Micron-sized electric continuous adjustable slit device and optical device

Abstract

The invention provides a micron-sized electric continuous adjustable slit device and an optical device, and belongs to the technical field of adjustable slits. The device comprises a mounting plate and a slit adjusting mechanism mounted on one side wall of the mounting plate, and the slit adjusting mechanism comprises a first guide rail and a second guide rail which are parallel to each other and are axially and movably arranged on the side wall of the mounting plate; one of the first slit blade and the second slit blade is arranged on the first guide rail, and the other one of the first slit blade and the second slit blade is arranged on the second guide rail; the screw rod motor is arranged on one side of the mounting plate; the lead screw motor drives the first guide rail and the second guide rail to move in the opposite directions in the axial direction of the mounting plate through the transmission assembly so as to drive the first slit blade and the second slit blade to move in the opposite moving directions, and the slit distance formed between the first slit blade and the second slit blade is adjusted. According to the micron-sized electric continuous adjustable slit device and the optical device, high-precision continuous bidirectional adjustment of the slit width is realized.

Description

Technical Field

[0001] The present disclosure relates to the technical field of adjustable slits, and in particular to a micron-level electrically continuously adjustable slit device and an optical device. Background Art

[0002] In the field of optical instrument application technology, a slit refers to a gap formed by a pair of partitions in the light path. It determines the luminous flux of the incident light beam, thereby controlling the intensity of the outgoing light beam and playing the role of a light barrier. The parallelism, symmetry, opening and closing uniformity, and slit width of the slit opening have an important influence on the performance of the slit. Currently, slits mainly include fixed-width slits and adjustable slits.

[0003] In the prior art, in compact optical devices such as spectrometers, slit adjustment includes manual adjustment and lead screw motor adjustment. Manual adjustment is performed by a micrometer-like sub-head, which has low precision and is difficult to operate. The current lead screw motor has a precision of more than 5um, which is difficult to meet the high-precision requirements of the spectrometer slit that can be continuously adjusted every 1um above 25um. Summary of the invention

[0004] The purpose of the present disclosure is to overcome the deficiencies of the above-mentioned prior art and provide a micron-level electrically continuously adjustable slit device and an optical device to achieve high-precision continuous bidirectional adjustment of the slit width and improve the stability of the slit width adjustment.

[0005] In order to achieve the above-mentioned invention object, the present invention adopts the following technical solutions: A micron-level electrically continuously adjustable slit device comprises a mounting plate and a slit adjustment mechanism mounted on a side wall of the mounting plate, wherein the slit adjustment mechanism comprises: A first guide rail and a second guide rail are arranged on the side wall of the mounting plate in parallel and axially movable manner; A first slit blade and a second slit blade are parallel and symmetrical to each other, one of which is arranged on the first guide rail, and the other is arranged on the second guide rail; A screw motor is arranged on one side of the mounting plate; The screw motor drives the first guide rail and the second guide rail to move in opposite directions along the axial direction of the mounting plate through the transmission assembly, so as to drive the first slit blade and the second slit blade to move in opposite directions to each other, thereby adjusting the slit spacing formed between the first slit blade and the second slit blade.

[0006] In an exemplary embodiment of the present disclosure, the transmission assembly comprises: A wedge block is movably arranged on a side wall of the mounting plate, and the wedge block is located on one side of the first guide rail and the second guide rail; A connecting rod, rotatably disposed on one side wall of the mounting plate, the connecting rod being located on the other side of the first guide rail and the second guide rail; A spring bolt, movably arranged on a side wall of the mounting plate, the spring bolt is located on a side of the second guide rail away from the connecting rod, one end of the spring bolt abuts against the second guide rail, and the other end of the spring bolt extends out of the mounting plate and is threadedly connected to the mounting plate; The screw motor can drive the wedge block to reciprocate in the mounting plate, and the wedge block drives the first guide rail and the first slit blade to move when moving. The first guide rail can drive the connecting rod to rotate, so that the second guide rail and the second slit blade move in opposite directions.

[0007] In an exemplary embodiment of the present disclosure, a groove is formed on the mounting plate, a guide rod is disposed in the groove, and the wedge block is movably sleeved on the guide rod; The screw motor is located below the mounting plate, the output shaft of the screw motor extends into the groove and is threadedly connected to the wedge block, and the screw motor can drive the wedge block to reciprocate along the guide rod in the groove.

