Predetermined line position determination method for processing device and processing device

Abstract

The embodiment of the invention discloses a predetermined line position determining method for a machining device and the machining device. The method comprises the following steps: acquiring a first image of a to-be-processed workpiece acquired by a first image acquisition device; acquiring a second image acquired by sequentially adopting at least one second image acquisition device for the to-be-processed workpiece; adjusting the physical position of the to-be-processed workpiece based on the second image; according to the rotation angle of the to-be-processed workpiece before and after correction, rotating the to-be-processed workpiece in the first image to obtain a third image; and determining a target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image. According to the scheme, the deviation between the calculated position of the to-be-machined part and the actual physical position of the to-be-machined part due to position correction of the to-be-machined part can be reduced to a great extent.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to a method for determining a predetermined line position of a processing device, a processing device, an electronic device, and a storage medium. Background Art

[0002] In many industries, such as the semiconductor industry, some processing equipment needs to be positioned with the help of vision. For example, for a laser processing device used to cut wafers, it is necessary to use vision to position the cutting path of the wafer so that the cutting path is parallel to the horizontal direction (the X-axis movement direction, the X-axis movement mechanism drives the wafer to move along the X-axis, and the laser processing device processes the wafer during this process).

[0003] In the related art, after the workpiece to be processed is positioned, the position of the workpiece to be processed is calculated based on the contour of the workpiece to be processed, and then the physical position of the workpiece to be processed is corrected. Since the actual position of the workpiece to be processed after the position correction changes, the position of the workpiece to be processed calculated according to the contour of the workpiece before the position correction will have errors, and the accuracy of the positioning result is low. Summary of the invention

[0004] The present invention is proposed in view of the above problems. The present invention provides a method for determining a predetermined line position of a processing device, a processing device, an electronic device, and a storage medium, which can greatly reduce the deviation between the calculated position of the workpiece to be processed and the actual physical position of the workpiece to be processed due to the position correction of the workpiece to be processed.

[0005] According to one aspect of the present invention, a method for determining the position of a predetermined line for a processing device is provided, wherein the predetermined line is a characteristic line on a workpiece to be processed, the processing device comprises a first image acquisition device and at least one second image acquisition device, the image acquisition range of the at least one second image acquisition device is smaller than the image acquisition range of the first image acquisition device, and the method comprises: acquiring a first image of the workpiece to be processed acquired by the first image acquisition device, wherein the first image includes the entire workpiece to be processed; acquiring second images acquired by sequentially using at least one second image acquisition device for the workpiece to be processed, wherein when acquiring the second image, the relative position of the workpiece to be processed and the corresponding second image acquisition device is determined based on the image position of the workpiece to be processed in the first image and the physical position difference between each second image acquisition device and the previous image acquisition device; adjusting the physical position of the workpiece to be processed based on the second image to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and a first preset direction; rotating the workpiece to be processed in the first image according to the rotation angle of the workpiece to be processed before and after the correction to obtain a third image; and determining the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image.

[0006] Optionally, the physical position of the workpiece to be processed is adjusted based on the second image to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction, including: after each second image acquisition device acquires the second image, based on the currently acquired second image, determining the inclination angle of at least one predetermined line relative to the first preset direction, and adjusting the physical position of the workpiece to be processed according to the inclination angle to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction.

[0007] Optionally, based on the currently acquired second image, an inclination angle of at least one predetermined line relative to a first preset direction is determined, and the physical position of the workpiece to be processed is adjusted according to the inclination angle to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction, including: acquiring multiple groups of predetermined line images to be measured containing one or more predetermined lines, each group of predetermined line images to be measured is an image obtained by the second image acquisition device performing image acquisition on one or more predetermined lines on the workpiece to be processed when the workpiece to be processed moves along the first preset direction, and the second image includes multiple groups of predetermined line images to be measured; based on the multiple groups of predetermined line images to be measured and the reference position points, one or more groups of position points are sequentially determined, each group of position points includes a first position point and a second position point, the first position point and the second position point are respectively located on both sides of the reference position point, and along the first A preset direction, a spacing between two position points contained in each of the multiple groups of position points gradually increases, multiple groups of predetermined line images to be measured correspond to the multiple groups of position points one by one, any group of predetermined line images to be measured includes two predetermined line images to be measured corresponding to the first position point and the second position point in the corresponding group of position points, respectively, and the inclination angle of the line between each group of position points relative to the first preset direction represents the inclination angle of at least one predetermined line relative to the first preset direction; after each group of position points is determined, the physical position of the workpiece to be processed is adjusted according to the inclination angle of the line between the first position point and the second position point in the group of position points relative to the first preset direction, so as to correct the degree of parallelism between at least one predetermined line and the first preset direction; wherein, in the reference position points and the multiple groups of position points, different position points are position points corresponding to different feature points on the predetermined line.

[0008] Optionally, one or more groups of position points are determined in sequence based on multiple groups of predetermined line images to be tested and reference position points, including: obtaining a template image, wherein the template image contains position features and reference points associated with the predetermined line; matching the template image with each predetermined line image of the multiple groups of predetermined line images to be tested according to the position features contained in the template image; for each predetermined line image to be tested, based on the matching result, determining the point in the predetermined line image to be tested that corresponds to the reference point in the template image as the feature point corresponding to the predetermined line image to be tested, and determining the reference position point and one or more groups of position points based on the feature point.

[0009] Optionally, at least one second image acquisition device includes a coarse adjustment image acquisition device and a fine adjustment image acquisition device. The image acquisition range of the coarse adjustment image acquisition device is larger than that of the fine adjustment image acquisition device. The fine adjustment image acquisition device only acquires a set of predetermined line images to be measured. The set of predetermined line images to be measured acquired by the fine adjustment image acquisition device is acquired after the workpiece to be processed moves a first target distance from an initial position to both sides along a first preset direction. The first target distance is less than or equal to a first preset distance threshold. The reference position point is a position point corresponding to a preset feature point on the workpiece to be processed when the workpiece to be processed is at the initial position.

[0010] Optionally, at least one second image acquisition device acquires second images in a sequence in which the image acquisition range gradually decreases.

[0011] Optionally, after adjusting the physical position of the workpiece to be processed to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction, the method also includes: acquiring two inspection predetermined line images containing one or more predetermined lines, the two inspection predetermined line images being images obtained by the last second image acquisition device when the workpiece to be processed moves along the first preset direction, capturing one or more predetermined lines on the workpiece to be processed; determining a third position point and a fourth position point based on the two inspection predetermined line images in a one-to-one correspondence; when the inclination angle of the line between the third position point and the fourth position point relative to the first preset direction is less than or equal to a preset angle threshold, determining that the degree of parallelism between at least one predetermined line and the first preset direction meets the first preset requirement; wherein the third position point and the fourth position point respectively correspond to different feature points on the predetermined line.

[0012] Optionally, the third position point and the fourth position point are respectively located on both sides of the reference position point, and the two inspection predetermined line images are acquired after the workpiece to be processed moves from the initial position to both sides along the first preset direction by a second target distance, and the reference position point is the position point corresponding to the preset feature point on the workpiece to be processed when the workpiece to be processed is at the initial position, and the second target distance is less than or equal to the second preset distance threshold.

[0013] Optionally, obtaining the second images acquired by sequentially using at least one second image acquisition device for the workpiece to be processed includes: for the first second image acquisition device, determining the first physical position difference between the physical position of the first product feature and the physical position of the center of the field of view of the first image acquisition device based on the image position of the first product feature in the first image; controlling the workpiece to be processed to move to the image acquisition range of the first second image acquisition device according to the second physical position difference and the first physical position difference between the first second image acquisition device and the first image acquisition device, and acquiring the second image acquired by the first second image acquisition device; for each second image acquisition device other than the first second image acquisition device, determining the third physical position difference between the physical position of the first product feature and the physical position of the center of the field of view of the previous second image acquisition device based on the image position of the first product feature in the third image acquired by the previous second image acquisition device; controlling the workpiece to be processed to move to the image acquisition range of the current second image acquisition device according to the fourth physical position difference and the third physical position difference between the current second image acquisition device and the previous second image acquisition device, and acquiring the second image acquired by the current second image acquisition device.

[0014] Optionally, determining the target physical position of at least one predetermined line based on the image position of at least one predetermined line in the third image includes: converting the image position of at least one predetermined line in the third image according to a preset conversion relationship to obtain an initial physical position of the at least one predetermined line, the initial physical position being the target physical position; or, converting the image position of at least one predetermined line in the third image according to a preset conversion relationship to obtain an initial physical position of the at least one predetermined line, and determining the target physical position of the at least one predetermined line based on the initial physical position and a positioning error corresponding to the first image acquisition device, the positioning error being an error of a physical position obtained by converting the image position in the first image acquisition device according to the preset conversion relationship; wherein the preset conversion relationship is a conversion relationship between an image coordinate system adopted by the first image acquisition device and a world coordinate system, and the physical position is a position in the world coordinate system.

[0015] Optionally, the processing device also includes a third image acquisition device, the image acquisition range of the third image acquisition device is smaller than the image acquisition range of the first image acquisition device, and before determining the target physical position of at least one predetermined line based on the initial physical position and the positioning error corresponding to the first image acquisition device, determining the target physical position of at least one predetermined line based on the image position of the at least one predetermined line in the third image and a preset conversion relationship also includes: determining a sixth physical position difference between the physical position corresponding to the first product feature and the physical position corresponding to the second product feature at the same calibration moment based at least on a fifth physical position difference between the physical position corresponding to the first image acquisition device and the physical position corresponding to the third image acquisition device, the sixth physical position difference representing the positioning error; wherein the first product feature is a feature on the third image, the second product feature is a feature on the fourth image, the fourth image is an image acquired by the third image acquisition device for the workpiece to be processed, and the first product feature and the second product feature correspond to the same feature on the workpiece to be processed.

