Sensitivity-adjustable modal localization induction type electric field sensor and electric field detection method

Abstract

The invention provides a sensitivity-adjustable modal localization induction type electric field sensor and an electric field detection method, which can be applied to the technical field of electric field sensors. The modal localization induction type electric field sensor comprises a substrate used for supporting a resonator array unit, an electrode unit and a rigidity adjusting electrode unit; the resonator array unit is arranged above the center of the substrate and used for driving resonators to vibrate, and the resonator array unit comprises the resonators and comb tooth structures connected with the resonators; the electrode units and the comb tooth structures connected with the resonators are arranged in a staggered mode, and the electrode units are used for responding to vibration of the resonators to generate output signals; the rigidity adjusting electrode units are arranged on the two sides of the resonator array unit and used for adjusting the rigidity difference and the common modulus error of the resonators so that the resonators can meet modal localization, and the sensitivity of the modal localization induction type electric field sensor with the adjustable sensitivity can be adjusted.

Description

Technical Field

[0001] The present disclosure relates to the technical field of electric field sensors, and more specifically to a modal localized inductive electric field sensor with adjustable sensitivity and an electric field detection method. Background Art

[0002] Electric field sensors are widely used in many fields, such as aerospace, meteorology, electricity, industrial production and other fields. At present, various types of electric field sensors developed based on micro-electromechanical systems (MEMS) have the characteristics of small size, light weight and low cost, and therefore have become an important development direction in the field of electric field detection. However, the common charge-sensing electric field sensors currently have limited sensitivity and cannot be adjusted, which cannot meet the increasing demand for large dynamic range and high sensitivity electric field detection. With the improvement of the theory of modal localization, electric field sensors based on the modal localization principle have attracted more and more attention due to their high sensitivity. However, the existing modal localization electric field sensors have the defect of nonlinear sensitivity, which limits their measurement range.

[0003] In the process of realizing the above-mentioned inventive concept, the inventors found that: in the related technology, due to the introduction of common mode error in the process of preparing electric field sensors due to imperfect preparation process, a large amount of environmental noise exists in the process of electric field sensors detecting the electric field to be measured, and the measurement results output by the existing modally localized electric field sensors have the defect of nonlinearity, and there is a technical problem that the test sensitivity of the electric field sensor cannot be adjusted. Summary of the invention

[0004] In view of the above problems, the present disclosure provides a modal localized inductive electric field sensor with adjustable sensitivity and an electric field detection method.

[0005] According to the first aspect of the present disclosure, there is provided a modal localized electric field sensor with adjustable sensitivity, comprising: a substrate for supporting a resonator array unit, an electrode unit and a stiffness adjustment electrode unit, wherein an anchor point is arranged on the surface of the substrate; a resonator array unit, arranged above the center of the substrate, and used to drive the resonator to vibrate, wherein the resonator array unit comprises a resonator and a comb-tooth structure connected to the resonator; an electrode unit, wherein the electrode unit and the comb-tooth structure connected to the resonator are arranged in an alternating manner, and are used to generate an output signal in response to the vibration of the resonator; and a stiffness adjustment electrode unit, arranged on both sides of the resonator array unit, and are used to adjust the stiffness difference and common mode error of the resonator, so as to make the resonator satisfy the modal localization, and adjust the sensitivity of the modal localized inductive electric field sensor with adjustable sensitivity.

[0006] According to an embodiment of the present disclosure, a comb tooth structure connected to the resonator includes a first comb tooth structure and a second comb tooth structure, and the electrode unit includes an electric field sensing electrode unit and a reference output electrode unit; the first comb tooth structure is arranged on one side of the electric field sensing electrode unit, and is differentially staggered with the electric field sensing electrode unit, and is used to generate and output a sensing signal in response to the vibration of the resonator according to the charge induction principle; the second comb tooth structure is arranged on one side of the reference output electrode unit, and is staggered with the reference output electrode unit, and is used to change the capacitance between the reference electrode and the second comb tooth structure in response to the vibration of the resonator, and generate and output a reference signal according to the capacitance change.

[0007] According to an embodiment of the present disclosure, the resonator array unit includes at least two resonators, and the resonator array unit also includes: a driving structure, arranged on both sides of the resonator, for driving the resonator to generate vibration; a coupling structure, arranged between multiple resonators, for coupling multiple resonators to form weak coupling between the multiple resonators; a support beam, arranged on both sides of the driving structure, for connecting the resonator array unit and the substrate, wherein the support beam is one of a straight beam, a folded beam, a curved beam, or a combination thereof.

[0008] According to an embodiment of the present disclosure, the tuning electrode units are arranged on both sides of the resonator to eliminate the common mode error of the resonator array so that the resonator array satisfies the modal localization.

[0009] According to an embodiment of the present disclosure, the driving method of the driving structure includes at least one of the following: electrostatic comb drive, electrostatic plate drive, piezoelectric drive, magnetic drive, and thermal drive.

[0010] According to an embodiment of the present disclosure, the coupling structure includes one of the following: an electrostatic coupling structure, a mechanical coupling structure, and a mechanical-electrostatic hybrid coupling structure.

[0011] The second aspect of the present disclosure provides an electric field detection method, including: applying a driving voltage excitation to a driving electrode driving structure, based on the modal localization principle, a first comb tooth structure and a second comb tooth structure generate an amplitude with a constant amplitude ratio to facilitate the vibration of a resonator; adjusting the voltage of a stiffness adjustment electrode unit to change the amplitude ratio of the resonator to obtain a resonator with a predetermined sensitivity; in response to the vibration of the first comb tooth structure of the resonator, based on the modal localization principle and the charge induction principle, an electric field induction electrode unit outputs an induction signal; in response to the vibration of the second comb tooth structure, based on the modal localization principle, according to the capacitance change between the reference electrode and the resonator, a reference output electrode unit outputs a reference signal; according to the large amplitude ratio characteristic of the modal localization, the electric field strength of the electric field to be measured is obtained by comparing the induction signal and the reference signal.

