High-frequency inductance evaluation device and inductance evaluation method

Abstract

The invention relates to the field of electronic component testing, in particular to a high-frequency inductance evaluation device and an inductance evaluation method. By setting the minimum test circuit for the high-frequency inductor to be tested and evaluating the obtained S parameter of the minimum test circuit at the high frequency band through the vector network analyzer, the high-frequency inductor meeting the requirement of a radio frequency link can be obtained, the capability of rapidly screening and evaluating the high-frequency inductor is realized, and the accuracy of screening and evaluating the high-frequency inductor is improved. According to the to-be-tested high-frequency inductor evaluation device, batch testing of products depending on a production line in real work is avoided, the performance of the high-frequency inductor is indirectly judged through the performance indexes and the first pass yield of the products, the performance of the inductor under the high-frequency condition can be rapidly and accurately evaluated, and the testing flexibility and applicability are improved.

Description

Technical Field

[0001] The present invention relates to the field of electronic component testing, and in particular to a high-frequency inductance evaluation device and an inductance evaluation method. Background Art

[0002] High-frequency inductors are key components in radio frequency electronic circuits and are widely used in key links such as front-end and back-end matching and antenna tuning of radio frequency links. In the field of IoT communications, these inductors usually operate in the frequency range of 2GHz to 6GHz, and their inductance is usually at the nanohenry (nH) level, which is crucial to ensure the stability and efficiency of communication links.

[0003] In the design and production of communication modules, the measurement of the inductance of high-frequency inductors is a crucial step. Traditional inductance measurement uses an LCR meter, which can provide accurate measurement results in the low frequency band (<500MHz), but cannot meet the performance evaluation requirements in the high frequency band (such as 2.4GHz~2.5GHz or 5GHz), and the price of purchasing an LCR meter is also very high. In addition, the high-frequency performance of the inductor is often affected by its own materials, structure, and external circuit environment, so that relying solely on the nominal value on the specification sheet cannot accurately reflect the performance of the high-frequency inductor in actual applications.

[0004] In real work, when there is a need to introduce inductors, it usually relies on batch testing of the production line, and indirectly judges the performance of high-frequency inductors through product performance indicators and First Pass Yield (FPY). This method is time-consuming and has little guiding value for R&D work. At the same time, the ability to quickly screen and evaluate a large number of inductor samples is also limited. Therefore, there is an urgent need for a fast, accurate and easy-to-operate high-frequency inductor evaluation device and inductor evaluation method to support inductor selection and quality control in RF module design and production. Summary of the invention

[0005] In order to solve the above technical problems, the present invention provides a high-frequency inductance evaluation device and an inductance evaluation method.

[0006] To achieve the above object, the present invention provides a high-frequency inductance evaluation device, comprising: Vector network analyzer, data acquisition module; The data acquisition module includes several pairs of SMA connectors, several minimum test circuits, and high-frequency inductance detection bits; each of the minimum test circuits is respectively connected to one end of each corresponding pair of SMA connectors, and the other end of the SMA connector is connected to the vector network analyzer; the high-frequency inductance detection bit is set in the minimum test circuit, and the high-frequency inductance detection bit is used to place the high-frequency inductance to be tested; the vector network analyzer obtains the S parameters of the minimum test circuit, and evaluates the performance of the high-frequency inductance to be tested based on the S parameters.

[0007] Optionally, the high-frequency inductor to be tested is a nanohenry-level high-frequency inductor, and the operating frequency range of the high-frequency inductor is 2 GHz to 6 GHz.

[0008] Optionally, the data acquisition module is routed using a microstrip line.

[0009] Optionally, it includes at least one pair of the SMA connectors and at least one minimum test circuit, wherein the minimum test circuit has only one high-frequency inductance detection position, wherein the minimum test circuit includes one or more of an L-type circuit, a T-type circuit, and a π-type circuit.

