Laser detection device for detecting inner diameter of quartz tube

Abstract

The invention provides a laser detection device for detecting the inner diameter of a quartz tube, which relates to the technical field of laser detection and comprises a bearing plate, a vertical column, a fixed frame, a moving mechanism, a clamping and positioning mechanism, a detection mechanism, a lifting mechanism and a laser detection system, the mechanical structure realizes stable clamping and position adjustment of the quartz tube through the moving mechanism, the lifting mechanism and the clamping and positioning mechanism; the laser detection system comprises a laser detection module, a storage module and an output display module, and the inner diameter is calculated by preprocessing light spot images, extracting features, dynamically monitoring parameter stability and combining the laser triangulation principle. Through collaborative design of a mechanical structure and a laser detection system, the problems that a traditional device is unstable in positioning and insufficient in precision are solved, adaptability, high precision and intelligence of quartz tube inner diameter detection are achieved, detection efficiency and data reliability are improved, and the device is suitable for strict detection requirements of various precision fields for quartz tube quality.

Description

Technical Field

[0001] The present invention relates to the technical field of laser detection, and in particular to a laser detection device for detecting the inner diameter of a quartz tube. Background Art

[0002] Quartz tubes are widely used in precision applications such as semiconductor manufacturing, optical instruments, and the photovoltaic industry due to their high-temperature resistance, excellent light transmittance, and strong chemical stability. The accuracy of their inner diameter directly impacts assembly precision and performance, necessitating high-precision testing of the inner diameter.

[0003] The existing laser detection device has the following shortcomings: The positioning mechanism is simple in design and cannot stably clamp quartz tubes of different specifications (diameters and lengths). It is easy to shake during the detection process, resulting in large detection errors. The laser detection system lacks a dynamic parameter monitoring and calibration mechanism. Laser intensity fluctuations and unreasonable spot acquisition frame rates can affect data reliability. The inner diameter calculation does not fully consider the refraction effect of light and the offset of the light spot, resulting in insufficient accuracy; The inspection path is fixed and lacks adaptive encryption of inspection points in the distortion area, making it difficult to fully evaluate the quality of the quartz tube. Therefore, there is an urgent need for a laser detection device that can adapt to quartz tubes of multiple specifications, has high detection accuracy and high intelligence. Summary of the Invention

[0004] The purpose of the present invention is to solve the defects mentioned in the above background technology and provide a laser detection device for detecting the inner diameter of a quartz tube.

[0005] In order to solve the above technical problems, the present invention provides a laser detection device for detecting the inner diameter of a quartz tube, comprising a supporting plate, a column, a fixed frame, a moving mechanism, a clamping and positioning mechanism, a detection mechanism, a lifting mechanism, and a laser detection system, wherein the column is fixedly connected to one side of the upper portion of the supporting plate, the fixed frame is fixedly connected to the middle portion of the upper end of the supporting plate, the moving mechanism is installed in the fixed frame, and the clamping and positioning mechanism is assembled on the moving mechanism; the lifting mechanism is installed on the column, and the detection mechanism is installed on the lifting mechanism; the detection mechanism comprises an electric telescopic rod fixedly installed on one side of a lifting seat, the telescopic end of the electric telescopic rod is fixedly connected to an L-shaped positioning frame, a laser detector is installed on the L-shaped positioning frame, and a detection port is provided at the middle portion of the lower end of the laser detector, which passes through the L-shaped positioning frame; The laser detection system includes a laser detection module, a storage module, and an output display module; The laser detection module includes a laser preprocessing unit, a laser analysis unit, a dynamic monitoring unit, and an inner diameter calculation unit; The laser preprocessing unit is used to perform preprocessing operations on the spot image data; wherein the preprocessing operations specifically include: removing image noise through Gaussian filtering, extracting the edge contour of the spot through the Canny edge detection algorithm, and optimizing edge continuity through morphological operations; The laser analysis unit is used to extract the features of the pre-processed image, including: identifying the center coordinates of the light spot, calculating the light spot offset, and analyzing the degree of light spot shape distortion; The dynamic monitoring unit tracks the stability of detection parameters in real time, including the fluctuation evaluation value of laser intensity and the frame rate of light spot acquisition; The inner diameter calculation unit calculates the inner diameter based on the characteristic data of the laser analysis unit in combination with the laser triangulation principle; The storage module is used to store detection data and related information; the output display module is used to display the information in the storage module.

[0006] Preferably, the present invention further comprises a data acquisition module, which is electrically connected to the laser detector in the detection mechanism, and its working process includes: Image acquisition: The built-in image acquisition component of the laser detector captures the spot image formed by the laser beam reflected by the inner wall of the quartz tube in real time; Parameter acquisition: Synchronously collect the laser emission angle, laser emission intensity, and detection position coordinates fed back by the moving mechanism and lifting mechanism during laser emission; Data integration and transmission: The collected spot images, laser parameters and position coordinates are time-stamped and synchronously integrated to form a complete raw data set, which is then transmitted to the laser detection module for processing.

[0007] Preferably, the lifting mechanism includes positioning slots vertically opened on both sides of one end of the column in the vertical direction, a linear motor is vertically installed in the positioning slot on one side, a lifting seat is slidably installed on the linear motor and the column, and a limit plate is fixedly installed on the top of the column.