[0012] According to an embodiment of the present disclosure, a modal localization inductive electric field sensor with adjustable sensitivity includes two stiffness adjustment electrode units, wherein the first stiffness adjustment electrode unit is located on the inner side or the outer side of the resonator array unit on one side of the electric field sensing electrode unit, and the second stiffness adjustment electrode unit is located on the inner side or the outer side of the resonator array unit on one side of the reference output electrode unit; the voltage of the stiffness adjustment electrode unit is adjusted to change the amplitude ratio of the resonator to obtain the resonator with a predetermined sensitivity, including: applying a first adjustment voltage to the first stiffness adjustment electrode unit and applying a second adjustment voltage to the second stiffness adjustment electrode unit to eliminate the stiffness error caused by the manufacturing error to obtain a plurality of resonators that meet the modal localization, wherein the first adjustment voltage and the second adjustment voltage are voltages of different magnitudes; applying a third adjustment voltage to the first stiffness adjustment electrode unit and applying a fourth adjustment voltage to the second stiffness adjustment electrode unit to adjust the sensitivity of the modal localization electric field sensor with adjustable sensitivity to obtain a modal localization inductive electric field sensor that meets the preset accuracy, wherein the third adjustment voltage and the fourth adjustment voltage are voltages of different magnitudes.

[0013] A third aspect of the present disclosure provides an electric field sensor, comprising: a modal localized electric field sensor with adjustable sensitivity according to any one of claims 1 to 8.

[0014] According to an embodiment of the present disclosure, the electric field sensor also includes a two-dimensional or three-dimensional electric field sensor composed of a plurality of modally localized electric field sensors with adjustable sensitivity, which is used to measure a two-dimensional or three-dimensional electric field or voltage.

[0015] According to the modal localized inductive electric field sensor with adjustable sensitivity and the electric field detection method disclosed in the present invention, the modal localized inductive electric field sensor with adjustable sensitivity includes a substrate, a resonator array unit, an electrode unit and a stiffness adjustment electrode unit, the resonator array unit is arranged above the center of the substrate, the electrode unit and the comb-tooth structure in the resonator array unit are arranged in an staggered manner, and the stiffness adjustment electrode unit is arranged on both sides of the resonator array unit. By applying a driving voltage to the driving structure of the resonator array unit, the resonator in the resonator array unit and the comb structure connected to the resonator vibrate, so that the electrode unit vibrates in response to the resonator, and an output signal can be generated according to the charge induction principle and the capacitance change. At the same time, by applying an adjustment voltage to the stiffness adjustment electrode unit, the stiffness difference and common mode error between multiple resonators in the resonator array unit are adjusted, so that the resonator array unit meets the modal localization through the stiffness adjustment electrode unit, and the sensitivity of the modal localization inductive electric field sensor is adjusted. Therefore, the sensitivity of the modal localization inductive electric field sensor with adjustable sensitivity can be adjusted according to different measurement accuracy requirements, so that the detection result output by the modal localization inductive electric field sensor with adjustable sensitivity when detecting the electric field to be measured is a linear measurement result, thereby increasing the measurement range. In addition, because the common mode error of the resonator array unit caused by the resonator array unit is eliminated by the stiffness adjustment electrode unit, the environmental noise is reduced and the accuracy of the output signal is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above contents and other purposes, features and advantages of the present disclosure will become more apparent through the following description of the embodiments of the present disclosure with reference to the accompanying drawings, in which:

[0017] Figure 1 The schematic diagram of the structure of the modal localized inductive electric field sensor with adjustable sensitivity according to an embodiment of the present disclosure is shown;

[0018] Figure 2 A schematic diagram of the structure of a resonator array unit of a modal localized inductive electric field sensor with adjustable sensitivity according to an embodiment of the present disclosure is shown;

[0019] Figure 3 The schematic diagram of the structure of a modal localized inductive electric field sensor with adjustable sensitivity according to another embodiment of the present disclosure is shown;

[0020] Figure 4 The flowchart of the electric field detection method according to the embodiment of the present disclosure is schematically shown.

[0021] Reference numerals:

[0022] Substrate 101, resonator array unit 102, electric field induction electrode unit 103, reference output electrode unit 104, tuning electrode unit 105, stiffness adjustment electrode unit 106, first resonator 201, second resonator 202, third resonator 203, first comb tooth structure 204, second comb tooth structure 205, first driving structure 206, second driving structure 207, third driving structure 208, fourth driving structure 209, fifth driving structure 210, sixth driving structure 211, seventh driving structure 212, eighth driving structure 213, first coupling structure 214, second coupling structure 215, third coupling structure 216, fourth coupling structure 217, first supporting beam 218, second supporting beam 219, third supporting beam 220, fourth supporting beam 221, fourth resonator 301, fifth resonator 302. DETAILED DESCRIPTION

[0023] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present disclosure. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.

[0024] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise", "include", etc. used herein indicate the existence of the features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0025] All terms (including technical and scientific terms) used herein have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0026] When using expressions such as "at least one of A, B, and C, etc.", they should generally be interpreted according to the meaning of the expression commonly understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0027] In the technical solution of the present invention, the user information (including but not limited to user personal information, user image information, user device information, such as location information, etc.) and data (including but not limited to data used for analysis, stored data, displayed data, etc.) involved are all information and data authorized by the user or fully authorized by all parties, and the collection, storage, use, processing, transmission, provision, disclosure and application of the relevant data comply with relevant laws, regulations and standards, take necessary confidentiality measures, do not violate public order and good morals, and provide corresponding operation entrances for users to choose to authorize or refuse.

[0028] With the development of electric field detection technology, electric field detection has been applied to many fields, such as aerospace, meteorology, electricity, hazardous chemicals, industrial production, etc. Although the electric field sensor prepared by micro-electromechanical system has the advantages of small size, light weight and low cost, due to the imperfect preparation process, the common mode error will be introduced into the electric field sensor, resulting in errors in the measurement results obtained when the electric field sensor detects the electric field to be measured.

[0029] However, with the development of the science and technology industry, the demand for electric field sensors with large dynamic range and high sensitivity is increasing. During the research and development process, the researchers found that in the relevant technology, due to the imperfection of the preparation process in the preparation of electric field sensors, common mode errors are introduced, resulting in a large amount of environmental noise in the process of the electric field sensor detecting the electric field to be measured, and the measurement results output by the existing modal localized electric field sensor have the defect of nonlinearity, and the test sensitivity of the electric field sensor cannot be adjusted.

