A method for preparing an aluminum nitride electrostatic chuck
Through the combination of casting process and high-temperature sintering, the problem of poor uniformity of aluminum nitride electrostatic chuck ceramic discs is solved, and a more uniform and high-quality preparation process is achieved.
CN119751080APending Publication Date: 2025-04-04JUNYUAN ELECTRONIC TECHNOLOGY (HAINING) CO LTD
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Patent Information
- Application Number
- CN202411638554.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-17
- Publication Date
- 2025-04-04
AI Technical Summary
Technical Problem
The ceramic discs of the existing aluminum nitride electrostatic chucks are molded by powder pressing, and there is a problem of poor uniformity.
Method used
The casting process is used to make a single casting sheet of aluminum nitride powder, and the casting block is formed after vacuum hot pressing and cold isostatic pressing, and then processed into a base, top and middle structure to perform glue discharge and high-temperature sintering.
Benefits of technology
Through the combination of casting process and high-temperature sintering, the problem of poor uniformity of electrostatic chuck ceramic discs is solved, and the uniformity and quality of the preparation process are improved.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention discloses a preparation method of an aluminum nitride electrostatic chuck, which belongs to the technical field of electrostatic chucks, and comprises the following steps: S1: uniformly mixing aluminum nitride powder, a sintering aid, a binder and a solvent to form an alumina ceramic slurry, and after degassing, forming a plurality of single-piece cast sheets through a tape casting process; S2: laminating according to the design, using a vacuum hot press to press the single-piece cast sheets into a whole, pressing them into cast blocks, and then using cold isostatic pressing to press each cast block; S3: processing the cast blocks into a base structure, a middle structure and a top structure, wherein the middle structure is arranged between the base structure and the top structure for cooperation, and using CNC to process a molybdenum mesh groove for fixing a molybdenum mesh and an electrode groove for fixing a heating electrode; S4: debinding the blocks at a temperature of 500°C and in an N2 atmosphere, placing a heating wire and a molybdenum mesh after debinding, and performing hot pressing sintering after assembly, and preparing the electrostatic chuck ceramic after sintering.
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