Heating housing device and continuous silicon carbide material manufacturing system

Abstract

The invention relates to the field of silicon carbide material manufacturing equipment transmission, in particular to a heating housing device which comprises a housing arranged on a base; the shell is provided with a processing chamber, and openings communicated with the processing chamber are formed in the two sides of the shell; the adjusting assembly is arranged at the opening and can slide in the direction of the top or the bottom of the shell; the adjusting assembly is provided with a preformed hole which can be communicated with the processing chamber; the driving assembly is arranged on the base or the shell; the driving end of the driving assembly is connected with the adjusting assembly; the driving assembly is used for driving the adjusting assembly to move so as to slide at the opening. The opening is formed in the shell, the driving assembly and the adjusting assembly are arranged at the opening, the driving assembly can drive the height of the adjusting assembly to ascend and descend, and the height of the preformed hole of the adjusting assembly is made to ascend and descend, so that the height of the preformed hole is matched with the height of the gas channel.

Description

Technical Field

[0001] The invention relates to the field of silicon carbide material manufacturing equipment transmission technology, in particular to a heating shell device and a continuous silicon carbide material manufacturing system. Background Art

[0002] Silicon carbide is a representative ceramic material that is widely used throughout the industrial field due to its excellent physical, chemical and electrical properties.

[0003] In recent years, with the active progress in the development of semiconductor processing parts using silicon carbide materials, the importance of silicon carbide materials has increased. In particular, silicon carbide materials are widely used as components for etching processes in semiconductor process parts due to their high plasma tolerance. Silicon carbide materials for semiconductor etching process parts are the traditional method of manufacturing silicon carbide. Since quality and performance cannot be met by this method, chemical vapor deposition is often used in the prior art.

[0004] In the process of chemical vapor deposition of silicon carbide, a mixture of Si-containing gas such as SiH4, SiCl2, SiCl4 and C-containing gas such as C2H2, CH4, C3H8 is used as raw material gas, or a single gas such as CH3SiCl3, CH3SiH3, (CH3)3SiH) is used as raw material for deposition. In the prior art, semiconductor etching process parts are usually placed in a reaction vessel, and then chemical gas is injected into the reaction vessel through a gas pipeline. Different reaction vessels are used according to process parts of different models and sizes, and the gas channel heights of different reaction vessels are different. When different reaction vessels are replaced, the height of the gas pipeline cannot match the height of the gas channel of the reaction vessel. Summary of the invention

[0005] In order to solve or at least partially solve the above technical problems, the present invention provides a heating shell device and a continuous silicon carbide material manufacturing system.

[0006] The present invention provides a heating cover shell device, which includes a shell, an adjustment component, and a driving component. The shell is arranged on a base; the shell has a processing chamber, and openings connected to the processing chamber are arranged on both sides of the shell; the adjustment component is arranged at the opening and can slide in the direction of the top or bottom of the shell; the adjustment component has a reserved hole that can be connected to the processing chamber; the driving component is arranged on the base or the shell; the driving end of the driving component is connected to the adjusting component; the driving component is used to drive the adjusting component to move so as to slide at the opening.

[0007] Optionally, the shell has a limiting channel that passes through the opening, and the limiting channel is vertically arranged at the opening; the adjustment component is arranged in the limiting channel.

[0008] Optionally, the adjustment component includes a partition and a mounting plate, the partition includes stacked insulation plates and partition plates, the insulation plate is provided with an insulation layer on the side facing the processing chamber; the partition plate is located on the side of the insulation plate away from the processing chamber; the partition has a reserved hole passing through the insulation plate and the partition plate; the mounting plate is arranged at the bottom or top of the partition.

[0009] Optionally, the base has a mounting groove, which is located below the limiting channel; the driving assembly includes a hydraulic cylinder, which is arranged in the mounting groove or on the top of the shell, and its telescopic end is connected to the mounting plate.

[0010] Optionally, the base has a mounting groove, which is located below the limiting channel. The driving assembly includes a driving motor and a cam, wherein the driving motor is arranged in the mounting groove or at the top of the housing; the cam is arranged on the output shaft of the driving motor; the large wheel portion of the cam is coaxially arranged with the output shaft, and the small wheel portion of the cam is in contact with the mounting plate; when the driving motor drives the cam to rotate, the cam moves the partition toward the top or bottom of the housing through the mounting plate.

[0011] Optionally, the partition and the mounting plate are provided with guide holes. The driving assembly further comprises a guide rod, one end of which is arranged on the base, and the other end of which is located in the guide hole; the partition and the mounting plate can move along the length direction of the guide rod.

[0012] Optionally, the number of drive assemblies is at least two, and the at least two drive assemblies are symmetrically arranged; the heating shell device also includes a connecting plate, and both ends of the connecting plate are respectively connected to the mounting plates of the at least two drive assemblies.

[0013] Optionally, the heating shell device further comprises a plurality of reserved tubes; the inner diameters of the plurality of reserved tubes decrease sequentially; any one of the plurality of reserved tubes is detachably connected to the shell and is disposed in the reserved hole.

[0014] Optionally, the heating shell device further includes a reserved component arranged in the reserved hole; the reserved component includes a plurality of reserved tubes which are sequentially sleeved, and the plurality of reserved tubes can be detachably connected to the shell.

[0015] Optionally, the heating cover device also includes a first sensor, a second sensor, and a controller, the first sensor is used to obtain a first relative height of the gas channel of the reaction box; the second sensor is used to obtain a second relative height of the reserved tube; the controller is used to adjust the lifting and lowering of the reserved tube until the first relative height and the second relative height are consistent, and the reference objects of the first relative height and the second relative height are the same.