[0030] In view of this, an embodiment of the present disclosure provides a modal localization inductive electric field sensor with adjustable sensitivity, comprising: a substrate, used to support a resonator array unit, an electrode unit and a stiffness adjustment electrode unit, and an anchor point is arranged on the surface of the substrate; a resonator array unit, arranged above the center of the substrate, and used to drive the resonator to vibrate, wherein the resonator array unit includes a resonator and a comb-tooth structure connected to the resonator; an electrode unit, wherein the electrode unit and the comb-tooth structure connected to the resonator are arranged in an interlaced manner, and are used to generate an output signal in response to the vibration of the resonator; a stiffness adjustment electrode unit, arranged on both sides of the resonator array unit, and is used to adjust the stiffness difference and common mode error of the resonator, so as to make the resonator satisfy the modal localization, and adjust the sensitivity of the modal localization inductive electric field sensor with adjustable sensitivity.

[0031] The following will be passed Figure 1~Figure 3 The modal localized inductive electric field sensor with adjustable sensitivity of the disclosed embodiment is described in detail.

[0032] According to an embodiment of the present disclosure, a modal localized inductive electric field sensor with adjustable sensitivity includes a substrate, a resonator array unit, an electrode unit, and a stiffness adjustment electrode unit.

[0033] According to an embodiment of the present disclosure, a substrate is used to support a resonator array unit, an electrode unit and a stiffness adjustment electrode unit, and a surface of the substrate is provided with anchor points.

[0034] According to an embodiment of the present disclosure, a plurality of anchor points may be provided on the surface of the substrate.

[0035] According to an embodiment of the present disclosure, a resonator array unit is disposed above the center of a substrate and is used to drive the resonator to vibrate.

[0036] According to an embodiment of the present disclosure, a resonator array unit includes a resonator and a comb-tooth structure connected to the resonator.

[0037] According to an embodiment of the present disclosure, when a driving voltage is applied to a driving structure of a resonator array unit, the resonator may generate an amplitude with a predetermined amplitude ratio, thereby achieving driving the resonator to vibrate.

[0038] According to an embodiment of the present disclosure, the resonator array unit includes at least two resonators.

[0039] According to an embodiment of the present disclosure, the resonator array unit may include two resonators or three resonators.

[0040] According to an embodiment of the present disclosure, the arrangement of the resonators may include: horizontal arrangement, vertical arrangement, and arrangement in other shapes.

[0041] According to an embodiment of the present disclosure, the electrode units and the comb-tooth structure connected to the resonator are arranged in a staggered manner to generate an output signal in response to the vibration of the resonator.

[0042] According to an embodiment of the present disclosure, the electrode unit is fixedly connected to the substrate via an anchor point.

[0043] According to an embodiment of the present disclosure, when the resonator generates vibration, the comb-tooth structure connected to the resonator is driven to vibrate, so that the electrode unit can generate and output a signal.

[0044] According to an embodiment of the present disclosure, a stiffness adjustment electrode unit is provided on both sides of the resonator array unit, and is used to adjust the stiffness difference and common mode error of the resonator so as to make the resonator satisfy the modal localization and adjust the sensitivity of the modal localization inductive electric field sensor with adjustable sensitivity.

[0045] According to an embodiment of the present disclosure, the stiffness adjustment electrode unit is fixedly connected to the substrate via an anchor point.

[0046] According to an embodiment of the present disclosure, at least two stiffness adjustment electrode units are included.

[0047] According to an embodiment of the present disclosure, adjustment voltages of different magnitudes can be applied to two stiffness adjustment electrode units to cause the resonator array unit to vibrate, thereby making the stiffness of multiple resonators in the resonator array unit consistent, thereby achieving the effect of eliminating the common mode error of the resonator array unit.

[0048] According to an embodiment of the present disclosure, adjustment voltages of different magnitudes can also be applied to the two stiffness adjustment electrode units, so as to cause the resonator array unit to vibrate, thereby generating a stiffness difference between the multiple resonators in the resonator array unit, thereby achieving the effect of adjusting the sensitivity of the modal localized inductive electric field sensor.

[0049] According to an embodiment of the present disclosure, the shape of the stiffness adjustment electrode unit may include any one of the following: a cuboid, a cube, a frustum, a prism, a prism, a cylinder, a cone, and an irregular body.

[0050] According to an embodiment of the present disclosure, a modal localized inductive electric field sensor with adjustable sensitivity includes a substrate, a resonator array unit, an electrode unit and a stiffness adjustment electrode unit, the resonator array unit is arranged above the center of the substrate, the electrode unit and the comb-tooth structure in the resonator array unit are staggered, and the stiffness adjustment electrode unit is arranged on both sides of the resonator array unit. By applying a driving voltage to the driving structure of the resonator array unit, the resonator in the resonator array unit and the comb structure connected to the resonator vibrate, so that the electrode unit vibrates in response to the resonator, and an output signal can be generated according to the charge induction principle and the capacitance change. At the same time, by applying an adjustment voltage to the stiffness adjustment electrode unit, the stiffness difference and common mode error between multiple resonators in the resonator array unit are adjusted, so that the resonator array unit meets the modal localization through the stiffness adjustment electrode unit, and the sensitivity of the modal localization inductive electric field sensor is adjusted. Therefore, the sensitivity of the modal localization inductive electric field sensor with adjustable sensitivity can be adjusted according to different measurement accuracy requirements, so that the detection result output by the modal localization inductive electric field sensor with adjustable sensitivity when detecting the electric field to be measured is a linear measurement result, which further increases the measurement range. In addition, because the common mode error of the resonator array unit caused by the resonator array unit is eliminated by the stiffness adjustment electrode unit, the environmental noise is reduced and the accuracy of the output signal is improved.

[0051] According to an embodiment of the present disclosure, a resonator array unit includes at least two resonators, and the resonator array unit includes:

[0052] According to an embodiment of the present disclosure, a driving structure is disposed on both sides of the resonator, and is used to drive the resonator to vibrate when a driving voltage is applied to the driving structure.

[0053] According to an embodiment of the present disclosure, the driving structure can be arranged on both sides of each resonator, and can also be arranged on one side of each resonator. For example, when the modal localized electric field sensor with adjustable sensitivity includes two resonators, there can be four driving structures, the first driving structure is arranged on the left side of the first resonator, the second driving structure is arranged on the right side of the first resonator, the third driving structure is arranged on the left side of the second resonator, and the fourth driving structure is arranged on the right side of the second resonator; when the modal localized electric field sensor includes three resonators, there can also be four driving structures, the first driving structure is arranged on the left side of the first resonator, the second driving structure is arranged between the first resonator and the second resonator, the third driving structure is arranged between the second resonator and the third resonator, and the fourth driving structure is arranged on the right side of the third resonator.