[0008] In an exemplary embodiment of the present disclosure, the mounting plate is provided with a first guide groove and a second guide groove which are parallel to each other and extend in the length direction, and the mounting plate is further provided with a third guide groove which extends in the width direction, and the two ends of the third guide groove are respectively connected with the first guide groove and the second guide groove, and the first guide groove is connected with the groove; The first guide rail is movably disposed in the first guide groove, the second guide rail is movably disposed in the second guide groove, one end of the first guide rail extends into the groove and abuts against the inclined surface of the wedge block through the first ball; The connecting rod is rotatably installed in the third guide groove through a fixed hinge shaft, and second balls are respectively arranged at both ends of the connecting rod, and the two ends of the connecting rod are respectively abutted against the first guide rail and the second guide rail through the second balls; The spring bolt is movably arranged in the second guide groove, one end of the spring bolt abuts against the second guide rail, and the other end of the spring bolt extends out of the mounting plate and is threadedly connected to the mounting plate.

[0009] In an exemplary embodiment of the present disclosure, a limiting block is provided at one end of the first guide rail extending into the groove, and a guide groove extending along the axis is formed on the inclined surface of the wedge block, and the guide groove and the limiting block can clamp the first ball to transmit the movement of the wedge block to the first guide rail.

[0010] In an exemplary embodiment of the present disclosure, at least one through hole is respectively formed on the inner wall of the first guide groove and the second guide groove on the side away from each other, and a ball-shaped bolt is connected to the inner thread of the through hole; The ball-shaped bolt on the inner wall of the first guide groove abuts against the first guide rail, and the ball-shaped bolt on the inner wall of the second guide groove abuts against the second guide rail.

[0011] In an exemplary embodiment of the present disclosure, at least one guide hole extending in the width direction is respectively formed on the first slit blade and the second slit blade, and at least one connection hole corresponding to the guide hole is respectively formed on the first guide rail and the second guide rail; The first slit blade and the first guide rail, as well as the second slit blade and the second guide rail are connected via at least one screw, and the screw is sequentially inserted into the guide hole and the connection hole.

[0012] In an exemplary embodiment of the present disclosure, magnets are respectively disposed on the first slit blade and the second slit blade, and magnetic induction sensors corresponding to the magnets are disposed on the mounting plate.

[0013] In an exemplary embodiment of the present disclosure, an exit hole is provided on one side wall of the mounting plate, and the exit hole is located between the first guide rail and the second guide rail; A plurality of mounting holes are evenly distributed circumferentially along the outer edge of the exit hole, and the mounting holes are opened on the mounting plate. A spring is arranged on the side of the mounting hole away from the opening, and a marble is movably arranged on the side of the mounting hole close to the opening, and the spring abuts against the first slit blade and the second slit blade through the marble.

[0014] An optical device comprises the micrometer-level electrically continuously adjustable slit device described in any one of the above embodiments.

[0015] Beneficial effects of the present disclosure: The present invention provides a micron-level electrically continuously adjustable slit device and an optical device, which drive a finely machined wedge structure to move longitudinally through a closed-loop lead screw motor, so that a first slit blade and a second slit blade that are parallel and symmetrical to each other are simultaneously moved closer to or farther from each other, and the control of the slit width is converted into the control of the lead screw step change amount, thereby improving the width parallelism, symmetry, and opening and closing uniformity of the slit opening, improving the slit width adjustment precision and stability, realizing bidirectional automatic adjustment of the slit width, and further realizing continuous high-precision bidirectional adjustment of the slit width. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings herein are incorporated into the specification and constitute a part of the specification, illustrate embodiments consistent with the present disclosure, and together with the specification are used to explain the principles of the present disclosure. Obviously, the accompanying drawings described below are only some embodiments of the present disclosure, and for ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without creative work.

[0017] Figure 1 This is a schematic structural diagram of a micrometer-level electrically continuously adjustable slit device in one embodiment of the present disclosure; Figure 2 A cross-sectional view of a micrometer-scale electrically continuously adjustable slit device in one embodiment of the present disclosure; Figure 3 This is a structural schematic diagram of a mounting plate in one embodiment of the present disclosure; Figure 4 This is a schematic structural diagram of a first guide rail in one embodiment of the present disclosure; Figure 5 This is a schematic diagram of the structure of a first slit blade in one embodiment of the present disclosure; Figure 6 This is a schematic diagram of the structure of a wedge block in one embodiment of the present disclosure.

[0018] Description of reference numerals: 1. Mounting plate; 2. First guide rail; 3. Second guide rail; 4. First slit blade; 5. Second slit blade; 6. Lead screw motor; 7. Wedge block; 8. Connecting rod; 9. Spring bolt; 10. Groove; 11. Guide rod; 12. First guide groove; 13. Second guide groove; 14. Third guide groove; 15. First sphere; 16. Fixed hinge shaft; 17. Second sphere; 18. Limit block; 19. Guide groove; 20. Through hole; 21. Ball bolt; 22. Guide hole; 23. Connecting hole; 24. Screw; 25. Magnet; 26. Exit hole; 27. Mounting hole; 28. Marble; 29. ​​Mounting seat. DETAILED DESCRIPTION

[0019] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that the present disclosure will be comprehensive and complete and fully convey the concepts of the example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their detailed description will be omitted. In addition, the drawings are only schematic illustrations of the present disclosure and are not necessarily drawn to scale.

