A real-time monitoring and recording system during the electron beam irradiation process

Abstract

The present invention discloses a real-time monitoring and recording system during the electron beam irradiation process, which relates to the technical field of electron beam processing and irradiation. The system includes a data acquisition module for acquiring real-time position and intensity information of the electron beam during irradiation, and a deviation calculation module connected to the data acquisition module for determining the required adjustment amount of the focusing and deflection magnet currents based on the deviation between the real-time position and the preset ideal position. It includes calculating the offset growth rate of the electron beam offset according to the measured change in the electron beam position, determining whether the offset is in a stable state, setting an offset growth threshold, and when the offset growth exceeds the threshold, adjusting the control parameters to reduce the adjustment amplitude to prevent overcorrection. The real-time monitoring and recording system during the electron beam irradiation process automatically adjusts the focusing and deflection magnet currents according to the electron beam position offset to solve the problem of inaccurate irradiation area.

Description

Technical Field

[0001] The present invention relates to the technical field of electron beam processing and irradiation, and specifically relates to a real-time monitoring and recording system during the electron beam irradiation process. Background Art

[0002] In the electron beam irradiation process, the position accuracy of the electron beam has a crucial impact on the irradiation effect. Traditional electron beam irradiation systems usually rely on preset parameters to control the current of the focusing and deflection magnets to ensure that the electron beam irradiates the target area along the established trajectory. However, during the actual application process, due to factors such as equipment aging, electromagnetic interference, and workpiece position deviation, the electron beam may deviate in position, resulting in an inaccurate irradiation area, thereby affecting the processing or modification effect.

[0003] In the prior art, some systems attempt to compensate for the electron beam position deviation by manual adjustment or preset correction parameters. However, this method has certain limitations. For example, manual adjustment has low efficiency and is difficult to meet the high-precision requirements; preset correction parameters are difficult to adapt to the real-time changing electron beam deviation situation, resulting in a lag in adjustment and unable to accurately compensate for the deviation. In addition, although some systems use optical or electromagnetic feedback mechanisms to detect the position of the electron beam, due to the slow feedback response speed or the lack of optimization of the control algorithm, efficient real-time adjustment still cannot be achieved. Summary of the Invention

[0004] The purpose of the present invention is to provide a real-time monitoring and recording system during the electron beam irradiation process, which automatically adjusts the current of the focusing and deflection magnets according to the electron beam position deviation to solve the problem of inaccurate irradiation area.

[0005] To achieve the above purpose, the present invention provides the following technical solution: A real-time monitoring and recording system during the electron beam irradiation process, the system includes:

[0006] A data acquisition module, used to acquire the real-time position and intensity information of the electron beam during the irradiation process;

[0007] A deviation calculation module connected to the data acquisition module, used to determine the required adjustment amount of the focusing and deflection magnet currents based on the deviation between the real-time position and the preset ideal position, including calculating the electron beam offset growth rate according to the measured change in the electron beam position, determining whether the offset is in a stable state to ensure the adjustment efficiency and prevent overcorrection. The specific formula for calculating the electron beam offset growth rate is:

[0008] r = ;

[0009] Wherein, represents the cumulative offset of the electron beam, represents the initial electron beam offset, t represents time, and r represents the growth rate of the electron beam offset offset;

[0010] A current adjustment module connected to the deviation calculation module, which is used to automatically adjust the currents of the focusing and deflection magnets according to the calculation results, so that the electron beam returns to the preset irradiation area, including constructing a response model in which the magnet current changes gradually with time, simulating the adaptability of the electron beam to the new current setting, avoiding the oscillation caused by sudden current changes, adjusting the data transmitted to the magnet system, and precisely controlling the electron beam trajectory;

[0011] A data recording module connected to the data acquisition module and the current adjustment module, which is used to record the parameters of each adjustment and the corresponding irradiation position data for subsequent analysis, including during the data recording process, real-time monitoring whether the stored data volume meets the system's requirements for adjustment parameters. When the real-time monitored stored data volume is less than the system's requirements for adjustment parameters, adjust the storage strategy to increase the data sampling rate. When the real-time monitored stored data volume is greater than the system's requirements for adjustment parameters, optimize the data compression algorithm to reduce storage occupancy.

