High-precision vacuum chamber modular assembly

Abstract

The invention discloses a high-precision vacuum chamber modular assembly, relates to the technical field of industrial equipment, and aims to overcome the defects of a traditional vacuum chamber in the aspects of keeping the vacuum degree constant and preventing gas leakage. The assembly comprises a thermal insulation seat, a communication chamber, upper and lower half bins, a dome, a voltage divider, a voltage regulating assembly, a first pipe group and a second pipe group. Through the design of the multi-stage vacuum cavity, accurate pressure regulation and control are realized, and the constant pressure of the vacuum chamber in a working state is ensured. Specifically, through cooperation of the pressure divider and the pressure regulating assembly, the system can maintain proper pressure difference among different vacuum cavities, and meanwhile, through opening and closing and opening degree regulation of the electromagnetic valve, the gas pressure in the vacuum chamber is automatically regulated and controlled, gas leakage is prevented, and the sealing effect is guaranteed. According to the scheme, efficient and stable pressure maintenance is realized through a closed-loop feedback control mechanism in combination with data of the real-time pressure sensor, and the use frequency of the vacuum pump is reduced, so that the energy consumption and the maintenance cost are reduced. According to the overall scheme, the operation safety and the performance stability of the vacuum chamber are improved, and the vacuum chamber is suitable for high-precision scientific research and industrial application.

Description

Technical Field

[0001] The present invention belongs to the technical field of industrial equipment, and in particular relates to a high-precision vacuum chamber modular assembly. Background Art

[0002] In many high-precision manufacturing and scientific research applications, vacuum chambers play a vital role as key environmental control equipment. They are typically used to create a sub-ambient pressure environment to prevent air from interfering with precision equipment or experimental procedures. To achieve this, the vacuum system typically requires a vacuum pump to extract air and maintain a set vacuum level. The performance of the vacuum chamber directly impacts the reliability of experimental results and the stability of the equipment, therefore, strict requirements are placed on its sealing properties and pressure control.

[0003] Traditional vacuum systems mostly rely on a single vacuum pump for gas extraction and pressure maintenance, an approach that has certain limitations. First, frequently starting and stopping the vacuum pump not only increases the system's energy consumption but can also cause pressure fluctuations in the system, affecting the stability of the vacuum chamber. Second, traditional pressure regulation methods typically rely on manual adjustment or relatively crude automatic control, making it difficult to achieve precise and continuous control of the pressure within the vacuum chamber. Furthermore, in some high-precision applications, the sealing of the system is extremely important; any gas leaks could lead to deviations in experimental results or cause environmental pollution.

[0004] To address these issues, researchers have proposed several improvements, such as multi-stage vacuum chamber designs and precise pressure control mechanisms. However, these solutions also face challenges in practical application. For example, controlling the pressure difference within a multi-stage vacuum chamber requires highly precise control equipment, increasing system complexity and cost. Therefore, ensuring the airtightness and pressure stability of the vacuum chamber while maintaining high system efficiency and low energy consumption has become a pressing issue in the field of vacuum technology.

[0005] This invention addresses the shortcomings of traditional vacuum systems by proposing an innovative modular vacuum chamber assembly. By incorporating a multi-stage vacuum cavity and a PID control algorithm, it achieves automatic pressure regulation during operation. This solution not only improves the sealing and stability of the vacuum chamber but also reduces energy consumption and maintenance costs, offering significant technical advantages and promising applications.

[0006] In view of this, the present invention is proposed. Summary of the Invention

[0007] To solve the above technical problems, the basic concept of the technical solution adopted by the present invention is: a high-precision vacuum chamber modular assembly, comprising: Warming seat; The communication chamber is fixedly connected to the lower surface of the heat preservation seat, and a piston is slidably fitted on the inner wall of the communication chamber; Upper half warehouse; Lower half warehouse; The upper and lower half chambers are sealed and fitted with each other on opposite surfaces, the lower half chamber is fixedly connected to the upper surface of the heat preservation seat, and a ball top is sealed and fixed on the upper surface of the upper half chamber; First tube group; Second tube group; The first tube group is connected to the inner wall of the communication chamber, the second tube group is connected to the top of the spherical top, and a solenoid valve is installed on opposite ends of the first tube group and the second tube group; Voltage divider; The voltage divider is fixedly connected to the inner wall of the heat preservation seat, the upper surface of the voltage divider is connected to the inner wall of the lower half chamber through the upper through-tube, and the lower surface of the voltage divider is connected to the lower surface of the inner wall of the communication chamber through the lower through-tube; Voltage regulating components; The pressure regulating assembly penetrates and rotates on the inner wall of the pressure divider to accurately control the upper and lower pressure differences of the pressure divider.