[0054] According to an embodiment of the present disclosure, the driving method of the driving structure includes at least one of the following: electrostatic comb drive, electrostatic plate drive, piezoelectric drive, magnetic drive, and thermal drive.

[0055] According to an embodiment of the present disclosure, by applying a driving voltage to the driving structure, a plurality of resonators generate vibrations of a predetermined amplitude ratio, so that the electrode unit can output a signal in response to the vibrations of the predetermined amplitude ratio generated by the plurality of resonators. , wherein the predetermined amplitude ratio is constant, that is, the resonators generate vibrations of a constant amplitude ratio

[0056] According to an embodiment of the present disclosure, a coupling structure is disposed between a plurality of resonators and is used to couple the plurality of resonators so as to form a weak coupling between the plurality of resonators.

[0057] According to an embodiment of the present disclosure, the resonators are coupled to each other via a coupling structure, and the resonator array unit includes at least one coupling structure.

[0058] According to an embodiment of the present disclosure, the coupling structure includes one of the following: an electrostatic coupling structure, a mechanical coupling structure, and a mechanical-electrostatic hybrid coupling structure.

[0059] According to an embodiment of the present disclosure, support beams are provided on both sides of the driving structure to connect the resonator array unit and the substrate.

[0060] According to an embodiment of the present disclosure, the resonator is arranged on the substrate through a support beam, and a support beam is arranged on both sides of each resonator, and the support beam is connected to the resonator. The support beam can be on one side of the driving structure or on both sides of the driving structure. For example, in the case where the modal localized electric field sensor includes two resonators, there can be four support beams. The left side of the first resonator is connected to the first support beam, the left side of the first support beam is connected to the first driving structure, the right side of the first resonator is connected to the second support beam, the right side of the second support beam is connected to the second driving structure, the left side of the second resonator is connected to the third support beam, the left side of the third support beam is connected to the second driving structure, the right side of the second resonator is connected to the fourth support beam, and the right side of the fourth support beam is connected to the fourth driving structure; in the modal localization In the case where the electric field sensor includes three resonators, there may also be four support beams, a first driving structure is arranged on the left side of the first resonator, a first support beam is arranged on the left side of the first driving structure, the first support beam is connected to the first resonator, a second driving structure is arranged on the right side of the first resonator, a second support beam is arranged on the right side of the second driving structure, the second support beam is connected to the second resonator through a coupling structure, the second resonator is connected to the third support beam through a coupling structure, a third driving structure is arranged on the left side of the third resonator, a third support beam is arranged on the left side of the third driving structure, the third support beam is connected to the third resonator, a fourth driving structure is arranged on the right side of the third resonator, a fourth support beam is arranged on the right side of the fourth driving structure, and the fourth support beam is connected to the third resonator.

[0061] According to an embodiment of the present disclosure, the support beam may be a straight beam, a folded beam, a curved beam, or a combination thereof.

[0062] According to an embodiment of the present disclosure, a resonator array unit includes a resonator, a driving structure, a coupling structure and a support beam. The resonator is arranged on a substrate through the support beam, and a plurality of resonators are weakly coupled with each other through the coupling structure. The driving structure is located on one side or both sides of the resonator. By applying a driving voltage to the driving structure on both sides of the resonator, the resonator and the comb tooth structure connected to the resonator are vibrated, thereby modulating the electric field so that the electrode unit generates a signal.

[0063] According to an embodiment of the present disclosure, the comb-tooth structure connected to the resonator includes a first comb-tooth structure and a second comb-tooth structure, and the electrode unit includes an electric field induction electrode unit and a reference output electrode unit.

[0064] According to an embodiment of the present disclosure, a resonator array unit includes a resonator, a comb structure connected to the resonator, a driving structure, a coupling structure, and a supporting beam.

[0065] According to an embodiment of the present disclosure, since the resonator array unit includes multiple resonators, the comb-tooth structure connected to the first resonator is a first comb-tooth structure, and the comb-tooth structure connected to the second resonator is a second comb-tooth structure.

[0066] According to an embodiment of the present disclosure, the first comb-tooth structure is arranged on one side of the electric field sensing electrode unit and is differentially staggered with the electric field sensing electrode unit, and is used to generate and output the sensing signal in response to the vibration of the resonator according to the charge induction principle, wherein the comb-tooth structure can increase the sensing area so as to enhance the output sensing signal.

[0067] According to an embodiment of the present disclosure, the structural shape of the sensing electrode may include at least one of the following: a stripe structure, a comb-tooth structure, an irregular shape structure, or a combination thereof.

[0068] According to an embodiment of the present disclosure, the first comb tooth structure includes a first upper comb tooth structure and a first lower comb tooth structure. Corresponding to the first upper comb tooth structure and the first lower comb tooth structure, the modal localized electric field sensor with adjustable sensitivity may include two electric field sensing electrode units, the electrode comb teeth of the first electric field sensing electrode unit are differentially staggered with the first upper comb tooth structure, and the electrode comb teeth of the second electric field sensing electrode unit are differentially staggered with the first lower comb tooth structure.

[0069] According to an embodiment of the present disclosure, the output sensing signal can also be enhanced by arranging the electrode comb teeth of the electric field sensing electrode unit and the comb tooth structure in a differentially staggered manner.

[0070] According to an embodiment of the present disclosure, the electric field sensing electrode unit is fixed on the substrate through an anchor point.

[0071] According to an embodiment of the present disclosure, a first driving voltage is applied to a driving structure connected to a resonator on one side of an electric field sensing electrode unit, so that the resonator on one side of the electric field sensing electrode unit vibrates at a predetermined amplitude, thereby causing the electric field sensing electrode unit to output a sensing signal. According to an embodiment of the present disclosure, a second comb-tooth structure is arranged on one side of a reference output electrode unit, and is staggered with the reference output electrode unit, and is used to change the capacitance between the reference electrode and the second comb-tooth structure in response to the vibration of the resonator, and generate and output the reference signal according to the capacitance change.

[0072] According to an embodiment of the present disclosure, by applying a second driving voltage to a driving structure connected to a resonator on one side of the reference output electrode unit, the resonator on one side of the reference output electrode unit vibrates at a predetermined amplitude, thereby causing the reference output electrode unit to output an induction signal.

