Micro LED detection equipment and detection method

Abstract

The embodiment of the invention discloses detection equipment and a detection method for a micro LED (Light Emitting Diode). The micro LED detection equipment comprises a first polar plate, a second polar plate, a third polar plate and a fourth polar plate, wherein the first polar plate is used for bearing a micro LED; the second pole plate is opposite to the first pole plate, the alternating current power supply is connected with the first pole plate and the second pole plate, and the alternating current power supply is used for transmitting alternating current signals to the first pole plate and the second pole plate; the excitation light source is arranged on one side, away from the second polar plate, of the first polar plate; the excitation light source and / or the alternating current power supply are / is used for enabling the micro LED to emit light; the detection module is arranged on the side, away from the first pole plate, of the second pole plate, and the detection module is used for detecting the luminous intensity, chromaticity or spectrum of the micro LED. According to the technical scheme provided by the embodiment of the invention, the problems that a micro LED detection technology is low in detection precision and a film layer where a fault of the micro LED is located cannot be determined are solved.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of detection technology, and in particular, to a detection device and a detection method for micro LEDs. Background Art

[0002] With the development of display technology, people have higher and higher requirements for display screens. The micro LED display technology is a new display technology composed of LEDs with a size less than 100um arranged together. A display screen is composed of dozens or even millions of micro LED chips. The number of dark spots on the screen is usually required to be less than 8, which requires a transfer yield of micro LEDs to be above 99.9999%. Therefore, the detection technology for micro LEDs after transfer is crucial.

[0003] The existing detection technology for micro LED display panels has the problems of low detection accuracy and inability to determine the film layer where the micro LED fails. Summary of the Invention

[0004] Embodiments of the present invention provide a detection device and a detection method for micro LEDs to solve the problems of low detection accuracy and inability to determine the film layer where the micro LED fails in the detection technology of micro LED display panels.

[0005] To solve the above technical problems, the present invention adopts the following technical solutions:

[0006] Embodiments of the present invention provide a detection device for micro LEDs, including:

[0007] A first electrode plate for carrying micro LEDs;

[0008] A second electrode plate facing the first electrode plate;

[0009] An AC power supply connected to the first electrode plate and the second electrode plate respectively, and the AC power supply is used to transmit an AC signal to the first electrode plate and the second electrode plate;

[0010] An excitation light source disposed on a side of the first electrode plate away from the second electrode plate;

[0011] The excitation light source and / or the AC power supply are used to make the micro LED emit light;

[0012] A detection module disposed on a side of the second electrode plate away from the first electrode plate, and the detection module is used to detect the luminous brightness and chromaticity of the micro LED.

[0013] Optionally, the first electrode plate and the second electrode plate are used to form an electric field according to an alternating current signal, and the electric field is used to excite the micro LEDs located on the first electrode plate to emit light electroluminously;

[0014] The excitation light source is used to excite the micro LEDs to emit light photoluminescently.

[0015] Optionally, the orthographic projection of the excitation light source on the first electrode plate and the orthographic projection of the detection module on the first electrode plate at least partially overlap;

[0016] Preferably, the orthographic projection of the detection module on the first electrode plate completely covers the orthographic projection of the excitation light source on the first electrode plate.

[0017] Optionally, the detection module is adjustable in a direction perpendicular to the first electrode plate, and the second electrode plate is fixedly arranged at one end of the detection module close to the first electrode plate;

[0018] Preferably, the excitation light source and the detection module move coaxially.

[0019] Optionally, when the excitation light source and the alternating current power supply work simultaneously, the detection module is used to detect the luminous brightness and chromaticity of the micro LEDs, and determine the micro LEDs with abnormal luminous intensity, chromaticity or spectrum. When the excitation light source and the alternating current power supply work simultaneously, the excitation light source can preferably make up for the insufficient driving ability of the electric field provided by the alternating current power supply for the micro LEDs, and improve the luminous brightness of the micro LEDs.

[0020] When the excitation light source works alone, the detection module is used to detect the fault state of the quantum wells of the micro LEDs with abnormal light emission;

[0021] When the alternating current power supply works alone, the detection module is used to detect the fault state of the epitaxial film layers of the micro LEDs with abnormal light emission.

[0022] Optionally, the alternating current signal includes a square wave, a sine wave or a triangular wave;

[0023] The detection module includes a photoelectric sensor, a area array camera, a line scan camera, a TDI camera, an imaging luminance chrominance meter, a spectral luminance chrominance meter or a hyperspectral camera;

[0024] The excitation light source includes a short-wave excitation light source.