[0008] Preferably, the voltage divider includes a partition chamber fixed to the inner wall of the heat preservation seat, the upper surface of the partition chamber is connected to the bottom end of the upper through pipe, and the lower surface of the partition chamber is connected to the top end of the lower through pipe; The inner wall of the partition bin is fixedly connected to two side slides, the inner walls of the two side slides are fitted with a bottom magnetic block and a top magnetic block for sliding together, the lower surface of the bottom magnetic block is fixedly connected to a sealing gasket, the sealing gasket; The top magnetic block is fitted with the adjustment component.

[0009] Preferably, the first tube group includes a bottom tee connected to the communicating chamber, the upper surface of the bottom tee is connected with a straight-connecting pipe, and a bottom pressure gauge is installed on the left side, and the top of the straight-connecting pipe is connected to one side of the solenoid valve.

[0010] Preferably, the voltage regulating assembly includes two deflection plates fitted on the upper surface of the top magnetic block, the two deflection plates are fixedly connected to a torsion cylinder and a torsion rod, respectively, the left ends of the torsion cylinder and the torsion rod are both rotated through the inner wall of the partition chamber, and the torsion rod is slid through the inner wall of the torsion cylinder; The right ends of the torsion cylinder and the torsion rod are both fixed with torsion plates, and an adjusting screw is slid through the inner walls of the two torsion plates. The surface thread of the adjusting screw is matched with a nut. A pointing plate is provided at the bottom of the torsion plate, and a dial that matches the pointing plate is fixedly connected to one side of the heat preservation seat.

[0011] Preferably, the second tube group includes an interface tee connected to the top of the spherical top, one end of the interface tee is connected to a top tee, one end of the top tee is installed with a top pressure gauge, and the other end of the top tee is connected to one side of the solenoid valve.

[0012] Preferably, a sealing slide is fixedly connected to the inner wall of the piston, and the sealing slide slides axially and sealingly on the surface of the down pipe, and the bottom end of the down pipe is fixedly connected to the lower surface of the inner wall of the communicating chamber.

[0013] Preferably, the surfaces of the upper and lower half bins are provided with a plurality of mounting screws for connection, and the surfaces of the upper and lower half bins are provided with a reinforcement structure.

[0014] Preferably, a replacement head is provided on the lower surface of the communicating chamber, the replacement head is connected to the bottom end of the lower through pipe, a mounting seat is provided on the arc-shaped side wall of the communicating chamber, and a reset valve is installed on the surface of the communicating chamber.

[0015] Preferably, a plurality of through holes for gas circulation with the communication chamber are provided at the bottom end of the down pipe.

[0016] Beneficial effects: The beneficial effect of this solution lies in the fact that, through a highly integrated pressure-regulating component, solenoid valve control, and multi-stage vacuum chamber system, it achieves automatic regulation of the pressure within a high-precision vacuum chamber, ensuring that constant pressure within the vacuum chamber can be maintained during operation without the need for frequent activation of an external vacuum pump. The system employs a closed-loop feedback control mechanism, combined with real-time feedback from top and bottom pressure sensors, to precisely adjust the pressure differential between the primary, secondary, and tertiary vacuum chambers. By opening and closing the solenoid valves and adjusting their opening, the internal vacuum pressure is adjusted while maintaining internal gas leakage, effectively preventing the escape of trace amounts of reactive gas, and ensuring the safety of the operating environment and the sealing of the vacuum chamber. In particular, it avoids pressure instability caused by changes in external conditions, such as temperature fluctuations, ensuring that the vacuum chamber remains in the ideal set operating state during continuous operation. This innovative design not only improves the system's automation level but also significantly reduces energy consumption and maintenance costs.