[0010] Optionally, when one of the minimum test circuits is an L-type circuit, the minimum test circuit includes a first high-frequency inductance detection position and a first capacitor, and a first high-frequency inductance to be tested is placed in the first high-frequency inductance detection position; one end of the first high-frequency inductance to be tested is connected to one of a pair of SMA connectors corresponding to the minimum test circuit, and the other end of the first high-frequency inductance to be tested is connected to one end of the first capacitor and the other of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the first capacitor is grounded; Or the minimum test circuit includes a second high-frequency inductance detection position and a second capacitor, and the second high-frequency inductance detection position is placed with a second high-frequency inductance to be tested; one end of the second capacitor is connected to one of a pair of SMA connectors corresponding to the minimum test circuit, the other end of the second capacitor is connected to one end of the second high-frequency inductance to be tested and the other of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the second capacitor is grounded.

[0011] Optionally, when one of the minimum test circuits is a π-type circuit, the minimum test circuit includes a third high-frequency inductor inductance detection position, a third capacitor, and a fourth capacitor, and the third high-frequency inductor detection position is provided with a third high-frequency inductor to be tested; One end of the third capacitor is connected to one end of the third high-frequency inductor to be tested and one of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the third capacitor is grounded. One end of the fourth capacitor is connected to the other end of the third high-frequency inductor to be tested and the other of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the fourth capacitor is grounded.

[0012] Optionally, when one of the minimum test circuits is a T-type circuit, the minimum test circuit includes a fourth high-frequency inductance detection position, a fifth capacitor, and a sixth capacitor, and the fourth high-frequency inductance detection position is placed with a fourth high-frequency inductance to be tested; one end of the fourth high-frequency inductance to be tested is connected to one end of the fifth capacitor and one end of the sixth capacitor, the other end of the fourth high-frequency inductance to be tested is grounded, the other end of the fifth capacitor is connected to one of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the sixth capacitor is connected to the other of the pair of SMA connectors corresponding to the minimum test circuit.

[0013] The present invention also provides an inductance evaluation method using the high-frequency inductance evaluation device as described above, comprising: A standard high-frequency inductor, a high-frequency inductor to be tested, and a high-frequency inductor evaluation device are provided. The vector network analyzer is connected to the SMA connector of the data acquisition module via a radio frequency line. The standard high-frequency inductor and the high-frequency inductor to be tested are sequentially placed in the same high-frequency inductor detection position of the high-frequency inductor evaluation device and electrically connected to the high-frequency inductor evaluation device. The vector network analyzer tests and records the S parameters of the minimum test circuit corresponding to the standard high-frequency inductor and the high-frequency inductor to be tested at the target frequency respectively; Based on the standard high-frequency inductor and the S parameter of the minimum test circuit corresponding to the high-frequency inductor to be tested, it is evaluated and obtained whether the inductor to be tested is consistent with the standard high-frequency inductor.

[0014] Optionally, the target frequency is a plurality of different frequency bands, and the S parameter of the minimum test circuit is an S parameter value corresponding to the plurality of different frequency bands.

[0015] Optionally, when the quotient of the modulus of the difference between the impedance corresponding to the S parameter of the minimum test circuit corresponding to the high-frequency inductor to be tested and the impedance corresponding to the S parameter of the minimum test circuit corresponding to the standard high-frequency inductor and the modulus of the impedance corresponding to the standard high-frequency inductor is less than or equal to 25%, it is judged that the high-frequency inductor to be tested is consistent with the standard high-frequency inductor.

[0016] In summary, the advantages and beneficial effects of the present invention are: The present invention provides a high-frequency inductance evaluation device and an inductance evaluation method. A vector network analyzer and a data acquisition module; the data acquisition module includes a plurality of pairs of SMA connectors, a plurality of minimum test circuits, and a high-frequency inductance detection position; each of the minimum test circuits is respectively connected to one end of each corresponding pair of SMA connectors, and the other end of the SMA connector is connected to the vector network analyzer, the high-frequency inductance detection position is set in the minimum test circuit, and the high-frequency inductance detection position is used to place the high-frequency inductance to be tested; the vector network analyzer obtains the S parameters of the minimum test circuit, and evaluates the performance of the high-frequency inductance to be tested based on the S parameters.

