Multi-dimensional force sensor and bridging method thereof

Abstract

The invention relates to the technical field of force sensors, in particular to a multi-dimensional force sensor and a bridge assembling method thereof.The multi-dimensional force sensor comprises an upper bearing section, a lower bearing section and four bearing columns arranged between the upper bearing section and the lower bearing section, the four bearing columns are vertically arranged, the two bearing columns are arranged in a bilateral symmetry mode, and the two bearing columns are arranged in a front-back symmetry mode; each bearing column is provided with a patch surface, and each patch surface is provided with an integrated strain gauge; by optimizing the arrangement of the elastomer and the integrated strain gauge, the multi-dimensional force sensor is simple in structure, the processing difficulty and the processing cost are reduced, the processing is more convenient, the processing efficiency is higher, and the crosstalk precision of the six-dimensional force sensor is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of force sensor, in particular to a multi-dimensional force sensor and a method for assembling the same. BACKGROUND

[0002] The multi-dimensional force sensor generally needs to distribute elastic strain regions in different regions of the elastic body, and the elastic body generally adopts a cross beam, a Stewart or other composite structure. These structures not only realize multi-directional force measurement, but also bring problems such as complex structure, difficult processing, high cost, and the like. In addition, due to the mutual influence of forces in different directions, and the complicated process of pasting strain gauges, the accuracy of pasting position and angle is difficult to control, which leads to a large crosstalk error in the measurement process of the multi-dimensional force sensor with the traditional structure. Therefore, the existing multi-dimensional force sensor has a complex structure and high cost, and cannot meet the actual use requirements. SUMMARY

[0003] The present application relates to the technical field of force sensor, in particular to a multi-dimensional force sensor and a method for assembling the same.

[0004] The present application relates to the technical field of force sensor, in particular to a multi-dimensional force sensor and a method for assembling the same. A multi-dimensional force sensor, comprising an upper receiving section, a lower receiving section, and four load-bearing columns arranged between the upper receiving section and the lower receiving section, wherein the four load-bearing columns are vertically arranged, two of the load-bearing columns are symmetrically arranged left and right, and two of the load-bearing columns are symmetrically arranged front and back; a patch surface is arranged on each of the load-bearing columns, and an integrated strain gauge is arranged on each of the patch surfaces.

[0005] Further limited, the integrated strain gauge comprises a substrate and two first inclined strain units, two second inclined strain units, two first vertical strain units, two second vertical strain units and two parallel strain units arranged on the substrate, and the substrate is bonded to the patch surface. The two first inclined strain units are symmetrically arranged in a transverse direction, and the two first inclined strain units are arranged perpendicular to each other; the two second inclined strain units are symmetrically arranged on opposite sides of the two first inclined strain units, the first inclined strain unit and the adjacent second inclined strain unit are arranged perpendicular to each other, the two parallel strain units are connected, and the two second vertical strain units are connected.

[0006] Further limited, the first inclined strain unit comprises a first inclined strain sensitive grid, two first inclined strain pads and two inclined strain zero adjustment grids. The angle between the first oblique strain sensitive gate and the horizontal direction is 45°, the first oblique strain sensitive gate is connected between two oblique strain zero adjustment gates, and the first oblique strain sensitive gate is connected with the corresponding first oblique strain pad through the oblique strain zero adjustment gate; the first oblique strain sensitive gates in the two first oblique strain units are vertically arranged, and the first oblique strain sensitive gate and the oblique strain zero adjustment gate are arranged in the same direction. The second oblique strain unit comprises a second oblique strain sensitive gate, two second oblique strain pads and two oblique strain zero adjustment gates. The angle between the second oblique strain sensitive gate and the horizontal direction is 45°, the second oblique strain sensitive gate is connected between two oblique strain zero adjustment gates, and the second oblique strain sensitive gate is connected with the corresponding second oblique strain pad through the oblique strain zero adjustment gate; the second oblique strain sensitive gates in the two second oblique strain units are vertically arranged, the second oblique strain sensitive gate is vertically arranged with the adjacent first oblique strain sensitive gate, and the second oblique strain sensitive gate and the oblique strain zero adjustment gate are arranged in the same direction.

[0007] Further limited, the first vertical strain unit comprises a first vertical strain sensitive gate, two first vertical strain zero adjustment gates and two first vertical strain pads. The first vertical strain sensitive gate is vertically arranged, the first vertical strain sensitive gate is arranged between two first vertical strain zero adjustment gates, the first vertical strain sensitive gate is connected with the corresponding first vertical strain pad through the first vertical strain zero adjustment gate, and the first vertical strain sensitive gate and the first vertical strain zero adjustment gate are arranged in the same direction. The two second oblique strain units and the two first oblique strain units are arranged between the two first vertical strain sensitive gates.

