Hydrogen and nitrogen mixed gas control system based on multi-sensor and relay control

Abstract

The invention discloses a hydrogen-nitrogen mixed gas control system based on multi-sensor and relay control, and relates to the technical field of hydrogen-nitrogen mixed gas production. The system comprises a gas supply device, a mixed gas channel, a lead frame conveying device, an LCD module, a power supply, a single-chip microcomputer controller, an electromagnetic valve, a third photoelectric sensor, a second photoelectric sensor and a first photoelectric sensor, and the electromagnetic valve is installed on a pipeline connecting the gas supply device and the mixed gas channel. The third photoelectric sensor is arranged on a discharging port of the lead frame conveying equipment, the second photoelectric sensor is arranged on the lead frame conveying equipment, the first photoelectric sensor is arranged on a feeding port of the lead frame conveying equipment, and the single-chip microcomputer controller serves as a control core of the system. On-off of the electromagnetic valve is accurately controlled by monitoring the states of the third photoelectric sensor, the second photoelectric sensor and the first photoelectric sensor in real time, gas is allowed to pass only when specific conditions are met, and accurate control over hydrogen and nitrogen mixed gas is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of hydrogen-nitrogen mixed gas production, and in particular to a hydrogen-nitrogen mixed gas control system based on multi-sensor and relay control. Background Art

[0002] Hydrogen-nitrogen mixture is an indispensable part of the semiconductor industry manufacturing process. In the field of gas processing and application, it has the functions of cleaning the chip surface, improving the electrical properties of semiconductors, and preventing chip oxidation. It is an important support for ensuring the quality of semiconductor chip production. However, from the perspective of production management and cost control, how to accurately control the hydrogen-nitrogen mixture is crucial to improving production efficiency and saving resources. However, traditional gas control systems often lack flexibility and cannot be accurately adjusted according to real-time conditions, resulting in gas waste. Therefore, it is particularly important to develop a system that can intelligently respond to sensor signals and accurately control the on and off of gases.

[0003] Figure 1 It is a traditional gas control system, which is mainly composed of three parts: gas supply equipment, delivery pipeline and gas supply pipe. The gas supply equipment is the source of the whole gas control system. The gas is transmitted to each gas supply pipe through the delivery pipeline, and finally the gas supply pipe is connected to the equipment to provide gas.

[0004] The current gas control system mainly relies on the valves of each gas supply pipe for control, and the gas supply valves rely on manual control. Although some models have built-in solenoid valves to control the on and off of gas, they cannot achieve flexible dynamic on and off. For example, during the equipment standby and machine adjustment process, the machine does not continue to produce during this period, but it is still in a state of continuous gas supply. In addition, it is inevitable that the machine has unattended periods during the production process. If the machine suddenly encounters an alarm at this time, causing production to be suspended or the machine has completed the operation and stopped working, the gas supply valve cannot close automatically. The above two situations will lead to waste of gas and production resources, and ultimately lead to increased production costs.

[0005] In view of the above problems, an improved hydrogen-nitrogen mixture control system based on multi-sensor and relay control is now designed. Summary of the invention

[0006] The object of the present invention is to provide a hydrogen-nitrogen mixed gas control system based on multi-sensor and relay control to solve the problems raised in the above background technology.

[0007] To achieve the above object, the present invention provides the following technical solutions:

[0008] A hydrogen-nitrogen mixed gas control system based on multi-sensor and relay control comprises a gas supply device, a mixed gas channel, a lead frame conveying device, an LCD module, a power supply, a single-chip microcomputer controller, a solenoid valve, a third photoelectric sensor, a second photoelectric sensor, and a first photoelectric sensor. The output end of the gas supply device is connected to the input end of the mixed gas channel through a pipeline, the output end of the mixed gas channel is connected to the gas input end of the lead frame conveying device, and the gas output end of the lead frame conveying device faces the lead frame.

