Device for automatically inspecting sizes of machined parts

Abstract

The invention discloses a device for automatically inspecting the size of a machined part, and belongs to the field of mechanical part detection.The device comprises a feeding mechanical arm, a detection platform is arranged on one side of the feeding mechanical arm, a discharging mechanical arm is arranged on one side of the detection platform, and a scanning mechanical arm is arranged on the rear side of the detection platform; one end of the scanning mechanical arm is fixedly connected with a 3D scanning unit, and a non-contact deformation detection module is arranged on one side of the upper surface of the detection platform; the detection platform is further provided with a micro-stress flexible supporting assembly used for supporting the to-be-detected workpiece. Compared with traditional manual detection, manual carrying, tool part placing and detection equipment operation are not needed, the detection efficiency is improved, in addition, due to the fact that automatic detection is achieved, the manual labor intensity is reduced, subjective reading errors caused by manual detection are avoided, and the detection precision is improved.

Description

Technical Field

[0001] The present invention relates to the field of mechanical component detection, and more specifically, to a device for automatically inspecting the dimensions of machined parts. Background Art

[0002] In the traditional mechanical processing industry, after the parts are processed, in order to ensure the processing quality of the products, quality inspectors usually use special measuring tools such as vernier calipers, or use portable optical equipment to detect the dimensions of the parts, such as length, outer diameter, inner diameter, etc. After the detection is completed, the quality inspector compares the detection results with the processing inspection drawings of the products to determine whether the products are qualified.

[0003] This kind of detection method usually requires manual handling, placing of tool parts and operation of detection equipment. Usually, the detection efficiency is low and the manual labor intensity is high. Therefore, the present invention designs a mechanical structure for automatically handling, placing and operating detection equipment to detect the dimensions of products and improve the detection efficiency. Summary of the Invention

[0004] Aiming at the problems existing in the prior art, the purpose of the present invention is to provide a device for automatically inspecting the dimensions of machined parts.

[0005] To solve the above problems, the present invention adopts the following technical solutions.

[0006] A device for automatically inspecting the dimensions of machined parts includes a feeding robotic arm. One side of the feeding robotic arm is provided with a detection platform. One side of the detection platform is provided with a discharging robotic arm. The rear side of the detection platform is provided with a scanning robotic arm. One end of the scanning robotic arm is fixedly connected with a 3D scanning unit. One side of the upper surface of the detection platform is provided with a non-contact deformation detection module. The upper surface of the detection platform is also provided with a micro-stress flexible support assembly for supporting the workpiece to be detected.

[0007] Further, the micro-stress flexible support assembly includes a carbon fiber substrate fixedly connected to the middle position of the upper surface of the detection platform. The upper surface of the carbon fiber substrate is provided with flexible support units distributed in an array. The flexible support unit includes a micro load cell fixedly connected to the upper surface of the detection platform. A flexible hinge is arranged at the upper end of the micro load cell. A high-resolution strain gauge is bonded to the surface of the flexible hinge. A piezoelectric ceramic stack actuator is fixedly connected to the upper end of the high-resolution strain gauge. A capacitive displacement sensor is fixedly connected to the upper end of the piezoelectric ceramic stack actuator. A tungsten carbide ball head is fixedly connected to the upper end of the capacitive displacement sensor. It also includes a processing unit for controlling the action of the flexible support unit.

[0008] Further, the non-contact deformation detection module includes a support frame fixedly connected to one side of the upper surface of the detection platform. One end of the top of the support frame is fixedly connected with a dual high-speed CMOS camera, and one lower end of one side of the top of the support frame is fixedly connected with a blue light LED structured light source.

[0009] Further, the flexible support unit array on the upper surface of the carbon fiber substrate is distributed at intervals of 15 mm.

[0010] Further, when the dual high-speed CMOS camera is installed at one end of the top of the support frame, the dual high-speed CMOS camera needs to rotate by an angle of 60 degrees around the axis line.

