz waves, enabling precise detection of complex targets. Metasurface technology, as an artificially designed nanostructure, possesses the ability to precisely control the phase, amplitude, and polarization state of electromagnetic waves. When combined with terahertz sensor arrays, it can significantly improve detection performance, especially in enhancing sensitivity, resolution, and frequency response. Therefore, the design of terahertz sensor arrays based on metasurface enhancement has become one of the current research focuses.

[0003] However, existing terahertz sensor array technologies based on metasurface enhancement still face many challenges in multidimensional information detection, stability in complex environments, and design optimization. First, existing designs often struggle to maintain high sensitivity and good frequency response over a wide frequency range, especially with significant performance fluctuations under different incident angles and polarization conditions. Furthermore, sensor arrays are prone to performance degradation due to thermal expansion or mechanical stress under high temperature and high stress environments, affecting their reliability. Finally, existing technologies lack effective experimental verification and feedback mechanisms; the optimization of design parameters often relies on simulation, lacking data support from actual operating conditions, leading to discrepancies between the final design results and actual performance. Summary of the Invention

[0004] This invention provides a method for designing and optimizing terahertz sensor arrays based on metasurface enhancement.

[0005] The design optimization method for terahertz sensor arrays based on metasurface enhancement includes the following steps:

[0006] S1, Initial parameter collection for terahertz sensor array design: By establishing a physical model, the structural parameters and material properties of the terahertz sensor array are obtained, including array unit size, spacing, refractive index and transmittance of the material. Combined with the required application scenario, the design objectives are initially selected, including sensitivity, resolution and detection range.

[0007] S2, Metasurface Unit Design and Simulation: Based on the selected design objectives, electromagnetic simulation analysis is performed by optimizing the metasurface unit structure, including the geometry, size, arrangement, and material properties of the cells. The simulation process uses the finite-difference time-domain method to calculate the propagation of terahertz waves in complex structures, and obtains the overall performance parameters of the metasurface unit and the terahertz sensor array, including sensitivity and frequency response.

[0008] S3, Metasurface and Sensor Array Coupling Optimization: By analyzing the electromagnetic field distribution of the coupling between the metasurface unit and the sensor array, the interaction between the metasurface and the sensor array is optimized to ensure that the terahertz wave can effectively enhance the sensor response under different incident angles and polarization states. The performance of the overall array structure is evaluated using the transfer matrix method, and the matching degree between the metasurface unit and the sensor array is further adjusted.

[0009] S4, Multiphysics Simulation Optimization: Based on electromagnetic field simulation, thermal effect and stress field simulation are added to evaluate the performance degradation of metasurfaces due to temperature and mechanical stress factors in actual working environment, and optimize the design structure based on the results;

[0010] S5, Experimental Verification and Data Feedback: Based on the optimized design structure, a sample is manufactured and its performance is tested in the laboratory. The sensitivity, resolution, and response time of the terahertz sensor array are tested. The test results are fed back to S1 to S4 to further adjust the design parameters and complete the final optimization.

[0011] Optionally, S1 specifically includes:

[0012] S11, Establishment of the physical model: Based on the structural and material properties of the terahertz sensor array, a physical model is established to describe the propagation characteristics of terahertz waves in the sensor array, including the refraction, reflection, diffraction and scattering behavior of electromagnetic waves.

[0013] S12, Determination of array unit geometry: Based on the physical model, determine the geometry of the sensor array unit, including the width, height and spacing of the sensor array unit;

[0014] S13, Selection of material properties: Analyze and select material properties for the terahertz band, including the refractive index and transmittance of the material;

[0015] S14, Determining the design objectives: Based on the actual application scenario, the design objectives of the terahertz sensor array are initially determined.

[0016] Optionally, S2 includes:

[0017] S21, Metasurface Cell Geometry Design: Determine the geometry of the metasurface cell based on the defined design objectives (sensitivity, resolution, and detection range);

[0018] S22, Cell size optimization: Design the cell size (width, height) to match the cell with the target wavelength;

[0019] S23, Design of cell arrangement: Based on the designed cell geometry and size, design the cell arrangement, considering periodic or non-periodic arrangement.

[0020] Optionally, S2 further includes:

[0021] S24, Electromagnetic simulation model establishment: Based on the optimized metasurface unit structure, an electromagnetic simulation model is established to simulate the propagation path of terahertz waves on the metasurface unit, including diffraction, scattering and phase modulation effects.