[0009] The solenoid valve is installed on a pipeline connecting the gas supply device and the mixed gas channel, and is used to control the switch of the pipeline connecting the gas supply device and the mixed gas channel.

[0010] The third photoelectric sensor is arranged on the discharge port of the lead frame conveying equipment, the second photoelectric sensor is arranged on the lead frame conveying equipment, and the first photoelectric sensor is arranged at the feed port of the lead frame conveying equipment, and is responsible for monitoring the incoming material conditions at the feed port of the lead frame conveying equipment, the inside of the lead frame conveying equipment, and the discharge port of the lead frame conveying equipment.

[0011] The single chip microcomputer controller serves as the control core of the system and is responsible for receiving and processing the signals of the third photoelectric sensor, the second photoelectric sensor and the first photoelectric sensor, and outputting the control signal after logical judgment.

[0012] The LCD module is used to display and record current monitoring information, and the power supply is used to provide power for the entire system.

[0013] As a further solution of the present invention: a relay module is arranged between the single-chip microcomputer controller and the solenoid valve, the third photoelectric sensor, the second photoelectric sensor, and the first photoelectric sensor. The relay module is composed of four relays, namely relay A, relay B, relay C, and relay D. It serves as a communication bridge between the single-chip microcomputer controller and the solenoid valve, the third photoelectric sensor, the second photoelectric sensor, and the first photoelectric sensor. It provides an input signal to the single-chip microcomputer controller according to the monitoring results of the third photoelectric sensor, the second photoelectric sensor, and the first photoelectric sensor, and transmits the output signal output by the single-chip microcomputer controller to the solenoid valve, so as to control the switching state of the solenoid valve.

[0014] As a further solution of the present invention: the software part inside the single-chip microcomputer controller is mainly composed of a track detection module, a condition judgment module, an output control module, an LCD display module and an exception handling module.

[0015] Track monitoring module: This module is responsible for real-time monitoring of the status of the third photoelectric sensor, the second photoelectric sensor, and the first photoelectric sensor, and judging the incoming material situation of the lead frame conveying equipment (incoming material / no incoming material).

[0016] Condition judgment module: This module is responsible for further confirming the incoming material conditions of each part of the lead frame conveying equipment, and judging whether it is safe to close the solenoid valve at this time, that is, whether closing the solenoid valve is allowed.

[0017] Output control module: This module is responsible for controlling the solenoid valve to remain in the normally open state (allowing hydrogen-nitrogen mixed gas to pass through), cutting off the gas supply only after confirming that the solenoid valve is allowed to be closed, and restoring the solenoid valve to the normally open state after confirming that the solenoid valve needs to be opened.

[0018] LCD module display: The LCD module displays the current alarm information, number of alarms and 5-minute countdown, etc.

[0019] Abnormal handling: responsible for real-time monitoring of the status of the third photoelectric sensor, the second photoelectric sensor, and the first photoelectric sensor during the delay period. If the status of any sensor changes during the delay period (i.e., from "no material incoming" to "material incoming"), the solenoid valve will be opened immediately to supply gas.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The present invention accurately controls the on-off of the solenoid valve by real-time monitoring of the states of the third photoelectric sensor, the second photoelectric sensor, and the first photoelectric sensor, and allows gas to pass only when specific conditions are met, thereby achieving accurate control of the hydrogen-nitrogen mixed gas and effectively avoiding gas waste.

[0022] Since the system uses a relay module to control the solenoid valve, electrical isolation is achieved, which also improves the safety and reliability of the system. Finally, the system has strong scalability. The system can adjust the number of sensors and conditional judgment logic according to actual needs, and is suitable for a variety of different models and various application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is the structural diagram of the traditional gas control system.

[0024] Figure 2 It is a bottom view structural schematic diagram of the present invention.

[0025] Figure 3 It is the system hardware structure diagram of the present invention.

[0026] Figure 4 It is the software code structure diagram of the present invention.