[0017] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In the attached figure: Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 This is a schematic diagram of the structure of the present invention from another perspective; Figure 3 It is a schematic diagram of the three-dimensional cross-sectional structure of the present invention; Figure 4Schematic diagram of the three-dimensional cross-sectional structure of the voltage divider of the present invention; Figure 5 It is a schematic structural diagram of the cross section of the present invention; Figure 6 It is a schematic diagram of the three-dimensional cross-sectional structure of the heat preservation seat and the communicating chamber of the present invention; Figure 7 Schematic diagram of the explosion structure of the voltage divider of the present invention.

[0019] In the figure: 1. Insulation seat; 2. Connecting chamber; 3. Voltage divider; 31. Partition chamber; 32. Bottom magnetic block; 33. Top magnetic block; 34. Sealing gasket; 35. Side slide; 4. Pressure regulating assembly; 41. Torsion cylinder; 42. Torsion rod; 43. Deflection plate; 44. Torsion plate; 45. Adjusting screw; 46. Nut; 47. Pointing plate; 48. Dial; 5. First pipe group; 51. Bottom tee; 52. Direct connection pipe; 53. Bottom pressure gauge; 6. Second pipe group; 61. Interface tee; 62. Top tee; 63. Top pressure gauge; 7. Solenoid valve; 8. Dome; 9. Upper half chamber; 10. Lower half chamber; 11. Mounting screw; 12. Upper through pipe; 13. Lower through pipe; 14. Sealing slide; 15. Piston; 16. Through hole; 17. Mounting seat; 18. Replacement head; 19. Reset valve. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention.

[0021] like Figures 1 to 7 As shown, a high-precision vacuum chamber modular assembly includes a heat preservation seat 1; The communication chamber 2 is fixedly connected to the lower surface of the heat preservation seat 1, and a piston 15 is slidingly fitted on the inner wall of the communication chamber 2; The upper half chamber 9 and the lower half chamber 10 are sealed and fitted with each other. The lower half chamber 10 is fixedly connected to the upper surface of the heat preservation seat 1. The upper surface of the upper half chamber 9 is sealed and fixed with a ball top 8. The first tube group 5 is connected to the inner wall of the communication chamber 2, and the second tube group 6 is connected to the top of the spherical top 8. The first tube group 5 and the second tube group 6 have electromagnetic valves 7 installed on opposite ends. The voltage divider 3 is fixedly connected to the inner wall of the heat preservation seat 1. The upper surface of the voltage divider 3 is connected to the inner wall of the lower half chamber 10 through the upper through-tube 12. The lower surface of the voltage divider 3 is connected to the lower surface of the inner wall of the communication chamber 2 through the lower through-tube 13. The pressure regulating assembly 4 penetrates and rotates on the inner wall of the voltage divider 3 to accurately control the pressure difference between the upper and lower parts of the voltage divider 3 .

[0022] The program has made outstanding progress and played a significant role in the following areas: Through a multi-stage vacuum chamber design (primary, secondary, and tertiary) and precise pressure-regulating components, the solution enables precise control of pressure in different zones within the vacuum chamber. This design improves responsiveness to pressure changes within the chamber, ensuring the system maintains stable pressure under various operating conditions.

[0023] The system uses a solenoid valve 7 and a PID control algorithm to automatically adjust the vacuum chamber pressure. This reduces the need to frequently start the vacuum pump, thereby reducing energy consumption and maintenance costs, and improving the system's operational efficiency and reliability.

[0024] The modular design of the system not only improves the convenience of installation and maintenance, but also enables precise pressure regulation. The detailed adjustment function of the pressure regulating component 4 can meet the application scenarios with high precision requirements and ensure the stability of the vacuum environment.

[0025] By integrating multiple technologies (such as the voltage divider 3, the pressure regulator 4, and real-time pressure monitoring), the solution provides enhanced operational stability, precision, and safety in demanding environments. Pressure monitoring and feedback regulation mechanisms ensure the system's reliability and stability in real-world operation.

[0026] In general, this solution significantly improves the performance and operating efficiency of the vacuum chamber through advanced design and control technology, especially in maintaining a constant vacuum degree and the sealing degree of the working state, showing obvious technological progress and practical effects.