[0008] Preferably, the moving mechanism includes guide rods fixedly installed horizontally on both sides of the fixed frame, a first screw is rotatably installed between the guide rods, a second servo motor is installed on the fixed frame at one end of the first screw, the output end of the second servo motor passes through the fixed frame and is clamped at one end of the first screw, a first movable plate is sleeved on the first screw and the guide rod, and the first movable plate and the first screw are connected by threads.

[0009] Preferably, a fixed block is fixedly installed on the upper end of the first movable plate, a groove is opened downwardly at the upper end of the fixed block, a second screw is horizontally installed in the groove, a first servo motor is installed on the fixed block at one end of the second screw, an output end of the first servo motor passes through the fixed block and is clamped at one end of the second screw, a movable seat is connected to the second screw by a thread, and the movable seat is installed in the groove opened in the fixed block.

[0010] Preferably, the clamping and positioning mechanism includes a clamping groove provided on the movable seat, clamping blocks are installed oppositely on both sides of the clamping groove, connecting holes are provided oppositely at the lower ends of the clamping blocks, and telescopic springs are fixedly installed in the connecting holes between the clamping blocks.

[0011] Preferably, the laser analysis unit is used to extract features of the pre-processed image, and the specific extraction steps are as follows: The pre-processed spot edge contour is subjected to curve fitting, and the center of the fitting curve is used as the coordinate of the spot center. The fitting process is optimized iteratively. The iterative optimization process is as follows: after each fitting, the average distance between the actual contour and the fitted ellipse is calculated and recorded as the residual. If the residual is greater than the preset threshold, the contour point with the largest deviation is removed and the fitting is performed again. Establish a coordinate system with the center of the laser detection port as the origin, preset the theoretical axis coordinates of the quartz tube, compare the center coordinates of the light spot with the preset reference axis coordinates, and obtain the horizontal and vertical offsets of the light spot; Compare the actual spot edge contour with the ideal spot contour, calculate the morphological difference between the actual spot edge contour and the ideal ellipse contour, and calculate the shortest distance from each contour point to the ideal ellipse; the morphological difference includes the average distortion distance and the maximum distortion distance; By looking at the difference in contour morphology, determine whether there are bulges, depressions, or irregular deformations on the inner wall of the quartz tube, and mark the location of the distorted area: When the average distortion distance or the maximum distortion distance exceeds the corresponding preset distortion threshold, it is determined that there is spot shape distortion; by continuously setting a number of contour points whose shortest distance exceeds the threshold, the area is marked as the distortion area, and its position coordinates are the center coordinates of the distortion area, marking the abnormal position of the inner wall.

[0012] Preferably, the dynamic monitoring unit tracks the stability of the detection parameters in real time, specifically by the following steps: Laser intensity fluctuation monitoring: The intensity signal of the laser after reflection from the inner wall of the quartz tube is continuously collected at fixed time intervals and recorded as an intensity sequence. The changing trend of the intensity signal in the intensity sequence is analyzed in real time, and its fluctuation parameters, including the intensity mean, intensity standard deviation, and relative fluctuation coefficient, are calculated. All parameters in the fluctuation parameters are weighted and calculated with their preset weights to obtain a fluctuation assessment value. When the fluctuation assessment value is greater than the preset stability range threshold, the laser intensity fluctuation is determined to be abnormal, triggering the automatic calibration mechanism of the laser source. The automatic calibration mechanism is used to restore the intensity to a stable state by adjusting the driving current of the laser emitter. Adjustment of the light spot acquisition frame rate: the initial acquisition frame rate is set according to the nominal length of the quartz tube, and the first acquisition frame rate and the second acquisition frame rate are set according to the initial acquisition frame rate, wherein the initial acquisition frame rate is smaller than the first acquisition frame rate and smaller than the second acquisition frame rate; Region identification and frame rate adjustment: when the distance between the detection position and the two ends of the quartz tube is less than or equal to the preset ratio, it is determined to be an easily deformable end region, and the acquisition frame rate is increased to the first acquisition frame rate; Central area judgment: When the detection position is in the middle of the quartz tube and the laser analysis unit feedback spot shape is not distorted, the initial acquisition frame rate is used; When the laser analysis unit detects that the spot shape is distorted, the acquisition frame rate of the area is increased to the second acquisition frame rate, and the frame rate is maintained within the range of the set lengths before and after the distorted area; when the detection position leaves the end area or the distorted area, it is restored to the initial acquisition frame rate.

[0013] Preferably, the inner diameter calculation unit calculates the inner diameter based on the characteristic data of the laser analysis unit in combination with the principle of laser triangulation, specifically: Collect the laser emission angle output by the laser analysis unit, the vertical distance from the center of the detection port of the laser detector 6 to the axis of the quartz tube, the horizontal offset of the center of the light spot perpendicular to the axis of the quartz tube, and the refractive index of the quartz material; A geometric model is established based on the principle of laser triangulation. After the laser beam is emitted from the detection port, it is reflected by the inner wall of the quartz tube to form a light spot. The center offset of the light spot is directly related to the position of the reflection point on the inner wall. The light spot offset is converted into the inner diameter size through the geometric relationship: In the ideal case of ignoring the refraction effect, the radius of the quartz tube is determined by the laser emission angle and distance. Spot offset correction: when there is a horizontal offset in the center of the spot, the change in the position of the reflection point leads to radius correction; Refraction effect correction: when the laser passes through the interface between the quartz tube and the air, refraction occurs. According to the law of refraction, the actual radial size needs to be corrected by the refractive index. The inner diameter of the quartz tube is calculated based on the vertical distance, the horizontal offset of the center of the light spot, the laser emission angle, and the refractive index of the quartz material.

