Electrode design method and device of eight-pole electrostatic deflection system and electronic equipment

By constructing a deflection system model and establishing an electrode parameter model in finite element simulation software, the problem of lack of versatility in the design of the octupole electrostatic deflection system was solved, and the accurate calculation and wide application of the electrode parameters were achieved.

CN120764239APending Publication Date: 2025-10-10NANJING UNIV
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Patent Information

Application Number
CN202510774350.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-06-11
Publication Date
2025-10-10

AI Technical Summary

Technical Problem

The electrode design of the existing octupole electrostatic deflection system lacks versatility and universality, which limits its application in scanning electron microscopes and makes it difficult to accurately calculate various parameters.

Method used

By constructing a deflection system model in finite element simulation software, allocating electrode deflection voltage values, recording the electron beam deflection angle, establishing an electrode parameter model, and using a fitting function to calculate the relationship between electrode thickness and inner diameter, the target design parameters of the electrode are determined.

Benefits of technology

The method realizes the universal and adaptable design of the deflection electrode, can accurately calculate the parameters of the deflection electrode, and is applicable to various types of scanning electron microscopes.

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Abstract

The invention discloses an electrode design method and device for an octupole electrostatic deflection system and electronic equipment, and the method comprises the steps: constructing an incident electron beam in a simulation model of the deflection system, and distributing an electrode deflection voltage value to eight electrodes according to a voltage assignment strategy; inputting a plurality of different test parameter groups into the simulation model of the deflection system to perform deflection simulation on the incident electron beam, and recording the deflection angle simulation value of each electron beam corresponding to the emergent end; performing modeling analysis on each recorded test parameter group and each corresponding electron beam deflection angle simulation value to obtain an electrode parameter model; determining an electrode inner diameter candidate value according to an optical system envelope design size of the scanning electron microscope; determining a corresponding electrode thickness candidate value according to an electrode parameter model, a preset parameter group and the electrode inner diameter candidate value; and determining target design parameters of the electrode according to the electrode inner diameter candidate value and the corresponding electrode thickness candidate value.
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