A multi-light source compatible control method and system for semiconductor detection

Abstract

The present invention relates to the technical field of semiconductor detection light source control, and discloses a multi-light source compatible control method and system for semiconductor detection. The present invention obtains the demand characteristics of semiconductor detection tasks and the performance parameters of light source modules, analyzes the light source configuration plan according to the task requirements and module performance, schedules the light source unit to switch to the working mode for semiconductor irradiation according to the configuration plan, continuously collects the quality characteristics of the working light source unit and compares them with preset standards to analyze and execute the light source switching plan, realizes the smooth transition of the light source unit, smoothly converts the light source unit to the handover mode and the transfer mode, realizes the compatible control of multiple light sources, avoids the instability of light source switching through gradual transition, ensures the stability of light source quality, realizes seamless collaboration between different light source units, enhances the compatibility and reliability of the system, and improves the operating efficiency through automatic control, which solves the problem of detection errors that are prone to occur when a single light source continuously provides high-precision illumination in the prior art.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor detection light source control, and in particular to a multi-light source compatible control method and system for semiconductor detection. Background Art

[0002] In semiconductor testing, precise light source irradiation is the key to achieving efficient and accurate testing. With the development of semiconductor technology, the complexity of semiconductor chips and devices and the requirements for detection accuracy are getting higher and higher. When driving the light source to perform high-precision lighting work, it will bring greater operating pressure to the light source. The light source is prone to overheating or reduced accuracy, which will reduce the life of the equipment and cause detection errors. Summary of the invention

[0003] The purpose of the present invention is to provide a multi-light source compatible control method and system for semiconductor detection, aiming to solve the problem in the prior art that a single light source continuously provides high-precision illumination and is prone to detection errors.

[0004] The present invention is implemented in this way. In a first aspect, the present invention provides a method for controlling compatible multiple light sources for semiconductor detection, comprising:

[0005] Acquire the execution requirement characteristics of the semiconductor detection task and the module performance parameters of the detection light source module prepared to execute the semiconductor detection task; wherein the detection light source module has a plurality of light source units;

[0006] Performing task analysis processing on the execution requirement characteristics according to the module performance parameters to obtain a light source parameter configuration scheme of the detection light source module corresponding to the semiconductor detection task;

[0007] The detection light source module is configured with module parameters according to the light source parameter configuration scheme, so as to schedule the light source unit specified in the detection light source module to switch to the working mode, so as to perform light source irradiation on the semiconductor to be detected corresponding to the semiconductor detection task;

[0008] Continuously collecting and analyzing the working parameters of the detection light source module to obtain the light source quality characteristics of the light source unit in the detection light source module that is in the working mode;

[0009] The light source quality feature is judged according to a preset standard, and when the judgment result shows that the light source quality feature reaches the preset standard, a progressive conversion scheme of the illumination work execution unit of the detection light source module is analyzed according to the light source parameter configuration scheme and the module performance parameters to obtain a light source switching scheme of the detection light source module;

[0010] According to the light source switching scheme, the designated light source unit in the detection light source module is switched to the handover mode, and the light source unit in the working mode is switched to the transfer mode, so that the light source unit in the transfer mode and the light source unit in the handover mode perform a gradual conversion of lighting work, thereby realizing multi-light source compatible regulation of the detection light source module.

[0011] In a second aspect, the present invention provides a multi-light source compatible control system for semiconductor detection, which is used to implement a multi-light source compatible control method for semiconductor detection as described in any one of the first aspects, including:

[0012] A data acquisition module, used to obtain the execution requirement characteristics of the semiconductor detection task and the module performance parameters of the detection light source module prepared to perform the semiconductor detection task; wherein the detection light source module has a plurality of light source units;

[0013] A parameter configuration module, used for performing task analysis processing on the execution requirement characteristics according to the module performance parameters, so as to obtain a light source parameter configuration scheme of the detection light source module corresponding to the semiconductor detection task;

[0014] A light source irradiation module, used to configure the module parameters of the detection light source module according to the light source parameter configuration scheme, so as to schedule the light source unit specified in the detection light source module to switch to the working mode, so as to perform light source irradiation on the semiconductor to be detected corresponding to the semiconductor detection task;

[0015] A quality monitoring module, used for continuously collecting and analyzing the working parameters of the detection light source module to obtain the light source quality characteristics of the light source unit in the detection light source module that is in working mode;

[0016] A switching analysis module, used to judge the light source quality characteristics according to a preset standard, and when the judgment result shows that the light source quality characteristics meet the preset standard, analyze the progressive conversion scheme of the illumination work execution unit of the detection light source module according to the light source parameter configuration scheme and the module performance parameters to obtain the light source switching scheme of the detection light source module;

[0017] A compatible control module is used to switch the light source unit specified in the detection light source module to the handover mode according to the light source switching scheme, and switch the light source unit in the working mode to the transfer mode, so that the light source unit in the transfer mode and the light source unit in the handover mode can perform a gradual conversion of the lighting work, thereby realizing multi-light source compatible control of the detection light source module.

[0018] The present invention provides a method for controlling compatible multiple light sources for semiconductor detection, which has the following beneficial effects:

[0019] The present invention obtains the demand characteristics of semiconductor detection tasks and the performance parameters of light source modules, analyzes the light source configuration plan according to the task requirements and module performance, schedules the light source unit to switch to the working mode for semiconductor irradiation according to the configuration plan, continuously collects the quality characteristics of the working light source unit and compares them with preset standards to analyze and execute the light source switching plan, realizes the smooth transition of the light source unit, smoothly converts the light source unit to the handover mode and the transfer mode, realizes the compatible regulation of multiple light sources, avoids the instability of light source switching through gradual transition, ensures the stability of light source quality, improves the detection accuracy, realizes seamless collaboration between different light source units, enhances the compatibility and reliability of the system, and improves the operating efficiency through automatic regulation, which solves the problem of detection errors that are prone to occur when a single light source continuously provides high-precision illumination in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the steps of a multi-light source compatible control method for semiconductor detection provided by an embodiment of the present invention;

[0021] Figure 2 It is a structural schematic diagram of a multi-light source compatible control system for semiconductor detection provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0023] The implementation of the present invention is described in detail below in conjunction with specific embodiments.

[0024] Reference Figure 1 , Figure 2 As shown, a preferred embodiment of the present invention is provided.

[0025] In a first aspect, the present invention provides a method for compatible control of multiple light sources for semiconductor detection, comprising:

[0026] S1: Acquire the execution requirement characteristics of the semiconductor detection task and the module performance parameters of the detection light source module prepared to execute the semiconductor detection task; wherein the detection light source module has a plurality of light source units;

[0027] S2: performing task analysis processing on the execution requirement characteristics according to the module performance parameters to obtain a light source parameter configuration scheme of the detection light source module corresponding to the semiconductor detection task;

[0028] S3: configuring the module parameters of the detection light source module according to the light source parameter configuration scheme, so as to schedule the light source unit specified in the detection light source module to switch to the working mode, so as to perform light source irradiation on the semiconductor to be detected corresponding to the semiconductor detection task;

[0029] S4: continuously collecting and analyzing the working parameters of the detection light source module to obtain light source quality characteristics of the light source unit in the detection light source module that is in a working mode;

[0030] S5: judging the light source quality feature according to a preset standard, and when the judgment result shows that the light source quality feature reaches the preset standard, analyzing the progressive conversion scheme of the illumination work execution unit of the detection light source module according to the light source parameter configuration scheme and the module performance parameters, so as to obtain the light source switching scheme of the detection light source module;

[0031] S6: According to the light source switching scheme, the light source unit specified in the detection light source module is switched to the handover mode, and the light source unit in the working mode is switched to the transfer mode, so that the light source unit in the transfer mode and the light source unit in the handover mode perform a gradual conversion of lighting work, thereby realizing multi-light source compatible regulation of the detection light source module.

