Load sensor and method for manufacturing load sensor

By applying preload on the piezoelectric oscillator by using the elastic deformation of the upper case in the load sensor, combined with the design of the buffer member, the problems of excessive application of preload and difficulty in thinning the device in the prior art are solved, and high precision, stability and thinning the load sensor are achieved.

CN119768670APending Publication Date: 2025-04-04MURATA MFG CO LTD
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Patent Information

Application Number
CN202380061990.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2022-09-29
Filing Date
2023-08-28
Publication Date
2025-04-04

AI Technical Summary

Technical Problem

The existing load sensor applies preload through the tightening of threaded components, which can easily lead to damage to the quartz vibration element or poor detection in long-term measurements, and the device is difficult to cope with thinner requirements.

Method used

Using a piezoelectric vibrator between the upper case and the lower case, a preload is applied in the thickness direction by elastic deformation of the upper case, and a buffer member is combined to suppress the rupture caused by the load.

Benefits of technology

The load sensor is thinner, long-term changes are suppressed, detection accuracy is improved, and component damage caused by excessive preload is avoided.

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Abstract

A load sensor (1) for detecting a load in a thickness direction is provided with: an upper case (30) having an upper surface section (31) and a side surface section (32) extending in the thickness direction from the outer circumference of the upper surface section (31); a lower case (20) having a lower surface portion (21) facing the upper surface portion (31) in the thickness direction and having a property of being less susceptible to elastic deformation than the upper case (30); a piezoelectric vibrator (10) is housed in a space between an upper case (30) and a lower case (20), and has a piezoelectric substrate (13) provided between an upper surface portion (31) and a lower surface portion (21), and a pair of excitation electrodes provided on main surfaces facing each other in the piezoelectric substrate (13), the pair of excitation electrodes extending in the thickness direction. One of an end (35) of the upper case (30) and an end (25) of the lower case (20) is crimped and fixed to the other, and the upper case (30) applies a preload in the thickness direction to the piezoelectric vibrator (10) by elastic deformation of the upper case (30) caused by the crimped fixing.
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