[0025] According to another aspect of the present invention, the present embodiment provides a method for detecting a micro LED. The method for detecting the micro LED is performed by a detection device for the micro LED. The detection device for the micro LED includes: a first electrode plate, a second electrode plate, an excitation light source, an AC power supply, and a detection module. The second electrode plate faces the first electrode plate. The AC power supply is connected to the first electrode plate and the second electrode plate. The excitation light source is disposed on a side of the first electrode plate away from the second electrode plate. The detection module is disposed on a side of the second electrode plate away from the first electrode plate;

[0026] The method for detecting the micro LED includes:

[0027] Transfer the micro LED to the first electrode plate;

[0028] Cause the micro LED to emit light through the excitation light source and / or the AC power supply;

[0029] Detect the light emission intensity, chromaticity, or spectrum of the micro LED through the detection module.

[0030] Optionally, the causing the micro LED to emit light through the excitation light source and / or the AC power supply includes:

[0031] Excite the micro LED to emit light by photoluminescence through the excitation light source, and apply an AC signal to the first electrode plate and the second electrode plate through the AC power supply to form an electric field between the first electrode plate and the second electrode plate to drive the micro LED to emit light by electroluminescence;

[0032] The detecting the light emission intensity, chromaticity, or spectrum of the micro LED through the detection module includes:

[0033] Detect the light emission intensity, chromaticity, or spectrum of the micro LED through the detection module, and determine the micro LEDs with abnormal light emission intensity, chromaticity, or spectrum of the micro LED.

[0034] Optionally, after determining the micro LEDs with abnormal light emission intensity, chromaticity, or spectrum of the micro LED, it further includes:

[0035] Excite the micro LED to emit light by photoluminescence through the excitation light source;

[0036] When the excitation light source works alone, detect the fault state of the quantum well of the micro LED with abnormal light emission through the detection module.

[0037] Optionally, after detecting the fault state of the quantum well of the micro LED with abnormal light emission by the detection module, the following steps are further included:

[0038] Apply an alternating current signal between the first electrode plate and the second electrode plate through the alternating current power supply to form an electric field therebetween to drive the micro LED to emit electroluminescence.

[0039] When the alternating current power supply works alone, detect the fault state of the epitaxial film layer of the micro LED with abnormal light emission by the detection module.

[0040] The micro LED detection device provided by the embodiment of the present invention improves the detection accuracy of the micro LED chip and realizes the fault location of the micro LED by providing an excitation light source and / or an alternating current power supply to cause the micro LED to emit light and detecting the light intensity, chromaticity or spectrum of the micro LED by the detection module disposed on the side of the second electrode plate away from the first electrode plate. On the other hand, by non-contact detection of the micro LED, damage to the electrodes of the micro LED during detection is preferably avoided. Description of the Drawings

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description in the embodiments of the present invention. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained according to the content of the embodiments of the present invention and these drawings without creative efforts.

[0042] Figure 1 is a schematic structural diagram of a micro LED detection device provided by an embodiment of the present invention;

[0043] Figure 2 is a schematic structural diagram of another micro LED detection device provided by an embodiment of the present invention;

[0044] Figure 3 is a flowchart of a micro LED detection method provided by an embodiment of the present invention;

[0045] Figure 4 is a flowchart of another micro LED detection method provided by an embodiment of the present invention;

[0046] Figure 5 is a flowchart of yet another micro LED detection method provided by an embodiment of the present invention;

[0047] Figure 6It is a flowchart of another method for detecting micro LEDs provided by an embodiment of the present invention. Detailed implementation manners

[0048] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only for explaining the present invention, rather than limiting the present invention. Additionally, it should be noted that for the sake of description, only parts related to the present invention are shown in the accompanying drawings, rather than all the structures.