[0016] Optionally, a first groove is provided in the middle of the outer wall of the gas channel, and a second groove is provided in the middle of the outer wall of the reserved tube; the heating cover shell device also includes a rotating motor, a connecting rod and a calibration piece, the rotating motor is arranged on the outer wall of the shell, and its rotating shaft passes through the adjustment component to the processing chamber; one end of the connecting rod is arranged on the rotating shaft of the rotating motor; the calibration piece is arranged at the other end of the connecting rod; the two ends of the calibration piece are respectively provided with a first height point and a second height point; the rotating motor drives the calibration piece to rotate through the connecting rod, so that the two ends of the calibration piece enter the first groove and the second groove respectively, so as to detect the first height point by the first sensor and detect the second height point by the second sensor.

[0017] The present invention also provides a continuous silicon carbide material manufacturing system, comprising at least three heating shell devices as described in any one of the above items, and the at least three heating shell devices are arranged in sequence along the length direction of the base.

[0018] Compared with the prior art, in this embodiment, by setting an opening in the shell, and setting a driving component and an adjusting component at the opening, the driving component can drive the height of the adjusting component to rise and fall, and make the height of the reserved hole of the adjusting component rise and fall, so as to achieve the height of the reserved hole and the height of the gas channel to be aligned. Even if a new reaction box is replaced later, and the height of the gas channel of the new reaction box changes, the heating cover device disclosed in this embodiment can adjust the height of the reserved hole, and can adapt to the height requirements of different reaction boxes. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention, the following briefly introduces the relevant drawings. It is understood that the drawings described below are only used to illustrate some embodiments of the present invention, and those skilled in the art can also obtain many other technical features and connection relationships not mentioned in this document based on these drawings.

[0020] Figure 1 A cross-sectional view of an embodiment of a heating housing device of the present invention Figure 1 ;

[0021] Figure 2 is a schematic diagram of an embodiment of a shell of a heating shell device of the present invention;

[0022] Figure 3 The present invention is a schematic diagram of an embodiment of an adjustment component of a heating shell device Figure 1 ;

[0023] Figure 4 It is a cross-sectional schematic diagram of an embodiment of a heat preservation plate of a heating housing device of the present invention;

[0024] Figure 5A cross-sectional view of an embodiment of a heating housing device of the present invention Figure 2 ;

[0025] Figure 6 The present invention is a schematic diagram of an embodiment of an adjustment component of a heating shell device Figure 2 ;

[0026] Figure 7 It is a partial schematic diagram of an embodiment of a base of a heating shell device of the present invention;

[0027] Figure 8 It is an exploded schematic diagram of an embodiment of a reserved component of a heating housing device of the present invention;

[0028] Fig. 9 yes Figure 1 A magnified view of part A;

[0029] Fig.10 It is a schematic diagram of an embodiment of the assembly of a rotating motor, a connecting rod, and a calibration piece of a heating housing device of the present invention;

[0030] Fig.11 yes Fig.10 A magnified view of part B;

[0031] Fig.12 It is a schematic diagram of an embodiment of a transmission system of a continuous silicon carbide material manufacturing equipment of the present invention;

[0032] Fig.13 It is a front view schematic diagram of an embodiment of a displacement track of a continuous silicon carbide material manufacturing equipment transmission system of the present invention;

[0033] Fig.14 It is a cross-sectional schematic diagram of an embodiment of a closed gate of a continuous silicon carbide material manufacturing equipment transmission system of the present invention;

[0034] Fig.15 It is a cross-sectional schematic diagram of an embodiment of a transmission system for continuous silicon carbide material manufacturing equipment of the present invention.

[0035] Description of reference numerals:

[0036] 1. Reaction box; 11. Gas channel; 12. First groove; 2. Shell; 21. Heating module; 22. Insulation layer; 23. Shell; 24. Processing chamber; 25. Opening; 26. Limiting channel; 3. Adjustment assembly; 31. Partition; 311. Insulation board; 312. Partition board; 32. Mounting plate; 33. Reserved hole; 34. Insulation layer; 4. Drive assembly; 41. Hydraulic cylinder; 42. Drive motor; 43. Cam; 5. Displacement track; 51. Bottom plate; 52. Roller; 53. Base; 531. Mounting slot; 532. Connecting cavity; 55. Guide hole; 56. Guide rod; 57. Connecting plate; 58. Reserved component; 59. Reserved tube; 591. Second groove; 61. First sensor; 62. Second sensor; 63. Rotating motor; 64. Connecting rod; 65. Calibration piece; 651. First height point; 652. Second height point; 653. First protrusion; 654. Second protrusion; 7. Closed gate; 71. Gate housing; 72. Gate; 73. Lifting drive; 81. Push rod; 82. Pull rod; 9. Quick release part; 91. Connecting cover; 92. Connecting hole; 95. Preparation processing module; 96. Reaction processing module; 97. Post-processing module. DETAILED DESCRIPTION

[0037] In the prior art, chemical vapor deposition equipment usually has a reaction chamber, and a gas support device is connected to the reaction chamber. The gas support device mixes the raw materials used in the process with other process gases and supplies them to the reactor in the form of gas phase under the premise of meeting the process conditions. The reactor thermally decomposes the supplied mixed gas under high temperature and constant atmosphere. Silicon carbide is deposited on the substrate pre-set in the reaction chamber. The gas support device often also includes an exhaust mechanism for exhausting by-products and excess mixed gas generated during the chemical vapor deposition process.

[0038] The applicant found that different reaction vessels are also replaced according to the different models, shapes and sizes of the process parts to be manufactured, and the gas channels of different reaction vessels have different heights. After replacing different reaction vessels, the height of the gas pipeline cannot be adapted to the height of the gas channel of the reaction vessel. In view of this, the inventor of the present invention provides a heating shell device and a continuous silicon carbide material manufacturing system to solve the above problems.

[0039] Several specific implementations of the present invention are described in detail below in conjunction with the accompanying drawings.