[0012] Preferably, the data acquisition module obtains the real-time position and intensity information of the electron beam during irradiation, including measuring the real-time signal intensity of the electron beam and calculating the electron beam signal quality. The specific formula is:

[0013] A = ;

[0014] Among them, A represents the electron beam signal quality, b represents the currently measured electron beam signal intensity, represents the theoretical maximum electron beam signal intensity;

[0015] Adjust the data acquisition parameters to optimize the data acquisition effect, and transmit the optimized data to the deviation calculation module.

[0016] Preferably, the specific formula for the current adjustment module to automatically adjust the currents of the focusing and deflection magnets according to the calculation results so that the electron beam returns to the preset irradiation area and simulates the adaptability of the electron beam to the new current setting is: ;

[0017] Among them, C(t) represents the degree to which the electron beam current adjustment gradually approaches the target current value, t represents time, e represents the base of the natural logarithm, and a represents the time constant.

[0018] Preferably, the data recording module records the parameters adjusted each time and the corresponding irradiation position data for subsequent analysis. During the data recording process, it is necessary to monitor in real time whether the stored data volume meets the system's requirements for the adjusted parameters. When the real-time monitored stored data volume is less than the system's requirements for the adjusted parameters, adjust the storage strategy to increase the data sampling rate. When the real-time monitored stored data volume is greater than the system's requirements for the adjusted parameters, optimize the data compression algorithm to reduce storage occupancy.

[0019] Preferably, the data acquisition module acquires the real-time position and intensity information of the electron beam during irradiation. The calculation formula for the currently measured electron beam signal intensity b is: b = P / S;

[0020] Where, b represents the currently measured electron beam signal intensity, P represents the total power of the electron beam received by the detector, and S represents the effective detection area of the detector.

[0021] Preferably, the data acquisition module acquires the real-time position and intensity information of the electron beam during irradiation. The theoretical maximum electron beam signal intensity The calculation formula is: = / S;

[0022] Where, represents the theoretical maximum electron beam signal intensity, represents the maximum output power of the electron beam source, and S represents the effective detection area of the detector.

[0023] Preferably, the current adjustment module automatically adjusts the currents of the focusing and deflection magnets according to the calculation results to make the electron beam return to the preset irradiation area. Set a time constant threshold. When the time constant a is lower than the set threshold, increase the buffer time for current adjustment. When the time constant a is higher than the set threshold, increase the step amplitude of current adjustment.

[0024] Preferably, the deviation calculation module determines the required current adjustment amounts of the focusing and deflection magnets based on the deviation between the real-time position and the preset ideal position, including obtaining the current position coordinates of the electron beam , determining the preset ideal position coordinates , and calculating the offset distance based on the following formula:

[0025] d = .

[0026] Preferably, the data acquisition module includes a signal filtering unit, which uses the Kalman filtering algorithm or the low-pass filtering algorithm to remove noise from the measured electron beam signal intensity.

[0027] From the above technical solutions, it can be seen that the present invention has the following beneficial effects:

[0028] During the electron beam irradiation process, the real-time monitoring and recording system obtains the real-time position and intensity information of the electron beam through the data acquisition module. The deviation calculation module determines the required adjustment amount of the focusing and deflection magnet currents based on the deviation between the real-time position and the preset ideal position. The current adjustment module automatically adjusts the currents of the focusing and deflection magnets according to the calculation results to make the electron beam return to the preset irradiation area. The data recording module records the parameters of each adjustment and the corresponding irradiation position data for subsequent analysis. It can achieve rapid detection and precise calculation of the electron beam position offset, improve the accuracy of electron beam trajectory control, ensure the accuracy of the irradiation area, avoid the low efficiency problem of manual adjustment, and at the same time overcome the defect that traditional preset correction parameters cannot adapt to dynamic offsets. It improves the response speed of electron beam position detection and current adjustment, avoids the adjustment lag problem caused by feedback delay in the prior art, thereby realizing efficient and stable real-time adjustment, improving the stability and adaptive ability during long-term operation, reducing the error accumulation caused by equipment aging or external interference, effectively reducing the influence of electromagnetic interference on electron beam position control, improving the stability and reliability of the system, making the electron beam irradiation process more precise and controllable. Through efficient real-time monitoring, intelligent adjustment and feedback optimization, it improves the accuracy, stability and automation level of the electron beam irradiation system, and can be widely applied to high-precision electron beam processing, material modification, semiconductor manufacturing, irradiation sterilization and other fields, and automatically adjusts the currents of the focusing and deflection magnets according to the electron beam position offset to solve the problem of inaccurate irradiation area. Brief Description of the Drawings

