Test method and system, data processing method and device and storage medium

Abstract

A test method and system, a data processing method, a device and a storage medium, the test method comprising: starting from an intermediate reference value of a condition parameter, performing a pre-scan test for acquiring a current and voltage change relationship, and ending the pre-scan test when the current or voltage meets a preset condition, a condition parameter value which is loaded at present when the pre-scanning is ended is used as a starting value of a main scanning test, the condition parameter is voltage or current, and the intermediate reference value is between the starting value and a final value of the main scanning test; starting from the initial value, carrying out a main scanning test for obtaining a current and voltage change relationship, and ending the main scanning test when the current or the voltage meets a preset condition, so as to obtain detection parameter values corresponding to condition parameter values under the main scanning test, the scanning directions of the main scanning test and the pre-scanning test are opposite. According to the invention, the accuracy of the result of the main scanning test is improved.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of electrical testing technology, and in particular to a testing method and system thereof, a data processing method, a device, and a storage medium. Background Art

[0002] In current mass production tests, when encountering test item debugging failure, low yield, customer return of materials (RMA), etc., it is often necessary to perform current-voltage (IV) characteristic tests on the relevant pins of the product to be tested, so as to evaluate the performance of the product to be tested (for example, chip) based on the current-voltage curve.

[0003] A general current-voltage characteristic test directly gives the starting value (e.g., starting voltage) and final value (e.g., ending voltage) of the conditional parameter, and continuously increases or decreases the conditional parameter value from the starting value to perform a scan test until the loaded conditional parameter reaches the final value.

[0004] However, the above current-voltage characteristic test method is difficult to accurately characterize the actual performance of the product to be tested. Summary of the invention

[0005] The problem solved by the embodiments of the present invention is to provide a test method and system thereof, a data processing method, a device and a storage medium to improve the accuracy of current-voltage characteristic testing.

[0006] To solve the above problems, an embodiment of the present invention provides a testing method, comprising: starting from an intermediate reference value of a conditional parameter, performing a pre-scan test for obtaining the relationship between current and voltage changes, and ending the pre-scan test when the current or voltage meets a preset condition, and using the conditional parameter value currently loaded when the pre-scan is ended as the starting value of the main scan test, wherein the conditional parameter is voltage or current, and the intermediate reference value is between the starting value and the final value of the main scan test; starting from the starting value, performing a main scan test for obtaining the relationship between current and voltage changes, and ending the main scan test when the current or voltage meets the preset condition, so as to obtain the detection parameter values ​​corresponding to the various conditional parameter values ​​under the main scan test, and the scanning directions of the main scan test and the pre-scan test are opposite.

[0007] Correspondingly, an embodiment of the present invention also provides a data processing method, including: obtaining a test data file of one or more products to be tested, the test data file including test data obtained by performing a scanning test on the products to be tested, the scanning test being used to obtain the relationship between current and voltage changes, the test data file including each condition parameter value, and a detection parameter value correspondingly detected under each condition parameter value, one of the condition parameter and the detection parameter being voltage, and the other being current; parsing the test data file to extract the condition parameter value and the detection parameter value; using the extracted data to output a test curve of the product to be tested, the test curve being used to characterize the relationship between current and voltage changes.

[0008] Correspondingly, an embodiment of the present invention also provides a test system, including: a pre-scan module, which is used to start from the intermediate reference value of the conditional parameter, perform a pre-scan test for obtaining the relationship between current and voltage changes, and end the pre-scan test when the current or voltage meets the preset condition, and use the conditional parameter value currently loaded when the pre-scan ends as the starting value of the main scan test, the conditional parameter is voltage or current, and the intermediate reference value is between the starting value and the final value of the main scan test; a main scan module, which is used to start from the starting value, perform a main scan test for obtaining the relationship between current and voltage changes, and end the main scan test when the current or voltage meets the preset condition, so as to obtain the detection parameter values ​​corresponding to the various conditional parameter values ​​under the main scan test, and the scanning directions of the main scan test and the pre-scan test are opposite.

[0009] Accordingly, an embodiment of the present invention also provides a device, comprising at least one memory and at least one processor, wherein the memory stores one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the testing method or data processing method described in the embodiment of the present invention.

[0010] Correspondingly, an embodiment of the present invention further provides a storage medium, wherein the storage medium stores one or more computer instructions, and the one or more computer instructions are used to implement the testing method or data processing method described in the embodiment of the present invention.

[0011] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0012] In the test method provided by the embodiment of the present invention, a pre-scan test is first performed along one direction starting from an intermediate reference value, and the pre-scan test is terminated when the current or voltage meets a preset condition, and the condition parameter value currently loaded when the pre-scan is terminated is used as the starting value of the main scan test, and then the main scan test is performed along another direction starting from the starting value. Since the starting value of the main scan test is determined according to the result of the pre-scan test, in other words, the starting value of the main scan test of each product to be tested is determined according to its own performance, and each product to be tested has its corresponding starting value, it is possible to determine a matching starting value of the main scan test according to the actual performance of each product to be tested, and the starting value is more representative, thereby improving the accuracy of the result of the main scan test; moreover, the role of the pre-scan test is to determine the starting value of the main scan test, and the main scan test is tested starting from the starting value in the same direction (for example, the increasing direction or the decreasing direction of the condition parameter), so the problem of reverse mutation of the value of the condition parameter during the test process can be avoided, which is conducive to further improving the accuracy of the result of the main scan test.

[0013] In the data processing method provided by the embodiment of the present invention, a test data file of one or more products to be tested is obtained, the test data file includes test data obtained by performing a scan test on the products to be tested, the scan test is used to obtain the relationship between current and voltage changes, the test data file includes various condition parameter values, and detection parameter values ​​correspondingly detected under various condition parameter values, one of the condition parameter and the detection parameter is voltage, and the other is current. After parsing the test data file, the extracted data is used to output a test curve corresponding to each pin of each product to be tested, and the test curve is used to characterize the relationship between current and voltage changes; wherein, since the test data files of each product to be tested to be evaluated are obtained, the current and voltage curves of each pin of each product to be tested can be drawn in batches, which is convenient for observing the test curve of a specific product to be tested or the test curve of a specific pin as needed.

[0014] In the test system provided by the embodiment of the present invention, a pre-scan test is first performed along one direction from an intermediate reference value by a pre-scan module, and the pre-scan test is terminated when the current or voltage meets a preset condition, and the condition parameter value currently loaded when the pre-scan is terminated is used as the starting value of the main scan test, and then a main scan test is performed along another direction from the starting value by the main scan module. Since the starting value of the main scan test is determined according to the result of the pre-scan test, in other words, the starting value of the main scan test of each product to be tested is determined according to its own performance, and each product to be tested has its corresponding starting value, it is possible to determine a matching starting value of the main scan test according to the actual performance of each product to be tested, and the starting value has more representative significance, thereby improving the accuracy of the result of the main scan test; moreover, the role of the pre-scan test is to determine the starting value of the main scan test, and the main scan test is tested from the starting value in the same direction (for example, the increasing direction or the decreasing direction of the condition parameter), so the problem of reverse mutation of the value of the condition parameter during the test process can be avoided, which is conducive to further improving the accuracy of the result of the main scan test. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a flow chart of an embodiment of a testing method of the present invention;

[0016] Figure 2 is a comparison diagram of a test curve and a standard curve obtained by an embodiment of the test method of the present invention;

[0017] Figure 3 is a graph of an embodiment of test curves of different products to be tested displayed in the same coordinate system for any pin;

[0018] Figure 4 The current-voltage curve tracer is used to Figure 3 The test curves obtained by testing the products with ID #33 and #47;

[0019] Figure 5 is a schematic diagram of an embodiment of marking test points of parallel testing on a test curve;

[0020] Figure 6 It is a flow chart of an embodiment of a data processing method of the present invention;

[0021] Figure 7 It is a schematic diagram of the framework structure of an embodiment of a test system of the present invention;

[0022] Figure 8 A hardware structure diagram of a device provided in one embodiment of the present invention. DETAILED DESCRIPTION

[0023] As can be seen from the background technology, it is difficult to accurately characterize the actual performance of the product to be tested using the traditional current-voltage characteristic test method.

[0024] It has been found through research that the starting and final values ​​of the conditional parameters (for example, loading voltage or loading current) of the traditional current-voltage characteristic test method are fixed. However, the performance of each product to be tested may vary to a certain extent. Therefore, the test method with fixed starting and final values ​​of the conditional parameters has poor universality and is likely to lead to poor accuracy of the test results. That is, the obtained current-voltage curve (IV curve) cannot accurately characterize the actual performance of the product to be tested.