[0017] By setting a minimum test circuit for the high-frequency inductor to be tested and evaluating the S parameters of the minimum test circuit in the high-frequency band through the vector network analyzer, a high-frequency inductor that meets the requirements of the radio frequency link can be obtained, thereby realizing the ability to quickly screen and evaluate high-frequency inductors, avoiding reliance on batch testing of products on the production line in actual work, and indirectly judging the performance of high-frequency inductors through product performance indicators and pass rate. The high-frequency inductor evaluation device to be tested can quickly and accurately evaluate the performance of the inductor under high-frequency conditions, thereby improving the flexibility and applicability of the test.

[0018] At the same time, the SMA (Subminiature Version A) connector and the designed microstrip line routing method are used to reduce the influence of parasitic capacitance, parasitic inductance, parasitic resistance, and radiation loss caused by parasitic effects, thereby ensuring the quality and performance of signal transmission and maximizing the measurement accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of a high-frequency inductance evaluation device according to an embodiment of the present invention; FIG2 is a schematic diagram of a minimum test circuit of a high-frequency inductance evaluation device according to an embodiment of the present invention; Figure 3 A schematic diagram of a high-frequency inductance evaluation device according to another embodiment of the present invention; Figure 4 The figure is a flow chart of a high-frequency inductance evaluation method according to an embodiment of the present invention. DETAILED DESCRIPTION

[0020] In order to facilitate understanding by those skilled in the art, the present invention will be further described in detail below with reference to specific embodiments.

[0021] The present invention provides a high-frequency inductance evaluation device, such as Figure 1 ~As shown in Figure 2, including: Vector network analyzer 10, data acquisition module 20; The data acquisition module includes several pairs of SMA connectors 201, several minimum test circuits, and high-frequency inductance detection bits; each of the minimum test circuits is respectively connected to one end of each corresponding pair of SMA connectors, and the other end of the SMA connector 201 is connected to the vector network analyzer 10, and the high-frequency inductance detection bit is set in the minimum test circuit, and the high-frequency inductance detection bit is used to place the high-frequency inductance to be tested; the vector network analyzer 10 obtains the S parameters of the minimum test circuit, and evaluates the performance of the high-frequency inductance to be tested based on the S parameters, wherein the minimum test circuit includes an L-type circuit 2021, a T-type circuit 2022, and a π-type circuit 2023.

[0022] Specifically, in an embodiment of the present invention, the high-frequency inductor to be tested is placed in a high-frequency inductor detection position of one of the minimum test circuits, the minimum test circuit where the high-frequency inductor to be tested is located is tested using the vector network analyzer, the S parameters of the minimum test circuit are obtained, and the performance of the high-frequency inductor to be tested is evaluated based on the S parameters.

[0023] In an embodiment of the present invention, the high-frequency inductor to be tested is a high-frequency inductor of the nanohenry (nH) level, and the operating frequency range of the high-frequency inductor is 2 GHz to 6 GHz.

[0024] In an embodiment of the present invention, the data acquisition module 20 is routed in a microstrip line manner and impedance matching is performed according to the requirements of the RF segment test, wherein the conductor strip in the microstrip line is provided with a characteristic impedance of 50 ohms to reduce reflection loss and ensure signal integrity.

[0025] In the embodiment of the present invention, the data acquisition module uses a microstrip line whose conductor strip has a line width ranging from 1.5 mm to 3.0 mm, and a spacing between the conductor strip and the ground plane ranging from 0.8 mm to 2.0 mm.

[0026] By designing the line width of the conductor strip and the spacing between the conductor strip and the ground plane, the influence of parasitic capacitance, parasitic inductance, parasitic resistance and radiation loss caused by parasitic effects can be reduced, thereby ensuring the quality and performance of signal transmission and maximizing the measurement accuracy.