[0073] According to an embodiment of the present disclosure, the reference output electrode unit is fixed on the substrate through an anchor point.

[0074] According to an embodiment of the present disclosure, the structural shape of the reference electrode may include at least one of the following: a stripe structure, a comb-tooth structure, an irregular shape structure, or a combination thereof.

[0075] According to an embodiment of the present disclosure, the second comb tooth structure includes a second upper comb tooth structure and a second lower comb tooth structure. Corresponding to the second upper comb tooth structure and the second lower comb tooth structure, the modal localized electric field sensor with adjustable sensitivity may include two reference output electrode units, the electrode comb teeth of the first reference output electrode unit are arranged alternately with the second upper comb tooth structure, and the electrode comb teeth of the second reference output electrode unit are arranged alternately with the second lower comb tooth structure.

[0076] According to an embodiment of the present disclosure, the first driving voltage and the second driving voltage may be voltages of different magnitudes. By applying the first driving voltage and the second driving voltage of different magnitudes to the driving structure on one side of the electric field sensing electrode unit and the driving structure on one side of the reference output electrode unit, the resonator on one side of the electric field sensing electrode unit and the resonator on one side of the reference output electrode unit vibrate at different amplitudes, so that the electric field sensing electrode unit outputs a sensing signal, and the reference output electrode unit outputs a reference signal.

[0077] According to the embodiments of the present disclosure, the first comb-tooth structure connected to the resonator and the electric field sensing electrode unit are arranged in a differentially staggered manner, and the second comb-tooth structure connected to another resonator and the reference output electrode unit are arranged in a staggered manner. By applying the first driving voltage and the second driving voltage of different magnitudes to the driving structures on both sides, the resonators on both sides generate vibrations with different amplitudes. According to the charge induction principle and the capacitance change, the two sides respectively generate and output the sensing signal and the reference signal. At the same time, the first comb-tooth structure on one side of the electric field sensing electrode unit can increase the sensing area so that the electric field sensing electrode unit outputs a larger sensing current, that is, the sensing signal. The second comb-tooth structure on one side of the reference output electrode unit can also increase the capacitance value between the resonator on this side so that the reference output electrode unit outputs a larger reference current, that is, the reference signal, according to the capacitance change. In this way, when the electric field to be measured is detected, the sensing signal and the reference signal are compared and output according to the modal localization principle, so as to obtain a detection result of the electric field strength of the electric field to be measured with reduced environmental noise during measurement.

[0078] According to an embodiment of the present disclosure, the modal localized electric field sensor with adjustable sensitivity may further include: a tuning electrode unit, which is arranged on both sides of the resonator and is used to eliminate the common mode error of the resonator array so that the resonator array satisfies the modal localization.

[0079] According to an embodiment of the present disclosure, a modal localized electric field sensor with adjustable sensitivity may include one or two tuning electrode units. The tuning electrode units may be arranged on both sides of the resonator or on one side of the resonator. An adjustment voltage may be applied to the tuning electrode units to cause multiple resonators to vibrate through a supporting beam, thereby making the stiffness difference between the multiple resonators zero and eliminating the common mode error between the multiple resonators.

[0080] According to an embodiment of the present disclosure, the tuning electrode unit is fixedly connected to the substrate via an anchor point.

[0081] According to an embodiment of the present disclosure, the structural shape of the tuning electrode unit may include any one of the following: a cuboid, a cube, a frustum, a prism, a prism, a cylinder, a cone, and an irregular body.

[0082] According to the embodiments of the present disclosure, an adjustment voltage can be applied to the tuning electrode unit to cause vibration with the support beam, thereby driving the resonator to vibrate, thereby adjusting the stiffness difference between multiple resonators, eliminating the common mode error between multiple resonators, and reducing the environmental noise that affects the electric field to be measured during testing.

[0083] According to an embodiment of the present disclosure, the electric field sensor also includes a two-dimensional or three-dimensional electric field sensor composed of a plurality of modally localized electric field sensors with adjustable sensitivity, which can be used to measure two-dimensional or three-dimensional electric fields or voltages.

[0084] Figure 1 The schematic diagram shows the structure of a modal localized inductive electric field sensor with adjustable sensitivity according to an embodiment of the present disclosure.

[0085] like Figure 1 As shown, Figure 1The structure of a modal localized electric field sensor with adjustable sensitivity is shown. The modal localized electric field sensor with adjustable sensitivity includes a substrate 101, a resonator array unit 102, an electric field sensing electrode unit 103, a reference output electrode unit 104, a tuning electrode unit 105 and a stiffness adjustment electrode unit 106. The resonator array unit 102, the electric field sensing electrode unit 103, the reference output electrode unit 104, the tuning electrode unit 105 and the stiffness adjustment electrode unit 106 are all located on the substrate 101. The modal localized electric field sensor with adjustable sensitivity is connected to the substrate 101 through an anchor point, and includes three resonators, two electric field sensing electrode units 103, two reference output electrode units 104, two tuning electrode units 105 and two stiffness adjustment electrode units 106. The electrode comb teeth of the two electric field sensing electrode units 103 are differentially staggered with the first comb tooth structure of the resonator array unit, the electrode comb teeth of the two reference output electrode units 104 are staggered with the second comb tooth structure of the resonator array unit, and the two The tuning electrode units 105 are respectively located on both sides of the second resonator in the resonator array unit 102. By applying driving excitation to the driving structure in the resonator array unit 102, the resonator generates vibration with a constant amplitude ratio, so that the electric field sensing electrode unit 103 outputs a sensing signal and the reference output electrode unit 104 outputs a reference signal. By applying adjustment voltages of different magnitudes to the two tuning electrode units 105, the stiffness difference between the resonator on one side of the electric field sensing electrode unit 103 and the resonator on the one side of the reference output electrode unit 104 is made zero. Then, according to the sensitivity required for the test, adjustment voltages of different magnitudes are applied to the two stiffness adjustment electrode units 106, so that a stiffness difference is generated between the resonator on one side of the electric field sensing electrode unit 103 and the resonator on the one side of the reference output electrode unit 104, thereby achieving the technical effect of adjusting the sensitivity of the modal localized electric field sensor. Then, the electric field to be measured is detected at a predetermined sensitivity, and a comparison output is made based on the sensing signal and the reference signal to obtain a detection result that meets the predetermined sensitivity.