[0029] Figure 1 It is a connection diagram of the modules of the present invention. Detailed Embodiments

[0030] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0031] As Figure 1 shown, the present invention provides a technical solution: a real-time monitoring and recording system during the electron beam irradiation process, the system includes:

[0032] A data acquisition module for obtaining the real-time position and intensity information of the electron beam during the irradiation process;

[0033] A deviation calculation module connected to the data acquisition module, which is used to determine the required adjustment amounts of the focusing and deflection magnet currents based on the deviation between the real-time position and the preset ideal position. It includes calculating the offset growth rate of the electron beam offset according to the measured change in the electron beam position, determining whether the offset is in a stable state, setting an offset growth threshold, and when the offset growth exceeds this threshold, reducing the control parameter value for adjusting the magnet current according to the degree of offset growth to reduce the risk of electron beam oscillation caused by adjustment. When the offset tends to be stable, the default control parameters are restored to ensure the adjustment efficiency and prevent overcorrection. The specific formula for calculating the offset growth rate of the electron beam offset is:

[0034] r = ;

[0035] where, represents the cumulative offset of the electron beam, represents the initial electron beam offset, t represents time, and r represents the offset growth rate of the electron beam offset;

[0036] A current adjustment module connected to the deviation calculation module, which is used to automatically adjust the currents of the focusing and deflection magnets according to the calculation results to return the electron beam to the preset irradiation area. It includes building a response model in which the magnet current changes gradually over time to simulate the adaptability of the electron beam to the new current settings, avoiding oscillations caused by sudden current changes, and adjusting the data transmitted to the magnet system to accurately control the electron beam trajectory;

[0037] A data recording module connected to the data acquisition module and the current adjustment module, which is used to record the parameters of each adjustment and the corresponding irradiation position data for subsequent analysis. It includes, during the data recording process, real-time monitoring of whether the stored data volume meets the system's requirements for adjustment parameters. When the real-time monitored stored data volume is less than the system's requirements for adjustment parameters, adjusting the storage strategy to increase the data sampling rate. When the real-time monitored stored data volume is greater than the system's requirements for adjustment parameters, optimizing the data compression algorithm to reduce storage occupancy.

[0038] The system monitors the irradiation position and intensity information of the electron beam in real time through the data acquisition module, and transmits the collected data to the deviation calculation module. The deviation calculation module calculates the offset and offset growth rate by comparing the real-time position of the electron beam with the preset ideal position, and determines whether the offset is in a stable state. When the offset growth exceeds the set threshold, the control parameters are adjusted to reduce the adjustment amplitude and prevent the error accumulation caused by overcorrection. The current adjustment module automatically adjusts the currents of the focusing and deflection magnets according to the deviation calculation results to ensure that the electron beam can accurately return to the preset irradiation area. The system also models the adjustment process of the magnet currents to simulate the adaptation of the electron beam to different current settings, so as to reduce the trajectory oscillation caused by current mutation. The data recording module stores the parameters of each adjustment and the electron beam irradiation position data for subsequent analysis and optimization of the system control strategy. The present invention can realize real-time monitoring and intelligent adjustment during the electron beam irradiation process, and improve the irradiation accuracy. Through the dynamic analysis of the electron beam trajectory offset by the deviation calculation module, the errors generated during the adjustment process can be effectively reduced, overcorrection can be prevented, and the stability of the system can be improved. The modeling method of the current adjustment module can optimize the current adjustment strategy, reduce the oscillation caused by current mutation, and make the electron beam trajectory more stable. In addition, the data recording module provides a complete adjustment record, making subsequent analysis and optimization possible, and improving the maintainability and long-term reliability of the system.

[0039] The data acquisition module obtains the real-time position and intensity information of the electron beam during irradiation, including measuring the real-time signal intensity of the electron beam and calculating the electron beam signal quality. The specific formula is: A = ;

[0040] where A represents the electron beam signal quality, b represents the currently measured electron beam signal intensity, represents the theoretical maximum electron beam signal intensity;

[0041] Adjust the data acquisition parameters to optimize the data acquisition effect, and transmit the optimized data to the deviation calculation module.

