Optical detection device

Abstract

The invention relates to the technical field of optical detection, in particular to an optical detection device which comprises an objective lens, a polarization detection assembly, a tube lens assembly and a camera which are sequentially arranged in the optical axis direction. The tube lens assembly comprises a plurality of tube lenses, the plurality of tube lenses are arranged in the direction perpendicular to the optical axis, one of the plurality of tube lenses is arranged in a light beam path between the objective lens and the camera, and the tube lens located in the light beam path can be switched; the polarization detection assembly comprises a plurality of optical elements, one of the optical elements is arranged in the light beam path, and the optical elements located in the light beam path can be switched. According to the invention, the switching of a plurality of tube lenses and the switching of a plurality of optical elements can be realized at least.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical detection, and in particular relates to an optical detection device. Background Art

[0002] At present, with the development of optical technology, optical inspection systems using lenses with large numerical aperture and TDI (Time Delay and Integration) cameras have been widely used in optical inspection technologies in related fields. Due to the large size and heavy weight of the lenses, how to reasonably set the positions of various components in the optical inspection system and how to switch between tube lenses with different magnifications have become urgent issues to be solved in the design of optical inspection systems. Summary of the invention

[0003] In view of this, the present invention aims to provide an optical detection device, which is at least conducive to realizing the switching of multiple tube lenses and multiple optical elements.

[0004] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0005] The present invention provides an optical detection device, comprising: an objective lens, an analyzer assembly, a tube lens assembly and a camera arranged in sequence along an optical axis; the tube lens assembly comprises a plurality of tube lenses, the plurality of tube lenses are arranged in a direction perpendicular to the optical axis, one of the plurality of tube lenses is arranged in a light beam path between the objective lens and the camera, and the tube lens located in the light beam path is switchable; the analyzer assembly comprises a plurality of optical elements, one of the plurality of optical elements is arranged in the light beam path, and the optical element located in the light beam path is switchable.

[0006] In some embodiments, the optical detection device also includes a base, the objective lens, the polarization analyzer assembly and the tube lens assembly are arranged on the base, and the camera is arranged on the base through a camera base.

[0007] In some embodiments, the tube lens assembly also includes a tube lens bracket and a tube lens switching motor. Multiple tube lenses are arranged on the tube lens bracket. The tube lens switching motor is used to drive the tube lens bracket to move along the arrangement direction of the tube lenses to switch any tube lens to the light beam path.

[0008] In some embodiments, the tube lens is set on the tube lens bracket through a first adjustment structure, and the first adjustment structure can drive the tube lens to move so that the tube lens can be adjusted in position along the optical axis, in pitch angle relative to the optical axis, and in yaw angle relative to the optical axis.

[0009] In some embodiments, the first adjustment structure includes a tube lens mounting plate and a mounting bracket. The tube lens mounting plate is arranged on the tube lens bracket. The tube lens is arranged on a side of the tube lens mounting plate away from the tube lens bracket through the mounting bracket. The mounting bracket is movable along the optical axis relative to the tube lens mounting plate to realize position adjustment of the tube lens relative to the tube lens bracket along the optical axis.

[0010] In some embodiments, the tube mirror mounting plate has a first axial screw seat and a second axial screw seat that are relatively arranged, and the first axial screw seat and the second axial screw seat are respectively located on opposite sides of the mounting bracket in the optical axis direction, the first axial screw is assembled on the first axial screw seat, and the second axial screw is assembled on the second axial screw seat; wherein, the mounting bracket is in contact with the free end of the first axial screw and the free end of the second axial screw on opposite sides along the optical axis direction, respectively, and the first axial screw is rotated, and the second axial screw is rotated accordingly, so that the mounting bracket moves relative to the tube mirror mounting plate along the optical axis direction.

[0011] In some embodiments, the tube lens holder has a supporting base, the first adjustment structure also includes an adapter plate, the tube lens mounting plate is arranged on the supporting base through the adapter plate, and the tube lens mounting plate can be rotated relative to the adapter plate along the axial direction of the tube lens mounting plate to adjust the swing angle of the tube lens relative to the optical axis.

[0012] In some embodiments, the inclination angle of the adapter plate relative to the support base is adjustable to achieve pitch angle adjustment of the tube mirror relative to the optical axis; the adapter plate is a rectangular plate, and the four corners of the adapter plate serve as pitch adjustment seats, and the pitch adjustment seats have pitch adjustment screw holes for assembling the pitch adjustment assembly; the pitch adjustment assembly includes a main body, a spherical gasket and a pitch screw, the main body has a mounting hole, the pitch screw is assembled in the mounting hole to connect the main body with the support base, the spherical gasket is sleeved on the outer ring of the pitch screw and is located between the main body and the support base, the spherical gasket is a semicircular structure protruding toward the main body, and the side of the main body facing the spherical gasket has an arc-shaped recess that cooperates with the spherical gasket; the outer ring of the main body has a first thread that cooperates with the pitch adjustment screw hole, the main body is assembled in the pitch adjustment screw hole through the first thread, and the main body is rotated to achieve the inclination angle adjustment of the adapter plate relative to the support base.

[0013] In some embodiments, the polarization analyzer assembly further includes a first rotating motor and a rotating wheel, wherein the rotating wheel is connected to the first rotating motor, and a plurality of optical elements are arranged at intervals on the rotating wheel. The first rotating motor drives the rotating wheel to rotate to switch the optical elements located in the light beam path.

[0014] In some embodiments, the analyzer assembly further includes an analyzer base and a connecting portion. The analyzer base is disposed on the pedestal, and the first rotating motor is connected to the analyzer base via the connecting portion.