[0025] In order to solve the technical problem, an embodiment of the present invention provides a testing method, which first starts with an intermediate reference value to perform a pre-scan test along one direction, and ends the pre-scan test when the current or voltage meets a preset condition, and uses the conditional parameter value currently loaded when the pre-scan is ended as the starting value of the main scan test, and then starts the main scan test along another direction from the starting value. Since the starting value of the main scan test is determined according to the result of the pre-scan test, in other words, the starting value of the main scan test of each product to be tested is determined according to its own performance, and each product to be tested has its corresponding starting value, it is possible to determine the starting value of the matching main scan test according to the actual performance of each product to be tested, and the starting value is more representative, thereby improving the accuracy of the main scan test result; moreover, the role of the pre-scan test is to determine the starting value of the main scan test, and the main scan test is tested in the same direction starting from the starting value, so the problem of reverse mutation of the conditional parameter value during the test process can be avoided, which is conducive to further improving the accuracy of the main scan test result.

[0026] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0027] Figure 1 It is a flow chart of an embodiment of a testing method of the present invention.

[0028] refer to Figure 1 , execute step S1, starting from the intermediate reference value of the conditional parameter, perform a pre-scan test for obtaining the relationship between current and voltage changes, and end the pre-scan test when the current or voltage meets the preset conditions, and use the conditional parameter value currently loaded when the pre-scan ends as the starting value of the main scan test, the conditional parameter is voltage or current, and the intermediate reference value is between the starting value and the final value of the main scan test.

[0029] In this embodiment, the test method is used to test the product to be tested. As an example, the product to be tested is a chip to be tested. It should be noted that the chip can be a packaged chip or a chip in a wafer. In other words, the test method can be applicable to mass production testing (i.e., FT testing) and also to wafer testing (i.e., CP testing).

[0030] Specifically, the product to be tested has multiple pins, and the testing method is used to test each pin of the product to be tested. It can be understood that the pins here refer to the pins with test requirements.

[0031] In this embodiment, a pre-scan test is performed to determine the starting value of the subsequent main scan test. Moreover, the pre-scan test is a current-voltage characteristic test, and the starting value of the main scan test is obtained according to the pre-scan test, rather than an artificially set fixed value, so that the starting value is more related to the actual performance of the product to be tested, thereby improving the accuracy of the starting value of the main scan test.

[0032] It should be noted that the intermediate reference value refers to a test parameter value between the starting value and the final value of the main scan test, and is not necessarily half of the sum of the starting value and the final value. Specifically, a safe intermediate reference value can be set based on the basic working performance of the product to be tested (for example, the working voltage, working current, or the measurement gear set by the test equipment, etc.).

[0033] By selecting an intermediate reference value between the starting value and the final value of the main scan test, the test interval of the pre-scan test is shortened to improve the efficiency of the pre-scan test. Moreover, this is also conducive to ensuring that the pre-scan test can be tested normally and the detection parameter values ​​under different conditional parameter values ​​can be obtained until the current or voltage meets the preset conditions, thereby obtaining a reliable starting value. For example, taking the conditional parameter as voltage, if the intermediate reference value is set too large, it is easy to damage the chip at the moment of loading the voltage, so that the conditional parameter value currently loaded when the pre-scan ends cannot be obtained by scanning.

[0034] The test method is used to obtain the relationship between current and voltage changes, so the condition parameter is voltage or current. In this embodiment, the test method adopts the method of measuring current by giving voltage (VFIM), so the condition parameter is voltage and the detection parameter is current. In other embodiments, when the test method adopts the method of measuring voltage by giving current, the condition parameter is current and the detection parameter is voltage.

[0035] In the current-voltage characteristic test, as the condition parameter increases or decreases, the detection parameter also changes accordingly. Therefore, the pre-scan can be ended when the condition parameter or the detection parameter meets certain conditions. Therefore, the pre-scan test ends when the current or voltage meets the preset conditions.

[0036] As an example, the condition parameter is voltage, and the intermediate reference value is 0V. By setting the intermediate reference value to 0, it is ensured that the product to be tested will not fail at the moment the pre-scan test starts, thereby ensuring the normal progress of the pre-scan test. Correspondingly, in other embodiments, when the condition parameter is current, the intermediate reference value is 0A.

[0037] In the pre-scan test, the scan is performed according to the preset step size. By performing the pre-scan test according to the preset step size, it is easy to gradually search for the conditional parameter value that is currently loaded when the current or voltage meets the preset condition, and it is easy to realize automated testing.

[0038] The preset step size of the pre-scan test should not be too small or too large. The smaller the preset step size, the higher the accuracy of the pre-scan test, but the time and cost required for the test increase accordingly. Therefore, if the preset step size is too large, it is easy to cause the accuracy of the pre-scan test to be insufficient, thereby affecting the accuracy of the starting value of the main scan test obtained by the test; if the preset step size is too small, it is easy to cause the test time to be too long, which is not conducive to improving the test efficiency and is also easy to increase the test cost. For this reason, in this embodiment, the preset step size of the pre-scan test is 1mV to 50mV, for example, 10mV.

[0039] It should be noted that the preset step size of the pre-scan test can be reasonably set according to actual test requirements. For example, when the condition parameter value currently loaded at the end of the pre-scan is usually small, a smaller preset step size can be appropriately selected.

[0040] It should also be noted that the test method is usually used to test multiple pins of the product to be tested. Therefore, a matching preset step size can be given to each pin according to the specific situation of each pin.

[0041] In this embodiment, the pre-scan test is a negative scan test, that is, as the pre-scan test proceeds, the value of the condition parameter decreases in a negative direction. Here, the negative direction refers to: a direction from zero to a negative value.

[0042] Generally, when performing a negative scan test, the time required for the current or voltage to meet the preset conditions is shorter. Therefore, the pre-scan test adopts a negative scan test method, which is conducive to searching for the starting value of the main scan test more quickly and improving the overall efficiency of the test method.

[0043] In other implementations, the pre-scan test may also be a forward scan test, that is, as the pre-scan test proceeds, the value of the condition parameter increases in a positive direction. Here, the positive direction refers to: a direction from zero to a positive value.

[0044] Continue to refer Figure 1It should be noted that, before performing the pre-scan test, the test method further includes: executing step S01, giving a clamp value of a detection parameter of a scan test and a preset load extreme value of a condition parameter.

[0045] The clamping value and the preset loading extreme value are used to determine whether to stop the scan test. Therefore, by giving the clamping value of the detection parameter and the preset loading extreme value of the conditional parameter, it is convenient to subsequently determine the end time of the scan based on the preset loading extreme value of the conditional parameter or the clamping value of the detection parameter, thereby ensuring the normal pre-scan test while reducing the damage of the pre-scan test to the product to be tested or the test equipment.

[0046] In this embodiment, the condition parameter is voltage, and the detection parameter is current, so the clamping value is a clamping current value.

[0047] It should be noted that when the test equipment is conducting a test, it has multiple optional measurement gears, and each measurement gear has a corresponding current value. Therefore, as an example, the clamping current value is a preset multiple of the current value corresponding to the target measurement gear of the test equipment, thereby reducing the complexity of setting the clamping value.

[0048] As an example, the current values ​​covered by each measurement gear of the test equipment are 25μA (microampere) to 2.5mA (milliampere), so the clamping current value can be obtained by selecting a suitable current value and multiplying it by a preset multiple, wherein the preset multiple can be set according to actual conditions.

[0049] For example, the current value corresponding to the target measurement gear is 250 μA, and the clamp current value is twice of 250 μA.

[0050] The preset voltage load limit is lower than or equal to the working voltage of the product under test, that is, the preset voltage load limit does not exceed the working voltage of the product under test. If the preset voltage load limit is higher than the working voltage of the product under test, it is easy to cause damage to the product under test during the pre-scan test, and when the preset voltage load limit is too high, it is also easy to cause damage to the test equipment.

[0051] In this embodiment, the pre-scan test is a negative scan test, so the preset loading extreme value of the voltage can be reasonably set according to the characteristics of the diode (for example, set to -0.6V) to search for the negative boundary value of the product to be tested as much as possible.

[0052] It should be noted that, according to the actual test requirements, the clamping value of the detection parameter and / or the preset loading extreme value of the conditional parameter can be reasonably set. For example, if only a local area of ​​the current-voltage curve that can be obtained by the product to be tested needs to be evaluated, the values ​​of either or both of the clamping value of the detection parameter and the preset loading extreme value of the conditional parameter can be appropriately reduced.

[0053] It should also be noted that the test method is usually used to test multiple pins of the product to be tested. Therefore, according to the specific situation of each pin, a matching clamp value of the detection parameter and a preset load extreme value of the conditional parameter can be given to each pin.

[0054] In other embodiments, the condition parameter is current, the detection parameter is voltage, and the clamping value is a clamping voltage value.