[0016] Optionally, the third image acquisition device is any image acquisition device of at least one second image acquisition device.

[0017] Optionally, before obtaining the first image of the workpiece to be processed captured by the first image acquisition device, the method also includes: obtaining a fifth image captured by the first image acquisition device for the workpiece to be processed; determining an angle between a feature edge on the workpiece to be processed in the fifth image and a second preset direction; and controlling the rotation of the workpiece to be processed based on the angle so that the degree of parallelism between the feature edge and the second preset direction meets a second preset requirement.

[0018] Optionally, the preset conversion relationship is the conversion relationship between the image coordinate system adopted by the first image acquisition device and the world coordinate system, the physical position is the position in the world coordinate system, the world coordinate system includes a first coordinate axis, a second coordinate axis and a third coordinate axis, the workpiece to be processed can translate along the first coordinate axis and the second coordinate axis and rotate around the third coordinate axis, and the method also includes: when the first image acquisition device acquires the first image, recording a first rotation angle of the workpiece to be processed around the third coordinate axis; after adjusting the physical position of the workpiece to be processed, recording a second rotation angle of the workpiece to be processed around the third coordinate axis; wherein, the rotation angle of the workpiece to be processed before and after correction is the difference between the second rotation angle and the first rotation angle.

[0019] According to another aspect of the present invention, there is also provided a processing device, comprising a first image acquisition device, at least one second image acquisition device and a control device, wherein the image acquisition range of the at least one second image acquisition device is smaller than the image acquisition range of the first image acquisition device, and the control device is used to execute the above-mentioned method for determining the predetermined line position for the processing device.

[0020] According to another aspect of the present invention, there is also provided an electronic device, comprising: a processor and a memory, wherein the memory stores computer program instructions, and when the computer program instructions are executed by the processor, they are used to execute the above-mentioned method for determining a predetermined line position for a processing device.

[0021] According to yet another aspect of the present invention, a storage medium is provided on which program instructions are stored. When the program instructions are run, they are used to execute the above-mentioned method for determining a predetermined line position of a processing device.

[0022] The above technical solution acquires the second images acquired by sequentially using at least one second image acquisition device for the workpiece to be processed, and when acquiring the second image, the relative position of the workpiece to be processed and the second image acquisition device is determined based on the position of the workpiece to be processed in the first image and the physical position difference between each second image acquisition device and the previous image acquisition device, which is conducive to ensuring that when the second image acquisition device acquires the second image, at least part of the workpiece can be within the image acquisition range of the second image acquisition device, thereby ensuring that each second image can be used as a reference image for correcting the physical position of the workpiece to be processed; by rotating the workpiece to be processed in the first image based on the rotation angle before and after the correction to acquire a third image to obtain the image position of at least one predetermined line in the third image, the physical position of the corrected predetermined line can be accurately obtained, and this method can greatly reduce the deviation between the calculated position of the workpiece to be processed and the actual physical position of the workpiece to be processed due to the position correction of the workpiece to be processed, thereby helping to improve the accuracy of subsequent processing of the workpiece to be processed.

[0023] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The above and other purposes, features and advantages of the present invention will become more apparent by describing the embodiments of the present invention in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0025] Figure 1 A schematic flow chart of a method for determining a predetermined line position of a processing device according to an embodiment of the present invention is shown;

[0026] Figure 2A schematic structural diagram of a processing device according to an embodiment of the present invention is shown;

[0027] Figure 3 A schematic block diagram of an electronic device according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical scheme and advantages of the present invention more obvious, the exemplary embodiments according to the present invention will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments of the present invention, and it should be understood that the present invention is not limited to the exemplary embodiments described herein. Based on the embodiments of the present invention described in the present invention, all other embodiments obtained by those skilled in the art without creative work should fall within the protection scope of the present invention.

[0029] In order to at least partially solve the above technical problems, the embodiments of the present invention provide a method for determining a predetermined line position of a processing device, a processing device, an electronic device, and a storage medium. Figure 1 As shown, it is a schematic flow chart of a method for determining a predetermined line position of a processing device according to an embodiment of the present invention. According to one aspect of the present invention, a method for determining a predetermined line position of a processing device is provided, wherein the predetermined line is a characteristic line on a workpiece to be processed, the processing device comprises a first image acquisition device and at least one second image acquisition device, the image acquisition range of the at least one second image acquisition device is smaller than the image acquisition range of the first image acquisition device, and the method comprises: step S110, step S120, step S130, step S140 and step S150.

[0030] Exemplarily, the predetermined line may be a characteristic line on the workpiece to be processed. The workpiece to be processed may be any object, such as ceramics, wafers, etc. The predetermined line may be any characteristic line, such as a cutting path on a wafer, etc. The processing device may include a first image acquisition device and at least one second image acquisition device, and may also include a movable stage for carrying the workpiece to be processed. The first image acquisition device may be, for example, a wide-angle camera, and the at least one second image acquisition device may include, for example, a coarse adjustment camera and / or a fine adjustment camera. The image acquisition range of the wide-angle camera may be greater than the image acquisition range of the coarse adjustment camera, and the image acquisition range of the coarse adjustment camera may be greater than the image acquisition range of the fine adjustment camera. Specifically, the image acquisition range of the first image acquisition device is greater than the image acquisition range of each second image acquisition device, and it can also be understood that the resolution of the first image acquisition device is lower than the resolution of each second image acquisition device. It can be considered that the first image acquisition device is a camera with a large field of view, and the second image acquisition device is a camera with a small field of view; in other words, the image acquisition range of the first image acquisition device is large, but the resolution is low, while the image acquisition range of the second image acquisition device is small, but the resolution is high.

[0031] Exemplarily, the workpiece to be processed can be placed on a movable stage, the first image acquisition device is the first image acquisition device to acquire images of the workpiece to be processed, at least one second image acquisition device can acquire images of the workpiece to be processed in a preset order, and the first second image acquisition device of at least one second image acquisition device is the second image acquisition device to acquire images of the workpiece to be processed. The movable stage can drive the workpiece to be processed to move to the image acquisition range of each second image acquisition device in sequence according to the physical position difference between each second image acquisition device and the previous image acquisition device. Specifically, the movable stage can translate in a plane (which can be called a "moving plane"), or it can rotate around a fixed rotation axis in the moving plane. Two mutually perpendicular grating rulers can be set within the moving range of the movable stage. For example, when the movable stage stops at a preset physical position, the reading of the grating ruler at this time can be set to 0, and the physical position can be determined as the origin of the world coordinate system. A first grating ruler can be set along the first preset direction through the origin of the world coordinate system, and the axis where the first grating ruler is located can be used as the X-axis of the world coordinate system. A second grating ruler is arranged along a second preset direction perpendicular to the X-axis and through the origin of the world coordinate system. The axis where the second grating ruler is located can be used as the Y-axis of the world coordinate system. The movable stage can move along the first preset direction and the second preset direction, and the movement distance of the movable stage in the first preset direction and the second preset direction can be determined based on the readings of the first grating ruler and the second grating ruler. The first preset direction can be any direction, such as a horizontal direction, a vertical direction, etc., and the second preset direction can be a direction perpendicular to the first preset direction.

[0032] In step S110, a first image of the workpiece to be processed captured by a first image capturing device is acquired, wherein the first image includes the entire workpiece to be processed.

[0033] Exemplarily, the first image obtained by using the first image acquisition device to acquire an image of the workpiece to be processed may include the entire workpiece to be processed. Specifically, when the first image acquisition device is used to acquire an image of the workpiece to be processed, the specific position point (such as the center or a preset identification point) of the movable stage may be controlled to coincide with the center of the field of view of the first image acquisition device, and the first product feature of the workpiece to be processed on the movable stage may coincide with or may not coincide with the specific position point of the movable stage. The first product feature may be any identifiable feature on the workpiece to be processed. Exemplarily, the first product feature may be a feature of the workpiece to be processed itself, such as a feature of a certain shape or structure. Exemplarily, the first product feature may also be a feature additionally marked on the workpiece to be processed by manual or processing devices, such as a symbol or pattern that is easy to identify. The first product feature may be of any shape, such as a circle, a cross, or a star. Taking a wafer as an example, the first product feature may be the center of a cutting path at a specific position on the wafer, such as the center of a cutting path at the most central position on the wafer, and the cutting path center may also be used as the wafer center. The cutting line center mentioned above refers to the center point of the intersection area of ​​two cutting lines perpendicular to each other.

[0034] In step S120, second images are acquired by sequentially acquiring at least one second image acquisition device for the workpiece to be processed, wherein when acquiring the second image, the relative position of the workpiece to be processed and the corresponding second image acquisition device is determined based on the image position of the workpiece to be processed in the first image and the physical position difference between each second image acquisition device and the previous image acquisition device.