[0008] Further limited, the second vertical strain unit comprises a second vertical strain sensitive gate, a second vertical strain pad, a second vertical strain first zero adjustment gate and a second vertical strain second zero adjustment gate. The second vertical strain sensitive gate is arranged between the second vertical strain first zero adjustment gate and the second vertical strain second zero adjustment gate, the second vertical strain pad is connected with the second vertical strain first zero adjustment gate, the two second vertical strain second zero adjustment gates are connected in the two second vertical strain units, the second vertical strain first zero adjustment gate and the second vertical strain second zero adjustment gate are arranged in the same direction with the second vertical strain sensitive gate; the two first oblique strain units, the two second oblique strain units and the two first vertical strain units are arranged between the two second vertical strain sensitive gates.

[0009] Further limited, the parallel strain unit includes a parallel strain sensitive grid, a parallel strain pad, a parallel strain first zero grid and a parallel strain second zero grid, the parallel strain first zero grid and the parallel strain second zero grid are arranged in the same direction with the parallel strain sensitive grid; The parallel strain sensitive grid is arranged between the parallel strain first zero grid and the parallel strain second zero grid, the parallel strain pad is connected with the parallel strain first zero grid, and the two parallel strain second zero grids are connected between the two parallel strain units; the two first inclined strain units, the two second inclined strain units, the two first vertical strain units and the two second vertical strain units are arranged between the two parallel strain units.

[0010] A multi-dimensional force sensor bridge circuit based on the above multi-dimensional force sensor, including an Fx Wheatstone bridge and an Fy Wheatstone bridge; The Fx Wheatstone bridge is sequentially composed of two first inclined strain units on the front side patch surface and two first inclined strain units on the back side patch surface; The Fy Wheatstone bridge is sequentially composed of two first inclined strain units on the left side patch surface and two first inclined strain units on the right side patch surface.

[0011] Further limited, the multi-dimensional force sensor bridge circuit further includes an Fz Wheatstone bridge; The Fz Wheatstone bridge is composed of two parallel strain units on the front side patch surface, two second vertical strain units on the front side patch surface, two parallel strain units on the right side patch surface, two second vertical strain units on the right side patch surface, two parallel strain units on the back side patch surface, two second vertical strain units on the back side patch surface, two parallel strain units on the left side patch surface and two second vertical strain units on the left side patch surface; The two parallel strain units on the front side patch surface are connected in parallel with the two parallel strain units on the left side patch surface, the two second vertical strain units on the front side patch surface are connected in parallel with the two second vertical strain units on the left side patch surface, the two parallel strain units on the right side patch surface are connected in parallel with the two parallel strain units on the back side patch surface, and the two second vertical strain units on the right side patch surface are connected in parallel with the two second vertical strain units on the back side patch surface.

[0012] Further limited, the multi-dimensional force sensor bridge circuit further includes an Mx Wheatstone bridge and an My Wheatstone bridge; The Mx Wheatstone bridge is composed of two first vertical strain units on the front side patch surface and two first vertical strain units on the back side patch surface; The My Wheatstone bridge is composed of two first vertical strain units on the right patch surface and two first vertical strain units on the right patch surface.

[0013] Further limited, the multi-dimensional force sensor group bridge circuit further comprises an Mz Wheatstone bridge; The Mz Wheatstone bridge comprises two second inclined strain units on the front patch surface, two second inclined strain units on the right patch surface, two second inclined strain units on the back patch surface and two second inclined strain units on the left patch surface.

[0014] The beneficial effects of the present application are: 1. The multi-dimensional force sensor provided by the present application has simple structure, reduces processing difficulty and processing cost, is more convenient to process, and has higher processing efficiency.

[0015] 2. The integrated strain gauge including multiple directions is designed, the strains in different directions on the patch surface can be detected, the integrated strain gauges are arranged on one substrate, the sticking difficulty is reduced, the sticking efficiency is improved, and the detection accuracy and sensitivity of the multi-dimensional force sensor are increased.