[0014] Preferably, the present invention further includes a position calibration module; the working process of the position calibration module includes: Obtain the horizontal and vertical offsets of the light spot and calculate the total offset. Set an allowable deviation threshold. When the total offset is greater than the preset allowable deviation threshold, it is determined to be an excessive offset and trigger the offset calibration mechanism. When the total offset is less than or equal to the preset allowable deviation threshold, the position is determined to be qualified. When the offset calibration mechanism is triggered, the adjustment amount is calculated through the proportional adjustment algorithm to drive the moving / lifting mechanism to correct the position; Through factory calibration optimization, balance the adjustment speed and stability to set the proportional adjustment coefficient; Calculate the horizontal direction adjustment amount and the vertical direction adjustment amount respectively according to the horizontal direction adjustment amount and the vertical direction adjustment amount; The horizontal movement mechanism is controlled according to the horizontal adjustment amount to correct the radial relative position of the detection system and the quartz tube. The lifting mechanism is controlled according to the vertical adjustment amount to correct the axial relative position so that the center of the light spot is close to the theoretical reference. After each adjustment, the following steps are repeated: the laser analysis unit re-collects the light spot and calculates the new horizontal and vertical adjustment amounts and the total offset; the calibration and adjustment steps are repeated until the total offset is less than or equal to the preset allowable deviation threshold, at which point the adjustment is stopped and the final position parameters are recorded; the number of calibration repetitions is recorded. If the number of calibration repetitions exceeds the preset number, it is determined that the mechanical structure is stuck or the positioning is abnormal, and an equipment alarm signal is generated; The length of the quartz tube is obtained, and the initial detection interval is preset to obtain the number of detection points, where the coordinates of the detection points are evenly distributed along the axial direction of the quartz tube. When there is a distortion in the shape of the light spot, the distorted area is encrypted and expanded, and a set length distance is extended before and after the center coordinate of the distorted area to form an encrypted area. The detection interval of the encrypted area is adjusted to a second detection interval; the second detection interval is smaller than the initial detection interval.

[0015] Compared with related technologies, the laser detection device for detecting the inner diameter of a quartz tube provided by the present invention has the following beneficial effects: 1. The clamping block and telescopic spring in the clamping and positioning mechanism adapt to quartz tubes of varying diameters, leveraging spring force for stable clamping and preventing shaking during testing. Furthermore, the coordinated adjustment of the moving and lifting mechanisms precisely adjusts the relative position of the quartz tube and the testing mechanism, resolving the issue of unstable positioning of quartz tubes of various specifications encountered with traditional devices and enhancing testing versatility.

[0016] 2. The laser detection system optimizes the spot image through preprocessing and combines ellipse fitting and iterative optimization to improve feature extraction accuracy. Refraction correction and offset compensation are introduced into the inner diameter calculation. The dynamic monitoring unit calibrates laser intensity fluctuations and adjusts the frame rate in real time to reduce the interference of environmental and equipment factors on the detection results and ensure data accuracy.

[0017] 3. The position calibration module automatically corrects the spot offset through closed-loop control, and the detection path is adaptively encrypted according to the distortion area, reducing manual intervention; the storage and output module realizes data traceability and intuitive display, and promptly alarms in case of abnormalities, thereby improving detection efficiency and quality control capabilities.

[0018] In summary, the present invention achieves adaptability, high precision, and intelligent detection of the inner diameter of quartz tubes through the coordinated design of the mechanical structure and the laser detection system. It not only solves the problems of unstable positioning and insufficient precision of traditional devices, but also improves detection efficiency and data reliability through automated processes. It is suitable for the strict detection requirements of quartz tube quality in various precision fields. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A perspective view of a first embodiment of a laser detection device for detecting the inner diameter of a quartz tube provided by the present invention; Figure 2 for Figure 1 A perspective view of the other side is shown; Figure 3 for Figure 1 An enlarged view of the structure of section A is shown; Figure 4 for Figure 1 The schematic diagram of the top cross-sectional structure shown; Figure 5 This is a module connection diagram of the laser detection system in Example 2 of a laser detection device for detecting the inner diameter of a quartz tube provided by the present invention.

[0020] In the figure, the numbers 1, support plate; 2, column; 3, lifting seat; 4, limit plate; 5, electric telescopic rod; 6, laser detector; 7, fixed frame; 8, guide rod; 9, first screw; 10, first movable plate; 12, fixed block; 13, second screw; 14, first servo motor; 15, clamping block; 16, movable seat; 17, linear motor; 18, telescopic spring; 19, second servo motor. DETAILED DESCRIPTION

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] The terms used in this disclosure are for the purpose of describing specific embodiments only and are not intended to limit the disclosure. As used in this disclosure and the appended claims, the singular forms "group," "class," and "the" are intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

[0023] It should be understood that although the terms first, second, third, etc. may be used in this disclosure to describe various information, such information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this disclosure, first information may also be referred to as second information, and similarly, second information may also be referred to as first information. Depending on the context, the word "if" as used herein may be interpreted as "at the time of" or "when" or "in response to determining." Example 1