[0035] Exemplarily, for the first second image acquisition device, the previous image acquisition device of the second image acquisition device is the first image acquisition device. For each second image acquisition device other than the first one, the previous image acquisition device of the second image acquisition device is the previous second image acquisition device of the second image acquisition device. The physical position difference between each second image acquisition device and the previous image acquisition device can be obtained in any manner. For example, the physical position difference between the two image acquisition devices can be measured by a measuring device. For another example, the physical position of the movable stage when the center of the field of view of the two image acquisition devices coincides with the center / rotation axis of the movable stage can be determined respectively, and the difference between the two determined physical positions can be calculated as the physical position difference between the two image acquisition devices. The image position of the workpiece to be processed in the first image can be represented by the pixel coordinates of the first product feature of the workpiece to be processed in the image coordinate system of the first image. Based on the image position of the workpiece to be processed in the first image, the physical position difference of the workpiece to be processed relative to the center of the field of view of the first image acquisition device can be determined. Specifically, the image acquired by the first image acquisition device has an image coordinate system (i.e., the image coordinate system adopted by the first image acquisition device), and there is a preset conversion relationship between the image coordinate system and the world coordinate system. For the first image, the physical coordinates of the position points corresponding to each pixel point in the world coordinate system can be determined according to the pixel coordinates of each pixel point in the first image in the image coordinate system. It can be understood that the physical position difference of the workpiece to be processed relative to the center of the field of view of the first image acquisition device can be obtained by converting the pixel coordinates of the first product feature of the workpiece to be processed in the first image and the pixel coordinates of the central pixel point of the first image according to the preset conversion relationship and then calculating the difference.

[0036] Exemplarily, the physical position difference of the workpiece to be processed relative to the center of the field of view of the first image acquisition device can be determined based on the image position of the workpiece to be processed in the first image. Before the second image acquisition device is used to acquire images of the workpiece to be processed, the movable stage can be controlled to move according to the physical position difference between the first image acquisition device and the first second image acquisition device and the physical position difference of the workpiece to be processed relative to the center of the field of view of the first image acquisition device. The relative position of the workpiece to be processed and the first second image acquisition device after the movement can satisfy that the first product feature of the workpiece to be processed is located within the image acquisition range of the first second image acquisition device. After the first product feature of the workpiece to be processed is located within the image acquisition range of the first second image acquisition device, the second image acquisition device can be used in sequence to acquire images of the workpiece to be processed to obtain a second image. In some embodiments, when the current second image acquisition device is not the first second image acquisition device, the movable stage can be controlled to drive the workpiece to be processed to move based on the physical position difference between the current second image acquisition device and the previous second image acquisition device. The relative position of the workpiece to be processed and the current second image acquisition device after the movement satisfies that the first product feature of the workpiece to be processed is located within the image acquisition range of the current second image acquisition device. In other embodiments, when the current second image acquisition device is not the first second image acquisition device, the movable stage can be controlled to move the workpiece to be processed based on the physical position difference between the current second image acquisition device and the previous second image acquisition device, and the position of the workpiece to be processed in the second image captured by the previous second image acquisition device for the workpiece to be processed. Similarly, the relative position of the workpiece to be processed and the current second image acquisition device after the movement satisfies that the first product feature of the workpiece to be processed is located in the image acquisition range of the current second image acquisition device.

[0037] In step S130, the physical position of the workpiece to be processed is adjusted based on the second image to correct the parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction;

[0038] Exemplarily, the second image captured by the second image acquisition device may include at least part of the workpiece to be processed, specifically, may include at least part of the characteristic lines of the workpiece to be processed. For each second image captured by the second image acquisition device, the physical position of the workpiece to be processed may be adjusted according to the image position of the characteristic lines of the workpiece to be processed contained in the second image, and the adjustment method may include, for example, controlling the rotation of the movable stage to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction.

[0039] In step S140, the workpiece to be processed in the first image is rotated according to the rotation angles of the workpiece to be processed before and after correction to obtain a third image.

[0040] For example, after the last adjustment of the physical position of the workpiece to be processed is completed, the rotation angle of the workpiece to be processed during the correction of the predetermined line can be obtained, and the rotation angle can also be determined by the rotation angle of the movable stage around the rotation axis. Based on the rotation angle of the workpiece to be processed, the workpiece to be processed in the first image can be rotated according to the rotation angle to obtain the third image.

[0041] In step S150, a target physical position of the at least one predetermined line is determined based on the image position of the at least one predetermined line in the third image.

[0042] Exemplarily, similar to the first image, the third image may include the entire workpiece to be processed, and accordingly may include at least one predetermined line of the workpiece to be processed. According to the image position of at least one predetermined line in the third image, the physical position of at least one predetermined line, that is, the target physical position, can be obtained by converting according to a preset conversion relationship. In some embodiments, the template image containing the predetermined line can be matched with the third image by template matching to determine at least one predetermined line in the third image. In other embodiments, the predetermined line can be obtained by drawing a line according to the preset relative position between the first product feature in the third image and each predetermined line. It can be understood that the intersection of the drawn line in the third image and the contour of the workpiece can be used as the starting position and the ending position of the corresponding predetermined line.

[0043] The above technical solution acquires the second images acquired by sequentially using at least one second image acquisition device for the workpiece to be processed, and when acquiring the second image, the relative position of the workpiece to be processed and the second image acquisition device is determined based on the position of the workpiece to be processed in the first image and the physical position difference between each second image acquisition device and the previous image acquisition device, which is conducive to ensuring that when the second image acquisition device acquires the second image, at least part of the workpiece can be within the image acquisition range of the second image acquisition device, thereby ensuring that each second image can be used as a reference image for correcting the physical position of the workpiece to be processed; by rotating the workpiece to be processed in the first image based on the rotation angle before and after the correction to acquire a third image to obtain the image position of at least one predetermined line in the third image, the physical position of the corrected predetermined line can be accurately obtained, and this method can greatly reduce the deviation between the calculated position of the workpiece to be processed and the actual physical position of the workpiece to be processed due to the position correction of the workpiece to be processed, thereby helping to improve the accuracy of subsequent processing of the workpiece to be processed.

[0044] Optionally, the physical position of the workpiece to be processed is adjusted based on the second image to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction, including: after each second image acquisition device acquires the second image, based on the currently acquired second image, determining the inclination angle of at least one predetermined line relative to the first preset direction, and adjusting the physical position of the workpiece to be processed according to the inclination angle to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction.

[0045] Exemplarily, for the second image currently captured by the second image acquisition device, at least one predetermined line can be determined in the second image. In some embodiments, the predetermined line in the second image can be identified based on the shape of the predetermined line to determine the position of the at least one predetermined line in the second image, and the identification method can include, for example, Hough transform, edge detection, principal component analysis, etc. Taking a wafer as an example, the predetermined line of the wafer can be a cutting path, and the edge of the cutting path can be regarded as a straight line. The predetermined line can be determined by identifying the straight line in the second image. In other embodiments, the feature line can be determined by identifying feature points on the predetermined line, and this scheme will be described below. Exemplarily, after determining at least one predetermined line in the second image, the inclination angle of the predetermined line in the second image relative to the reference direction can be determined. Specifically, a reference direction can be preset in the image space of the second image, and the reference direction can correspond to the first preset direction in the physical space.

[0046] The above technical solution adjusts the position of the workpiece to be processed based on the inclination angle between the predetermined line and the first preset direction, and then corrects the position of the predetermined line on the workpiece to be processed. It can accurately determine the inclination direction and inclination degree of the predetermined line of the workpiece to be processed, so that the corrected predetermined line is as close to the ideal state as possible, that is, parallel to the first preset direction.

[0047] Optionally, based on the currently acquired second image, an inclination angle of at least one predetermined line relative to a first preset direction is determined, and the physical position of the workpiece to be processed is adjusted according to the inclination angle to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction, including: acquiring multiple groups of predetermined line images to be measured containing one or more predetermined lines, each group of predetermined line images to be measured is an image obtained by the second image acquisition device performing image acquisition on one or more predetermined lines on the workpiece to be processed when the workpiece to be processed moves along the first preset direction, and the second image includes multiple groups of predetermined line images to be measured; based on the multiple groups of predetermined line images to be measured and the reference position points, one or more groups of position points are sequentially determined, each group of position points includes a first position point and a second position point, the first position point and the second position point are respectively located on both sides of the reference position point, and along the first A preset direction, a spacing between two position points contained in each of the multiple groups of position points gradually increases, multiple groups of predetermined line images to be measured correspond to the multiple groups of position points one by one, any group of predetermined line images to be measured includes two predetermined line images to be measured corresponding to the first position point and the second position point in the corresponding group of position points, respectively, and the inclination angle of the line between each group of position points relative to the first preset direction represents the inclination angle of at least one predetermined line relative to the first preset direction; after each group of position points is determined, the physical position of the workpiece to be processed is adjusted according to the inclination angle of the line between the first position point and the second position point in the group of position points relative to the first preset direction, so as to correct the degree of parallelism between at least one predetermined line and the first preset direction; wherein, in the reference position points and the multiple groups of position points, different position points are position points corresponding to different feature points on the predetermined line.