[0016] 3. The multi-dimensional force sensor provided by the present application has the same stress direction of the relative direction bearing column when bearing axial force, has opposite stress directions of the relative direction bearing column when bearing torque force, the Wheatstone bridge formed by cooperation can make the cross talk of each direction force cancel each other to zero, and can reduce the cross talk error from 1% to below 0.3%. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a multi-dimensional force sensor structure of the present application; Figure 2 It is an integrated strain gauge schematic diagram of the present application; Figure 3 It is a multi-dimensional force sensor group bridge circuit diagram of the present application; Figure 4 It is an Fz Wheatstone bridge circuit diagram of the present application; Figure 5 It is an Mz Wheatstone bridge circuit diagram of the present application; In the figure, 10 - first inclined strain unit; 11 - first inclined strain sensitive gate; 12 - first inclined strain pad; 13 - inclined strain zero adjustment gate; 20 - second inclined strain unit; 21 - second inclined strain sensitive gate; 22 - second inclined strain pad; 23 - inclined strain zero adjustment gate; 30 - first vertical strain unit; 31 - first vertical strain sensitive gate; 32 - first vertical strain zero adjustment gate; 33 - first vertical strain pad; 40 - second vertical strain unit; 41 - second vertical strain sensitive gate; 42 - second vertical strain first zero adjustment gate; 43 - second vertical strain pad; 44 - second vertical strain second zero adjustment gate; 50 - parallel strain unit; 51 - parallel strain sensitive gate; 52 - parallel strain first zero adjustment gate; 53 - parallel strain pad; 54 - parallel strain second zero adjustment gate; 60 - substrate; 61 - positioning mark; 70 - elastomer; 71 - upper supporting section; 72 - lower supporting section; 73 - supporting column. DETAILED DESCRIPTION

[0018] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0019] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0020] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0021] In the description of the embodiments of the present application, it should be noted that if the terms "upper", "lower", "horizontal", "inner" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship when the product of the present application is used, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.

[0022] Embodiment 1 Reference Figure 1 The present application provides a multi-dimensional force sensor, comprising an elastic body 70 and an integrated strain gauge, the elastic body 70 comprises an upper receiving section 71, a lower receiving section 72, four load-bearing columns 73 arranged between the upper receiving section 71 and the lower receiving section 72, the load-bearing columns 73 are vertically arranged, the upper receiving section 71 and the lower receiving section 72 can be selected as a cylindrical structure, the four load-bearing columns 73 are arranged at equal intervals around the axis of the upper receiving section 71, so that two load-bearing columns 73 are arranged symmetrically left and right, and two load-bearing columns 73 are arranged symmetrically front and back; the load-bearing column 73 is provided with a patch surface for pasting the integrated strain gauge, the patch surface faces the outer side of the load-bearing column 73, and the integrated strain gauge is arranged in the horizontal direction.

[0023] Wherein, the diameter of the upper receiving section 71 and the diameter of the lower receiving section 72 can be selected as 110mm, and the height of the multi-dimensional force sensor can be selected as 77mm; the load-bearing column strain can be selected as 500μz~1000μz, and the sensitive grid resistance value of the integrated strain gauge can be selected as 300Ω~2000Ω.

[0024] In order to reduce the complexity of the bridge circuit and improve the process efficiency, one resistance adjusting grid is arranged between each sensitive grid and the pad, which can directly compensate the zero point output of the Wheatstone bridge. Since the resistance wire is avoided, the temperature performance of the sensor is improved.

[0025] Preferably, four positioning marks 61 are arranged on the substrate 60, the positioning marks 61 can be selected as isosceles triangles or equilateral triangles, the four positioning marks 61 are arranged on the upper, lower, left and right circumferential sides of the substrate 60, and the top angle of the positioning mark 61 at different positions faces the direction of the position, for example, the top angle of the positioning mark 61 on the upper side of the substrate 60 is vertically upward, and the top angle of the positioning mark 61 on the right side of the substrate 60 is horizontally right.

[0026] When the multi-dimensional force sensor is loaded in the Fx direction or the Fy direction, equal and same direction shear strains are generated on the two patch surfaces parallel to the force direction; when the multi-dimensional force sensor is loaded in the Fz direction, equal and same direction Poisson's stresses are generated on the four patch surfaces, and compression strain is generated in the vertical direction, and tension strain is generated in the horizontal direction.

[0027] When the multi-dimensional force sensor is loaded in the Mx direction or the My direction, equal and opposite direction Poisson's stresses are generated on the opposite patch surfaces; obviously, if the strain generated on the patch surface parallel to the x direction is used to detect Mx, and the shear strain generated on the patch surface parallel to the y direction is used to detect My, the influence on the Fz direction when Mx and My directions are stressed is exactly zero.

[0028] When the multi-dimensional force sensor is loaded in the Mz direction, equal and opposite shear strains are generated on each patch surface; if the shear strain generated on the patch surface parallel to the x direction is used to detect Fx and the shear strain generated on the patch surface parallel to the y direction is used to detect Fy, the influence on the Mz direction generated when Fx and Fy are stressed is exactly zero.

[0029] The measurement range of the multi-dimensional force sensor in the Fx and Fy directions is 0-2t, and the measurement sensitivity is 1.3 mV / V; the measurement range of the multi-dimensional force sensor in the Fz direction is 0-10t, and the measurement sensitivity is 1.1 mV / V; the measurement range of the multi-dimensional force sensor in the Mx and My directions is 0-2000 Nm, and the measurement sensitivity is 1.3 mV / V; the measurement range of the multi-dimensional force sensor in the Mz direction is 0-1500 Nm, and the measurement sensitivity is 1.3 mV / V.