[0042] The working principle of the electron beam signal quality calculation module is to measure the signal intensity of the electron beam in real time through a high-precision sensor and use a normalization calculation method to evaluate the signal quality. First, the system uses a photodetector, a Hall detector or an X-ray detector to obtain the real-time data of the electron beam signal, and converts the analog signal into a digital signal through an analog-to-digital converter. Then, the calculation module compares the currently measured signal intensity b with the theoretical maximum signal intensity Normalization calculations are performed to obtain the electron beam signal quality A. This calculation method can effectively eliminate the influence of environmental factors, equipment aging, and power fluctuations on the measurement results, thereby improving the accuracy of signal evaluation. In addition, the system uses filtering algorithms (such as Kalman filtering or low-pass filtering) to optimize the collected data, reduce noise interference, and improve signal stability. Finally, the optimized signal quality data is transmitted to the deviation calculation module as the basis for adjusting the electron beam trajectory to ensure the accuracy and stability of electron beam irradiation. First, by monitoring the electron beam signal quality in real time, the system can accurately identify the deviation of the electron beam trajectory and timely adjust the irradiation path of the electron beam to improve trajectory stability and ensure that the electron beam always acts on the target area. Second, the signal quality calculation module optimizes the data acquisition parameters, enabling the system to adaptively adjust the measurement sensitivity, reduce environmental interference, and improve the measurement accuracy, thereby ensuring the uniformity of the electron beam irradiation dose and avoiding local overexposure or underexposure. In addition, the signal normalization calculation method improves the comparability of data, eliminates measurement errors caused by factors such as equipment aging, detector sensitivity changes, or power fluctuations, and makes the measurement data of different batches more stable and reliable. By optimizing the data acquisition and signal processing processes, this module enhances the overall reliability of the electron beam system and improves the stability and maintainability of long-term operation.

[0043] Based on the deviation between the real-time position and the preset ideal position, the deviation calculation module determines the required adjustment amounts of the focusing and deflection magnet currents. The specific formula for calculating the offset growth rate of the electron beam offset is:

[0044] r = ;

[0045] where represents the cumulative offset of the electron beam, represents the initial electron beam offset, t represents time, and r represents the offset growth rate of the electron beam offset.

[0046] The calculation process of the offset growth rate of the electron beam offset involves the real-time monitoring and mathematical modeling of the electron beam movement trajectory. First, the data acquisition module real-time detects the current position of the electron beam and compares it with the preset ideal trajectory to obtain the initial offset . Subsequently, the system continuously monitors the trajectory deviation of the electron beam and records the cumulative offset . The deviation calculation module uses logarithmic calculation formulas to calculate the offset growth rate r to characterize the change trend of the electron beam offset over time. This calculation method can more accurately reflect the dynamic characteristics of the offset change and avoid errors that may occur in the linear estimation method. At the same time, the system can adjust the control parameters according to the change trend of the offset growth rate r, optimize the magnet current adjustment strategy, and ensure the stability of the electron beam trajectory. The beneficial effects of this module are reflected in many aspects. First, through the real-time monitoring of the electron beam offset and the calculation of the growth rate, the stability of the electron beam trajectory can be effectively identified. When the offset growth rate exceeds the preset threshold, the focusing and deflection magnet currents can be adjusted in a timely manner to prevent excessive electron beam offset and ensure the irradiation accuracy. Second, the logarithmic calculation method can more accurately describe the change trend of the electron beam offset, improve the sensitivity of the calculation, and enable the system to respond more quickly to trajectory anomalies. In addition, this method improves the accuracy of the offset calculation by reducing error accumulation, enabling the system to more precisely adjust the electron beam trajectory, improve the uniformity and stability of the irradiation area, and enhance the reliability and control accuracy of the overall system.

[0047] The current adjustment module automatically adjusts the currents of the focusing and deflection magnets according to the calculation results to bring the electron beam back into the preset irradiation area. The specific formula for simulating the adaptability of the electron beam to the new current setting is:

[0048] ;

[0049] where C(t) represents the degree to which the electron beam current adjustment gradually approaches the target current value, t represents time, e represents the base of the natural logarithm, and a represents the time constant.

