Single crystal furnace cavity furnace cover structure for chip production and manufacturing method
By introducing a heat-absorbing ring, spiral exhaust pipe and staggered fin design into the single crystal furnace cavity cover structure, the problem of heat waste when high-temperature steam is discharged from the single crystal furnace is solved, and waste heat recovery and steam flow efficiency are improved.
CN120608318APending Publication Date: 2025-09-09JIANGSU JINGCHENG INTELLIGENT EQUIPMENT CO LTD
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Patent Information
- Application Number
- CN202510977053.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-16
- Publication Date
- 2025-09-09
AI Technical Summary
Technical Problem
When the existing single crystal furnace discharges SiO vapor in a high-temperature environment, heat is seriously wasted and the steam flow efficiency is low.
Method used
A single crystal furnace cavity cover structure for chip production was designed, including a heat absorption ring, a spiral exhaust pipe, staggered fins and a turbine device. Through heat conduction and fluid dynamics design, the steam flow path is extended and turbulence is increased to recover waste heat.
Benefits of technology
It effectively reduces heat waste, improves steam flow efficiency and thermal energy utilization, and reduces energy consumption.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention belongs to the field of single crystal furnaces, and particularly relates to a single crystal furnace cavity furnace cover structure for chip production and a manufacturing method.The single crystal furnace cavity furnace cover structure comprises a base, and the top of the base is fixedly connected with a main furnace chamber; an auxiliary furnace chamber is arranged at the top of the main furnace chamber; a crystallization assembly is arranged in the auxiliary furnace chamber and is used for controlling seed crystals to be immersed into the high-temperature melt; a driving shaft is arranged on the inner wall of the main furnace chamber; the top of the driving shaft is fixedly connected with a graphite crucible; the inner wall of the graphite crucible is fixedly connected with a quartz crucible; a heater is fixedly connected to the interior of the main furnace chamber, and the graphite crucible is located in the heater; a guide cylinder is fixedly connected to the bottom of the inner wall of the main furnace chamber; high-temperature steam can heat a refrigerant medium in the heat absorption ring through heat conduction, the medium can be discharged out of the discharging pipe through the heat absorption ring after being heated by the steam, meanwhile, through the arrangement of the spiral section in the middle of the exhaust pipe, the steam flowing path can be prolonged, and then the heating time of the steam to the medium in the heat absorption ring is prolonged.
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