[0020] Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of the illustration to another component, these terms are used in this specification only for convenience, such as according to the orientation of the examples described in the drawings. It is understood that if the device of the illustration is turned upside down, the component described as "upper" will become the component "lower". When a structure is "on" other structures, it may mean that the structure is formed integrally on the other structure, or that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure through another structure.

[0021] The terms "a", "an", "the", "said" and "at least one" are used to indicate the presence of one or more elements / components / etc.; the terms "including" and "having" are used to express an open-ended inclusive meaning and mean that additional elements / components / etc. may exist in addition to the listed elements / components / etc.; the terms "first", "second" and "third" etc. are used merely as labels and are not intended to limit the quantity of their objects.

[0022] The present disclosure provides a micrometer-level electrically continuously adjustable slit device, see Figures 1 to 6 , including a mounting plate 1 and a slit adjustment mechanism installed on a side wall of the mounting plate 1, the slit adjustment mechanism including: a first guide rail 2 and a second guide rail 3, which are parallel to each other and axially movable on the side wall of the mounting plate 1; a first slit blade 4 and a second slit blade 5 which are parallel to each other and symmetrical to each other, one of which is arranged on the first guide rail 2 and the other is arranged on the second guide rail 3; a screw motor 6, which is arranged on one side of the mounting plate 1; the screw motor 6 drives the first guide rail 2 and the second guide rail 3 to move in opposite directions along the axial direction of the mounting plate 1 through a transmission component, so as to drive the first slit blade 4 and the second slit blade 5 to move in opposite directions to each other, thereby adjusting the slit spacing formed between the first slit blade 4 and the second slit blade 5.

[0023] In the disclosed embodiment, the micron-level electrically-operated continuously adjustable slit device is composed of a mounting plate 1 and a slit adjustment mechanism mounted on the mounting plate 1, wherein the slit adjustment mechanism is composed of a first guide rail 2, a second guide rail 3, a first slit blade 4, a second slit blade 5, a screw motor 6 and a transmission assembly, an exit hole 26 is opened on the mounting plate 1, the first guide rail 2 and the second guide rail 3 are movably arranged on the side wall of the mounting plate 1 along the axial direction of the mounting plate 1, and the first guide rail 2 and the second guide rail 3 are distributed on both sides of the exit hole 26 in parallel with each other, one of the first slit blade 4 and the second slit blade 5 is mounted on the first guide rail 2, and the other of the first slit blade 4 and the second slit blade 5 is mounted on the second guide rail 3, The first slit blade 4 and the second slit blade 5 are parallel and symmetrical to each other, and the edge ends of the first slit blade 4 and the second slit blade 5 are close to each other to form a slit. The screw motor 6 is installed outside the mounting plate 1, and the transmission assembly is installed on a side wall of the mounting plate 1. The transmission assembly is driven by the screw motor 6 to move, thereby driving the first guide rail 2 and the second guide rail 3 to move, so that the first guide rail 2 and the second guide rail 3 move laterally along the axial direction on the mounting plate 1, and the first guide rail 2 and the second guide rail 3 move in opposite directions, driving the first slit blade 4 and the second slit blade 5 to move in opposite directions along the axial direction of the mounting plate 1, so that the slit spacing between the first slit blade 4 and the second slit blade 5 changes, thereby realizing bilateral adjustment of the slit width.

[0024] Compared with the existing manual slit adjustment and lead screw motor adjustment, the micron-level electric continuously adjustable slit device drives the transmission component to move through a closed-loop lead screw motor, so that the first slit blade and the second slit blade, which are parallel and symmetrical to each other, approach or move away from each other at the same time, and convert the control of the slit width into the control of the lead screw step change amount, thereby improving the width parallelism, symmetry, and uniformity of the slit opening, improving the slit width adjustment accuracy and stability, realizing bidirectional automatic adjustment of the slit width, and further realizing continuous high-precision bidirectional adjustment of the slit width.

[0025] In one embodiment of the present disclosure, see Figure 1 , the first slit blade 4 is arranged on the first guide rail 2 , and the second slit blade 5 is arranged on the second guide rail 3 .

