Imaging system and method for detecting axial positioning of an aperture stop, and lithographic apparatus comprising the imaging system

By detecting the mark on the marking unit of the aperture diaphragm through the objective lens and the camera, the problem of calibrating the position of the illumination aperture diaphragm is solved, and high-precision automatic detection and calibration are achieved, ensuring the lighting quality in the semiconductor manufacturing process.

CN120491405BActive Publication Date: 2025-10-03SHANGHAI TUSHUANG PRECISION EQUIP CO LTD
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Patent Information

Application Number
CN202510991122.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-07-18
Publication Date
2025-10-03
Estimated Expiration
2045-07-18

AI Technical Summary

Technical Problem

Existing technologies are unable to verify and calibrate in real time whether the illumination aperture stop is located at the focal plane of the focusing lens, resulting in an inability to guarantee the performance of the illumination system and affecting the process effects of semiconductor manufacturing.

Method used

The objective lens and camera are used to detect the marks on the marking unit of the aperture stop. The axial positioning of the aperture stop is determined through image analysis and calibration instructions are generated to achieve automatic detection and fast calibration.

Benefits of technology

It realizes high-precision automated axial positioning detection of the aperture stop, ensuring good lighting conditions and process effects during semiconductor manufacturing.

✦ Generated by Eureka AI based on patent content.
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Abstract

The present disclosure relates to an imaging system and method for detecting the axial positioning of an aperture stop, and a lithography device including the imaging system. The imaging system for detecting the axial positioning of an aperture stop according to the present disclosure may include: a collecting lens; a condensing lens; an aperture stop arranged between the collecting lens and the condensing lens, wherein the aperture stop includes a marking unit; and an objective lens and a camera arranged after the condensing lens, wherein the objective lens and the camera are used to detect the markings on the marking unit. The imaging system according to the present disclosure uses an objective lens and a camera to detect the markings on the marking unit of the aperture stop, and determines the axial positioning of the aperture stop and / or generates calibration instructions for the aperture stop through the detected image. The imaging system according to the present disclosure conveniently replaces the aperture stop on the basis of the original imaging system to realize automatic detection and rapid calibration of the axial positioning of the aperture stop.
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