Lamp nest system and rapid heat treatment equipment

Abstract

The invention relates to the technical field of rapid heat treatment, in particular to a lamp nest system and rapid heat treatment equipment. The lamp nest system comprises a hollow shell and a honeycomb assembly. The honeycomb assembly is arranged in the hollow shell and comprises a first honeycomb part and a second honeycomb part; a plurality of first mounting through holes are formed in the first honeycomb part, a plurality of second mounting through holes are formed in the second honeycomb part, and each first mounting through hole is communicated with the corresponding second mounting through hole to form a honeycomb hole of the honeycomb assembly; a lower sinking hole is formed in the first mounting through hole, and an abutting table top is formed at the joint of the second mounting through hole and the lower sinking hole; when the lamp tube is installed in the honeycomb hole, the electric connecting piece on the top of the lamp tube abuts against the abutting table top, and the lamp tube is located in the second installation through hole. Through the design of the integrated honeycomb assembly, the manufacturing process is simplified, and the manufacturing cost is reduced; and meanwhile, the honeycomb holes of the honeycomb assembly also improve the heat dissipation efficiency of the lamp tube on the premise of ensuring the smooth installation of the lamp tube.

Description

Technical Field

[0001] The present application relates to the technical field of rapid thermal processing equipment, and in particular to a lamp nest system and rapid thermal processing equipment. Background Art

[0002] RTP (Rapid Thermal Processing) is a rapid heat treatment equipment used in semiconductor device manufacturing and material research. It controls the temperature and time of heating and cooling to change its properties or structure, thereby achieving precise control and optimized processing of materials.

[0003] The heating unit is the main component of the rapid thermal processing equipment. The heating unit in the related technology is a lamp nest formed by welding hundreds of ultra-thin-walled stainless steel pipes, stainless steel top covers and copper bottom grooves. A halogen lamp is installed inside the lamp nest, and the halogen lamp is installed on the circuit substrate through the holes at the bottom of the lamp nest.

[0004] However, welding hundreds of ultra-thin-walled stainless steel pipes is difficult, hard to rework, inconvenient to install, difficult to detect, and costly; ultra-thin-walled stainless steel pipes are easily damaged; and round steel pipes cannot match flat halogen lamps and have low heat dissipation efficiency. Summary of the invention

[0005] The present application provides a lamp nest system and rapid heat treatment equipment, which avoids a large amount of welding work in the manufacturing process through an integrated modular design, and at the same time, the structural design of the composite hole realizes efficient heat dissipation of flat halogen lamps.

[0006] In a first aspect, the present application provides a lamp nest system, which includes: a hollow shell, a honeycomb component and a lamp tube; the honeycomb component is arranged in the hollow shell, and the honeycomb component includes a first honeycomb component and a second honeycomb component stacked up and down along the longitudinal axis of the hollow shell, and the second honeycomb component is located below the first honeycomb component; the first honeycomb component is provided with a plurality of first mounting through holes arranged in an array, and the second honeycomb component is provided with a plurality of second mounting through holes arranged in an array, each of the first mounting through holes is connected to a corresponding second mounting through hole to form a honeycomb hole, and the honeycomb hole is constructed to install a heating component; a sinking hole is provided in the first mounting through hole, and an abutting table is formed at the connection between the second mounting through hole and the sinking hole; the heating component includes a lamp tube and an electrical connector arranged on the top of the lamp tube, the first mounting through hole allows the electrical connector to pass through, and the second mounting through hole matches the lamp tube so that the electrical connector abuts against the abutting table, and the lamp tube is located in the second mounting through hole.

[0007] In one possible implementation, the first mounting through hole includes a first circular hole, a sinking step is provided in the first circular hole, and the sinking hole is provided on the sinking step; the sinking hole is composed of a second circular hole and a first waist hole to form a plum blossom-shaped sinking hole; the second mounting through hole includes a second waist hole, the second waist hole has the same size as the first waist hole, and a contact table is formed at the connection between the second waist hole and the second circular hole.

[0008] The honeycomb hole formed by the above-mentioned first mounting through hole and the second mounting through hole is a three-step hole, which includes a circular hole, a plum blossom hole and a waist hole arranged from top to bottom, which can not only ensure the smooth insertion of the flat halogen lamp, but also ensure that the distance between the surrounding walls of the flat halogen lamp housing and the inner wall of the honeycomb hole is consistent, ensuring that the heat of the flat halogen lamp can be evenly dissipated, thereby improving the heat dissipation efficiency of the flat halogen lamp.