[0015] In some embodiments, the polarization analyzer assembly further includes a second rotating motor, the plurality of optical elements include at least one polarization optical element, the polarization optical element is mounted on the rotating wheel via the second rotating motor, and the second rotating motor can drive the polarization optical element to rotate along the axial direction of the polarization optical element.

[0016] In some embodiments, the camera base includes a base body and a camera adjustment assembly. The base body is set on the base, and the camera is set on the base body through the camera adjustment assembly. The camera adjustment assembly can drive the camera to move so that the camera can be adjusted in position along the optical axis, rotated along the optical axis, positioned on a plane perpendicular to the optical axis, and adjusted in yaw angle relative to the optical axis.

[0017] In some embodiments, the camera adjustment assembly includes a camera bracket and a first adjustment plate, the camera is set on the camera bracket, the camera bracket is set on the first adjustment plate, one side of the camera bracket has a first rotating screw seat and a second rotating screw seat that are relatively set, the first rotating screw seat is used to assemble the first rotating screw, and the second rotating screw seat is used to assemble the second rotating screw; the first adjustment plate has a rotation adjustment baffle, and the rotation adjustment baffle is located between the first rotating screw seat and the second rotating screw seat; wherein, the opposite sides of the rotation adjustment baffle are respectively in contact with the free ends of the first rotating screw and the free ends of the second rotating screw, and the first rotating screw is rotated, and the second rotating screw is rotated accordingly, so that the camera bracket rotates along the optical axis relative to the first adjustment plate, and then the camera rotates along the optical axis.

[0018] In some embodiments, the camera adjustment assembly also includes a second adjustment plate, the first adjustment plate is arranged on the second adjustment plate, a yaw adjustment screw seat is provided on one side of the first adjustment plate, the yaw adjustment screw seat has a rotating adjustment baffle, and the yaw adjustment screw seat is used to assemble the yaw adjustment screw, the free end of the yaw adjustment screw abuts the second adjustment plate, and the yaw adjustment screw is rotated to tilt the first adjustment plate relative to the second adjustment plate to achieve the yaw angle adjustment of the camera.

[0019] In some embodiments, the camera adjustment assembly also includes a moving motor and a motor bracket, and the opposite sides of the moving motor are respectively connected to the camera bracket and the motor bracket, and the moving motor is used to drive the camera bracket to move relative to the motor bracket along the optical axis to achieve position adjustment of the camera along the optical axis.

[0020] In some embodiments, the camera adjustment assembly also includes a third adjustment plate, the motor bracket is arranged on the third adjustment plate, the third adjustment plate is arranged on the base body, the third adjustment plate has a short side adjustment screw seat, the short side adjustment screw seat is used to assemble the short side adjustment screw, the free end of the short side adjustment screw is connected to the motor bracket, and the short side adjustment screw is rotated to make the motor bracket move relative to the third adjustment plate along a first direction perpendicular to the optical axis.

[0021] In some embodiments, the base body has a first long side adjustment screw seat and a second long side adjustment screw seat, the first long side adjustment screw seat is used to assemble the first long side adjustment screw, and the second long side adjustment screw seat is used to assemble the second long side adjustment screw, and the first long side adjustment screw seat and the second long side adjustment screw seat are located on opposite sides of the third adjustment plate; the third adjustment plate has a first abutment portion and a second abutment portion, the free end of the first long side adjustment screw contacts the first abutment portion, and the free end of the second long side adjustment screw contacts the second abutment portion, the first long side adjustment screw is rotated, and the second long side adjustment screw is rotated accordingly, so that the third adjustment plate moves relative to the base body along a second direction perpendicular to the optical axis, and the plane where the first direction and the second direction are located is a plane perpendicular to the optical axis.

[0022] Compared with the prior art, the invention can achieve the following beneficial effects:

[0023] In the optical detection device provided by the embodiment of the present invention, by switching the multiple tube lenses behind the objective lens, the tube lens with the required magnification can be switched into the light beam path of the optical detection device, and at the same time, the required optical element can be selected from multiple optical elements and switched into the light beam path of the optical detection device, which is beneficial to improving the adaptability of the optical detection device to different working conditions; in addition, the tube lens is equipped with a multi-dimensional adjustment mechanism, which can realize multi-dimensional angle adjustment or multi-dimensional position adjustment of the tube lens; the camera is also equipped with a corresponding multi-dimensional adjustment mechanism, which can realize multi-dimensional angle adjustment or multi-dimensional position adjustment of the camera; in addition, in the optical detection device provided by the embodiment of the present invention, not only the multi-dimensional adjustment mechanism is set up in the limited space, but also the adjustment of each dimension is guaranteed to be relatively independent, reducing coupling, which is beneficial to making the installation and adjustment process of each component in the optical detection device relatively simple. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The drawings constituting part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments and descriptions of the present invention are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0025] Figure 1 A schematic diagram of the structure of an optical detection device according to an embodiment of the present invention;

[0026] Figure 2 Another schematic diagram of the structure of the optical detection device according to the embodiment of the present invention;

[0027] Figure 3 A schematic diagram of the structure of the polarization analyzer assembly described in an embodiment of the present invention;

[0028] Figure 4A schematic diagram of the structure of the tube mirror assembly described in an embodiment of the present invention at a viewing angle;

[0029] Figure 5 A partially enlarged structural schematic diagram of a tube mirror assembly according to an embodiment of the present invention;

[0030] Figure 6 A schematic diagram of the structure of the tube mirror assembly described in an embodiment of the present invention at another viewing angle;

[0031] Figure 7 A top view of the tube lens assembly according to an embodiment of the present invention;

[0032] Figure 8 A cross-sectional view of a partial structure of a tube mirror assembly according to an embodiment of the present invention;