[0048] Exemplarily, the predetermined line image to be measured may be an image containing any number of predetermined lines, and each group of predetermined line images to be measured may be an image acquired by the current second image acquisition device for the predetermined line on the workpiece to be processed when the workpiece to be processed moves along the first preset direction. For the convenience of description and understanding, the embodiments shown in the following text are described with the first preset direction as the horizontal direction. Each group of predetermined line images to be measured may be a static image, or may be any video frame in a dynamic video. Exemplarily, in the reference position point and the multiple groups of position points, different position points are position points corresponding to different feature points on the predetermined line. The feature point may be any identifiable feature point on the workpiece to be processed. Specifically, the feature point may be a feature point on the workpiece to be processed itself, or may be a feature point additionally marked on the workpiece to be processed, for example, by manual or processing devices. In one example, the feature point may be the center point of the intersection area of ​​two mutually perpendicular cutting lanes on the workpiece to be processed (referred to as "cutting lane center"). Taking the workpiece to be processed as a wafer as an example, the different feature points may be the cutting lane centers at different positions on the wafer. The position point corresponding to any feature point may be the image position point corresponding to the feature point in the above-mentioned image coordinate system, or may be the physical position point corresponding to the feature point in the above-mentioned world coordinate system. Each group of predetermined line images to be measured may include a first predetermined line image to be measured and a second predetermined line image to be measured. In a specific embodiment, the first predetermined line image to be measured may be an image acquired by the current second image acquisition device for the intersection area of ​​two predetermined lines perpendicular to each other within the image acquisition range during the process of the workpiece to be processed moving from the reference position point along the first preset direction. The first predetermined line image to be measured may include a first position point, which may be, for example, an image position point or a physical position point corresponding to the center of the intersection area. The second predetermined line image to be measured may be an image acquired by the current second image acquisition device for the intersection area of ​​two predetermined lines perpendicular to each other within the image acquisition range during the process of the workpiece to be processed moving from the reference position point along the direction opposite to the first preset direction. Similarly, the second predetermined line image to be measured may include a second position point, which may be, for example, an image position point or a physical position point corresponding to the center of the intersection area. In a similar manner, multiple groups of position points may be determined in sequence, and each group of position points may include a first position point and a second position point. And the spacing between the first position point and the second position point included in each group of position points determined in sequence gradually increases. The number of groups of the plurality of predetermined line images to be measured is consistent with the number of groups of the plurality of position points, and the plurality of predetermined line images to be measured corresponds one to one with the plurality of position points. It can be understood that the "points" described in the embodiments of the present invention, such as position points, feature points, reference points, etc., correspond to an "area" when the corresponding image is enlarged. The "area" here can be an image area composed of a single pixel or multiple pixels in the image.Exemplarily, the physical position of the workpiece to be processed can be adjusted once after each set of position points is determined. Taking the first preset direction as the horizontal direction as an example, after a certain set of position points is determined, the physical position of the workpiece to be processed can be adjusted according to the angle of the line between the first position point and the second position point in the set of position points relative to the horizontal direction. For example, if the line between the first position point and the second position point is tilted 1° counterclockwise relative to the horizontal direction, the movable stage can be controlled to rotate 1° clockwise around the rotation axis to drive the workpiece to be processed to rotate 1° clockwise. It can be understood that by adjusting the workpiece to be processed, the directions of all predetermined lines on it can be corrected.

[0049] The above technical solution determines multiple groups of position points, and adjusts the position of the workpiece to be processed based on the inclination angle of the line between two position points in each group of position points relative to the first preset direction, thereby correcting the position of the predetermined line on the workpiece to be processed. By setting multiple groups of position points, high-precision correction of the predetermined line on the workpiece to be processed can be achieved in a wide range.

[0050] Optionally, one or more groups of position points are determined in sequence based on multiple groups of predetermined line images to be tested and reference position points, including: obtaining a template image, wherein the template image contains position features and reference points associated with the predetermined line; matching the template image with each predetermined line image of the multiple groups of predetermined line images to be tested according to the position features contained in the template image; for each predetermined line image to be tested, based on the matching result, determining the point in the predetermined line image to be tested that corresponds to the reference point in the template image as the feature point corresponding to the predetermined line image to be tested, and determining the reference position point and one or more groups of position points based on the feature point.

[0051] Exemplarily, the template image may be an image containing any positional features and reference points associated with the predetermined line on the workpiece to be processed. The template image may be the same size as or smaller than the image of the predetermined line to be measured. The template image is pre-marked with positional features and reference points associated with the predetermined line. The reference point may be any identifiable point on the predetermined line. The reference point is consistent with the above-mentioned feature point type, and is used to compare with each predetermined line image to be measured to determine the location of the identification point therein. For example, when the workpiece to be processed is a wafer, the reference point may be the center of the cutting path. Taking the template image as an image acquired from the intersection area of ​​two mutually perpendicular cutting paths of the wafer as an example, the template image may include the intersection area, and may also include an area within a preset range around the intersection area (which may be recorded as a reference area), wherein the preset range is set so that the image features included in the intersection area and the reference area enable the image processing algorithm to identify the location of the intersection area and the reference area from the second image acquired by the second image acquisition device based on the image features. The positional features included in the template image may refer to the intersection area and the reference area. According to the positional features contained in the template image, the template image can be matched with any current predetermined line image to be tested. Specifically, for any current predetermined line image to be tested, a positional feature that matches the positional feature in the template image can be identified from the predetermined line image to be tested, and the image position of the positional feature in the predetermined line image to be tested can be determined as the image position of the positional feature in the template image in the predetermined line image to be tested. In addition, based on the matching result on the current predetermined line image to be tested, and based on the relative positional relationship between the reference point in the template image and the positional feature, the point in the current predetermined line image to be tested that corresponds to the reference point in the template image can be determined as the current feature point corresponding to the current predetermined line image to be tested.

[0052] The above technical solution can determine the current feature points corresponding to the current predetermined line image to be tested by matching the template image with any current predetermined line image to be tested. This method does not require complicated operations and calculations and can accurately and efficiently obtain the feature points in the predetermined line image to be tested.

[0053] Optionally, at least one second image acquisition device includes a coarse adjustment image acquisition device and a fine adjustment image acquisition device. The image acquisition range of the coarse adjustment image acquisition device is larger than that of the fine adjustment image acquisition device. The fine adjustment image acquisition device only acquires a set of predetermined line images to be measured. The set of predetermined line images to be measured acquired by the fine adjustment image acquisition device is acquired after the workpiece to be processed moves a first target distance from an initial position to both sides along a first preset direction. The first target distance is less than or equal to a first preset distance threshold. The reference position point is a position point corresponding to a preset feature point on the workpiece to be processed when the workpiece to be processed is at the initial position.

[0054] Exemplarily, the second image acquisition device may include a coarse adjustment image acquisition device (e.g., a coarse adjustment camera) and a fine adjustment image acquisition device (e.g., a fine adjustment camera), and the image acquisition range of the coarse adjustment image acquisition device is larger than the image acquisition range of the fine adjustment image acquisition device. When the coarse adjustment image acquisition device is used to acquire the image of the predetermined line to be measured, multiple groups of images of the predetermined line to be measured may be acquired. The specific process may refer to the above embodiment, which will not be described in detail. When the fine adjustment image acquisition device is used to acquire the image of the predetermined line to be measured, only one group of images of the predetermined line to be measured may be acquired. Specifically, the movable stage may drive the workpiece to be processed to move a first target distance in a first preset direction from an initial position. After the movable stage and the workpiece to be processed move the first target distance, the fine adjustment image acquisition device may perform image acquisition for the predetermined line of the workpiece to be processed to obtain one of the images of the predetermined line to be measured in the group of images of the predetermined line to be measured. It can be understood that another image of the predetermined line to be measured in the group of images of the predetermined line to be measured is an image acquired by the fine adjustment image acquisition device for the predetermined line of the workpiece to be processed after the movable stage drives the workpiece to be processed to move a first target distance in a direction opposite to the first preset direction from an initial position. The initial position is the position where the movable stage and the workpiece to be processed are located when they move from the image acquisition range of the previous image acquisition device to the image acquisition range of the current second image acquisition device. When the fine-tuning image acquisition device is the current second image acquisition device, the previous image acquisition device is the coarse-tuning image acquisition device. When the movable stage and the workpiece to be processed are located at the initial position corresponding to the fine-tuning image acquisition device, the second image obtained by the fine-tuning image acquisition device performing image acquisition on the predetermined line of the workpiece to be processed may include a reference position point, and the reference position point may be consistent with the reference position point used by the coarse-tuning image acquisition device when acquiring multiple groups of images of the predetermined lines to be measured. In other words, the reference position point and the reference position point used by the coarse-tuning image acquisition device when acquiring multiple groups of images of the predetermined lines to be measured are positions corresponding to the same preset feature point on the workpiece to be processed. Exemplarily, the first target distance may be less than or equal to the first preset distance threshold, and the first preset distance threshold may be 0.5 times the length of the workpiece to be processed in the first preset direction, or may be the product of 0.5 times the length of the workpiece to be processed in the first preset direction and a preset proportional coefficient, and the preset proportional coefficient may be less than or equal to 1. The first preset distance threshold can be defined by the user according to the position of the predetermined line on the workpiece to be processed and the length of the predetermined line, and the embodiment of the present invention does not make specific limitations. For example, if the workpiece to be processed is a wafer and the predetermined line is a cutting path, the starting position and / or end position of the cutting path on the wafer can be reserved with the edge of the wafer. For example, the starting position and end position of the cutting path passing through the center of the wafer are respectively 0.05 times the wafer diameter away from the edge of the wafer in the first preset direction. In this case, the first preset distance threshold can be set to 0.9 times the wafer radius.

[0055] In the above technical solution, since the image acquisition range of the fine-tuning image acquisition device is small, and when the workpiece to be processed is located in the image acquisition range of the fine-tuning image acquisition device, the angle between the predetermined line and the first preset direction is small, only one set of images of the predetermined line to be measured is acquired, which can save the time of image acquisition; in addition, by controlling the movement distance of the workpiece to be processed to be less than or equal to the first preset distance threshold, it can be avoided that the acquired image does not contain the position point due to the long movement distance.

[0056] Optionally, at least one second image acquisition device acquires second images in a sequence in which the image acquisition range gradually decreases.

[0057] Exemplarily, the image acquisition ranges of the second image acquisition devices may be different. When the second image acquisition devices are used to acquire the second image, the movable stage and the workpiece to be processed may be moved to the image acquisition ranges of the second image acquisition devices in sequence in the order in which the image acquisition ranges gradually decrease. For example, the second image acquisition device may include a coarse adjustment camera and a fine adjustment camera, and the image acquisition range of the coarse adjustment camera is larger than the image acquisition range of the fine adjustment camera. Then, the order of acquiring the second image may be: first, the coarse adjustment camera is used to acquire the second image, and then, the fine adjustment camera is used to acquire the second image. In this case, the movable stage may drive the workpiece to be processed to move from the image acquisition range of the first image acquisition device (for example, a wide-angle camera) to the image acquisition range of the coarse adjustment camera, and then from the image acquisition range of the coarse adjustment camera to the image acquisition range of the fine adjustment camera.