[0030] Embodiment 2 Reference Figure 2 Based on the multi-dimensional force sensor described in Embodiment 1, this embodiment provides an integrated strain gauge, which comprises a substrate 60, two first inclined strain units 10, two second inclined strain units 20, two first vertical strain units 30, two second vertical strain units 40 and two parallel strain units 50, the substrate 60 is bonded with the patch surface, and the two first inclined strain units 10, the two second inclined strain units 20, the two first vertical strain units 30, the two second vertical strain units 40 and the two parallel strain units 50 are all arranged on the substrate 60.

[0031] The two first inclined strain units 10 are symmetrically arranged in the transverse direction, preferably symmetrically arranged about the axis of the vertical symmetry axis of the substrate 60; the two first inclined strain units 10 are arranged perpendicular to each other; the two second inclined strain units 20 are symmetrically arranged on the opposite sides of the two first inclined strain units 10, the first inclined strain unit 10 and the adjacent second inclined strain unit 20 are arranged perpendicular to each other, the two parallel strain units 50 are connected to each other, and the two second vertical strain units 40 are connected to each other.

[0032] Further limited, the first inclined strain unit 10 comprises a first inclined strain sensitive grid 11, two first inclined strain pads 12 and two inclined strain zero adjustment grids 13, and the first inclined strain sensitive grid 11 and the inclined strain zero adjustment grid 13 are arranged in the same direction.

[0033] The angle between the first oblique strain sensitive gate 11 and the horizontal direction is 45°, the first oblique strain sensitive gate 11 is connected between the two oblique strain zero adjustment gates 13, and the first oblique strain sensitive gate 11 is connected with the corresponding first oblique strain pad 12 through the oblique strain zero adjustment gate 13. At this time, the angle between the first oblique strain sensitive gates 11 in the two first oblique strain units 10 is 90°.

[0034] By arranging the two first oblique strain units 10 at the middle position of the substrate 60, the uniformity of the shear strain of the strain surface center can be corresponded, and the shear strain detection of the multi-dimensional force sensing Fx and Fy direction stress can be facilitated.

[0035] Further limitation, the second oblique strain unit 20 includes a second oblique strain sensitive gate 21, two second oblique strain pads 22 and two oblique strain zero adjustment gates 23, and the second oblique strain sensitive gate 21 is arranged in the same direction as the oblique strain zero adjustment gate 23.

[0036] The angle between the second oblique strain sensitive gate 21 and the horizontal direction is 45°, the second oblique strain sensitive gate 21 is connected between the two oblique strain zero adjustment gates 23, and the second oblique strain sensitive gate 21 is connected with the corresponding second oblique strain pad 22 through the oblique strain zero adjustment gate 23; the angle between the second oblique strain sensitive gates 21 in the two second oblique strain units 20 is 90°, and the angle between the second oblique strain sensitive gate 21 and the adjacent first oblique strain sensitive gate 11 is 90°. By arranging the two second oblique strain units 20 on the opposite sides of the two first oblique strain units 10, the second oblique strain unit 20 is close to the center of the strain surface, and is used for detecting the shear strain of the multi-dimensional force sensing Mz direction stress.

[0037] The length of the first oblique strain sensitive gate 11 and the second oblique strain sensitive gate 21 can be selected as 4.4mm, and the width of the first oblique strain sensitive gate 11 and the second oblique strain sensitive gate 21 can be selected as 2mm.

[0038] Further limitation, the first vertical strain unit 30 includes a first vertical strain sensitive gate 31, two first vertical strain zero adjustment gates 32 and two first vertical strain pads 33, and the first vertical strain sensitive gate 31 is arranged in the same direction as the first vertical strain zero adjustment gate 32.

[0039] The first vertical strain sensitive gate 31 is vertically arranged, the first vertical strain sensitive gate 31 is arranged between two first vertical strain zero adjustment gates 32, and the first vertical strain sensitive gate 31 is connected with the corresponding first vertical strain pad 33 through the first vertical strain zero adjustment gate 32; preferably, the two second inclined strain units 20 and the two first inclined strain units 10 are arranged between the two first vertical strain sensitive gates 31, so that the strain detection of the strain surfaces in the Mx and My directions of the multi-dimensional force sensor can be conveniently performed.