[0027] Among them: 1. gas supply equipment; 2. mixed gas channel; 3. lead frame conveying equipment; 4. LCD module; 5. power supply; 6. single-chip microcomputer controller; 7. solenoid valve; 8. third photoelectric sensor; 9. second photoelectric sensor; 10. first photoelectric sensor. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] like Figure 2-Figure 3 As shown, in an embodiment of the present invention, a hydrogen-nitrogen mixed gas control system based on multi-sensor and relay control includes a gas supply device 1, a mixed gas channel 2, a lead frame conveying device 3, an LCD module 4, a power supply 5, a single-chip controller 6, a solenoid valve 7, a third photoelectric sensor 8, a second photoelectric sensor 9, and a first photoelectric sensor 10. The output end of the gas supply device 1 is connected to the input end of the mixed gas channel 2 through a pipeline, and the output end of the mixed gas channel 2 is connected to the gas input end of the lead frame conveying device 3, and the gas output end of the lead frame conveying device 3 faces the lead frame.

[0030] The solenoid valve 7 is installed on the pipeline connecting the gas supply device 1 and the mixed gas channel 2, and is used to control the switch of the pipeline connecting the gas supply device 1 and the mixed gas channel 2.

[0031] The third photoelectric sensor 8 is arranged on the discharge port of the lead frame conveying device 3, the second photoelectric sensor 9 is arranged on the lead frame conveying device 3, and the first photoelectric sensor 10 is arranged at the feed port of the lead frame conveying device 3, and is responsible for monitoring the incoming material conditions at the feed port of the lead frame conveying device 3, the inside of the lead frame conveying device 3, and the discharge port of the lead frame conveying device 3.

[0032] The single chip controller 6 serves as the control core of the system and is responsible for receiving and processing the signals from the third photoelectric sensor 8 , the second photoelectric sensor 9 , and the first photoelectric sensor 10 , and outputting control signals after logical judgment.

[0033] A relay module is arranged between the single-chip controller 6 and the solenoid valve 7, the third photoelectric sensor 8, the second photoelectric sensor 9, and the first photoelectric sensor 10. The relay module is composed of four relays, namely, relay A, relay B, relay C, and relay D. The relay module serves as a communication bridge between the single-chip controller 6 and the solenoid valve 7, the third photoelectric sensor 8, the second photoelectric sensor 9, and the first photoelectric sensor 10. The relay module provides an input signal to the single-chip controller 6 according to the monitoring results of the third photoelectric sensor 8, the second photoelectric sensor 9, and the first photoelectric sensor 10, and transmits the output signal output by the single-chip controller 6 to the solenoid valve 7 for controlling the switching state of the solenoid valve 7.

[0034] The LCD module 4 is used to display and record current monitoring information, and the power supply 5 is used to provide power for the entire system.

[0035] like Figure 4 As shown, the software part inside the single chip controller 6 is mainly composed of a track detection module, a condition judgment module, an output control module, an LCD display module and an exception handling module.

[0036] Track monitoring module: This module is responsible for real-time monitoring of the status of the third photoelectric sensor 8, the second photoelectric sensor 9, and the first photoelectric sensor 10, and judging the incoming material situation of the lead frame conveying device 3 (incoming material / no incoming material).

[0037] Condition judgment module: This module is responsible for further confirming the incoming material conditions of each part of the lead frame conveying device 3, and judging whether it is safe to close the solenoid valve 7 at this time, that is, whether closing the solenoid valve 7 is allowed.

[0038] Output control module: This module is responsible for controlling the solenoid valve 7 to remain in a normally open state (allowing the hydrogen-nitrogen mixture to pass through), cutting off the gas supply only after confirming that the solenoid valve 7 is allowed to be closed, and restoring the solenoid valve 7 to a normally open state after confirming that the solenoid valve 7 needs to be opened.

[0039] LCD module display: LCD module 4 displays the current alarm information, number of alarms and 5-minute countdown, etc.

