Method for measuring and adjusting spatial attitude of numerical control rotary table and lifting locking mechanism

By using a three-point lifting and locking mechanism and a single-sensor measurement method, high-precision spatial attitude measurement and adjustment of the CNC rotary table was achieved, solving the problems of sensor accuracy limitations and insufficient locking stability, and improving the accuracy and stability of ultra-precision machining.

CN120985529APending Publication Date: 2025-11-21LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Patent Information

Application Number
CN202511198432.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-26
Publication Date
2025-11-21

AI Technical Summary

Technical Problem

Existing technologies struggle to achieve high-precision spatial attitude measurement and adjustment of CNC rotary tables, especially in ultra-precision machining, where sensor accuracy limitations and insufficient locking stability lead to inadequate machining accuracy.

Method used

A three-point lifting and locking mechanism and a single-sensor measurement method are adopted. By measuring and adjusting the Z-axis coordinate values ​​of the CNC rotary table at multiple positions in stages, the verticality error is calculated and the height of the locking mechanism is adjusted. Combined with the mechanical locking mechanism, the posture stability is ensured.

Benefits of technology

It achieves precise decoupling of the perpendicularity error of the rotation axis, improves the measurement resolution to ±0.1″, meets the requirements of ultra-precision machining, and the mechanical locking mechanism ensures the posture is maintained during 2000 hours of continuous machining, reducing system complexity and failure rate.

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Abstract

The invention relates to a method for measuring and adjusting the spatial attitude of a numerical control rotating table and lifting locking mechanisms, and the method comprises the steps: enabling the numerical control rotating table to be installed in the center of an X-axis sliding table through three lifting locking mechanisms which are arranged at intervals of 120 degrees, the lifting locking mechanism B and the lifting locking mechanism C are located on the positive side of the Y axis and the negative side of the Y axis respectively. A displacement sensor is fixed to the end of a machine tool spindle, the measuring direction is arranged downwards along the Z axis, measuring points are marked on the surface of a numerical control rotating table, and the displacement sensor is moved to measure the height of the measuring points marked on the surface of the numerical control rotating table under a machine tool coordinate system. By means of the single-sensor four-position difference method, the resolution ratio is increased to + / -0.1 '', and the ultra-precise aspheric surface machining requirement is met; the posture maintenance of continuous processing within 2000 hours is ensured; and the complexity and the failure rate are reduced.
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Description

Technical Field

[0001] This invention relates to the field of ultra-precision manufacturing and equipment technology, and more specifically to a method for measuring and adjusting the spatial attitude of a CNC rotary table and a lifting and locking mechanism. Background Technology

[0002] Aspherical optical elements are widely used in high-precision optical equipment because they can eliminate aberrations such as spherical aberration and coma, improving the focusing accuracy and energy efficiency of optical systems. The core of their manufacturing lies in the ultra-precision forming stage, which requires a CNC rotary table to rotate the workpiece, followed by machining along the generatrix using a diamond grinding wheel. However, the spatial orientation error of the rotation axis (i.e., the perpendicularity deviation of the rotation axis to the XOY coordinate plane) directly leads to out-of-tolerance aspherical surface shape accuracy, becoming a key bottleneck restricting machining precision.

[0003] Current technologies for detecting and adjusting the attitude of the rotary axis have the following shortcomings:

[0004] Multi-sensor fusion solutions (such as the rotary table axis attitude composite measurement system disclosed in patent document CN110842676A) fuse data from tilt sensors, displacement sensors, and encoders, and then dynamically reconstruct the axis pose using Kalman filtering. However, the system is highly complex, and the sensors themselves limit the overall resolution (usually only ±0.5″), making it difficult to meet the ±0.1″ requirement for ultra-precision machining.

[0005] Existing technologies employ piezoelectric ceramic-driven wedge mechanisms to correct skew in real time. However, long-term machining vibrations can easily cause the compensation mechanism to drift, and the lack of locking stability design makes it impossible to guarantee posture maintenance during continuous machining.

[0006] Existing contour measurement technologies focus on aspherical surface scanning or contour detection, but have not solved the problem of direct high-precision measurement and adjustment of the verticality of the rotary table axis; while existing machining processes have optimized the machining flow, they have not addressed the basic pose calibration of the machine tool rotary table.