[0055] Correspondingly, in step S1 , that is, in the pre-scan test, the time when the scan ends is determined based on the preset load extreme value of the condition parameter or the clamp value of the detection parameter.

[0056] Specifically, the moment when the scan ends is determined based on the preset loading extreme value of the conditional parameter or the clamping value of the detection parameter. The scan ends when any one of the following preset conditions is met. The preset conditions include: the value of the detection parameter reaches the clamping value; the value of the conditional parameter reaches the preset loading extreme value.

[0057] By setting the above two preset conditions, the complexity of judging whether it is necessary to stop scanning at the moment is reduced.

[0058] In this embodiment, when the current value reaches the clamping current value, it can be considered that the negative boundary value of the product to be tested has been reached, and the pre-scan test can be terminated.

[0059] It can be understood that, taking the pre-scan test as a negative scan test as an example, the clamp value of the detection parameter is a negative value, and the preset loading extreme value of the condition parameter is a negative value. In other words, the extreme value is a minimum value.

[0060] Correspondingly, when the pre-scan test is a forward scan test, the clamp value of the detection parameter is a positive value, and the preset loading extreme value of the condition parameter is a positive or negative value. In other words, the extreme value is a maximum value.

[0061] In other embodiments, the conditional parameter is current, and the detection parameter is voltage. Accordingly, the moment when the scan ends is determined based on a preset loading extreme value of the conditional parameter or a clamping value of the detection parameter. The scan ends when any one of the following preset conditions is met. The preset conditions include: the current value reaches the preset loading extreme value; the voltage value reaches the clamping voltage value.

[0062] Continue to refer Figure 1 , execute step S2, starting from the starting value, perform a main scan test for obtaining the relationship between current and voltage changes, and end the main scan test when the current or voltage meets the preset conditions to obtain the detection parameter values ​​corresponding to each condition parameter value under the main scan test. The scanning directions of the main scan test and the pre-scan test are opposite.

[0063] The opposite scanning directions of the main scanning test and the pre-scanning test mean that: if the pre-scanning test is a negative scanning test, the main scanning test is a positive scanning test; if the pre-scanning test is a positive scanning test, the main scanning test is a negative scanning test.

[0064] The present embodiment first performs a pre-scan test along one direction starting from an intermediate reference value, and ends the pre-scan test when the current or voltage meets a preset condition, and uses the conditional parameter value currently loaded when the pre-scan ends as the starting value of the main scan test, and then performs the main scan test along another direction starting from the starting value. Since the starting value of the main scan test is determined based on the result of the pre-scan test, in other words, the starting value of the main scan test of each product to be tested is determined based on its own performance, and each product to be tested has its corresponding starting value. Therefore, the starting value of the main scan test that matches the actual performance of each product to be tested can be determined, and the starting value is more representative, thereby improving the accuracy of the main scan test result.

[0065] Moreover, the role of the pre-scan test is to determine the starting value of the main scan test. The main scan test is tested in the same direction (for example, the increasing direction or decreasing direction of the conditional parameter) from the starting value, so the problem of reverse mutation of the value of the conditional parameter during the test can be avoided, which is conducive to further improving the accuracy of the result of the main scan test. For example, the test circuit board or probe used by the test equipment usually has an external capacitor for protection. Therefore, if the forward scan test is started from zero point first, after the forward scan test is completed, it is necessary to switch from the highest point to zero point immediately, and then start the negative scan test, which will cause the capacitor to charge and discharge and generate additional current, thereby easily affecting the test results, so that the test data of the forward scan test and the negative scan test are combined to produce a jump at zero point.

[0066] In this embodiment, the condition parameters of the main scan test are of the same category as the condition parameters of the pre-scan test. Accordingly, the detection parameters of the main scan test are of the same category as the detection parameters of the pre-scan test.

[0067] In this embodiment, the test method adopts the method of measuring current by applying voltage, so the condition parameter of the main scanning test is voltage, and the detection parameter is current.

[0068] In the current-voltage characteristic test, as the conditional parameters increase or decrease, the detection parameters also change accordingly. Therefore, in the main scan test, the main scan is ended when the conditional parameters or the detection parameters meet certain conditions, that is, the main scan test is ended when the current or voltage meets the preset conditions.

[0069] In the main scanning test, scanning is performed according to a preset step length. By performing the main scanning test according to the preset step length, it is easy to gradually search for the conditional parameter value that is currently loaded when the current or voltage meets the preset conditions, and it is easy to realize automated testing.

[0070] In this embodiment, the preset step size of the main scan test is 1 mV to 50 mV, for example, 10 mV. The reason for setting the preset step size of the main scan test can be referred to the analysis in the above pre-scan test, which will not be repeated here.

[0071] It should be noted that the preset step size of the main scanning test can be reasonably set according to actual test requirements. For example, when the value of the condition parameter currently loaded at the end of the main scanning is usually small, a smaller preset step size can be appropriately selected.

[0072] It is understandable that the preset step size of the main scan test and the preset step size of the pre-scan test may be equal or unequal. For example, in order to more accurately reflect the relationship between the current and voltage changes, the main scan test may also use a smaller preset step size.

[0073] It should also be noted that, in the main scan test, a matching preset step size may be given to each pin according to the specific situation of each pin.

[0074] In this embodiment, the main scan test is a positive scan test, that is, as the main scan test proceeds, the condition parameter value increases in a positive direction. In other implementations, the main scan test may also be a negative scan test, that is, as the main scan test proceeds, the condition parameter value decreases in a negative direction.

[0075] In this embodiment, since the clamp value of the detection parameter of the scan test and the preset loading limit value of the condition parameter are given in advance, in the main scan test, the time when the scan ends is determined based on the preset loading limit value of the condition parameter or the clamp value of the detection parameter.

[0076] Specifically, when determining the moment when the scan ends based on the preset loading extreme value of the conditional parameter or the clamping value of the detection parameter, the scan ends when any one of the following preset conditions is met, and the preset conditions include: the value of the detection parameter reaches the clamping value; the value of the conditional parameter reaches the preset loading extreme value.

[0077] In this embodiment, as the loaded voltage increases, when the detected current value reaches the clamping current value, it can be considered that the boundary value of the product to be tested in the forward direction has been reached, and the main scanning test can be terminated.

[0078] It can be understood that, taking the main scan test as a forward scan test as an example, the clamp value of the detection parameter is a positive value, and the preset load extreme value of the condition parameter is a positive value.

[0079] In this embodiment, the clamping current value is a preset multiple of the current value corresponding to the target measurement gear of the test equipment.

[0080] In this embodiment, the preset load extreme value of the voltage is lower than or equal to the working voltage of the product to be tested. As an example, the main scan test is a forward scan test, so in the main scan test, the preset load extreme value of the voltage is equal to the working voltage of the product to be tested.

[0081] For the analysis of the preset load extreme values ​​of the conditional parameters and the clamping values ​​of the detection parameters, reference may be made to the relevant contents in the aforementioned pre-scan test, which will not be described in detail here.

[0082] It should be noted that, in this embodiment, the product to be tested has multiple pins that need to be tested.

[0083] Specifically, the testing method includes performing serial testing on the pins of the product to be tested. In the serial testing, pre-scan testing and main-scan testing are performed on each pin to be tested of the product to be tested in turn, and when the pre-scan testing and main-scan testing are performed on the current pin to be tested, the remaining pins are placed in a floating state.

[0084] By making the remaining pins in a floating state, it is helpful to further reduce the influence of other pins on the test result of the current pin to be tested, thereby improving the accuracy of the scan test on the current pin to be tested.

[0085] Therefore, in this embodiment, the test method includes step S02, performing serial test on the pins of the product to be tested, and the serial test includes pre-scan test and main scan test. That is, after performing pre-scan test and main scan test on one pin, pre-scan test and main scan test are performed on the next pin.

[0086] It should be noted that, in other embodiments, pre-scan tests may be performed on each pin of the product to be tested at the same time, and main-scan tests may be performed on each pin of the product to be tested at the same time by means of parallel testing. It is understandable that when the pre-scan test is performed by means of parallel testing, the time when each pin ends the pre-scan test may be different. Similarly, the time when each pin ends the main-scan test may be different.

[0087] In this embodiment, the pre-scan test and the main-scan test are performed by automatic test equipment (ATE).

[0088] Automatic test equipment is a device used to test integrated circuits (ICs). It has the characteristics of automation, precision, high speed, flexibility, repeatability, versatility and strong data processing capabilities. It is used to realize automated testing of integrated circuits.

[0089] Whether it is a pre-scan test or a main scan test, the scan test ends when the current or voltage meets the preset conditions, that is, the test process includes the process of judgment and feedback, which is an adaptive test process. The automatic test equipment has more powerful performance, so it can support the pre-scan test and the main scan test. Moreover, the automatic test equipment can not only display the current-voltage curve, but also output the original test data, which is convenient for subsequent data processing.