[0027] Specifically, such as Figure 4 As shown: the voltage divider 3 includes a partition chamber 31 fixed to the inner wall of the heat preservation seat 1, the upper surface of the partition chamber 31 is connected to the bottom end of the upper through pipe 12, and the lower surface of the partition chamber 31 is connected to the top end of the lower through pipe 13; The inner wall of the partition chamber 31 is fixedly connected to two side slides 35. The inner walls of the two side slides 35 are fitted with a bottom magnetic block 32 and a top magnetic block 33 for sliding together. The lower surface of the bottom magnetic block 32 is fixedly connected to a sealing gasket 34. The top magnetic block 33 is fitted with the adjustment assembly.

[0028] When in use, the upper and lower sides of the partition chamber 31 are connected to the lower half chamber 10 and the communication chamber 2 through the upper and lower through-tubes 12 and 13 respectively. Under the control of the pressure regulating assembly 4, the pressure of the top magnetic block 33 pressing the bottom magnetic block 32 downward increases, so that there is always a gap between the top magnetic block 33 and the bottom magnetic block 32 under the repulsive force. For the same specifications, the greater the pressure applied by the pressure regulating assembly 4 on the top magnetic block 33, the greater the repulsive force on the bottom magnetic block 32, so that the sealing gasket 34 is tightly attached to the lower surface of the inner wall of the partition chamber 31 to achieve a sealing effect; As the vacuum pump continues to pump out gas, the negative pressure of the first-level vacuum chamber (the closed space composed of the upper half chamber 9, the lower half chamber 10 and the spherical top 8) reaches a certain threshold value, which can cause the bottom magnetic block 32 to move slightly upward under the negative pressure suction. At this time, the gap between the bottom magnetic block 32 and the top magnetic block 33 is further compressed. At this time, the gas in the high-precision vacuum chamber (third-level vacuum chamber) is pumped out through the downpipe 13 and the displacement head 18. When the pressure in the third-level vacuum chamber reaches the set value, the vacuum degree of the first-level vacuum chamber is greater than that of the third-level vacuum chamber. At the same time, when the vacuum pump is connected to the interface tee 61, the solenoid valve 7 is opened to pump out the air in the second-level vacuum chamber above the piston 15 in the communication chamber 2, making its air pressure higher than that of the third-level vacuum chamber, thereby maintaining the piston 15 inactive. Specifically, such as Figure 3 As shown, the first tube group 5 includes a bottom tee 51 connected to the communication chamber 2. The upper surface of the bottom tee 51 is connected to a straight-connecting pipe 52, and a bottom pressure gauge 53 is installed on the left side. The top of the straight-connecting pipe 52 is connected to one side of the solenoid valve 7. The second tube group 6 includes an interface tee 61 connected to the top of the spherical dome 8. One end of the interface tee 61 is connected to a top tee 62. One end of the top tee 62 is installed with a top pressure gauge 63 and the bottom pressure gauge 53. The other end of the top tee 62 is connected to one side of the solenoid valve 7.

[0029] By setting up the first tube group 5 and the second tube group 6, the primary vacuum chamber and the secondary vacuum chamber can be connected, and the pressure difference between them can be accurately controlled by the solenoid valve 7. Combined with the continuous monitoring of the top top pressure gauge 63 and the bottom pressure gauge 53 and the bottom top pressure gauge 63 and the bottom pressure gauge 53, the on-off ratio and duration of the solenoid valve 7 are feedback controlled.

[0030] More specifically, when the pressure monitoring system detects that the pressure in the secondary vacuum chamber is higher than a preset value or that the pressure differential with the primary chamber is too small, the control system opens solenoid valve 7, allowing gas exchange between the secondary and primary chambers to gradually reduce the pressure in the secondary chamber. Conversely, if the pressure differential exceeds a preset value, solenoid valve 7 closes to prevent excessive gas from entering the primary chamber. The opening and closing times of solenoid valve 7 can be adjusted in real time using a PID control algorithm, automatically adjusting the opening and closing times based on real-time pressure changes to ensure precise pressure control.