[0007] Therefore, how to provide a method for measuring and adjusting the spatial attitude of a CNC rotary table is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0008] Therefore, one object of the present invention is to provide a method for measuring and adjusting the spatial posture of a CNC rotary table, and another object is to provide a lifting and locking mechanism for the above method.

[0009] The CNC rotary table spatial attitude measurement and adjustment method of the present invention includes the following steps:

[0010] S1 installs the CNC rotary table in the center of the X-axis slide table through three lifting and locking mechanisms spaced 120° apart. Lifting and locking mechanism A is located on the positive side of the X-axis, while lifting and locking mechanisms B and C are located on the positive and negative sides of the Y-axis, respectively.

[0011] S2 fixes the displacement sensor to the end of the machine tool spindle, with the measurement direction arranged downward along the Z-axis. Mark the measurement points on the surface of the CNC rotary table, and move the displacement sensor to measure the Z-axis coordinate values ​​of the marked measurement points at the 90° and 270° positions of the CNC rotary table in the machine tool coordinate system in sequence.

[0012] S3 calculates the YOZ plane perpendicularity error ay based on the Z-axis coordinate difference between 90° and 270°, and adjusts the height of lifting locking mechanism B or lifting locking mechanism C until ay meets the processing requirements.

[0013] The S4 motion displacement sensor measures the Z-axis coordinates of the marked measurement points of the CNC rotary table at 0° and 180° positions in the machine tool coordinate system.

[0014] S5 calculates the XOZ plane perpendicularity error ax based on the Z-axis coordinate difference between 0° and 180°, and adjusts the height of the lifting and locking mechanism A until ax meets the processing requirements.

[0015] S6 locks all lifting and locking mechanisms, completing the measurement and adjustment of the spatial posture error of the CNC rotary table.

[0016] According to the method of the present invention, in S1, the line connecting the center of locking bolt A and the center of the CNC rotary table is parallel to the X-axis, and the line connecting the center of locking bolt B and the center of locking bolt C is parallel to the Y-axis. The three locking bolts are loosened, and the center distance L between locking bolt B and locking bolt C is recorded. bc And the distance L from the center of locking bolt A to the line connecting the centers of locking bolts B and C. a .

[0017] According to the method of the present invention, the measurement point in S2 is the CNC rotary table rotated to the 0° position of the machine tool coordinate system, located on a diameter parallel to the X-axis, and 10mm to 20mm away from the edge of the CNC rotary table.

[0018] According to the method of the present invention, the calculation formula in S3 is:

[0019]

[0020] The calculation formula in S5 is:

[0021]

[0022] Among them, z y1 ,y y1(z) represents the 90° position coordinate. y2 ,y y2 ) represents the 270° position coordinate, z x1 ,x x1 For 0° position coordinates, (z x2 ,x x2 () represents the 180° position coordinates.

[0023] According to the method of the present invention, the height adjustment amount h in S3 y satisfy:

[0024] h y =L bc tanα y 3);

[0025] S5 height adjustment amount h x satisfy:

[0026] h x =L a tanα x 4).

[0027] According to the method of the present invention, the displacement sensor is a contact probe or a non-contact laser displacement sensor, which is fixed to the end of the machine tool spindle and measures along the Z-axis.

[0028] The present invention provides a lifting and locking mechanism for the above-described method, comprising:

[0029] The base is mounted on the X-axis slide, and two parallel first flat guide rails are arranged on its top along the length of the X-axis slide.

[0030] The sliding block has a second flat guide rail at the bottom that mates with a first flat guide rail, and two parallel first inclined guide rails at the top. The base and the sliding block are driven to move relative to each other by an adjustment assembly.

[0031] The top plate is supported, and the bottom has a second inclined guide rail that slides in conjunction with the first inclined guide rail; its top plane lifts and supports the CNC rotary worktable.

[0032] The base, sliding block, and supporting top plate are respectively provided with a first long slot, a second long slot, and a third long slot for locking bolts to pass through to connect the T-block and the CNC rotary table.