[0040] First embodiment

[0041] A heating shell device mentioned in this embodiment, see Figure 1 , Figure 2As shown, the heating housing device includes a housing 2, an adjustment component 3, and a driving component 4. The housing 2 includes a plurality of heating modules 21, a thermal insulation layer 22, and a housing 23. The cross-sectional shape of the thermal insulation layer 22 can be "U" or "O". The housing 23 is covered on the thermal insulation layer 22. The U-shaped groove of the thermal insulation layer 22 can be regarded as the processing chamber 24 of the housing 2. Both sides of the housing 2 have an opening 25 connected to the processing chamber 24. The plurality of heating modules 21 are located in the processing chamber 24, wherein a part of the heating modules 21 is arranged on a side wall of the thermal insulation layer 22 and is respectively located on both sides of the opening 25. Another part of the heating modules 21 is arranged on the other side wall of the thermal insulation layer 22 and is respectively located on both sides of the opening 25. The remaining heating modules 21 are arranged on the top of the thermal insulation layer 22. The housing 2 is arranged on the base 53, so that the sealing of the processing chamber 24 of the housing 2 can be further enhanced. The displacement track 5 runs through the processing chamber 24 between the housing 2 and the base 53. The reaction box 1 can be placed on the displacement track 5 and move along the length direction of the displacement track 5. Of course, the housing 2 also has a limiting channel 26 that penetrates the opening 25, and the limiting channel 26 is vertically arranged at the opening 25. One end of the limiting channel 26 is located at the top of the housing 2, and the other end of the limiting channel 26 is located at the bottom of the housing 2. The limiting channel 26 is connected to the opening 25 and is also connected to the processing chamber 24.

[0042] See also Figures 1 to 3 As shown, the adjustment component 3 is arranged in the limiting passage 26 and is used to block the opening 25 of the housing 2. The adjustment component 3 has a reserved hole 33 that can be communicated with the processing chamber 24. The driving component 4 is arranged on the base 53 or the housing 2, and the driving end of the driving component 4 is connected to the adjustment component 3. The driving component 4 is used to drive the adjustment component 3 to slide in the limiting passage 26 toward the direction of the top or bottom of the housing 2.

[0043] For details, see Figure 3As shown, the adjustment component 3 includes a partition 31 and a mounting plate 32, and the shape of the partition 31 is adapted to the limiting channel 26. The partition 31 includes an insulation board 311 and a partition 312, and the insulation board 311 has a reserved hole 33, and the reserved hole 33 is located in the middle of the insulation board 311. The partition 312 has a reserved hole 33, and the reserved hole 33 is located in the middle of the partition 312. The insulation board 311 and the partition 312 are stacked, and at this time, the reserved hole 33 of the insulation board 311 is aligned with the reserved hole 33 of the partition 312 to form the reserved hole 33 of the partition 31. The insulation board 311 can be made of materials such as ceramics and CMC to ensure its high temperature resistance. The distance between the two sides of the heat preservation plate 311 is greater than the distance between the two sides of the partition plate 312. The partition plate 312 is located on the side of the heat preservation plate 311 away from the processing chamber 24. A heat insulation layer 34 made of CMC material is arranged on the side of the heat preservation plate 311 facing the processing chamber 24. This arrangement allows the heat preservation plate 311 to provide heat insulation protection for the partition plate 312, thereby preventing the partition plate 312 from being damaged at high temperatures. A mounting plate 32 is arranged at the top and bottom of the partition 31, or a mounting plate 32 is arranged at the top or bottom of the partition 31.

[0044] Alternatively, see Figure 4 As shown, the insulation board 311 has a grid structure, and the meshes of the grid structure are filled with ceramics, CMC and other materials to ensure its high temperature resistance.

[0045] In this embodiment, there are at least two groups of drive assemblies 4, and at least two groups of drive assemblies 4 are respectively located at the openings 25 on both sides of the housing 2. At least two groups of drive assemblies 4 are symmetrically arranged and have mutually symmetrical structures, so one group of drive assemblies 4 will be used as an example in the following description. There are four optional technical solutions for the structure and arrangement of the drive assembly 4, which are as follows:

[0046] Alternatively, if Figure 1 , Figure 2 As shown, in this optional technical solution, the mounting plate 32 is arranged above the partition 31, one end of the mounting plate 32 is connected to the top of the partition 31, and the other end of the mounting plate 32 forms a mounting interlayer with the top of the housing 2. The driving assembly 4 includes a hydraulic cylinder 41, which is arranged in the mounting interlayer, the hydraulic cylinder 41 is arranged on the top of the housing 2, and the telescopic end of the hydraulic cylinder 41 is fixedly connected to the mounting plate 32. The mounting plate 32 can move along the limit channel 26 toward the top or bottom of the housing 2 as the telescopic end of the hydraulic cylinder 41 rises and falls, thereby driving the partition 31 to move toward the top or bottom of the housing 2, so as to achieve height adjustment of the reserved hole 33.

[0047] Alternatively, if Figure 1 , Figure 3 , Figure 5As shown, in this optional technical solution, the mounting plate 32 is arranged below the partition 31. The base 53 has a mounting groove 531, which is located below the limiting channel 26 and is connected to the limiting channel 26. The driving assembly 4 includes a hydraulic cylinder 41, which is arranged in the mounting groove 531 and is installed at the bottom of the mounting groove 531. At this time, the bottom of the mounting plate 32 and the partition 31 are both located in the mounting groove 531, and the telescopic end of the hydraulic cylinder 41 is fixedly connected to the mounting plate 32. The mounting plate 32 can move along the limiting channel 26 toward the top or bottom of the shell 2 as the telescopic end of the hydraulic cylinder 41 rises and falls, thereby driving the partition 31 to move toward the top or bottom of the shell 2 to achieve the height adjustment of the reserved hole 33. At the same time, dust pollution of the hydraulic cylinder 41 can be avoided.