[0090] Continue to refer Figure 1 The test method further includes: executing step S3, outputting a test curve for characterizing the relationship between current and voltage changes based on each condition parameter value loaded in the main scan test and the detection parameter value correspondingly detected under each condition parameter value.

[0091] By obtaining the current-voltage curve, it is easy to intuitively judge whether the test data is abnormal, greatly improving the efficiency of online debugging.

[0092] Specifically, a test curve for characterizing the relationship between current and voltage changes is output, including: based on each condition parameter value loaded in the main scan test, and the detection parameter value detected corresponding to each condition parameter value, an array is established, the X-axis data in the array includes each loaded condition parameter value, and the Y-axis data in the array includes the detection parameter value detected corresponding to each condition parameter value; based on the array, a test curve for characterizing the relationship between current and voltage changes is output.

[0093] As an example, a test curve graph (i.e., an IV curve graph) representing the relationship between current and voltage changes can be output in real time through an automatic test device using tools corresponding to the software related to the automatic test device. For example, an array of the SCATTER_LOG type can be established, and the data of the conditional parameter value and the detection parameter value can be placed in the X-axis and Y-axis respectively (for example, the voltage data can be placed in the X-axis and the current data can be placed in the Y-axis), and the current-voltage curve can be displayed on the analysis interface of the automatic test device, and multiple curves can be output simultaneously as needed.

[0094] In this embodiment, in addition to outputting a test curve for characterizing the relationship between current and voltage changes, a standard curve located in the same coordinate system may also be output simultaneously.

[0095] By outputting the standard curve at the same time, that is, displaying the test curve and the standard curve in the same interface, it is convenient to compare the test curve with the standard curve more intuitively.

[0096] For pins with the same function, the standard curve is the curve of the pin corresponding to the product to be tested with normal quality. Therefore, by comparing the test curve with the standard curve, it is possible to intuitively determine whether the test curve of the pin to be tested is abnormal.

[0097] For example, refer to Figure 2 , Figure 2 It is a comparison diagram of the test curve and the standard curve obtained by an embodiment of the test method of the present invention. The horizontal axis represents the loaded voltage (V), the vertical axis represents the detected current (mA), the curve Lref represents the standard curve, and the curve Lg and the curve Lb represent the test curves corresponding to two different test samples that failed a certain test item.

[0098] Therefore, by displaying the test curve and the standard curve and comparing them, it is possible to intuitively determine whether the test curve of the sample is normal. For example, although the test samples corresponding to curve Lg and curve Lb both fail to meet the test criteria, Figure 2 It can be seen that the difference between curve Lb and curve Lref is large, which can determine that the quality of the test sample does not meet the requirements (for example, there may be a problem with the pin packaging of the test sample or the equivalent resistance inside the product to be tested); while curve Lg and curve Lref are consistent, so it is necessary to further find the cause of the test failure from other aspects.

[0099] It should be noted that the testing method may also include parallel testing.

[0100] It should also be noted that each pin of each product to be tested has a corresponding array, and each array has the corresponding ID of the product to be tested and the ID of the pin. Therefore, after the test, based on the ID of the product to be tested and the ID of the pin, the test data of multiple products to be tested can be stored in the test equipment, and the test data contains multi-dimensional information, which makes it convenient to output the test curve of a specific product to be tested or the test curve of a specific pin as needed, and can support the superposition of test curves of any multiple products to be tested, thereby facilitating the output of test curves of multiple products to be tested in batches, so as to more efficiently determine whether the test results of multiple products to be tested are normal.

[0101] For example, for a specific pin, the test curves of the same pin of multiple products under test can be displayed in the same coordinate system, or, corresponding to a specific product under test, the test curves of multiple pins can be displayed in the same coordinate system, so as to more efficiently determine whether the test results of the product under test are normal.

[0102] For example, refer to Figure 3 , Figure 3 1 is a graph showing, for any specific pin, test curves of different products to be tested in the same coordinate system. Figure 3 It can be seen intuitively that the test results of the products with ID #33 and #47 are abnormal.

[0103] In addition, combined with reference Figure 4 , Figure 4 The IV Curve Tracer is used to Figure 3 The test curves obtained by testing the products with ID #33 and #47.

[0104] in, Figure 4 (a) is a comparison chart of the test curves of the product to be tested with ID #33 and the standard sample. Figure 4 (b) is a comparison chart showing the test curves of the product to be tested with ID #47 and the standard sample. Figure 4 (a) and Figure 4 In (b), the abscissa represents the applied voltage (V), and the ordinate represents the detected current (μA).

[0105] It can be seen that for the same product to be tested (product to be tested with ID #33, or product to be tested with ID #47), the test results obtained by using the automatic testing equipment in this embodiment to execute the steps of the aforementioned test method are consistent with the test results obtained using the current and voltage curve tracer.

[0106] It can be seen that reliable test results can also be obtained by using automatic testing equipment to perform the steps of the aforementioned test method.

[0107] Therefore, in the current mass production test, ATE test engineers can directly detect the current-voltage curve of the relevant pins in the product to be tested through automatic test equipment, without the need to transfer it to the IV curve tracer and have the engineer responsible for the IV curve tracer to test it, thereby reducing the test time and reducing the communication cost between ATE test engineers and IV test engineers.

[0108] Continue to refer Figure 1 After obtaining the test curve under serial test conditions, the test method may further include: executing step S4, for any pin, based on the test curve corresponding to the pin and the detection parameter value expected to be detected by the pin in the parallel test, determining the conditional parameter value of the pin in the parallel test.

[0109] It should be noted that the condition parameter types loaded by the parallel test and the main scan test are the same, and the detection parameter types of the detection are also the same, for example, both are the method of measuring current for voltage, or both are the method of measuring voltage for current.

[0110] Determine the conditional parameter values ​​of the pins in parallel testing to prepare for subsequent parallel testing.

[0111] In mass production testing, in order to save time and cost, a parallel test method can be used as needed. In this embodiment, the parallel test includes a power short test.

[0112] In this embodiment, the test method adopts a method of measuring current by applying voltage, and the power short test also adopts a method of measuring current by applying voltage, so the conditional parameter values ​​in the parallel test can be determined based on the test curves obtained in the above steps.

[0113] Among them, since the test curve can characterize the changing relationship between current and voltage, the conditional parameter value of the pin in the parallel test can be located on the test curve according to the detection parameter value detected by the expected pin in the parallel test.

[0114] In the actual test process, it is hoped that the results obtained by the parallel test can meet a certain range (for example, it is hoped that the current measured by the power short meets a certain range) so that the test engineer can specify a reasonable range and limit value (for example, an upper limit or a lower limit). Taking the detection parameter as an example, the detection current should not be too small to minimize the percentage of system error, and the detection current should not be too large to avoid excessive current and damage to the chip, test circuit board (LoadBoard, LB) and pin card.

[0115] Therefore, a recommended conditional parameter value is given through a customized expected detection parameter value. For example, a recommended loading voltage value is given through a customized expected detection current value.

[0116] refer to Figure 5 , Figure 5 1 is a schematic diagram of an embodiment of marking test points of parallel testing on a test curve, wherein the abscissa represents the loaded voltage (V) and the ordinate represents the detected current (μA).

[0117] For example, Figure 5 Spot 1 in the figure indicates the recommended test point marked on the test curve based on the detection parameter value detected by the expected pin in the parallel test. When the customized expected detection current value is 91μA, the recommended loading voltage value is 0.38V.

[0118] Accordingly, continue to refer to Figure 1 The testing method may further include: executing step S5 to perform parallel testing.

[0119] Specifically, the pins of the product to be tested are tested in parallel. In the parallel test, each pin of the product to be tested is tested at the same time under given condition parameters.

[0120] It should be noted that, in some embodiments, step S5 may be executed after step S4 is executed, that is, step S5 is executed based on the result of step S4.

[0121] In some other embodiments, the execution of step S5 may not be based on step S4, that is, step S6 is executed successively after step S2. For example, based on the test curve corresponding to the pin and the detection parameter value expected to be detected by the pin in the parallel test, after the conditional parameter value of the pin in the parallel test is determined, the conditional parameter value of the parallel test can be applied to the next test.

[0122] In this embodiment, for any pin, after obtaining the test curve based on serial testing and the test point based on parallel testing, the testing method may further include: executing step S6, for any pin, based on the current and voltage corresponding to the test point obtained by the parallel testing of the pin, marking the test point in the coordinate system corresponding to the test curve of the pin.

[0123] By marking the test points (for example, the test points in the power short test) in the coordinate system corresponding to the test curve, it is possible to visually observe whether there is a difference between the serial test and the parallel test and the size of the difference.