[0009] In a possible implementation, a transition arc is provided at the connection between the second circular hole and the first waist hole.

[0010] The setting of the transition arc enables the second circle to be smoothly connected to the first waist hole, ensuring that the flat halogen lamp can pass smoothly.

[0011] In one possible implementation, the hollow shell is a cylindrical hollow shell, and the honeycomb component is a cylindrical component.

[0012] The cylindrical hollow shell and the cylindrical honeycomb component can match the wafer shape as much as possible, reduce the product volume, and have greater space utilization.

[0013] In one possible implementation, the second honeycomb component has an upper surface and a lower surface along the longitudinal axis of the hollow shell, and a first annular flange and a second annular flange extend outward from the outer periphery of the second honeycomb component, the first annular flange is flush with the upper surface, and the second annular flange is flush with the lower surface; the inner wall of the hollow shell is provided with a first connecting groove and a second connecting groove, the first annular flange is connected to the first connecting groove, and the second annular flange is connected to the second connecting groove.

[0014] The first annular flange is connected to the first connecting groove, and the second annular flange is connected to the second connecting groove, which can ensure that the second honeycomb component is fixed in the hollow shell; at the same time, when the second honeycomb is arranged in the hollow shell, the first annular flange and the second annular flange can also form a closed cavity between the inner wall of the hollow shell and the outer peripheral wall of the second honeycomb component.

[0015] In one possible implementation, the outer diameter of the first annular flange is smaller than the outer diameter of the second annular flange.

[0016] The installation of the second honeycomb is positioned by the first annular flange and the second annular flange of different sizes, thereby improving the installation accuracy and efficiency of the second honeycomb component.

[0017] In a possible implementation, the outer diameter of the first honeycomb component is smaller than the outer diameter of the second honeycomb component.

[0018] A second annular flange extends outward from the outer circumference of the second honeycomb, and the second annular flange is flush with the lower surface; when the first honeycomb component is arranged on the upper surface of the second honeycomb component, since the outer diameter of the first honeycomb component is smaller than the outer diameter of the second honeycomb component, an abutment table is formed between the upper surfaces of the first honeycomb component and the second honeycomb component; the inner wall of the hollow shell can be provided with an abutment protrusion matching the abutment table to limit the installation of the second honeycomb component.

[0019] In one possible implementation, when the honeycomb assembly is disposed in the hollow shell, a cooling channel is formed between the inner wall of the hollow shell and the outer peripheral wall of the second honeycomb component; a plurality of cooling grooves are disposed on the second honeycomb component, the plurality of cooling grooves penetrate the second honeycomb component in a radial direction of the second honeycomb component, and a second mounting through hole is disposed between two adjacent cooling grooves; the plurality of cooling grooves are connected to the cooling channel.

[0020] The coolant enters the cooling groove through the cooling channel, and a second mounting hole is provided on the left and right sides of each cooling groove, so that the coolant can dissipate heat for the flat halogen lamp in the second mounting hole; that is, the heat generated by each flat halogen lamp can be taken away by the coolant in the cooling grooves on the adjacent two sides, allowing the high-energy radiation heat source to enter a stable state quickly and efficiently, providing stable heat dissipation efficiency, and improving the service life and reliability of the radiation source.

[0021] In one possible implementation, the cooling channel includes a first cooling channel and a second cooling channel, the first cooling channel and the second cooling channel are symmetrically distributed along the horizontal axis of the hollow shell, and a seal is provided at the junction of the first cooling channel and the second cooling channel; the cooling groove has a first opening and a second opening along the radial direction of the second honeycomb component, the first opening is connected to the first cooling channel, and the second opening is connected to the second cooling channel.

[0022] A seal is provided at the junction of the first cooling channel and the second cooling channel, so that the coolant in the first cooling channel will not flow directly to the second cooling channel, and the coolant in the second cooling channel will not flow directly to the first cooling channel, thereby ensuring the cooling effect of the coolant; at the same time, after the first coolant enters the first cooling channel, it enters the cooling groove from the first opening, and after the second coolant enters the second cooling channel, it enters the cooling groove from the second opening. The first coolant and the second coolant merge in the cooling groove, and multiple inlets and outlets ensure that the coolant is sufficient and uniform, thereby improving the heat dissipation efficiency of the coolant for the flat halogen lamp in the second mounting hole. In a possible implementation method, the bottom of the hollow shell is provided with a first water inlet, a second water inlet, a first water outlet, and a second water outlet; the first water inlet and the first water outlet are both connected to the first cooling channel; the second water inlet and the second water outlet are both connected to the second cooling channel.