[0086] Figure 2 The schematic diagram shows the structure of a resonator array unit of a modal localized inductive electric field sensor with adjustable sensitivity according to an embodiment of the present disclosure.

[0087] like Figure 2 As shown above Figure 1Taking the modal localized electric field sensor with adjustable sensitivity as an example, the resonator array unit includes a resonator, a comb tooth structure, a driving structure, a coupling structure, and a support beam. The resonator includes a first resonator 201, a second resonator 202, and a third resonator 203. The comb tooth structure includes a first comb tooth structure 204 and a second comb tooth structure 205. The driving structure includes a first driving structure 206, a second driving structure 207, a third driving structure 208, a fourth driving structure 209, a fifth driving structure 210, a sixth driving structure 211, a seventh driving structure 212, and an eighth driving structure. The coupling structure 213 includes a first coupling structure 214, a second coupling structure 215, a third coupling structure 216, and a fourth coupling structure 217. The support beam includes a first support beam 218, a second support beam 219, a third support beam 220, and a fourth support beam 221. The first comb structure 204 is connected to the first resonator 201. The first drive structure 206, the second drive structure 207, the third drive structure 208, and the fourth drive structure 209 are arranged on both sides of the first resonator 201. A first support beam 218 is disposed, and a second support beam 219 is disposed on the right side of the third drive structure 208 and the fourth drive structure 209. The second support beam 219 is connected to the second resonator 202 via a first coupling structure 214 and a second coupling structure 215. The second resonator 202 and the third support beam 220 are connected via a third coupling structure 216 and a fourth coupling structure 217. A fifth drive structure 210, a sixth drive structure 211, a seventh drive structure 212 and an eighth drive structure 213 are disposed on both sides of the third resonator 203. The fifth drive structure A third support beam 220 is arranged on the left side of the seventh drive structure 210 and the sixth drive structure 211, and a fourth support beam 221 is arranged on the right side of the seventh drive structure 212 and the eighth drive structure 213. By applying a first drive voltage to the first drive structure 206, the second drive structure 207, the third drive structure 208 and the fourth drive structure 209, the first resonator 201 vibrates, and by applying a second drive voltage to the fifth drive structure 210, the sixth drive structure 211, the seventh drive structure 212 and the eighth drive structure 213, the third resonator 203 vibrates.

[0088] Figure 3 The schematic diagram shows the structure of a modal localized inductive electric field sensor with adjustable sensitivity according to another embodiment of the present disclosure.

[0089] like Figure 3 As shown, Figure 3The structure of another modal localized electric field sensor with adjustable sensitivity is shown. The modal localized electric field sensor with adjustable sensitivity includes a substrate 101, a resonator array unit 102, an electric field sensing electrode unit 103, a reference output electrode unit 104 and a stiffness adjustment electrode unit 106. The resonator array unit 102, the electric field sensing electrode unit 103, the reference output electrode unit 104 and the stiffness adjustment electrode unit 106 are all located above the substrate 101 and connected to the substrate 101 through anchor points. The modal localized electric field sensor with adjustable sensitivity includes a fourth resonator 301, a fifth resonator 302, two electric field sensing electrode units 103, two reference output electrode units 104 and two stiffness adjustment electrode units 106. The electrode comb teeth of the two electric field sensing electrode units 103 are differentially staggered with the first comb tooth structure of the resonator array unit, the electrode comb teeth of the two reference output electrode units 104 are staggered with the second comb tooth structure of the resonator array unit, and the fourth resonator 301 is staggered with the second comb tooth structure of the resonator array unit. Support beams are arranged on the left and right sides, and a driving structure is arranged on the outer side of the support beams. Support beams are arranged on the left and right sides of the fifth resonator 302, and a driving structure is arranged on the outer side of the support beams. By applying a driving voltage to the driving structure in the resonator array unit 102, the resonator is vibrated, so that the electric field sensing electrode unit 103 outputs an induction signal, and the reference output electrode unit 104 outputs a reference signal. By applying adjustment voltages of different magnitudes to the two stiffness adjustment electrode units 106, the stiffness difference between the fourth resonator 301 and the fifth resonator 302 is made 0, and then according to the sensitivity required by the test, the two stiffness adjustment electrode units 106 are applied with different magnitudes of adjustment voltages, so that a stiffness difference is generated between the fourth resonator 301 and the fifth resonator 302, so as to achieve the technical effect of adjusting the sensitivity of the modal localized electric field sensor with adjustable sensitivity, and then the electric field to be measured is detected at a predetermined sensitivity, and the output is compared with the induction signal and the reference signal to obtain a detection result that meets the predetermined sensitivity.

[0090] Figure 4 The flowchart of the electric field detection method according to the embodiment of the present disclosure is schematically shown.

[0091] like Figure 4 As shown, the electric field detection method of this embodiment includes operations S410 to S460.

[0092] In operation S410, an electric field sensing electrode unit of a modal localized inductive electric field sensor with adjustable sensitivity is exposed to an electric field to be measured.

[0093] In operation S420, an excitation is applied to the driving structure, and based on the modal localization principle, the first comb-tooth structure and the second comb-tooth structure generate amplitudes with a constant amplitude ratio.

[0094] According to an embodiment of the present disclosure, excitations of different magnitudes are applied to the driving structure on one side of the electric field sensing electrode unit and the driving structure on one side of the reference output electrode unit, so that the resonator on one side of the electric field sensing electrode unit and the resonator on one side of the reference output electrode unit vibrate according to the modal localization principle.

[0095] In operation S430, a voltage of the stiffness adjusting electrode unit is adjusted to change an amplitude ratio of the resonator to obtain a resonator of a predetermined sensitivity.

[0096] According to the embodiments of the present disclosure, the test sensitivity is determined according to the test requirements, so as to adjust the resonator to obtain a resonator with a predetermined sensitivity, so that the test result obtained after the electric field to be tested meets the test requirements.

[0097] In operation S440, in response to the vibration of the first comb-tooth structure, the electric field sensing electrode unit outputs a sensing signal based on a charge induction principle.

[0098] According to the embodiments of the present disclosure, when the resonator on one side of the electric field sensing electrode unit vibrates, since the comb-tooth structure on one side of the electric field sensing electrode unit is differentially staggered, the sensing area is further increased. According to the charge induction principle, the electric field sensing electrode unit can output a larger induced current corresponding to the electric field to be measured, that is, an induced signal.