[0124] For example, continue to refer to Figure 5 , Figure 5 The spot2 in represents the test point obtained based on the parallel test. It can be seen that the test point spot2 obtained based on the parallel test is located on the test curve and has no difference with the test curve.

[0125] It should be noted that, in other embodiments, the test method may not execute step S4 and step S6. After the test device stores the test data file, step S4 and step S6 may be implemented based on the test data file stored by the test device through additional data processing.

[0126] Correspondingly, an embodiment of the present invention also provides a data processing method. Figure 6 It is a flow chart of an embodiment of a data processing method of the present invention.

[0127] refer to Figure 6 , execute step S10 to obtain test data files of one or more products to be tested, the test data files include test data obtained by performing a scan test on the products to be tested, the scan test is used to obtain the relationship between current and voltage changes, the test data files include various condition parameter values, and corresponding detection parameter values ​​detected under various condition parameter values, one of the condition parameter and the detection parameter is voltage, and the other is current.

[0128] The test data file is obtained by testing the current and voltage characteristics of the product to be tested. The test data file is obtained so that data can be extracted from the test data file later and a test curve can be obtained based on the extracted data.

[0129] As an example, the test data file includes test data on current and voltage obtained by performing serial testing on pins of the product to be tested.

[0130] In this embodiment, the test data file includes the ID of the product to be tested, the ID of each pin in the product to be tested, and also includes each condition parameter value corresponding to each pin, and the detection parameter value detected under each condition parameter value. That is to say, each pin to be tested of each product to be tested has a corresponding test result (the test result is a one-to-one corresponding current value and voltage value). Therefore, the current and voltage curves of each pin of each product to be tested can be drawn in batches, and it is convenient to observe the test curve of a specific product to be tested or the test curve of a specific pin according to actual needs.

[0131] It should be noted that the ID of the product to be tested may be a user-defined name, such as “Good”, “SS_ReVA”, “TT_ReVA”, “FF_ReVA”, “#1”, “#79”, etc.

[0132] Correspondingly, the pin ID can also be a custom name.

[0133] As an example, the test data file includes a standardized data file (stdf file).

[0134] In this embodiment, the test data file also includes test data obtained by performing parallel testing on the pins of the product to be tested. The parallel testing is used to test each pin of the product to be tested at the same time under given condition parameters.

[0135] In this embodiment, the parallel test includes a power short test.

[0136] In this embodiment, the data processing method is used to process the test data obtained by the aforementioned test methods except step S4 and step S6.

[0137] Continue to refer Figure 4 , execute step S20, parse the test data file to extract the condition parameter value and the detection parameter value.

[0138] By parsing the test data file, we can prepare for the subsequent test curve.

[0139] Specifically, the ID of the product to be tested, the ID of each pin in the product to be tested, and the condition parameter value and the detection parameter value corresponding to each pin of the product to be tested are extracted.

[0140] Continue to refer Figure 4 , execute step S30, use the extracted data to output the test curve of the product to be tested, and the test curve is used to characterize the relationship between current and voltage changes.

[0141] By outputting the test curve, the test curve can be used to intuitively determine whether the test result of the product to be tested is normal.

[0142] In this embodiment, the extracted data is used to output a test curve corresponding to each pin of each product to be tested.

[0143] Since the test data files of each product to be evaluated are obtained first, the current and voltage curves of each pin of each product to be tested can be drawn in batches based on the test data files, so as to observe the test curve of a specific product to be tested or the test curve of a specific pin as needed.

[0144] Specifically, for any pin of the product to be tested, the extracted data includes multiple groups of test results, each group of test results includes current values ​​and voltage values, and the ID of the pin and the ID of the corresponding product to be tested can also be extracted. Therefore, data containing multi-dimensional information can be obtained, which makes it convenient to observe the test curve of a specific product to be tested or the test curve of a specific pin as needed, and can support the superposition of test curves of any number of products to be tested, thereby facilitating the automatic output of test curves of multiple products to be tested in batches.

[0145] For example, for a specific pin, the test curves of the same pin of multiple products under test can be displayed in the same coordinate system, or, corresponding to a specific product under test, the test curves of multiple pins can be displayed in the same coordinate system, so as to more efficiently determine whether the test results of the product under test are normal.

[0146] For example, refer to Figure 3 , Figure 3 This is a graph of an embodiment of test curves of different products to be tested displayed in the same coordinate system for any pin. Figure 3 It can be seen intuitively that the test results of the products with ID #33 and #47 are abnormal.

[0147] After outputting the test curve corresponding to each pin of each product to be tested, the data processing method may further include: executing step S40, for any pin, based on the test curve corresponding to the pin and the detection parameter value expected to be detected by the pin in the parallel test, outputting the conditional parameter value of the pin in the parallel test.

[0148] It should be noted that the parallel test and the main scan test are performed in the same manner, for example, both are a method of measuring current by giving voltage. The conditional parameter values ​​of the pins in the parallel test are determined to prepare for the subsequent parallel test.

[0149] In mass production testing, in order to save time and cost, a parallel test method can be used as needed. In this embodiment, the parallel test includes a power short test.

[0150] In this embodiment, the test method adopts a method of measuring current by applying voltage, and the power short test also adopts a method of measuring current by applying voltage, so the conditional parameter values ​​in the parallel test can be determined based on the test curves obtained in the above steps.

[0151] Among them, since the test curve can characterize the changing relationship between current and voltage, the conditional parameter value of the pin in the parallel test can be located on the test curve according to the detection parameter value detected by the expected pin in the parallel test.

[0152] In the actual test process, it is hoped that the results obtained by the parallel test can meet a certain range (for example, it is hoped that the current measured by the power short meets a certain range) so that the test engineer can specify a reasonable range and limit value (for example, an upper limit or a lower limit). Taking the detection parameter as an example, the detection current should not be too small to minimize the percentage of system error, and the detection current should not be too large to avoid excessive current and damage to the chip, test circuit board (LoadBoard, LB) and pin card.

[0153] Therefore, a recommended conditional parameter value is given through a customized expected detection parameter value. For example, a recommended loading voltage value is given through a customized expected detection current value.

[0154] refer to Figure 5 , Figure 5 1 is a schematic diagram of an embodiment of marking test points of parallel testing on a test curve, wherein the abscissa represents the loaded voltage (V) and the ordinate represents the detected current (μA).

[0155] For example, Figure 5 Spot 1 in the figure indicates the recommended test point marked on the test curve based on the detection parameter value detected by the expected pin in the parallel test. When the customized expected detection current value is 91μA, the recommended loading voltage value is 0.38V.

[0156] The data processing method may further include: executing step S50, for any pin, based on the current and voltage corresponding to the test point obtained by parallel testing of the pin, marking the test point in the coordinate system corresponding to the test curve of the pin.

[0157] By marking the test points (for example, the test points in the power short test) in the coordinate system corresponding to the test curve, it is possible to visually observe whether there is a difference between the serial test and the parallel test and the size of the difference.

[0158] For example, continue to refer to Figure 5 , Figure 5 The spot2 in represents the test point obtained based on the parallel test. It can be seen that the test point spot2 obtained based on the parallel test is located on the test curve and has no difference with the test curve.

[0159] It should be noted that the data processing method can execute either or both of step S40 and step S50 according to requirements.

[0160] In this embodiment, the test data file of the product to be tested is obtained, and then data processing is performed based on the test data file, thereby facilitating the improvement of the flexibility of data processing and reducing the dependence on the test equipment.

[0161] As an example, the data processing method can be implemented by a script (eg, a python script), so with the help of a handler, the test curves of multiple products to be tested can be automatically output in batches, and the output data can be recorded in a stdf file.

[0162] The product to be tested is scanned and tested by the test equipment, and the subsequent processing of the test data obtained by the scan test of the product to be tested is realized by an additional script, thereby reducing the modification of the test equipment and improving the test capacity of the test equipment.

[0163] Accordingly, an embodiment of the present invention further provides a testing system. Figure 7 , Figure 7 It is a schematic diagram of the framework structure of an embodiment of the test system of the present invention.

[0164] The test system includes: a pre-scan module 10, which is used to start from the intermediate reference value of the conditional parameter, perform a pre-scan test for obtaining the relationship between current and voltage changes, and end the pre-scan test when the current or voltage meets the preset conditions, and use the conditional parameter value currently loaded when the pre-scan ends as the starting value of the main scan test, the conditional parameter is voltage or current, and the intermediate reference value is between the starting value and the final value of the main scan test; a main scan module 20, which is used to start from the starting value, perform a main scan test for obtaining the relationship between current and voltage changes, and end the main scan test when the current or voltage meets the preset conditions, so as to obtain the detection parameter values ​​corresponding to the various conditional parameter values ​​under the main scan test, and the scanning directions of the main scan test and the pre-scan test are opposite.