[0040] Abnormal handling: responsible for real-time monitoring of the status of the third photoelectric sensor 8, the second photoelectric sensor 9, and the first photoelectric sensor 10 during the delay period. If the status of any sensor changes during the delay period (i.e., from "no incoming material" to "incoming material"), the solenoid valve 7 is immediately opened to supply gas.

[0041] It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention.

Claims

1. A hydrogen-nitrogen mixed gas control system based on multi-sensor and relay control, comprising a gas supply device (1), a mixed gas channel (2), a lead frame conveying device (3), an LCD module (4), a power supply (5), a single-chip controller (6), a solenoid valve (7), a third photoelectric sensor (8), a second photoelectric sensor (9), and a first photoelectric sensor (10), wherein the output end of the gas supply device (1) is connected to the input end of the mixed gas channel (2) through a pipeline, the output end of the mixed gas channel (2) is connected to the gas input end of the lead frame conveying device (3), and the gas output end of the lead frame conveying device (3) faces the lead frame; It is characterized in that The solenoid valve (7) is installed on a pipeline connecting the gas supply device (1) and the mixed gas channel (2); the third photoelectric sensor (8) is arranged on the discharge port of the lead frame conveying device (3); the second photoelectric sensor (9) is arranged on the lead frame conveying device (3); and the first photoelectric sensor (10) is arranged on the feed port of the lead frame conveying device (3); the single-chip microcomputer controller (6) serves as the control core of the system and is responsible for receiving and processing the signals of the third photoelectric sensor (8), the second photoelectric sensor (9) and the first photoelectric sensor (10), and outputting a control signal after logical judgment.

2. A hydrogen-nitrogen mixed gas control system based on multi-sensor and relay control according to claim 1, characterized in that: A relay module is provided between the single chip controller (6) and the solenoid valve (7), the third photoelectric sensor (8), the second photoelectric sensor (9), and the first photoelectric sensor (10); The relay module is composed of four relays, namely, relay A, relay B, relay C and relay D, and serves as a communication bridge between the single-chip controller (6) and the solenoid valve (7), the third photoelectric sensor (8), the second photoelectric sensor (9) and the first photoelectric sensor (10). The relay module provides an input signal to the single-chip controller (6) according to the monitoring results of the third photoelectric sensor (8), the second photoelectric sensor (9) and the first photoelectric sensor (10), and transmits an output signal output by the single-chip controller (6) to the solenoid valve (7).

3. A hydrogen-nitrogen mixed gas control system based on multi-sensor and relay control according to claim 2, characterized in that: The software part inside the single chip controller (6) mainly consists of a track detection module, a condition judgment module, an output control module, an LCD display module and an exception processing module.

4. A hydrogen-nitrogen mixed gas control system based on multi-sensor and relay control according to claim 3, characterized in that: Track monitoring module: This module is responsible for real-time monitoring of the status of the third photoelectric sensor (8), the second photoelectric sensor (9), and the first photoelectric sensor (10), and determining the incoming material status of the lead frame conveying device (3); Condition judgment module: This module is responsible for further confirming the incoming material conditions of each part of the lead frame conveying device (3), and judging whether it is safe to close the solenoid valve (7) at this time; Output control module: This module is responsible for controlling the solenoid valve (7) to maintain a normally open state, cutting off the gas supply only after confirming that the solenoid valve (7) is allowed to be closed, and restoring the solenoid valve (7) to a normally open state after confirming that the solenoid valve (7) needs to be opened; LCD module display: The LCD module (4) displays the current alarm information, the number of alarms and the 5-minute countdown, etc. Abnormal handling: responsible for real-time monitoring of the status of the third photoelectric sensor (8), the second photoelectric sensor (9), and the first photoelectric sensor (10) during the delay period. If the status of any sensor changes during the delay period, the solenoid valve (7) is immediately opened.

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