[0033] Fig. 9 A schematic diagram of the structure of the pitch adjustment assembly according to an embodiment of the present invention;

[0034] Fig.10 A schematic diagram of the structure of the camera base and the camera at a viewing angle according to an embodiment of the present invention;

[0035] Fig.11 A schematic diagram of the structure of a camera adjustment assembly and a camera at a certain viewing angle according to an embodiment of the present invention;

[0036] Fig.12 A cross-sectional view of a partial structure of a camera adjustment assembly according to an embodiment of the present invention;

[0037] Fig.13 A schematic diagram of the structure of the camera adjustment assembly and the camera at another viewing angle according to an embodiment of the present invention;

[0038] Fig.14 A schematic diagram of the structure of the camera base and the camera in another viewing angle according to an embodiment of the present invention;

[0039] Fig.15 A schematic structural diagram of a partial structure of a polarization analyzer assembly according to an embodiment of the present invention at a viewing angle;

[0040] Fig.16 A schematic structural diagram of a partial structure of the polarization analyzer assembly described in an embodiment of the present invention from another perspective. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the invention more clear, the invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the invention and do not constitute a limitation of the invention.

[0042] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0043] In the description of the invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation and be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the invention, unless otherwise specified, "multiple" means two or more.

[0044] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0045] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0046] refer to Figures 1 to 14The optical detection device provided by the embodiment of the present invention includes: an objective lens 1, an analyzer assembly 3, a tube lens assembly and a camera 2 arranged in sequence along the optical axis AA1; the tube lens assembly includes a plurality of tube lenses 4, the plurality of tube lenses 4 are arranged in a direction perpendicular to the optical axis AA1, one of the plurality of tube lenses 4 is arranged in the light beam path between the objective lens 1 and the camera 2, and the tube lens 4 located in the light beam path is switchable; the analyzer assembly 3 includes a plurality of optical elements 32, one of the plurality of optical elements 32 is arranged in the light beam path, and the optical element 32 located in the light beam path is switchable.

[0047] The magnifications of the multiple tube lenses 4 in the tube lens assembly may be different, and the tube lens 4 with the required magnification may be switched into the light beam path between the objective lens 1 and the camera 2 according to the use requirements. In some examples, the tube lens assembly may include two tube lenses 4, and in other examples, the tube lens assembly may also include three or four tube lenses 4.

[0048] In some embodiments, reference Figure 1 and Figure 2 The optical detection device also includes a first shell 21 and a second shell 22. The partial polarization analyzer assembly 3 is arranged in a first accommodating cavity surrounded by the first shell 21, and extends from the first accommodating cavity to a second accommodating cavity surrounded by the second shell 22. The first accommodating cavity and the second accommodating cavity are connected to each other, and the tube mirror assembly is arranged in the second accommodating cavity.

[0049] In some embodiments, reference Figure 1 to Figure 2 The optical detection device also includes a base 10, an objective lens 1, a polarizing assembly 3 and a tube lens assembly are arranged on the base 10, and a camera 2 is arranged on the base 10 through a camera base.

[0050] In some embodiments, reference Figure 1 and Figure 2 , the optical axis AA1 has an angle with respect to the horizontal direction and the vertical direction, that is, the optical axis AA1 is tilted. It is understandable that when the optical axis AA1 is tilted, it is difficult to arrange the objective lens 1, the analyzer assembly 3, the tube lens assembly and the camera 2 along the optical axis AA1, align the various structures and switch the tube lens 4. The optical detection device provided in the embodiment of the present invention realizes the arrangement of the objective lens 1, the analyzer assembly 3, the tube lens assembly and the camera 2 along the tilted optical axis AA1 through the mounting structure such as the base 10, and simultaneously realizes the switching of the tube lens 4, thereby ensuring that the optical detection device has strong practicality.

[0051] In some examples, the objective lens 1 may be arranged on the base 10 by means of pin positioning combined with screw fixing. In some examples, the base 10 may be provided with a handle for moving the optical detection device.

[0052] In some embodiments, reference Figure 4 and Figure 5 The tube lens assembly further includes a tube lens bracket 46 and a tube lens switching motor 45. A plurality of tube lenses 4 are arranged on the tube lens bracket 46. The tube lens switching motor 45 is used to drive the tube lens bracket 46 to move along the arrangement direction of the tube lenses 4 to switch any tube lens 4 to the beam path. Switching of the tube lenses 4 is achieved through the tube lens switching motor 45, which is conducive to reducing the difficulty of switching the tube lenses 4.

[0053] In some examples, the tube lens support 46 is connected to the base 10 via a tube lens switching motor 45 .

[0054] In some embodiments, the tube lens 4 is arranged on the tube lens bracket 46 through a first adjustment structure, and the first adjustment structure can drive the tube lens 4 to move, so that the tube lens 4 can adjust the position along the optical axis AA1, adjust the pitch angle relative to the optical axis AA1, and adjust the yaw angle relative to the optical axis AA1. The first adjustment structure is a multi-dimensional adjustment mechanism of the tube lens 4. By setting the first adjustment structure, multi-dimensional angle adjustment or multi-dimensional position adjustment of the tube lens 4 can be achieved. In this way, the position or angle of the tube lens 4 can be adjusted in real time during the assembly process, so that the cooperation between the tube lens 4 and other components meets the requirements.

[0055] In some embodiments, reference Figures 4 to 5 The first adjustment structure includes a tube lens mounting plate 42 and a mounting bracket 41. The tube lens mounting plate 42 is arranged on the tube lens bracket 46. The tube lens 4 is arranged on the side of the tube lens mounting plate 42 away from the tube lens bracket 46 through the mounting bracket 41. The mounting bracket 41 is movable relative to the tube lens mounting plate 42 along the optical axis AA1 to achieve position adjustment of the tube lens 4 relative to the tube lens bracket 46 along the optical axis AA1.