[0023] The first coolant enters the first cooling channel through the first water inlet and flows out from the first water outlet after completing the thermal cycle; the second coolant enters the second cooling channel through the second water inlet and flows out from the second water outlet after completing the thermal cycle, so that the coolant can circulate and be replaced.

[0024] In a possible implementation, a plurality of support bases are disposed at the bottom of the hollow shell, and the plurality of support bases are arranged at the same interval along the circumference of the hollow shell.

[0025] The support base is used to support the hollow shell. A plurality of support bases arranged at equal intervals along the circumference of the hollow shell allow the hollow shell to be subjected to uniform force, thereby improving support stability.

[0026] In one possible implementation, a first positioning pin and a second positioning pin are provided at the bottom of the hollow shell, the first positioning pin and the second positioning pin are symmetrically distributed along the radial direction of the hollow shell, and the first positioning pin and the second positioning pin are constructed to position the hollow shell in an assembly device for installing the lamp nest system.

[0027] The first positioning pin and the second positioning pin are used to position the hollow shell when the lamp nest system is installed in the assembly equipment, so as to improve the assembly accuracy and assembly efficiency.

[0028] In one possible implementation, the honeycomb component is made of a heat-conducting material, and the heat-conducting material includes one of copper, aluminum, steel, silicon carbide or ceramic.

[0029] Honeycomb components made of highly thermally conductive materials allow for more efficient heat dissipation.

[0030] In one possible implementation, the honeycomb component is formed in one piece.

[0031] The integrated modular design avoids a lot of welding work in the manufacturing process, improves product reliability, facilitates installation and maintenance, and reduces manufacturing costs.

[0032] In a possible implementation, outer surfaces of the first honeycomb component and the second honeycomb component are provided with a protective coating.

[0033] The protective coating may be a nickel coating, which can protect the first honeycomb component and the second honeycomb component to prevent the outer surfaces of the first honeycomb component and the second honeycomb component from being corroded and rusted.

[0034] In a second aspect, the present application also provides a rapid thermal processing device, including the lamp nest system in the first aspect.

[0035] The lamp nest system provided by this application has the following technical effects:

[0036] The integrated modular design of honeycomb components avoids a lot of welding work in the manufacturing process, improves product reliability, facilitates installation and maintenance, and reduces manufacturing costs.

[0037] The honeycomb holes of the honeycomb component are three-order holes, including circular holes, plum blossom holes and waist holes arranged from top to bottom, which can not only ensure the smooth insertion of the flat halogen lamp, but also ensure that the distance between the surrounding walls of the flat halogen lamp housing and the inner wall of the honeycomb hole is consistent, ensuring that the heat of the flat halogen lamp can be evenly dissipated, thereby improving the heat dissipation efficiency of the flat halogen lamp.

[0038] At the same time, the cooling system of the lamp nest system can quickly and efficiently allow the high-energy radiant heat source to enter a stable state, providing stable heat dissipation efficiency and improving the service life and reliability of the radiation source. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 A schematic diagram of the structure of a lamp nest system provided in an embodiment of the present application;

[0040] Figure 2 A schematic diagram of the three-dimensional structure of a honeycomb component of a lamp nest system provided in an embodiment of the present application;

[0041] Figure 3 A schematic cross-sectional view of a honeycomb component of a lamp nest system provided in an embodiment of the present application;

[0042] Figure 4 A schematic top view of a honeycomb hole of a honeycomb assembly provided in an embodiment of the present application;

[0043] Figure 5 A schematic diagram of the three-dimensional structure of a honeycomb hole of a honeycomb component provided in an embodiment of the present application;

[0044] Figure 6A schematic diagram of the main structure of a honeycomb component of a lamp nest system provided in an embodiment of the present application;

[0045] Figure 7 A schematic side view of the structure of a honeycomb component of a lamp nest system provided in an embodiment of the present application;

[0046] Figure 8 A schematic diagram of the three-dimensional structure of a second honeycomb component of a honeycomb assembly provided in an embodiment of the present application;

[0047] Fig. 9 A schematic diagram of the structure of a hollow shell of a lamp nest system provided in an embodiment of the present application;

[0048] Fig.10 This is a schematic diagram of the structure of the lamp nest system provided in an embodiment of the present application from a bottom up view.