[0022] S25, Finite-Difference Time-Domain Simulation: The finite-difference time-domain method is used to simulate the propagation of terahertz waves in complex structures;

[0023] The finite-difference time-domain method simulation calculates the electromagnetic field changes of terahertz waves through discretized grids, and obtains the electromagnetic response of the metasurface element. The simulation results include electric field distribution, phase change and frequency response.

[0024] S26: Performance Parameter Calculation: Based on the simulation results of the finite-difference time-domain method, calculate the overall performance parameters of the metasurface unit and the terahertz sensor array, including sensitivity and frequency response.

[0025] Optionally, S3 includes:

[0026] S31, Electromagnetic field distribution analysis: The electromagnetic field distribution between the metasurface unit and the sensor array is analyzed through electromagnetic field simulation. The propagation path and interaction of terahertz waves under different incident angles and polarization states are considered during the simulation.

[0027] S32, Coupling Effect Optimization: Based on the electromagnetic field distribution analysis results, the coupling effect between the metasurface unit and the sensor array is optimized. Under different incident angles and polarization states, the terahertz wave effectively enhances the sensor response. By adjusting the position and arrangement of the metasurface unit, the electromagnetic coupling effect is maximized, thereby improving the detection performance of the overall array.

[0028] S33, Response Analysis under Polarization: Simulation analysis of the response of terahertz waves under different polarization states (such as linear polarization and circular polarization) to ensure that the metasurface and sensor array have good electromagnetic response performance under various polarization conditions. Based on the response changes under different polarization conditions, the material and arrangement of the metasurface unit are further optimized.

[0029] Optionally, S3 further includes:

[0030] S34, Performance evaluation using the transfer matrix method: The performance of the metasurface and sensor array as a whole is evaluated using the transfer matrix method;

[0031] The transmission matrix method is used to describe the propagation and reflection of electromagnetic waves in each layer of the structure, and to calculate the transmission efficiency and phase change.

[0032] S35, Matching Degree Optimization: Based on the evaluation results of the transfer matrix method, the matching degree between the metasurface unit and the sensor array is further adjusted;

[0033] S36, Frequency Response Adjustment: By changing the geometry and material properties of the metasurface units, the frequency response of the sensor array is adjusted to match the sensitivity and frequency response range in the design objectives.

[0034] Optionally, S4 includes:

[0035] S41, Thermal Effect Simulation: Based on electromagnetic field simulation, thermal effect simulation is added to evaluate the performance changes of metasurfaces and sensor arrays at different operating temperatures.

[0036] Thermal effects cause materials to expand or contract, thus affecting the transmission and response of terahertz waves. By establishing a heat conduction equation, the temperature distribution of the sensor array is calculated, and the coefficient of thermal expansion of the material is calculated using a linear thermal expansion formula. The temperature change of the sensor array when absorbing or releasing heat is expressed as:

[0037] Q = mcΔT;

[0038] Where Q is the heat absorbed by the sensor array, m is the mass of the array, c is the specific heat capacity of the material, and ΔT is the temperature change;

[0039] By simulating and analyzing the temperature distribution of the sensor array, the impact of temperature changes on the electromagnetic performance (such as sensitivity and frequency response) of the sensor array is predicted.

[0040] S42, Thermal Expansion Effect Evaluation: Based on thermal effect simulation, the impact of the expansion of metasurface units under high temperature conditions (above 100 degrees is considered a high temperature condition) on the phase modulation and frequency response of terahertz waves is further evaluated. In response to the performance degradation caused by expansion, the material selection and geometry of metasurface units are optimized.

[0041] Optionally, S4 further includes:

[0042] S43, Stress Field Simulation: Add stress field simulation to evaluate the structural stability of the sensor array under different mechanical stress conditions;

[0043] S44, Mechanical Stability Optimization: Based on stress field simulation results, the structure of the metasurface unit and sensor array is optimized, and the material and geometric design are adjusted to enhance the mechanical stability under high stress environment (stress greater than 100MPa is a high stress environment), ensuring that the array can maintain excellent detection performance under long-term vibration and pressure.

[0044] Optionally, S5 includes:

[0045] S51, Sample fabrication: Fabricate samples based on the optimized metasurface and terahertz sensor array design;

[0046] S52, Performance Testing: Laboratory performance testing of manufactured samples, including sensitivity, resolution, and response time;

[0047] S53, Test Data Collection: During performance testing, collect all key performance indicator data to ensure that the data on sensitivity, resolution, and response time are sufficiently detailed to facilitate subsequent feedback and optimization.