[0165] In this embodiment, the test system is used to test the product to be tested. As an example, the product to be tested is a chip to be tested. It should be noted that the chip can be a packaged chip or a chip in a wafer. In other words, the test system can be applicable to mass production testing (i.e., FT testing) and wafer testing (i.e., CP testing). Specifically, the product to be tested has multiple pins, and the test system is used to test each pin of the product to be tested. It can be understood that the pins here refer to pins with test requirements.

[0166] In this embodiment, a pre-scan test is performed by the pre-scan module 10 to determine the starting value of the subsequent main scan test. Moreover, the pre-scan test is a current-voltage characteristic test, and the starting value of the main scan test is obtained according to the pre-scan test rather than an artificially set fixed value, so that the starting value is more related to the actual performance of the product to be tested, thereby improving the accuracy of the starting value of the main scan test.

[0167] The test system is used to obtain the relationship between current and voltage changes, so the conditional parameter is voltage or current. In this embodiment, the test system uses the method of measuring current by giving voltage to perform the test, so the conditional parameter is voltage and the detection parameter is current. In other embodiments, when the test system uses the method of measuring voltage by giving current to perform the test, the conditional parameter is current and the detection parameter is voltage.

[0168] As an example, the condition parameter is voltage, and the intermediate reference value is 0 V. In other embodiments, when the condition parameter is current, the intermediate reference value is 0 A.

[0169] In the pre-scan test, the pre-scan module 10 performs scanning according to a preset step size. In this embodiment, the preset step size of the pre-scan module 10 is 1 mV to 50 mV, for example, 10 mV.

[0170] It should be noted that the preset step size of the pre-scan test can be reasonably set according to actual test requirements. For example, when the condition parameter value currently loaded at the end of the pre-scan is usually small, a smaller preset step size can be appropriately selected.

[0171] It should also be noted that the test system is usually used to test multiple pins of the product to be tested. Therefore, a matching preset step size can be given to each pin according to the specific situation of each pin.

[0172] In this embodiment, the pre-scan test is a negative scan test, which is conducive to searching for the starting value of the main scan test more quickly and improving the overall efficiency of the test method.

[0173] In other implementations, the pre-scan test may also be a forward scan test.

[0174] Continue to refer Figure 7 It should be noted that the test system further includes: a parameter preset module 70, which is used to set the clamping value of the detection parameter of the given scan test and the preset loading extreme value of the condition parameter before performing the pre-scan test.

[0175] The clamping value and the preset loading extreme value are used to determine whether to stop the scan test. Therefore, by giving the clamping value of the detection parameter and the preset loading extreme value of the conditional parameter, it is convenient to subsequently determine the moment when the scan ends based on the preset loading extreme value of the conditional parameter or the clamping value of the detection parameter, thereby ensuring that while the pre-scan test is carried out normally, the damage to the product to be tested or the test equipment caused by the pre-scan test is reduced.

[0176] In this embodiment, the condition parameter is voltage, and the detection parameter is current, so the clamping value is a clamping current value.

[0177] It should be noted that when the test equipment is conducting a test, it has multiple optional measurement gears, and each measurement gear has a corresponding current value. Therefore, as an example, the clamping current value is a preset multiple of the current value corresponding to the target measurement gear of the test equipment, thereby reducing the complexity of setting the clamping value.

[0178] As an example, the current values ​​covered by each measurement gear of the test equipment are 25μA (microamperes) to 2.5mA (milliamperes). Therefore, by selecting a suitable current value and multiplying it by a preset multiple, the clamping current value can be obtained. The preset multiple can be set according to actual conditions. For example, the current value corresponding to the target measurement gear is 250μA, and the clamping current value is twice 250μA.

[0179] The preset loading extreme value of the voltage is lower than or equal to the working voltage of the product to be tested, that is, the preset loading extreme value of the voltage does not exceed the working voltage of the product to be tested. As an example, the pre-scan test is a negative scanning test, so the preset loading extreme value of the voltage can be reasonably set according to the characteristics of the diode (for example, set to -0.6V) to search for the boundary value of the product to be tested in the negative direction as much as possible.

[0180] It should be noted that, according to actual test requirements, the clamping value of the detection parameter and / or the preset loading extreme value of the conditional parameter can be reasonably set.

[0181] It should also be noted that the test system is usually used to test multiple pins of the product to be tested. Therefore, according to the specific situation of each pin, a matching clamp value of the detection parameter and a preset load extreme value of the conditional parameter can be given to each pin.

[0182] In other embodiments, the condition parameter is current, the detection parameter is voltage, and the clamping value is a clamping voltage value.

[0183] Accordingly, the pre-scan module 10 determines the time when the scan ends based on the preset load extreme value of the condition parameter or the clamp value of the detection parameter.

[0184] Specifically, the preset conditions include: the value of the detection parameter reaches the clamp value; the value of the condition parameter reaches the preset load extreme value.

[0185] In this embodiment, a test method of measuring current by applying voltage is adopted. Therefore, when the current value reaches the clamping current value, it can be considered that the negative boundary value of the product to be tested has been reached, and the pre-scan test can be ended.

[0186] In other embodiments, the condition parameter is current, and the detection parameter is voltage. Accordingly, when any one of the following preset conditions is met, the pre-scan module ends the scan, and the preset conditions include: the current value reaches a preset loading extreme value; the voltage value reaches a clamping voltage value.

[0187] The main scanning module 20 is used to perform a main scanning test. The scanning directions of the main scanning test and the pre-scanning test are opposite.

[0188] The present embodiment first performs a pre-scan test along one direction starting from an intermediate reference value, and ends the pre-scan test when the current or voltage meets a preset condition, and uses the conditional parameter value currently loaded when the pre-scan ends as the starting value of the main scan test, and then performs the main scan test along another direction starting from the starting value. Since the starting value of the main scan test is determined based on the result of the pre-scan test, in other words, the starting value of the main scan test of each product to be tested is determined based on its own performance, and each product to be tested has its corresponding starting value. Therefore, the starting value of the main scan test that matches the actual performance of each product to be tested can be determined, and the starting value is more representative, thereby improving the accuracy of the main scan test result.

[0189] Moreover, the role of the pre-scan test is to determine the starting value of the main scan test. The main scan test starts from the starting value and is tested in the same direction (for example, the increasing direction or the decreasing direction of the conditional parameter). Therefore, the problem of reverse mutation of the value of the conditional parameter during the test can be avoided, which is conducive to further improving the accuracy of the results of the main scan test.

[0190] In this embodiment, the condition parameters of the main scan test are of the same category as the condition parameters of the pre-scan test. Accordingly, the detection parameters of the main scan test are of the same category as the detection parameters of the pre-scan test.

[0191] In this embodiment, the test method adopts the method of measuring current by applying voltage, so the condition parameter of the main scanning test is voltage, and the detection parameter is current.

[0192] In the main scanning test, the main scanning module 20 performs scanning according to a preset step size. By performing the main scanning test according to the preset step size, it is convenient to gradually search for the conditional parameter value loaded when the current or voltage meets the preset condition, and it is convenient to realize the automatic test.

[0193] In this embodiment, the preset step size of the main scan test is 1 mV to 50 mV, for example, 10 mV.

[0194] It should be noted that the preset step size of the main scanning test can be reasonably set according to actual test requirements. For example, when the value of the condition parameter currently loaded at the end of the main scanning is usually small, a smaller preset step size can be appropriately selected.

[0195] It is understandable that the preset step size of the main scan test and the preset step size of the pre-scan test may be equal or unequal. For example, in order to more accurately reflect the relationship between the current and voltage changes, the main scan test may also use a smaller preset step size.

[0196] It should also be noted that, in the main scan test, a matching preset step size may be given to each pin according to the specific situation of each pin.

[0197] In this embodiment, the main scan test is a positive scan test. In other implementations, the main scan test may also be a negative scan test.

[0198] In this embodiment, since the clamp value of the detection parameter of the scan test and the preset loading limit value of the condition parameter are given in advance, in the main scan test, the time when the scan ends is determined based on the preset loading limit value of the condition parameter or the clamp value of the detection parameter.

[0199] Specifically, when any one of the following preset conditions is met, the main scanning module 20 ends the scanning, and the preset conditions include: the value of the detection parameter reaches the clamp value; the value of the condition parameter reaches the preset load extreme value.

[0200] In this embodiment, as the loaded voltage increases, when the detected current value reaches the clamping current value, it can be considered that the boundary value of the product to be tested in the forward direction has been reached, and the main scanning test can be terminated.

[0201] For the analysis of the preset load extreme values ​​of the conditional parameters and the clamping values ​​of the detection parameters, reference may be made to the relevant contents in the aforementioned pre-scan test, which will not be described in detail here.

[0202] It should be noted that, in this embodiment, the product to be tested has multiple pins that need to be tested.