[0024] Please refer to Figure 1-Figure 3 A laser detection device for detecting the inner diameter of a quartz tube comprises a supporting plate 1, a column 2, a fixed frame 7, a moving mechanism, a clamping and positioning mechanism, a detection mechanism, a lifting mechanism and a laser detection system. The column 2 is fixedly connected to one side of the upper portion of the supporting plate 1, the fixed frame 7 is fixedly connected to the middle portion of the upper end of the supporting plate 1, the moving mechanism is installed in the fixed frame 7, the clamping and positioning mechanism is assembled on the moving mechanism and is used to clamp the quartz tube; the lifting mechanism is installed on the column 2, and the detection mechanism is installed on the lifting mechanism, located above the clamping and positioning mechanism, and is used to emit laser light and collect reflected light spots; the detection mechanism comprises an electric telescopic rod 5 fixedly installed on one side of a lifting seat 3, the telescopic end of the electric telescopic rod 5 is fixedly connected to an L-shaped positioning frame, a laser detector 6 is installed on the L-shaped positioning frame, and a detection port is provided at the middle portion of the lower end of the laser detector 6 which passes through the L-shaped positioning frame; In this application, the lifting mechanism includes positioning grooves vertically opened on both sides of the vertical direction of one end of the column 2, a linear motor 17 is vertically installed in the positioning groove on one side, and a lifting seat 3 is installed on the linear motor 17 and the column 2 for sliding movement, and a limiting plate 4 is fixedly installed on the top of the column 2.

[0025] In the present application, the moving mechanism includes guide rods 8 fixedly installed horizontally on both sides of the fixed frame 7, a first screw 9 is rotatably installed between the guide rods 8, a second servo motor 19 is installed on the fixed frame 7 at one end of the first screw 9, the output end of the second servo motor 19 passes through the fixed frame 7 and is clamped at one end of the first screw 9, a first moving plate 10 is sleeved on the first screw 9 and the guide rod 8, and the first moving plate 10 and the first screw 9 are connected by threads.

[0026] In the present application, a fixed block 12 is fixedly installed on the upper end of the first movable plate 10, and a groove is opened downwardly at the upper end of the fixed block 12, in which a second screw 13 is horizontally installed. A first servo motor 14 is installed on the fixed block 12 at one end of the second screw 13, and the output end of the first servo motor 14 passes through the fixed block 12 and is clamped at one end of the second screw 13. A movable seat 16 is connected to the second screw 13 through a thread, and the movable seat 16 is installed in the groove opened in the fixed block 12.

[0027] In this application, the clamping and positioning mechanism includes a clamping groove opened on the movable seat 16, and clamping blocks 15 are installed on both sides of the clamping groove. The lower ends of the clamping blocks 15 are oppositely opened with connecting holes, and telescopic springs 18 are fixedly installed in the connecting holes between the clamping blocks 15. Example 2

[0028] Please refer to Figure 4 As shown, based on the laser detection device for detecting the inner diameter of a quartz tube provided in Example 1 of this application, Example 2 of this application proposes another laser detection system for detecting the inner diameter of a quartz tube. Example 2 is merely a preferred embodiment of Example 1, and the implementation of Example 2 will not affect the independent implementation of Example 1.

[0029] Specifically, the laser detection system for detecting the inner diameter of a quartz tube provided in Example 2 of the present application is different in that: The laser detection system includes a laser detection module, a position calibration module, a storage module, and an output display module; The laser detection module includes a laser pre-processing unit, a laser analysis unit, a dynamic monitoring unit, and an inner diameter calculation unit; The laser preprocessing unit is used to perform preprocessing operations on the spot image data; the preprocessing operations specifically include: removing image noise through Gaussian filtering, extracting the spot edge contour through the Canny edge detection algorithm, and optimizing edge continuity through morphological operations; The laser analysis unit is used to extract the features of the pre-processed image, including: identifying the center coordinates of the light spot, calculating the light spot offset, and analyzing the degree of light spot shape distortion; The dynamic monitoring unit tracks the stability of detection parameters in real time, including the fluctuation evaluation value of laser intensity and the frame rate of light spot acquisition; The inner diameter calculation unit calculates the inner diameter based on the characteristic data of the laser analysis unit and the principle of laser triangulation; The storage module is used to store detection data and related information; the output display module is used to display the information in the storage module.

[0030] This laser inspection system utilizes a modular design, integrating multiple units to achieve automated and precise internal diameter inspection of quartz tubes: a preprocessing unit optimizes image quality, an analysis unit extracts key features, a dynamic monitoring unit ensures parameter stability, an internal diameter calculation unit accurately calculates values ​​using laser principles, and a storage and display module enables data traceability and visualization. Its benefits lie in the clear division of labor and close linkage between modules, which not only improves inspection accuracy through algorithm optimization but also reduces manual intervention through automated processes.

[0031] In the present application, a data acquisition module is also included. The data acquisition module is electrically connected to the laser detector 6 in the detection mechanism, and its working process includes: Image acquisition: The built-in image acquisition component of the laser detector 6 captures the spot image formed by the laser beam reflected by the inner wall of the quartz tube in real time; Parameter acquisition: Synchronously collect the laser emission angle, laser emission intensity, and detection position coordinates fed back by the moving mechanism and lifting mechanism during laser emission; Data integration and transmission: The collected spot images, laser parameters and position coordinates are time-stamped and synchronously integrated to form a complete original data set, which is then transmitted to the laser detection module for processing. The data acquisition module is linked with the laser detector 6 to achieve synchronous acquisition and integration of the spot images, laser parameters and detection positions, providing a complete and time-consistent original data basis for subsequent detection and analysis, ensuring the continuity of the detection chain and data reliability.