[0011] Further, the processing unit is used to collect the detection data of the high-resolution strain gauge and the micro weighing sensor in real time, calculate the detection data, control the action of the piezoelectric ceramic stack actuator, and evenly distribute the contact stress; process the real-time feedback data of the dual high-speed CMOS camera and the blue light LED structured light source, and monitor the full-field deformation data of the workpiece; calculate the full-field deformation data of the workpiece, calculate the secondary compensation amount of the piezoelectric ceramic stack actuator; establish a mathematical model according to the secondary compensation amount of the piezoelectric ceramic stack actuator, obtain the compensation voltage for driving the piezoelectric ceramic stack actuator and perform compensation.

[0012] Further, the processing unit is used to collect the detection data of the high-resolution strain gauge and the micro weighing sensor in real time, calculate the detection data, control the action of the piezoelectric ceramic stack actuator, and evenly distribute the contact stress, including: Collect the detection data of the high-resolution strain gauge and the micro weighing sensor in real time, calculate the force error and stress gradient at each point of contact between the workpiece and the tungsten carbide ball head, establish a mathematical model using the calculation results, calculate the first compensation amount of the piezoelectric ceramic stack actuator in each flexible support unit, and control the action of the piezoelectric ceramic stack actuator to evenly distribute the contact stress.

[0013] Further, it is characterized in that: process the real-time feedback data of the dual high-speed CMOS camera and the blue light LED structured light source, and monitor the full-field displacement deformation data of the workpiece, including: Collect the detection data of the dual high-speed CMOS camera and the blue light LED structured light source in real time, establish a mathematical model, monitor the deformation data of each point in the full field of the workpiece, and calculate the displacement deformation amount of each point.

[0014] Further, calculate the full-field deformation data of the workpiece, and calculate the secondary compensation amount of the piezoelectric ceramic stack actuator, including: Receive the full-field displacement deformation data of the workpiece, establish a mathematical model, and calculate the secondary compensation displacement vector of the piezoelectric ceramic stack actuator at each displacement deformation point.

[0015] Further, a mathematical model is established based on the secondary compensation amount of the piezoelectric ceramic stack actuator, and the compensation voltage of the piezoelectric ceramic stack actuator is obtained and compensated, including: A mathematical model is established according to the secondary compensation amount of the piezoelectric ceramic stack actuator, and the thermal expansion factor of the piezoelectric ceramic stack actuator is substituted into the mathematical model to calculate and compensate the compensation voltage of the piezoelectric ceramic stack actuator.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: (1) Compared with the traditional manual inspection, the present application does not require manual handling, placing tool parts and operating inspection equipment, which improves the inspection efficiency. In addition, due to the realization of automated inspection, the manual labor intensity is also reduced, and the subjective reading error caused by manual inspection is avoided, improving the inspection accuracy.

[0017] (2) By setting the micro-stress flexible support assembly, the present application can compensate for the elastic deformation of precision machined parts caused by gravity and stress concentration at the micron level, thereby further reducing the inspection error of precision machined parts and improving the inspection accuracy. Description of the Drawings

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the structure of the micro-stress flexible support assembly of the present invention; Figure 3 It is a schematic diagram of the structure of the flexible support unit of the present invention; Figure 4 It is a schematic diagram of the structure of the non-contact deformation detection module of the present invention.