[0033] According to the lifting and locking mechanism of the present invention, the adjusting component includes an adjusting screw, and the base corresponding to the first flat guide rail has side plates at both ends, one of which has a shaft hole for mounting a bearing. One end of the sliding block has a threaded hole connected to the adjusting screw, and one end of the adjusting screw passes through the bearing and extends out of the side plate section as an adjusting end.

[0034] According to the lifting and locking mechanism of the present invention, the bearing is a thrust bearing, and the outer side of its corresponding side plate has a bearing limiting plate to constrain the radial displacement of the thrust bearing.

[0035] According to the lifting and locking mechanism of the present invention, the inclined angle of the first inclined guide rail is 2°-3°; the surface roughness of the first flat guide rail, the second flat guide rail, the first inclined guide rail, and the second inclined guide rail is ≤Ra0.8, and an oil storage tank is provided.

[0036] As can be seen from the above technical solution, compared with the prior art, the present invention has the following effects:

[0037] 1. This invention achieves precise decoupling of the perpendicularity error of the rotation axis by step-by-step measurement and adjustment at 90° and 270° positions (YOZ plane) and 0° and 180° positions (XOZ plane), avoiding interference from multi-plane error coupling, and achieving a measurement resolution of ±0.1″.

[0038] 2. This invention records the distance L between locking bolts B and C. bc The position offset La provides a precise geometric reference for calculating the height adjustment, eliminating empirical adjustment errors.

[0039] 3. The measurement point should be 10mm to 20mm away from the edge of the workbench, avoiding the clamping deformation zone, to ensure that the coordinate acquisition reflects the true posture error.

[0040] 4. By using the verticality formula and the height adjustment formula, the spatial attitude error is converted into an executable mechanical adjustment amount.

[0041] 5. Contact / non-contact displacement sensors are adapted to different working conditions (such as vibration environments or non-contact measurement requirements), improving the versatility of the method.

[0042] 6. In this invention, the inclined guide rail (2°~3°) amplifies the horizontal displacement into a vertical nanometer displacement (1mm-3.6μm at a 2.5° tilt angle), and the combination of the Ra≤0.8 guide rail surface and the oil reservoir achieves smooth fine adjustment; the T-slot bolt locking mechanism resists processing vibration and maintains ±0.1″ accuracy stability.

[0043] In summary, compared with existing technologies where the sensor's own accuracy limits the overall resolution (usually only ±0.5″), this invention's single-sensor four-position differential method improves the resolution to ±0.1″ to meet the requirements of ultra-precision aspherical surface machining; the mechanical locking mechanism compensates for the lack of locking in existing piezoelectric compensation, ensuring posture maintenance during 2000 hours of continuous machining; and the pure mechanical adjustment replaces the multi-sensor fusion system, reducing complexity and failure rate. Attached Figure Description

[0044] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0045] Figure 1 This is a longitudinal half-sectional view of the lifting and locking mechanism provided by the present invention in its installed state.

[0046] Figure 2 This is a schematic diagram of the overall structure of the lifting and locking mechanism provided by the present invention in its installed state.

[0047] Figure 3 This is an exploded view of a portion of the lifting and locking mechanism provided by the present invention;

[0048] Figure 4 The diagram illustrates the use of three lifting and locking mechanisms to connect the CNC rotary table in the method of the present invention.

[0049] Figure 5 This diagram illustrates the position of the CNC rotary table at 0° in the machine tool coordinate system.

[0050] Figure 6 The diagram illustrates the 180° position of the CNC rotary table in the machine tool coordinate system.

[0051] Figure 7 The diagram illustrates the position of the CNC rotary table at 90° in the machine tool coordinate system.