[0032] In this application, the laser analysis unit is used to extract features of the pre-processed image. The specific extraction steps are as follows: Perform curve fitting on the pre-processed edge profile of the light spot, use the center of the fitting curve as the center coordinate of the light spot, and iterate and optimize the fitting process to improve the recognition accuracy of the center coordinate; The curve fitting specifically adopts elliptic curve fitting, and the elliptic equation is: , and then use the least square method to minimize the sum of the squares of the distances from the contour point to the ellipse, that is, Minimum, and introduce constraints , the constraints are used to avoid multiple solutions, where Represents the coordinates of the i-th point on the edge contour of the spot, which is extracted from the spot image using the Canny edge detection algorithm. n is the number of contour points. A, B, C, D, E, and F represent the coefficients of the preset elliptical curve fitting, which are used to define the geometric shape of the ellipse. After fitting is completed, the coordinates of the spot center are calculated using the ellipse parameters. , the formula is: ; Then, the iterative optimization fitting process is as follows: after each fitting, the average distance between the actual contour and the fitted ellipse is calculated and recorded as the residual. If the residual is greater than the preset threshold, the contour point with the largest deviation is removed and the fitting is repeated; Establish a coordinate system with the center of the laser detection port as the origin, and preset the coordinates of the quartz tube theoretical axis as , the center coordinates of the spot Compare with the preset reference axis coordinates, and obtain the horizontal and vertical offsets of the light spot, which are recorded as 、 , the formula is ; Compare the actual spot edge contour with the ideal spot contour, calculate the morphological difference between the actual spot edge contour and the ideal ellipse contour (the above-mentioned fitted ellipse), and calculate the shortest distance from each contour point to the ideal ellipse. Among them, the morphological differences include the average distortion distance, the maximum distortion distance, and the average distortion distance. The formula is , maximum distortion distance The formula is ; By looking at the difference in contour morphology, determine whether there are bulges, depressions, or irregular deformations on the inner wall of the quartz tube, and mark the location of the distorted area: When the average distortion distance or the maximum distortion distance exceeds the corresponding preset distortion threshold, it is determined that there is spot shape distortion; By continuously setting the shortest distance of the number of contour points The area where all the values ​​exceed the threshold is marked as the distorted area, and its position coordinates are the center coordinates of the distorted area. , mark the abnormal position of the inner wall; It should be noted that the above parameters are all based on the spot image data collected by the laser detector 6, and are gradually acquired through image optimization of the laser preprocessing unit and feature extraction and calculation of the laser analysis unit, ultimately providing core data support for inner diameter calculation, position calibration and quality judgment; the parameter acquisition process is deeply related to the positioning accuracy of the equipment's mechanical structure (such as the clamping positioning mechanism and the moving mechanism) and the algorithm accuracy of the laser detection module, which together ensure the accuracy of the detection results.

[0033] In this application, the dynamic monitoring unit tracks the stability of the detection parameters in real time, specifically by the following steps: Laser intensity fluctuation monitoring: The intensity signal of the laser reflected from the inner wall of the quartz tube is continuously collected at fixed time intervals and recorded as an intensity sequence. , k represents the number of acquisitions per unit time, and the intensity signal acquired at the jth time is recorded as ; Analyze the changing trend of the intensity signal in the intensity sequence in real time and calculate its fluctuation parameters, including the intensity mean, intensity standard deviation, and relative fluctuation coefficient. Perform weighted calculation on all the parameters in the fluctuation parameters and their preset weights to obtain the fluctuation assessment value. The specific calculation formula of the fluctuation parameters is as follows: Calculate the average intensity per unit time using the formula: ; Calculate the intensity standard deviation using the formula: ; Calculate the relative volatility coefficient using the formula: ; When the fluctuation assessment value is greater than the preset stability range threshold, the laser intensity fluctuation is determined to be abnormal, triggering the automatic calibration mechanism of the laser source; the automatic calibration mechanism is used to restore the intensity to a stable state by adjusting the driving current of the laser emitter; Adjustment of the light spot acquisition frame rate: Dynamically adjust the light spot acquisition frame rate according to the detection position characteristics of the quartz tube and the feedback results of the laser analysis unit. Specifically: Set the initial acquisition frame rate according to the nominal length L of the quartz tube , and setting a first acquisition frame rate and a second acquisition frame rate according to the initial acquisition frame rate, wherein the initial acquisition frame rate is less than the first acquisition frame rate and less than the second acquisition frame rate; Region identification and frame rate adjustment: when the distance between the detection position and the two ends of the quartz tube is less than or equal to the preset ratio, it is determined to be an easily deformable end region, and the acquisition frame rate is increased to the first acquisition frame rate; Central area judgment: When the detection position is in the middle of the quartz tube, specifically when the distance between both ends is greater than L×10% and the laser analysis unit feedback spot shape is not distorted, the initial acquisition frame rate is used. ; When the laser analysis unit detects that the spot shape is distorted, the acquisition frame rate of the area is increased to a second acquisition frame rate, and the frame rate is maintained within a range of a set length extending before and after the distorted area; When the detection position leaves the end area or distortion area, it returns to the initial acquisition frame rate ; The dynamic monitoring unit tracks laser intensity fluctuations in real time and dynamically adjusts the acquisition frame rate. It ensures laser signal stability through multi-parameter weighted evaluation and adapts the frame rate according to the characteristics of different areas of the quartz tube. It reduces redundant data while ensuring detection accuracy, realizes adaptive optimization of the detection process, and balances data quality and efficiency.