[0048] Optionally, S5 further includes:

[0049] S54, Data Analysis and Modeling: Based on the performance index data obtained from laboratory performance tests, conduct data analysis, construct a performance model based on the experimental results, and analyze the relationship between performance indexes (such as sensitivity, resolution, and response time) and structural parameters and material properties.

[0050] S55, Feedback and Design Parameter Adjustment: Feedback the performance index data obtained from laboratory performance testing to the aforementioned steps (S1 to S4) of the design, and further adjust the design parameters based on the analysis results of the performance model;

[0051] S56, Design Optimization Iteration: Based on the feedback performance index data and the analysis results of the performance model, conduct design iteration, update and optimize the design scheme, and prepare for a new round of sample manufacturing and testing until the performance index meets the expected requirements.

[0052] The beneficial effects of this invention are:

[0053] This invention significantly improves the sensitivity of the sensor by adjusting the geometry, size, and arrangement of the metasurface units, combined with electromagnetic simulation and coupling optimization. In particular, it maintains high-efficiency response under different frequencies and polarization conditions. Coupled analysis using the transfer matrix method and the finite-difference time-domain method ensures efficient frequency response across a wide frequency range. Simultaneously, optimizing the arrangement and structural design of the metasurface units guarantees the spatial resolution of the terahertz sensor array under complex operating conditions. This multi-dimensional design optimization greatly enhances the overall performance of the sensor array.

[0054] This invention effectively evaluates the stability and reliability of a terahertz sensor array under high-temperature and high-stress environments through thermal effect simulation and stress field simulation. Thermal effect simulation calculates the temperature distribution of the sensor, optimizing the metasurface material and structural design to control thermal expansion at high temperatures and reduce the impact of temperature changes on electromagnetic performance. Stress field simulation analyzes structural deformation under different stress conditions, ensuring the sensor maintains mechanical stability under long-term high stress or vibration conditions by optimizing the Young's modulus of the material and the structural design. This multiphysics simulation optimization significantly improves the reliability of the sensor array under harsh environments such as high temperature and high pressure, enabling it to operate stably under complex conditions.

[0055] This invention employs a closed-loop design optimization process involving experimental verification and data feedback to ensure continuous improvement of the design scheme in practical applications. Key performance indicators such as sensitivity, resolution, and response time collected during experiments are analyzed and fed back to the aforementioned design steps, ensuring continuous optimization of design parameters. This experimental data feedback mechanism, combined with modeling analysis, drives iterative optimization of the design scheme, ensuring that the terahertz sensor array can adapt to different application requirements under varying operating conditions. This design process, which continuously optimizes through experimental feedback, not only improves system performance but also enhances the adaptability and stability of the sensor array under complex operating conditions. Attached Figure Description

[0056] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0057] Figure 1 This is a schematic diagram of the method flow according to an embodiment of the present invention;

[0058] Figure 2 This is a schematic diagram of the S3 process in an embodiment of the present invention. Detailed Implementation

[0059] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments. It should also be noted that, to make the embodiments more comprehensive, the following embodiments are the best and preferred embodiments, and those skilled in the art can use other alternative methods to implement some well-known technologies; moreover, the accompanying drawings are only for more specific description of the embodiments and are not intended to specifically limit the present invention.

[0060] It should be noted that the use of terms such as "an embodiment," "an embodiment," "an exemplary embodiment," and "some embodiments" in the specification indicates that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments (whether explicitly described or not) should be within the knowledge of those skilled in the art.

[0061] Generally, terms can be understood at least partly from their use in context. For example, depending at least partly on the context, the term "one or more" as used herein can be used to describe any feature, structure, or characteristic in a singular sense, or a combination of features, structures, or characteristics in a plural sense. Additionally, the term "based on" can be understood not necessarily to convey an exclusive set of factors, but rather, alternatively, depending at least partly on the context, to allow for the presence of other factors that are not necessarily explicitly described.

[0062] like Figures 1-2 As shown, the design optimization method for terahertz sensor arrays based on metasurface enhancement includes the following steps:

[0063] S1, Initial parameter collection for terahertz sensor array design: By establishing a physical model, the structural parameters and material properties of the terahertz sensor array are obtained, including array unit size, spacing, refractive index and transmittance of the material. Combined with the required application scenario, the design objectives are initially selected, including sensitivity, resolution and detection range.