[0026] In one embodiment of the present disclosure, see Figure 1 and Figure 2The transmission assembly includes: a wedge block 7, which is movably arranged on one side wall of the mounting plate 1, and the wedge block 7 is located on one side of the first guide rail 2 and the second guide rail 3; a connecting rod 8, which is rotatably arranged on one side wall of the mounting plate 1, and the connecting rod 8 is located on the other side of the first guide rail 2 and the second guide rail 3; a spring bolt 9, which is movably arranged on one side wall of the mounting plate 1, and the spring bolt 9 is located on the side of the second guide rail 3 away from the connecting rod 8, one end of the spring bolt 9 abuts against the second guide rail 3, and the other end of the spring bolt 9 extends out of the mounting plate 1 and is threadedly connected with the mounting plate 1; the screw motor 6 can drive the wedge block 7 to reciprocate in the mounting plate 1, and when the wedge block 7 moves, it drives the first guide rail 2 and the first slit blade 4 to move, and the first guide rail 2 can drive the connecting rod 8 to rotate, so that the second guide rail 3 and the second slit blade 5 move in opposite directions. In this way, the finely processed wedge block 7 is driven to move longitudinally by the screw motor 6, so that the width control of the slit is converted into the control of the screw step change amount, thereby improving the slit width adjustment accuracy.

[0027] It can be understood that the output shaft of the screw motor 6 extends into the mounting plate 1 and is threadedly connected with the wedge block 7, one end of the connecting rod 8 abuts against the first guide rail 2, and the other end of the connecting rod 8 abuts against the second guide rail 3, and the spring bolt 9 is threadedly installed on a side wall of the mounting plate 1 away from the connecting rod 8, one end of the spring bolt 9 extends into the mounting plate 1 and abuts against one end of the second guide rail 3 away from the connecting rod 8, and the wedge block 7 is driven by the screw motor 6 to move in the mounting plate 1, and the wedge block 7 pushes the first guide rail 2 to move laterally in the mounting plate 1, driving the first slit blade 4 to move laterally in the mounting plate 1, and the first guide rail 2 pushes the connecting rod 8 to rotate, so that the connecting rod 8 pushes the second guide rail 3 to move in the opposite direction in the mounting plate 1, driving the second slit blade 5 to move in the opposite direction in the mounting plate 1, so that the width of the slit formed between the first slit blade 4 and the second slit blade 5 changes, thereby realizing bilateral adjustment of the slit width.

[0028] In the embodiment of the present disclosure, the first guide rail 2, the connecting rod 8, the second guide rail 3 and the spring bolt 9 form a connecting rod mechanism similar to a parallelogram, so that the first guide rail 2 and the second guide rail 3 move synchronously in opposite directions, so that the displacement of the first guide rail 2 and the second guide rail 3 is the same, so that the first slit blade 4 and the second slit blade 5 move synchronously by the same displacement, ensuring the symmetry of the first slit blade 4 and the second slit blade 5. The structure of the parallelogram connecting rod makes the first slit blade 4 and the second slit blade 5 more stable during movement, less prone to shaking and jittering, and improves the width parallelism, symmetry, and uniformity of opening and closing of the slit opening, so that when the slit width changes, the slit opening portion always remains concentric with the exit hole 26.

[0029] In one embodiment of the present disclosure, the slope of the wedge block 7 is designed to be a (i.e., the angle between the inclined surface of the wedge block 7 and the vertical surface is a). The tangent value of the slope a, tga, is equal to the unidirectional width change of the slit / the displacement change of the lead screw. Thus, through the finely machined wedge block 7, the control of the slit width is converted into the control of the lead screw step change of the lead screw motor 6, which facilitates the continuous and high-precision adjustment of the slit width. For example, when the positioning accuracy of the lead screw motor 6 is 5um and tga=1 / 10, the unidirectional adjustment accuracy of the slit width can reach 0.5 um, thereby realizing the bilateral high-precision adjustment of the slit width. The lead screw motor 6 is continuously started to realize the continuous and high-precision adjustment of the slit width, thereby meeting the high-precision requirement of the spectrometer slit that is continuously adjustable every 1um above 25um.

[0030] In one embodiment of the present disclosure, see Figures 1 to 3 The mounting plate 1 is provided with a groove 10, a guide rod 11 is arranged in the groove 10, and the wedge block 7 is movably sleeved on the guide rod 11; the screw motor 6 is located below the mounting plate 1, and the output shaft of the screw motor 6 extends into the groove 10 and is threadedly connected with the wedge block 7, and the screw motor 6 can drive the wedge block 7 to reciprocate along the guide rod 11 in the groove 10. In this way, the wedge block 7 can move smoothly in the groove 10, the first slit blade 4 and the second slit blade 5 can move smoothly, the accuracy of the slit width adjustment can be improved, and the slit width can be adjusted continuously with high accuracy.

[0031] It can be understood that the output shaft of the screw motor 6 extends into the groove 10, the output shaft of the screw motor 6 is rotatably connected to the mounting plate 1, the output shaft of the screw motor 6 is threadedly connected to the wedge block 7, and the guide rod 11 plays a guiding role. Through the spiral transmission between the screw motor 6 and the wedge block 7, the wedge block 7 moves longitudinally along the guide rod 11, avoiding deflection of the wedge block 7 during the movement, thereby improving the smoothness of the movement of the wedge block 7.