[0027] In the embodiment of the present invention, the SMA connectors 201 are arranged in pairs and are connected to the vector network analyzer 10 via a radio frequency coaxial cable of appropriate length and specification.

[0028] In the embodiment of the present invention, a pair of the SMA connectors 201 corresponds to a minimum test circuit for detecting the high-frequency inductor 30 to be tested.

[0029] In an embodiment of the present invention, the SMA connector 201 is at least a pair, the minimum test circuit is at least one, and the minimum test circuit has only one high-frequency inductance detection position, wherein the minimum test circuit includes one or more of an L-type circuit, a T-type circuit, and a π-type circuit.

[0030] An L-type circuit, a π-type circuit or a T-type circuit is used as the minimum test circuit, and the high-frequency inductor to be tested is set on the smallest circuit unit. The S parameters of the minimum test circuit in the high frequency band obtained by evaluating the vector network analyzer 10 can be used to obtain a high-frequency inductor that meets the requirements of the radio frequency link, thereby realizing the ability to quickly screen and evaluate high-frequency inductors, avoiding reliance on batch testing of products on the production line in actual work, and indirectly judging the performance of the high-frequency inductor through the product performance indicators and pass rate.

[0031] In the embodiment of the present invention, the S parameters include transmission coefficient S21 and reflection coefficient S11 characteristics.

[0032] In the embodiment of the present invention, Figure 2a~2b As shown, when one of the minimum test circuits is an L-type circuit, the minimum test circuit includes a first high-frequency inductance detection position and a first capacitor C1, and the first high-frequency inductance detection position is provided with a first high-frequency inductance L1 to be tested; one end port1 of the first high-frequency inductance L1 to be tested is connected to one of a pair of SMA connectors corresponding to the minimum test circuit, and the other end of the first high-frequency inductance L1 to be tested is connected to one end port2 of the first capacitor C1 and the other of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the first capacitor C1 is grounded; Or the minimum test circuit includes a second high-frequency inductance detection position and a second capacitor C2, and the second high-frequency inductance detection position is placed with a second high-frequency inductance L2 to be tested; one end port3 of the second capacitor C2 is connected to one of a pair of SMA connectors corresponding to the minimum test circuit, and the other end port4 of the second capacitor C2 is connected to one end of the second high-frequency inductance L2 to be tested and the other of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the second high-frequency inductance L2 to be tested is grounded.

[0033] In the embodiment of the present invention, Figure 2cAs shown, when one of the minimum test circuits is a π-type circuit, the minimum test circuit includes a third high-frequency inductor inductance detection position, a third capacitor C3, and a fourth capacitor C4, and the third high-frequency inductor detection position is placed with a third high-frequency inductor L3 to be tested; one end Port5 of the third capacitor C3 is connected to one end of the third high-frequency inductor L3 to be tested and one of a pair of SMA connectors corresponding to the minimum test circuit, and the other end of the third capacitor C3 is grounded, one end of the fourth capacitor C4 is connected to the other end Port6 of the third high-frequency inductor L3 to be tested and the other of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the fourth capacitor C4 is grounded.

[0034] In the embodiment of the present invention, Figure 2d As shown, when one of the minimum test circuits is a T-type circuit, the minimum test circuit includes a fourth high-frequency inductance detection position, a fifth capacitor C5, and a sixth capacitor C6, and the fourth high-frequency inductance detection position is provided with a fourth high-frequency inductance L4 to be tested; one end of the fourth high-frequency inductance L4 to be tested is connected to one end of the fifth capacitor C5 and one end of the sixth capacitor C6, the other end of the fourth high-frequency inductance L4 to be tested is grounded, the other end Port7 of the fifth capacitor C5 is connected to one of the pair of SMA connectors corresponding to the minimum test circuit, and the other end Port8 of the sixth capacitor C6 is connected to the other of the pair of SMA connectors corresponding to the minimum test circuit.

[0035] In the embodiment of the present invention, Figure 3 As shown, the high-frequency inductance evaluation device also includes a computer, and the computer is connected to the vector network analyzer.