[0049] Reference numerals:

[0050] 100-hollow shell;

[0051] 101-first water inlet; 102-second water inlet; 103-first water outlet; 104-second water outlet; 105-support base; 106-first positioning pin; 107-first cooling channel;

[0052] 200-honeycomb components;

[0053] 201-first honeycomb component; 202-second honeycomb component; 2011-first mounting through hole; 2021-second mounting through hole;

[0054] 2012-first circular hole; 2013-sunken step; 2014-second waist hole; 2015-second circular hole; 2016-first waist hole; 2017-abutting table; 2022-first annular flange; 2023-second annular flange; 2024-cooling groove. DETAILED DESCRIPTION

[0055] The lamp nest in the related art is welded from hundreds of ultra-thin stainless steel pipes, of which 409 ultra-thin stainless steel pipes are welded to the stainless steel upper cover and the copper bottom groove to form a closed cavity, in which the halogen lamp is installed. However, the ultra-thin stainless steel pipes are too thin and easy to be damaged. The 409 ultra-thin stainless steel pipes are difficult to weld, difficult to rework, inconvenient to install, difficult to detect, and costly. In addition, the round steel pipe cannot match the flat halogen lamp, and the heat dissipation efficiency is low.

[0056] Based on this, the embodiments of the present application provide a lamp nest system and a rapid heat treatment device, which avoid a large amount of welding work in the manufacturing process through an integrated modular design, and achieve efficient heat dissipation of flat halogen lamps through the structural design of composite holes.

[0057] In order to make the purpose, technical scheme and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings. The terms used in the following embodiments are only for the purpose of describing specific embodiments, and are not intended to be used as limitations to the present application. As used in the specification and the appended claims of the present application, the singular expressions "one", "a kind of", "said", "above", "the" and "this" are intended to also include, for example, "one or more" such expressions, unless there is clearly an opposite indication in the context.

[0058] References to "one embodiment" or "some embodiments" etc. described in this specification mean that one or more embodiments of the present application include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the sentences "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0059] like Figure 1-Figure 4 As shown, an embodiment of the present application provides a lamp nest system, which includes: a cylindrical hollow shell 100 and a cylindrical honeycomb component 200, the honeycomb component 200 is arranged in the hollow shell 100, the hollow shell 100 has a cylindrical cavity, the cylindrical cavity has a first opening and a second opening along its longitudinal axis, the first opening is located at the top of the hollow shell 100, and the second opening is located at the bottom of the hollow shell 100, the honeycomb component 200 is arranged in the cylindrical cavity of the hollow shell 100 from the first opening, or the honeycomb component 200 can also be arranged in the cylindrical cavity of the hollow shell 100 from the second opening.

[0060] Among them, the cylindrical hollow shell 100 and the cylindrical honeycomb component 200 can match the wafer shape, reduce the product volume, and have greater space utilization.

[0061] The honeycomb assembly 200 includes a first honeycomb component 201 and a second honeycomb component 202 stacked up and down along the longitudinal axis of the hollow shell 100 , and the second honeycomb component 202 is located below the first honeycomb component 201 .

[0062] The first honeycomb component 201 is provided with a plurality of first mounting through holes 2011 arranged in an array, and the second honeycomb component 202 is provided with a plurality of second mounting through holes 2021 arranged in an array, the central axis of each first mounting through hole 2011 coincides with the central axis of a corresponding second mounting through hole 2021, and each first mounting through hole 2011 is connected to a corresponding second mounting through hole 2021.

[0063] Among them, the number of the first mounting through holes 2011 and the number of the second mounting through holes 2021 are equal, and 392 first mounting through holes 2011 arranged in an array can be set on the first honeycomb component 201. The 392 first mounting through holes 2011 are arranged in an array to form an approximate hexagon, so as to set as many first mounting through holes 2011 as possible on the first honeycomb component 201 to avoid wasting the remaining area on the first honeycomb component 201.

[0064] The lamp nest system provided in the embodiment of the present application further includes: a plurality of heating components, the number of the heating components is equal to the number of the second mounting through holes 2021 , and each heating component is correspondingly arranged in one of the second mounting through holes 2021 .

[0065] In the embodiment of the present application, the honeycomb component 200 may be an integrally formed structure.