[0049] Based on the above technical problems, the following solutions are proposed in this embodiment:

[0050] Figure 1 It is a schematic structural diagram of a micro LED detection device provided by an embodiment of the present invention. Figure 2 It is a schematic structural diagram of another micro LED detection device provided by an embodiment of the present invention. Combining Figure 1 and Figure 2 , the micro LED detection device provided by an embodiment of the present invention includes: a first electrode plate 100, the first electrode plate 100 is used to carry the micro LED 1; a second electrode plate 200, the second electrode plate 200 is opposite to the first electrode plate 100, an AC power supply 500, the AC power supply 500 is respectively connected to the first electrode plate 100 and the second electrode plate 200, and the AC power supply 500 is used to transmit an AC signal to the first electrode plate 100 and the second electrode plate 200; an excitation light source 400, the excitation light source 400 is arranged on the side of the first electrode plate 100 away from the second electrode plate 200; the excitation light source 400 and / or the AC power supply 500 are used to make the micro LED 1 emit light; a detection module 300, the detection module 300 is arranged on the side of the second electrode plate 200 away from the first electrode plate 100, and the detection module 300 is used to detect the light intensity, chromaticity or spectrum of the micro LED 1.

[0051] Specifically, the micro LED 1 is transferred onto the first electrode plate 100. The micro LED 1 can be mounted face-up, face-down or vertically on the first electrode plate 100, which is not limited herein. The first electrode plate 100 and the second electrode plate 200 are opposite to each other. The size of the first electrode plate 100 and the size of the second electrode plate 200 can be equal or unequal. The size of the second electrode plate 200 can be smaller than the size of the first electrode plate 100, which is not limited in any way herein. The distance between the first electrode plate 100 and the second electrode plate 200 can be adjusted.

[0052] An alternating current signal can be applied to the first electrode plate 100 and the second electrode plate 200 through an alternating current power supply 500. The alternating current signal can be a high-frequency alternating current voltage signal. The first electrode plate 100 and the second electrode plate 200 are arranged opposite to each other and do not directly contact. An alternating electric field will be generated between the first electrode plate 100 and the second electrode plate 200 after applying the alternating current signal.

[0053] The alternating current power supply 500 is connected to the first electrode plate 100 and the second electrode plate 200, and the alternating current power supply 500 is used to transmit an alternating current signal to the first electrode plate 100 and the second electrode plate 200. The alternating current signal includes a high-frequency alternating current signal. The alternating current signal is used to generate an electric field; the electric field is used to excite the micro LED 1 located on the first electrode plate 100 to emit light.

[0054] The micro LED 1 is arranged on the side of the first electrode plate 100 close to the second electrode plate 200. Since the micro LED 1 is located between the first electrode plate 100 and the second electrode plate 200, the micro LED 1 will emit high-frequency inductive light under the alternating electric field formed between the first electrode plate 100 and the second electrode plate 200. The detection module 300 is arranged on the side of the second electrode plate 200 far from the first electrode plate 100, and the detection module 300 detects the luminous intensity, chromaticity or spectrum of the micro LED 1. By means of high-frequency electric field coupling, the non-contact detection of the micro LED 1 is realized, the detection speed is improved, and the physical damage of the micro LED 1 chip detection is reduced.

[0055] By arranging an excitation light source 400 on the side of the first electrode plate 100 far from the second electrode plate 200, the excitation light source 400 emits short-wave ultraviolet light or green light. The excitation light source 400 can excite the micro LED 1 located on the first electrode plate 100 to emit light. Since the excitation light source 400 can excite the micro LED 1 to emit light, the luminous intensity of the micro LED 1 detected by the detection module 300 is enhanced, and the detection accuracy of the luminous intensity, chromaticity or spectrum of the micro LED 1 by the detection module 300 is improved. The luminous intensity includes but is not limited to brightness, luminous intensity, and luminous flux.

[0056] In an optional implementation manner, when the excitation light source 400 excites the micro LED 1 to emit light, an alternating current signal can be applied between the first electrode plate 100 and the second electrode plate 200 through the alternating current power supply 500 at the same time. With such a setting, the micro LED 1 can emit light both by electro-luminescence and by photo-luminescence, so that the luminous intensity of the micro LED 1 is relatively high, and the detection accuracy of the micro LED 1 can be improved.

[0057] In another alternative embodiment, the micro LED 1 can be first excited to emit light by the excitation light source 400, and detected by the detection module 300 to determine the malfunctioning micro LED 1. Then, an alternating current signal is applied between the first electrode plate 100 and the second electrode plate 200 through the alternating current power supply 500 to make the micro LED 1 emit light, and the detection module 300 is used to detect the malfunctioning micro LED 1.