[0056] In some embodiments, reference Figure 6 The tube lens mounting plate 42 has a first axial screw seat 422 and a second axial screw seat 424 which are arranged opposite to each other, and the first axial screw seat 422 and the second axial screw seat 424 are respectively located on opposite sides of the mounting bracket 41 in the direction of the optical axis AA1, the first axial screw 423 is assembled on the first axial screw seat 422, and the second axial screw 425 is assembled on the second axial screw seat 424; wherein, the mounting bracket 41 contacts the free end of the first axial screw 423 and the free end of the second axial screw 425 on opposite sides in the direction of the optical axis AA1, and the first axial screw 423 is rotated, and the second axial screw 425 is rotated accordingly, so that the mounting bracket 41 moves along the optical axis AA1 relative to the tube lens mounting plate 42. Specifically, the first axial screw 423 and the second axial screw 425 can be rotated in a preset direction, so that the mounting bracket 41 drives the tube lens 4 to move in a preset direction, and the preset direction can be the optical axis direction of the objective lens 1 pointing to the camera 2, or the optical axis direction of the camera 2 pointing to the objective lens 1.

[0057] In some embodiments, reference Figure 4 The mounting bracket 41 has a plurality of first pre-tightening mounting holes 408 penetrating the mounting bracket 41 along the thickness direction of the tube mirror mounting plate 42. The mounting bracket 41 is fixed to the tube mirror mounting plate 42 by using first pre-tightening screws matched with the first pre-tightening mounting holes 408. Along the optical axis AA1, the size of the first pre-tightening mounting holes 408 is larger than the size of the first pre-tightening screws. In this way, even if the mounting bracket 41 is displaced in the direction of the optical axis, the mounting bracket 41 can be fixed to the tube mirror mounting plate 42 by using the first pre-tightening screws.

[0058] In some embodiments, reference Figure 5 The tube lens bracket 46 has a support base 44, and the first adjustment structure also includes an adapter plate 43. The tube lens mounting plate 42 is arranged on the support base 44 through the adapter plate 43. The tube lens mounting plate 42 can rotate relative to the adapter plate 43 along the axial direction of the tube lens mounting plate 42, so that the tube lens 4 can adjust the swing angle relative to the optical axis AA1. The axial direction of the tube lens mounting plate 42 refers to the axial direction of the thickness direction of the tube lens mounting plate 42.

[0059] In some embodiments, reference Figure 8 The tube mirror mounting plate 42 has a rotating shaft 421 on one side facing the adapter plate 43, and the adapter plate 43 has a rotating shaft hole 410 matched with the rotating shaft 421 on one side facing the tube mirror mounting plate 42. By providing the matched rotating shaft 421 and the rotating shaft hole 410, the tube mirror mounting plate 42 can be rotated relative to the adapter plate 43, and the rotating structure is relatively simple and does not occupy a large installation space.

[0060] In some embodiments, reference Figure 6A first adjusting screw seat 431 and a second adjusting screw seat 432 are provided on one side of the adapter plate 43. The first adjusting screw seat 431 is equipped with a first adjusting screw 433, and the second adjusting screw seat 432 is equipped with a second adjusting screw 434. A middle baffle 421 is provided on one side of the tube mirror mounting plate 42. The first adjusting screw seat 431 and the second adjusting screw seat 432 are respectively arranged on opposite sides of the middle baffle 421 in the direction of the optical axis AA1, and opposite sides of the middle baffle 421 in the direction of the optical axis AA1 are respectively in contact with the free end of the first adjusting screw 433 and the free end of the second adjusting screw 434. The first adjusting screw 433 is rotated, and the second adjusting screw 434 is rotated accordingly, so that the tube mirror mounting plate 42 rotates relative to the adapter plate 43 along the axial direction of the tube mirror mounting plate 42. A first adjusting screw 433 and a second adjusting screw 434 located on both sides of the middle baffle 421 are used to form a top structure. By rotating one of the first adjusting screw 433 and the second adjusting screw 434 toward the middle baffle 421 and rotating the other in a direction away from the middle baffle 421, the tube mirror mounting plate 42 can be rotated relative to the adapter plate 43, and then the tube mirror mounting plate 42 drives the tube mirror 4 to rotate axially along the thickness direction of the tube mirror mounting plate 42, thereby realizing the adjustment of the swing angle of the tube mirror 4.

[0061] In some embodiments, the inclination angle of the adapter plate 43 relative to the support base 44 is adjustable, so as to achieve the pitch angle adjustment of the tube lens 4 relative to the optical axis AA1.

[0062] In some embodiments, reference Figure 7 and Fig. 9 The adapter plate 43 is a rectangular plate, and the four corners of the adapter plate 43 serve as a pitch adjustment seat 401. The pitch adjustment seat 401 has a pitch adjustment screw hole for assembling a pitch adjustment assembly 402. The pitch adjustment assembly 402 includes a body 4021, a spherical gasket 4024, and a pitch screw 4022. The body 4021 has a mounting hole. The pitch screw 4022 is assembled in the mounting hole to connect the body 4021 with the support base 44. The spherical gasket 4024 is sleeved on the outer ring of the pitch screw 4022. The spherical gasket 4024 is located between the body 4021 and the support base 44. The spherical gasket 4024 is a semicircular structure protruding toward the body 4021. The body 4021 has an arc-shaped depression matched with the spherical gasket 4024 on one side facing the spherical gasket 4024. The outer ring of the body 4021 has a first thread matched with the pitch adjustment screw hole. The body 4021 is assembled in the pitch adjustment screw hole through the first thread. The body 4021 is rotated to adjust the inclination angle of the adapter plate 43 relative to the support base 44. It should be noted that in the process of adjusting the inclination angle of the adapter plate 43, the pitch adjustment components 402 corresponding to the four pitch adjustment seats 401 need to be adjusted accordingly according to the adjustment requirements.