[0032] In one embodiment of the present disclosure, see Figure 1 and Figure 2 A mounting seat 29 is provided between the screw motor 6 and the mounting plate 1. One end of the mounting seat 29 is detachably connected to the screw motor 6, and the other end of the mounting seat 29 is detachably connected to the mounting plate 1. The output shaft of the screw motor 6 passes through the mounting seat 29 and extends into the groove 10, and is rotatably connected to the mounting seat 29.

[0033] In one example, one end of the guide rod 11 extends out of the mounting plate 1 and passes through the mounting seat 29 to be connected to the lead screw motor 6 .

[0034] In one embodiment of the present disclosure, see Figures 1 to 3The mounting plate 1 is provided with a first guide groove 12 and a second guide groove 13 which are parallel to each other and extend in the length direction. The mounting plate 1 is also provided with a third guide groove 14 which extends in the width direction. The two ends of the third guide groove 14 are respectively connected with the first guide groove 12 and the second guide groove 13, and the first guide groove 12 is connected with the groove 10; the first guide rail 2 is movably arranged in the first guide groove 12, and the second guide rail 3 is movably arranged in the second guide groove 13. One end of the first guide rail 2 extends into the groove 10 and abuts against the inclined surface of the wedge block 7 through the first sphere 15; the connecting rod 8 is rotatably installed in the third guide groove 14 through a fixed hinge shaft 16, and the two ends of the connecting rod 8 are respectively provided with second spheres 17, and the two ends of the connecting rod 8 abut against the first guide rail 2 and the second guide rail 3 through the second sphere 17; the spring bolt 9 is movably arranged in the second guide groove 13, one end of the spring bolt 9 abuts against the second guide rail 3, and the other end of the spring bolt 9 extends out of the mounting plate 1 and is threadedly connected with the mounting plate 1. In this way, the first guide rail 2 and the second guide rail 3 can be smoothly moved on the mounting plate 1, which facilitates the wedge block 7 to push the first guide rail 2 to move through the first sphere 15, so that the rotatably installed connecting rod 8 transmits the movement of the first guide rail 2 to the second guide rail 3, so that the second guide rail 3 moves in the opposite direction, and the first guide rail 2 and the second guide rail 3 move in opposite directions at the same time, driving the first slit blade 4 and the second slit blade 5 to move in opposite directions at the same time, realizing the smooth movement of the first slit blade 4 and the second slit blade 5, and improving the accuracy of the slit width adjustment.

[0035] Optionally, the first sphere 15 and the second sphere 17 are both steel spheres.

[0036] Alternatively, see Figure 1 and Figure 2 The cross section of the wedge block 7 is a right-angled trapezoid, and the inclined surface of the wedge block 7 abuts against the first guide rail 2 through the first sphere 15.

[0037] It can be understood that the first guide groove 12 and the second guide groove 13 are symmetrically arranged on both sides of the exit hole 26, and the first guide groove 12 and the second guide groove 13 extend along the length direction of the mounting plate 1, so as to facilitate the movement of the first guide rail 2 and the second guide rail 3 along the length direction of the mounting plate 1, and facilitate the movement of the first slit blade 4 and the second slit blade 5 along the length direction of the mounting plate 1, so as to realize the adjustment of the slit width along the length direction of the mounting plate 1.

[0038] Of course, the first guide groove 12 and the second guide groove 13 may also extend along the width direction of the mounting plate 1 , and the positions of the remaining components are adaptively adjusted accordingly.

[0039] It can be understood that the fixed hinge shaft 16 is located at the center of the connecting rod 8, and can completely transmit the movement of the first guide rail 2 to the second guide rail 3, so that the displacement of the first guide rail 2 and the second guide rail 3 is the same, so that when the slit width changes, the open part of the slit is always concentric with the exit hole 26, thereby improving the uniformity of the opening and closing of the slit.

[0040] It can be understood that the spring bolt 9 is used to buffer the second guide rail 3, so that the first guide rail 2 and the second guide rail 3 move synchronously with the same displacement, thereby improving the smoothness of the movement of the second guide rail 3 and improving the adjustment accuracy of the slit width.

[0041] In one embodiment of the present disclosure, ball slides are respectively provided on the inner walls of the first guide groove 12 and the second guide groove 13, and the first guide rail 2 and the second guide rail 3 can be connected to the ball slides to reduce the friction when the first guide rail 2 and the second guide rail 3 move, facilitate the movement of the first guide rail 2 and the second guide rail 3, avoid friction overheating between the first guide rail 2 and the first guide groove 12, the second guide rail 3 and the second guide groove 13, reduce the wear of the device, and avoid malfunction of the device.