[0031] In addition to the opening and closing time, the opening degree of the solenoid valve 7 can also control the amount of gas entering, thereby fine-tuning the pressure change between the two chambers. The opening degree can be dynamically adjusted according to the real-time pressure difference to prevent the pressure change from being too rapid or too slow, so as to accurately achieve the target pressure difference. By gradually adjusting the opening degree, the system can avoid pressure overshoot or slow response. The entire system requires closed-loop feedback control, utilizing real-time pressure data from top and bottom pressure gauges 63 and 53 to dynamically adjust the control system. Combined with a PID algorithm, the system can adjust the control parameters of solenoid valve 7 based on the speed and magnitude of pressure changes, maintaining the pressures of both chambers within a set range and ensuring that the pressure in the secondary chamber is consistently lower than that in the primary chamber.

[0032] Based on the PID control algorithm, the following control algorithm is proposed to accurately control the on / off and opening of the solenoid valve 7, thereby controlling the pressure change between the primary and secondary vacuum chambers: # Initialize PID control parameters Kp = 1.0# Proportional gain Ki = 0.1# Integral gain Kd = 0.01 # differential gain set_pressure_diff = 100 # Target pressure difference (for example, the secondary vacuum chamber should be 100Pa lower than the primary vacuum chamber) integral = 0 previous_error = 0 delta_time = 0.1# Control time interval (seconds) #Simulate the function of obtaining data from the pressure sensor def get_pressure(): pressure_level_1 = get_pressure_from_sensor_1()# The pressure of the first-level vacuum chamber pressure_level_2 = get_pressure_from_sensor_2()# The pressure of the secondary vacuum chamber return pressure_level_1, pressure_level_2 # Control function of solenoid valve 7 def control_valve(valve_opening): set_valve_opening(valve_opening)# Adjust the opening of solenoid valve 7 # If you need simple switch control, you can use the following method # if valve_opening>threshold: # open_valve() # else: # close_valve() #PID control main function def pid_control(): global integral, previous_error while True: # Get the current cavity pressure value pressure_1, pressure_2 = get_pressure() # Calculate actual pressure difference current_pressure_diff = pressure_1 - pressure_2 # Calculate the error error = set_pressure_diff - current_pressure_diff # Calculate the integral term integral += error * delta_time # Calculate the differential term derivative = (error - previous_error) / delta_time # Calculate PID output output = Kp * error + Ki * integral + Kd * derivative # Adjust the opening of solenoid valve 7 according to PID output, assuming the output range is between [0, 100] valve_opening = max(0, min(100, output)) # Control the opening of solenoid valve 7 control_valve(valve_opening) # Update the last error previous_error = error # Wait for the next control cycle time.sleep(delta_time) explain: Kp, Ki, Kd: Proportional, integral, and differential gain parameters, used to adjust the response speed and stability of PID control.

[0033] set_pressure_diff: target pressure difference, which is the pressure difference between the primary vacuum chamber and the secondary vacuum chamber that the control system hopes to maintain.

[0034] get_pressure(): Gets the real-time pressure data of the primary vacuum cavity and the secondary vacuum cavity.

[0035] control_valve(valve_opening): Adjusts the opening of solenoid valve 7 based on the PID output value. You can set solenoid valve 7 to linear control (opening 0-100) or simple on / off control (valve open / close) depending on the application scenario.

[0036] Main loop: Execute a PID control loop every certain period of time (defined by delta_time) to adjust the opening of solenoid valve 7.

[0037] The above algorithm controls the pressure difference between the primary vacuum cavity and the secondary vacuum cavity by adjusting the opening of the solenoid valve 7 in real time, so as to keep the pressure of the secondary vacuum cavity lower than that of the primary vacuum cavity.

[0038] The algorithm uses real-time feedback from the pressure sensor to adjust the opening and closing time and opening degree of the solenoid valve 7 to achieve the desired pressure difference.