[0058] The above technical solution is conducive to gradually increasing the resolution of the second image, so that the physical position of the workpiece to be processed can be adjusted in sequence based on the second image, which can gradually reduce the angle between the predetermined line of the workpiece to be processed and the first preset direction, which is helpful for the accuracy of subsequent processing of the workpiece to be processed.

[0059] Optionally, after adjusting the physical position of the workpiece to be processed to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction, the method also includes: acquiring two inspection predetermined line images containing one or more predetermined lines, the two inspection predetermined line images being images obtained by the last second image acquisition device when the workpiece to be processed moves along the first preset direction, capturing one or more predetermined lines on the workpiece to be processed; determining a third position point and a fourth position point based on the two inspection predetermined line images in a one-to-one correspondence; when the inclination angle of the line between the third position point and the fourth position point relative to the first preset direction is less than or equal to a preset angle threshold, determining that the degree of parallelism between at least one predetermined line and the first preset direction meets the first preset requirement; wherein the third position point and the fourth position point respectively correspond to different feature points on the predetermined line.

[0060] Exemplarily, after adjusting the physical position of the workpiece to be processed based on the second image captured by the last second image capture device, the second image capture device can be used to capture the inspection predetermined line image, and the inspection predetermined line image can be an image containing any number of predetermined lines. The inspection predetermined line image can be a static image or any video frame in a dynamic video. The two inspection predetermined line images can be two images captured when the workpiece to be processed moves in a first preset direction, or can be two images captured when the workpiece to be processed moves in a direction opposite to the first preset direction, or can be images captured when the workpiece to be processed moves in the first preset direction and images captured when the workpiece moves in a direction opposite to the first preset direction, respectively. Similarly, the third position point and the fourth position point are position points corresponding to different feature points on the predetermined line, respectively. The specific process of determining the third position point and the fourth position point one by one based on the two inspection predetermined line images can refer to the above-mentioned embodiment of determining one or more groups of position points in sequence based on multiple groups of predetermined line images to be tested and reference position points, which will not be repeated here. Exemplarily, the inclination angle of the line between the third position point and the fourth position point relative to the first preset direction can represent the degree of parallelism between the predetermined line and the first preset direction, and the inclination angle of the line relative to the first preset direction can represent the inclination angle of the predetermined line relative to the first preset direction. When the inclination angle of the line relative to the first preset direction is less than or equal to the preset angle threshold, it can be considered that the degree of parallelism between the predetermined lines relative to the first preset direction meets the preset requirements. Among them, the preset angle threshold can be defined according to actual conditions, for example, it can be 0.1°, and the embodiment of the present invention does not limit the specific value of the preset angle threshold. In some embodiments, after the physical position of the workpiece to be processed is adjusted for the last time, before obtaining two inspection predetermined line images containing one or more predetermined lines, the workpiece to be processed can also be controlled to move to a position where the reference position point coincides with the center of the field of view of the last second image acquisition device.

[0061] The above technical solution can verify the parallelism of the predetermined lines on the workpiece to be processed after adjusting the physical position of the workpiece to be processed, which helps to ensure the subsequent processing accuracy.

[0062] Optionally, the third position point and the fourth position point are respectively located on both sides of the reference position point, and the two inspection predetermined line images are acquired after the workpiece to be processed moves from the initial position to both sides along the first preset direction by a second target distance, and the reference position point is the position point corresponding to the preset feature point on the workpiece to be processed when the workpiece to be processed is at the initial position, and the second target distance is less than or equal to the second preset distance threshold.

[0063] Exemplarily, one of the two verification predetermined line images may be an image captured by the last second image acquisition device for the predetermined line of the workpiece to be processed after the workpiece to be processed moves the second target distance from the reference position point in the first preset direction; similarly, the other image may be an image captured by the last second image acquisition device for the predetermined line of the workpiece to be processed after the workpiece to be processed moves the second target distance from the reference position point in the direction opposite to the first preset direction. Similar to the first position point and the second position point, the third position point and the fourth position point may be feature points on the predetermined lines respectively included in the two verification predetermined line images. When the movable stage and the workpiece to be processed are located at the initial position corresponding to the last second image acquisition device, the reference position point may be located within the image acquisition range of the last second image acquisition device. The description of the reference position point may refer to the above-mentioned embodiment and will not be repeated here. The second target distance may be less than or equal to the second preset distance threshold, which may be 0.5 times the length of the workpiece to be processed in the first preset direction, or may be the product of 0.5 times the length of the workpiece to be processed in the first preset direction and a preset proportional coefficient, and the preset proportional coefficient may be less than or equal to 1. The second target distance may be the same as or different from the first target distance; the second preset distance threshold may be the same as or different from the first preset distance threshold.

[0064] The above technical solution collects and verifies the predetermined line image on both sides of the reference position point, and the direction of the line between the third position point and the fourth position point can more accurately represent the direction of the predetermined line, which is conducive to ensuring the accuracy of the verification result; in addition, by controlling the movement distance of the workpiece to be processed to be less than or equal to the second preset distance threshold, it can avoid the collected image not containing the position point due to the long movement distance.

[0065] Optionally, based on the image position of the workpiece to be processed in the first image and the physical position difference between each second image acquisition device and the previous image acquisition device, a second image acquired by sequentially using at least one second image acquisition device for the workpiece to be processed is acquired, including: for the first second image acquisition device, based on the image position of the first product feature in the first image, determining the first physical position difference between the physical position of the first product feature and the physical position of the center of the field of view of the first image acquisition device; according to the second physical position difference and the first physical position difference between the first second image acquisition device and the first image acquisition device, controlling the workpiece to be processed to move to the image acquisition range of the first second image acquisition device, and acquiring the second image acquired by the first second image acquisition device; for each second image acquisition device other than the first second image acquisition device, based on the image position of the first product feature in the third image acquired by the previous second image acquisition device, determining the third physical position difference between the physical position of the first product feature and the physical position of the center of the field of view of the previous second image acquisition device; according to the fourth physical position difference and the third physical position difference between the current second image acquisition device and the previous second image acquisition device, controlling the workpiece to be processed to move to the image acquisition range of the current second image acquisition device, and acquiring the second image acquired by the current second image acquisition device.

[0066] Exemplarily, when the first image acquisition device acquires the first image, the specific position point of the movable stage may coincide with the center of the field of view of the first image acquisition device. For the convenience of description and understanding, the following description is based on the specific position point being the center of the movable stage (referred to as "stage center"), and the first product feature being the center of the workpiece to be processed (referred to as "product center"). In the first image, the pixel coordinates of the product center can be used as the image position of the product center, and the physical position of the product center can be determined based on the image position of the product center. The physical position of the field of view center of the first image acquisition device can be represented by the physical position of the stage center. The physical position difference between the product center and the stage center can be determined based on the physical position of the product center and the physical position of the stage center, and the physical position difference can be used as the first physical position difference. The physical position difference between the first second image acquisition device and the first image acquisition device is recorded as the second physical position difference, and the second physical position difference can be the physical position difference between the field of view center of the first image acquisition device and the field of view center of the first second image acquisition device. According to the first physical position difference and the second physical position difference, the workpiece to be processed can be controlled to move to the image acquisition range of the first second image acquisition device. In other words, the relative position of the workpiece to be processed and the first second image acquisition device after being moved according to the first physical position difference and the second physical position difference can be used as the relative position of the workpiece to be processed and the first second image acquisition device when acquiring the first second image.

[0067] It can be understood that since the image acquisition range of the first image acquisition device is larger than the image acquisition range of the second image acquisition device, when the physical position of the product center does not coincide with the physical position of the stage center, controlling the movement of the workpiece to be processed only according to the second physical position difference may cause the product center to be unable to fall within the image acquisition range of the first second image acquisition device. Therefore, the first physical position difference and the second physical position difference can be used to control the movement of the workpiece to be processed so that the product center falls within the image acquisition range of the first second image acquisition device.

[0068] Exemplarily, the second image captured by each second image acquisition device may include an image captured when the workpiece to be processed is located at an initial position corresponding to the second image acquisition device (referred to as an "initial image"). After the last second image acquisition device completes the acquisition of the second image, the workpiece to be processed may be located at the initial position corresponding to the last second image acquisition device, and the third physical position difference between the physical position of the product center and the physical position of the center of the field of view of the last second image acquisition device may be determined according to the image position of the product center in the initial image captured by the last second image acquisition device. According to the third physical position difference and the fourth physical position difference between the last second image acquisition device and the current second image acquisition device, the workpiece to be processed may be controlled to move to the initial position corresponding to the current second image acquisition device. The second image acquisition device may capture the second image after the workpiece to be processed moves to the initial position corresponding to the current second image acquisition device. In other words, the relative position of the workpiece to be processed and the current second image acquisition device after moving according to the third physical position difference and the fourth physical position difference may be used as the relative position of the workpiece to be processed and the current second image acquisition device when the current second image acquisition device acquires the second image.

[0069] The above technical solution can quickly and accurately control the workpiece to be processed to move within the image acquisition range of each second image acquisition device.

[0070] Optionally, determining the target physical position of at least one predetermined line based on the image position of at least one predetermined line in the third image includes: converting the image position of at least one predetermined line in the third image according to a preset conversion relationship to obtain an initial physical position of the at least one predetermined line, the initial physical position being the target physical position; or, converting the image position of at least one predetermined line in the third image according to a preset conversion relationship to obtain an initial physical position of the at least one predetermined line, and determining the target physical position of the at least one predetermined line based on the initial physical position and a positioning error corresponding to the first image acquisition device, the positioning error being an error of a physical position obtained by converting the image position in the first image acquisition device according to the preset conversion relationship; wherein the preset conversion relationship is a conversion relationship between an image coordinate system adopted by the first image acquisition device and a world coordinate system, and the physical position is a position in the world coordinate system.