[0042] In one embodiment of the present disclosure, see Figure 4 and Figure 6 , a limit block 18 is provided at one end of the first guide rail 2 extending into the groove 10, and a guide groove 19 extending along the axis is formed on the inclined surface of the wedge block 7. The guide groove 19 and the limit block 18 can clamp the first sphere 15 to transmit the movement of the wedge block 7 to the first guide rail 2. In this way, the wedge block 7 and the limit block 18 can clamp the first sphere 15, reduce the friction between the limit block 18 and the first sphere 15, facilitate the wedge block 7 to move longitudinally, and push the first guide rail 2 to move through the first sphere 15, so as to facilitate the conversion of the width control of the slit into the control of the step change amount of the screw rod.

[0043] Optionally, the cross-section of the limit block 18 is L-shaped, and the first sphere 15 is located at the inner right angle of the L-shaped limit block 18, so that the inclined surface of the wedge block 7 and the limit block 18 can clamp the first sphere 15 to transmit the longitudinal movement of the wedge block 7 to the first guide rail 2.

[0044] Optionally, a side wall of the horizontal frame of the L-shaped limit block 18 close to the wedge block 7 is an inclined surface and is parallel to the inclined surface of the wedge block 7 to avoid interference and collision between the wedge block 7 and the limit block 18.

[0045] Optionally, the limiting block 18 and the first guide rail 2 may be formed integrally.

[0046] Optionally, the guide groove 19 is a V-shaped groove.

[0047] In one embodiment of the present disclosure, see Figure 2At least one through hole 20 is respectively provided on the inner wall of the first guide groove 12 and the second guide groove 13 away from each other, and a ball bolt 21 is connected to the inner thread of the through hole 20; the ball bolt 21 on the inner wall of the first guide groove 12 abuts against the first guide rail 2, and the ball bolt 21 on the inner wall of the second guide groove 13 abuts against the second guide rail 3. In this way, the horizontality of the first guide rail 2 and the second guide rail 3 can be adjusted, the parallelism of the first guide rail 2 and the second guide rail 3 can be improved, and the accuracy of the slit width adjustment can be improved.

[0048] In an example, two through holes 20 are formed on the inner wall of the first guide groove 12 , and two through holes 20 are formed on the inner wall of the second guide groove 13 .

[0049] Optionally, the through holes 20 on the first guide groove 12 and the through holes 20 on the second guide groove 13 are symmetrically distributed, and the ball-shaped bolts 21 on the first guide groove 12 and the ball-shaped bolts 21 on the second guide groove 13 are symmetrically distributed.

[0050] Optionally, the two through holes 20 and the two ball-shaped bolts 21 therein are distributed at intervals.

[0051] In one embodiment of the present disclosure, see Figure 4 and Figure 5 , at least one guide hole 22 extending in the width direction is respectively provided on the first slit blade 4 and the second slit blade 5, and at least one connecting hole 23 corresponding to the guide hole 22 is respectively provided on the first guide rail 2 and the second guide rail 3; the first slit blade 4 and the first guide rail 2, and the second slit blade 5 and the second guide rail 3 are connected by at least one screw 24, and the screw 24 is sequentially inserted into the guide hole 22 and the connecting hole 23. In this way, the installation position of the first slit blade 4 and the second slit blade 5 on the first guide rail 2 and the second guide rail 3 can be adjusted, and the spacing between the first slit blade 4 and the second slit blade 5 can be adjusted conveniently, thereby facilitating the adjustment of the slit width.

[0052] In one example, the number of the guide holes 22 and the number of the connection holes 23 are both two, the two guide holes 22 correspond to the two connection holes 23 one by one, and the two groups of guide holes 22 and the connection holes 23 are connected by two different screws 24 .

[0053] For example, one of the screws 24 is a hexagon socket round head screw, and the other screw 24 is a hexagon socket cylindrical screw.

[0054] In one embodiment of the present disclosure, see Figure 5The first slit blade 4 and the second slit blade 5 are respectively provided with magnets 25, and the mounting plate 1 is provided with magnetic induction sensors corresponding to the magnets 25. In this way, the displacement of the first slit blade 4 and the second slit blade 5 is measured by the cooperation between the magnetic induction sensor and the magnet 25, so as to realize the feedback of the change of the slit width, and effectively compensate the influence of the error of the mechanical part of the device on the slit width adjustment accuracy.

[0055] Optionally, the two magnets 25 are located on the same horizontal line.

[0056] In one embodiment of the present disclosure, the surfaces of the first slit blade 4 and the second slit blade 5 are coated with a light absorbing layer, so as to reduce harmful light reflection.

[0057] Optionally, the light absorbing layer is black ink.