[0050] The working principle of this current adjustment module is based on an exponential change model to ensure the smoothness and controllability of the current adjustment process. First, the system receives the electron beam trajectory offset data provided by the deviation calculation module and determines the required current adjustment amount. Then, the current adjustment module adopts an exponentially increasing control strategy to gradually adjust the currents of the focusing and deflection magnets, bringing the electron beam back to the ideal trajectory gradually rather than instantaneously, to avoid violent oscillations in the electron beam trajectory. The mathematical model of this process uses an exponential function , where the time constant a determines the adjustment rate. The time constant a is set by the system optimization algorithm so that the current change rate can not only meet the dynamic response requirements of the electron beam but also prevent system instability. In addition, this module incorporates a closed-loop feedback control mechanism to monitor the electron beam trajectory in real time and dynamically adjust the current regulation strategy to further improve the accuracy of trajectory adjustment. The beneficial effects of this current regulation module are reflected in multiple aspects. First, through the exponential adjustment function, the current regulation process is smoother, avoiding the jitter of the electron beam trajectory that may be caused by sudden current changes and improving the stability of the system. Second, this module can be adjusted according to the adaptability of the electron beam to the new current setting to ensure that the electron beam trajectory can smoothly transition to the target position without overshoot or lag. In addition, the introduction of the closed-loop feedback control mechanism enables the current regulation module to adapt to different irradiation conditions, improving the control accuracy of the electron beam trajectory, thereby enhancing the irradiation uniformity and accuracy.

[0051] The data recording module records the parameters of each adjustment and the corresponding irradiation position data for subsequent analysis. During the data recording process, it monitors in real time whether the stored data volume meets the system's requirements for adjustment parameters. When the real-time monitored stored data volume is less than the system's requirements for adjustment parameters, it adjusts the storage strategy to increase the data sampling rate. When the real-time monitored stored data volume is greater than the system's requirements for adjustment parameters, it optimizes the data compression algorithm to reduce storage occupancy.

[0052] The working principle of the data recording module is based on a dynamic data management mechanism to ensure that the recorded data can meet the requirements of adjusted parameter analysis without causing waste of storage resources or degradation of system performance. First, the data recording module receives and stores in real time the key parameters during the electron beam irradiation process, including electron beam position, trajectory adjustment current, signal quality, offset, etc. The system sets a data volume threshold range to ensure that the stored data volume always remains within the optimal range. If the stored data volume monitored in real time is lower than the set threshold, the system automatically increases the data sampling rate and adds more key adjustment parameters to be stored to ensure data integrity and improve the accuracy of subsequent analysis. On the contrary, when the stored data volume exceeds the range required by the system, the system will enable data compression algorithms, such as lossless compression, data downsampling or feature extraction methods, to reduce storage occupancy while retaining the core features of the data for subsequent optimization analysis. In addition, the system can adaptively adjust the data storage strategy based on the historical data change trend to improve data management efficiency. The beneficial effects of this data recording module are reflected in multiple aspects. First, by dynamically adjusting the storage strategy, the system can ensure that the stored data can meet the analysis requirements without affecting the calculation accuracy due to insufficient or excessive data volume, thus improving the reliability of electron beam irradiation control. Second, when the data volume is small, increasing the sampling rate can enhance data integrity, enabling the system to obtain more detailed electron beam adjustment parameters and improve the adjustment accuracy. When the data volume is too large, by optimizing the data compression algorithm, it can effectively reduce storage occupancy, improve storage space utilization, and avoid the impact of redundant data on system operation efficiency. In addition, combined with the adaptive data management strategy, the system can automatically adjust the storage method according to different electron beam irradiation requirements, enhancing the flexibility and intelligence of data processing and improving the feasibility of long-term data storage and analysis.

[0053] The data acquisition module obtains the real-time position and intensity information of the electron beam during irradiation. The calculation formula for the currently measured electron beam signal intensity b is: b = P / S;

[0054] Among them, b represents the currently measured electron beam signal intensity, P represents the total power of the electron beam received by the detector, and S represents the effective detection area of the detector.

[0055] The working principle of the data acquisition module is based on the power density calculation method to ensure the accuracy and real-time nature of the measurement of the electron beam signal intensity. The system uses high-precision detectors (such as photodetectors, Hall detectors, or X-ray detectors) to receive the energy of the electron beam irradiation in real time and calculates the total power P of the electron beam received by the detector. At the same time, the system obtains the effective detection area S through the calibration data of the detector and calculates the signal intensity b per unit area of the electron beam using the formula b = P / S. This method can provide accurate measurement of the electron beam signal intensity and ensure that the measurement results are not affected by changes in the detector size. In addition, the system can incorporate temperature compensation and background noise correction algorithms to improve the measurement accuracy and make the signal intensity data more stable and reliable. The beneficial effects of this module are reflected in multiple aspects. First, through the calculation method based on the received power of the detector and the detection area, the signal intensity of the electron beam can be accurately measured, ensuring that the data obtained by the system is true and reliable. Second, this method eliminates the measurement errors caused by different detector sizes, making the measurement results of different detectors more comparable. In addition, combined with the temperature compensation and noise correction functions, this module can reduce the influence of environmental factors on the measurement data, improve the measurement stability and repeatability, and thus enhance the reliability and control accuracy of the electron beam irradiation system.