[0034] In this application, the inner diameter calculation unit calculates the inner diameter based on the characteristic data of the laser analysis unit in combination with the principle of laser triangulation, specifically: Collect the laser emission angle output by the laser analysis unit , the vertical distance U from the center of the detection port of the laser detector 6 to the axis of the quartz tube, the horizontal offset of the center of the light spot perpendicular to the axis of the quartz tube and the refractive index e of the quartz material; A geometric model is established based on the principle of laser triangulation. After the laser beam is emitted from the detection port, it is reflected by the inner wall of the quartz tube to form a light spot. The center offset of the light spot is directly related to the position of the reflection point on the inner wall. The light spot offset is converted into the inner diameter size through the geometric relationship, specifically: Basic geometric relationship, assuming that the refraction effect is ignored, the radius R of the quartz tube is determined by the laser emission angle and distance U, satisfying ; Spot offset correction, when there is a horizontal offset in the center of the spot When , the change in the position of the reflection point leads to a radius correction, and the correction amount is ;in Used to project the two-dimensional offset to the radial direction; Refraction effect correction: When the laser passes through the interface between the quartz tube and the air, it is refracted. According to the law of refraction, the actual radial size needs to be corrected by the refractive index. The correction coefficient is 1 / e. Through the vertical distance U, the horizontal offset of the center of the spot , laser emission angle , the refractive index e of the quartz material is used to calculate the inner diameter G of the quartz tube. The formula is: ;in Indicates calculating the inner diameter from the radius. The inner diameter calculation unit integrates parameters such as the laser emission angle, vertical distance, spot offset, and refractive index, and constructs a geometric model based on the principle of laser triangulation. The model then deduces basic geometric relationships, corrects for spot offset, and corrects for refraction effects to accurately calculate the inner diameter. By considering the effects of spot offset and light refraction, the limitations of the ideal model are overcome, significantly improving detection accuracy.

[0035] The present invention also includes a position calibration module; the working process of the position calibration module includes: The horizontal and vertical offsets of the light spot are recorded as 、 , calculate the total deviation E, the formula is ; Set the allowable deviation threshold. When the total offset is greater than the preset allowable deviation threshold, it is determined that the offset exceeds the standard and the offset calibration mechanism is triggered; when the total offset is less than or equal to the preset allowable deviation threshold, the position is determined to be qualified; When the offset calibration mechanism is triggered, the adjustment amount is calculated through the proportional adjustment algorithm to drive the moving / lifting mechanism to correct the position: Through factory calibration optimization, balance the adjustment speed and stability to set the proportional adjustment coefficient ; Calculate the horizontal adjustment amount and vertical adjustment amount according to the horizontal adjustment amount and vertical adjustment amount respectively. Vertical adjustment The calculation formula is , ; in accordance with Control the horizontal movement mechanism and correct the radial relative position of the detection system and the quartz tube. Control the lifting mechanism and correct the axial relative position to make the center of the light spot closer to the theoretical reference; After each adjustment, repeat the following steps: The laser analysis unit re-collects the light spot and calculates the new horizontal adjustment amount, vertical adjustment amount and total offset; Repeat the calibration and adjustment steps until the total offset is less than or equal to the preset allowable deviation threshold. Then stop adjusting and record the final position parameters. Record the number of repeated calibrations. If the number of repeated calibrations exceeds the preset number, it is determined that the mechanical structure is stuck or the positioning is abnormal, and an equipment alarm signal is generated. The equipment alarm signal is used to prompt operation and maintenance personnel to investigate. Get the length H of the quartz tube and preset the initial detection interval d, then the number of detection points V is ;in Indicates rounding down, and the detection point coordinates are evenly distributed along the axial direction of the quartz tube; When there is spot shape distortion, the distorted area is encrypted and expanded, and a set length distance is extended before and after the center coordinates of the distorted area to form an encrypted area, and the detection interval of the encrypted area is adjusted to a second detection interval; wherein the second detection interval is smaller than the initial detection interval.

[0036] The position calibration module determines whether to trigger calibration by calculating the total offset of the light spot, adopts a proportional adjustment algorithm to drive the mechanism to correct the position, and combines closed-loop feedback to ensure that the offset is within the allowable range. At the same time, the detection points are planned according to the length of the quartz tube and the distortion area is encrypted, realizing automatic and accurate position calibration. By dynamically adjusting the distribution of detection points, the detection of abnormal areas is improved.

[0037] Other embodiments of the present invention will readily occur to those skilled in the art after considering the specification and practicing the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the present invention that follow the general principles of the invention and include common knowledge or customary techniques in the art not disclosed herein. The description and examples are to be considered as exemplary only, with the true scope and spirit of the invention being indicated by the following claims.

[0038] It should be understood that the present invention is not limited to the exact construction described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present invention is limited only by the appended claims.