[0066] The honeycomb component 200 can be made of a whole piece of metal or a whole piece of high thermal conductivity material through mechanical processing at one time. It is an integrated process without welding, has no internal contact thermal resistance, and does not have stress concentration at the weld, thus having a longer service life and reliability.

[0067] The heat conductive material may include one of copper, aluminum, steel, silicon carbide or ceramics, etc. The honeycomb assembly 200 made of a high heat conductive material enables higher heat dissipation efficiency.

[0068] The above honeycomb assembly 200 avoids a lot of welding work in the manufacturing process through an integrated modular design, improves product reliability, facilitates installation and maintenance, and reduces manufacturing costs.

[0069] In the embodiment of the present application, the hollow shell 100 may be made of stainless steel.

[0070] The heating component can be a flat halogen lamp, which includes a lamp tube and an electrical connector connected to the top of the lamp tube. The lamp tube is a flat lamp tube, and the electrical connector can be a cylindrical structural member, and the axial diameter of the electrical connector is greater than the axial diameter of the lamp tube. When installing the heating component in the second installation through hole 2021, the heating component is inserted from the first installation through hole 2011 and finally arranged in the second installation through hole 2021.

[0071] The hole wall of the second mounting through hole 2021 matches the shape of the lamp tube.

[0072] like Figure 5 As shown, the first mounting through hole 2011 may include a first circular hole 2012, the size of which allows the electrical connector of the heating component to pass through; a sinking step 2013 is provided in the first circular hole 2012, and a sinking hole is provided on the sinking step 2013, and the sinking hole is composed of a second circular hole 2015 and a first waist hole 2016 to form a plum blossom-shaped sinking hole.

[0073] Among them, the first waist hole 2016 includes an arc part and a straight part. When the second circular hole 2015 and the first waist hole 2016 are combined, the second circular hole 2015 covers the straight part of the first waist hole 2016, and the second circular hole 2015 is connected to the arc part of the first waist hole 2016, finally forming a plum blossom-shaped sinking hole.

[0074] A transition arc is provided at the connection between the second circular hole 2015 and the first waist hole 2016, so that the second circular hole 2015 and the first waist hole 2016 are smoothly connected, ensuring that the flat halogen lamp can pass smoothly.

[0075] The second mounting through hole 2021 includes a second waist hole 2014, which is the same size as the first waist hole 2016. After the second waist hole 2014 and the first waist hole 2016 are stacked, the arc portion of the second waist hole 2014 coincides with the arc portion of the first waist hole 2016, and the straight portion of the second waist hole 2014 is exposed in the first circular hole 2012 through the second circular hole 2015, so that a contact table 2017 is formed at the connection between the second waist hole 2014 and the second circular hole 2015 of the sinking hole.

[0076] When the heating assembly is installed into the second installation through hole 2021 , the electrical connector abuts against the abutting table 2017 , and the lamp tube is located in the second installation through hole 2021 .

[0077] The honeycomb holes of the above-mentioned honeycomb component 200 are three-order holes, including circular holes, plum blossom holes and waist holes arranged from top to bottom, which can not only ensure the smooth insertion of the flat halogen lamp, but also ensure that the distance between the surrounding walls of the flat halogen lamp housing and the inner wall of the honeycomb hole is consistent, ensuring that the heat of the flat halogen lamp can be evenly dissipated, thereby improving the heat dissipation efficiency of the flat halogen lamp.

[0078] At the same time, the honeycomb holes of the honeycomb assembly 200 can also ensure more effective fixing of the flat halogen lamp.

[0079] In the embodiment of the present application, a protective coating is provided on the outer surfaces of the first honeycomb component 201 and the second honeycomb component 202. The protective coating may be a nickel coating to protect the first honeycomb component 201 and the second honeycomb component 202 and prevent the outer surfaces of the first honeycomb component 201 and the second honeycomb component 202 from corrosion and rust.

[0080] The inner walls of the honeycomb holes of the honeycomb assembly 200 are not plated, so as to ensure that the flat halogen lamp is in direct contact with the highly thermally conductive honeycomb component.

[0081] like Figure 7 As shown, in the embodiment of the present application, the second honeycomb component 202 has an upper surface and a lower surface along the longitudinal axis of the hollow shell 100, and the outer periphery of the second honeycomb component 202 extends outward with a first annular flange 2022 and a second annular flange 2023, the first annular flange 2022 is flush with the upper surface, and the second annular flange 2023 is flush with the lower surface.