[0019] Explanation of the reference numerals in the drawings: 1. Feeding robotic arm; 2. Micro-stress flexible support assembly; 21. Carbon fiber substrate; 22. Flexible support unit; 221. Tungsten carbide ball head; 222. Capacitive displacement sensor; 223. Piezoelectric ceramic stack actuator; 224. Flexible hinge; 225. Micro load cell; 226. High-resolution strain gauge; 3. Non-contact deformation detection module; 31. Support frame; 32. Dual high-speed CMOS cameras; 33. Blue light LED structured light source; 4. Detection platform; 5. Unloading robotic arm; 6. Scanning robotic arm; 7. 3D scanning unit. Detailed Embodiments

[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0021] Please refer to Figures 1 to 4 , a device for automatically inspecting the dimensions of machined parts, including a feeding robotic arm 1. A detection platform 4 is provided on one side of the feeding robotic arm 1. A discharging robotic arm 5 is provided on one side of the detection platform 4. A scanning robotic arm 6 is provided at the rear side of the detection platform 4. One end of the scanning robotic arm 6 is fixedly connected with a 3D scanning unit 7. A non-contact deformation detection module 3 is provided on one side of the upper surface of the detection platform 4. A micro-stress flexible support assembly 2 for supporting the workpiece to be detected is also provided on the detection platform 4.

[0022] During operation, the feeding robotic arm 1 is used to grab the workpiece and place it on the detection platform 4 to ensure that the part is in a suitable detection position. The scanning robotic arm 6 is set to clamp the 3D scanning unit 7 and control the 3D scanning unit 7 to move to scan the product and obtain the size information of the product. The 3D scanning unit 7 transmits the detected part size information to the computer, and automatically compares and determines the detection results. The discharging robotic arm 5 is used to carry the detected workpiece from the detection platform 4 to other specified positions, completing the automatic inspection process of the workpiece. By adopting the above technical solutions, first, compared with traditional manual inspection, there is no need for manual handling, placing tool parts and operating inspection equipment, improving the inspection efficiency. In addition, due to the realization of automated inspection, the manual labor intensity is also reduced, and the subjective reading error caused by manual inspection is avoided, improving the inspection accuracy.

[0023] In some embodiments, as Figure 2 and Figure 3 shown, the micro-stress flexible support assembly 2 includes a carbon fiber substrate 21 fixedly connected to the middle position of the upper surface of the detection platform 4. Flexible support units 22 are arranged in an array on the upper surface of the carbon fiber substrate 21. The flexible support unit 22 includes a micro weighing sensor 225 fixedly connected to the upper surface of the detection platform 4. A flexible hinge 224 is provided at the upper end of the micro weighing sensor 225. A high-resolution strain gauge 226 is adhesively bonded to the surface of the flexible hinge 224. A piezoelectric ceramic stack actuator 223 is fixedly connected to the upper end of the high-resolution strain gauge 226. A capacitive displacement sensor 222 is fixedly connected to the upper end of the piezoelectric ceramic stack actuator 223. A tungsten carbide ball head 221 is fixedly connected to the upper end of the capacitive displacement sensor 222. It also includes a processing unit for controlling the operation of the flexible support unit 22.

[0024] As Figure 4 shown, the non-contact deformation detection module 3 includes a support frame 31 fixedly connected to one side of the upper surface of the detection platform 4. One end of the top of the support frame 31 is fixedly connected with a dual high-speed CMOS camera 32, and one lower end of one side of the top of the support frame 31 is fixedly connected with a blue light LED structured light source 33.

[0025] The flexible support units 22 on the upper surface of the carbon fiber substrate 21 are arrayed at intervals of 15 mm.

[0026] When the dual high-speed CMOS camera 32 is installed at one end of the top of the support frame 31, the dual high-speed CMOS camera 32 needs to rotate by an angle of 60 degrees around the axis line.

[0027] For some specific high-precision workpieces, such as those involved in the fields of aerospace and semiconductors, the measurement accuracy needs to be accurate to the micron level. In the traditional measurement method, the workpiece is directly placed on the detection platform 4, and due to gravity deformation and contact stress concentration, deformation will occur, resulting in a large error in the detection result. The following is a detailed analysis: First is the microscopic contact mechanics level. Even when just placing the workpiece, contact stress concentration will occur locally at the support points. Taking a turbine blade as an example, the root surface of the blade and the traditional support plane are point contacts, and the contact area is only 0.785 mm². When the support force reaches 8 N, the local stress exceeds 10 MPa - this has reached 3% of the yield strength of aluminum alloy, which is sufficient to cause micron-level elastic deformation.

