Novel diamond uniform-temperature growth table

By integrating a vapor chamber heat exchanger and a phase change material inside the substrate holder of the diamond growth stage, the problem of low heat transfer efficiency in the prior art is solved, achieving efficient and uniform heat distribution and high-quality diamond growth.

CN120797200APending Publication Date: 2025-10-17UNIV OF SHANGHAI FOR SCI & TECH +1
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Patent Information

Application Number
CN202510839782.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-06-23
Publication Date
2025-10-17

AI Technical Summary

Technical Problem

The existing heat conduction structure of diamond homogenization growth stage mainly relies on convection heat transfer, which has low heat transfer efficiency and affects the uniformity and efficiency of diamond growth.

Method used

A vapor chamber heat exchanger is integrated inside the substrate holder, using phase change material as the working medium to achieve efficient heat transfer through an evaporation-condensation cycle. Combined with a micro-structured capillary wick, liquid reflux is achieved, enhancing thermal conductivity.

Benefits of technology

It significantly improves the heat transfer efficiency and heat distribution uniformity of the diamond growth stage, reduces crystal defects, and improves the quality and growth efficiency of diamonds, with high reliability and applicability.

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Abstract

The invention provides a novel diamond uniform-temperature growth table, and belongs to the technical field of diamond growth devices. The device comprises a cooling structure, a heat conduction structure, a substrate support and a substrate which are sequentially arranged from bottom to top, the substrate is used for diamond growth, a steam cavity vapor chamber is integrated in the substrate support, a shell of the steam cavity vapor chamber is made of a high-heat-conduction material, and an internal working medium of the steam cavity vapor chamber is made of a phase-change material. The vapor chamber vapor chamber with the working medium being the phase-change material is integrated in the substrate support, the phase-change material is used for heat transfer, the heat transfer efficiency of the growth table can be better enhanced, and the growth table has the advantages of being high in heat dissipation efficiency, uniform in heat distribution, compact in design, high in reliability and wide in applicability.
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