[0039] Specifically, such as Figure 7 As shown, the voltage regulating assembly 4 includes two deflection plates 43 attached to the upper surface of the top magnetic block 33. The two deflection plates 43 are fixedly connected to a torsion cylinder 41 and a torsion rod 42, respectively. The left ends of the torsion cylinder 41 and the torsion rod 42 are both rotated through the inner wall of the partition chamber 31, and the torsion rod 42 is slid through the inner wall of the torsion cylinder 41. The right ends of the torsion cylinder 41 and the torsion rod 42 are both fixed with torsion plates 44, and an adjusting screw 45 is slid through the inner walls of the two torsion plates 44. The surface thread of the adjusting screw 45 is matched with a nut 46. The bottom of the torsion plate 44 is provided with a pointing plate 47, and one side of the heat preservation seat 1 is fixedly connected to a dial 48 that cooperates with the pointing plate 47.

[0040] By setting the pressure change that needs to be adjusted for the voltage divider 3, the adjusting screw 45 and the nut 46 of the pressure regulating assembly 4 cooperate to enable it to press the two torsion plates 44 when twisting, and the compressed angle of the two torsion plates 44 is reduced. The two torsion plates 44 respectively rotate with the torsion cylinder 41 and the torsion rod 42, so that they respectively press the top magnetic block 33 with the two deflection plates 43. As the inclination increases, the stronger the pressure on the top magnetic block 33, the greater the torque exerted on the adjusting screw 45. When the torsion plate 44 deflects, the movement amplitude is indicated on the dial 48 through the pointing plate 47 and the angle change is understood. The specific pressure amplitude is understood based on the size of the angle change.

[0041] Specifically, such as Figure 6 As shown: the inner wall of the piston 15 is fixedly connected with a sealing slide 14 , and the sealing slide 14 slides axially and sealingly on the surface of the down pipe 13 , and the bottom end of the down pipe 13 is fixedly connected to the lower surface of the inner wall of the communication chamber 2 .

[0042] The piston 15 can maintain a sealed sliding on the surface of the down pipe 13 through the sealing slide 14, and can increase the vacuum degree of the secondary vacuum chamber, so that the space of the tertiary vacuum chamber can be increased through the movement of the piston 15, thereby controlling the tertiary vacuum chamber to maintain a preset environment. In this way, a rapid response of direct power intervention can be achieved. Compared with the traditional method, the response and control speed is faster, the stability is higher, the energy consumption is low, the safety is high, and the airtightness of the high-precision vacuum chamber is highly guaranteed.

[0043] Specifically, such as Figure 2 As shown, a plurality of mounting screws 11 for connection are provided on the surfaces of the upper half chamber 9 and the lower half chamber 10 , and a reinforcement structure is provided on the surfaces of the upper half chamber 9 and the lower half chamber 10 .

[0044] By setting the mounting screws 11, the upper half chamber 9 and the lower half chamber 10 can be connected and fixed, and the reinforced structure on the surface can meet the support guarantee of the maximum negative pressure of the first-level vacuum chamber.

[0045] Specifically, such as Figure 5 As shown: a replacement head 18 is provided on the lower surface of the communicating chamber 2, the replacement head 18 is connected to the bottom end of the lower through pipe 13, a mounting seat 17 is provided on the arc-shaped side wall of the communicating chamber 2, and a reset valve 19 is installed on the surface of the communicating chamber 2.

[0046] The displacement head 18 is located at the bottom of the communication chamber 2 and communicates with the three-stage vacuum cavity. At the same time, in conjunction with the through hole 16, the space at the bottom of the piston 15 can be connected with it.

[0047] Specifically, such as Figure 6 As shown, a plurality of through holes 16 for gas flow with the communication chamber 2 are opened at the bottom end of the down pipe 13 .

[0048] The through hole 16 is provided to ensure that the space below the piston 15 is in communication with the third-stage vacuum chamber.