[0058] In yet another alternative embodiment, an alternating current signal is first applied between the first electrode plate 100 and the second electrode plate 200 through the alternating current power supply 500 to make the micro LED 1 emit light, and the detection module 300 is used to detect the malfunctioning micro LED 1. Then, the micro LED 1 is excited to emit light by the excitation light source 400, and detected by the detection module 300 to determine the malfunctioning micro LED 1.

[0059] Since the principles of exciting the micro LED 1 by the excitation light source 400 and the alternating current power supply 500 are different, and the film layers they act on are different, it is possible to detect the luminous intensity, chromaticity or spectrum of the micro LED 1 by reasonably setting the turn-on sequence of the excitation light source 400 and the alternating current power supply 500, and determine the faulty film layer of the malfunctioning micro LED 1, improving the detection accuracy of the micro LED 1 and realizing the fault location of the micro LED 1.

[0060] The detection device for micro LEDs provided in this embodiment makes the micro LED 1 emit light by setting the excitation light source 400 and / or the alternating current power supply 500, and the detection module 300 disposed on the side of the second electrode plate 200 away from the first electrode plate 100 detects the luminous intensity, chromaticity or spectrum of the micro LED 1, improving the detection accuracy of the micro LED 1 chip and realizing the fault location of the micro LED 1. On the other hand, by non-contact detection of the micro LED 1, damage to the electrodes of the micro LED 1 during detection is preferably avoided.

[0061] Optionally, on the basis of the above embodiment, continue to combine Figure 1 and Figure 2 , the first electrode plate 100 and the second electrode plate 200 are used to form an electric field according to the alternating current signal, and the electric field is used to excite the micro LED 1 located on the first electrode plate 100 to emit electroluminescence; the excitation light source 400 is used to excite the micro LED 1 to emit photoluminescence.

[0062] Specifically, by arranging an excitation light source 400 on the side of the first electrode plate 100 away from the second electrode plate 200, the excitation light source 400 emits short-wave ultraviolet light or green light. The excitation light source 400 can excite the micro LED 1 located on the first electrode plate 100. The micro LED 1 with a blue emission color and the micro LED 1 with a green emission color can be excited to emit light by the short-wave ultraviolet light. The excitation light source 400 can use green light to excite the micro LED 1 with a red emission color, so that the micro LED 1 with a red emission color exhibits photoluminescence. Since the excitation light source 400 can excite the micro LED 1 to emit light, the emission brightness and chromaticity of the micro LED 1 detected by the detection module 300 are enhanced, and the detection accuracy of the emission brightness and chromaticity of the micro LED 1 by the detection module 300 is improved.

[0063] Optionally, based on the above embodiments, continue to refer to Figure 1 , the orthographic projection of the excitation light source 400 on the first electrode plate 100 and the orthographic projection of the detection module 300 on the first electrode plate 100 overlap at least partially; preferably, the orthographic projection of the detection module 300 on the first electrode plate 100 completely covers the orthographic projection of the excitation light source 400 on the first electrode plate 100.

[0064] Specifically, such an arrangement can make the light energy emitted by the micro LED 1 excited by the short-wave ultraviolet light or green light emitted by the excitation light source 400 face the detection module 300 directly, which is convenient for enhancing the light emitted by the micro LED 1 detected by the detection module 300, further improving the detection accuracy of the micro LED 1, and further improving the fault location accuracy of the micro LED 1.

[0065] Optionally, based on the above embodiments, continue to combine Figure 1 and Figure 2 , the detection module 300 is adjustable in the direction perpendicular to the first electrode plate 100, and the second electrode plate 200 is fixedly arranged at one end of the detection module 300 close to the first electrode plate 100; preferably, the excitation light source 400 and the detection module 300 move coaxially.

[0066] Specifically, the detection module 300 is adjustable in a direction perpendicular to the first electrode plate 100, which facilitates the focusing of the detection module 300, so that the detection module 300 has a relatively high detection accuracy for the luminous brightness and chromaticity of the micro LED 1. The second electrode plate 200 is fixedly arranged at one end of the detection module 300 close to the first electrode plate 100, so that the relative position between the second electrode plate 200 and the detection module 300 is constant, which facilitates adjusting the distance between the first electrode plate 100 and the second electrode plate 200 only by adjusting the position of the detection module 300, and further improves the detection accuracy of the detection module 300 for the luminous brightness and chromaticity of the micro LED 1. By setting the excitation light source 400 to move coaxially with the detection module 300, the light emitted by the micro LED 1 excited by the excitation light source 400 can be better detected by the detection module 300, which further improves the detection accuracy of the micro LED 1 chip and can further improve the accuracy of fault location of the micro LED 1.