[0056] The data acquisition module obtains the real-time position and intensity information of the electron beam during irradiation, and the theoretical maximum electron beam signal intensity The calculation formula is: = / S;

[0057] Where represents the theoretical maximum electron beam signal intensity, represents the maximum output power of the electron beam source, and S represents the effective detection area of the detector.

[0058] The working principle of the data acquisition module is based on the electron beam power density calculation method to provide the maximum theoretical value of the electron beam signal intensity as a reference benchmark. First, the system measures the maximum output power of the electron beam source, which is usually measured by the set parameters of the electron accelerator or a power meter. Then, the system uses the known effective detection area S of the detector to calculate the theoretical maximum signal intensity . This calculation method provides a reference value for evaluating the difference between the actually measured signal intensity and the theoretical maximum value, thereby judging the energy loss or signal attenuation during the electron beam transmission process. In addition, the system can combine real-time monitoring data, and by comparing and the actually measured signal intensity b, analyze the attenuation characteristics of the electron beam during irradiation and optimize and adjust the parameters to ensure the accuracy and stability of the electron beam irradiation. The beneficial effects of this module are reflected in multiple aspects. First, calculating the theoretical maximum electron beam signal intensity A standardized measurement benchmark is provided, enabling the system to more accurately evaluate the changing trend of the electron beam signal, and further optimizing the irradiation control parameters. Secondly, by comparing the deviation between a and b, the attenuation during the electron beam energy transmission can be identified, improving the system's monitoring ability for signal loss. In addition, this calculation method is not affected by the detector size, making it applicable to different types of detection devices and improving the universality and measurement consistency of the system.

[0059] The current adjustment module automatically adjusts the currents of the focusing and deflection magnets according to the calculation results, so that the electron beam returns to the preset irradiation area. A time constant threshold is set. When the time constant a is lower than the set threshold, the buffer time for current adjustment is increased. When the time constant a is higher than the set threshold, the step amplitude of current adjustment is increased.

[0060] The working principle of this current adjustment module is based on the influence of the time constant a on the system response speed. The time constant a reflects the system's adaptability to current adjustment. The smaller its value, the faster the system adjustment speed, but it may cause the electron beam trajectory to oscillate; on the contrary, the larger the time constant, the smoother the system adjustment, but the response speed may be slower. Therefore, this module introduces a time constant threshold and dynamically adjusts the current adjustment strategy by monitoring the change of a in real time. When a is lower than the threshold, the system judges that the adjustment rate is too fast, which may lead to unstable trajectory, so the buffer time is increased to make the current adjustment more gradual and avoid trajectory oscillation. When a is higher than the threshold, it means that the system adjustment rate is slower. At this time, the system increases the step amplitude of current adjustment to speed up the correction process of the electron beam trajectory and improve the system response speed. In addition, this module combines a closed-loop control mechanism, monitors the electron beam trajectory deviation in real time, and dynamically adjusts the time constant a to optimize the current adjustment strategy and improve the system's adaptability and adjustment accuracy. The beneficial effects of this module are reflected in many aspects. First, by setting the time constant threshold and dynamically adjusting the current adjustment strategy, the system can achieve a balance between trajectory stability and adjustment speed, avoiding the electron beam oscillation problem caused by too fast adjustment rate, and at the same time ensuring that the adjustment rate will not be too slow to affect the irradiation accuracy. Secondly, this method improves the flexibility of electron beam trajectory correction by adaptively adjusting the buffer time and step amplitude, enabling the system to operate stably in different irradiation environments. In addition, this module combines closed-loop feedback control, enabling the current adjustment process to be optimized according to the electron beam deviation, improving the stability and accuracy of the electron beam trajectory, and thus enhancing the reliability and intelligence level of the system.