[0049] When this solution is used, the pressure of the pressure divider 3 is controlled by the pressure regulating assembly 4. When the air in the high-precision vacuum chamber is extracted, one end of the vacuum pump is connected to the top of the interface tee 61 of the second tube group 6. Then, a first-level vacuum cavity is gradually formed in the space formed by the ball top 8, the upper half chamber 9 and the lower half chamber 10. The space above the piston 15 in the communicating chamber 2 forms a second-level vacuum cavity. On the other hand, the space below the piston 15 in the communicating chamber 2 is connected to the high-precision vacuum chamber to form a third-level vacuum cavity. The pressure divider 3 forms a partition between the first-stage vacuum chamber and the third-stage vacuum chamber. When a higher vacuum pressure is formed in the first-stage vacuum chamber, the critical pressure of the pressure divider 3 is reached, and then the pressure divider 3 offsets the set pressure value, so that the third-stage vacuum chamber is pumped to a preset pressure through the downpipe 13, and the pressure is lower than that of the first-stage vacuum chamber. The pressure difference between the first-stage vacuum chamber and the third-stage vacuum chamber is controlled by the pressure regulating component 4 to control the pressure divider 3. In the above process, when the preset working pressure is reached in the high-precision vacuum chamber, the first-level vacuum chamber composed of the ball top 8, the upper half chamber 9 and the lower half chamber 10 is in a high-pressure state, and the second-level vacuum chamber is in an optional normal pressure state or a negative pressure state where the air pressure is greater than the third-level vacuum chamber (that is, the first-level vacuum chamber> the third-level vacuum chamber> the second-level vacuum chamber, and when the vacuum pump is started, the solenoid valve 7 is opened. At this time, the solenoid valve 7 can be closed after the second-level vacuum chamber is evacuated to a suitable pressure to ensure subsequent normal operation), and the piston 15 is stably pressed downward by the suction force of the third-level vacuum chamber. When working in the vacuum chamber, such as pressure changes caused by temperature changes or pressure changes caused by expansion of objects, it is necessary to adjust the internal pressure to the preset pressure value. Based on the complete sealing principle of the high-precision vacuum chamber, air cannot be extracted by the vacuum pump to maintain constant pressure in the working state. At this time, the conventional method is to temporarily store the extracted gas in a storage tank by transfer and then treat it harmlessly. However, this method The proposed method is to use the top pressure gauge 63 and the bottom pressure gauge 53 to detect the pressure values ​​in the first-level vacuum chamber and the second-level vacuum chamber respectively, and based on the pressure value of the third-level vacuum chamber, open the solenoid valve 7. At this time, the first-level vacuum chamber with the highest negative pressure extracts the gas in the second-level vacuum chamber through the first tube group 5 and the second tube group 6 and reduces the pressure (at this time: the first-level vacuum chamber> the second-level vacuum chamber> the third-level vacuum chamber), so that when the pressure of the piston 15 is reduced and greater than the pressure below, the piston 15 moves upward, the space of the third-level vacuum chamber increases, and its pressure is further reduced. In this way, there is no need to start the vacuum pump. By starting the vacuum pump once in advance, subsequent automatic pressure control can be achieved, avoiding frequent starting and pressure control of the vacuum pump. The above is a compensation method for pressure increase. If the pressure in the high-precision vacuum chamber is affected by low temperature and is lower than the preset value, the intake pressure is controlled by opening the pressure control valve of the high-precision vacuum chamber. Through the above method, this solution is modularly installed at the port of the high-precision vacuum chamber, and through an external vacuum pump, the overall vacuum degree is formed. After the vacuum environment is formed, the vacuum pressure can be actively maintained constant without starting the vacuum pump or other power such as hydraulics, thereby meeting the constancy of the internal operating environment and being unaffected by changes in the processing medium.

[0050] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A high-precision vacuum chamber modular assembly, characterized in that: include: Heat preservation seat (1); A communication chamber (2) is fixedly connected to the lower surface of the heat-insulating seat (1), and a piston (15) is slidably fitted on the inner wall of the communication chamber (2); Upper half warehouse (9); Lower half warehouse (10); The upper half chamber (9) and the lower half chamber (10) are arranged to be sealed and fitted on their opposite surfaces, the lower half chamber (10) is fixedly connected to the upper surface of the heat preservation seat (1), and the upper surface of the upper half chamber (9) is sealed and fixed with a spherical top (8); a first tube group (5); a second tube group (6); The first tube group (5) is connected to the inner wall of the communication chamber (2), the second tube group (6) is connected to the top of the spherical top (8), and a solenoid valve (7) is installed on the opposite ends of the first tube group (5) and the second tube group (6); Voltage divider (3); The voltage divider (3) is fixedly connected to the inner wall of the heat preservation seat (1); the upper surface of the voltage divider (3) is connected to the inner wall of the lower half chamber (10) through the upper through-tube (12); and the lower surface of the voltage divider (3) is connected to the lower surface of the inner wall of the communication chamber (2) through the lower through-tube (13); Voltage regulating assembly (4); The pressure regulating assembly (4) penetrates and rotates on the inner wall of the pressure divider (3) and is used to accurately control the pressure difference between the upper and lower parts of the pressure divider (3).