[0099] According to the embodiments of the present disclosure, by combining the charge induction principle and the modal localization principle, the obtained induction signal is a linear detection result corresponding to the electric field strength.

[0100] In operation S450, in response to vibration of the second comb-tooth structure, the reference output electrode unit outputs a reference signal according to a capacitance variation amount between the reference electrode and the resonator.

[0101] According to an embodiment of the present disclosure, when the resonator on one side of the reference output electrode unit vibrates, since the comb tooth structure on one side of the reference output electrode unit is staggered, the capacitance change between the reference output electrode unit and the resonator is further increased. According to the modal localization principle and the capacitance change, the reference output electrode unit can output a reference current corresponding to the electric field to be measured, that is, a reference signal.

[0102] In operation S460, the induced signal and the reference signal are compared according to the modal localization large amplitude ratio characteristic to obtain the electric field strength of the electric field to be measured.

[0103] According to the embodiments of the present disclosure, based on the modal localization large amplitude ratio characteristic, the induced signal and the reference signal are compared and outputted, so as to reduce the influence of the manufacturing error on the detection result of the electric field to be measured, improve the measurement range of the modal localization inductive electric field sensor with adjustable sensitivity, and obtain the ratio result, which is the electric field strength of the electric field to be measured, wherein the induced signal is the numerator and the reference signal is the denominator. According to the embodiments of the present disclosure, the output results of the modally localized electric field sensors in the prior art are all nonlinear measurement results, which leads to no corresponding correlation between the measurement results and the measurement sensitivity, and thus it is impossible to specifically adjust the sensitivity of the electric field sensor, improve the measurement range of the modally localized electric field sensor, and reduce the impact introduced by the preparation error. The present application exposes the electric field sensing electrode unit of the modally localized inductive electric field sensor with adjustable sensitivity to the electric field to be measured, so that the electric field sensing electrode unit can detect the electric field to be measured, and then based on the modal localization principle, applies excitation to the driving click to make the resonator generate vibrations with a predetermined amplitude ratio, and changes the amplitude ratio of the resonator by adjusting the voltage of the stiffness adjusting electrode unit to obtain a resonator with a predetermined sensitivity. Based on the charge induction principle, the electric field sensing electrode unit outputs a sensing signal, and according to the change in capacitance between the reference electrode and the resonator, the reference output electrode unit outputs a reference signal. Reference signal, finally, according to the large amplitude ratio characteristic of modal localization, the induced signal and the reference signal are compared and output to obtain the electric field strength of the electric field to be measured, and the detection result linearly related to the electric field strength is obtained by combining the charge induction principle and the modal localization principle, eliminating the nonlinear defect of sensitivity, and improving the measurement range of the modal localization inductive electric field sensor with adjustable sensitivity. The induced signal and the reference signal are output compared based on the modal localization principle, which reduces the influence of manufacturing error and common mode error, eliminates common mode errors such as temperature and humidity in the test environment, reduces the environmental noise during the test, obtains accurate detection results, and improves the accuracy of detection. At the same time, due to the provision of a stiffness adjustment electrode unit, the amplitude ratio of the resonator can be changed by adjusting the stiffness adjustment electrode unit, so that the sensitivity of the modal localization inductive electric field sensor with adjustable sensitivity can be adjusted, and the measurement range and measurement sensitivity are improved.

[0104] According to an embodiment of the present disclosure, the modal localized inductive electric field sensor includes two stiffness adjustment electrode units, the first stiffness adjustment electrode unit is on the inner side or outer side of the resonator array unit on one side of the electric field sensing electrode unit, and the second stiffness adjustment electrode unit is on the inner side or outer side of the resonator array unit on one side of the reference output electrode unit.

[0105] According to an embodiment of the present disclosure, adjusting the voltage of the stiffness adjustment electrode unit to change the amplitude ratio of the resonator to obtain a resonator with a predetermined sensitivity includes:

[0106] According to an embodiment of the present disclosure, a first adjustment voltage is applied to the first stiffness adjustment electrode unit, and a second adjustment voltage is applied to the second stiffness adjustment electrode unit to eliminate stiffness errors caused by manufacturing errors and obtain multiple resonators that meet modal localization.

[0107] According to an embodiment of the present disclosure, the first adjustment voltage and the second adjustment voltage are voltages of different magnitudes.

[0108] According to an embodiment of the present disclosure, by applying adjustment voltages of different magnitudes to the two stiffness adjustment electrode units, the stiffness of the two resonators is made consistent, common mode errors such as temperature and humidity in the test environment are eliminated, and environmental noise during testing is reduced, so as to obtain accurate detection results.

[0109] According to an embodiment of the present disclosure, when the modal localized electric field sensor includes a tuning electrode unit, an adjustment voltage may be applied to the tuning electrode unit to make the stiffness between two resonators consistent, thereby obtaining a plurality of resonators that satisfy modal localization.

[0110] According to an embodiment of the present disclosure, a third adjustment voltage is applied to the first stiffness adjustment electrode unit, and a fourth adjustment voltage is applied to the second stiffness adjustment electrode unit to adjust the sensitivity of the modal localized electric field sensor with adjustable sensitivity, so as to obtain a modal localized inductive electric field sensor that meets the preset accuracy.

[0111] According to an embodiment of the present disclosure, the third adjustment voltage and the fourth adjustment voltage are voltages of different magnitudes.

[0112] According to an embodiment of the present disclosure, according to the sensitivity required for detection, adjustment voltages of different sizes are applied to two stiffness adjustment electrode units to make the two resonators vibrate, so that the stiffness changes, thereby achieving the sensitivity of the resonator adjusted by amplitude to adapt to different detection requirements, thereby improving the measurement range of the electric field sensor.

[0113] According to the embodiments of the present disclosure, by applying adjustment voltages of different magnitudes to the first stiffness adjustment electrode unit and the second stiffness adjustment electrode unit, a plurality of resonators satisfying modal localization are obtained, and then another set of adjustment voltages of different magnitudes are applied to the first stiffness adjustment electrode unit and the second stiffness adjustment electrode unit, a modal localization inductive electric field sensor satisfying a preset accuracy is obtained, thereby eliminating common mode errors such as temperature and humidity in the test environment, reducing environmental noise during testing, obtaining accurate detection results, and improving detection accuracy. At the same time, the test sensitivity of the modal localization electric field sensor can be flexibly adjusted according to the requirements of detection sensitivity, thereby realizing the sensitivity adjustability of the modal localization electric field sensor.