[0028] Second is the gravity-stiffness coupling effect. The thin-walled part has low self-stiffness, and under the influence of gravity, local bending deformation will occur, which will lead to a large error in the detection result. The following is a simple calculation for illustration: [Example: 150 mm long turbine blade] Material: IN718 superalloy; Self-weight: 0.8 kg → Gravity 8 N; Equivalent cantilever beam stiffness: K = 3EI / L³ ≈ 12 N / mm (E is the elastic modulus, which can be obtained by referring to relevant materials according to the workpiece material; I is the moment of inertia, which can be obtained by referring to relevant materials according to the workpiece material; L is the workpiece length); Theoretical deformation: δ = F / K = 8 N / 12 N / mm = 0.67 mm; (F is the workpiece gravity, K is the equivalent cantilever beam stiffness); Therefore, even without an external clamping force, gravity alone can cause the tip of the blade to sink by 0.67 mm (670 μm).

[0029] In summary, the present application solves this problem by setting up the micro-stress flexible support component 2 in cooperation with the non-contact deformation detection module 3, realizing the micron-level detection of high-precision workpieces, reducing the errors caused by contact stress and gravity on workpiece detection, and improving the detection accuracy.

[0030] During specific operation, first, the feeding robotic arm 1 is used to grasp the workpiece and place it on the micro-stress flexible support component 2 to ensure that the part is in a suitable detection position. The workpiece is supported by the tungsten carbide ball heads 221 on each micro-stress flexible support component 2. The tungsten carbide ball heads 221 are subjected to the gravity of the workpiece and transmit the gravity to the high-resolution strain gauges 226 and the micro load cells 225. Then, the detection data of the high-resolution strain gauges 226 and the micro load cells 225 are collected in real time, the force errors and stress gradients at the contact points between the workpiece and the tungsten carbide ball heads 221 are calculated, a mathematical model is established using the calculation results, the first compensation amount of the piezoelectric ceramic stack actuators 223 in each flexible support unit 22 is calculated, and the piezoelectric ceramic stack actuators 223 are controlled to act to evenly distribute the contact stress, avoiding the micron-level deformation problem of the workpiece caused by local contact stress concentration of the workpiece. Secondly, it is necessary to solve the problem of local bending deformation of thin-walled workpieces caused by the gravity-stiffness coupling effect. During specific operation, the dual high-speed CMOS cameras 32 and the blue light LED structured light source 33 feed back data in real time to monitor the full-field deformation data of the workpiece. The processing unit calculates the full-field deformation data of the workpiece, calculates the second compensation amount of the piezoelectric ceramic stack actuators 223, establishes a mathematical model, obtains the compensation voltage for driving the piezoelectric ceramic stack actuators 223 and performs compensation, so as to compensate and support the local bending deformation affected by gravity, and further reduce the detection error.

[0031] In some embodiments, the processing unit is used to collect the detection data of the high-resolution strain gauges 226 and the micro load cells 225 in real time, calculate the detection data, control the piezoelectric ceramic stack actuators 223 to act, and evenly distribute the contact stress, including: Collect the detection data of the high-resolution strain gauges 226 and the micro load cells 225 in real time, calculate the force errors and stress gradients at the contact points between the workpiece and the tungsten carbide ball heads 221, establish a mathematical model using the calculation results, calculate the first compensation amount of the piezoelectric ceramic stack actuators 223 in each flexible support unit 22, and control the piezoelectric ceramic stack actuators 223 to act to evenly distribute the contact stress.