[0061] The deviation calculation module determines the required current adjustment amounts of the focusing and deflection magnets based on the deviation between the real-time position and the preset ideal position, including obtaining the current position coordinates of the electron beam , determining the preset ideal position coordinates , the offset distance is calculated based on the following formula:

[0062] d = .

[0063] The working principle of this deviation calculation module is based on the Euclidean distance calculation method, which is used to monitor the offset of the electron beam trajectory in real time and provide accurate offset data for the current adjustment module. First, the system obtains the actual coordinates of the electron beam in the irradiation area in real time through high-precision position detectors (such as CCD cameras, Hall sensors or X-ray detectors). . Subsequently, the system compares this coordinate with the preset ideal trajectory coordinate and calculates the offset d using the Euclidean distance formula. The calculation result is used to determine whether the electron beam exceeds the preset range, and the current of the focusing and deflection magnets is adjusted according to the magnitude of the offset to bring the electron beam back into the ideal trajectory. In addition, the system can analyze the offset trend by combining historical offset data to optimize the electron beam adjustment strategy and improve the irradiation accuracy. The beneficial effects of this module are reflected in many aspects. First, by accurately calculating the offset distance d of the electron beam, the stability of the electron beam trajectory can be monitored in real time, and a precise correction basis can be provided for current adjustment, improving the accuracy of electron beam control. Second, by using the Euclidean distance calculation method, the mathematical rigor of the calculation process can be ensured, enabling the system to quickly and accurately judge the offset of the electron beam. In addition, this method can be applied to different electron beam trajectory adjustment requirements, improving the versatility of the system, and further optimizing the electron beam trajectory adjustment strategy by combining with historical data, improving the irradiation uniformity and stability.

[0064] The data acquisition module includes a signal filtering unit that uses the Kalman filtering algorithm or the low-pass filtering algorithm to remove noise from the measured electron beam signal intensity. The working principle of this signal filtering unit is based on signal processing and data optimization methods to reduce noise interference during the measurement of the electron beam signal intensity. The electron beam signal may be affected by factors such as external electromagnetic interference, equipment vibration, and environmental temperature fluctuations during the detector reception process, resulting in random fluctuations or short-term anomalies in the measurement data. The signal filtering unit improves data reliability by smoothing the original measurement signal and extracting the effective signal components. The Kalman filtering algorithm is a recursive optimization method that can dynamically adjust based on the current measurement value and the predicted value, thus reducing noise while retaining the fast-changing characteristics of the signal, and is suitable for electron beam monitoring systems with high real-time requirements. The low-pass filtering algorithm removes short-term violently fluctuating data by restricting high-frequency signal components, making the signal smoother, and is suitable for eliminating the influence of high-frequency noise. The system can select the optimal filtering algorithm according to different electron beam application requirements to improve the flexibility and adaptability of signal processing. In addition, the system can combine adaptive filtering technology to dynamically adjust the filtering parameters to adapt to different working conditions and electron beam characteristics. The beneficial effects of this signal filtering unit are reflected in many aspects. First, through the noise removal technology, it can significantly improve the accuracy of the electron beam signal measurement, reduce the random error in the measurement data, and make the electron beam intensity monitoring more stable and reliable. Second, the use of the Kalman filtering algorithm can achieve real-time signal optimization and still provide high-precision measurement results in a dynamic environment, while the low-pass filtering algorithm can effectively eliminate high-frequency noise and improve the smoothness of the signal, making the subsequent electron beam trajectory adjustment and deviation calculation more accurate. In addition, the signal filtering unit can reduce the system's dependence on high-precision hardware, enabling ordinary detection equipment to also obtain high measurement accuracy, thereby reducing the system cost and improving the applicability of the system.