[0203] Specifically, the testing method of the testing system includes performing serial testing on the pins of the product to be tested. In the serial testing, pre-scan testing and main-scan testing are performed on each pin to be tested of the product to be tested in turn, and when the pre-scan testing and main-scan testing are performed on the current pin to be tested, the remaining pins are placed in a floating state.

[0204] By making the remaining pins in a floating state, it is helpful to further reduce the influence of other pins on the test result of the current pin to be tested, thereby improving the accuracy of the scan test on the current pin to be tested.

[0205] Therefore, in this embodiment, the test system includes a serial test module 80 for performing serial tests on the pins of the product to be tested, and the serial test module 80 includes a pre-scan module 10 and a main scan module 20. That is, after the serial test module 80 performs a pre-scan test and a main scan test on one pin, it performs a pre-scan test and a main scan test on the next pin.

[0206] It should be noted that, in other embodiments, the test system may also use a parallel test module, which includes a pre-scan module and a main scan module. The pre-scan module is used to perform a pre-scan test on each pin of the product to be tested at the same time, and the main scan module is used to perform a main scan test on each pin of the product to be tested at the same time. It is understandable that when the pre-scan test is performed in a parallel test manner, the time when each pin ends the pre-scan test may be different. Similarly, the time when each pin ends the main scan test may be different.

[0207] In this embodiment, the test system is integrated into an automatic test device. The automatic test device is a device used to test integrated circuits, which has the characteristics of automation, accuracy, high speed, flexibility, repeatability, versatility and strong data processing capabilities, and is used to realize automatic testing of integrated circuits.

[0208] Whether it is a pre-scan test or a main scan test, the scan test ends when the current or voltage meets the preset conditions, that is, the test process includes the judgment and feedback process, which is an adaptive test process. The automatic test equipment has more powerful performance, so it can support the pre-scan test and the main scan test. Moreover, the automatic test equipment can not only display the current-voltage curve, but also output the original data, which is convenient for subsequent data processing.

[0209] Continue to refer Figure 7 The test system also includes: a curve output module 30, which is used to output a test curve for characterizing the relationship between current and voltage changes based on various condition parameter values ​​loaded in the main scanning test and the detection parameter values ​​correspondingly detected under various condition parameter values.

[0210] By obtaining the current-voltage curve, it is easy to intuitively judge whether the test data is abnormal, greatly improving the efficiency of online debugging.

[0211] Specifically, the curve output module 30 includes: an array establishment unit, which is used to establish an array based on the various condition parameter values ​​loaded in the main scan test and the detection parameter values ​​correspondingly detected under the various condition parameter values, wherein the X-axis data in the array includes the various condition parameter values ​​loaded, and the Y-axis data in the array includes the detection parameter values ​​correspondingly detected under the various condition parameter values; and a curve output unit, which is used to output a test curve for characterizing the relationship between current and voltage changes based on the array.

[0212] As an example, using the corresponding tools of the software related to the automatic test equipment, a test curve graph (i.e., an IV curve graph) that represents the relationship between current and voltage changes can be output in real time. For example, an array of the SCATTER_LOG type can be established, and the data of the conditional parameter value and the detection parameter value can be placed in the X-axis and Y-axis respectively (for example, the voltage data can be placed in the X-axis and the current data can be placed in the Y-axis), and the current-voltage curve can be displayed on the analysis interface of the automatic test equipment, and multiple curves can be output simultaneously as needed.

[0213] In this embodiment, the curve output module 30 can also output a standard curve in the same coordinate system at the same time. By outputting the standard curve at the same time, the test curve and the standard curve are displayed in the same interface, which is convenient for more intuitive comparison of the test curve and the standard curve.

[0214] For pins with the same function, the standard curve is the curve of the pin corresponding to the product to be tested with normal quality. Therefore, by comparing the test curve with the standard curve, it is possible to intuitively determine whether the test curve of the pin to be tested is abnormal.

[0215] It should be noted that each pin of each product to be tested has a corresponding array, and each array has the corresponding ID of the product to be tested and the ID of the pin. Therefore, after the test, based on the ID of the product to be tested and the ID of the pin, the test data of multiple products to be tested can be stored in the test equipment, and the test data contains multi-dimensional information, so that it is convenient to use the curve output module 30 to output the test curve of a specific product to be tested or the test curve of a specific pin as needed, and can support the superposition of test curves of any multiple products to be tested, thereby facilitating the output of test curves of multiple products to be tested in batches, so as to more efficiently determine whether the test results of multiple products to be tested are normal.

[0216] It should be noted that the test system may also include: a parallel test condition parameter determination module 40, which is used to determine the condition parameter value of any pin in the parallel test after obtaining the test curve under the serial test condition, based on the test curve corresponding to the pin and the detection parameter value expected to be detected by the pin in the parallel test.

[0217] It should be noted that the condition parameter types loaded in the parallel test and the main scan test are the same, and the detection parameter types detected are also the same, for example, both are a method of measuring current by giving voltage.

[0218] By using the customized expected detection parameter values, the recommended conditional parameter values ​​are given to prepare for the subsequent parallel test. For example, by using the customized expected detection current value, the recommended loading voltage value is given.

[0219] In mass production testing, in order to save time and cost, a parallel test method can be used as needed. In this embodiment, the parallel test includes a power short test.

[0220] In this embodiment, the test system uses the voltage to measure current method for testing, and the power short test also uses the voltage to measure current method. Therefore, the conditional parameter values ​​in the parallel test can be determined based on the test curves obtained by the pre-scan module 10 and the main scan module 20.

[0221] Among them, since the test curve can characterize the changing relationship between current and voltage, the conditional parameter value of the pin in the parallel test can be located on the test curve according to the detection parameter value detected by the expected pin in the parallel test.

[0222] Accordingly, continue to refer to Figure 7 The test system may further include: a parallel test module 50 for performing parallel testing.

[0223] Specifically, the parallel testing module 50 performs parallel testing on the pins of the product to be tested. In the parallel testing, each pin of the product to be tested is tested simultaneously under given condition parameters.

[0224] It should be noted that, in some embodiments, the parallel test module 50 may start testing after the main scanning module 20 finishes testing. In other embodiments, the parallel test module 50 may also perform testing based on the output result of the parallel test condition parameter determination module 40 .

[0225] In this embodiment, the test system may further include: a test point marking module 60, which is used to mark the test point in the coordinate system corresponding to the test curve of the pin for any pin based on the current and voltage corresponding to the test point obtained by the parallel test of the pin after obtaining the test curve obtained based on the serial test and the test point obtained based on the parallel test.

[0226] By marking the test points (for example, the test points in the power short test) in the coordinate system corresponding to the test curve, it is possible to visually observe whether there is a difference between the serial test and the parallel test and the size of the difference.

[0227] It should be noted that, in other embodiments, the test system may not include a parallel test condition parameter determination module and a test point marking module. After the test system completes the test and stores the test data file through the test device, it can subsequently implement the functions of the parallel test condition parameter determination module and the test point marking module based on the test data file stored in the test device through an additional data processing system.

[0228] It should also be noted that, as an example, the test system is used to implement the test method of the aforementioned embodiment. For the specific description of the test system of this embodiment, reference can be made to the test method of the aforementioned embodiment.

[0229] Correspondingly, an embodiment of the present invention also provides a device, which can implement the test method provided by the embodiment of the present invention by loading the above-mentioned test method in the form of a loading program, or the device can implement the data processing method provided by the embodiment of the present invention by loading the above-mentioned data processing method in the form of a loading program.

[0230] refer to Figure 8 , shows a hardware structure diagram of a device provided by an embodiment of the present invention. The device of this embodiment includes: at least one processor 01, at least one communication interface 02, at least one memory 03 and at least one communication bus 04.

[0231] In this embodiment, the number of each of the processor 01 , the communication interface 02 , the memory 03 and the communication bus 04 is at least one, and the processor 01 , the communication interface 02 and the memory 03 communicate with each other via the communication bus 04 .

[0232] The communication interface 02 may be an interface of a communication module for network communication, such as an interface of a GSM module.

[0233] The processor 01 may be a central processing unit CPU, or an application-specific integrated circuit ASIC (Application Specific Integrated Circuit), or one or more integrated circuits configured to implement the test method or data processing method of this embodiment.

[0234] The memory 03 may include a high-speed RAM memory, and may also include a non-volatile memory, such as at least one disk memory. The memory 03 stores one or more computer instructions, and the one or more computer instructions are executed by the processor 01 to implement the test method provided in the above embodiment, or to implement the data processing method provided in the embodiment of the present invention.

[0235] It should be noted that the above-mentioned electronic device may also include other devices (not shown) that may not be necessary for understanding the contents disclosed in the embodiments of the present invention; since these other devices may not be necessary for understanding the contents disclosed in the embodiments of the present invention, the embodiments of the present invention will not introduce them one by one.