[0064] S2, Metasurface Unit Design and Simulation: Based on the selected design objectives, electromagnetic simulation analysis is performed by optimizing the metasurface unit structure, including the geometry, size, arrangement, and material properties of the cells. The simulation process uses the finite-difference time-domain method to calculate the propagation of terahertz waves in complex structures, and obtains the overall performance parameters of the metasurface unit and the terahertz sensor array, including sensitivity and frequency response.

[0065] S3, Metasurface and Sensor Array Coupling Optimization: By analyzing the electromagnetic field distribution of the coupling between the metasurface unit and the sensor array, the interaction between the metasurface and the sensor array is optimized to ensure that the terahertz wave can effectively enhance the sensor response under different incident angles and polarization states. The performance of the overall array structure is evaluated using the transfer matrix method, and the matching degree between the metasurface unit and the sensor array is further adjusted.

[0066] S4, Multiphysics Simulation Optimization: Based on electromagnetic field simulation, thermal effect and stress field simulation are added to evaluate the performance degradation of metasurfaces due to temperature and mechanical stress factors in actual working environment, and optimize the design structure based on the results to ensure the stability and reliability of sensor array in complex environment.

[0067] S5, Experimental Verification and Data Feedback: Based on the optimized design structure, a sample is manufactured and its performance is tested in the laboratory. The sensitivity, resolution, and response time of the terahertz sensor array are tested. The test results are fed back to S1 to S4 to further adjust the design parameters and complete the final optimization.

[0068] S1 specifically includes:

[0069] S11, Establishment of the physical model: Based on the structural and material properties of the terahertz sensor array, a physical model is established to describe the propagation characteristics of terahertz waves in the sensor array, including the refraction, reflection, diffraction, and scattering behavior of electromagnetic waves. The physical model equations are expressed as follows:

[0070]

[0071] Where n(λ) is the refractive index of the terahertz wave, ∈ r (λ) is the dielectric constant of the material, and λ is the wavelength. This model is used to determine the optical response of the material in the terahertz frequency band;

[0072] S12, Determining the Geometry of the Array Units: Based on the physical model, the geometry of the sensor array units is determined. This geometry includes the width, height, and spacing of the sensor array units. The geometry affects the scattering and reflection characteristics of terahertz waves, directly impacting the array's sensitivity and resolution. The diffraction efficiency of the sensor array units is calculated as follows:

[0073]

[0074] Where η is the diffraction efficiency, I d I is the intensity of the diffracted light, and I0 is the intensity of the incident light. Optimize the unit size to maximize the diffraction efficiency.

[0075] S13, Selection of Material Properties: Analyze and select material properties for the terahertz band, including the refractive index and transmittance of the materials. Obtain the electromagnetic response of different materials in the terahertz band through experiments or simulations. The transmittance is calculated as follows:

[0076]

[0077] Where T is the transmittance of the material, and I tI0 is the intensity of transmitted light, and I0 is the intensity of incident light. Materials with high refractive index and moderate transmittance are selected to achieve high sensitivity in the sensor.

[0078] S14, Determining Design Objectives: Based on the actual application scenario, the initial design objectives of the terahertz sensor array are determined. These objectives include sensitivity, resolution, and detection range. The design objectives are determined using the following performance index formulas:

[0079] Sensitivity: Where S is the sensitivity, ΔI is the detected signal change, and ΔP is the power change of the terahertz wave;

[0080] Resolution: Depends on the cell size and wavelength of the sensor array;

[0081] Detection range: determined by the design of materials and structure, ensuring that the sensor has sufficient signal strength within the target detection range;

[0082] By establishing a physical model, determining geometric dimensions, selecting material properties, and clarifying design objectives, the initial parameter collection of the terahertz sensor array was ensured to be sufficiently accurate, providing a solid foundation for subsequent design and simulation optimization.

[0083] S2 includes:

[0084] S21, Metasurface Cell Geometry Design: Based on the defined design objectives (sensitivity, resolution, and detection range), determine the geometry of the metasurface cell. The cell geometry includes square, circular, elliptical, or other composite structures. The choice of geometry affects the diffraction and scattering characteristics of terahertz waves. By optimizing the geometry, ensure that the cell has the best phase modulation capability for terahertz waves.