[0040] Further limited, the Mx and My directions of the multi-dimensional force sensor need to collect only the larger vertical direction strain because the deformation directions of the two strain surfaces are opposite, so two pieces of vertical sensitive gates are used for detection; and the Fz direction of the multi-dimensional force sensor needs to collect all the Poisson strain because the four surfaces of the multi-dimensional force sensor are consistent, so two pieces of vertical sensitive gates and two pieces of horizontal sensitive gates are used for detection; in order to simplify the bridge circuit composition, preferably, the two pieces of vertical sensitive gates used for detecting the Fz direction of the multi-dimensional force sensor are connected in series, and the two pieces of horizontal sensitive gates are connected in series.

[0041] Specifically, the second vertical strain unit 40 includes a second vertical strain sensitive gate 41, a second vertical strain pad 43, a second vertical strain first zero adjustment gate 42 and a second vertical strain second zero adjustment gate 44, and the second vertical strain first zero adjustment gate 42 and the second vertical strain second zero adjustment gate 44 are arranged in the same direction with the second vertical strain sensitive gate 41.

[0042] The parallel strain unit 50 includes a parallel strain sensitive gate 51, a parallel strain pad 53, a parallel strain first zero adjustment gate 52 and a parallel strain second zero adjustment gate 54, and the parallel strain first zero adjustment gate 52 and the parallel strain second zero adjustment gate 54 are arranged in the same direction with the parallel strain sensitive gate 51.

[0043] The second vertical strain sensitive gate 41 is arranged between the second vertical strain first zero adjustment gate 42 and the second vertical strain second zero adjustment gate 44, the second vertical strain pad 43 is connected with the second vertical strain first zero adjustment gate 42, and the two second vertical strain second zero adjustment gates 44 are connected in series between the two second vertical strain units 40; the two first inclined strain units 10, the two second inclined strain units 20 and the two first vertical strain units 30 are arranged between the two second vertical strain sensitive gates 41.

[0044] Similarly, the parallel strain sensitive gate 51 is arranged between the parallel strain first zero adjustment gate 52 and the parallel strain second zero adjustment gate 54, the parallel strain pad 53 is connected with the parallel strain first zero adjustment gate 52, and the two parallel strain second zero adjustment gates 54 are connected in series between the two parallel strain units 50; the two first inclined strain units 10, the two second inclined strain units 20, the two first vertical strain units 30 and the two second vertical strain units 40 are arranged between the two parallel strain units 50.

[0045] The length of the first vertical strain sensitive gate 31 can be selected as 4.4 mm, and the width can be selected as 1.5 mm. The second vertical strain sensitive gate 41 has the same size as the first vertical strain sensitive gate 31. The length of the parallel strain sensitive gate 51 can be selected as 4.4 mm, and the width can be selected as 2 mm.

[0046] At this time, the integrated strain gauge is arranged from left to right as the parallel strain unit 50, the second vertical strain unit 40, the first vertical strain unit 30, the second inclined strain unit 20, the first inclined strain unit 10, the first inclined strain unit 10, the second inclined strain unit 20, the first vertical strain unit 30, the second vertical strain unit 40, and the parallel strain unit 50.

[0047] Embodiment 3 Based on the multi-dimensional force sensor described in Embodiment 1 and Embodiment 2, this embodiment provides a multi-dimensional force sensor bridge circuit. For convenience of description, the parallel strain unit 50, the second vertical strain unit 40, the first vertical strain unit 30, the second inclined strain unit 20, the first inclined strain unit 10, the first inclined strain unit 10, the second inclined strain unit 20, the first vertical strain unit 30, the second vertical strain unit 40, and the parallel strain unit 50 in the integrated strain gauge are respectively represented as strain unit X-n, where X is the Xth patch face from the front patch face counterclockwise, n is the nth strain unit from left to right in the integrated strain gauge, X takes a value of 1-4, and n takes a value of 1-10; for example, 1-5 is the first inclined strain unit 10 on the left of the front strain face, and 3-8 is the first vertical strain unit 30 on the right of the back strain face.

[0048] Reference Figure 3 The multi-dimensional force sensor bridge circuit includes an Fx Wheatstone bridge, an Fy Wheatstone bridge, an Fz Wheatstone bridge, an Mx Wheatstone bridge, an My Wheatstone bridge, and an Mz Wheatstone bridge.

[0049] The Fx Wheatstone bridge is a first full-bridge measurement circuit, which is obtained by sequentially connecting the strain unit 1-6, the strain unit 1-5, the strain unit 3-5, and the strain unit 3-6, wherein the strain unit 3-6 is also connected with the strain unit 1-6. The positive electrode E+ of the input power is connected between the strain unit 1-6 and the strain unit 1-5, the negative electrode E- of the input power is connected between the strain unit 3-5 and the strain unit 3-6, the strain unit 1-5 and the strain unit 3-5 are a negative output end S-, and the strain unit 3-6 and the strain unit 1-6 are a positive output end S+. The Fx Wheatstone bridge is used to realize the measurement of the Fx direction of the multi-dimensional force sensor.