[0032] Specifically, in step S1 of the embodiment provided by the present invention, the goal of the semiconductor inspection task is first clarified. The goal includes the semiconductor to be inspected and the inspection items and modes to be performed on the semiconductor. For example, the task may require surface defect detection, physical property analysis or electrical testing of semiconductor materials, etc. Each task type has different requirements for the light source.

[0033] More specifically, based on the objectives of the task, its specific requirements for the light source are extracted, which usually include the following aspects: Light source wavelength: Some detection tasks require light sources of specific wavelengths to stimulate specific physical or chemical reactions, such as ultraviolet light, visible light, infrared light, etc. Light source intensity: The task requires irradiation with different light intensities, such as high-brightness light sources for precision detection, low brightness for stability detection, etc. Irradiation mode: The task requires continuous irradiation or pulse mode, etc. Illumination time: The task stipulates the length of time the light source is turned on and off.

[0034] More specifically, the detection light source module usually includes multiple light source units, each light source unit has different performance parameters. Different semiconductor detection tasks can be performed by different light source units. In some specific semiconductor detection tasks, multiple light source units are required to work in parallel to provide illumination for the detection task. In some cases, the illumination work that can be completed by a single light source unit can be replaced by multiple light source units working in parallel, thereby obtaining better results.

[0035] More specifically, in order to determine how to perform semiconductor detection tasks, it is necessary to collect the simulated performance parameters of the light source module. The module performance parameters include the various performance of the detection light source module itself, as well as the performance parameters of each light source unit in the detection light source module, including wavelength range: the wavelength range supported by the light source unit, such as ultraviolet (200-400nm), visible light (400-700 nm) or infrared (700 nm and above), power output: the maximum output power of each light source unit, usually in watts (W), response speed: the turn-on and turn-off time of the light source unit. The response speed affects the dynamic adjustment ability of the light source, stability and accuracy: the stability of the light source output (for example, volatility, repeatability) and adjustment accuracy, and adjustment method: including power adjustment, wavelength adjustment and other methods, such as adjusting the output of the light source through electronic control.

[0036] It can be understood that by comparing the light source requirements of the task with the performance parameters of the light source module, the most suitable light source unit and configuration can be found. By automatically matching the task requirements with the performance of the light source module, human intervention can be reduced, and the accuracy and efficiency of the configuration can be improved, ensuring that each task can select the most suitable light source unit and parameters, thereby improving detection accuracy and efficiency.

[0037] Specifically, in step S2 of the embodiment provided by the present invention, the detection task requirements are compared with the performance parameters of the light source module through task analysis processing. For example, if the task requires irradiation within a certain wavelength range, the system will select a light source unit with the output capability of the wavelength in the performance parameters. According to different requirements (such as wavelength, power, irradiation mode), the appropriate light source unit is selected, and the output of the light source is configured according to its performance parameters. For example, if the task requires a higher light intensity, a light source unit with a larger power output is selected; if the task has specific requirements for the wavelength, a light source with higher stability in this band is selected.

[0038] More specifically, when a task requires multiple light source modules to work together, the algorithm coordinates the working status of each light source unit, such as adjusting the output time, frequency, and power of different light sources to meet the task requirements. For example, the scheduling strategy of multiple light source modules can be set so that they can be gradually switched, gradually converted, or work in parallel as needed. In the actual execution process, the output status of the light source is detected through real-time monitoring, and the light source configuration is fine-tuned to ensure that the light source output requirements of the task are met. The sensor feedback information is used to dynamically adjust the light source to ensure its stability and compatibility with the task.

[0039] More specifically, based on the matching results between the task requirements and the performance of the light source module, the final light source parameter configuration scheme is generated. The scheme specifically includes: wavelength setting, power adjustment, irradiation mode, etc. of each light source unit; if multiple light sources need to work in coordination, scheduling strategies such as scheduling order and time division will also be included. The feasibility of the configuration scheme is verified through simulation or experiment, and possible light source interaction problems are optimized to ensure smooth light source switching and stable light source output during task execution.

[0040] It is understandable that through task parsing and module performance analysis, it is possible to accurately match the requirements of the detection task with the capabilities of the light source module, ensuring that the light source requirements of each task are fully met. Through a reasonable light source scheduling algorithm and coordination mechanism, it is ensured that multiple light source modules can work efficiently and stably to avoid resource conflicts and waste.

[0041] Specifically, in step S3 of the embodiment provided by the present invention, the system receives a light source parameter configuration scheme generated based on task analysis and performance matching, which includes parameters such as the working wavelength, power intensity, irradiation mode (such as continuous irradiation or pulsed irradiation), and working time required for each light source unit.

[0042] More specifically, the specific parameter requirements of each light source unit are analyzed, such as: wavelength configuration: which light source units need to output specific wavelengths, power configuration: output power requirements of each light source unit, irradiation mode configuration: whether it is continuous irradiation or pulse mode, pulse frequency and pulse width, etc., working time: the switching time of the light source, continuous working time or cyclic working mode, to ensure accurate analysis of the light source parameter configuration plan, provide detailed light source requirement information for subsequent configuration and scheduling, understand the special requirements of each task, ensure that each light source unit is configured correctly, and avoid mismatches or conflicts.

[0043] More specifically, according to the light source parameter configuration scheme obtained by the analysis, the system starts to activate the light source unit and configure it. The specific steps include: wavelength adjustment: according to the task requirements, adjust the wavelength output of the light source unit. For example, if the task requires the use of ultraviolet rays (200-400 nm), adjust the corresponding light source unit to the wavelength range. Power adjustment: set the output power of each light source unit to ensure that it meets the task requirements. For example, if the task requires a higher light intensity, the light source unit can be adjusted to the maximum power output. Irradiation mode configuration: according to the specific requirements of the task, select a suitable irradiation mode, such as continuous irradiation or pulse irradiation. For the pulse mode, it is also necessary to configure parameters such as pulse frequency, pulse width and duty cycle. Time scheduling: according to the time requirements of the task, set the light source unit's on and off time and duration. For example, if the task requires certain light source units to be turned on within a specific time, the system needs to be accurately scheduled according to the task sequence. Multi-light source coordination: when the task requires multiple light source units to work together, the system schedules different light source units to work simultaneously or alternately according to the task requirements. For example, multiple light sources may be turned on alternately at different time points to achieve all-round irradiation or multi-angle detection.

[0044] More specifically, by accurately configuring the working parameters of each light source unit, it is ensured that the light source can provide the correct illumination mode and lighting conditions according to the task requirements. The collaborative work of multiple light source units can improve the comprehensiveness and accuracy of detection and avoid light source conflicts or redundancy. The system can monitor and adjust the light source parameters in real time to ensure that the light source is stable and reliable during task execution and avoid light source performance degradation or inconsistency.

[0045] More specifically, according to the configured parameters, the corresponding light source unit is started to perform light source irradiation. Light source irradiation can be performed in different modes for the semiconductor to be detected, such as: continuous irradiation: suitable for tasks that require stable irradiation, pulse irradiation: suitable for tasks that require short-term high-intensity irradiation, which can enhance the effect of the light source on the specific properties of the semiconductor surface (such as optical response, thermal response, etc.); during the light source irradiation process, the semiconductor reaction and the output of the light source are monitored in real time through sensors and monitoring systems. If the light source or semiconductor reaction is abnormal, the system will make adjustments based on the feedback information.

[0046] It is understandable that through the precise configuration and scheduling of the light source, accurate irradiation of the semiconductor can be achieved, thereby effectively supporting various detection tasks (such as surface defect detection, electrical testing, etc.), and being able to respond to environmental changes or semiconductor status in real time, ensuring that the light source output is always in the best state during the entire detection process, and avoiding light source fluctuations or anomalies affecting the detection results.

[0047] Specifically, in step S4 of the embodiment provided by the present invention, the working parameters of each light source unit are continuously collected through the built-in sensor and monitoring system, including: light source output power: monitor the real-time power output of the light source to ensure that the power is within a predetermined range, light source wavelength: monitor the actual output wavelength of the light source, especially in light sources with adjustable wavelengths, to ensure the wavelength output accuracy, light intensity distribution: collect light intensity distribution data of the light source to check whether it meets the predetermined standards, temperature and current: monitor the working temperature, current and other electrical parameters of the light source unit to determine whether there is overload or loss, response time: record the response time of the light source unit to ensure that it meets the response speed required by the task.