[0085] S22, Cell Size Optimization: Design the cell size (width, height) to match the cell to the target wavelength. The cell size design affects sensitivity and frequency response. The effect of cell size on phase modulation is calculated as follows:

[0086]

[0087] Where φ represents the phase change, d is the cell size, and λ is the terahertz wavelength;

[0088] Optimize cell size to maximize sensor sensitivity and frequency response;

[0089] S23, Cell arrangement design: Based on the designed cell geometry and size, design the cell arrangement, considering periodic or non-periodic arrangement. The cell arrangement directly affects the frequency selectivity and spatial resolution of the array. By changing the spacing and arrangement pattern between cells, the sensor's response capability to different frequencies can be adjusted.

[0090] By designing the geometry, size, and arrangement of the cells, the structure of the metasurface unit was optimized to ensure that it can effectively control the phase of the terahertz wave, thereby improving the sensitivity and frequency response of the terahertz sensor array.

[0091] S2 also includes:

[0092] S24, Electromagnetic simulation model establishment: Based on the optimized metasurface unit structure, an electromagnetic simulation model is established to simulate the propagation path of terahertz waves on the metasurface unit, including diffraction, scattering and phase modulation effects. The simulation model considers terahertz waves with different incident angles and polarization states.

[0093] S25, Finite-Difference Time-Domain Simulation: The finite-difference time-domain method is used to simulate the propagation of terahertz waves in complex structures;

[0094] The finite-difference time-domain method simulation calculates the electromagnetic field changes of terahertz waves through discretized grids, and obtains the electromagnetic response of the metasurface element. The simulation results include electric field distribution, phase change and frequency response.

[0095] S26: Performance Parameter Calculation: Based on the simulation results of the finite-difference time-domain method, calculate the overall performance parameters of the metasurface unit and the terahertz sensor array, including sensitivity and frequency response. The sensitivity is calculated as follows:

[0096]

[0097] Where S is the sensitivity, ΔE is the change in electric field, and ΔP is the change in input power. The frequency response is evaluated by analyzing the transmittance and reflectance of the terahertz wave at different frequencies.

[0098] By using electromagnetic simulation models and the finite-difference time-domain method, the propagation process of terahertz waves in metasurface units was accurately simulated, and key performance parameters such as sensitivity and frequency response were obtained, providing data support for further design optimization.

[0099] S3 includes:

[0100] S31, Electromagnetic Field Distribution Analysis: The electromagnetic field distribution between the metasurface unit and the sensor array is analyzed through electromagnetic field simulation. The simulation considers the propagation paths and interactions of terahertz waves under different incident angles and polarization states. The electric field strength is calculated as follows:

[0101]

[0102] Where E is the electric field strength, V is the potential difference, and d is the distance between the metasurface unit and the sensor array;

[0103] S32, Coupling Effect Optimization: Based on the electromagnetic field distribution analysis results, the coupling effect between the metasurface unit and the sensor array is optimized. Under different incident angles and polarization states, the terahertz wave effectively enhances the sensor response. By adjusting the position and arrangement of the metasurface unit, the electromagnetic coupling effect is maximized, thereby improving the detection performance of the overall array.

[0104] S33, Response Analysis under Polarization: Simulation analysis of the response of terahertz waves under different polarization states (such as linear polarization and circular polarization) to ensure that the metasurface and sensor array have good electromagnetic response performance under various polarization conditions. Based on the response changes under different polarization conditions, the material and arrangement of the metasurface unit are further optimized.

[0105] By analyzing the electromagnetic field distribution and optimizing the coupling effect, we ensured good interaction between the metasurface and the sensor array under different incident angles and polarization states, thereby improving the sensor's response capability under varying conditions.

[0106] S3 also includes:

[0107] S34, Performance evaluation using the transfer matrix method: The performance of the metasurface and sensor array as a whole is evaluated using the transfer matrix method;

[0108] The transmission matrix method is used to describe the propagation and reflection of electromagnetic waves in various structural layers, and to calculate the transmission efficiency and phase change. The expression for the transmission matrix is:

[0109] T = T1 × T2 × … × T n ;

[0110] Where T is the transmission matrix, T1, T2, ..., T n These are the transfer matrices between each metasurface unit and the array;

[0111] The effects of each layer of the structure on the transmission and reflection of terahertz waves were evaluated through transmission matrix analysis.

[0112] S35, Matching Degree Optimization: Based on the evaluation results of the transmission matrix method, the matching degree between the metasurface unit and the sensor array is further adjusted. The matching degree optimization aims to ensure that the sensor can respond effectively in a wide frequency range, especially maintaining high transmission efficiency and low loss in the multi-frequency range of terahertz waves.