[0036] The high-frequency inductor evaluation device provided by the present invention is capable of quickly screening and evaluating high-frequency inductors, avoiding reliance on batch testing of products on the production line in actual work, and indirectly judging the performance of high-frequency inductors through product performance indicators and pass rate. The high-frequency inductor evaluation device to be tested can quickly and accurately evaluate the performance of inductors under high-frequency conditions, thereby improving the flexibility and applicability of the test.

[0037] At the same time, the SMA (Subminiature Version A) connector and the designed microstrip line routing method are used to reduce the influence of parasitic capacitance, parasitic inductance, parasitic resistance, and radiation loss caused by parasitic effects, thereby ensuring the quality and performance of signal transmission and maximizing the measurement accuracy.

[0038] The present invention also provides an inductance evaluation method using the high-frequency inductance evaluation device as described above, comprising: Step S10, providing a standard high-frequency inductor, a high-frequency inductor to be tested, and a high-frequency inductor evaluation device, the vector network analyzer is connected to the SMA connector of the data acquisition module through a radio frequency line, the standard high-frequency inductor and the high-frequency inductor to be tested are sequentially placed in the same high-frequency inductor detection position of the high-frequency inductor evaluation device and electrically connected to the high-frequency inductor evaluation device; Step S20, the vector network analyzer tests and records the S parameters of the minimum test circuit corresponding to the standard high-frequency inductor and the high-frequency inductor to be tested at the target frequency respectively; Step S30, based on the standard high-frequency inductor and the S parameter of the minimum test circuit corresponding to the high-frequency inductor to be tested, evaluating and obtaining whether the inductor to be tested is consistent with the standard high-frequency inductor.

[0039] Specifically, step S10 is performed to provide a standard high-frequency inductor, a high-frequency inductor to be tested, and a high-frequency inductor evaluation device. The vector network analyzer is connected to the SMA connector of the data acquisition module via a radio frequency line. The standard high-frequency inductor and the high-frequency inductor to be tested are sequentially placed in the same high-frequency inductance detection position of the high-frequency inductor evaluation device and electrically connected to the high-frequency inductor evaluation device.

[0040] In the embodiment of the present invention, the standard high-frequency inductor is the main material and the high-frequency inductor to be tested is the substitute material. The inductance evaluation method is used to evaluate whether the substitute material is consistent with the main material. If they are consistent, the substitute material can be used as a substitute product of the main material for actual production use.

[0041] In the embodiment of the present invention, the standard high-frequency inductor and the high-frequency inductor to be tested are both nanohenry-level high-frequency inductors, and the operating frequency range of the high-frequency inductor is 2 GHz to 6 GHz.

[0042] Step S20 is executed, the vector network analyzer respectively tests and records the S parameters of the minimum test circuit corresponding to the standard high-frequency inductor and the high-frequency inductor to be tested at the target frequency.

[0043] In the embodiment of the present invention, the target frequency is a plurality of different frequency bands, and the S parameter of the minimum test circuit is the S parameter value corresponding to the plurality of different frequency bands.

[0044] In an embodiment of the present invention, the target frequency range is 2 GHz to 6 GHz, specifically, including 2.4 GHz, 5 GHz, 6 GHz, millimeter wave frequency bands or other suitable frequency bands.

[0045] In the embodiment of the present invention, the S parameters of the high-frequency inductor to be measured include characteristics of a forward transmission coefficient S21 and an input reflection coefficient S11.

[0046] Step S30 is executed to evaluate and obtain whether the inductor to be tested is consistent with the standard high-frequency inductor based on the S parameter of the minimum test circuit corresponding to the standard high-frequency inductor and the high-frequency inductor to be tested.

[0047] In an embodiment of the present invention, when the modulus of the difference between the impedance corresponding to the S parameter of the minimum test circuit corresponding to the high-frequency inductor to be tested and the impedance corresponding to the S parameter of the minimum test circuit corresponding to the standard high-frequency inductor / the modulus of the impedance corresponding to the standard high-frequency inductor is less than or equal to 25%, it is judged that the high-frequency inductor to be tested is consistent with the standard high-frequency inductor.