[0048] More specifically, analyze the volatility of light source output power, wavelength and other parameters, evaluate their stability, calculate the actual deviation of the light source output wavelength through the collected wavelength data, determine whether its accuracy meets the requirements, analyze the light intensity distribution of the light source, evaluate its uniformity and distribution characteristics, ensure that the task requirements are met, and analyze whether the light source is overheated, short-circuited or overloaded based on the monitored temperature and current data, thereby affecting the performance. Based on the collected data, build a light source quality assessment model, and output the quality characteristics of the light source unit in real time. This model can comprehensively evaluate the overall quality of the light source by combining multiple dimensions such as power fluctuations, wavelength deviations, and temperature changes.

[0049] It can be understood that through data analysis and quality feature extraction, a dynamic evaluation of the performance of the light source unit can be achieved to ensure that it always meets the task requirements. Real-time analysis can promptly detect abnormalities or potential problems, such as unstable light source output, abnormal power, excessive temperature, etc., and make early warnings and corrections. When it is detected that the light source unit currently used in the light source module is overheated or the light source quality is poor, the lighting work of the current light source unit can be gradually reduced, and the remaining light source units can be started as replacements.

[0050] Specifically, in step S5 of the embodiment provided by the present invention, the system defines and stores a preset light source quality standard, and makes a judgment according to the preset standard through the previously collected light source working parameter data (such as power, wavelength, temperature, etc.). By real-time monitoring and judgment of the light source quality characteristics, it is possible to accurately evaluate whether the light source meets the task requirements, thereby avoiding the light source not meeting the quality requirements and affecting the detection results.

[0051] More specifically, if the light source quality characteristics reach the preset standard, it means that the light source unit providing light illumination can no longer continue to perform lighting work. The system will gradually convert according to the light source parameter configuration plan and module performance parameters. This conversion plan is to smoothly adjust the light source working mode or switch to different working stages without causing drastic changes in the system.

[0052] More specifically, according to the working requirements of different light source units (such as switching from continuous irradiation to pulse mode, or switching from low-power mode to high-power mode), an adaptive conversion plan is formulated, and the output power of the light source is gradually adjusted according to the preset power change rate to ensure system stability. In the case of a multi-wavelength light source, different wavelengths are gradually switched to output, and corresponding light intensity adjustments are made to ensure that there is no light source interference or erroneous output during the conversion process. The gradual conversion plan can ensure that the light source unit will not suddenly change when switching modes, thereby reducing the system load and unstable factors and avoiding affecting the detection task. Through reasonable gradual conversion, the system can utilize light source resources more efficiently and flexibly adjust the working status of the light source according to different task requirements.

[0053] More specifically, after the light source quality is judged to meet the standards, a light source switching plan is formulated in combination with the module's performance parameters (such as maximum power, wavelength range, light intensity uniformity, etc.) to ensure seamless switching between different light source units, and to select the appropriate light source unit according to the task requirements and perform the switching operation. For example, for tasks that require high-power output, select a light source unit with a higher power; for tasks that have strict spectral requirements, select a light source unit with a precise wavelength. According to the performance of each light source unit, the optimal switching sequence and operation are formulated to ensure that the light source module is always in the best state in each working stage.

[0054] It is understandable that the system can flexibly select the appropriate light source unit and working mode according to different task requirements to ensure efficient and stable working conditions. The system can automatically execute the light source switching plan, reduce manual intervention, and improve operational efficiency and accuracy. Through a reasonable light source switching plan, it can ensure that in complex detection tasks, the light source can meet various requirements such as accuracy and stability, thereby improving the success rate and quality of detection tasks.

[0055] Specifically, in step S6 of the embodiment provided by the present invention, according to the light source switching scheme, the designated light source unit is switched to the handover mode, and the output power of the current light source unit is gradually reduced until its output is close to zero. Coordination is performed between the light source units to ensure uniform lighting during the handover process and avoid sudden changes in light intensity affecting the detection accuracy. At the same time, the light source unit in the working mode is switched to the transfer mode, and the output power of the new light source unit is gradually increased until it reaches a predetermined working level. The wavelength and light intensity distribution of the new light source unit are finely controlled to ensure compatibility with the output of the light source unit in the handover mode, and the real-time operating status of each light source unit is monitored to ensure stable light source output throughout the process.

[0056] More specifically, through precise power and wavelength control, switching from one light source unit to another is gradually achieved to ensure the continuity and uniformity of lighting, and compatibility control is achieved between different light source units to ensure that cross-interference between light sources is minimized when multiple light sources work at the same time. The working modes of each light source unit are controlled to avoid interference caused by inconsistencies in wavelength, light intensity, etc., and the collaborative working effect between different light sources is optimized by intelligently adjusting the light source output.

[0057] It can be understood that through gradual power adjustment and mode switching, a smooth transition between light source units can be achieved, avoiding any sudden lighting instability caused by changes. Under the compatible regulation of multiple light sources, the stable operation of the system can be ensured, and the performance of the entire module can be avoided from being affected by the failure of a single light source. Through precise light source switching and regulation, the system's light source utilization efficiency can be improved and the service life of the equipment can be extended.

[0058] The present invention provides a method for controlling compatible multiple light sources for semiconductor detection, which has the following beneficial effects:

[0059] The present invention obtains the demand characteristics of semiconductor detection tasks and the performance parameters of light source modules, analyzes the light source configuration plan according to the task requirements and module performance, schedules the light source unit to switch to the working mode for semiconductor irradiation according to the configuration plan, continuously collects the quality characteristics of the working light source unit and compares them with preset standards to analyze and execute the light source switching plan, realizes the smooth transition of the light source unit, smoothly converts the light source unit to the handover mode and the transfer mode, realizes the compatible regulation of multiple light sources, avoids the instability of light source switching through gradual transition, ensures the stability of light source quality, improves the detection accuracy, realizes seamless collaboration between different light source units, enhances the compatibility and reliability of the system, and improves the operating efficiency through automatic regulation, which solves the problem of detection errors that are prone to occur when a single light source continuously provides high-precision illumination in the prior art.

[0060] Preferably, the step of obtaining the execution requirement characteristics of the semiconductor detection task and the module performance parameters of the detection light source module prepared to perform the semiconductor detection task includes:

[0061] S11: performing information analysis on the semiconductor detection task to obtain model information and detection standards of the semiconductor to be detected corresponding to the semiconductor detection task;

[0062] S12: Retrieving corresponding semiconductor performance parameters from a database according to the model information of the semiconductor to be detected, and analyzing and processing the semiconductor performance parameters according to the detection standard to obtain the execution requirement characteristics of the semiconductor detection task; wherein the execution requirement characteristics include light source wavelength characteristics, light intensity characteristics, illumination mode characteristics, illumination uniformity characteristics, and light source fluctuation tolerance characteristics;

[0063] S13: Collecting specifications and models of the detection light source module that is prepared to perform the semiconductor detection task to obtain standard performance parameters of the detection light source module, and performing trial activation processing on the light source unit of the detection light source module to obtain setting status characteristics of each light source unit of the detection light source module, and adjusting the standard performance parameters for feedback of actual conditions based on the setting status characteristics to obtain module performance parameters of the detection light source.

[0064] Specifically, by reading relevant documents or data of semiconductor inspection tasks, the core requirements of the task are extracted, including the semiconductor model information and inspection standards involved, the model of the semiconductor to be inspected and its related characteristics (for example, the material type, structure, performance parameters, etc. of the semiconductor) are extracted from the task documents, and the standards for semiconductor performance evaluation are obtained from the inspection task, such as optical test standards, power standards, wavelength ranges, etc.

[0065] More specifically, based on the model information of the semiconductor to be tested, its corresponding performance parameters, such as optical properties, electrical properties, thermal properties, etc., are queried from the database, and these performance parameters are used to guide the requirements of the detection task and determine the specific detection needs.