[0032] By adopting the above technical solution, the detection data of the high-resolution strain gauges 226 and the micro load cells 225 are collected in real time, and the force errors and stress gradients at the contact points between the workpiece and the tungsten carbide ball heads 221 are calculated: Among them, e j is the force error; F 目标 is the ideal gravity, which can be obtained through a calibration experiment, and F 目标 should not exceed the maximum gravity that causes the material to yield; F 测量 is the gravity actually detected by the micro weighing sensor 225 of the j-th unit in the array field composed of the flexible support units 22.

[0033] Among them, is the horizontal stress gradient; σ j is the contact stress detected by the high-resolution strain gauge 226 of the j-th unit in the array field composed of the flexible support units 22; σ j-1 is the contact stress detected by the high-resolution strain gauge 226 of the (j - 1)-th unit in the array field composed of the flexible support units 22; is the horizontal distance between the (j - 1)-th flexible support unit 22 and the j-th flexible support unit 22, which is set to 15 mm in this case.

[0034] Combining the above calculation results, a target compensation voltage calculation model of the piezoelectric ceramic stack actuator 223 is established under the condition that the contact stress of the flexible support unit 22 is evenly distributed: Among them, is the compensation voltage that should be applied to the piezoelectric ceramic stack actuator 223 of the j-th unit in the array field composed of the flexible support units 22; e j is the force error; K p is the proportionality coefficient, which is taken as 0.5; K i is the integral coefficient, which is taken as 0.2; K d is the differential coefficient, which is taken as 0.1; is the horizontal stress gradient; F f is the feedforward gain, which is taken as 0.15; is the integral of the error per unit time; is the rate of change of the error per unit time; Through the above calculations, the target compensation voltage of the piezoelectric ceramic stack actuator 223 is obtained under the condition that the contact stress of the flexible support unit 22 is evenly distributed. The processing unit uses this target compensation voltage value to control the piezoelectric ceramic stack actuator 223 of the corresponding matrix unit to perform the first compensation action. After all points in the matrix are compensated, the contact stress of the workpiece is evenly distributed.

[0035] In some implementations, the dual high-speed CMOS cameras 32 and the blue light LED structured light source 33 are processed to provide real-time feedback data to monitor the full-field displacement and deformation data of the workpiece, including: Collect the detection data of the dual high-speed CMOS camera 32 and the blue LED structured light source 33 in real time, establish a mathematical model, monitor the deformation data of each point in the whole field of the workpiece, and calculate the displacement deformation amount of each point.

[0036] By adopting the above technical solution, for the preset sampling points (the positions where the gravity-stiffness coupling effect is likely to occur can be selected, and these positions are monitored synchronously), collect the detection data of the dual high-speed CMOS camera 32 and the blue LED structured light source 33, and establish a mathematical model: Among them, Z is the current height of the sampling point; f is the focal length of the dual high-speed CMOS camera 32, which is a calibration parameter and is taken as 35 mm; b is the baseline distance of the dual high-speed CMOS camera 32, which is obtained by precise measurement during installation; d is the parallax and is taken as 143.8 pixel; is the height difference of the sampling point (i.e., the deformation displacement data of the sampling point); Z0 is the initial height of the sampling point; Z t is the current height of the sampling point.

[0037] In some implementations, calculate the deformation data of the whole field of the workpiece, and calculate the secondary compensation amount of the piezoelectric ceramic stack actuator 223, including: Receive the displacement deformation data of the whole field of the workpiece, establish a mathematical model, and calculate the secondary compensation displacement vector of the piezoelectric ceramic stack actuator 223 at each displacement deformation point.