[0048] Specifically, as shown in Table 1, the S11 value test data of the MJT B series 2.7nH is shown, as shown in Table 2, the S11 value test data of the MJT T series 2.7nH is shown, and as shown in Table 3, the S11 value test data of the Murata TN series 2.7nH is shown. It can be seen from the data in the table that the inductance value of the Murata TN series is basically close to that of the MJT B series, and the two can be used as substitutes for each other.

[0049] Table 1

[0050] Table 2

[0051] Table 3

[0052] Taking 2.412GHz as an example, the B series of MJT is a standard high-frequency inductor, and the impedance value of the B series is 1.282-12.35*j. The TN series of Murata is a standard high-frequency inductor to be tested, and the impedance value of the TN series of Murata is 1.393-15.37*j. The difference between the two obtained by modulo operation is 0.111-3.02*j, and the modulus of the difference between the two is 3.02. Wherein, the formula of the modulo operation is: , specifically: (0.111*0.111+3.02*3.02)^0.5=3.02; Since the impedance value of the Maxgate B series is 1.282-12.35*j, the modulus of the impedance value is: (1.282*1.282+12.35*12.35)^0.5=12.416. When the modulus of the difference between the two and the quotient of the standard high-frequency inductor (3.02 / 12.416=24.32%) is less than or equal to 25%, it is determined that the standard high-frequency inductor to be tested is consistent with the standard inductor to be tested and can be used as a substitute for the standard inductor to be tested.

[0053] Through the evaluation method of the present invention, the S parameters of the same minimum test circuit corresponding to the standard high-frequency inductor and the high-frequency inductor to be tested are respectively obtained. Based on the corresponding S parameters obtained, it is quickly evaluated whether the standard high-frequency inductor is consistent with the high-frequency inductor to be tested. If they are consistent, the standard high-frequency inductor can be used as a replacement product for the standard high-frequency inductor, thereby achieving the purpose of quickly finding products that can be replaced with each other, saving time and resource investment in the introduction and verification of alternative materials, avoiding reliance on batch testing of products on the production line in actual work, and indirectly judging the performance of the high-frequency inductor through the product performance indicators and pass rate. The method can quickly and accurately evaluate the performance of the inductor under high-frequency conditions, and improves the flexibility and applicability of the test.

[0054] Finally, it is to be noted that any modification or equivalent replacement of part or all of the technical features based on the device structure of the present invention and the technical solution of the described embodiment, which does not deviate from the essence of the corresponding technical solution of the present invention, belongs to the patent scope of the device structure of the present invention and the described implementation scheme.

Claims

1. A high-frequency inductance evaluation device, characterized in that: include: Vector network analyzer, data acquisition module; The data acquisition module includes several pairs of SMA connectors, several minimum test circuits, and high-frequency inductance detection bits; each of the minimum test circuits is respectively connected to one end of each corresponding pair of SMA connectors, and the other end of the SMA connector is connected to the vector network analyzer; the high-frequency inductance detection bit is set in the minimum test circuit, and the high-frequency inductance detection bit is used to place the high-frequency inductance to be tested; the vector network analyzer obtains the S parameters of the minimum test circuit, and evaluates the performance of the high-frequency inductance to be tested based on the S parameters.

2. A high-frequency inductance evaluation device as claimed in claim 1, characterized in that: The high-frequency inductor to be tested is a nanohenry-level high-frequency inductor, and the operating frequency range of the high-frequency inductor is 2 GHz to 6 GHz.

3. A high-frequency inductance evaluation device as claimed in claim 1, characterized in that: The data acquisition module is routed in a microstrip line manner.

4. A high-frequency inductance evaluation device as claimed in claim 1, characterized in that: It includes at least one pair of the SMA connectors and at least one minimum test circuit, wherein the minimum test circuit has only one high-frequency inductance detection position, wherein the minimum test circuit includes one or more of an L-type circuit, a T-type circuit, and a π-type circuit.