2. A high-precision vacuum chamber modular assembly according to claim 1, characterized in that: The voltage divider (3) comprises a partition chamber (31) fixed to the inner wall of the heat-insulating seat (1), the upper surface of the partition chamber (31) being connected to the bottom end of the upper through-tube (12), and the lower surface of the partition chamber (31) being connected to the top end of the lower through-tube (13); The inner wall of the partition chamber (31) is fixedly connected to two side slides (35), the inner walls of the two side slides (35) are fitted with a bottom magnetic block (32) and a top magnetic block (33) for sliding together, the lower surface of the bottom magnetic block (32) is fixedly connected to a sealing gasket (34), the sealing gasket (34); The top magnetic block (33) is arranged in close contact with the adjustment component.

3. A high-precision vacuum chamber modular assembly according to claim 1, characterized in that: The first tube group (5) comprises a bottom tee (51) connected to the communication chamber (2); a straight-connecting pipe (52) is provided on the upper surface of the bottom tee (51); and a bottom pressure gauge (53) is installed on the left side; the top end of the straight-connecting pipe (52) is connected to one side of the solenoid valve (7).

4. A high-precision vacuum chamber modular assembly according to claim 2, characterized in that: The voltage regulating assembly (4) comprises two deflection plates (43) arranged on the upper surface of the top magnetic block (33), the two deflection plates (43) are respectively fixedly connected to a torsion cylinder (41) and a torsion rod (42), the left ends of the torsion cylinder (41) and the torsion rod (42) both penetrate and rotate on the inner wall of the partition chamber (31), and the torsion rod (42) penetrates and slides on the inner wall of the torsion cylinder (41); The right ends of the torsion cylinder (41) and the torsion rod (42) are both fixed with a torsion plate (44), and an adjusting screw (45) is slidably passed through the inner wall of the torsion plates (44). The surface thread of the adjusting screw (45) is matched with a nut (46). The bottom of the torsion plate (44) is provided with a pointing plate (47), and one side of the heat preservation seat (1) is fixedly connected with a dial (48) matched with the pointing plate (47).

5. The high-precision vacuum chamber modular assembly according to claim 3, characterized in that: The second tube group (6) includes an interface tee (61) connected to the top of the spherical top (8), one end of the interface tee (61) is connected to a top tee (62), one end of the top tee (62) is installed with a top pressure gauge (63), and the other end of the top tee (62) is connected to one side of the solenoid valve (7).

6. The high-precision vacuum chamber modular assembly according to claim 1, characterized in that: The inner wall of the piston (15) is fixedly connected with a sealing slide (14), and the sealing slide (14) slides axially and sealingly on the surface of the down pipe (13), and the bottom end of the down pipe (13) is fixedly connected to the lower surface of the inner wall of the communication chamber (2).

7. The high-precision vacuum chamber modular assembly according to claim 1, characterized in that: The surfaces of the upper half bin (9) and the lower half bin (10) are provided with a plurality of mounting screws (11) for connection, and the surfaces of the upper half bin (9) and the lower half bin (10) are provided with a reinforcement structure.

8. The high-precision vacuum chamber modular assembly according to claim 1, characterized in that: A replacement head (18) is provided on the lower surface of the communication chamber (2), the replacement head (18) is connected to the bottom end of the lower through pipe (13), a mounting seat (17) is provided on the arc-shaped side wall of the communication chamber (2), and a reset valve (19) is installed on the surface of the communication chamber (2).

9. The high-precision vacuum chamber modular assembly according to claim 6, characterized in that: The bottom end of the lower through pipe (13) is provided with a plurality of through holes (16) for gas flow with the communicating chamber (2).

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