[0071] Exemplarily, the third image is an image obtained by rotating the workpiece to be processed in the first image, so the image position of the predetermined line in the third image can be converted into the initial physical position of the predetermined line according to the preset conversion relationship adopted by the first image acquisition device. In some embodiments, the initial physical position of the predetermined line can be used as the target physical position of the predetermined line. In other embodiments, after the initial physical position of the predetermined line is obtained, the target physical position of the predetermined line can be comprehensively determined based on the initial physical position and the positioning error of the first image acquisition device. Specifically, since the image acquisition range of the first image acquisition device is large, its resolution is correspondingly small. Therefore, the physical position of the predetermined line determined based on the image position of the predetermined line in the image space adopted by the first image acquisition device has an error, that is, a positioning error. The image space of the third image and the image space of the first image are both image spaces adopted by the first image acquisition device. Therefore, the initial physical position can be corrected based on the positioning error corresponding to the first image acquisition device, and the corrected physical position can be regarded as the precise physical position of the current predetermined line, that is, the target physical position.

[0072] The above technical solution obtains the initial physical position according to a preset conversion relationship for the image position of the third image, and uses the initial physical position as the target physical position, or determines the target physical position based on the initial physical position and the positioning error corresponding to the first image acquisition device. This can quickly and accurately obtain the physical position of the corrected predetermined line, which is beneficial to the subsequent processing accuracy of the workpiece to be processed.

[0073] Optionally, the processing device also includes a third image acquisition device, the image acquisition range of the third image acquisition device is smaller than the image acquisition range of the first image acquisition device, and before determining the target physical position of at least one predetermined line based on the initial physical position and the positioning error corresponding to the first image acquisition device, determining the target physical position of at least one predetermined line based on the image position of the at least one predetermined line in the third image and a preset conversion relationship also includes: determining a sixth physical position difference between the physical position corresponding to the first product feature and the physical position corresponding to the second product feature at the same calibration moment based at least on a fifth physical position difference between the physical position corresponding to the first image acquisition device and the physical position corresponding to the third image acquisition device, the sixth physical position difference representing the positioning error; wherein the first product feature is a feature on the third image, the second product feature is a feature on the fourth image, the fourth image is an image acquired by the third image acquisition device for the workpiece to be processed, and the first product feature and the second product feature correspond to the same feature on the workpiece to be processed.

[0074] Exemplarily, the processing device may further include a third image acquisition device whose image acquisition range is smaller than that of the first image acquisition device. Since the resolutions of the images acquired by the first image acquisition device and the third image acquisition device are different, there is a difference between the image positions corresponding to the two, and there is also a difference between the physical positions corresponding to the two at the same time (hereinafter referred to as the calibration time). By detecting this difference, the error of the initial physical position of any predetermined line determined based on the third image can be known, and the error can be regarded as the positioning error of the first image acquisition device. The second physical position difference (ΔX2, ΔY2) between the physical position corresponding to the first product feature and the physical position corresponding to the second product feature at the same calibration time can be determined at least based on the fifth physical position difference (ΔX1, ΔY1) between the first image acquisition device and the third image acquisition device. Among them, the fifth physical position difference can be obtained in any way. The fourth image can represent the image acquired by the third image acquisition device. The second product feature is included in the fourth image. The first product feature and the second product feature correspond to the same feature on the workpiece to be processed. For example, both can be the center of the cutting path at the most central position on the wafer, which is also the center of the wafer. In one example, the first image acquisition device is a wide-angle camera, which can acquire a first image containing the entire wafer. Based on the first image acquired by the wide-angle camera, only the position of the wafer center can be roughly determined, that is, due to problems such as resolution, the wafer center cannot be accurately identified from it, and the position of the cutting road center that coincides with the wafer center cannot be accurately identified. The third image acquisition device can be a fine-tuning camera, which can acquire a relatively clear cutting road center within its field of view. It is preferable that the field of view of the fine-tuning camera (i.e., the image acquisition range) is set to only acquire a single cutting road center each time and place the cutting road center that coincides with the wafer center within the field of view of the fine-tuning camera, or by blocking the cutting road center other than the cutting road center that coincides with the wafer center, the influence of other cutting road centers is excluded, so that only the cutting road center that coincides with the wafer center exists in the fourth image acquired by the fine-tuning camera. Based on the fourth image acquired by the fine-tuning camera, the position of the cutting road center that coincides with the wafer center can be identified therefrom. From the above, it can be seen that the first product feature identified in the first image captured by the wide-angle camera is a relatively rough wafer center, and the second product feature identified in the fourth image captured by the fine-tuning camera is a relatively accurate cutting path center that coincides with the wafer center, that is, a relatively accurate wafer center. It can be seen that the first product feature and the second product feature essentially correspond to the same feature, but due to the resolution problem of the images captured by the two image acquisition devices, there is a difference in the image positions corresponding to the two, and there is also a difference between the physical positions corresponding to the two at the calibration time (that is, the sixth physical position difference). The sixth physical position difference can be used as the positioning error corresponding to the first image acquisition device.

[0075] The above technical solution uses two image acquisition devices with different field of view sizes to acquire images of the workpiece to be processed. The image acquired by the first image acquisition device with a large field of view can be used to roughly locate the predetermined line, obtain the initial physical position of the predetermined line, determine the positioning deviation of the predetermined line according to the deviation between the product features on the images acquired by the two image acquisition devices, and obtain an accurate positioning result of the predetermined line based on the positioning deviation and the rough positioning result of the predetermined line.

[0076] Optionally, the third image acquisition device is any image acquisition device of at least one second image acquisition device.

[0077] Exemplarily, any image acquisition device in the second image acquisition device can be used as the third image acquisition device. For example, when the second image acquisition device includes a fine adjustment camera and a coarse adjustment camera, the third image acquisition device can be the coarse adjustment camera in the second image acquisition device, or can be the fine adjustment camera in the second image acquisition device.

[0078] The above technical solution can save the hardware cost for determining the positioning error corresponding to the first image acquisition device and can save the time for repeatedly acquiring images by using any image acquisition device as the second image acquisition device.

[0079] Optionally, before obtaining the first image of the workpiece to be processed captured by the first image acquisition device, the method also includes: obtaining a fifth image captured by the first image acquisition device for the workpiece to be processed; determining an angle between a feature edge on the workpiece to be processed in the fifth image and a second preset direction; and controlling the rotation of the workpiece to be processed based on the angle so that the degree of parallelism between the feature edge and the second preset direction meets a second preset requirement.

[0080] Exemplarily, before acquiring the first image, the first image acquisition device may be used to acquire an image of the workpiece to be processed to obtain a fifth image. It can be understood that the fifth image may include the entire workpiece to be processed, and accordingly, may include a characteristic edge on the workpiece to be processed. The characteristic edge may be an edge on the workpiece to be processed itself. Taking a wafer as an example, the characteristic edge may be a specific cutting path edge on the wafer, such as a cutting path edge passing through the center of the wafer in the second preset direction. Exemplarily, the characteristic edge of the workpiece to be processed in the fifth image may be identified based on an image recognition algorithm, and the rotation of the workpiece to be processed may be controlled according to the angle between the characteristic edge on the workpiece to be processed and the second preset direction. For example, if the characteristic edge is tilted 1° counterclockwise relative to the second preset direction, the movable stage may be controlled to rotate 1° clockwise around the rotation axis to drive the workpiece to be processed to rotate 1° clockwise. The second preset direction may be regarded as the direction of the characteristic edge in an ideal state (which is a theoretical direction), and the second preset direction may be the same as or different from the first preset direction. The second preset requirement may be, for example, that the angle between the characteristic edge and the second preset direction is less than or equal to a preset angle threshold.

[0081] The above technical solution can first correct the physical position of the workpiece to be processed according to the fifth image captured by the first image acquisition device, which helps to make the degree of parallelism between the predetermined line and the first preset direction higher when capturing the second image. When adjusting the position of the workpiece to be processed based on the second image, the position accuracy of the corrected predetermined line (i.e., the degree of parallelism with the first preset direction) can be made higher.

[0082] Optionally, the preset conversion relationship is the conversion relationship between the image coordinate system adopted by the first image acquisition device and the world coordinate system, the physical position is the position in the world coordinate system, the world coordinate system includes a first coordinate axis, a second coordinate axis and a third coordinate axis, the workpiece to be processed can translate along the first coordinate axis and the second coordinate axis and rotate around the third coordinate axis, and the method also includes: when the first image acquisition device acquires the first image, recording a first rotation angle of the workpiece to be processed around the third coordinate axis; after adjusting the physical position of the workpiece to be processed, recording a second rotation angle of the workpiece to be processed around the third coordinate axis; wherein, the rotation angle of the workpiece to be processed before and after correction is the difference between the second rotation angle and the first rotation angle.

[0083] Exemplarily, the axes where the two grating scales of the movable stage are located can be used as the first coordinate axis and the second coordinate axis of the coordinate system respectively, and the straight line where the rotation axis of the movable stage is located can be used as the third coordinate axis. When the first image acquisition device acquires the first image, the first rotation angle of the workpiece to be processed around the third coordinate axis can be obtained. Specifically, a reference line can be preset in the world coordinate system, and the reference line can be parallel to the first coordinate axis or the second coordinate axis. A reference line can be preset on the movable stage, and the angle between the reference line and the reference line can be used as the rotation angle of the movable stage around the third coordinate axis. It can be understood that when the first image acquisition device acquires the first image, the angle between the reference line of the movable stage and the reference line can be used as the first rotation angle of the workpiece to be processed around the third coordinate axis. Similarly, after adjusting the physical position of the workpiece to be processed, the angle between the reference line of the movable stage and the reference line can be used as the second rotation angle of the workpiece to be processed around the third coordinate axis. The difference between the second rotation angle and the first rotation angle can be regarded as the rotation angle of the workpiece to be processed before and after correction.