[0113] S36, Frequency Response Adjustment: By changing the geometry and material properties of the metasurface unit, the frequency response of the sensor array is adjusted to match the sensitivity and frequency response range in the design target, ensuring that the sensor can maintain efficient operation within the target frequency band;

[0114] By evaluating the performance and optimizing the matching degree using the transfer matrix method, we ensured the efficient response of the metasurface and sensor array in different frequency bands, further improving the sensor's detection performance and operational stability.

[0115] S4 includes:

[0116] S41, Thermal Effect Simulation: Based on electromagnetic field simulation, thermal effect simulation is added to evaluate the performance changes of metasurfaces and sensor arrays at different operating temperatures.

[0117] Thermal effects cause materials to expand or contract, thus affecting the transmission and response of terahertz waves. By establishing a heat conduction equation, the temperature distribution of the sensor array is calculated, and the coefficient of thermal expansion of the material is calculated using a linear thermal expansion formula. The temperature change of the sensor array when absorbing or releasing heat is expressed as:

[0118] Q = mcΔT;

[0119] Where Q is the heat absorbed by the sensor array, m is the mass of the array, c is the specific heat capacity of the material, and ΔT is the temperature change;

[0120] By simulating and analyzing the temperature distribution of the sensor array, the impact of temperature changes on the electromagnetic performance (such as sensitivity and frequency response) of the sensor array is predicted.

[0121] S42, Thermal Expansion Effect Assessment: Based on thermal effect simulation, further evaluate the impact of metasurface unit expansion under high temperature conditions (above 100 degrees is considered a high temperature condition) on terahertz wave phase modulation and frequency response. In response to the performance degradation caused by expansion, optimize the material selection and geometry of metasurface unit to ensure stable performance under high temperature working environment.

[0122] By simulating thermal effects and evaluating thermal expansion effects, we ensure the stability and reliability of metasurfaces and sensor arrays under high-temperature conditions, and optimize the design structure to reduce performance degradation caused by temperature changes.

[0123] S4 also includes:

[0124] S43, Stress Field Simulation: Stress field simulation is added to evaluate the structural stability of the sensor array under different mechanical stress conditions. Mechanical stress may originate from external pressure or vibration, leading to deformation or performance degradation of the sensor array. The strain of the sensor array under stress is calculated as follows:

[0125]

[0126] Where ∈ represents strain, σ represents applied stress, and E represents Young's modulus of the material;

[0127] The deformation of metasurfaces and arrays under different stress conditions is predicted by stress field simulation, and its impact on terahertz wave transmission is evaluated.

[0128] S44, Mechanical Stability Optimization: Based on stress field simulation results, the structure of the metasurface unit and sensor array is optimized, and the material and geometric design are adjusted to enhance the mechanical stability under high stress environment (stress greater than 100MPa is a high stress environment), ensuring that the array can maintain excellent detection performance under long-term vibration and pressure.

[0129] By using stress field simulation and mechanical stability optimization, the stability and durability of metasurfaces and sensor arrays under mechanical stress are ensured, and material and structural design is optimized to reduce stress-induced performance degradation.

[0130] S5 includes:

[0131] S51, Sample fabrication: Based on the optimized metasurface and terahertz sensor array design, the sample is fabricated. The fabrication process includes micro-nano processing technology, material deposition, etching and metasurface unit construction to ensure that the structure and material properties of the sample are consistent with the design simulation results.

[0132] S52, Performance Testing: Laboratory performance tests are conducted on the manufactured samples. Test parameters include sensitivity, resolution, and response time, as detailed below:

[0133] Sensitivity: The ability of a sensor array to respond to weak terahertz wave signals is evaluated by measuring the output changes under different signal intensities to calculate the sensitivity.

[0134] Resolution: The resolution is calculated by testing the detection accuracy of the sensor array for different spatial targets. The testing process uses multi-point excitation sources or hierarchical testing methods.

[0135] Response time: The time required for a sensor to generate a valid output signal after receiving a signal is calculated by testing the sensor's dynamic response.

[0136] S53, Test Data Collection: During performance testing, collect all key performance indicator data to ensure that the data on sensitivity, resolution, and response time are sufficiently detailed to facilitate subsequent feedback and optimization.

[0137] S5 also includes:

[0138] S54, Data Analysis and Modeling: Based on the performance index data obtained from laboratory performance tests, conduct data analysis, construct a performance model based on the experimental results, and analyze the relationship between performance indicators (such as sensitivity, resolution, and response time) and structural parameters and material properties. The model expression is as follows:

[0139] P opt= f(S,R,T);

[0140] Among them, P opt For the optimized performance model, S is sensitivity, R is resolution, T is response time, and the function f describes the relationship between these performance parameters and design variables.