[0048] Alternatively, if Figure 1 , Figure 3 , Figure 5 As shown, in this optional technical solution, the mounting plate 32 is arranged above the partition 31, one end of the mounting plate 32 is connected to the top of the partition 31, and an installation interlayer is formed between the other end of the mounting plate 32 and the top of the shell 2, and the drive assembly 4 is arranged in the installation interlayer. The drive assembly 4 includes a drive motor 42 and a cam 43. The cam 43 is arranged on the output shaft of the drive motor 42, and the large wheel portion of the cam 43 is coaxially arranged with the output shaft of the drive motor 42. The drive motor 42 is arranged at the top of the shell 2, and the small wheel portion of the cam 43 is in conflict with the side of the mounting plate 32 facing the shell 2. When the drive motor 42 drives the cam 43 to rotate, the mounting plate 32 can be raised and lowered with the rotation of the cam 43, thereby driving the partition 31 to move along the limiting channel 26 toward the direction of the top or bottom of the shell 2, so as to achieve the height adjustment of the reserved hole 33.

[0049] Alternatively, if Figure 5 As shown, in this optional technical solution, the mounting plate 32 is arranged below the partition 31. The base 53 has a mounting groove 531, which is located below the limiting channel 26 and is connected to the limiting channel 26. The drive assembly 4 is arranged in the mounting groove 531. The drive assembly 4 includes a drive motor 42 and a cam 43, the cam 43 is arranged on the output shaft of the drive motor 42, and the large wheel portion of the cam 43 is coaxially arranged with the output shaft of the drive motor 42. The drive motor 42 is installed at the bottom of the mounting groove 531, and the small wheel portion of the cam 43 conflicts with the side of the mounting plate 32 facing the bottom of the mounting groove 531. When the drive motor 42 drives the cam 43 to rotate, the mounting plate 32 can be raised and lowered with the rotation of the cam 43, thereby driving the partition 31 to move along the limiting channel 26 toward the top or bottom of the housing 2, so as to achieve the height adjustment of the reserved hole 33. At the same time, dust pollution of the drive motor 42 and the cam 43 can be avoided.

[0050] You may select any one of the above optional technical solutions.

[0051] An exemplary use process of the heating shell device disclosed in this embodiment:

[0052] In this embodiment, the hydraulic cylinder 41 is disposed in the mounting groove 531 as an example for description.

[0053] Move the reaction box 1 into the processing chamber 24, and adjust the height of the reserved hole 33 of the adjustment component 3 according to the height of the gas channel 11 of the reaction box 1. If the height of the gas channel 11 of the reaction box 1 is higher than the height of the reserved hole 33, the height of the adjustment component 3 needs to be increased. First, drive the hydraulic cylinder 41 to work, and extend the telescopic end of the hydraulic cylinder 41. The height of the mounting plate 32 increases as the telescopic end of the hydraulic cylinder 41 extends. The partition 31 moves with the mounting plate 32. The partition 31 moves toward the top of the shell 2 in the limiting channel 26, thereby increasing the height of the reserved hole 33 on the partition 31. When the height of the reserved hole 33 is equal to the height of the gas channel 11, the hydraulic cylinder 41 stops working and maintains this state.

[0054] In the present invention, the height of the gas channel 11 of the reaction box 1 refers to the distance between the bottom surface of the base 53 and the axis of the gas channel 11 , while the height of the reserved hole 33 refers to the distance between the bottom surface of the base 53 and the axis of the reserved hole 33 .

[0055] Compared with the prior art, in this embodiment, by providing an opening 25 in the housing 2, and providing a driving component 4 and an adjusting component 3 at the opening 25, the driving component 4 can drive the height of the adjusting component 3 to rise and fall, and make the height of the reserved hole 33 of the adjusting component 3 rise and fall, so that the height of the reserved hole 33 is aligned with the height of the gas channel 11. Even if a new reaction box 1 is replaced later, and the height of the gas channel 11 of the new reaction box 1 changes, the heating cover device disclosed in this embodiment can adjust the height of the reserved hole 33, and can adapt to the height requirements of the gas channels of different reaction boxes 1.

[0056] Second embodiment

[0057] The applicant has found that when the adjustment component 3 moves along the limiting channel 26 toward the top or bottom of the shell 2, the adjustment component 3 may conflict with the side wall of the limiting channel 26, thereby affecting the movement of the adjustment component 3 in the limiting channel 26.

[0058] In view of this, this embodiment also proposes a heating housing device. The second embodiment is a further improvement based on the first embodiment, and the main improvement is that the partition 31 and the mounting plate 32 are provided with a guide hole 55. The driving assembly 4 also includes a guide rod 56, one end of which is arranged on the base 53, and the other end of the guide rod 56 is located in the guide hole 55; the partition 31 and the mounting plate 32 can move along the length direction of the guide rod 56. The details are as follows:

[0059] like Figure 5 , Figure 6 As shown, the base 53 has a mounting groove 531, which is located below the limiting channel 26 and communicated with the limiting channel 26. When the driving assembly 4 is arranged in the mounting groove 531, guide rods 56 are arranged on both sides of the driving assembly 4. One end of the guide rod 56 is fixed to the bottom of the mounting groove 531, and the guide rod 56 is vertically arranged at the bottom of the mounting groove 531. The bottom of the partition 31 has a guide hole 55 at a position corresponding to the guide rod 56, and similarly, the mounting plate 32 has a guide hole 55 at a position corresponding to the guide rod 56. The mounting plate 32 is arranged at the bottom of the partition 31, and the guide hole 55 of the mounting plate 32 is aligned with the guide hole 55 of the partition 31 to form a new guide hole 55. When the partition 31 and the mounting plate 32 are located in the limiting channel 26, the end of the guide rod 56 away from the bottom of the mounting groove 531 is set in the guide hole 55, and the mounting plate 32 and the partition 31 can move along the guide rod 56 toward the top or bottom of the shell 2.

[0060] Compared with the prior art, in this embodiment, a mounting groove 531 is provided on the base 53, a guide rod 56 is provided in the mounting groove 531, and a guide hole 55 matched with the guide rod 56 is provided on the adjustment component 3. When in use, one end of the guide rod 56 is located in the guide hole 55, and the adjustment component 3 can move along the guide rod 56 toward the top or bottom of the housing 2. The guide rod 56 not only plays a guiding role, but also limits the distance between the adjustment component 3 and the limiting channel 26, preventing the adjustment component 3 from colliding with the side wall of the limiting channel 26, so that the adjustment component 3 can move more smoothly in the limiting channel 26.