[0058] In one embodiment of the present disclosure, see Figure 2 and Figure 3 , an exit hole 26 is arranged on one side wall of the mounting plate 1, and the exit hole 26 is located between the first guide rail 2 and the second guide rail 3; a plurality of mounting holes 27 are evenly distributed along the outer edge of the exit hole 26 in the circumferential direction, and the mounting holes 27 are opened on the mounting plate 1, a spring is arranged on the side of the mounting hole 27 away from the opening, and a marble 28 is movably arranged on the side of the mounting hole 27 close to the opening, and the spring abuts against the first slit blade 4 and the second slit blade 5 through the marble 28. In this way, the first slit blade 4 and the second slit blade 5 can be supported, the flatness of the first slit blade 4 and the second slit blade 5 can be ensured, and the first slit blade 4 and the second slit blade 5 can be prevented from being stuck during the movement process.

[0059] In one embodiment of the present disclosure, see Figure 1 and Figure 2 The screw motor 6 is electrically connected to the external controller through wiring.

[0060] In one embodiment of the present disclosure, see Figures 1 to 6 The working process of the micron-level electric continuously adjustable slit device is briefly described as follows: When the present invention is in use, there is a certain distance between the first slit blade 4 and the second slit blade 5, and the slit formed between the first slit blade 4 and the second slit blade 5 is opposite to the exit hole 26. When it is necessary to reduce the slit width, the screw motor 6 is started to drive the wedge block 7 to move upward along the guide rod 11 in the groove 10, and the wedge block 7 pushes the first guide rail 2 to move rightward in the first guide groove 12 through the first sphere 15, and the first guide rail 2 pushes the connecting rod 8 to rotate around the fixed hinge shaft 16 in the third guide groove 14, and the other end of the connecting rod 8 synchronously pushes the second guide rail 3 to move leftward in the second guide groove 13, so that the spring bolt 9 is compressed, and the first guide rail 2 drives the first slit blade 4 to move rightward, and the second guide rail 3 synchronously drives the second slit blade 5 to move leftward, so that the first slit blade 4 and the second slit blade 5 are close to each other, and the first slit blade 4 and the second slit blade 5 are close to each other. 5 moves the same displacement, so that the width of the slit formed between the first slit blade 4 and the second slit blade 5 is reduced; when the slit width needs to be increased, the screw motor 6 is started in the reverse direction to drive the wedge block 7 to move downward along the guide rod 11 in the groove 10, thereby reducing the pressure on the first guide rail 2. The second guide rail 3 moves rightward in the second guide groove 13 under the elastic force of the spring bolt 9, and the second guide rail 3 pushes the connecting rod 8 to rotate in the opposite direction around the fixed hinge shaft 16 in the third guide groove 14. The other end of the connecting rod 8 synchronously pushes the first guide rail 2 to move leftward in the first guide groove 12, so that the first guide rail 2 drives the first slit blade 4 to move leftward, and the second guide rail 3 synchronously drives the second slit blade 5 to move rightward, so that the first slit blade 4 and the second slit blade 5 move away from each other, so that the width of the slit formed between the first slit blade 4 and the second slit blade 5 is increased.

[0061] An embodiment of the present disclosure provides an optical device, comprising the micron-level electrically continuously adjustable slit device in any one of the above embodiments.

[0062] Those skilled in the art will readily appreciate other embodiments of the present disclosure after considering the specification and practicing the invention disclosed herein. This application is intended to cover any modification, use or adaptation of the present disclosure, which follows the general principles of the present disclosure and includes common knowledge or customary techniques in the art that are not disclosed in the present disclosure. The specification and examples are intended to be exemplary only, and the true scope and spirit of the present disclosure are indicated by the appended claims.

Claims

1. A micrometer-level electrically continuously adjustable slit device, comprising a mounting plate (1) and a slit adjustment mechanism mounted on a side wall of the mounting plate (1), characterized in that: The slit adjustment mechanism comprises: A first guide rail (2) and a second guide rail (3) are arranged parallel to each other and axially movable on the side wall of the mounting plate (1); A first slit blade (4) and a second slit blade (5) which are parallel and symmetrical to each other, one of which is arranged on the first guide rail (2) and the other of which is arranged on the second guide rail (3); A screw motor (6) is arranged on one side of the mounting plate (1); The screw motor (6) drives the first guide rail (2) and the second guide rail (3) to move in opposite directions along the axial direction of the mounting plate (1) via a transmission assembly, so as to drive the first slit blade (4) and the second slit blade (5) to move in opposite directions to each other, thereby adjusting the slit spacing formed between the first slit blade (4) and the second slit blade (5).