[0067] It should be noted that the shape of the detection module 300 may include a rectangle, a circle or other regular or irregular shapes, and no limitation is made here.

[0068] Optionally, on the basis of the above embodiments, continue to combine Figure 1 and Figure 2 , when the excitation light source 400 and the AC power supply 500 work simultaneously, the detection module 300 is used to detect the luminous brightness and chromaticity of the micro LED 1 to determine the micro LED 1 with abnormal luminous brightness and chromaticity; when the excitation light source 400 works alone, the detection module 300 is used to detect the fault state of the quantum well of the micro LED 1 with abnormal light emission; when the AC power supply 500 works alone, the detection module 300 is used to detect the fault state of the epitaxial film layer of the micro LED 1 with abnormal light emission.

[0069] Specifically, when the excitation light source and the AC power supply work simultaneously, the excitation light source can better make up for the deficiency of the electric field provided by the AC power supply in driving the micro LED, and improve the luminous intensity of the micro LED.

[0070] The photoluminescence of the micro LED 1 under the excitation of the excitation light source 400 originates from the process in which the quantum well absorbs the ground state of the short-wave excitation light source 400 and makes a transition to a stable excited state, and then emits light and returns to the ground state. The excitation light source 400 can detect the state of the quantum well. Therefore, by separately controlling the excitation of the micro LED 1 to emit photoluminescence by the excitation light source 400, and detecting the fault state of the quantum well of the micro LED 1 with abnormal light emission through the detection module 300, it is possible to determine whether the micro LED 1 with a fault is caused by the abnormality of the quantum well of the micro LED 1 resulting in abnormal light emission intensity, chromaticity or spectrum of the micro LED 1.

[0071] An alternating current signal is applied to the first electrode plate 100 and the second electrode plate 200 through the alternating current power supply 500. Due to the coupling method of the high-frequency electric field, in the positive half cycle of the alternating current signal, the direction of the electric field is from the P GaN of the micro LED 1 to the N GaN of the micro LED 1. Electrons in the N GaN region of the micro LED 1 and holes in the P GaN region move towards the multi-quantum (MQWs) direction through diffusion motion, and radiative recombination occurs in the quantum well, causing the micro LED 1 to generate electroluminescence. In the negative half cycle of the alternating current signal, the direction of the electric field is from the N GaN of the micro LED 1 to the P GaN of the micro LED 1, driving the electrons and holes back to the initial state. The epitaxial film layer includes an N-GaN layer and a P-GaN layer. Therefore, by separately controlling the application of the alternating current signal to the first electrode plate 100 and the second electrode plate 200 through the alternating current power supply 500, an electric field is formed between the first electrode plate 100 and the second electrode plate 200 to drive the micro LED 1 to emit electroluminescence, and the fault state of the epitaxial film layer of the micro LED 1 with abnormal light emission is detected through the detection module 300.

[0072] The detection device for the micro LED 1 provided in this embodiment drives the micro LED 1 to emit light by setting the excitation light source 400 and the AC power supply 500 to work simultaneously, and detects the luminous brightness and chromaticity of the micro LED 1 through the detection module 300 to drive the faulty micro LED 1. Then, the micro LED 1 is excited to emit photoluminescence by separately controlling the excitation light source 400, and the fault state of the quantum well of the micro LED 1 with abnormal light emission is detected through the detection module 300, so as to determine whether the faulty micro LED 1 is caused by the abnormality of the quantum well of the micro LED 1 resulting in the abnormality of the luminous intensity, chromaticity or spectrum of the micro LED 1. After that, the AC signal is separately controlled to be applied to the first electrode plate 100 and the second electrode plate 200 by the AC power supply 500 to form an electric field between the first electrode plate 100 and the second electrode plate 200 to drive the micro LED 1 to emit electroluminescence, and the fault state of the epitaxial film layer of the micro LED 1 with abnormal light emission is detected by the detection module 300. With such a setting, the detection accuracy of the micro LED 1 chip is further improved, and the accuracy of fault location of the micro LED 1 is further improved.

[0073] Optionally, on the basis of the above embodiments, continue to refer to Figure 1 and Figure 2 , the AC signal includes a square wave, a sine wave or a triangular wave, etc.; the detection module 300 includes a area array camera, a line scan camera, a TDI camera, an imaging luminance chrominance meter, a spectral luminance chrominance meter or a hyperspectral camera, etc.; the excitation light source 400 includes a short-wave excitation light source 400.