[0061] Third embodiment

[0062] The applicant found that during the height adjustment process of the reserved holes 33 , the heights of the reserved holes 33 on both sides of the shell 2 cannot be adjusted simultaneously. The heights of the reserved holes 33 on both sides of the shell 2 need to be adjusted separately, which is cumbersome.

[0063] This embodiment also proposes a heating housing device. The third embodiment is a further improvement based on the first or second embodiment, and is specifically as follows:

[0064] See also Figure 7 As shown, the base 53 also has a connecting cavity 532, and the mounting grooves 531 on both sides of the base 53 are connected through the connecting cavity 532. The heating cover device also includes a connecting plate 57, which is arranged in the connecting cavity 532, and the two ends of the connecting plate 57 are respectively fixedly connected to the mounting plates 32 on both sides of the base 53. Such a setting can make the driving components 4 on both sides of the base 53 rise and fall synchronously, and the height of the reserved holes 33 on both sides of the shell 2 can be adjusted at the same time, and the adjustment steps are very simple.

[0065] Fourth embodiment

[0066] This embodiment also proposes a heating housing device. The fourth embodiment is a further improvement based on any one of the first to third embodiments, and the main improvement is that a reserved pipe 59 is further provided at the reserved hole 33. There are two optional technical solutions for the structure and setting of the reserved pipe 59, which are as follows:

[0067] See also Figure 8 As shown, the heating shell device also includes a plurality of reserved tubes 59. The outer diameters of these reserved tubes 59 are all the same as the aperture of the reserved hole 33. At the same time, the inner diameters of these reserved tubes 59 are successively reduced. One end of these reserved tubes 59 is provided with a flange. The end of the reserved tube 59 away from the flange is passed through the reserved hole 33 to the processing chamber 24, and the holes on the flange are passed through with bolts, and one of these reserved tubes 59 is set on the outer wall of the shell 2. After the reaction box 1 is replaced, the inner diameter of the gas channel 11 of the reaction box 1 also changes, so the gas pipeline used to inject chemical gas into the reaction box 1 also needs to be replaced accordingly. Since the aperture of the reserved hole 33 is fixed, after the reaction box 1 is replaced, the gas pipeline also needs to be replaced, and the reserved tube 59 is selected according to the replaced gas pipeline, and the outer diameter of the gas pipeline is the same as the inner diameter of the reserved tube 59. Such a configuration can not only satisfy the need for the gas pipeline to be compatible with the gas channel 11 of the reaction box 1 , but also enable the reserved hole 33 to be filled with the reserved tube 59 , so that there is no gap between the gas pipeline and the reserved hole 33 , further improving the air tightness of the processing chamber 24 .

[0068] Alternatively, see Figure 8As shown, the heating shell device also includes a reserved assembly 58 arranged in the reserved hole 33. The reserved assembly 58 includes a plurality of reserved pipes 59, one end of which is provided with a flange. These reserved pipes 59 can be sleeved in sequence, and such a setting can be applicable to gas pipelines of various sizes. After these pipelines are sleeved in sequence, the reserved pipes 59 that are sleeved in sequence and one end away from the flange penetrate the reserved hole 33 to the processing chamber 24, and the outer diameter of the reserved pipe 59 located at the outermost side is substantially the same as the aperture of the reserved hole 33. Bolts are passed through the holes on the flange, and these reserved pipes 59 are fixed together on the outer wall of the housing 2. After the reaction box 1 is replaced, the inner diameter of the gas channel 11 of the reaction box 1 also changes, so the gas pipeline used to inject chemical gas into the reaction box 1 also needs to be replaced accordingly. Since the aperture of the reserved hole 33 is fixed, the gas pipeline also needs to be replaced after the reaction box 1 is replaced, and the reserved tube 59 is selected according to the replaced gas pipeline, and the reserved tube 59 located inside the multiple reserved tubes 59 is taken out until the inner diameter of the reserved tube 59 located inside is the same as the outer diameter of the gas pipeline, and the remaining reserved tubes 59 are re-fixed on the shell 2. Such a setting can not only meet the gas pipeline and the gas channel 11 of the reaction box 1, but also can use the reserved tube 59 to fill the reserved hole 33, so that there is no gap between the gas pipeline and the reserved hole 33, and the airtightness of the processing chamber 24 is further improved.

[0069] You may select any one of the above optional technical solutions.

[0070] Fifth embodiment

[0071] In view of this, this embodiment also proposes a heating housing device. The fifth embodiment is a further improvement based on the fourth embodiment, and is specifically as follows:

[0072] Alternatively, if Figure 1 , Fig. 9As shown, the first sensor 61 and the second sensor 62 are both laser sensors, and the first sensor 61 and the second sensor 62 are both connected to the controller. The first sensor 61 and the second sensor 62 are both arranged outside the processing chamber 24, which can prevent the high temperature in the processing chamber 24 from damaging the sensor. There are multiple first sensors 61, and multiple first sensors 61 are arranged in sequence along the top of the shell 2 to the bottom of the shell 2. These first sensors 61 are arranged in a row, and the detection ends of the first sensors 61 are arranged toward the processing chamber 24. The detection ends of these first sensors 61 are arranged in a direction perpendicular to the axis of the gas channel 11. Each first sensor 61 corresponds to a height. When in use, the reaction box 1 is set in the processing chamber 24, and the height of the gas channel 11 of the reaction box 1 is detected by using multiple first sensors 61. The bottom surface of the base 53 is zero facet, and one of the multiple first sensors 61 is blocked by the gas channel 11. Then the distance from this first sensor 61 to the bottom surface of the base 53 is the first relative height of the gas channel 11 of the reaction box 1.