[0050] The Fy Wheatstone bridge is a second full-bridge measurement circuit, which is obtained by connecting strain units 4-6, 4-5, 2-5 and 2-6 in sequence, wherein the strain unit 2-6 is also connected to the strain unit 4-6; the positive input power supply E+ is connected between the strain unit 4-6 and the strain unit 4-5, the negative input power supply E- is connected between the strain unit 2-5 and the strain unit 2-6, the strain unit 4-5 and the strain unit 2-5 are connected as a negative output end S-, and the strain unit 2-6 and the strain unit 4-6 are connected as a positive output end S+, and the Fy Wheatstone bridge is used to realize the measurement of the Fy direction of the multi-dimensional force sensor.

[0051] Reference Figure 4 The Fz Wheatstone bridge is a third full-bridge measurement circuit, which includes a first half-bridge, a second half-bridge, a third half-bridge and a fourth half-bridge connected in sequence, and the first half-bridge and the fourth half-bridge are connected in series.

[0052] The first half-bridge includes strain units 1-10, 1-1, 3-1 and 3-10, the strain units 1-10 and 1-1 are connected in series, the strain units 4-1 and 4-10 are connected in series, and the series-connected strain units 1-10 and 1-1 are connected in parallel with the series-connected strain units 4-1 and 4-10.

[0053] The second half-bridge includes strain units 1-2, 1-9, 4-9 and 4-2, the strain units 1-2 and 1-9 are connected in series, the strain units 4-9 and 4-2 are connected in series, and the series-connected strain units 1-2 and 1-9 are connected in parallel with the series-connected strain units 4-9 and 4-2.

[0054] The third half-bridge includes strain units 2-1, 2-10, 3-10 and 3-1, the strain units 2-1 and 2-10 are connected in series, the strain units 3-10 and 3-1 are connected in series, and the series-connected strain units 2-1 and 2-10 are connected in parallel with the series-connected strain units 3-10 and 3-1.

[0055] The fourth half-bridge includes strain units 2-9, 2-2, 3-2 and 3-9, the strain units 2-9 and 2-2 are connected in series, the strain units 3-2 and 3-9 are connected in series, and the series-connected strain units 2-9 and 2-2 are connected in parallel with the series-connected strain units 3-10 and 3-1.

[0056] Wherein, the input power positive pole E+ is connected between the third half bridge and the fourth half bridge in series, the input power negative pole E- is connected between the first half bridge and the second half bridge in series, the second half bridge and the third half bridge are the negative output end S-, the first half bridge and the fourth half bridge are the positive output end S+; the Fz Wheatstone bridge is used for realizing the multi-dimensional force sensor Fz measurement.

[0057] The Mx Wheatstone bridge is the fourth full-bridge measurement circuit, which is composed of the strain unit 1-8, the strain unit 3-8, the strain unit 1-3 and the strain unit 3-3 in series, and the strain unit 1-8 is also connected with the strain unit 3-3 in series; the input power positive pole E+ is connected between the strain unit 1-8 and the strain unit 3-8, the input power negative pole E- is connected between the strain unit 1-3 and the strain unit 3-3, the strain unit 1-8 and the strain unit 3-3 are the negative output end S+, and the strain unit 3-8 and the strain unit 1-3 are the positive output end S-; the Mx Wheatstone bridge is used for realizing the multi-dimensional force sensor Mx direction measurement.

[0058] The My Wheatstone bridge is the fifth full-bridge measurement circuit, which is composed of the strain unit 2-3, the strain unit 4-3, the strain unit 2-8 and the strain unit 4-8 in series, and the strain unit 2-3 is also connected with the strain unit 4-8 in series; the input power positive pole E+ is connected between the strain unit 2-8 and the strain unit 4-8, the input power negative pole E- is connected between the strain unit 2-3 and the strain unit 4-3, the strain unit 2-3 and the strain unit 4-8 are the negative output end S+, and the strain unit 4-3 and the strain unit 2-8 are the negative output end S-; the My Wheatstone bridge is used for realizing the multi-dimensional force sensor My direction measurement.

[0059] Reference Figure 5 The Mz Wheatstone bridge is the sixth full-bridge measurement circuit, which is composed of the strain unit 4-4, the strain unit 3-4, the strain unit 2-7, the strain unit 3-7, the strain unit 2-4, the strain unit 1-4, the strain unit 4-7 and the strain unit 1-7 in series, and the strain unit 4-4 is also connected with the strain unit 1-7 in series.

