Wafer transmission equipment with movable wafer box loading station
By designing movable wafer transmission equipment, using the combination of horizontal and lifting platforms, the flexible movement of the carrier platform is achieved, and the cost increase caused by the idle space of existing wafer reversers is solved, and efficient space utilization and cost savings are achieved.
CN119764232APending Publication Date: 2025-04-04BEIJING JINGYI AUTOMATION EQUIP CO LTD
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Patent Information
- Application Number
- CN202411993991.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2025-04-04
AI Technical Summary
Technical Problem
Since the depth of the host machine is much larger than the depth of the equipment, the rear space is idle, which increases the overall cost of users.
Method used
A wafer transmission device with a movable wafer box loading station is designed. Through the combination of a horizontal platform and a lifting platform, the horizontal and vertical movement of the carrier platform is realized, making full use of the depth space of the host machine platform.
Benefits of technology
It effectively utilizes the deep space of the host machine, saves the floor area of the factory line, and reduces the overall cost of users.
✦ Generated by Eureka AI based on patent content.
Abstract
A wafer transmission device with a movable wafer box loading station comprises a horizontal platform used for being arranged on at least one side of a main machine table, the horizontal platform is oppositely arranged in the vertical direction, and a first guide rail is further arranged on the horizontal platform; the lifting platforms are located at the two ends of the two oppositely-arranged horizontal platforms, second guide rails and third guide rails are arranged on the lifting platforms, the lifting platforms move in the vertical direction, and after each lifting platform moves upwards or downwards, the first guide rails are flush with the corresponding second guide rails, and end-to-end connection is achieved; and after the bearing platform slides on the first guide rail by a second set stroke, one lifting platform moves towards the corresponding direction by a first set stroke. The lifting platform is arranged, so that the bearing platform can move horizontally or vertically according to a path, upper and lower two-layer rail switching is realized, the loading and unloading of the wafer box by the transshipment port are not influenced, and the space of the main machine table in the length direction is fully utilized.
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