[0065] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A real-time monitoring and recording system during the electron beam irradiation process, characterized in that, The system includes: A data acquisition module for acquiring real-time position and intensity information of the electron beam during irradiation; A deviation calculation module connected to the data acquisition module for determining the required adjustment amounts of the focusing and deflection magnet currents based on the deviation between the real-time position and the preset ideal position, including calculating the growth rate of the electron beam offset based on the measured change in the electron beam position, determining whether the offset is in a stable state to ensure the adjustment efficiency and prevent overcorrection. The specific formula for calculating the growth rate of the electron beam offset is: r＝ ； Among them, represents the cumulative amount of electron beam offset, represents the initial electron beam offset, t represents time, and r represents the growth rate of the electron beam offset; A current adjustment module connected to the deviation calculation module for automatically adjusting the currents of the focusing and deflection magnets according to the calculation results to return the electron beam to the preset irradiation area, including constructing a response model in which the magnet current changes gradually over time to simulate the adaptability of the electron beam to the new current setting, avoiding oscillations caused by sudden current changes, and adjusting the data transmitted to the magnet system to precisely control the electron beam trajectory; A data recording module connected to the data acquisition module and the current adjustment module for recording the parameters of each adjustment and the corresponding irradiation position data for subsequent analysis, including during the data recording process, real-time monitoring whether the stored data volume meets the system's requirements for the adjustment parameters. When the real-time monitored stored data volume is less than the system's requirements for the adjustment parameters, adjusting the storage strategy to increase the data sampling rate. When the real-time monitored stored data volume is greater than the system's requirements for the adjustment parameters, optimizing the data compression algorithm to reduce the storage occupancy.

2. The real-time monitoring and recording system during the electron beam irradiation process according to claim 1, wherein: The data acquisition module acquires the real-time position and intensity information of the electron beam during irradiation, including measuring the real-time signal intensity of the electron beam and calculating the electron beam signal quality. The specific formula is: A = ; Among them, A represents the electron beam signal quality, and b represents the currently measured electron beam signal intensity, represents the theoretical maximum electron beam signal intensity; Adjust the data acquisition parameters to optimize the data acquisition effect and transmit the optimized data to the deviation calculation module.

3. The real-time monitoring and recording system during the electron beam irradiation process according to claim 1, wherein: According to the calculation results, the current adjustment module automatically adjusts the currents of the focusing and deflection magnets to return the electron beam to the preset irradiation area. The specific formula for simulating the adaptability of the electron beam to the new current setting is: ; Where C(t) represents the degree to which the electron beam current adjustment gradually approaches the target current value, t represents time, e represents the base of the natural logarithm, and a represents the time constant.

4. The real-time monitoring and recording system during the electron beam irradiation process according to claim 1, characterized in that: Based on the deviation between the real-time position and the preset ideal position, the deviation calculation module determining the required adjustment amounts of the focusing and deflection magnet currents further includes calculating the growth rate of the electron beam offset based on the measured change in the electron beam position, determining whether the offset is in a stable state, setting an offset growth threshold. When the offset growth exceeds this threshold, reducing the control parameter value for adjusting the magnet current according to the degree of offset growth to reduce the risk of electron beam oscillation caused by adjustment. When the offset tends to be stable, restoring the default control parameters to ensure the adjustment efficiency and prevent overcorrection.

5. The real-time monitoring and recording system during the electron beam irradiation process according to claim 2, characterized in that: The formula for calculating the current measured electron beam signal intensity b in the real-time position and intensity information of the electron beam during irradiation acquired by the data acquisition module is: b = P / S; Where b represents the currently measured electron beam signal intensity, P represents the total power of the electron beam received by the detector, and S represents the effective detection area of the detector.

6. The real-time monitoring and recording system during the electron beam irradiation process according to claim 2, characterized in that: The data acquisition module acquires the real-time position and intensity information of the electron beam during irradiation, and the theoretical maximum electron beam signal intensity The calculation formula is as follows: = / S; Among them, represents the theoretical maximum electron beam signal intensity, represents the maximum output power of the electron beam source, and S represents the effective detection area of the detector.

7. The real-time monitoring and recording system during the electron beam irradiation process according to claim 3, characterized in that: When the current adjustment module automatically adjusts the currents of the focusing and deflection magnets according to the calculation results to return the electron beam to the preset irradiation area, set a time constant threshold. When the time constant a is lower than the set threshold, increase the buffer time for current adjustment. When the time constant a is higher than the set threshold, increase the step amplitude of current adjustment.

8. The real-time monitoring and recording system during the electron beam irradiation process according to claim 1, wherein: The deviation calculation module determines the required adjustment amounts of the focusing and deflection magnet currents based on the deviation between the real-time position and the preset ideal position, including obtaining the current position coordinates of the electron beam , determining the preset ideal position coordinates , calculating the offset distance based on the following formula: d＝ 。 9. The real-time monitoring and recording system during the electron beam irradiation process according to claim 2, characterized in that: The data acquisition module includes a signal filtering unit that uses the Kalman filtering algorithm or the low-pass filtering algorithm to remove noise from the measured electron beam signal intensity.

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