Optical device, exposure device, and exposure method
By using parallel flat panels in the optical device to achieve optical path offset and correct the linkage shift of optical elements, the problems of astigmatism increase and complex optical path design in the prior art are solved, and miniaturized and efficient optical path adjustment is achieved.
CN119731598APending Publication Date: 2025-03-28SCREEN HOLDINGS CO LTD
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Patent Information
- Application Number
- CN202380060708.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2022-09-16
- Filing Date
- 2023-05-22
- Publication Date
- 2025-03-28
AI Technical Summary
Technical Problem
In the prior art, when adjusting the optical path offset, it is difficult to suppress the increase in astigmatism difference, and the optical path design is complex. Especially in a reduced projection system, miniaturization of the optical device is difficult to achieve.
Method used
A parallel flat panel is used as the offset optical element, and the optical path is offset through its rotation, and a correction optical element is arranged on the optical path, and the coordinated displacement is carried out to correct astigmatism.
Benefits of technology
A simple and compact structure in which the offset amount is adjusted while suppressing the increase in astigmatism is achieved, reducing the complexity of the optical system and promoting the miniaturization of the device.
✦ Generated by Eureka AI based on patent content.
Abstract
The present invention relates to an optical device for shifting the path of light, an exposure device using the same, and an exposure method, and aims to adjust the amount of shift while suppressing an increase in astigmatism while having a simple and compact structure. An optical device shifts an optical path of input light in a shift direction orthogonal to an incident direction of the input light. The optical device is provided with: a shifting optical element (111) which is a parallel flat plate that causes input light to be incident on one surface of mutually parallel surfaces and causes output light to be emitted from the other surface; a correction optical element (113) that is disposed on the optical path of the input light or the optical path of the output light and corrects astigmatism differences occurring in the output light; and a drive unit (114) that changes the amount of shift by rotating the shift optical element (111), and displaces the correction optical element (113) in conjunction with the shift optical element (111).
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