[0066] More specifically, the detection requirements are analyzed, and the wavelength range of the required light source is analyzed based on the optical properties of the semiconductor to ensure that the light source during detection can meet the excitation or response requirements of the semiconductor. The light intensity requirements of the light source are determined to ensure that the light source is strong enough to meet the illumination requirements of the semiconductor while avoiding nonlinear responses caused by excessively strong light sources. According to task requirements, illumination modes are defined, such as continuous illumination or pulsed illumination, to ensure the uniformity of light source illumination and avoid errors caused by uneven light intensity distribution. The tolerance for effective semiconductor detection within a certain light source fluctuation range is determined to ensure the stability of the task. Through the analysis of light source wavelength, light intensity, illumination mode, uniformity, fluctuation tolerance and other characteristics, the complete execution requirement characteristics of the semiconductor detection task are obtained.

[0067] It can be understood that the comprehensive analysis of semiconductor performance parameters and testing standards ensures the precise requirements of the testing task and avoids the occurrence of errors or mismatches. The detailed analysis of the task requirements makes the subsequent light source selection and configuration more scientific and efficient.

[0068] More specifically, obtain the specification and model information of the light source module to be used for the inspection task, including the basic characteristics of the light source, such as the power range, wavelength adjustment range, light intensity, and stability. Test different light source units of the light source module by trial operation to monitor their actual working conditions (such as light intensity, stability, and wavelength). Obtain the working characteristics of each light source unit in an activated state, such as its wavelength, intensity, illumination uniformity, temperature, and stability. Compare the actual performance of the light source module with the standard performance parameters to identify possible deviations of the light source module in actual work. Adjust the settings of the light source module according to the feedback information, such as adjusting the output power, optimizing the wavelength range, and improving the illumination uniformity, to ensure that the light source performance matches the task requirements. After adjustment, obtain the performance parameters of the inspection light source module that ultimately meet the task requirements, including the optimized light source wavelength, intensity, and uniformity.

[0069] It can be understood that through real-time adjustment and feedback mechanisms, it is ensured that the performance of the light source module can meet the requirements of semiconductor detection tasks and improve detection accuracy and reliability. By continuously adjusting and optimizing the working state of the light source unit, the stability and operating efficiency of the light source can be improved, ensuring efficient execution of detection tasks. Through the feedback adjustment process, the performance of the light source module can be automatically optimized, reducing manual intervention and improving the accuracy and response speed of the light source configuration.

[0070] Preferably, the step of performing task analysis processing on the execution requirement characteristics according to the module performance parameters to obtain a light source parameter configuration scheme of the detection light source module corresponding to the semiconductor detection task includes:

[0071] S21: performing digital simulation on each light source unit of the detection light source module according to the module performance parameters to obtain a basic task unit for performing digital simulation feedback on each light source unit;

[0072] S22: experimentally assigning unit parameters to each of the basic task units, and performing algorithmic deduction of task execution effects on each of the basic task units assigned with unit parameters, so as to obtain corresponding execution effect characteristics;

[0073] S23: performing experimental allocation supervision on the execution effect characteristics according to the execution requirement characteristics, and performing feedback correction on the unit parameters of each of the basic task units according to the supervision results, and performing feedback correction and algorithm deduction in a cycle until the execution effect characteristics that meet the execution requirement characteristics are obtained;

[0074] S24: The unit parameters of the basic task units whose execution effect characteristics meet the execution requirement characteristics are collectively used as the light source parameter configuration scheme.

[0075] Specifically, each light source unit is digitally simulated based on the standard performance parameters of the detection light source module (such as the power, wavelength, stability, etc. of the light source unit). This process models the working behavior of the light source unit and simulates its performance under different conditions to help evaluate whether each light source unit can meet the requirements of the semiconductor detection task. The result of the digital simulation generates a "basic task unit" for each light source unit, which contains the performance data, operating status and response mode of the light source unit under specific conditions.

[0076] More specifically, the basic task units based on module performance parameters are further refined, and parameters (such as wavelength, light intensity, irradiation time, etc.) are assigned to each unit. These assignments are based on experimental standards or theoretical models, with the goal of ensuring that each light source unit can meet the task requirements. The basic task units with assigned parameters are deduced through mathematical models or simulation algorithms to evaluate the task execution effects of each light source unit under given conditions. The results of the deduction can reflect whether each light source unit can provide sufficient light intensity, whether the light is uniform, whether the light source fluctuation is within the tolerance range, and whether the stability and reliability of the light source meet the requirements of the detection task.

[0077] More specifically, the above-mentioned execution effect characteristics are compared with the execution demand characteristics to determine whether they meet the actual requirements of the semiconductor detection task. If the execution effect does not meet the requirements, supervision and adjustment are implemented to adjust the parameter configuration of each basic task unit. The specific method includes conducting a detailed analysis of the experimental results to find out the parts that do not meet the target execution effect. According to the analysis results, the output power, wavelength, irradiation mode and other parameters of the light source unit are corrected to ensure that they meet the requirements. Through the feedback correction algorithm, the parameters of each basic task unit are continuously optimized for multiple iterations until the execution effect meets the predetermined demand characteristics. After each adjustment, the algorithm is re-deduced and the task execution effect is evaluated until the final result meets the predetermined goal.

[0078] More specifically, after multiple rounds of feedback correction and algorithm deduction, the basic task unit parameters that meet the execution requirements (such as light source power, wavelength, light intensity distribution, lighting uniformity, etc.) are finally determined to be consistent with the execution requirements. This will be used as the final light source parameter configuration plan, which can be directly used for actual light source configuration, to guide the precise setting of the light source unit and ensure that semiconductor inspection tasks can be executed smoothly.

[0079] It is understandable that the light source parameter configuration scheme is highly matched with the execution requirements of the semiconductor detection task, ensuring that the wavelength, intensity and irradiation mode of the light source fully meet the task standards. By accurately allocating and optimizing the parameters of the light source unit, the resource utilization efficiency is improved, and excessive or insufficient light source resource configuration is avoided. After multiple algorithm deductions and feedback corrections, the final configuration scheme can significantly improve the stability of the light source and avoid the impact of light source fluctuations on semiconductor detection results. The digital simulation and algorithm deduction of the entire process reduce the workload of manual debugging, improve the automation and intelligence level of the system, and ensure the accuracy and efficiency of the detection task execution.

[0080] Preferably, the step of configuring the module parameters of the detection light source module according to the light source parameter configuration scheme to schedule the light source unit specified in the detection light source module to switch to the working mode to perform light source irradiation on the semiconductor to be detected corresponding to the semiconductor detection task includes:

[0081] S31: parsing the light source parameter configuration scheme to convert the unit parameters of each of the basic task units in the light source parameter configuration scheme into working instructions for each of the light source units; wherein the unit parameters are used to describe whether the light source unit is in working mode and the specific working mode of the light source unit in working mode, and the working instructions include start instructions and configuration instructions;

[0082] S32: Send the start-up instruction to the corresponding light source unit so that the light source unit switches to the working mode, and send the configuration instruction to the light source unit in the working mode so that the light source unit in the working mode irradiates the semiconductor to be detected according to the unit parameters in the light source parameter configuration scheme.

[0083] Specifically, it is necessary to parse the light source parameter configuration scheme and convert the unit parameters of each basic task unit in the configuration scheme into working instructions of the corresponding light source unit. The unit parameters of each basic task unit describe the working status of the light source unit (such as whether it is enabled, power, wavelength, light intensity, etc.) and the specific working method of the light source unit in the working mode.

[0084] More specifically, work instructions are generated based on the unit parameters, including: start instructions: used to enable the light source unit and switch it to the working mode; configuration instructions: used to set the working parameters of the light source unit (such as power, wavelength, lighting mode, irradiation time, etc.) to ensure that the light source unit irradiates as required.