2. The micron-level electrically continuously adjustable slit device according to claim 1, characterized in that: The transmission assembly comprises: A wedge block (7) movably arranged on a side wall of the mounting plate (1), the wedge block (7) being located on one side of the first guide rail (2) and the second guide rail (3); A connecting rod (8) is rotatably arranged on a side wall of the mounting plate (1), and the connecting rod (8) is located on the other side of the first guide rail (2) and the second guide rail (3); a spring bolt (9) movably arranged on a side wall of the mounting plate (1), the spring bolt (9) being located on a side of the second guide rail (3) away from the connecting rod (8), one end of the spring bolt (9) being in contact with the second guide rail (3), and the other end of the spring bolt (9) extending out of the mounting plate (1) and being threadedly connected to the mounting plate (1); The screw motor (6) is capable of driving the wedge block (7) to move back and forth within the mounting plate (1), and when the wedge block (7) moves, it drives the first guide rail (2) and the first slit blade (4) to move, and the first guide rail (2) is capable of driving the connecting rod (8) to rotate, so that the second guide rail (3) and the second slit blade (5) move in opposite directions.

3. The micron-level electrically continuously adjustable slit device according to claim 2, characterized in that: The mounting plate (1) is provided with a groove (10), a guide rod (11) is arranged in the groove (10), and the wedge block (7) is movably sleeved on the guide rod (11); The screw motor (6) is located below the mounting plate (1), and the output shaft of the screw motor (6) extends into the groove (10) and is threadedly connected to the wedge block (7). The screw motor (6) can drive the wedge block (7) to reciprocate along the guide rod (11) in the groove (10).

4. The micron-level electrically continuously adjustable slit device according to claim 3, characterized in that: The mounting plate (1) is provided with a first guide groove (12) and a second guide groove (13) which are parallel to each other and extend in the length direction, and the mounting plate (1) is also provided with a third guide groove (14) which extends in the width direction, and the two ends of the third guide groove (14) are respectively connected to the first guide groove (12) and the second guide groove (13), and the first guide groove (12) is connected to the groove (10); The first guide rail (2) is movably arranged in the first guide groove (12), the second guide rail (3) is movably arranged in the second guide groove (13), one end of the first guide rail (2) extends into the groove (10) and abuts against the inclined surface of the wedge block (7) through the first ball (15); The connecting rod (8) is rotatably mounted in the third guide groove (14) via a fixed hinge shaft (16); second spheres (17) are respectively provided at both ends of the connecting rod (8); and the two ends of the connecting rod (8) are respectively in contact with the first guide rail (2) and the second guide rail (3) via the second spheres (17); The spring bolt (9) is movably arranged in the second guide groove (13); one end of the spring bolt (9) abuts against the second guide rail (3); the other end of the spring bolt (9) extends out of the mounting plate (1) and is threadedly connected to the mounting plate (1).

5. The micron-level electrically continuously adjustable slit device according to claim 4, characterized in that: A limiting block (18) is provided at one end of the first guide rail (2) extending into the groove (10); a guide groove (19) extending along the axis is formed on the inclined surface of the wedge block (7); the guide groove (19) and the limiting block (18) are capable of clamping the first ball (15) to transmit the movement of the wedge block (7) to the first guide rail (2).

6. The micron-level electrically continuously adjustable slit device according to claim 4, characterized in that: At least one through hole (20) is respectively formed on the inner wall of the first guide groove (12) and the second guide groove (13) on a side away from each other, and a ball-shaped bolt (21) is connected to the inner thread of the through hole (20); The ball-jointed bolt (21) on the inner wall of the first guide groove (12) abuts against the first guide rail (2), and the ball-jointed bolt (21) on the inner wall of the second guide groove (13) abuts against the second guide rail (3).

7. The micron-level electrically continuously adjustable slit device according to claim 1, characterized in that: The first slit blade (4) and the second slit blade (5) are respectively provided with at least one guide hole (22) extending in the width direction, and the first guide rail (2) and the second guide rail (3) are respectively provided with at least one connection hole (23) corresponding to the guide hole (22); The first slit blade (4) and the first guide rail (2), as well as the second slit blade (5) and the second guide rail (3), are connected via at least one screw (24), and the screw (24) is inserted into the guide hole (22) and the connection hole (23) in sequence.

8. The micron-level electrically continuously adjustable slit device according to claim 1, characterized in that: The first slit blade (4) and the second slit blade (5) are respectively provided with magnets (25), and the mounting plate (1) is provided with magnetic induction sensors corresponding to the magnets (25).

9. The micron-level electrically continuously adjustable slit device according to claim 1, characterized in that: An exit hole (26) is provided on one side wall of the mounting plate (1), and the exit hole (26) is located between the first guide rail (2) and the second guide rail (3); A plurality of mounting holes (27) are evenly distributed in the circumferential direction on the outer edge of the emission hole (26); the mounting holes (27) are formed on the mounting plate (1); a spring is provided on a side of the mounting hole (27) away from the opening; a marble (28) is movably provided on a side of the mounting hole (27) close to the opening; the spring abuts against the first slit blade (4) and the second slit blade (5) via the marble (28).

10. An optical device, characterized in that: It comprises the micron-level electrically continuously adjustable slit device as described in any one of claims 1 to 9.

Images