[0073] Similarly, the number of the second sensors 62 is multiple, and the multiple second sensors 62 are sequentially arranged along the direction from the top of the shell 2 to the bottom of the shell 2. These second sensors 62 can be arranged in a row, and the detection end of the second sensor 62 is arranged toward the processing chamber 24. The detection ends of these second sensors 62 are arranged in a direction perpendicular to the axis of the reserved tube 59. Each second sensor 62 corresponds to a height. For example, the reference objects of the first sensor 61 and the second sensor 62 are the bottom surface of the base 53. When in use, after the first sensor 61 obtains the first relative height. The height of the reserved tube 59 arranged on the partition 31 is detected by using multiple second sensors 62, the bottom surface of the base 53 is zero facet, and one of the multiple second sensors 62 is blocked by the reserved tube 59, then the distance from the second sensor 62 to the bottom surface of the base 53 is the second relative height of the reserved tube 59. The controller compares the values ​​of the first relative height with the second relative height, and when the values ​​of the first relative height and the second relative height are the same, the controller stops working. When the first relative height and the second relative height are different, the controller controls the driving component 4 to drive the adjusting component 3 to move up and down, and drives the reserved tube 59 to move up and down until the second relative height of the reserved tube 59 is the same as the first relative height, and the controller stops working.

[0074] like Figure 1 , Figures 9 to 11As shown, this optional technical feature can be combined with the above optional technical features. The heating shell device also includes a rotating motor 63, a connecting rod 64 and a calibration member 65. The rotating motor 63 is installed on the outer wall of the shell 2, and the rotating shaft of the rotating motor 63 passes through the partition 31 to the processing chamber 24. The connecting rod 64 is arranged in the processing chamber 24, and the connecting rod 64 is located on one side of the opening 25. Preferably, the connecting rod 64 is located on the side of the opening 25 close to the second sensor 62. One end of the connecting rod 64 is arranged on the driving shaft of the rotating motor 63, and the axis of the connecting rod 64 is arranged perpendicular to the axis of the driving shaft of the rotating motor 63. The connecting rod 64 has a plurality of threaded holes arranged in sequence and evenly spaced along its axis, which facilitates the adjustment of the position of the calibration member 65 on the connecting rod 64. Bolts are passed through the holes on the calibration member 65, and the calibration member 65 is fixed to the other end of the connecting rod 64. One side of the calibration piece 65 has a first height point 651 and a second height point 652, and the first height point 651 and the second height point 652 are respectively located at the two ends of the calibration piece 65. The other side of the calibration piece 65 has a first protrusion 653 and a second protrusion 654. Both sides of the reaction box 1 are provided with gas channels 11, and the outer wall of the gas channel 11 has a first groove 12, and the first groove 12 is located in the middle position of the outer wall of the gas channel 11, and the length direction of the first groove 12 is the same as the axial direction of the gas channel 11. Similarly, the reserved tube 59 has a second groove 591, and the second groove 591 is located in the middle position of the outer wall of the reserved tube 59, and the length direction of the second groove 591 is the same as the axial direction of the reserved tube 59.

[0075] When not in use, the rotating motor 63 works, and the rotating shaft of the rotating motor 63 drives the calibration member 65 to rotate together through the connecting rod 64 until the end of the connecting rod 64 provided with the calibration member 65 faces the cavity opening of the processing chamber 24 or faces the base 53, and the rotating motor 63 stops working. When in use, the rotating motor 63 works, and the rotating shaft of the rotating motor 63 drives the calibration member 65 to rotate together through the connecting rod 64 until the first protrusion 653 of the calibration member 65 enters the first groove 12 of the gas channel 11, and at the same time, the second protrusion 654 of the calibration member 65 enters the second groove 591 of the reserved tube 59, and the rotating motor 63 stops working. If one of the multiple first sensors 61 is blocked by the first height point 651, then the distance from the first sensor 61 to the bottom surface of the base 53 is the first relative height. If one of the multiple second sensors 62 is blocked by the second height point 652, then the distance from the second sensor 62 to the bottom surface of the base 53 is the second relative height.

[0076] At this time, the controller compares the values ​​of the first relative height and the second relative height. When the values ​​of the first relative height and the second relative height are the same, the controller stops working. When the values ​​of the first relative height and the second relative height are different, the controller controls the driving component 4 to drive the adjusting component 3 to rise and fall, and drives the reserved tube 59 to rise and fall until the second relative height of the reserved tube 59 is the same as the first relative height, and the controller stops working. In this embodiment, by setting the first protrusion 653 of the calibration member 65 in the first groove 12, and the second protrusion 654 in the second groove 591 at the same time, the calibration member 65 can be parallel to the top surface of the base 53, so that the first height point 651 and the second height point 652 can be at the same height as much as possible, and then the sensor is used to detect the height point on the calibration member 65 to obtain the values ​​of the first relative height and the second relative height more accurately, so as to facilitate the control of comparing the first relative height with the second relative height and adjust the height of the reserved tube 59.

[0077] Sixth embodiment

[0078] This embodiment proposes a continuous silicon carbide material manufacturing system. The continuous silicon carbide material manufacturing system disclosed in the sixth embodiment includes the heating shell device in any one of the first to fifth embodiments, specifically:

[0079] See also Fig.12 As shown, a continuous silicon carbide material manufacturing system disclosed in this embodiment includes at least three heating shell devices described in any one of the first to fifth embodiments, and at least three heating shell devices are arranged in sequence and at intervals along the length direction of the displacement track 5. In the process of depositing a silicon carbide layer on the substrate, the first heating shell device serves as a heating shell device of the preparation processing module 95, which is used to preheat the substrate. The second heating shell device serves as a heating shell device of the reaction processing module 96, which is used to precipitate a silicon carbide layer on the substrate. The third heating shell device serves as a heating shell device of the post-processing module 97, which is used for subsequent processing of the silicon carbide layer. Among them, the heating temperature borne by the reaction box 1 in the reaction processing module 96 is higher than the temperature borne by the reaction boxes 1 of the other two contact modules.