[0085] More specifically, a startup instruction is sent to each light source unit. The purpose of the startup instruction is to activate the specified light source unit and switch it to the working mode. At this stage, the light source unit is in a waiting state, ready to accept subsequent configuration and operation. The configuration instruction is sent to the started light source unit. The configuration instruction sets the specific working mode of each light source unit according to the unit parameters in the light source parameter configuration scheme. These working modes include: wavelength setting of the light source (ensuring that the wavelength is suitable for the optical response of the semiconductor to be detected), light intensity setting of the light source (ensuring that the light intensity is suitable for the detection standard to avoid excessive or weak light affecting the detection results), configuration of the illumination mode (such as continuous illumination or pulse illumination), illumination uniformity and fluctuation control (ensuring that the light source output is stable and within the tolerance range).

[0086] More specifically, after startup and configuration, the light source unit enters the working mode and starts to irradiate the semiconductor to be inspected. During the irradiation process, the light source unit will provide stable, uniform and compliant light source illumination in accordance with the settings of the configuration instructions to perform semiconductor inspection tasks.

[0087] It can be understood that by converting the parameters of the basic task unit into specific work instructions, it is ensured that each light source unit works accurately according to the configuration plan to achieve the expected light source illumination effect, and the startup and configuration of each light source unit are accurately controlled to ensure that the lighting conditions meet the semiconductor detection requirements, thereby improving the accuracy of semiconductor detection tasks. This method can flexibly adjust the working mode of the light source unit according to different detection tasks to adapt to different semiconductor detection standards and task requirements.

[0088] Preferably, the step of continuously collecting and analyzing the working parameters of the detection light source module to obtain the light source quality characteristics of the light source unit in the detection light source module in the working mode includes:

[0089] S41: continuously collecting temperature data of the light source unit of the detection light source module in the working mode to obtain a time-series temperature characteristic of the light source unit in the working mode;

[0090] S42: Acquire detection data of the semiconductor to be detected under the irradiation of the light source of the detection light source module, and perform characteristic analysis of detection accuracy on the detection data to obtain working quality characteristics of the light source unit in working mode;

[0091] S43: Combine the timing temperature characteristics and the working quality characteristics to obtain the light source quality characteristics of the light source unit; wherein the timing temperature characteristics and the working quality characteristics respectively have corresponding numerical conversion standards, and the numerical conversion standards are used to perform numerical conversion on the timing temperature characteristics and the working quality characteristics to obtain corresponding first judgment values ​​and second judgment values, and when the first judgment value or the second judgment value meets the preset standard, a judgment result is generated that the light source quality characteristics meet the preset standard.

[0092] Specifically, when the light source module is detected to be in working mode, the temperature of each light source unit is continuously monitored. Temperature sensors or thermocouples and other devices can be used to collect temperature data of the light source unit in real time, and the collected temperature data are arranged in chronological order to obtain "time series temperature characteristics", which reflect the temperature change law of the light source unit during operation. By monitoring the temperature change, the thermal stability and thermal response speed of the light source unit and whether there is overheating or overcooling can be analyzed, thereby affecting the performance of the light source unit.

[0093] More specifically, after the semiconductor to be tested receives irradiation from the light source module, it will produce a corresponding electrical response based on the intensity, wavelength and other characteristics of the light source. These response data are acquired through sensors or detection equipment to form a set of "detection data", and the collected detection data are analyzed to evaluate its accuracy characteristics. The working quality of the light source unit is judged by statistical analysis of the data (such as signal-to-noise ratio, error range, detection repeatability, etc.). The characteristic analysis of detection accuracy can reveal whether the light source unit affects the detection results of the semiconductor, or whether the stability of the light source meets the requirements.

[0094] More specifically, the time series temperature characteristics and the working quality characteristics (i.e., the accuracy analysis results of the detection data) are comprehensively analyzed. By combining these two characteristics, the working quality of the light source unit can be comprehensively evaluated. The change in temperature may affect the output stability of the light source unit, and the accuracy analysis of the detection data can verify whether the light source unit provides sufficiently stable and accurate lighting in actual work.

[0095] More specifically, numerical conversion standards are applied to the time series temperature characteristics and work quality characteristics respectively. These standards convert the characteristic data into corresponding numerical values, for example: numerical conversion of time series temperature characteristics: convert the fluctuation amplitude of temperature change, temperature rise rate, thermal stability, etc. into a quantitative value (such as temperature fluctuation range, average temperature, etc.), and convert the accuracy of detection data into a quantitative value (such as error rate, signal-to-noise ratio, etc.).

[0096] More specifically, according to the numerical conversion standard, the numerical value obtained by converting the temperature characteristic is called the "first judgment value", and the numerical value obtained by converting the working quality characteristic is called the "second judgment value". According to the preset standard, it is judged whether the first judgment value and the second judgment value meet the requirements. If the first judgment value (temperature characteristic) meets the preset standard and the second judgment value (working quality characteristic) also meets the preset standard, a judgment result of "the light source quality characteristic meets the quality requirements" is generated. If one or both of the judgment values ​​do not meet the standard, it means that the light source quality does not meet the requirements and needs to be adjusted or corrected.

[0097] It should be noted that in the above steps, a judgment is made on whether the quality is qualified. Therefore, when the judgment value is less than the preset standard, it corresponds to the above-mentioned "light source quality characteristics reach the preset standard", and the light source quality characteristics reaching the preset standard means that the quality of the light source is unqualified and needs to be corrected.

[0098] It is understandable that by continuously collecting and analyzing the temperature and detection data of the light source unit, the working status and light source quality of the light source unit can be monitored in real time to ensure its stability and accuracy. This provides data support for the performance optimization of the light source module. By monitoring the temperature characteristics, it is possible to prevent the light source unit from failing due to overheating or unstable temperature conditions. If the temperature is too high or too low, the output of the light source may be unstable or even damage the equipment. By accurately analyzing the working quality of the light source unit, it is possible to ensure that the light source conditions in the semiconductor detection task are always kept in the optimal state, thereby improving the accuracy of the detection results and avoiding errors caused by light source quality problems.

[0099] Preferably, the step of analyzing the progressive conversion scheme of the illumination work execution unit of the detection light source module according to the light source parameter configuration scheme and the module performance parameters to obtain the light source switching scheme of the detection light source module includes:

[0100] S51: performing digital simulation on each light source unit of the detection light source module according to the module performance parameters to obtain a basic task unit for performing digital simulation feedback on each light source unit;

[0101] S52: marking the unit status of each of the basic task units according to the light source parameter configuration scheme to obtain a unit marking for describing whether the light source unit corresponding to each of the basic task units is in a working mode and a specific working mode in the working mode;

[0102] S53: converting each of the basic task units according to the unit label to obtain a first analog unit for performing digital feedback on the light source unit in the working mode and a second analog unit for performing digital feedback on the light source unit not in the working mode;

[0103] S54: performing a gradual conversion scheme analysis on the first analog unit and the second analog unit to obtain a first working gradient of the first analog unit and a second working gradient of the second analog unit;

[0104] S55: The first working gradient and the second working gradient together constitute a light source switching scheme of the detection light source module.

[0105] Specifically, according to the performance requirements of the detection light source module, the behavior of each light source unit is first simulated and fed back through digital simulation, which involves considering the working conditions of the light source unit (such as temperature, power, stability, etc.) and its performance under different working conditions. Based on the simulation results, basic task units are defined. These basic task units contain the basic parameters of each light source unit under different working conditions for subsequent simulation and analysis.

[0106] More specifically, the status of the basic task units is marked according to the light source parameter configuration plan. The status of each basic task unit is marked according to the light source parameter configuration plan. The purpose of the status marking is to describe whether each light source unit is already in the working mode, and its specific working mode in the working mode (such as working wavelength, intensity, power, etc.). The unit marking includes: working mode marking: whether each basic task unit is in the working mode, working mode marking: specific working parameters of the light source unit that is already in the working mode (such as power, wavelength, etc.).

[0107] More specifically, the task unit is converted according to the unit label, and the light source unit that is already in the working mode is simulated through the corresponding digital feedback to form a "first simulation unit". This simulation unit reflects the performance and behavior of the light source unit in the working mode, and for the light source unit that is not in the working mode, a "second simulation unit" is formed through the corresponding simulation conversion. This simulation unit reflects the state of the light source unit when it is not in the working mode.