[0038] By adopting the above technical solution, receive the displacement deformation data of the whole field of the workpiece, and establish a mathematical model: Among them, is the deformation displacement vector of the Kth sampling point; N is the total number of sampling points; u p is the predicted displacement vector of the Kth sampling point, which represents the theoretical displacement value of this point in the ideal state without external constraints and is a three-dimensional vector that can be obtained through calibration experiments; u d is the measured displacement vector of the sampling point K, which is also a three-dimensional vector and can be denoted as in this implementation; u is the height difference of the sampling point in the Z-axis direction, which is detected and calculated by the dual high-speed CMOS camera 32 and the blue LED structured light source 33; β is the physical constraint weight coefficient and is taken as 0.5; F is the external force vector, which is measured in real time by the micro weighing sensor 225; is the stress divergence (vector), and the calculation formula is: Among them, is the partial derivative of the stress in the X direction; is the partial derivative of stress in the Y direction; is the partial derivative of stress in the Z direction; the stress can be detected by the high-resolution strain gauge 226; In some embodiments, a mathematical model is established based on the secondary compensation amount of the piezoelectric ceramic stack actuator 223, and the compensation voltage of the piezoelectric ceramic stack actuator 223 is obtained and compensated, including: A mathematical model is established according to the secondary compensation amount of the piezoelectric ceramic stack actuator 223, and the thermal expansion factor of the piezoelectric ceramic stack actuator 223 is substituted into the mathematical model to calculate and compensate the compensation voltage of the piezoelectric ceramic stack actuator 223.

[0039] By adopting the above technical solution, a mathematical model is established: where V D is the target compensation voltage of the piezoelectric ceramic stack actuator 223; is the compensation displacement under the action of gravity, and the calculation formula is , where is the Jacobian vector, and this formula is used to perform the Jacobian transformation on the deformation displacement vector of the sampling point; is the thermal expansion compensation displacement; C is the piezoelectric constant, taken as 0.04; The following formula is used for calculation: where α w is the workpiece expansion coefficient, 23×10 -6 / °C; α s is the support expansion coefficient, 11.5×10 -6 / °C; is the temperature change, which is measured in real time by adding a temperature sensor to the flexible support unit 22; H is the characteristic length, that is, the height of the flexible support unit 22.

[0040] After calculating the target compensation voltage of the piezoelectric ceramic stack actuator 223 through the above formula, the processing unit controls the piezoelectric ceramic stack actuator 223 corresponding to the sampling point to perform compensation, so as to compensate for the deformation of the workpiece caused by the influence of gravity and temperature, and further improve the workpiece detection accuracy.

[0041] The above is only a preferred specific embodiment of the present invention; however, the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its improved concept, makes equivalent substitutions or changes, and all should be covered by the protection scope of the present invention.

Claims

1. An apparatus for automatically inspecting the dimensions of machined parts, including a feeding robotic arm (1), characterized in that, On one side of the feeding robotic arm (1), there is a detection platform (4). On one side of the detection platform (4), there is a discharging robotic arm (5). At the rear side of the detection platform (4), there is a scanning robotic arm (6). One end of the scanning robotic arm (6) is fixedly connected with a 3D scanning unit (7). On one side of the upper surface of the detection platform (4), there is a non-contact deformation detection module (3); on the detection platform (4), there is also a micro-stress flexible support assembly (2) for supporting the workpiece to be detected.

2. The device for automatically inspecting the dimensions of machined parts according to claim 1, wherein: The micro-stress flexible support assembly (2) includes a carbon fiber substrate (21) fixedly connected to the middle position of the upper surface of the detection platform (4). On the upper surface of the carbon fiber substrate (21), flexible support units (22) are distributed in an array. The flexible support unit (22) includes a micro load cell (225) fixedly connected to the upper surface of the detection platform (4). At the upper end of the micro load cell (225), there is a flexible hinge (224). On the surface of the flexible hinge (224), a high-resolution strain gauge (226) is adhesively bonded. At the upper end of the high-resolution strain gauge (226), a piezoelectric ceramic stack actuator (223) is fixedly connected. At the upper end of the piezoelectric ceramic stack actuator (223), a capacitive displacement sensor (222) is fixedly connected. At the upper end of the capacitive displacement sensor (222), a tungsten carbide ball head (221) is fixedly connected. It also includes a processing unit for controlling the operation of the flexible support unit (22).