[0080] Compared with the prior art, in this embodiment, such a configuration further increases the automation and work efficiency of the continuous silicon carbide material manufacturing system disclosed in this embodiment.

[0081] Seventh embodiment

[0082] The applicant has found that in a continuous silicon carbide material manufacturing system disclosed in the sixth embodiment, since the opening of the processing chamber 24 is not closed, there is a risk that the temperature of the processing chamber 24 rises slowly, which takes a relatively long time.

[0083] In view of this, the seventh embodiment is a further improvement based on the sixth embodiment, and also proposes a continuous silicon carbide material manufacturing system. The problem of long time consumption is solved through the cooperation between the housing 2, the displacement track 5 and the gate. Specifically:

[0084] See also Fig.13 As shown, the displacement track 5 includes a base plate 51 and a plurality of rollers 52. The top surface of the base plate 51 is configured with a track groove, and the track groove is arranged along the length direction of the base plate 51. The plurality of rollers 52 are all located in the track groove, and the two ends of the rollers 52 are respectively hinged to the two side edges of the base plate 51, and the plurality of rollers 52 are arranged in sequence along the length direction of the base plate 51. Such evenly distributed support points can enhance the stability of the reaction box 1 during movement and reduce the vibration caused by uneven load. Since the rolling friction causes less wear on the reaction box 1 than the sliding friction, the service life of the reaction box 1 can be effectively extended. Preferably, the roller 52 is rotatably connected to the base plate 51 through a bearing. By arranging the roller 52 on the base plate 51, the movement of the reaction box 1 on the displacement track 5 can be made more convenient. Since the roller 52 and the base plate 51 will also be baked at a higher temperature together with the reaction box 1, graphite or CMC (ceramic matrix composite) materials can be considered. This type of material can withstand high temperature environments exceeding 1500°C and is superior to high-temperature alloys in terms of high temperature resistance, oxidation resistance, strength and stiffness, density, and corrosion resistance.

[0085] See also Fig.12 , Fig.14 As shown, the continuous silicon carbide material manufacturing system disclosed in this embodiment further includes a plurality of closed gates 7, which are all arranged on a base 53, and a displacement track 5 sequentially passes through the channels of the plurality of closed gates 7. The plurality of closed gates 7 are sequentially arranged at intervals along the length direction of the displacement track 5, and at least three heating shell devices are respectively arranged between two adjacent closed gates 7, that is, the cavity openings of the processing chamber 24 of each heating shell device are each provided with a closed gate 7 at both ends.

[0086] For details, see Fig.14As shown, the closed gate 7 includes a gate housing 71, a gate 72 and a lifting drive 73. The gate housing 71 is arranged on the base 53, the lifting drive 73 is arranged on the top of the gate housing 71, the gate 72 is arranged in the inner cavity of the gate housing 71, the screw rod of the lifting drive 73 is penetrated through the gate 72 and the lifting drive 73 can control the gate 72 to be lifted and lowered, and when the gate 72 is lowered, the gate 72 is engaged with the roller 52. The closed gate 7 can seal each chamber separately, and can also provide effective isolation between the three processing chambers 24, which helps to maintain the independent environment in each processing chamber 24, so that heat will not dissipate and prevent the mixing of gas or other media. The lifting and lowering of the gate 72 controlled by the lifting drive 73 can accurately manage the flow of fluid in the program, thereby realizing the fine regulation of the chemical reaction process. Moreover, the matching design of the gate 72 and the roller 52 enhances the airtightness of the gate 72, and plays a better isolation effect.

[0087] The closed gate 7 can be made of materials such as ceramics and CMC to ensure its high temperature resistance. A heat insulation layer 34 made of CMC material can be provided on the gate 72 to isolate the heat between the processing chambers 24.

[0088] Eighth embodiment

[0089] This embodiment also proposes a continuous silicon carbide material manufacturing system. The eighth embodiment is a further improvement based on the sixth or seventh embodiment, and the main improvement is that a push-pull component is further provided to drive the reaction box 1 to move, as follows:

[0090] See also Fig.12 , Fig.15 As shown, the reaction box 1 is arranged on the displacement track 5, and the push-pull assembly is used to push the reaction box 1 to move along the displacement track 5, and enable the reaction box 1 to switch positions between the three processing chambers 24. The technical effect of the displacement track 5 and the push-pull assembly is mainly reflected in improving the automation and continuity of the production process. By setting the displacement track 5 and the push-pull assembly, the movement and switching of the reaction box 1 can be easily achieved. Specifically, this arrangement allows the reaction box 1 to be smoothly, quickly and accurately transferred between different processing chambers 24, thereby reducing the need for manual operation and improving production efficiency and safety.

[0091] See also Fig.15As shown, the push-pull assembly includes a plurality of push-pull drivers (not shown in the figure), a push rod 81 and a pull rod 82, wherein the push rod 81 is arranged on a part of the push-pull driver, and the pull rod 82 is arranged on another part of the push-pull driver. The push rod 81 and the pull rod 82 can be detachably connected to the opposite sides of the reaction box 1. The push rod 81 and the pull rod 82 are respectively used to provide a driving force and a pulling force for the reaction box 1, so that the reaction box 1 moves along the displacement track 5. The push-pull driver can be a power source of many types that can be provided by the prior art and perform linear motion, such as a gas rod, a hydraulic rod or a motor, etc. In this embodiment, there is no need to limit the type of push-pull driver. Since the push rod 81 and the pull rod 82 can be detachably connected to the two sides of the reaction box 1, respectively, the reaction box 1 can be moved no matter which direction is blocked. When the three processing chambers 24 are separated, this design can well ensure that the reaction box 1 can still move in a desired manner. In addition, when the three processing chambers 24 need to be closed, the push rod 81 and the pull rod 82 can be moved out of the three processing chambers 24, which will cause less interference to the silicon carbide precipitation process and is less likely to be damaged due to large temperature changes.