[0108] More specifically, a gradual conversion scheme is analyzed for the first simulation unit and the second simulation unit. The purpose of the gradual conversion scheme analysis is to study the transition process of the light source unit from the non-working mode to the working mode, as well as the stability in the working mode. The performance change process of the first simulation unit in the working mode is analyzed to obtain the first working gradient, which reflects the transition rate and stability of the light source unit when entering the working mode. The changes of the second simulation unit in the switching process from the non-working mode to the working mode are analyzed to obtain the second working gradient. This can reflect the behavior of the light source unit switching from the standby mode to the working mode.

[0109] More specifically, the first working gradient of the first simulation unit and the second working gradient of the second simulation unit are combined to form a complete light source switching scheme, which describes the working state switching process of the entire detection light source module, from non-startup to startup, and from standby mode to working mode.

[0110] It can be understood that through the analysis of the gradual transition scheme, the work scheduling of each light source unit can be optimized, so that the switching of the light source units of the light source module is smoother and more stable, and the working efficiency and stability of the light source module can be maximized. The gradual transition scheme can ensure that the conversion process of the light source unit is smoother, and reduce the power waste and excessive heat caused by drastic changes in the transition process. By analyzing the working status and gradient changes of the light source unit, the accuracy of the system can be improved, and detection errors caused by unstable light sources or improper switching can be avoided. This scheme enables the light source module to automatically adjust the working mode and status of the light source unit according to different work requirements and task loads, thereby improving the system's adaptability to external environment and task changes.

[0111] Preferably, the step of performing a progressive conversion scheme analysis on the first simulation unit and the second simulation unit to obtain a first working gradient of the first simulation unit and a second working gradient of the second simulation unit comprises:

[0112] S541: performing a step-by-step descent simulation of a multi-layer gradient on the first simulation unit according to a pre-trained fixed template to obtain a simulated descent gradient of the first simulation unit;

[0113] S542: performing a reverse conversion process on the simulated descending gradient of the first simulation unit to obtain a simulated ascending gradient corresponding to the simulated descending gradient;

[0114] S543: performing execution parameter analysis on the simulated ascending gradient according to the second simulation unit to obtain a unit execution parameter of the second simulation unit corresponding to the simulated ascending gradient;

[0115] S544: performing a multi-dimensional analysis of the executableness of the simulated descent gradient according to the first simulation unit, and performing a multi-dimensional analysis of the executableness of the unit execution parameter according to the second simulation unit, so as to obtain the executableness of the simulated descent gradient and the executableness of the unit execution parameter;

[0116] S545: performing feedback adjustment on the simulated descent gradient and the unit execution parameter under bidirectional constraints according to the executable degree of the simulated descent gradient and the executable degree of the unit execution parameter to obtain adjusted simulated descent gradient and unit execution parameter, and performing feedback adjustment on the simulated descent gradient and unit execution parameter in a loop until the simulated descent gradient and unit execution parameter with optimal executable degree are obtained;

[0117] S546: Using the simulated descent gradient with the best executability as the first working gradient;

[0118] S547: Performing gradient conversion on the unit execution parameter with the best executable degree to obtain a second working gradient.

[0119] Specifically, according to the pre-trained fixed template, a multi-layer gradient step-by-step descent simulation is performed on the first simulation unit. The template contains common parameters and state change patterns during the operation of the light source unit. The step-by-step descent simulation simulates the process of the light source unit gradually decreasing from a high power state to a low power state, and analyzes the performance changes at different working points. Through this simulation process, the simulated descent gradient of the first simulation unit is obtained. This gradient represents the change process of the light source unit from high workload to low workload, involving the gradual changes of multiple parameters such as power, wavelength, and intensity.

[0120] More specifically, the simulated downward gradient of the first simulation unit is reversely converted to obtain the corresponding simulated upward gradient. The reverse conversion means the process of gradually increasing the light source unit from a low-power state back to a high-power state. This step can help simulate the transition behavior from "low power" to "high power", including adjusting power, increasing workload, etc. The simulated upward gradient reflects the changing characteristics of the light source unit in the process of increasing workload.

[0121] More specifically, based on the working characteristics and actual performance requirements of the second simulation unit, the execution parameter analysis of the simulated rising gradient is performed. Through this analysis, the specific execution parameters of the second simulation unit when responding to the simulated rising gradient are obtained, such as power, time, conversion rate, etc. These execution parameters indicate how the second simulation unit adjusts under the action of the simulated rising gradient, and ensure the stability and efficiency of the light source unit during the actual conversion process.

[0122] More specifically, a multi-dimensional executable analysis is performed on the simulated descent gradient of the first simulation unit. This analysis involves whether the simulated descent gradient can maintain the stability and functionality of the light source unit during actual execution. For example, factors such as temperature changes, power fluctuations, and load changes during the transition process are considered to evaluate the feasibility of the gradient in actual applications. Similarly, a multi-dimensional executable analysis is performed on the unit execution parameters of the second simulation unit. This involves analyzing whether the execution parameters under the simulated ascending gradient can be accurately executed in actual work, and whether problems such as instability, over-adjustment, or equipment damage will occur during execution.

[0123] More specifically, according to the executable degree of the simulated descent gradient of the first simulation unit and the executable degree of the unit execution parameters of the second simulation unit, feedback adjustment is performed under bidirectional constraints, that is, to ensure the mutual adaptation and adjustment of the simulated descent gradient and the unit execution parameters in actual applications, so that both can work under the best executable degree. In each round of feedback adjustment, the simulated descent gradient and the unit execution parameters are carefully adjusted until the optimal executable degree is achieved. The adjustment process may involve power control, wavelength adjustment, workload balancing, etc., and multiple rounds of iterations are performed through feedback adjustment to gradually optimize the gradient and parameters until the optimal execution parameters and the optimal working gradient are obtained. This feedback adjustment mechanism ensures that the light source unit can always maintain the best performance state under different working conditions.

[0124] More specifically, after multiple rounds of feedback adjustment, the optimal simulated descent gradient is finally obtained, which is the first working gradient. This gradient represents the optimal transition mode when the light source unit gradually decreases from high load to low load, ensuring the stability and efficiency of the conversion process, and further converting the optimal unit execution parameters (simulated ascending gradient) into a gradient to obtain the second working gradient. The second working gradient reflects the optimal transition scheme when the light source unit recovers from a low load state to a high load state.

[0125] It can be understood that by simulating the gradual optimization of the descending gradient and the ascending gradient, the switching process of the light source unit is made smoother, avoiding equipment damage or performance fluctuations caused by power mutation or transition instability. In the feedback adjustment process, it is ensured that each light source unit can achieve optimal power utilization and working efficiency under different load conditions, thereby improving the energy efficiency and system reliability of the overall light source module. This method can help the system adapt to different working environments and load requirements, and ensure that the system can maintain optimal performance under changing conditions by optimizing gradients and execution parameters in real time.

[0126] Preferably, according to the light source switching scheme, the light source unit specified in the detection light source module is switched to the handover mode, and the light source unit in the working mode is switched to the transfer mode, so that the light source unit in the transfer mode and the light source unit in the handover mode perform a gradual conversion of the illumination work, thereby realizing the multi-light source compatible regulation of the detection light source module, the steps include:

[0127] S61: analyzing the light source switching scheme to obtain a first working gradient and a second working gradient of the light source switching scheme;

[0128] S62: generating a gradient execution instruction for each light source unit in the working mode according to the first working gradient, so as to obtain a gradient execution instruction for each light source unit in the working mode;

[0129] S63: generating a gradient execution instruction for the designated light source unit according to the second working gradient, so as to obtain a gradient execution instruction for each light source unit corresponding to the second working gradient;

[0130] S64: According to the gradient execution instructions of each light source unit in the working mode and the gradient execution instructions of each light source unit corresponding to the second working gradient, instructions are sent to each light source unit in turn, so that each light source unit performs a gradual conversion of gradient lighting work, thereby realizing multi-light source compatible control of the detection light source module.