3. The device for automatically inspecting the dimensions of machined parts according to claim 2, characterized in that: The non-contact deformation detection module (3) includes a support frame (31) fixedly connected to one side of the upper surface of the detection platform (4). At one end of the top of the support frame (31), a dual high-speed CMOS camera (32) is fixedly connected. At the lower end of one side of the top of the support frame (31), a blue light LED structured light source (33) is fixedly connected.

4. The device for automatically inspecting the dimensions of machined parts according to claim 3, wherein: The flexible support units (22) on the upper surface of the carbon fiber substrate (21) are distributed in an array at an interval of 15 mm.

5. The device for automatically inspecting the dimensions of machined parts according to claim 3, characterized in that: When the dual high-speed CMOS camera (32) is installed at one end of the top of the support frame (31), the dual high-speed CMOS camera (32) needs to rotate by an angle of 60 degrees around the axis line.

6. The device for automatically inspecting the dimensions of machined parts according to claim 3, characterized in that: The processing unit is used to collect the detection data of the high-resolution strain gauge (226) and the micro load cell (225) in real time, calculate the detection data, control the operation of the piezoelectric ceramic stack actuator (223), and evenly distribute the contact stress; process the real-time feedback data of the dual high-speed CMOS camera (32) and the blue light LED structured light source (33), and monitor the full-field deformation data of the workpiece; Calculate the full-field deformation data of the workpiece, and calculate the secondary compensation amount of the piezoelectric ceramic stack actuator (223); Establish a mathematical model based on the secondary compensation amount of the piezoelectric ceramic stack actuator (223), obtain the compensation voltage for driving the piezoelectric ceramic stack actuator (223), and perform compensation.

7. The device for automatically inspecting the dimensions of machined parts according to claim 6, wherein: The processing unit is used to collect the detection data of the high-resolution strain gauge (226) and the micro load cell (225) in real time, calculate the detection data, control the operation of the piezoelectric ceramic stack actuator (223), and evenly distribute the contact stress, including: Collect the detection data of the high-resolution strain gauge (226) and the micro load cell (225) in real time, calculate the force error and stress gradient at each point where the workpiece contacts the tungsten carbide ball head (221), establish a mathematical model using the calculation results, calculate the first compensation amount of the piezoelectric ceramic stack actuator (223) in each flexible support unit (22), and control the piezoelectric ceramic stack actuator (223) to act to evenly distribute the contact stress.

8. The device for automatically inspecting the dimensions of machined parts according to claim 6, characterized in that: Process the real-time feedback data of the dual high-speed CMOS cameras (32) and the blue light LED structured light source (33), and monitor the full-field displacement and deformation data of the workpiece, including: Collect the detection data of the dual high-speed CMOS cameras (32) and the blue light LED structured light source (33) in real time, establish a mathematical model, monitor the deformation data of each point in the full field of the workpiece, and calculate the displacement and deformation amount of each point.

9. The device for automatically inspecting the dimensions of machined parts according to claim 6, wherein: Calculate the second compensation amount of the piezoelectric ceramic stack actuator (223) from the full-field deformation data of the workpiece, including: Receive the full-field displacement and deformation data of the workpiece, establish a mathematical model, and calculate the second compensation displacement vector of the piezoelectric ceramic stack actuator (223) at each displacement and deformation point.

10. The device for automatically inspecting the dimensions of machined parts according to claim 6, characterized in that: Establish a mathematical model based on the second compensation amount of the piezoelectric ceramic stack actuator (223), obtain the compensation voltage of the piezoelectric ceramic stack actuator (223), and perform compensation, including: Establish a mathematical model based on the second compensation amount of the piezoelectric ceramic stack actuator (223), substitute the thermal expansion factor of the piezoelectric ceramic stack actuator (223) into the mathematical model, calculate the compensation voltage of the piezoelectric ceramic stack actuator (223), and perform compensation.

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