Small circular planar target using cavity wall as anode cover and having simplified structure

By setting an annular cooling groove in the magnetic track seat of a small circular planar target to form a water-cooled channel, the problems of high magnetic energy consumption and cooling water erosion in the prior art are solved, and more efficient cooling and lower energy consumption are achieved.

CN119710603AActive Publication Date: 2025-03-28HUASHENGSHENG NANOTECHNOLOGY (CHENGDU) CO LTD
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Patent Information

Application Number
CN202510240169.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-03
Publication Date
2025-03-28
Estimated Expiration
2045-03-03

AI Technical Summary

Technical Problem

In the prior art, most planar targets are cooled by the method of directly immersing ring magnets and central column magnets in cooling water, which leads to accelerated magnetic energy consumption and may cause problems of mutual erosion and pollution of cooling water and magnets.

Method used

A small circular planar target with a cavity as anode cover and a streamlined structure is designed. By setting an annular cooling groove in the magnetic track seat, a water-cooling channel is formed to cool the central column magnet and the ring magnet to avoid direct contact with the cooling water.

Benefits of technology

It effectively reduces magnetic energy consumption, avoids mutual erosion and pollution between cooling water and magnets, and improves coating quality and equipment reliability.

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Abstract

The invention relates to the technical field of magnetron sputtering coating, in particular to a small circular plane target with a cavity wall as an anode cover and a simplified structure, which comprises a coating machine body, a vacuum cavity arranged in the coating machine body, a mounting hole arranged on the cavity wall of the vacuum cavity and penetrating through the inside and the outside, and a mounting flange, the mounting flange is mounted at the position of the mounting hole on the outer surface of the coating machine body, a magnetic track seat is mounted on one side, facing the mounting hole, of the mounting flange, a central column magnet is arranged in the center of the magnetic track seat, a ring magnet is arranged on the magnetic track seat around the central column magnet, and an annular cooling groove is formed in the magnetic track seat between the central column magnet and the ring magnet; a water inlet and a water outlet which are communicated with the annular cooling groove are formed in the side, away from the mounting hole, of the mounting flange, and a target is mounted on the side, away from the mounting flange, of the magnetic track seat. The problem that magnetic energy consumption is accelerated due to the fact that most plane targets adopt a mode that ring magnets and central column magnets can be directly soaked in cooling water for cooling at present is solved.
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