5. A high-frequency inductance evaluation device as claimed in claim 4, characterized in that: When one of the minimum test circuits is an L-type circuit, the minimum test circuit includes a first high-frequency inductance detection position and a first capacitor, and a first high-frequency inductance to be tested is placed in the first high-frequency inductance detection position; one end of the first high-frequency inductance to be tested is connected to one of a pair of SMA connectors corresponding to the minimum test circuit, and the other end of the first high-frequency inductance to be tested is connected to one end of the first capacitor and the other of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the first capacitor is grounded; Alternatively, the minimum test circuit includes a second high-frequency inductance detection position and a second capacitor, and the second high-frequency inductance detection position is provided with a second high-frequency inductance to be tested; one end of the second capacitor is connected to one of a pair of SMA connectors corresponding to the minimum test circuit, and the other end of the second capacitor is connected to one end of the second high-frequency inductance to be tested and the other of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the second capacitor is grounded.

6. A high-frequency inductance evaluation device as claimed in claim 4, characterized in that: When one of the minimum test circuits is a π-type circuit, the minimum test circuit includes a third high-frequency inductor inductance detection position, a third capacitor, and a fourth capacitor, and the third high-frequency inductor to be tested is placed in the third high-frequency inductor detection position; One end of the third capacitor is connected to one end of the third high-frequency inductor to be tested and one of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the third capacitor is grounded. One end of the fourth capacitor is connected to the other end of the third high-frequency inductor to be tested and the other of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the fourth capacitor is grounded.

7. A high-frequency inductance evaluation device as claimed in claim 4, characterized in that: When one of the minimum test circuits is a T-type circuit, the minimum test circuit includes a fourth high-frequency inductance detection position, a fifth capacitor, and a sixth capacitor, and the fourth high-frequency inductance detection position is placed with a fourth high-frequency inductance to be tested; one end of the fourth high-frequency inductance to be tested is connected to one end of the fifth capacitor and one end of the sixth capacitor, the other end of the fourth high-frequency inductance to be tested is grounded, the other end of the fifth capacitor is connected to one of the pair of SMA connectors corresponding to the minimum test circuit, and the other end of the sixth capacitor is connected to the other of the pair of SMA connectors corresponding to the minimum test circuit.

8. An inductance evaluation method using the high-frequency inductance evaluation device according to any one of claims 1 to 7, characterized in that: include: A standard high-frequency inductor, a high-frequency inductor to be tested, and a high-frequency inductor evaluation device are provided. The vector network analyzer is connected to the SMA connector of the data acquisition module via a radio frequency line. The standard high-frequency inductor and the high-frequency inductor to be tested are sequentially placed in the same high-frequency inductor detection position of the high-frequency inductor evaluation device and electrically connected to the high-frequency inductor evaluation device. The vector network analyzer tests and records the S parameters of the minimum test circuit corresponding to the standard high-frequency inductor and the high-frequency inductor to be tested at the target frequency respectively; Based on the standard high-frequency inductor and the S parameter of the minimum test circuit corresponding to the high-frequency inductor to be tested, it is evaluated and obtained whether the inductor to be tested is consistent with the standard high-frequency inductor.

9. A method for evaluating a high-frequency inductor to be tested according to claim 8, characterized in that: The target frequencies are multiple different frequency bands, and the S parameters of the minimum test circuit are S parameter values ​​corresponding to the multiple different frequency bands.

10. The method for evaluating a high-frequency inductor to be tested according to claim 9, characterized in that: When the quotient of the modulus of the difference between the impedance corresponding to the S parameter of the minimum test circuit corresponding to the high-frequency inductor to be tested and the impedance corresponding to the S parameter of the minimum test circuit corresponding to the standard high-frequency inductor and the modulus of the impedance corresponding to the standard high-frequency inductor is less than or equal to 25%, it is judged that the high-frequency inductor to be tested is consistent with the standard high-frequency inductor.

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