[0141] S55, Feedback and Design Parameter Adjustment: Feedback the performance data obtained from laboratory performance testing to the aforementioned steps (S1 to S4) of the design. Based on the analysis results of the performance model, further adjust the design parameters. The adjustments include:

[0142] Material selection: Based on the test results, adjust the refractive index and transmittance of the materials to further optimize the sensitivity;

[0143] Geometry: Based on the resolution test results, the geometric dimensions and arrangement of the metasurface units are fine-tuned;

[0144] Matching degree optimization: The matching degree of the system is adjusted by optimizing the coupling effect between the sensor array and the metasurface unit;

[0145] S56, Design Optimization Iteration: Based on the feedback performance index data and the analysis results of the performance model, conduct design iteration, update and optimize the design scheme, and prepare for a new round of sample manufacturing and testing until the performance index meets the expected requirements.

[0146] Through feedback from experimental data and modeling analysis, key parameters in the sensor array design were adjusted, the final design optimization was completed, and a basis was provided for further improving system performance.

[0147] This invention encompasses any substitutions, modifications, equivalent methods, and solutions made within the spirit and scope of this invention. To provide the public with a thorough understanding of this invention, specific details are described in detail in the following preferred embodiments; however, those skilled in the art will fully understand the invention even without these details. Furthermore, to avoid unnecessary misunderstanding of the essence of this invention, well-known methods, processes, procedures, components, and circuits are not described in detail.