[0236] An embodiment of the present invention further provides a storage medium, which stores one or more computer instructions, and the one or more computer instructions are used to implement the test method provided by the above embodiment, or to implement the data processing method provided by the above embodiment.

[0237] The above-mentioned embodiments of the present invention are combinations of elements and features of the present invention. Unless otherwise mentioned, elements or features may be considered as optional. Each element or feature may be put into practice without being combined with other elements or features. In addition, embodiments of the present invention may be constructed by combining some elements and / or features. The order of operations described in the embodiments of the present invention may be rearranged. Some configurations of any one embodiment may be included in another embodiment, and may be replaced by the corresponding configuration of another embodiment. It is obvious to those skilled in the art that claims that do not have a clear reference relationship to each other in the attached claims may be combined into embodiments of the present invention, or may be included as new claims in the amendment after submitting this application.

[0238] The embodiments of the present invention can be implemented by various means such as hardware, firmware, software or a combination thereof. In a hardware configuration, the method according to the exemplary embodiment of the present invention can be implemented by one or more application specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DSPDs), programmable logic devices (PLDs), field programmable gate arrays (FPGAs), processors, controllers, microcontrollers, microprocessors, etc.

[0239] In a firmware or software configuration, the embodiments of the present invention may be implemented in the form of modules, procedures, functions, etc. The software code may be stored in a memory unit and executed by a processor. The memory unit is located inside or outside the processor and may send data to and receive data from the processor via various known means.

[0240] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0241] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A testing method, characterized in that: include: Starting from the intermediate reference value of the condition parameter, a pre-scan test for obtaining the relationship between current and voltage changes is performed, and the pre-scan test is terminated when the current or voltage meets the preset condition, and the condition parameter value currently loaded when the pre-scan is terminated is used as the starting value of the main scan test, the condition parameter is voltage or current, and the intermediate reference value is between the starting value and the final value of the main scan test; Starting from the starting value, a main scan test is performed to obtain the relationship between current and voltage changes, and the main scan test is terminated when the current or voltage meets the preset conditions to obtain the detection parameter values ​​corresponding to the various conditional parameter values ​​under the main scan test. The scanning directions of the main scan test and the pre-scan test are opposite.

2. The testing method according to claim 1, characterized in that: Before performing the pre-scan test, the test method further includes: setting a clamp value of a detection parameter of a given scan test and a preset load extreme value of a condition parameter; In any one of the pre-scan test and the main-scan test, a scanning end time is determined based on a preset load extreme value of the condition parameter or a clamp value of the detection parameter.

3. The testing method according to claim 2, characterized in that: When determining the moment of ending the scan based on the preset loading extreme value of the conditional parameter or the clamping value of the detection parameter, the scan is ended when any one of the following preset conditions is met, and the preset conditions include: the value of the detection parameter reaches the clamping value; the value of the conditional parameter reaches the preset loading extreme value.

4. The testing method according to claim 2 or 3, characterized in that: The condition parameter is voltage, and the preset loading extreme value of the voltage is lower than or equal to the working voltage of the product to be tested.

5. The testing method according to claim 1, characterized in that: In any one of the pre-scan test and the main-scan test, scanning is performed according to a preset step distance.

6. The testing method according to claim 5, characterized in that: The preset step size is 1 mV to 50 mV.

7. The testing method according to claim 1, characterized in that: The condition parameter is voltage, and the intermediate reference value is 0V; or, the condition parameter is current, and the intermediate reference value is 0A.

8. The testing method according to claim 1, characterized in that: The testing method includes performing serial testing on the pins of the product to be tested. In the serial testing, pre-scan testing and main-scan testing are performed on each pin to be tested of the product to be tested in sequence, and when the current pin to be tested is scanned, the remaining pins are placed in a floating state.

9. The testing method according to claim 1, characterized in that: The testing method further comprises: performing parallel testing on the pins of the product to be tested, in which each pin of the product to be tested is tested simultaneously under given condition parameters.

10. The testing method according to claim 1, characterized in that: The test method further includes: outputting a test curve for characterizing the relationship between current and voltage changes based on each condition parameter value loaded in the main scan test and the detection parameter value detected corresponding to each condition parameter value.

11. The testing method according to claim 10, characterized in that: The output is used to characterize the test curve of the relationship between current and voltage changes, and the standard curve in the same coordinate system is also output simultaneously.

12. The testing method according to claim 10, characterized in that: Output test curves to characterize the relationship between current and voltage changes, including: Based on each condition parameter value loaded in the main scanning test and the detection parameter value detected under each condition parameter value, an array is established, wherein the X-axis data in the array includes each loaded condition parameter value, and the Y-axis data in the array includes the detection parameter value detected under each condition parameter value; Based on the array, a test curve for characterizing the relationship between current and voltage changes is output.

13. The testing method according to claim 10, characterized in that: After the main scan test, the method further includes: for any pin, based on a test curve corresponding to the pin and a detection parameter value expected to be detected by the pin in the parallel test, determining a conditional parameter value of the pin in the parallel test.

14. The testing method according to claim 10, characterized in that: The testing method further comprises: performing parallel testing on the pins of the product to be tested, in which each pin of the product to be tested is tested simultaneously under given condition parameters in the parallel testing; After obtaining the test curve obtained based on the main scan test and the test points obtained based on the parallel test, the testing method further includes: for any pin, based on the current and voltage corresponding to the test point of the pin, marking the test point in the coordinate system corresponding to the test curve of the pin.

15. The test method according to any one of claims 9, 13 or 14, characterized in that: The parallel test includes a power supply short circuit test.

16. The testing method according to claim 1, characterized in that: The test method is performed by automatic testing equipment.

17. A data processing method, characterized in that: include: Acquire a test data file of one or more products to be tested, wherein the test data file includes test data obtained by performing a scan test on the products to be tested, wherein the scan test is used to obtain a relationship between current and voltage changes, and the test data file includes each condition parameter value and a detection parameter value correspondingly detected under each condition parameter value, wherein one of the condition parameter and the detection parameter is voltage and the other is current; Parsing the test data file to extract the condition parameter values ​​and detection parameter values; The extracted data is used to output a test curve of the product to be tested, where the test curve is used to characterize the relationship between current and voltage changes.

18. The data processing method according to claim 17, characterized in that: The test data file includes the ID of the product to be tested, the ID of each pin in the product to be tested, each condition parameter value corresponding to each pin, and the detection parameter value detected under each condition parameter value; Parse the test data file to extract the ID of the product to be tested, the ID of each pin in the product to be tested, and the condition parameter value and detection parameter value corresponding to each pin of the product to be tested; The extracted data is used to output a test curve corresponding to each pin of each product to be tested, wherein the test curve is used to characterize the relationship between current and voltage changes.

19. The data processing method according to claim 17, characterized in that: The test data file also includes test data obtained by performing parallel testing on the pins of the product to be tested, wherein the parallel testing is used to simultaneously test each pin of the product to be tested under given condition parameters; After outputting the test curve, the data processing method further includes: for any pin, based on the current and voltage corresponding to the test point obtained by parallel testing of the pin, marking the test point in the coordinate system corresponding to the test curve of the pin.

20. The data processing method according to claim 17, characterized in that: After outputting the test curve, the data processing method further includes: for any pin of the product to be tested, based on the test curve corresponding to the pin and the detection parameter value expected to be detected by the pin in the parallel test, outputting the conditional parameter value of the pin in the parallel test.

21. The data processing method according to claim 19 or 20, characterized in that: The parallel test includes a power supply short circuit test.

22. A testing system, characterized in that: include: A pre-scan module, used to start from the intermediate reference value of the condition parameter, perform a pre-scan test for obtaining the relationship between current and voltage changes, and end the pre-scan test when the current or voltage meets a preset condition, and use the condition parameter value currently loaded when the pre-scan is ended as the starting value of the main scan test, the condition parameter is voltage or current, and the intermediate reference value is between the starting value and the final value of the main scan test; A main scanning module is used to start from the starting value, perform a main scanning test for obtaining the relationship between current and voltage changes, and end the main scanning test when the current or voltage meets the preset conditions to obtain the detection parameter values ​​corresponding to the various conditional parameter values ​​under the main scanning test. The scanning directions of the main scanning test and the pre-scan test are opposite.

23. A device, characterized in that It comprises at least one memory and at least one processor, wherein the memory stores one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the testing method as described in any one of claims 1 to 16, or to implement the data processing method as described in any one of claims 17 to 21.

24. A storage medium, characterized in that: The storage medium stores one or more computer instructions, and the one or more computer instructions are used to implement the testing method as described in any one of claims 1-16, or to implement the data processing method as described in any one of claims 17-21.

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