[0082] The inner wall of the hollow shell 100 is provided with a first connecting groove and a second connecting groove. When the second honeycomb component 202 is set in the hollow shell 100 from the second opening at the bottom of the hollow shell 100, the first annular flange 2022 is connected to the first connecting groove, and at the same time, the second annular flange 2023 is connected to the second connecting groove; so that the second honeycomb component 202 is fixed in the hollow shell 100.

[0083] like Figure 6 As shown, in the embodiment of the present application, the outer diameter of the first annular flange 2022 is smaller than the outer diameter of the second annular flange 2023. The first annular flange 2022 and the second annular flange 2023 of different sizes are used to position the installation of the second honeycomb member 202, thereby improving the installation accuracy and efficiency of the second honeycomb member 202.

[0084] In the embodiment of the present application, the outer diameter of the first honeycomb component 201 is smaller than the outer diameter of the second honeycomb component 202 .

[0085] At this time, a second annular flange 2023 extends outward from the outer periphery of the second honeycomb component 202, and the second annular flange 2023 is flush with the lower surface; when the first honeycomb component 201 is arranged on the upper surface of the second honeycomb component 202, since the outer diameter of the first honeycomb component 201 is smaller than the outer diameter of the second honeycomb component 202, an abutment table is formed between the upper surfaces of the first honeycomb component 201 and the second honeycomb component 202; the inner wall of the hollow shell 100 can be provided with an abutment protrusion matching the abutment table to limit the installation of the second honeycomb component 202.

[0086] In the embodiment of the present application, there is also a gap between the first annular flange 2022 and the first connecting groove, and the gap is less than 0.2 mm. After the first annular flange 2022 is connected to the first connecting groove, the two are welded to further ensure that the second honeycomb component 202 is fixed in the hollow shell 100; at the same time, when the second honeycomb component 202 is set in the hollow shell 100, a closed cavity is formed between the inner wall of the hollow shell 100 and the outer peripheral wall of the second honeycomb component 202.

[0087] like Figure 8As shown, in the embodiment of the present application, when the honeycomb component 200 is arranged in the hollow shell 100, a cooling channel is formed between the inner wall of the hollow shell 100 and the outer peripheral wall of the second honeycomb component 202; a plurality of cooling grooves 2024 are arranged on the second honeycomb component 202, and the plurality of cooling grooves 2024 penetrate the second honeycomb component 202 along the radial direction of the second honeycomb component 202, and the plurality of cooling grooves are all connected to the cooling channel; a second mounting through hole 2021 is arranged between two adjacent cooling grooves 2024.

[0088] The coolant enters the cooling slots through the cooling channel. Second mounting holes 2021 are provided on the left and right sides of each cooling slot, so that the coolant can dissipate heat for the flat halogen lamp in the second mounting holes 2021 .

[0089] In other words, the heat generated by each flat halogen lamp can be taken away by the coolant in the cooling grooves on both adjacent sides, allowing the high-energy radiation heat source to enter a stable state quickly and efficiently, providing stable heat dissipation efficiency and improving the service life and reliability of the radiation source.

[0090] In the embodiment of the present application, the cooling groove may be a square groove, which allows a large amount of coolant to pass through in one direction, taking away a large amount of heat and improving the heat dissipation efficiency.

[0091] In the embodiment of the present application, the cooling channel may include a first cooling channel 107 and a second cooling channel. The first cooling channel 107 and the second cooling channel are symmetrically distributed along the horizontal axis of the hollow shell 100, and a seal is provided at the junction of the first cooling channel 107 and the second cooling channel, so that the coolant in the first cooling channel 107 will not flow directly to the second cooling channel, and the coolant in the second cooling channel will not flow directly to the first cooling channel 107, thereby ensuring the cooling effect of the coolant.

[0092] The cooling groove 2024 has a first opening and a second opening along the radial direction of the second honeycomb component 202 . The first opening and the second opening are connected to each other, and the first opening is connected to the first cooling channel 107 , and the second opening is connected to the second cooling channel.

[0093] That is to say, after the first coolant enters the first cooling channel 107, it enters the cooling groove from the first opening. After the second coolant enters the second cooling channel, it enters the cooling groove from the second opening. The first coolant and the second coolant merge in the cooling groove. Multiple inlets and outlets ensure that the coolant is sufficient and uniform, thereby improving the heat dissipation efficiency of the coolant on the flat halogen lamp in the second mounting hole 2021.