[0148] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A method for designing and optimizing terahertz sensor arrays based on metasurface enhancement, characterized in that, Includes the following steps: S1, Initial parameter collection for terahertz sensor array design: Obtain the structural parameters and material properties of the terahertz sensor array by establishing a physical model, including array cell size, spacing, refractive index and transmittance of the material. Combined with the required application scenario, preliminary design objectives are selected, including sensitivity, resolution and detection range. Specifically, S11, Establishment of physical model: Based on the structural and material properties of the terahertz sensor array, a physical model is established to describe the propagation characteristics of terahertz waves in the sensor array, including the refraction, reflection, diffraction and scattering behavior of electromagnetic waves. S12, Determination of array unit geometry: Based on the physical model, determine the geometry of the sensor array unit, including the width, height and spacing of the sensor array unit; S13, Selection of material properties: Analyze and select material properties for the terahertz band, including the refractive index and transmittance of the material; S14, Determining Design Objectives: Based on the actual application scenario, the design objectives of the terahertz sensor array are initially determined; S2, Metasurface Unit Design and Simulation: Based on the selected design objectives, electromagnetic simulation analysis is performed by optimizing the metasurface unit structure, including the geometry, size, arrangement, and material properties of the cells. The simulation process uses the finite-difference time-domain method to calculate the propagation of terahertz waves in complex structures, and obtains the overall performance parameters of the metasurface unit and the terahertz sensor array, including sensitivity and frequency response. Specifically, S21, Metasurface Cell Geometry Design: According to the determined design objectives, the geometry of the metasurface cells is determined. S22, Cell size optimization: Design the cell size to match the target wavelength; S23, Design of cell arrangement: Based on the designed cell geometry and size, design the cell arrangement, considering periodic or non-periodic arrangement; S24, Electromagnetic simulation model establishment: Based on the optimized metasurface unit structure, an electromagnetic simulation model is established to simulate the propagation path of terahertz waves on the metasurface unit, including diffraction, scattering and phase modulation effects. S25, Finite-Difference Time-Domain Simulation: The finite-difference time-domain method is used to simulate the propagation of terahertz waves in complex structures; The finite-difference time-domain method simulation calculates the electromagnetic field changes of terahertz waves through discretized grids, and obtains the electromagnetic response of the metasurface element. The simulation results include electric field distribution, phase change and frequency response. S26, Performance Parameter Calculation: Based on the simulation results of the finite-difference time-domain method, calculate the overall performance parameters of the metasurface unit and the terahertz sensor array, including sensitivity and frequency response; S3, Metasurface and Sensor Array Coupling Optimization: By analyzing the electromagnetic field distribution of the coupling between the metasurface unit and the sensor array, the interaction between the metasurface and the sensor array is optimized to ensure that the terahertz wave can enhance the sensor response under different incident angles and polarization states. The performance of the overall array structure is evaluated using the transfer matrix method, and the matching degree between the metasurface unit and the sensor array is adjusted. Specifically, S31, Electromagnetic Field Distribution Analysis: The electromagnetic field distribution between the metasurface unit and the sensor array is analyzed through electromagnetic field simulation. The propagation path and interaction of the terahertz wave under different incident angles and polarization states are considered during the simulation. S32, Coupling Effect Optimization: Based on the electromagnetic field distribution analysis results, the coupling effect between the metasurface unit and the sensor array is optimized. Under different incident angles and polarization states, terahertz waves effectively enhance the sensor response. By adjusting the position and arrangement of the metasurface unit, the electromagnetic coupling effect is maximized. S33, Response Analysis under Polarization: Simulation analysis of the response of terahertz waves under different polarization states, and optimization of the material and arrangement of metasurface units based on the response changes under different polarization conditions; S34, Performance evaluation using the transfer matrix method: The performance of the metasurface and sensor array as a whole is evaluated using the transfer matrix method; The transmission matrix method is used to describe the propagation and reflection of electromagnetic waves in each layer of the structure, and to calculate the transmission efficiency and phase change. S35, Matching degree optimization: Adjust the matching degree between the metasurface unit and the sensor array based on the evaluation results of the transfer matrix method; S36, Frequency Response Adjustment: By changing the geometry and material properties of the metasurface units, the frequency response of the sensor array is adjusted to match the sensitivity and frequency response range in the design objectives. S4, Multiphysics Simulation Optimization: Based on electromagnetic field simulation, thermal effect and stress field simulation are added to evaluate the performance degradation of metasurfaces due to temperature and mechanical stress factors in actual working environment, and optimize the design structure based on the results; Specifically, S41, Thermal Effect Simulation: Based on electromagnetic field simulation, thermal effect simulation is added to evaluate the performance changes of metasurfaces and sensor arrays under different working temperatures. Thermal effects cause materials to expand or contract, affecting the transmission and response of terahertz waves. By establishing a heat conduction equation, the temperature distribution of the sensor array is calculated, and the coefficient of thermal expansion of the material is calculated using a linear thermal expansion formula. The temperature change of the sensor array when absorbing or releasing heat is expressed as: ； in, The heat absorbed by the sensor array For the quality of the array, The specific heat capacity of the material, For temperature change; By simulating and analyzing the temperature distribution of the sensor array, the impact of temperature changes on the electromagnetic performance of the sensor array is predicted. S42, Thermal Expansion Effect Evaluation: Based on thermal effect simulation, the impact of metasurface unit expansion under high temperature conditions on terahertz wave phase modulation and frequency response is evaluated. To address the performance degradation caused by expansion, the material selection and geometry of the metasurface unit are optimized. S43, Stress Field Simulation: Add stress field simulation to evaluate the structural stability of the sensor array under different mechanical stress conditions; S44, Mechanical Stability Optimization: Based on stress field simulation results, the structure of metasurface units and sensor arrays is optimized, and material and geometric designs are adjusted to enhance mechanical stability under high stress environments; S5, Experimental Verification and Data Feedback: Based on the optimized design structure, a sample is manufactured and its performance is tested in the laboratory. The sensitivity, resolution, and response time of the terahertz sensor array are tested. The test results are fed back to S1 to S4 to further adjust the design parameters and complete the final optimization.

2. The design optimization method for terahertz sensor arrays based on metasurface enhancement according to claim 1, characterized in that, S5 includes: S51, Sample fabrication: Fabricate samples based on the optimized metasurface and terahertz sensor array design; S52, Performance Testing: Laboratory performance testing of manufactured samples, including sensitivity, resolution, and response time; S53, Test Data Collection: Collect performance metric data during performance testing.

3. The design optimization method for terahertz sensor arrays based on metasurface enhancement according to claim 2, characterized in that, The S5 also includes: S54, Data Analysis and Modeling: Based on the performance index data obtained from laboratory performance tests, conduct data analysis, construct a performance model based on the experimental results, and analyze the relationship between performance indexes and structural parameters and material properties; S55, Feedback and Design Parameter Adjustment: Feedback the performance index data obtained from laboratory performance testing to the aforementioned steps of the design, and adjust the design parameters based on the analysis results of the performance model; S56, Design Optimization Iteration: Based on the feedback performance index data and the analysis results of the performance model, conduct design iteration, update and optimize the design scheme, and prepare for a new round of sample manufacturing and testing until the performance index meets the expected requirements.

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