[0092] Accordingly, see Fig.14 , Fig.15 As shown, the reaction box 1 is provided with a quick release part 9 for connecting with the push-pull assembly. The quick release part 9 includes a connecting cover 91, which is installed on the reaction box 1 and forms a connecting cavity between the connecting cover 91 and the reaction box 1. The connecting cover 91 is provided with a connecting hole 92 connected with the connecting cavity. The head ends of the push rod 81 and the pull rod 82 are both provided with a card joint matching the shape of the connecting hole 92. The connecting hole 92 is used for access to the push rod 81 and the pull rod 82. The push-pull driver can drive the push rod 81 and the pull rod 82 to rotate along their own circumference so that the card joint is stuck in the connecting cavity. The quick release part 9 provides the reaction box 1 with the ability to quickly connect and separate with the push rod 81 and the pull rod 82. Through the cooperation of the card joint and the connecting hole 92, the push rod 81 and the pull rod 82 can be quickly connected and separated with the reaction box 1, which greatly improves the connection efficiency of the device. Moreover, the push-pull driver drives the push rod 81 and the pull rod 82 to rotate, so that the card connector can be inserted into or removed from the connection cavity. The connection operation is very simple and can be easily operated in an automated manner. The rapid assembly and disassembly shortens the time required for connection and improves the operating efficiency of the entire continuous production line.

[0093] Finally, it should be noted that those skilled in the art can understand that in order to enable readers to better understand the present invention, the embodiments of the present invention provide many technical details. However, even without these technical details and various changes and modifications based on the above-mentioned embodiments, the technical solutions claimed for protection by the claims of the present invention can be basically achieved. Therefore, in practical applications, various changes can be made to the above-mentioned embodiments in form and detail without departing from the spirit and scope of the present invention.

Claims

1. A heating shell device, characterized in that: include: A shell is disposed on the base; the shell has a processing chamber, and openings communicating with the processing chamber are disposed on both sides of the shell; An adjustment component is disposed at the opening and can slide toward the top or bottom of the shell; The adjustment component has a reserved hole that can communicate with the processing chamber; A driving assembly is arranged on the base or the housing; a driving end of the driving assembly is connected to the adjusting assembly; The driving assembly is used to drive the adjusting assembly to move so as to slide in the opening.

2. The heating housing device according to claim 1, characterized in that: The shell has a limiting channel penetrating the opening, and the limiting channel is vertically arranged at the opening; the adjusting component is arranged in the limiting channel.

3. The heating shell device according to claim 2, characterized in that: The adjustment component comprises: The partition comprises a stacked insulation board and a partition board, wherein a heat insulation layer is provided on a side of the insulation board facing the processing chamber; the partition board is located on a side of the insulation board away from the processing chamber; and the partition board has the reserved hole penetrating the insulation board and the partition board; The mounting plate is arranged at the bottom or the top of the partition.

4. The heating shell device according to claim 3, characterized in that: The base is provided with a mounting groove, and the mounting groove is located below the limiting channel; the driving assembly comprises: The hydraulic cylinder is arranged in the installation groove or on the top of the shell, and the telescopic end of the hydraulic cylinder is connected to the installation plate.

5. The heating shell device according to claim 3, characterized in that: The base is provided with a mounting groove, and the mounting groove is located below the limiting channel; the driving assembly comprises: A driving motor is arranged in the mounting groove or on the top of the housing; A cam is arranged on the output shaft of the driving motor; the large wheel portion of the cam is coaxially arranged with the output shaft, and the small wheel portion of the cam is in contact with the mounting plate; When the driving motor drives the cam to rotate, the cam moves the partition toward the top or bottom of the housing through the mounting plate.

6. The heating housing device according to claim 4 or 5, characterized in that: The partition and the mounting plate both have guide holes; the drive assembly also includes: A guide rod has one end disposed on the base and the other end located in the guide hole; the partition and the mounting plate can move along the length direction of the guide rod.

7. The heating housing device according to claim 6, characterized in that: The number of the drive components is at least two, and the at least two drive components are symmetrically arranged; the heating housing device further includes: A connecting plate, both ends of which are respectively connected to the mounting plates of at least two groups of the driving components.

8. The heating housing device according to claim 1, characterized in that: Also included are a plurality of reserved tubes; The inner diameters of the plurality of reserved tubes decrease in sequence; any one of the plurality of reserved tubes is detachably connected to the shell and is disposed in the reserved hole.

9. The heating housing device according to claim 1, characterized in that: Also included is a reserved component disposed in the reserved hole; The reserved assembly includes a plurality of reserved tubes which are sequentially sleeved, and the plurality of reserved tubes can be detachably connected to the shell.

10. The heating housing device according to claim 8 or 9, characterized in that: Also includes: A first sensor, used for acquiring a first relative height of a gas channel of the reaction box; A second sensor, used for acquiring a second relative height of the reserved tube; The controller is used to adjust the lifting and lowering of the reserved tube until the first relative height and the second relative height are consistent, and the reference object of the first relative height and the second relative height is the same.

11. The heating housing device according to claim 10, characterized in that: The middle part of the outer wall of the gas channel has a first groove, and the middle part of the outer wall of the reserved tube has a second groove; the heating housing device also includes: A rotating motor is disposed on the outer wall of the housing, and its rotating shaft passes through the adjusting assembly to the processing chamber; A connecting rod, one end of which is arranged on the rotating shaft of the rotating motor; A calibration piece is arranged at the other end of the connecting rod; the two ends of the calibration piece are respectively provided with a first height point and a second height point; The rotating motor drives the calibration piece to rotate through the connecting rod, so that the two ends of the calibration piece enter the first groove and the second groove respectively, so as to detect the first height point through the first sensor and the second height point through the second sensor.

12. A continuous silicon carbide material manufacturing system, characterized in that: include: At least three heating shell devices according to any one of claims 1 to 11, wherein the at least three heating shell devices are arranged in sequence along the length direction of the base.

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