[0060] The input power positive pole E+ is connected between the strain unit 1-4 and the strain unit 4-7, the input power negative pole E- is connected between the strain unit 3-4 and the strain unit 2-7, the strain unit 4-4 and the strain unit 1-7 are the negative output end S+, and the strain unit 3-7 and the strain unit 2-4 are the negative output end S-; the Mz Wheatstone bridge is used for realizing the multi-dimensional force sensor Mz direction measurement.

[0061] By optimizing the stress direction distribution of the sensitive gate in each strain unit, the cross talk of each direction stress to other directions is self-canceled; for example, when the multi-dimensional force sensor is loaded in the Fx direction, strain units 1-5, 1-7, 2-4 and 2-6 are subjected to tensile stress, and strain units 1-4, 1-6, 2-5 and 2-7 are subjected to compressive stress, at this time, the first full-bridge measurement circuit can feedback the Fx direction loading size, while in the sixth full-bridge measurement circuit, strain units 1-4, 1-7, 2-4 and 2-7 cancel each other out, and the output is unchanged; the actual measurement of the multi-dimensional force sensor cross talk accuracy can reach 0.1%.

[0062] The above shows and describes the basic principles and main features of the present application and the advantages of the present application, and it is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and it is intended to encompass all variations falling within the meaning and scope of the equivalent elements of the claims. Any reference signs in the claims should not be considered as limiting the claims involved.

[0063] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand. The above is only to illustrate the technical idea of the present application, and cannot limit the protection scope of the present application, and any modification made on the basis of the technical solutions according to the present application falls within the protection scope of the claims of the present application.

[0064] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A multi-dimensional force sensor, characterized by, The application relates to a strain gauge integrated elastic body, which comprises an upper supporting section (71), a lower supporting section (72) and four vertical supporting columns (73) arranged between the upper supporting section (71) and the lower supporting section (72), wherein two of the supporting columns (73) are symmetrically arranged left and right, and two of the supporting columns (73) are symmetrically arranged front and back; a patch surface is arranged on each of the supporting columns (73), and a strain gauge is arranged on the patch surface.

2. The multi-dimensional force sensor of claim 1, wherein, The strain gauge integrated elastic body comprises a substrate (60) and two first inclined strain units (10), two second inclined strain units (20), two first vertical strain units (30), two second vertical strain units (40) and two parallel strain units (50) arranged on the substrate (60), wherein the substrate (60) is bonded to the patch surface. The two first inclined strain units (10) are symmetrically arranged in a transverse direction, and the two first inclined strain units (10) are arranged perpendicularly to each other; the two second inclined strain units (20) are symmetrically arranged on opposite sides of the two first inclined strain units (10), the first inclined strain unit (10) and the adjacent second inclined strain unit (20) are arranged perpendicularly to each other, the two parallel strain units (50) are connected to each other, and the two second vertical strain units (40) are connected to each other.

3. The multi-dimensional force sensor of claim 2, wherein, The first inclined strain unit (10) comprises a first inclined strain sensitive grid (11), two first inclined strain pads (12) and two inclined strain zero adjustment grids (13). The angle between the first inclined strain sensitive grid (11) and the horizontal direction is 45 degrees, the first inclined strain sensitive grid (11) is connected between the two inclined strain zero adjustment grids (13), the first inclined strain sensitive grid (11) is connected to the corresponding first inclined strain pad (12) through the inclined strain zero adjustment grid (13), the first inclined strain sensitive grids (11) in the two first inclined strain units (10) are arranged perpendicularly, and the first inclined strain sensitive grid (11) and the inclined strain zero adjustment grid (13) are arranged in the same direction. The second inclined strain unit (20) comprises a second inclined strain sensitive grid (21), two second inclined strain pads (22) and two inclined strain zero adjustment grids (23). The angle between the second inclined strain sensitive grid (21) and the horizontal direction is 45 degrees, the second inclined strain sensitive grid (21) is connected between the two inclined strain zero adjustment grids (23), the second inclined strain sensitive grid (21) is connected to the corresponding second inclined strain pad (22) through the inclined strain zero adjustment grid (23), the second inclined strain sensitive grids (21) in the two second inclined strain units (20) are arranged perpendicularly, the second inclined strain sensitive grid (21) and the adjacent first inclined strain sensitive grid (11) are arranged perpendicularly, and the second inclined strain sensitive grid (21) and the inclined strain zero adjustment grid (23) are arranged in the same direction.

4. The multi-dimensional force sensor of claim 3, wherein, The first vertical strain unit (30) comprises a first vertical strain sensitive gate (31), two first vertical strain zero adjustment gates (32) and two first vertical strain pads (33); The first vertical strain sensitive gate (31) is vertically arranged, the first vertical strain sensitive gate (31) is arranged between the two first vertical strain zero adjustment gates (32), the first vertical strain sensitive gate (31) is connected with the corresponding first vertical strain pad (33) through the first vertical strain zero adjustment gate (32), and the first vertical strain sensitive gate (31) is arranged in the same direction as the first vertical strain zero adjustment gate (32); The two second inclined strain units (20) and the two first inclined strain units (10) are arranged between the two first vertical strain sensitive gates (31).