[0063] In some embodiments, reference Fig. 9 The pitch adjustment assembly 402 also includes a screw gasket 4023. The mounting hole includes a first through hole 4026 and a second through hole 4025 that are connected to each other. The aperture of the first through hole 4026 is smaller than the aperture of the second through hole 4025. The nut end of the pitch screw 4022 is located in the second through hole 4025. The free end of the pitch screw 4022 passes through the first through hole 4026. The screw gasket 4023 is sleeved on the pitch screw 4022 and is located at the corner area where the second through hole 4025 and the first through hole 4026 are connected, which is beneficial to reduce the resistance when the main body 4021 rotates.

[0064] In some embodiments, the end of the body 4021 away from the spherical gasket 4024 has a notch. By inserting a corresponding adjustment tool into the notch, the adjustment tool can be engaged on the body 4021, and then the adjustment tool can be used to apply external force to drive the body 4021 to rotate, which helps to reduce the difficulty of adjustment.

[0065] In some embodiments, reference Figure 6 Each pitch adjustment seat 401 has a limit installation hole for assembling a spring and a limit member 403. The limit member 403 is connected to the support base 44 through a spring. The limit member 403 and the spring apply a force to the adapter plate 43 in the thickness direction of the adapter plate 43 to limit the adapter plate 43.

[0066] In some embodiments, reference Figure 6 and Figure 7 The adapter plate 43 has first notches 406 and corresponding first positioning pieces 404 at both opposite ends arranged along the optical axis AA1. The first notch 406 is located between the two pitch adjustment seats 401. The first positioning piece 404 is located on the side of the first notch 406 facing the support base 44. The first positioning piece is fixed to the support base 44 by a first positioning member. By providing the first notch 406, the adapter plate 43 and the support base 44 can be fixed without increasing the volume of the adapter plate 43. The first positioning piece 404 and the first positioning piece used for fixing are both provided in the first notch 406, so that too much space will not be occupied.

[0067] In some examples, the first positioning member may include a pin and a screw, and the first positioning piece 404 may be fixed to the support base 44 by a combination of pin positioning and screw fixing.

[0068] In some embodiments, reference Figure 6 and Figure 7The adapter plate 43 has a first adjusting screw seat 431 and a second adjusting screw seat 432 on one side thereof, and has a second notch 407 and a corresponding second positioning piece 405. The first adjusting screw seat 431 and the second adjusting screw seat 432 are arranged in the second notch 407, and the second positioning piece 405 is located on the side of the second notch 407 facing the support base 44, and the second positioning piece is used to fix the two positioning pieces on the support base 44. In this way, the first adjusting screw seat 431 and the second adjusting screw seat 432 are prevented from protruding from the adapter plate 43, thereby preventing the first adjusting screw seat 431 and the second adjusting screw seat 432 from occupying too much space.

[0069] In some examples, the second positioning member may include a pin and a screw, and the second positioning piece 405 may be fixed to the support base 44 by a combination of pin positioning and screw fixing.

[0070] In some embodiments, reference Figure 3 The polarization analyzer assembly 3 also includes a first rotating motor 31 and a rotating wheel 33. The rotating wheel 33 is connected to the first rotating motor 31. A plurality of optical elements 32 are arranged at intervals on the rotating wheel 33. The first rotating motor 31 drives the rotating wheel 33 to rotate to switch the optical element 32 located in the light beam path.

[0071] In some embodiments, the analyzer assembly 3 further includes an analyzer base 35 and a connecting portion 36 . The analyzer base 35 is disposed on the base 10 , and the first rotary motor 31 is connected to the analyzer base 35 via the connecting portion 36 .

[0072] In some embodiments, the polarization analyzer assembly 3 further includes a second rotating motor 34, the plurality of optical elements 32 include at least one polarization optical element, the polarization optical element is mounted on the rotating wheel 33 via the second rotating motor 34, and the second rotating motor 34 can drive the polarization optical element to rotate along the axial direction of the polarization optical element. In some examples, the polarization optical element can be rotated 360 degrees along the axial direction of the polarization optical element.

[0073] In some embodiments, reference Fig.15 and Fig.16 The plurality of optical elements 32 include a first optical element 321 and a second optical element 322. The number of the first optical element 321 can be multiple, the number of the second optical element 322 can be one, the second optical element 322 is a polarization optical element, and the first optical element 321 can be a window plate, a filter, or an attenuation plate. In some examples, the number of the optical elements 32 is five, including four first optical elements 321 and one second optical element 322. The two sides of the second optical element 322 are respectively provided with two first optical elements 321, and the second optical element 322 is mounted on the rotating wheel 33 through the second rotating motor 34.

[0074] The advantage of setting a rotatable polarization optical element on the rotating wheel 33 is that the transmission direction can be changed by rotating the polarization optical element. In this way, different transmission directions can be selected in different scenes, so that light with different polarization directions can be transmitted through the polarization optical element, avoiding the need to set up multiple polarization optical elements with different transmission directions, which is beneficial to reducing the setting space of the optical element 32.