[0094] like Fig. 9 and Fig.10As shown, in the embodiment of the present application, a first water inlet 101, a second water inlet 102, a first water outlet 103 and a second water outlet 104 are provided at the bottom of the hollow shell 100; the first water inlet 101 and the first water outlet 103 are both connected to the first cooling channel, and the first coolant enters the first cooling channel 107 through the first water inlet 101, and flows out from the first water outlet 103 after completing the thermal cycle; the second water inlet 102 and the second water outlet 104 are both connected to the second cooling channel, and the second coolant enters the second cooling channel through the second water inlet 102, and flows out from the second water outlet 104 after completing the thermal cycle; so that the coolant can be circulated and replaced.

[0095] like Figure 1 As shown, in the embodiment of the present application, a plurality of support bases 105 are disposed at the bottom of the hollow shell 100 , and the plurality of support bases 105 are arranged at the same interval along the circumference of the hollow shell 100 .

[0096] The support base 105 is used to support the hollow shell 100 . A plurality of support bases 105 arranged at the same interval along the circumference of the hollow shell 100 allow the hollow shell 100 to be subjected to uniform force, thereby improving support stability.

[0097] Four support bases 105 are disposed at the bottom of the hollow shell 100 , and the four support bases 105 are arranged at the same distance along the circumference of the hollow shell 100 .

[0098] like Figure 1 As shown, in the embodiment of the present application, a first positioning pin 106 and a second positioning pin are provided at the bottom of the hollow shell 100, and the first positioning pin 106 and the second positioning pin are symmetrically distributed along the radial direction of the hollow shell 100. The first positioning pin 106 and the second positioning pin are used to position the hollow shell 100 when installing the lamp nest system into the assembly equipment, so as to improve the assembly accuracy and assembly efficiency.

[0099] The embodiment of the present application also provides a rapid thermal processing device, which includes the lamp nest system described above.

[0100] In summary, the embodiment of the present application provides a lamp nest system and a rapid thermal processing device, the lamp nest system comprising: a hollow shell 100, a honeycomb component 200 and a lamp tube; the honeycomb component 200 is arranged in the hollow shell 100, and the honeycomb component 200 comprises a first honeycomb component 201 and a second honeycomb component 202 stacked up and down along the longitudinal axis of the hollow shell 100, and the second honeycomb component 202 is located below the first honeycomb component 201; the first honeycomb component 201 is provided with a plurality of first mounting through holes 2011 arranged in an array, and the second honeycomb component 202 is provided with a plurality of second mounting through holes 2021 arranged in an array, and each first mounting through hole 2011 is provided with a plurality of first ... The central axis of the mounting through hole 2011 coincides with the central axis of a corresponding second mounting through hole 2021, and each first mounting through hole 2011 is connected to a corresponding second mounting through hole 2021; a sink hole is arranged in the first mounting through hole 2011, and abutment table 2017 is formed at the connection between the second mounting through hole 2021 and the sink hole; the heating assembly includes a lamp tube and an electrical connector connected to the top of the lamp tube, the first mounting through hole 2011 allows the electrical connector to pass through, and the second mounting through hole 2021 matches the lamp tube so that the electrical connector abuts against the abutment table, and the lamp tube is located in the second mounting through hole 2021. The integrated honeycomb component design avoids a lot of welding work in the manufacturing process, improves product reliability, facilitates installation and maintenance, and reduces manufacturing costs; at the same time, the honeycomb holes of the honeycomb components are three-order holes, including circular holes, plum blossom holes and waist holes arranged from top to bottom, which can not only ensure the smooth insertion of the flat halogen lamp, but also ensure that the distance between the surrounding walls of the flat halogen lamp housing and the inner wall of the honeycomb hole is consistent, ensuring that the heat of the flat halogen lamp can be evenly dissipated, thereby improving the heat dissipation efficiency of the flat halogen lamp.