5. The multi-dimensional force sensor of claim 4, wherein, The second vertical strain unit (40) comprises a second vertical strain sensitive gate (41), a second vertical strain pad (43), a second vertical strain first zero adjustment gate (42) and a second vertical strain second zero adjustment gate (44); The second vertical strain sensitive gate (41) is arranged between the second vertical strain first zero adjustment gate (42) and the second vertical strain second zero adjustment gate (44), the second vertical strain pad (43) is connected with the second vertical strain first zero adjustment gate (42), in the two second vertical strain units (40), the two second vertical strain second zero adjustment gates (44) are connected between them, the second vertical strain first zero adjustment gate (42) and the second vertical strain second zero adjustment gate (44) are arranged in the same direction as the second vertical strain sensitive gate (41); the two first inclined strain units (10), the two second inclined strain units (20) and the two first vertical strain units (30) are arranged between the two second vertical strain sensitive gates (41).

6. The multi-dimensional force sensor of claim 5, wherein, The parallel strain unit (50) comprises a parallel strain sensitive gate (51), a parallel strain pad (53), a parallel strain first zero adjustment gate (52) and a parallel strain second zero adjustment gate (54), and the parallel strain first zero adjustment gate (52) and the parallel strain second zero adjustment gate (54) are arranged in the same direction as the parallel strain sensitive gate (51); The parallel strain sensitive gate (51) is arranged between the parallel strain first zero adjustment gate (52) and the parallel strain second zero adjustment gate (54), the parallel strain pad (53) is connected with the parallel strain first zero adjustment gate (52), and in the two parallel strain units (50), the two parallel strain second zero adjustment gates (54) are connected between them; the two first inclined strain units (10), the two second inclined strain units (20), the two first vertical strain units (30) and the two second vertical strain units (40) are arranged between the two parallel strain units (50).

7. A multi-dimensional force sensor bridge completion circuit, characterized by comprising: The multi-dimensional force sensor based on claim 6 comprises an Fx Wheatstone bridge and an Fy Wheatstone bridge; The Fx Wheatstone bridge is sequentially composed of two first inclined strain units (10) on the front side patch surface and two first inclined strain units (10) on the rear side patch surface; The Fy Wheatstone bridge is sequentially composed of two second vertical strain units (40) on the front side patch surface and two second vertical strain units (40) on the rear side patch surface. The Fy Wheatstone bridge is composed of two first inclined strain units (10) on the left patch surface and two first inclined strain units (10) on the right patch surface in sequence.

8. The multi-dimensional force sensor bridge completion circuit according to claim 7, characterized by, The multi-dimensional force sensor group bridge circuit further comprises an Fz Wheatstone bridge; The Fz Wheatstone bridge is composed of two parallel strain units (50) on the front patch surface, two second vertical strain units (40) on the front patch surface, two parallel strain units (50) on the right patch surface, two second vertical strain units (40) on the right patch surface, two parallel strain units (50) on the back patch surface, two second vertical strain units (40) on the back patch surface, two parallel strain units (50) on the left patch surface and two second vertical strain units (40) on the left patch surface. The two parallel strain units (50) on the front patch surface are connected in parallel with the two parallel strain units (50) on the left patch surface, the two second vertical strain units (40) on the front patch surface are connected in parallel with the two second vertical strain units (40) on the left patch surface, the two parallel strain units (50) on the right patch surface are connected in parallel with the two parallel strain units (50) on the back patch surface, and the two second vertical strain units (40) on the right patch surface are connected in parallel with the two second vertical strain units (40) on the back patch surface.

9. The multi-dimensional force sensor bridge completion circuit according to claim 8, characterized in that, The multi-dimensional force sensor group bridge circuit further comprises an Mx Wheatstone bridge and an My Wheatstone bridge; The Mx Wheatstone bridge is composed of two first vertical strain units (30) on the front patch surface and two first vertical strain units (30) on the back patch surface in sequence. The My Wheatstone bridge is composed of two first vertical strain units (30) on the right patch surface and two first vertical strain units (30) on the right patch surface in sequence.

10. The multi-dimensional force sensor bridge completion circuit according to claim 9, characterized in that, The multi-dimensional force sensor group bridge circuit further comprises an Mz Wheatstone bridge; The Mz Wheatstone bridge comprises two second inclined strain units (20) on the front patch surface, two second inclined strain units (20) on the right patch surface, two second inclined strain units (20) on the back patch surface and two second inclined strain units (20) on the left patch surface in sequence.

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