[0075] In some embodiments, the rotating wheel 33 has multiple first mounting holes 324 and one second mounting hole 323, the first optical element 321 is opposite to the first mounting hole 324, and the first optical element 321 is arranged on the side of the rotating wheel 33 facing the objective lens 1, the second rotating motor 34 is opposite to the second mounting hole 323, and the second rotating motor 34 is arranged on the side of the rotating wheel 33 facing the camera 2, and the second rotating motor 34 extends from the second mounting hole 323 to the side of the rotating wheel 33 facing the objective lens 1, so that the second optical element 322 is arranged coplanar with the multiple first optical elements 321, wherein the aperture of the second mounting hole 323 is larger than the aperture of the first mounting hole 324. In some examples, the first mounting hole 324 is circular and the second mounting hole 323 is irregular in shape. It should be noted that the embodiment of the present invention does not limit the shape of the second mounting hole 323, as long as a portion of the second rotating motor 34 can extend from the second mounting hole 323 to the side of the rotating wheel 33 toward the objective lens 1, and the second optical element 322 is arranged coplanar with the multiple first optical elements 321.

[0076] In some embodiments, reference Fig.10 The camera base includes a base body 201 and a camera adjustment component. The base body 201 is set on the base 10. The base body 201 is set on the base 10. The camera 2 is set on the base body 201 through the camera adjustment component. The camera adjustment component can drive the camera 2 to move so that the camera 2 can adjust its position along the optical axis AA1, adjust its rotation along the optical axis AA1, adjust its position on a plane perpendicular to the optical axis AA1, and adjust its yaw angle relative to the optical axis AA1.

[0077] In some embodiments, reference Fig.11 and Fig.12The camera adjustment assembly includes a camera bracket 205 and a first adjustment plate 206, the camera 2 is arranged on the camera bracket 205, the camera bracket 205 is arranged on the first adjustment plate 206, one side of the camera bracket 205 has a first rotating screw seat 215 and a second rotating screw seat 245 which are arranged opposite to each other, the first rotating screw seat 215 is used to assemble the first rotating screw 225, and the second rotating screw seat 245 is used to assemble the second rotating screw 235; the first adjustment plate 206 has a rotating adjustment baffle 236, and the rotating adjustment baffle 236 is located between the first rotating screw seat 215 and the second rotating screw seat 245; wherein, the opposite sides of the rotating adjustment baffle 236 are in contact with the free ends of the first rotating screw 225 and the free ends of the second rotating screw 235 respectively, the first rotating screw 225 is rotated, and the second rotating screw 235 is rotated accordingly, so that the camera bracket 205 rotates along the optical axis AA1 relative to the first adjustment plate 206, and then the camera 2 rotates along the optical axis AA1. The rotation adjustment baffle 236 , the first rotation screw 225 and the second rotation screw 235 form a top-to-top structure.

[0078] In some embodiments, reference Fig.12 The first adjustment plate 206 has a rotating shaft on one side facing the camera bracket 205 , and the camera bracket 205 has a rotating shaft groove on one side facing the first adjustment plate 206 that cooperates with the rotating shaft, so as to facilitate the first adjustment plate 206 to rotate relative to the camera bracket 205 .

[0079] In some embodiments, reference Fig.11 and Fig.12 The camera adjustment assembly also includes a second adjustment plate 207, the first adjustment plate 206 is arranged on the second adjustment plate 207, one side of the first adjustment plate 206 has a yaw adjustment screw seat 216, the yaw adjustment screw seat 216 has a rotation adjustment baffle 236, and the yaw adjustment screw seat 216 is used to assemble the yaw adjustment screw 226, the free end of the yaw adjustment screw 226 abuts the second adjustment plate 207, and the yaw adjustment screw 226 is rotated to make the first adjustment plate 206 tilt relative to the second adjustment plate 207, so as to realize the yaw angle adjustment of the camera 2.

[0080] In some embodiments, reference Fig.10 and Fig.13 The camera adjustment component also includes a moving motor 204 and a motor bracket 203. The opposite sides of the moving motor 204 are respectively connected to the camera bracket 205 and the motor bracket 203. The moving motor 204 is used to drive the camera bracket 205 to move relative to the motor bracket 203 along the direction of the optical axis AA1 to achieve the position adjustment of the camera 2 along the direction of the optical axis AA1.

[0081] In some embodiments, reference Fig.13 and Fig.14The camera adjustment assembly also includes a third adjustment plate 202, a motor bracket 203 is arranged on the third adjustment plate 202, and the third adjustment plate 202 is arranged on the base body 201. The third adjustment plate 202 has a short side adjustment screw seat 282, and the short side adjustment screw seat 282 is used to assemble the short side adjustment screw 292. The free end of the short side adjustment screw 292 is connected to the motor bracket 203. The short side adjustment screw 292 is rotated to make the motor bracket 203 move relative to the third adjustment plate 202 along the first direction C perpendicular to the optical axis AA1.

[0082] In some embodiments, reference Fig.13 and Fig.14 The base body 201 has a first long side adjusting screw seat 212 and a second long side adjusting screw seat 232. The first long side adjusting screw seat 212 is used to assemble the first long side adjusting screw 222, and the second long side adjusting screw seat 232 is used to assemble the second long side adjusting screw 242. The first long side adjusting screw seat 212 and the second long side adjusting screw seat 232 are located on opposite sides of the third adjusting plate 202. The third adjusting plate 202 has a first abutting portion 262 and a second abutting portion 252. The free end of the first long side adjusting screw 222 contacts the first abutting portion 262, and the free end of the second long side adjusting screw 242 contacts the second abutting portion 252. Rotate the first long side adjusting screw 222 and rotate the second long side adjusting screw 242 accordingly, so that the third adjusting plate 202 moves relative to the base body 201 along the second direction B perpendicular to the optical axis AA1, and the plane where the first direction C and the second direction B are located is a plane perpendicular to the optical axis AA1.