[0114] According to an embodiment of the present disclosure, the electric field sensor may include the above-mentioned modal localized electric field sensor with adjustable sensitivity.

[0115] According to an embodiment of the present disclosure, the electric field sensor may include a two-dimensional or three-dimensional electric field sensor composed of a plurality of modally localized electric field sensors with adjustable sensitivity, for measuring a two-dimensional or three-dimensional electric field or voltage.

[0116] It will be appreciated by those skilled in the art that the features described in the various embodiments and / or claims of the present disclosure may be combined and / or combined in a variety of ways, even if such combinations and / or combinations are not explicitly described in the present disclosure. In particular, the features described in the various embodiments and / or claims of the present disclosure may be combined and / or combined in a variety of ways without departing from the spirit and teachings of the present disclosure. All of these combinations and / or combinations fall within the scope of the present disclosure.

[0117] The above specific embodiments further illustrate the purpose, technical solutions and beneficial effects of the present disclosure in detail. It should be understood that the above are only specific embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A modal localized inductive electric field sensor with adjustable sensitivity, comprising: A substrate, used to support the resonator array unit, the electrode unit and the stiffness adjustment electrode unit, wherein an anchor point is provided on the surface of the substrate; A resonator array unit, arranged above the center of the substrate, for driving the resonator to vibrate, wherein the resonator array unit comprises the resonator and a comb structure connected to the resonator; An electrode unit, wherein the electrode unit and the comb structure connected to the resonator are arranged in a staggered manner, and are used to generate an output signal in response to the vibration of the resonator; The stiffness adjustment electrode unit is arranged on both sides of the resonator array unit, and is used to adjust the stiffness difference and common mode error of the resonator so as to make the resonator meet the modal localization and adjust the sensitivity of the modal localization inductive electric field sensor with adjustable sensitivity.

2. The sensor according to claim 1, characterized in that The comb-tooth structure connected to the resonator includes a first comb-tooth structure and a second comb-tooth structure, and the electrode unit includes an electric field sensing electrode unit and a reference output electrode unit; The first comb-tooth structure is arranged on one side of the electric field sensing electrode unit and is arranged in a differentially staggered manner with the electric field sensing electrode unit, and is used to generate and output the sensing signal according to the charge induction principle in response to the vibration of the resonator; The second comb tooth structure is arranged on one side of the reference output electrode unit and is arranged alternately with the reference output electrode unit, and is used to change the capacitance between the reference electrode and the second comb tooth structure in response to the vibration of the resonator, and generate and output the reference signal according to the capacitance change.

3. The sensor according to claim 1, characterized in that The resonator array unit includes at least two resonators, and the resonator array unit also includes: A driving structure, arranged on both sides of the resonator, for driving the resonator to vibrate; A coupling structure, disposed between the plurality of resonators, for coupling the plurality of resonators so as to form a weak coupling between the plurality of resonators; Support beams are arranged on both sides of the driving structure and are used to connect the resonator array unit and the substrate, wherein the support beams are one of a straight beam, a folded beam, a curved beam or a combination thereof.

4. The sensor according to claim 1, characterized in that Also includes: The tuning electrode units are arranged on both sides of the resonator and are used to eliminate the common mode error of the resonator array so that the resonator array satisfies the mode localization.

5. The sensor according to claim 1, characterized in that The driving method of the driving structure includes at least one of the following: electrostatic comb drive, electrostatic plate drive, piezoelectric drive, magnetic drive, and thermal drive.

6. The sensor according to claim 1, characterized in that The coupling structure includes one of the following: an electrostatic coupling structure, a mechanical coupling structure, and a mechanical-electrostatic hybrid coupling structure.

7. An electric field detection method using the modal localized inductive electric field sensor with adjustable sensitivity according to any one of claims 1 to 6, comprising: Exposing the electric field sensing electrode unit of the modal localized inductive electric field sensor with adjustable sensitivity to the electric field to be measured; Applying excitation to the driving structure, based on the modal localization principle, the first comb-tooth structure and the second comb-tooth structure generate amplitudes with a constant amplitude ratio; Adjusting the voltage of the stiffness adjustment electrode unit to change the amplitude ratio of the resonator to obtain the resonator with a predetermined sensitivity; In response to the vibration of the first comb structure, the electric field sensing electrode unit outputs a sensing signal based on the charge induction principle; In response to the vibration of the second comb structure, the reference output electrode unit outputs a reference signal according to the capacitance change between the reference electrode and the resonator; According to the modal localization large amplitude ratio characteristic, the induced signal and the reference signal are compared to obtain the electric field strength of the electric field to be measured.

8. The method according to claim 7, characterized in that The modal localized inductive electric field sensor comprises two stiffness adjustment electrode units, wherein the first stiffness adjustment electrode unit is located inside or outside the resonator array unit on one side of the electric field sensing electrode unit, and the second stiffness adjustment electrode unit is located inside or outside the resonator array unit on one side of the reference output electrode unit; the voltage of the stiffness adjustment electrode unit is adjusted to change the amplitude ratio of the resonator to obtain the resonator with a predetermined sensitivity, including: Applying a first adjustment voltage to the first stiffness adjustment electrode unit and applying a second adjustment voltage to the second stiffness adjustment electrode unit to eliminate stiffness errors caused by manufacturing errors, thereby obtaining a plurality of resonators satisfying modal localization, wherein the first adjustment voltage and the second adjustment voltage are voltages of different magnitudes; A third adjustment voltage is applied to the first stiffness adjustment electrode unit, and a fourth adjustment voltage is applied to the second stiffness adjustment electrode unit to adjust the sensitivity of the modal localized electric field sensor to obtain a modal localized inductive electric field sensor that meets a preset accuracy, wherein the third adjustment voltage and the fourth adjustment voltage are voltages of different magnitudes.

9. An electric field sensor, comprising: A modal localized inductive electric field sensor with adjustable sensitivity as described in any one of claims 1 to 6 or a modal localized inductive electric field sensor with adjustable sensitivity obtained by the preparation method as described in claim 7.

10. The electric field sensor according to claim 9, characterized in that: The electric field sensor also includes a two-dimensional or three-dimensional electric field sensor composed of a plurality of electric field sensitive structures, which is used to measure a two-dimensional or three-dimensional electric field or voltage.

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