Claims

1. A laser detection device for detecting the inner diameter of a quartz tube, comprising a supporting plate (1), a column (2), a fixing frame (7), a moving mechanism, a clamping and positioning mechanism, a detection mechanism, a lifting mechanism and a laser detection system, characterized in that: The column (2) is fixed to one side of the upper portion of the support plate (1), the fixed frame (7) is in the middle of the upper end of the support plate (1), the moving mechanism is installed in the fixed frame (7), and the clamping and positioning mechanism is equipped on the moving mechanism; the lifting mechanism is installed on the column (2), and the detection mechanism is installed on the lifting mechanism; the detection mechanism has an electric telescopic rod (5) fixed to one side of the lifting seat (3), the telescopic end of which is connected to the L-shaped positioning frame, and the frame is equipped with a laser detector (6); The laser detection system includes a laser detection module, a storage module, and an output display module; the laser detection module includes a laser preprocessing unit, a laser analysis unit, a dynamic monitoring unit, and an inner diameter calculation unit; The laser pre-processing unit is used to pre-process the spot image data: Gaussian filtering is used to remove image noise, Canny edge detection algorithm is used to extract the edge contour of the spot, and morphological operation is used to optimize edge continuity; The laser analysis unit is used to extract the features of the pre-processed image, including: identifying the center coordinates of the light spot, calculating the light spot offset, and analyzing the degree of light spot shape distortion; The dynamic monitoring unit tracks the stability of detection parameters in real time, including the fluctuation evaluation value of laser intensity and the frame rate of light spot acquisition; The inner diameter calculation unit calculates the inner diameter based on the characteristic data of the laser analysis unit in combination with the laser triangulation principle; The storage module is used to store detection data and related information; the output display module is used to display the information in the storage module.

2. A laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: It also includes a data acquisition module, which is electrically connected to the laser detector (6) in the detection mechanism, and its working process includes: Image acquisition: The built-in image acquisition component of the laser detector (6) is used to capture the spot image formed by the laser beam reflected by the inner wall of the quartz tube in real time; Parameter acquisition: Synchronously collect the laser emission angle, laser emission intensity, and detection position coordinates fed back by the moving mechanism and lifting mechanism during laser emission; Data integration and transmission: The collected spot images, laser parameters and position coordinates are time-stamped and synchronously integrated to form a complete raw data set, which is then transmitted to the laser detection module for processing.

3. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The lifting mechanism includes positioning slots vertically provided on both sides of one end of the column (2) in the vertical direction, a linear motor (17) is vertically installed in the positioning slot on one side, a lifting seat (3) is slidably installed on the linear motor (17) and the column (2), and a limiting plate (4) is fixedly installed on the top of the column (2).

4. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The moving mechanism comprises guide rods (8) fixedly mounted horizontally on both sides of the interior of the fixed frame (7), a first screw rod (9) being rotatably mounted between the guide rods (8), a second servo motor (19) being mounted on the fixed frame (7) at one end of the first screw rod (9), an output end of the second servo motor (19) passing through the fixed frame (7) and being clamped at one end of the first screw rod (9), a first moving plate (10) being sleeved on the first screw rod (9) and the guide rods (8), and the first moving plate (10) being connected to the first screw rod (9) via a threaded connection.

5. The laser detection device for detecting the inner diameter of a quartz tube according to claim 4, characterized in that: A fixed block (12) is fixedly mounted on the upper end of the first movable plate (10), a groove is downwardly provided on the upper end of the fixed block (12), a second screw rod (13) is horizontally mounted in the groove, a first servo motor (14) is mounted on the fixed block (12) at one end of the second screw rod (13), an output end of the first servo motor (14) passes through the fixed block (12) and is clamped at one end of the second screw rod (13), a movable seat (16) is connected to the second screw rod (13) by a thread, and the movable seat (16) is mounted in the groove provided in the fixed block (12).

6. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The clamping and positioning mechanism comprises a clamping groove provided on a movable seat (16), clamping blocks (15) being relatively installed on both sides of the clamping groove, connecting holes being relatively opened at the lower ends of the clamping blocks (15), and telescopic springs (18) being fixedly installed in the connecting holes between the clamping blocks (15).

7. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The laser analysis unit is used to extract features of the pre-processed image. The specific extraction steps are as follows: The pre-processed spot edge contour is subjected to curve fitting, and the center of the fitting curve is used as the coordinate of the spot center. The fitting process is optimized iteratively. The iterative optimization process is as follows: after each fitting, the average distance between the actual contour and the fitted ellipse is calculated and recorded as the residual. If the residual is greater than the preset threshold, the contour point with the largest deviation is removed and the fitting is performed again. Establish a coordinate system with the center of the laser detection port as the origin, preset the theoretical axis coordinates of the quartz tube, compare the center coordinates of the light spot with the preset reference axis coordinates, and obtain the horizontal and vertical offsets of the light spot; Compare the actual spot edge contour with the ideal spot contour, calculate the morphological difference between the actual spot edge contour and the ideal ellipse contour, and calculate the shortest distance from each contour point to the ideal ellipse; the morphological difference includes the average distortion distance and the maximum distortion distance; By looking at the difference in contour morphology, determine whether there are bulges, depressions, or irregular deformations on the inner wall of the quartz tube, and mark the location of the distorted area: When the average distortion distance or the maximum distortion distance exceeds the corresponding preset distortion threshold, it is determined that there is spot shape distortion; by continuously setting a number of contour points whose shortest distance exceeds the threshold, the area is marked as the distortion area, and its position coordinates are the center coordinates of the distortion area, marking the abnormal position of the inner wall.

8. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The dynamic monitoring unit tracks the stability of the detection parameters in real time, specifically by the following steps: Laser intensity fluctuation monitoring: The intensity signal of the laser reflected from the inner wall of the quartz tube is continuously collected at fixed time intervals and recorded as an intensity sequence. The changing trend of the intensity signal in the intensity sequence is analyzed in real time, and its fluctuation parameters are calculated, including the intensity mean, intensity standard deviation, and relative fluctuation coefficient. A fluctuation evaluation value is obtained by weighting all parameters in the fluctuation parameter with their preset weights. When the fluctuation evaluation value is greater than the preset stability range threshold, the laser intensity fluctuation is determined to be abnormal, triggering the automatic calibration mechanism of the laser source. The automatic calibration mechanism is used to restore the intensity to a stable state by adjusting the driving current of the laser emitter. Adjustment of the light spot acquisition frame rate: the initial acquisition frame rate is set according to the nominal length of the quartz tube, and the first acquisition frame rate and the second acquisition frame rate are set according to the initial acquisition frame rate, wherein the initial acquisition frame rate is smaller than the first acquisition frame rate and smaller than the second acquisition frame rate; Region identification and frame rate adjustment: when the distance between the detection position and the two ends of the quartz tube is less than or equal to the preset ratio, it is determined to be an easily deformable end region, and the acquisition frame rate is increased to the first acquisition frame rate; Central area judgment: When the detection position is in the middle of the quartz tube and the laser analysis unit feedback spot shape is not distorted, the initial acquisition frame rate is used; When the laser analysis unit detects that the spot shape is distorted, the acquisition frame rate of the area is increased to the second acquisition frame rate, and the frame rate is maintained within the range of the set lengths before and after the distorted area; when the detection position leaves the end area or the distorted area, it is restored to the initial acquisition frame rate.

9. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The inner diameter calculation unit calculates the inner diameter based on the characteristic data of the laser analysis unit in combination with the principle of laser triangulation measurement, specifically: Collect the laser emission angle output by the laser analysis unit, the vertical distance from the center of the detection port of the laser detector (6) to the axis of the quartz tube, the horizontal offset of the center of the light spot perpendicular to the axis of the quartz tube, and the refractive index of the quartz material; A geometric model is established based on the principle of laser triangulation. After the laser beam is emitted from the detection port, it is reflected by the inner wall of the quartz tube to form a light spot. The center offset of the light spot is directly related to the position of the reflection point on the inner wall. The light spot offset is converted into the inner diameter size through the geometric relationship: In the ideal case of ignoring the refraction effect, the radius of the quartz tube is determined by the laser emission angle and distance. Spot offset correction: when there is a horizontal offset in the center of the spot, the change in the position of the reflection point leads to radius correction; Refraction effect correction: when the laser passes through the interface between the quartz tube and the air, refraction occurs. According to the law of refraction, the actual radial size needs to be corrected by the refractive index. The inner diameter of the quartz tube is calculated based on the vertical distance, the horizontal offset of the center of the light spot, the laser emission angle, and the refractive index of the quartz material.

10. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: It also includes a position calibration module; the working process of the position calibration module includes: Obtain the horizontal and vertical offsets of the light spot and calculate the total offset. Set an allowable deviation threshold. When the total offset is greater than the preset allowable deviation threshold, it is determined to be an excessive offset and trigger the offset calibration mechanism. When the total offset is less than or equal to the preset allowable deviation threshold, the position is determined to be qualified. When the offset calibration mechanism is triggered, the adjustment amount is calculated through the proportional adjustment algorithm to drive the moving / lifting mechanism to correct the position; Through factory calibration optimization, balance the adjustment speed and stability to set the proportional adjustment coefficient; Calculate the horizontal direction adjustment amount and the vertical direction adjustment amount respectively according to the horizontal direction adjustment amount and the vertical direction adjustment amount; The horizontal movement mechanism is controlled according to the horizontal adjustment amount to correct the radial relative position of the detection system and the quartz tube. The lifting mechanism is controlled according to the vertical adjustment amount to correct the axial relative position so that the center of the light spot is close to the theoretical reference. After each adjustment, the following steps are repeated: the laser analysis unit re-collects the light spot and calculates the new horizontal and vertical adjustment amounts and the total offset; the calibration and adjustment steps are repeated until the total offset is less than or equal to the preset allowable deviation threshold, at which point the adjustment is stopped and the final position parameters are recorded; the number of calibration repetitions is recorded. If the number of calibration repetitions exceeds the preset number, it is determined that the mechanical structure is stuck or the positioning is abnormal, and an equipment alarm signal is generated; The length of the quartz tube is obtained, and the initial detection interval is preset to obtain the number of detection points, where the coordinates of the detection points are evenly distributed along the axial direction of the quartz tube. When there is a distortion in the shape of the light spot, the distorted area is encrypted and expanded, and a set length distance is extended before and after the center coordinate of the distorted area to form an encrypted area. The detection interval of the encrypted area is adjusted to a second detection interval; the second detection interval is smaller than the initial detection interval.

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