[0083] In some embodiments, reference Fig.13 and Fig.14 The third adjustment plate 202 has a guide groove extending along the second direction B on one side away from the motor bracket 203, and the guide shaft 272 is arranged in the guide groove, and the two ends of the guide shaft 272 are respectively fixed on the base body 201. In this way, when the third adjustment plate 202 moves along the second direction B relative to the base body 201, the guide shaft 272 can play a guiding role.

[0084] In the optical detection device provided by an embodiment of the present invention, by switching multiple tube lenses behind the objective lens, the tube lens with the required magnification can be switched into the light beam path of the optical detection device, and at the same time, the required optical element can be selected from multiple optical elements to switch into the light beam path of the optical detection device, which is beneficial to improving the adaptability of the optical detection device to different working conditions; in addition, the tube lens is equipped with a multi-dimensional adjustment mechanism, which can realize multi-dimensional angle adjustment or multi-dimensional position adjustment of the tube lens; the camera is also equipped with a multi-dimensional adjustment mechanism, which can realize multi-dimensional angle adjustment or multi-dimensional position adjustment of the camera.

[0085] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the disclosure of the present invention can be performed in parallel, sequentially or in different orders, as long as the desired results of the technical solution disclosed in the present invention can be achieved, and this document does not limit this.

[0086] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An optical detection device, characterized in that: include: An objective lens (1), a polarization analyzer assembly (3), a tube lens assembly, and a camera (2) are sequentially arranged along the optical axis; The tube lens assembly comprises a plurality of tube lenses (4), the plurality of tube lenses (4) being arranged in a direction perpendicular to the optical axis, one tube lens (4) among the plurality of tube lenses (4) being arranged in a light beam path between the objective lens (1) and the camera (2), and the tube lens (4) located in the light beam path being switchable; The polarization analyzer assembly (3) comprises a plurality of optical elements (32), one of the optical elements (32) being arranged in the light beam path, and the optical element (32) located in the light beam path is switchable.

2. The optical detection device according to claim 1, characterized in that: The optical detection device also includes a base (10), the objective lens (1), the polarization analyzer assembly (3) and the tube lens assembly are arranged on the base (10), and the camera (2) is arranged on the base (10) via a camera base.

3. The optical detection device according to claim 1, characterized in that: The tube lens assembly further comprises a tube lens bracket (46) and a tube lens switching motor (45); the plurality of tube lenses (4) are arranged on the tube lens bracket (46); and the tube lens switching motor (45) is used to drive the tube lens bracket (46) to move along the arrangement direction of the tube lenses (4) so ​​as to switch any tube lens (4) into the light beam path.

4. The optical detection device according to claim 3, characterized in that: The tube lens (4) is arranged on the tube lens bracket (46) via a first adjustment structure, and the first adjustment structure can drive the tube lens (4) to move, so that the tube lens (4) can be adjusted in position along the optical axis direction, in pitch angle relative to the optical axis, and in yaw angle relative to the optical axis.

5. The optical detection device according to claim 4, characterized in that: The first adjustment structure comprises a tube mirror mounting plate (42) and a mounting bracket (41); the tube mirror mounting plate (42) is arranged on the tube mirror bracket (46); the tube mirror (4) is arranged on a side of the tube mirror mounting plate (42) away from the tube mirror bracket (46) through the mounting bracket (41); the mounting bracket (41) is movable relative to the tube mirror mounting plate (42) along the optical axis direction, so as to achieve position adjustment of the tube mirror (4) relative to the tube mirror bracket (46) along the optical axis direction.

6. The optical detection device according to claim 5, characterized in that: The tube mirror mounting plate (42) has a first axial screw seat (422) and a second axial screw seat (424) which are arranged opposite to each other, and the first axial screw seat (422) and the second axial screw seat (424) are respectively located on opposite sides of the mounting bracket (41) in the direction of the optical axis, the first axial screw (423) is assembled on the first axial screw seat (422), and the second axial screw (425) is assembled on the second axial screw seat (424); The mounting bracket (41) is in contact with the free end of the first axial screw (423) and the free end of the second axial screw (425) at opposite sides along the optical axis, respectively. The first axial screw (423) is rotated, and the second axial screw (425) is rotated accordingly, so that the mounting bracket (41) moves relative to the tube mirror mounting plate (42) along the optical axis.

7. The optical detection device according to claim 5, characterized in that: The tube mirror bracket (46) has a supporting base (44), and the first adjustment structure also includes an adapter plate (43). The tube mirror mounting plate (42) is arranged on the supporting base (44) through the adapter plate (43), and the tube mirror mounting plate (42) is rotatable relative to the adapter plate (43) along the axial direction of the tube mirror mounting plate (42), so that the tube mirror (4) can adjust the swing angle relative to the optical axis.

8. The optical detection device according to claim 7, characterized in that: The inclination angle of the adapter plate (43) relative to the support base (44) is adjustable, so as to achieve adjustment of the elevation angle of the tube lens (4) relative to the optical axis; The adapter plate (43) is a rectangular plate, and the four corners of the adapter plate (43) serve as pitch adjustment seats (401). The pitch adjustment seats (401) have pitch adjustment screw holes for assembling a pitch adjustment assembly (402); The pitch adjustment assembly (402) comprises a body (4021), a spherical gasket (4024) and a pitch screw (4022); the body (4021) has a mounting hole; the pitch screw (4022) is assembled in the mounting hole to connect the body (4021) with the support base (44); the spherical gasket (4024) is sleeved on the outer ring of the pitch screw (4022) and is located between the body (4021) and the support base (44); the spherical gasket (4024) is a semicircular structure protruding toward the body (4021); and the body (4021) has an arc-shaped depression on one side facing the spherical gasket (4024) and matching with the spherical gasket (4024); The outer ring of the main body (4021) has a first thread that cooperates with the pitch adjustment screw hole, and the main body (4021) is assembled in the pitch adjustment screw hole through the first thread. The main body (4021) is rotated to achieve adjustment of the inclination angle of the adapter plate (43) relative to the support base (44).

