Multi-axis microscanner system and method and apparatus for controlling driver thereof

By controlling the driving frequency of the multi-axis microscanner system, so that it reacts to the change of frequency ratio with time, the image interference problem caused by the change of frequency ratio in the biaxis microscanner system is solved, and stable high-image quality projection is achieved.

CN120019316APending Publication Date: 2025-05-16OQMENTED GMBH
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Patent Information

Application Number
CN202380071611.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2022-08-08
Filing Date
2023-07-26
Publication Date
2025-05-16

AI Technical Summary

Technical Problem

In multi-axis microscanner systems, especially in biaxis microscanner systems, a slight change in the ratio of the two oscillation frequencies can lead to interference in the projected image, such as flickering or poor coverage, resulting in image notch.

Method used

By controlling the driving device of the microscanner system, the driving frequency changes with time and simultaneously reacts to the change in the frequency ratio between the two driving frequencies, and the frequency ratio is maintained.

Benefits of technology

A high image quality that maintains uniform, flicker-free and stable over a long period of time is achieved, i.e. projection of high image quality.

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Abstract

A method for controlling a driver of a multi-axis, in particular dual-axis, microscanner system. In the frame of the method, a drive device of the micro-scanner system is controlled in such a way that the micro-scanner system drives a first rotational oscillation of a deflection element of the micro-scanner system about a first oscillation axis by means of an excitation having a first drive frequency, and simultaneously with the first oscillation, a second rotational oscillation of the deflection element of the microscanner system about a second oscillation axis, which is non-parallel, in particular orthogonal, to the first oscillation axis, is driven by means of an excitation having a second drive frequency, wherein the drive frequencies each vary over time. The change of the drive frequencies over time simultaneously counteracts a change in the frequency ratio between the two drive frequencies. That is, when the drive frequency itself varies, the variation of the frequency ratio is counteracted.
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Citation Information

Patent Citations

  • Glass substrate-based MEMS mirror device and method for its fabrication

    DE102020116511A1

  • Deflection system for a projection device, projection device for projecting an image and method for actuating a deflection system for a projection device

    EP2514211B1