[0084] The above technical solution can quickly and accurately obtain the rotation angle of the workpiece to be processed during the correction process, so that the target physical position obtained based on the image position conversion of the workpiece to be processed in the third image can be more accurate.

[0085] According to another aspect of the present invention, there is also provided a processing device, comprising a first image acquisition device, at least one second image acquisition device and a control device, wherein the image acquisition range of the at least one second image acquisition device is smaller than the image acquisition range of the first image acquisition device, and the control device is used to execute the above-mentioned method for determining the predetermined line position for the processing device.

[0086] See also Figure 2 As shown, it is a schematic structural diagram of a processing device according to an embodiment of the present invention. Figure 2 The processing device shown may include a first image acquisition device 202, a coarse adjustment image acquisition device 203, a fine adjustment image acquisition device 204, and a control device ( Figure 2). The image acquisition range of the first image acquisition device 202 is larger than the image acquisition range of the coarse adjustment image acquisition device 203, and the image acquisition range of the coarse adjustment image acquisition device 203 is larger than the image acquisition range of the fine adjustment image acquisition device 204. The first image acquired by the first image acquisition device 202 may include the entire workpiece to be processed, and the second images acquired by the coarse adjustment image acquisition device 203 and the coarse adjustment image acquisition device 204 may include part of the workpiece to be processed. The processing device may also include a movable stage 201, and the movable stage 201 may perform linear motion in a horizontal plane along a first preset direction and a second preset direction, and may also rotate in a horizontal plane around a rotation axis passing through the center of the stage. The first image acquisition device 202 may firstly perform image acquisition on the workpiece to be processed on the movable stage 201 to obtain a first image. The control device may acquire a first image, and based on the physical position difference between the first image acquisition device 202 and the coarse adjustment image acquisition device 203, and the image position of the workpiece to be processed in the first image, control the movable stage 201 to move from the image acquisition range of the first image acquisition device 202 to the image acquisition range of the coarse adjustment image acquisition device 203. The control device may also acquire a second image acquired by the coarse adjustment image acquisition device 203, and based on the second image acquired by the coarse adjustment image acquisition device 203, control the movable stage 201 to rotate to correct the parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction. After correcting the predetermined line on the workpiece to be processed based on the second image acquired by the coarse adjustment image acquisition device 203, the control device may control the movable stage 201 to move from the image acquisition range of the coarse adjustment image acquisition device 203 to the image acquisition range of the fine adjustment image acquisition device 204 based on the physical position difference between the coarse adjustment image acquisition device 203 and the fine adjustment image acquisition device 204. Alternatively, the control device may control the movable stage 201 to move from the image acquisition range of the coarse adjustment image acquisition device 203 to the image acquisition range of the fine adjustment image acquisition device 204 based on the physical position difference between the coarse adjustment image acquisition device 203 and the fine adjustment image acquisition device 204 and the image position of the workpiece to be processed in the second image acquired by the coarse adjustment image acquisition device 203. After the fine adjustment image acquisition device 204 acquires the second image, the control device may control the movable stage 201 to rotate based on the second image acquired by the fine adjustment image acquisition device 204 to correct the parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction again. The control device may also rotate the workpiece to be processed in the first image according to the rotation angle of the workpiece to be processed before and after the correction to obtain a third image, and determine the target physical position of at least one predetermined line based on the image position of at least one predetermined line in the third image. The processing device may also include a processing head 205, and after determining the target physical position of at least one predetermined line, the control device may control the processing head 205 to process the workpiece to be processed based on the determined target physical position.

[0087] See also Figure 3 As shown, it is a schematic block diagram of an electronic device 300 according to an embodiment of the present invention. According to another aspect of the present invention, an electronic device is also provided, including: a processor 310 and a memory 320, wherein the memory 320 stores computer program instructions, and the computer program instructions are used by the processor 310 to execute the above-mentioned method for determining the predetermined line position of the processing device when the processor 310 is running.

[0088] According to another aspect of the present invention, a storage medium is also provided, on which program instructions are stored, and when the program instructions are executed by a computer or a processor, the computer or the processor executes the corresponding steps of the above-mentioned method for determining the predetermined line position of the processing device according to the embodiment of the present invention, and is used to implement the corresponding module in the above-mentioned processing device according to the embodiment of the present invention or the corresponding module in the above-mentioned processing device. The storage medium may include, for example, a memory card of a smart phone, a storage component of a tablet computer, a hard disk of a personal computer, a read-only memory (ROM), an erasable programmable read-only memory (EPROM), a portable compact disk read-only memory (CD-ROM), a USB memory, or any combination of the above-mentioned storage media. The computer-readable storage medium may be any combination of one or more computer-readable storage media.

[0089] According to yet another aspect of the present invention, a computer program product is provided, comprising computer program instructions, which are used to execute the method for determining a predetermined line position of a processing device as described above when the computer program instructions are run.

[0090] A person skilled in the art can understand the specific implementation and beneficial effects of the above-mentioned processing device by reading the above-mentioned detailed description of the method for determining the predetermined line position of the processing device. For the sake of brevity, it will not be repeated here.

[0091] Although example embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above example embodiments are merely exemplary and are not intended to limit the scope of the present invention thereto. Various changes and modifications may be made therein by one of ordinary skill in the art without departing from the scope and spirit of the present invention. All such changes and modifications are intended to be included within the scope of the present invention as required by the appended claims.

[0092] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of the present invention.

[0093] In the several embodiments provided in this application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic, for example, the division of units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another device, or some features can be ignored or not executed.

[0094] In the description provided herein, a large number of specific details are described. However, it is understood that embodiments of the present invention can be practiced without these specific details. In some instances, well-known methods, structures and techniques are not shown in detail so as not to obscure the understanding of this description.

[0095] Similarly, it should be understood that in order to streamline the present invention and help understand one or more of the various inventive aspects, in the description of the exemplary embodiments of the present invention, the various features of the present invention are sometimes grouped together into a single embodiment, figure, or description thereof. However, the method of the present invention should not be interpreted as reflecting the following intention: the claimed invention requires more features than the features explicitly stated in each claim. More specifically, as reflected in the corresponding claims, the inventive point is that the corresponding technical problem can be solved with less than all the features of a single disclosed embodiment. Therefore, the claims following the specific embodiment are hereby expressly incorporated into the specific embodiment, wherein each claim itself serves as a separate embodiment of the present invention.

[0096] It will be understood by those skilled in the art that, except for mutually exclusive features, all features disclosed in this specification (including the accompanying claims, abstracts and drawings) and all processes or units of any method or device disclosed in this specification may be combined in any combination. Unless otherwise expressly stated, each feature disclosed in this specification (including the accompanying claims, abstracts and drawings) may be replaced by an alternative feature that provides the same, equivalent or similar purpose.

[0097] In addition, those skilled in the art will appreciate that, although some embodiments herein include certain features included in other embodiments but not other features, the combination of features of different embodiments is meant to be within the scope of the present invention and form different embodiments. For example, in the claims, any one of the claimed embodiments may be used in any combination.

[0098] The various component embodiments of the present invention can be implemented in hardware, or in software modules running on one or more processors, or in a combination thereof. It should be understood by those skilled in the art that a microprocessor or digital signal processor (DSP) can be used in practice to implement some or all of the functions of some modules in the processing device according to an embodiment of the present invention. The present invention can also be implemented as a device program (e.g., computer program and computer program product) for executing part or all of the methods described herein. Such a program implementing the present invention can be stored on a computer-readable medium, or can have the form of one or more signals. Such a signal can be downloaded from an Internet website, or provided on a carrier signal, or provided in any other form.

[0099] It should be noted that the above embodiments illustrate the present invention rather than limit it, and that those skilled in the art may devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference symbol between brackets shall not be construed as a limitation on the claims. The word "comprising" does not exclude the presence of elements or steps not listed in the claims. The word "one" or "an" preceding an element does not exclude the presence of a plurality of such elements. The present invention may be implemented by means of hardware comprising a number of different elements and by means of a suitably programmed computer. In a unit claim enumerating a number of devices, several of these devices may be embodied by the same hardware item. The use of the words first, second, and third, etc., does not indicate any order. These words may be interpreted as names.

[0100] The above is only a specific embodiment or description of a specific embodiment of the present invention, and the protection scope of the present invention is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. The protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A method for determining a predetermined line position of a processing device, characterized in that: The predetermined line is a characteristic line on the workpiece to be processed, the processing device includes a first image acquisition device and at least one second image acquisition device, the image acquisition range of the at least one second image acquisition device is smaller than the image acquisition range of the first image acquisition device, and the method includes: Acquire a first image of the workpiece to be processed acquired by the first image acquisition device, wherein the first image includes the entire workpiece to be processed; Acquire second images acquired by sequentially using the at least one second image acquisition device for the workpiece to be processed, wherein when acquiring the second image, the relative position of the workpiece to be processed and the corresponding second image acquisition device is determined based on the image position of the workpiece to be processed in the first image and the physical position difference between each second image acquisition device and the previous image acquisition device; Adjusting the physical position of the workpiece to be processed based on the second image to correct the degree of parallelism between at least one predetermined line on the workpiece to be processed and a first preset direction; Rotating the workpiece to be processed in the first image according to the rotation angles of the workpiece to be processed before and after correction to obtain a third image; A target physical position of the at least one predetermined line is determined based on the image position of the at least one predetermined line in the third image.