[0074] Specifically, the AC signal includes a square wave, a sine wave or a triangular wave, etc. The first detection module 300 can include a photoelectric sensor, a area array camera, a line scan camera, a TDI camera, an imaging luminance chrominance meter, a spectral luminance chrominance meter or a hyperspectral camera, etc. The excitation light source 400 includes a short-wave excitation light source 400.

[0075] The measurement method of the detection module 300 can include a fixed-shot or a flying-shot method. It should be noted that the first electrode plate 100 can be a wafer, a sapphire or a glass substrate. The first electrode plate 100 can be arranged on a stage. The stage can be set to be fixed or movable, and no limitation is made here.

[0076] Figure 3 is a flowchart of a detection method for a micro LED provided by an embodiment of the present invention. On the basis of the above embodiments, in combination with Figure 1 and Figure 3, the detection method of the micro LED provided in this embodiment is executed by the detection device of the micro LED 1. The detection device of the micro LED 1 includes: a first electrode plate 100, a second electrode plate 200, an excitation light source 400, an AC power supply 500, and a detection module 300. The second electrode plate 200 faces the first electrode plate 100. The AC power supply 500 is connected to the first electrode plate 100 and the second electrode plate 200. The excitation light source 400 is arranged on the side of the first electrode plate 100 away from the second electrode plate 200, and the detection module 300 is arranged on the side of the second electrode plate 200 away from the first electrode plate 100.

[0077] Combined with Figures 1 to 3 , the detection method of the micro LED provided in this embodiment includes:

[0078] S101. Transfer the micro LED 1 onto the first electrode plate 100.

[0079] Specifically, the light-emitting side of the micro LED 1 can be arranged on the side away from the first electrode plate 100, or the light-emitting side of the micro LED 1 can be arranged on the side close to the first electrode plate 100, without any limitation here.

[0080] S102. Make the micro LED 1 emit light through the excitation light source 400 and / or the AC power supply 500.

[0081] S103. Detect the light emission intensity, chromaticity or spectrum of the micro LED 1 through the detection module 300.

[0082] The detection method of the micro LED provided in this embodiment makes the micro LED 1 emit light by setting the excitation light source 400 and / or the AC power supply 500, and detects the light emission intensity, chromaticity or spectrum of the micro LED 1 through the detection module 300, improving the detection accuracy of the micro LED 1 chip and realizing the fault location of the micro LED 1. With such a setting, non-contact detection of the micro LED 1 is realized, and damage to the electrodes of the micro LED 1 during detection is preferably avoided.

[0083] Optionally, Figure 4 is a flowchart of another detection method of the micro LED provided in an embodiment of the present invention. On the basis of the above embodiments, combined with Figure 1 and Figure 4 , the detection method of the micro LED provided in this embodiment includes:

[0084] S101. Transfer the micro LED 1 to the first electrode plate 100.

[0085] S201. Use the excitation light source 400 to excite the micro LED 1 to emit photoluminescence, and apply an alternating current signal to the first electrode plate 100 and the second electrode plate 200 through the alternating current power supply 500 to form an electric field between the first electrode plate 100 and the second electrode plate 200, so as to drive the micro LED 1 to emit electroluminescence.

[0086] S202. Detect the luminous intensity, chromaticity or spectrum of the micro LED 1 through the detection module 300, and determine the micro LED 1 with abnormal luminous intensity, chromaticity or spectrum of the micro LED 1.

[0087] The detection method of the micro LED provided in this embodiment drives the micro LED 1 to emit light by setting the excitation light source 400 and the alternating current power supply 500 at the same time, and detects the luminous intensity, chromaticity or spectrum of the micro LED 1 through the detection module 300, further improving the detection accuracy of the micro LED 1 chip.

[0088] Optionally, Figure 5 is a flowchart of another detection method of the micro LED provided by the embodiment of the present invention. On the basis of the above embodiments, combined with Figure 1 and Figure 5 , the detection method of the micro LED provided in this embodiment includes:

[0089] S101. Transfer the micro LED 1 to the first electrode plate 100.

[0090] S201. Use the excitation light source 400 to excite the micro LED 1 to emit photoluminescence, and apply an alternating current signal to the first electrode plate 100 and the second electrode plate 200 through the alternating current power supply 500 to form an electric field between the first electrode plate 100 and the second electrode plate 200, so as to drive the micro LED 1 to emit electroluminescence.