9. The optical detection device according to claim 2, characterized in that: The polarization analyzer assembly (3) further comprises a first rotating motor (31) and a rotating wheel (33), wherein the rotating wheel (33) is connected to the first rotating motor (31), a plurality of optical elements (32) are arranged at intervals on the rotating wheel (33), and the first rotating motor (31) drives the rotating wheel (33) to rotate so as to switch the optical element (32) located in the light beam path.

10. The optical detection device according to claim 9, characterized in that: The analyzer assembly (3) further comprises an analyzer base (35) and a connecting portion (36); the analyzer base (35) is arranged on the base (10); and the first rotating motor (31) is connected to the analyzer base (35) via the connecting portion (36).

11. The optical detection device according to claim 9, characterized in that: The polarization analyzer assembly (3) further comprises a second rotating motor (34); the plurality of optical elements (32) comprise at least one polarization optical element; the polarization optical element is mounted on the rotating wheel (33) via the second rotating motor (34); the second rotating motor (34) can drive the polarization optical element to rotate along the axial direction of the polarization optical element.

12. The optical detection device according to claim 2, characterized in that: The camera base comprises a base body (201) and a camera adjustment component, wherein the base body (201) is arranged on the base (10), and the camera (2) is arranged on the base body (201) via the camera adjustment component, and the camera adjustment component can drive the camera (2) to move, so that the camera (2) can be adjusted in position along the optical axis, in rotation along the optical axis, in position on a plane perpendicular to the optical axis, and in a yaw angle relative to the optical axis.

13. The optical detection device according to claim 12, characterized in that: The camera adjustment assembly comprises a camera support (205) and a first adjustment plate (206), the camera (2) is arranged on the camera support (205), the camera support (205) is arranged on the first adjustment plate (206), one side of the camera support (205) has a first rotating screw seat (215) and a second rotating screw seat (245) arranged opposite to each other, the first rotating screw seat (215) is used to assemble a first rotating screw (225), and the second rotating screw seat (245) is used to assemble a second rotating screw (235); The first adjustment plate (206) has a rotation adjustment baffle (236), and the rotation adjustment baffle (236) is located between the first rotation screw seat (215) and the second rotation screw seat (245); The opposite sides of the rotation adjustment baffle (236) are in contact with the free end of the first rotation screw (225) and the free end of the second rotation screw (235) respectively, and the first rotation screw (225) is rotated, and the second rotation screw (235) is rotated accordingly, so that the camera bracket (205) rotates along the optical axis relative to the first adjustment plate (206), thereby rotating the camera (2) along the optical axis.

14. The optical detection device according to claim 13, characterized in that: The camera adjustment assembly also includes a second adjustment plate (207), the first adjustment plate (206) is arranged on the second adjustment plate (207), one side of the first adjustment plate (206) is provided with a yaw adjustment screw seat (216), the yaw adjustment screw seat (216) has the rotation adjustment baffle (236), and the yaw adjustment screw seat (216) is used to assemble the yaw adjustment screw (226), the free end of the yaw adjustment screw (226) abuts against the second adjustment plate (207), and the yaw adjustment screw (226) is rotated to make the first adjustment plate (206) tilt relative to the second adjustment plate (207), so as to achieve the yaw angle adjustment of the camera (2).

15. The optical detection device according to claim 14, characterized in that: The camera adjustment assembly also includes a moving motor (204) and a motor bracket (203), wherein opposite sides of the moving motor (204) are respectively connected to the camera bracket (205) and the motor bracket (203), and the moving motor (204) is used to drive the camera bracket (205) to move relative to the motor bracket (203) along the direction of the optical axis, so as to achieve position adjustment of the camera (2) along the direction of the optical axis.

16. The optical detection device according to claim 15, characterized in that: The camera adjustment assembly also includes a third adjustment plate (202), the motor bracket (203) is arranged on the third adjustment plate (202), and the third adjustment plate (202) is arranged on the base body (201), the third adjustment plate (202) has a short side adjustment screw seat (282), the short side adjustment screw seat (282) is used to assemble the short side adjustment screw (292), the free end of the short side adjustment screw (292) is connected to the motor bracket (203), and the short side adjustment screw (292) is rotated to make the motor bracket (203) move relative to the third adjustment plate (202) along a first direction perpendicular to the optical axis.

17. The optical detection device according to claim 16, characterized in that: The base body (201) has a first long side adjusting screw seat (212) and a second long side adjusting screw seat (232), wherein the first long side adjusting screw seat (212) is used to assemble the first long side adjusting screw (222), and the second long side adjusting screw seat (232) is used to assemble the second long side adjusting screw (242), and the first long side adjusting screw seat (212) and the second long side adjusting screw seat (232) are located on opposite sides of the third adjusting plate (202); The third adjustment plate (202) has a first abutment portion (262) and a second abutment portion (252), the free end of the first long side adjustment screw (222) contacts the first abutment portion (262), and the free end of the second long side adjustment screw (242) contacts the second abutment portion (252), and the first long side adjustment screw (222) is rotated, and the second long side adjustment screw (242) is rotated accordingly, so that the third adjustment plate (202) moves relative to the base body (201) along a second direction perpendicular to the optical axis, and the plane where the first direction and the second direction are located is a plane perpendicular to the optical axis.

Images