[0101] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A lamp nest system, characterized in that: include: Hollow shells and honeycomb components; The honeycomb assembly is disposed in the hollow shell, and the honeycomb assembly comprises a first honeycomb component and a second honeycomb component stacked up and down along the longitudinal axis of the hollow shell, wherein the second honeycomb component is located below the first honeycomb component; The first honeycomb member is provided with a plurality of first mounting through holes arranged in an array, and the second honeycomb member is provided with a plurality of second mounting through holes arranged in an array, each of the first mounting through holes is connected to a corresponding one of the second mounting through holes to form a honeycomb hole, and the honeycomb hole is configured to install a heating assembly; A sinking hole is provided in the first mounting through hole, and an abutting table is formed at the connection between the second mounting through hole and the sinking hole; The heating assembly includes a lamp tube and an electrical connector arranged on the top of the lamp tube, the first mounting through hole allows the electrical connector to pass through, and the second mounting through hole matches the lamp tube so that the electrical connector abuts against the abutting table, and the lamp tube is located in the second mounting through hole.

2. The lamp nest system according to claim 1, characterized in that: The first mounting through hole comprises a first circular hole, a sinking step is arranged in the first circular hole, and the sinking hole is arranged on the sinking step; The sinking hole is formed by combining the second circular hole and the first waist hole to form a plum blossom-shaped sinking hole; The second mounting through hole comprises a second waist hole, the second waist hole has the same size as the first waist hole, and an abutting table is formed at the connection between the second waist hole and the second circular hole.

3. The lamp nest system according to claim 2, characterized in that: A transition arc is arranged at the connection between the second circular hole and the first waist hole.

4. The lamp nest system according to claim 1, characterized in that: The hollow shell is a cylindrical hollow shell, and the honeycomb component is a cylindrical component.

5. The lamp nest system according to claim 4, characterized in that: The second honeycomb member has an upper surface and a lower surface along the longitudinal axis of the hollow shell, and a first annular flange and a second annular flange extend outward from the outer periphery of the second honeycomb member, the first annular flange is flush with the upper surface, and the second annular flange is flush with the lower surface; The inner wall of the hollow shell is provided with a first connecting groove and a second connecting groove, the first annular flange is connected to the first connecting groove, and the second annular flange is connected to the second connecting groove.

6. The lamp nest system according to claim 5, characterized in that: The outer diameter of the first annular flange is smaller than the outer diameter of the second annular flange.

7. The lamp nest system according to claim 1, characterized in that: The outer diameter of the first honeycomb member is smaller than the outer diameter of the second honeycomb member.

8. The lamp nest system according to claim 4, characterized in that: When the honeycomb component is disposed in the hollow shell, a cooling channel is formed between the inner wall of the hollow shell and the outer peripheral wall of the second honeycomb component; The second honeycomb member is provided with a plurality of cooling grooves, the plurality of cooling grooves penetrate the second honeycomb member in a radial direction of the second honeycomb member, and the second mounting through hole is provided between two adjacent cooling grooves; The plurality of cooling grooves are in communication with the cooling channel.

9. The lamp nest system according to claim 8, characterized in that: The cooling channel comprises a first cooling channel and a second cooling channel, the first cooling channel and the second cooling channel are symmetrically distributed along the horizontal axis of the hollow shell, and a sealing member is provided at the junction of the first cooling channel and the second cooling channel; The cooling through groove has a first opening and a second opening along the radial direction of the second honeycomb member. The first opening is communicated with the first cooling channel, and the second opening is communicated with the second cooling channel.

10. The lamp nest system according to claim 9, characterized in that: The bottom of the hollow shell is provided with a first water inlet, a second water inlet, a first water outlet and a second water outlet; The first water inlet and the first water outlet are both in communication with the first cooling channel; The second water inlet and the second water outlet are both in communication with the second cooling channel.

11. The lamp nest system according to claim 4, characterized in that: A plurality of support bases are disposed at the bottom of the hollow shell, and the plurality of support bases are arranged at the same interval along the circumference of the hollow shell.

12. The lamp nest system according to claim 4, characterized in that: A first positioning pin and a second positioning pin are provided at the bottom of the hollow shell, and the first positioning pin and the second positioning pin are symmetrically distributed along the radial direction of the hollow shell, and the first positioning pin and the second positioning pin are constructed to position the hollow shell in an assembly device for installing the lamp nest system.

13. The light nest system according to claim 1, characterized in that: The honeycomb component is made of a heat-conducting material, and the heat-conducting material includes one of copper, aluminum, steel, silicon carbide or ceramic.

14. The light nest system according to claim 1, characterized in that: The honeycomb component is integrally formed.

15. The lamp nest system according to claim 1, characterized in that: The outer surfaces of the first honeycomb component and the second honeycomb component are provided with a protective coating.

16. A rapid thermal processing device, characterized in that: A lamp nest system comprising any one of claims 1-15.

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