[0091] S202. Detect the luminous intensity, chromaticity or spectrum of the micro LED 1 through the detection module 300, and determine the micro LED 1 with abnormal luminous intensity, chromaticity or spectrum of the micro LED 1.

[0092] S301. Use the excitation light source 400 to excite the micro LED 1 to emit photoluminescence.

[0093] S302. When the excitation light source 400 works alone, the detection module 300 is used to detect the fault state of the quantum well of the micro LED 1 with abnormal light emission.

[0094] The detection method of the micro LED provided in this embodiment drives the micro LED 1 to emit light by setting the excitation light source 400 and the AC power supply 500 to work simultaneously, and the detection module 300 is used to detect the luminous intensity and chromaticity of the micro LED 1 to drive the faulty micro LED 1. Then, by separately controlling the excitation light source 400 to excite the micro LED 1 to emit photoluminescence, the detection module 300 is used to detect the fault state of the quantum well of the micro LED 1 with abnormal light emission, so as to determine whether the faulty micro LED 1 is caused by the abnormality of the quantum well of the micro LED 1 resulting in the abnormality of the luminous intensity, chromaticity or spectrum of the micro LED 1, further improving the detection accuracy of the micro LED 1 chip and realizing the fault location of the micro LED 1.

[0095] Optionally, Figure 6 is a flowchart of another detection method of the micro LED provided by the embodiment of the present invention. On the basis of the above embodiments, in combination with Figure 1 and Figure 6 , the detection method of the micro LED provided in this embodiment includes:

[0096] S101. Transfer the micro LED 1 to the first electrode plate 100.

[0097] S201. The excitation light source 400 is used to excite the micro LED 1 to emit photoluminescence, and an AC signal is applied to the first electrode plate 100 and the second electrode plate 200 through the AC power supply 500 to form an electric field between the first electrode plate 100 and the second electrode plate 200 to drive the micro LED 1 to emit electroluminescence.

[0098] S202. The detection module 300 is used to detect the luminous intensity, chromaticity or spectrum of the micro LED 1 to determine the micro LED 1 with abnormal luminous intensity, chromaticity or spectrum of the micro LED 1.

[0099] S301. The excitation light source 400 is used to excite the micro LED 1 to emit photoluminescence.

[0100] S302. When the excitation light source 400 works alone, the detection module 300 is used to detect the fault state of the quantum well of the micro LED 1 with abnormal light emission.

[0101] S401. Apply an alternating current signal to the first electrode plate 100 and the second electrode plate 200 through the alternating current power supply 500 to form an electric field between the first electrode plate 100 and the second electrode plate 200, so as to drive the micro LED 1 to emit light electroluminescently.

[0102] S402. When the alternating current power supply 500 works alone, the detection module 300 is used to detect the failure state of the epitaxial film layer of the micro LED 1 with abnormal light emission.

[0103] The detection method of the micro LED provided in this embodiment drives the micro LED 1 to emit light by setting the excitation light source 400 and the alternating current power supply 500 to work simultaneously, and detects the light emission intensity, chromaticity or spectrum of the micro LED 1 through the detection module 300 to drive the faulty micro LED 1. Then, the micro LED 1 is excited to emit light photoluminescently by separately controlling the excitation light source 400, and the detection module 300 is used to detect the failure state of the quantum well of the micro LED 1 with abnormal light emission, so as to determine whether the faulty micro LED 1 is caused by the abnormality of the quantum well of the micro LED 1 resulting in the abnormality of the light emission intensity, chromaticity or spectrum of the micro LED 1. After that, the alternating current power supply 500 is separately controlled to apply an alternating current signal to the first electrode plate 100 and the second electrode plate 200 to form an electric field between the first electrode plate 100 and the second electrode plate 200, so as to drive the micro LED 1 to emit light electroluminescently, and the detection module 300 is used to detect the failure state of the epitaxial film layer of the micro LED 1 with abnormal light emission. With such a setting, the detection accuracy of the micro LED 1 chip is further improved, and the accuracy of fault location of the micro LED 1 is further improved.