[0131] Specifically, an in-depth analysis is conducted on the light source switching scheme to determine the various working requirements and parameters of the light source unit during the switching process, including obtaining the first working gradient and the second working gradient in the scheme, which respectively represent the optimal working curves when the light source unit transitions from the current working state to the handover mode and the transfer mode. The first working gradient describes the transition behavior of the light source unit from the working mode to the handover mode, and the second working gradient describes the transition behavior of the light source unit from the working mode to the transfer mode.

[0132] More specifically, according to the first working gradient, gradient execution instructions are generated for each light source unit in the working mode, and these instructions define how each light source unit adjusts its illumination parameters according to the change of the gradient to achieve a smooth transition, and according to the second working gradient, gradient execution instructions are generated for the specified light source units. These light source units need to switch to the transfer mode in a gradual transition, so their execution instructions include how to gradually change their working parameters so that they can transition to the light source units in the handover mode in a stable manner.

[0133] More specifically, according to the gradient execution instructions of each light source unit, corresponding control signals are sent to all the light source units in turn, and each light source unit will adjust its lighting working mode according to the received instructions, so that different light source units can gradually complete the gradual transition from the working mode to the transfer mode or the handover mode. In this process, each light source unit executes instructions according to the specified gradient, and gradually changes its lighting output to avoid sudden changes and system instability. Through the instruction sending mechanism, it is ensured that the light source units in the handover mode and the transfer mode can work together, thereby achieving a smooth transition.

[0134] More specifically, after receiving the instruction, each light source unit gradually adjusts its working state according to the set gradient. The light source unit in the working mode gradually enters the handover mode according to the first working gradient; the designated light source unit gradually transitions to the transfer mode according to the second working gradient. During this process, the light source unit in the handover mode and the light source unit in the transfer mode cooperate in lighting work and gradually merge into a unified lighting effect.

[0135] More specifically, by gradually adjusting the light output of each light source unit, it is ensured that the light intensity, wavelength, stability and other parameters of different light source units can match each other, so as to achieve compatible regulation between different light source units in the system. Ultimately, multiple light source units can work together in a smooth and seamless manner, ensuring that the detection light source module can maintain optimal performance in various working modes.

[0136] It is understandable that, through the gradual adjustment of the gradient execution instruction, each light source unit can smoothly transition from the working mode to the handover mode or transfer mode, avoiding sudden parameter changes, thereby avoiding system instability and performance fluctuations. Through multi-light source compatible regulation, different light source units can work together in different working states, enhancing the flexibility and adaptability of the system, and being able to cope with different working environments and task requirements. The system can flexibly adjust the working mode and light output of each light source unit as needed to ensure the best lighting effect. The use of gradual conversion and gradient adjustment can finely control the working state of each light source unit, thereby improving the overall accuracy and stability of the system. The working state change of each light source unit is gradual and controllable, avoiding unnecessary fluctuations and instability. Gradual conversion can not only improve the stability of the system, but also optimize energy efficiency by avoiding rapid load changes and excessive work, and extend the service life of the light source unit and the system. Gradually adjusting the light intensity and working state can reduce excessive loss of the light source unit and improve energy efficiency.

[0137] Reference Figure 2 As shown, in a second aspect, the present invention provides a multi-light source compatible control system for semiconductor detection, which is used to implement a multi-light source compatible control method for semiconductor detection as described in any one of the first aspects, including:

[0138] A data acquisition module, used to obtain the execution requirement characteristics of the semiconductor detection task and the module performance parameters of the detection light source module prepared to perform the semiconductor detection task; wherein the detection light source module has a plurality of light source units;

[0139] A parameter configuration module, used for performing task analysis processing on the execution requirement characteristics according to the module performance parameters, so as to obtain a light source parameter configuration scheme of the detection light source module corresponding to the semiconductor detection task;

[0140] A light source irradiation module, used to configure the module parameters of the detection light source module according to the light source parameter configuration scheme, so as to schedule the light source unit specified in the detection light source module to switch to the working mode, so as to perform light source irradiation on the semiconductor to be detected corresponding to the semiconductor detection task;

[0141] A quality monitoring module, used for continuously collecting and analyzing the working parameters of the detection light source module to obtain the light source quality characteristics of the light source unit in the detection light source module that is in working mode;

[0142] A switching analysis module, used to judge the light source quality characteristics according to a preset standard, and when the judgment result shows that the light source quality characteristics meet the preset standard, analyze the progressive conversion scheme of the illumination work execution unit of the detection light source module according to the light source parameter configuration scheme and the module performance parameters to obtain the light source switching scheme of the detection light source module;

[0143] A compatible control module is used to switch the light source unit specified in the detection light source module to the handover mode according to the light source switching scheme, and switch the light source unit in the working mode to the transfer mode, so that the light source unit in the transfer mode and the light source unit in the handover mode can perform a gradual conversion of the lighting work, thereby realizing multi-light source compatible control of the detection light source module.

[0144] In this embodiment, for the specific implementation of each module in the above system embodiment, please refer to the above method embodiment, which will not be repeated here.

[0145] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for controlling multiple light sources compatible with semiconductor detection, characterized in that: include: Acquire the execution requirement characteristics of the semiconductor detection task and the module performance parameters of the detection light source module prepared to execute the semiconductor detection task; wherein the detection light source module has a plurality of light source units; Performing task analysis processing on the execution requirement characteristics according to the module performance parameters to obtain a light source parameter configuration scheme of the detection light source module corresponding to the semiconductor detection task; The detection light source module is configured with module parameters according to the light source parameter configuration scheme, so as to schedule the light source unit specified in the detection light source module to switch to the working mode, so as to perform light source irradiation on the semiconductor to be detected corresponding to the semiconductor detection task; Continuously collecting and analyzing the working parameters of the detection light source module to obtain the light source quality characteristics of the light source unit in the detection light source module that is in the working mode; The light source quality feature is judged according to a preset standard, and when the judgment result shows that the light source quality feature reaches the preset standard, a progressive conversion scheme of the illumination work execution unit of the detection light source module is analyzed according to the light source parameter configuration scheme and the module performance parameters to obtain a light source switching scheme of the detection light source module; According to the light source switching scheme, the designated light source unit in the detection light source module is switched to the handover mode, and the light source unit in the working mode is switched to the transfer mode, so that the light source unit in the transfer mode and the light source unit in the handover mode perform a gradual conversion of lighting work, thereby realizing multi-light source compatible regulation of the detection light source module.

2. A method for controlling multiple light sources compatible with semiconductor detection according to claim 1, characterized in that: The steps of obtaining the execution requirement characteristics of the semiconductor detection task and the module performance parameters of the detection light source module prepared to execute the semiconductor detection task include: Performing information analysis on the semiconductor detection task to obtain model information and detection standards of the semiconductor to be detected corresponding to the semiconductor detection task; According to the model information of the semiconductor to be detected, the corresponding semiconductor performance parameters are retrieved from the database, and the semiconductor performance parameters are analyzed and processed according to the detection requirements according to the detection standard to obtain the execution requirement characteristics of the semiconductor detection task; wherein the execution requirement characteristics include light source wavelength characteristics, light intensity characteristics, illumination mode characteristics, illumination uniformity characteristics, and light source fluctuation tolerance characteristics; The specifications and models of the detection light source module prepared to perform the semiconductor detection task are collected to obtain the standard performance parameters of the detection light source module, and the light source units of the detection light source module are trial-activated to obtain the setting status characteristics of each light source unit of the detection light source module. The standard performance parameters are adjusted according to the setting status characteristics to feedback the actual conditions to obtain the module performance parameters of the detection light source.