2. The method according to claim 1, characterized in that The adjusting the physical position of the workpiece to be processed based on the second image to correct the parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction includes: After each second image acquisition device is used to acquire the second image, the inclination angle of the at least one predetermined line relative to the first preset direction is determined based on the second image currently acquired, and the physical position of the workpiece to be processed is adjusted according to the inclination angle to correct the degree of parallelism between the at least one predetermined line on the workpiece to be processed and the first preset direction.

3. The method according to claim 2, characterized in that The step of determining the inclination angle of the at least one predetermined line relative to the first preset direction based on the currently acquired second image, and adjusting the physical position of the workpiece to be processed according to the inclination angle to correct the parallelism between the at least one predetermined line on the workpiece to be processed and the first preset direction, comprises: Acquire multiple groups of predetermined line images to be measured including one or more predetermined lines, each group of predetermined line images to be measured is an image obtained by the second image acquisition device performing image acquisition on the one or more predetermined lines on the workpiece to be processed when the workpiece to be processed moves along the first preset direction, and the second image includes the multiple groups of predetermined line images to be measured; Based on the multiple groups of predetermined line images to be measured and the reference position points, one or more groups of position points are determined in sequence, each group of position points includes a first position point and a second position point, the first position point and the second position point are respectively located on both sides of the reference position point, and along the first preset direction, the distance between the two position points respectively included in the multiple groups of position points gradually increases, the multiple groups of predetermined line images to be measured correspond to the multiple groups of position points one by one, any group of predetermined line images to be measured includes two predetermined line images to be measured corresponding to the first position point and the second position point in the corresponding group of position points, and the inclination angle of the connecting line between each group of position points relative to the first preset direction represents the inclination angle of the at least one predetermined line relative to the first preset direction; After a group of position points is determined each time, the physical position of the workpiece to be processed is adjusted according to the inclination angle of the line between the first position point and the second position point in the group of position points relative to the first preset direction, so as to correct the parallelism between the at least one predetermined line and the first preset direction; Among the reference position points and the plurality of groups of position points, different position points are position points corresponding to different feature points on the predetermined line.

4. The method according to claim 3, characterized in that The step of sequentially determining one or more groups of position points based on the multiple groups of predetermined line images to be measured and the reference position points comprises: Acquire a template image, wherein the template image contains position features and reference points associated with the predetermined line; Matching the template image with each predetermined line image of the plurality of groups of predetermined line images to be tested according to position features contained in the template image; For each predetermined line image to be tested, based on the matching result, the point in the predetermined line image to be tested corresponding to the reference point in the template image is determined as the feature point corresponding to the predetermined line image to be tested, and the reference position point and the one or more groups of position points are determined based on the feature point.

5. The method according to claim 3, characterized in that: The at least one second image acquisition device includes a coarse adjustment image acquisition device and a fine adjustment image acquisition device. The image acquisition range of the coarse adjustment image acquisition device is larger than the image acquisition range of the fine adjustment image acquisition device. The fine adjustment image acquisition device only acquires a set of predetermined line images to be measured. The set of predetermined line images to be measured acquired by the fine adjustment image acquisition device is acquired after the workpiece to be processed moves a first target distance from an initial position to both sides along the first preset direction. The first target distance is less than or equal to a first preset distance threshold. The reference position point is a position point corresponding to a preset feature point on the workpiece to be processed when the workpiece to be processed is located at the initial position.

6. The method according to any one of claims 2 to 5, characterized in that: The at least one second image acquisition device acquires the second images in a sequence in which the image acquisition range gradually decreases.

7. The method according to any one of claims 2 to 5, characterized in that: After adjusting the physical position of the workpiece to be processed to correct the parallelism between at least one predetermined line on the workpiece to be processed and the first preset direction, the method further includes: Acquire two inspection predetermined line images containing one or more predetermined lines, wherein the two inspection predetermined line images are images obtained by the last second image acquisition device performing image acquisition on the one or more predetermined lines on the workpiece to be processed when the workpiece to be processed moves along the first preset direction; Determine a third position point and a fourth position point in a one-to-one correspondence based on the two inspection predetermined line images; When the inclination angle of the line between the third position point and the fourth position point relative to the first preset direction is less than or equal to a preset angle threshold, determining that the degree of parallelism between the at least one predetermined line and the first preset direction meets a first preset requirement; The third position point and the fourth position point respectively correspond to different feature points on the predetermined line.

8. The method according to claim 7, characterized in that The third position point and the fourth position point are respectively located on both sides of the reference position point, and the two inspection predetermined line images are acquired after the workpiece to be processed moves from the initial position to both sides along the first preset direction by a second target distance respectively. The reference position point is a position point corresponding to a preset feature point on the workpiece to be processed when the workpiece to be processed is located at the initial position, and the second target distance is less than or equal to a second preset distance threshold.

9. The method according to any one of claims 1 to 5, characterized in that: The acquiring of the second image acquired by sequentially using the at least one second image acquisition device for the workpiece to be processed includes: For the first second image acquisition device, determining, based on an image position of a first product feature in the first image, a first physical position difference between a physical position of the first product feature and a physical position of a center of a field of view of the first image acquisition device; According to a second physical position difference between the first second image acquisition device and the first image acquisition device and the first physical position difference, control the workpiece to be processed to move to an image acquisition range of the first second image acquisition device, and acquire the second image acquired by the first second image acquisition device; For each second image acquisition device other than the first, Determine, based on the image position of the first product feature in the second image captured by the last second image capture device, a third physical position difference between the physical position of the first product feature and the physical position of the center of the field of view of the last second image capture device; According to the fourth physical position difference between the current second image acquisition device and the previous second image acquisition device and the third physical position difference, the workpiece to be processed is controlled to move to the image acquisition range of the current second image acquisition device, and the second image acquired by the current second image acquisition device is acquired.

10. The method according to any one of claims 1 to 5, characterized in that: The determining the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image comprises: The image position of the at least one predetermined line in the third image is converted according to a preset conversion relationship to obtain an initial physical position of the at least one predetermined line, wherein the initial physical position is the target physical position; or, Converting the image position of the at least one predetermined line in the third image according to the preset conversion relationship to obtain an initial physical position of the at least one predetermined line, and determining a target physical position of the at least one predetermined line based on the initial physical position and a positioning error corresponding to the first image acquisition device, wherein the positioning error is an error of the physical position obtained by converting the image position in the first image acquisition device according to the preset conversion relationship; The preset conversion relationship is a conversion relationship between an image coordinate system and a world coordinate system adopted by the first image acquisition device, and the physical position is a position in the world coordinate system.

11. The method according to claim 10, characterized in that The processing device further includes a third image acquisition device, the image acquisition range of the third image acquisition device is smaller than the image acquisition range of the first image acquisition device, and before determining the target physical position of the at least one predetermined line based on the initial physical position and the positioning error corresponding to the first image acquisition device, determining the target physical position of the at least one predetermined line based on the image position of the at least one predetermined line in the third image and a preset conversion relationship further includes: Determine a sixth physical position difference between a physical position corresponding to the first product feature and a physical position corresponding to the second product feature at the same calibration moment based at least on a fifth physical position difference between a physical position corresponding to the first image acquisition device and a physical position corresponding to the third image acquisition device, wherein the sixth physical position difference represents the positioning error; Among them, the first product feature is a feature on the third image, the second product feature is a feature on the fourth image, the fourth image is an image captured by the third image acquisition device for the workpiece to be processed, and the first product feature and the second product feature correspond to the same feature on the workpiece to be processed.

12. The method according to claim 10 as dependent on claim 2, characterized in that The third image acquisition device is any image acquisition device among the at least one second image acquisition device.

13. The method according to any one of claims 1 to 5, characterized in that: Before acquiring the first image of the workpiece to be processed acquired by the first image acquisition device, the method further includes: Acquire a fifth image captured by the first image acquisition device for the workpiece to be processed; Determine an angle between a feature edge on the workpiece to be processed in the fifth image and a second preset direction; The workpiece to be processed is controlled to rotate based on the included angle so that the degree of parallelism between the feature edge and the second preset direction meets a second preset requirement.

14. The method according to any one of claims 1 to 5, characterized in that: The preset conversion relationship is a conversion relationship between an image coordinate system and a world coordinate system used by the first image acquisition device, the physical position is a position in the world coordinate system, the world coordinate system includes a first coordinate axis, a second coordinate axis and a third coordinate axis, the workpiece to be processed can translate along the first coordinate axis and the second coordinate axis and rotate around the third coordinate axis, and the method further includes: When the first image acquisition device acquires the first image, recording a first rotation angle of the workpiece to be processed around the third coordinate axis; After adjusting the physical position of the workpiece to be processed, recording a second rotation angle of the workpiece to be processed around the third coordinate axis; The rotation angle of the workpiece to be processed before and after correction is the difference between the second rotation angle and the first rotation angle.

15. A processing device, characterized in that: It includes a first image acquisition device, at least one second image acquisition device and a control device, the image acquisition range of the at least one second image acquisition device is smaller than the image acquisition range of the first image acquisition device, and the control device is used to execute the method for determining the predetermined line position of a processing device as described in any one of claims 1 to 14.

16. An electronic device comprising a processor and a memory, characterized in that: The memory stores computer program instructions, which are used by the processor to execute the method for determining a predetermined line position of a processing device according to any one of claims 1 to 14 when the processor is running the computer program instructions.

17. A storage medium having program instructions stored thereon, characterized in that: The program instructions are used to execute the method for determining a predetermined line position for a processing device as described in any one of claims 1 to 14 when running.

Images