[0104] Note that the above is only a preferred embodiment of the present invention and the applied technical principle. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described here, and various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments only. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A detection device for micro LEDs, characterized in that, it includes: A first electrode plate for carrying micro LEDs; A second electrode plate facing the first electrode plate, An AC power supply connected to the first electrode plate and the second electrode plate respectively, and the AC power supply is used to transmit an AC signal to the first electrode plate and the second electrode plate; An excitation light source disposed on a side of the first electrode plate away from the second electrode plate; The excitation light source and / or the AC power supply are used to make the micro LEDs emit light; A detection module disposed on a side of the second electrode plate away from the first electrode plate, and the detection module is used to detect the luminous intensity, chromaticity or spectrum of the micro LEDs.

2. The detection device according to claim 1, characterized in that, The first electrode plate and the second electrode plate are used to form an electric field according to the AC signal, and the electric field is used to excite the micro LEDs located on the first electrode plate to emit electroluminescence; The excitation light source is used to excite the micro LEDs to emit photoluminescence.

3. The detection device according to claim 1, characterized in that, The orthographic projection of the excitation light source on the first electrode plate and the orthographic projection of the detection module on the first electrode plate at least partially overlap; Preferably, the orthographic projection of the detection module on the first electrode plate completely covers the orthographic projection of the excitation light source on the first electrode plate.

4. The detection device according to claim 1, characterized in that, The detection module is adjustable in a direction perpendicular to the first electrode plate, and the second electrode plate is fixedly arranged at one end of the detection module close to the first electrode plate; Preferably, the excitation light source and the detection module move coaxially.

5. The detection device according to claim 2, characterized in that, When the excitation light source and the AC power supply work simultaneously, the detection module is used to detect the luminous brightness and chromaticity of the micro LEDs, and determine the micro LEDs with abnormal luminous intensity, chromaticity or spectrum; When the excitation light source works alone, the detection module is used to detect the fault state of the quantum wells of the micro LEDs with abnormal light emission; When the AC power supply works alone, the detection module is used to detect the fault state of the epitaxial film layers of the micro LEDs with abnormal light emission.

6. The detection device according to claim 1, characterized in that, The AC signal includes a square wave, a sine wave or a triangular wave; The detection module includes a photoelectric sensor, an area array camera, a line scan camera, a TDI camera, an imaging luminance chromaticity meter, a spectral luminance chromaticity meter or a hyperspectral camera; The excitation light source includes a short-wave excitation light source.

7. A detection method for micro LEDs, characterized in that, The detection method of the micro LED is executed by a micro LED detection device, and the micro LED detection device includes: a first electrode plate, a second electrode plate, an excitation light source, an AC power supply, and a detection module. The second electrode plate faces the first electrode plate. The AC power supply is connected to the first electrode plate and the second electrode plate. The excitation light source is arranged on a side of the first electrode plate away from the second electrode plate, and the detection module is arranged on a side of the second electrode plate away from the first electrode plate; The detection method of the micro LED includes: Transfer the micro LED to the first electrode plate; Make the micro LED emit light through the excitation light source and / or the AC power supply; Detect the light emission intensity, chromaticity or spectrum of the micro LED through the detection module.

8. According to the method described in claim 7, It is characterized in that, The step of making the micro LED emit light through the excitation light source and / or the AC power supply includes: Use the excitation light source to excite the micro LED to emit photoluminescence, and apply an AC signal to the first electrode plate and the second electrode plate through the AC power supply to form an electric field between the first electrode plate and the second electrode plate to drive the micro LED to emit electroluminescence; The step of detecting the light emission intensity, chromaticity or spectrum of the micro LED through the detection module includes: Detect the light emission intensity, chromaticity or spectrum of the micro LED through the detection module to determine the micro LED with abnormal light emission intensity, chromaticity or spectrum.

9. According to the method described in claim 8, It is characterized in that, After determining the micro LED with abnormal light emission intensity, chromaticity or spectrum, it further includes: Use the excitation light source to excite the micro LED to emit photoluminescence; When the excitation light source works alone, detect the fault state of the quantum well of the micro LED with abnormal light emission through the detection module.

10. According to the method described in claim 9, It is characterized in that, After detecting the fault state of the quantum well of the micro LED with abnormal light emission through the detection module, it further includes: Apply an AC signal to the first electrode plate and the second electrode plate through the AC power supply to form an electric field between the first electrode plate and the second electrode plate to drive the micro LED to emit electroluminescence; When the AC power supply works alone, detect the fault state of the epitaxial film layer of the micro LED with abnormal light emission through the detection module.

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