3. The method for controlling multiple light sources compatible with semiconductor detection according to claim 1, characterized in that: The step of performing task analysis processing on the execution requirement characteristics according to the module performance parameters to obtain a light source parameter configuration scheme of the detection light source module corresponding to the semiconductor detection task includes: Digitally simulating each light source unit of the detection light source module according to the module performance parameters to obtain a basic task unit for performing digital simulation feedback on each light source unit; Experimentally assigning unit parameters to each of the basic task units, and performing algorithmic deduction of task execution effects on each of the basic task units assigned with unit parameters, so as to obtain corresponding execution effect characteristics; Performing experimental allocation supervision on the execution effect characteristics according to the execution requirement characteristics, and performing feedback correction on the unit parameters of each of the basic task units according to the supervision results, and performing feedback correction and algorithm deduction in a cycle until the execution effect characteristics that meet the execution requirement characteristics are obtained; The unit parameters of each of the basic task units whose execution effect characteristics meet the execution requirement characteristics are collectively used as the light source parameter configuration scheme.

4. A method for controlling multiple light sources compatible with semiconductor detection as claimed in claim 3, characterized in that: The steps of configuring the module parameters of the detection light source module according to the light source parameter configuration scheme to schedule the light source unit specified in the detection light source module to switch to the working mode to perform light source irradiation on the semiconductor to be detected corresponding to the semiconductor detection task include: The light source parameter configuration scheme is parsed to convert the unit parameters of each of the basic task units in the light source parameter configuration scheme into working instructions of each of the light source units; wherein the unit parameters are used to describe whether the light source unit is in working mode and the specific working mode of the light source unit in working mode, and the working instructions include start instructions and configuration instructions; The start-up instruction is sent to the corresponding light source unit so that the light source unit switches to the working mode, and the configuration instruction is sent to the light source unit in the working mode so that the light source unit in the working mode irradiates the semiconductor to be detected according to the unit parameters in the light source parameter configuration scheme.

5. The method for controlling multiple light sources compatible with semiconductor detection according to claim 1, characterized in that: The step of continuously collecting and analyzing the working parameters of the detection light source module to obtain the light source quality characteristics of the light source unit in the detection light source module in the working mode includes: Continuously collecting temperature data of the light source unit of the detection light source module in the working mode to obtain a time-series temperature characteristic of the light source unit in the working mode; Acquire detection data of the semiconductor to be detected receiving the light source of the detection light source module, and perform characteristic analysis of detection accuracy on the detection data to obtain working quality characteristics of the light source unit in working mode; The timing temperature characteristics and the working quality characteristics are combined to obtain the light source quality characteristics of the light source unit; wherein the timing temperature characteristics and the working quality characteristics respectively have corresponding numerical conversion standards, and the numerical conversion standards are used to perform numerical conversion on the timing temperature characteristics and the working quality characteristics to obtain corresponding first judgment values ​​and second judgment values, and when the first judgment value or the second judgment value meets the preset standard, a judgment result is generated that the light source quality characteristics meet the preset standard.

6. The method for controlling multiple light sources compatible with semiconductor detection according to claim 1, characterized in that: The step of analyzing the progressive conversion scheme of the illumination work execution unit of the detection light source module according to the light source parameter configuration scheme and the module performance parameters to obtain the light source switching scheme of the detection light source module includes: Digitally simulating each light source unit of the detection light source module according to the module performance parameters to obtain a basic task unit for performing digital simulation feedback on each light source unit; Performing unit status marking on each of the basic task units according to the light source parameter configuration scheme to obtain a unit marking for describing whether the light source unit corresponding to each of the basic task units is in a working mode and a specific working mode in the working mode; Converting each of the basic task units according to the unit label to obtain a first analog unit for performing digital feedback on the light source unit in the working mode and a second analog unit for performing digital feedback on the light source unit not in the working mode; Performing a progressive conversion scheme analysis on the first analog unit and the second analog unit to obtain a first working gradient of the first analog unit and a second working gradient of the second analog unit; The first working gradient and the second working gradient together constitute a light source switching scheme of the detection light source module.

7. A method for controlling multiple light sources compatible with semiconductor detection as claimed in claim 6, characterized in that: The step of performing a gradual conversion scheme analysis on the first analog unit and the second analog unit to obtain a first working gradient of the first analog unit and a second working gradient of the second analog unit comprises: Performing a step-by-step descent simulation of multi-layer gradients on the first simulation unit according to a pre-trained fixed template to obtain a simulated descent gradient of the first simulation unit; Performing a reverse conversion process on the simulated descent gradient of the first simulation unit to obtain a simulated ascending gradient corresponding to the simulated descent gradient; performing an execution parameter analysis on the simulated ascending gradient according to the second simulation unit to obtain a unit execution parameter of the second simulation unit corresponding to the simulated ascending gradient; Performing a multi-dimensional analysis of the executableness of the simulated descent gradient according to the first simulation unit, and performing a multi-dimensional analysis of the executableness of the unit execution parameter according to the second simulation unit to obtain the executableness of the simulated descent gradient and the executableness of the unit execution parameter; According to the executable degree of the simulated descent gradient and the executable degree of the unit execution parameter, feedback adjustment is performed on the simulated descent gradient and the unit execution parameter under bidirectional constraints to obtain adjusted simulated descent gradient and unit execution parameter, and feedback adjustment of the simulated descent gradient and unit execution parameter is performed cyclically until the simulated descent gradient and unit execution parameter with optimal executable degree are obtained; Using the simulated descent gradient with the best executability as the first working gradient; A gradient conversion is performed on the unit execution parameter with the best executable degree to obtain a second working gradient.

8. The method for controlling multiple light sources compatible with semiconductor detection according to claim 6, characterized in that: The steps of switching the designated light source unit in the detection light source module to the handover mode according to the light source switching scheme, and switching the light source unit in the working mode to the transfer mode, so that the light source unit in the transfer mode and the light source unit in the handover mode perform a gradual conversion of the illumination work, thereby realizing the multi-light source compatible regulation of the detection light source module include: Analyzing the light source switching scheme to obtain a first working gradient and a second working gradient of the light source switching scheme; Generating a gradient execution instruction for each light source unit in the working mode according to the first working gradient, so as to obtain a gradient execution instruction for each light source unit in the working mode; generating a gradient execution instruction for the designated light source unit according to the second working gradient, so as to obtain a gradient execution instruction for each light source unit corresponding to the second working gradient; According to the gradient execution instructions of each light source unit in the working mode and the gradient execution instructions of each light source unit corresponding to the second working gradient, instructions are sent to each light source unit in turn, so that each light source unit performs a gradual conversion of gradient lighting work, thereby realizing multi-light source compatible control of the detection light source module.

9. A multi-light source compatible control system for semiconductor detection, characterized in that: A method for implementing a multi-light source compatible control method for semiconductor detection according to any one of claims 1 to 8, comprising: A data acquisition module, used to obtain the execution requirement characteristics of the semiconductor detection task and the module performance parameters of the detection light source module prepared to perform the semiconductor detection task; wherein the detection light source module has a plurality of light source units; A parameter configuration module, used for performing task analysis processing on the execution requirement characteristics according to the module performance parameters, so as to obtain a light source parameter configuration scheme of the detection light source module corresponding to the semiconductor detection task; A light source irradiation module, used to configure the module parameters of the detection light source module according to the light source parameter configuration scheme, so as to schedule the light source unit specified in the detection light source module to switch to the working mode, so as to perform light source irradiation on the semiconductor to be detected corresponding to the semiconductor detection task; A quality monitoring module, used for continuously collecting and analyzing the working parameters of the detection light source module to obtain the light source quality characteristics of the light source unit in the detection light source module that is in working mode; A switching analysis module, used to judge the light source quality characteristics according to a preset standard, and when the judgment result shows that the light source quality characteristics meet the preset standard, analyze the progressive conversion scheme of the illumination work execution unit of the detection light source module according to the light source parameter configuration scheme and the module performance parameters to obtain the light source switching scheme of the detection light source module; A compatible control module is used to switch the light source unit specified in the detection light source module to the handover mode according to the light source switching scheme, and switch the light source unit in the working mode to the transfer mode, so that the light source unit in the transfer mode and the light source unit in the handover mode can perform a gradual conversion of the lighting work, thereby realizing multi-light source compatible control of the detection light source module.

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