[0052] Figure 8 The diagram illustrates the position of the CNC rotary table at 270° in the machine tool coordinate system. Detailed Implementation

[0053] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0054] In the ultra-precision forming stage of aspherical optical components, a CNC rotary table is used to rotate the workpiece, which is then machined along the generatrix using a diamond grinding wheel. However, the spatial attitude error of the rotation axis, i.e., the perpendicularity deviation of the rotation axis to the XOY coordinate plane, directly leads to out-of-tolerance aspherical surface shape accuracy, becoming a key bottleneck restricting machining accuracy. Current technologies for detecting and adjusting the rotation axis attitude have the following drawbacks: multi-sensor fusion schemes have high system complexity, and the sensors themselves typically have an accuracy of only ±0.5″, which is insufficient to meet the ±0.1″ requirement of ultra-precision machining. The technology of using piezoelectric ceramic-driven wedge mechanisms to correct skew in real time is prone to drift of the compensation mechanism due to long-term machining vibration, making it impossible to guarantee attitude maintenance during continuous machining. Existing contour measurement technologies focus on aspherical surface shape scanning or contour detection, without addressing the direct high-precision measurement and adjustment of the rotary table axis perpendicularity; while existing machining processes have optimized the machining flow, they do not address the basic pose calibration of the machine tool rotary table.

[0055] In view of this, see Appendix Figure 5 This invention involves measurement and adjustment on an XYZ three-orthogonal linear axis ultra-precision grinding machine. The ultra-precision grinding machine mainly includes a bed (see appendix). Figure 5 The machine consists of a coordinate system (X-axis bed, Y-axis bed), X-axis slide, column, spindle box, etc. A CNC rotary table 40 is mounted on the X-axis slide 10. During component machining, the CNC rotary table 40 rotates on its own axis and moves left and right along the X-axis of the ultra-precision grinding machine along the X-axis with the X-axis slide 10 for interpolation. A lifting and locking mechanism 50 supports the CNC rotary table 40 and allows for minor height adjustments. Once the height is adjusted, locking bolts 30 securely connect the CNC rotary table to the X-axis slide 10. A displacement sensor 60 is fixed to the end of the spindle axis to measure the height of the CNC rotary table surface.

[0056] Furthermore, this invention provides a method for measuring and adjusting the spatial attitude of a CNC rotary table, which can be summarized as follows:

[0057] S1 installs the CNC rotary table in the center of the X-axis slide table through three lifting and locking mechanisms spaced 120° apart. Lifting and locking mechanism A is located on the positive side of the X-axis, while lifting and locking mechanisms B and C are located on the positive and negative sides of the Y-axis, respectively.

[0058] S2 fixes the displacement sensor to the end of the machine tool spindle, with the measurement direction arranged downward along the Z-axis. Mark the measurement points on the surface of the CNC rotary table, and move the displacement sensor to measure the Z-axis coordinate values ​​of the marked measurement points at the 90° and 270° positions of the CNC rotary table in the machine tool coordinate system in sequence.

[0059] S3 calculates the YOZ plane perpendicularity error ay based on the Z-axis coordinate difference between 90° and 270°, and adjusts the height of lifting locking mechanism B or lifting locking mechanism C until ay meets the processing requirements.

[0060] The S4 motion displacement sensor measures the Z-axis coordinates of the marked measurement points of the CNC rotary table at 0° and 180° positions in the machine tool coordinate system.

[0061] S5 calculates the XOZ plane perpendicularity error ax based on the Z-axis coordinate difference between 0° and 180°, and adjusts the height of the lifting and locking mechanism A until ax meets the processing requirements.

[0062] S6 locks all lifting and locking mechanisms, completing the measurement and adjustment of the spatial posture error of the CNC rotary table.

[0063] Specifically, in S1, the line connecting the center of locking bolt A and the center of the CNC rotary table is parallel to the X-axis, and the line connecting the center of locking bolt B and the center of locking bolt C is parallel to the Y-axis. Loosen the three locking bolts and record the center distance L between locking bolt B and locking bolt C. bc And the distance L from the center of locking bolt A to the line connecting the centers of locking bolts B and C. a .

[0064] The measurement point in S2 is located on a diameter parallel to the X-axis, 10-20 mm from the edge of the CNC rotary table, when the CNC rotary table is rotated to the 0° position of the machine tool coordinate system.

[0065] The calculation formula in S3 is:

[0066]

[0067] The calculation formula in S5 is:

[0068]

[0069] Among them, z y1 ,y y1 (z) represents the 90° position coordinate. y2 ,y y2 ) represents the 270° position coordinate, z x1 ,x x1 For 0° position coordinates, (z x2 ,x x2 () represents the 180° position coordinates.

[0070] S3 height adjustment amount h y satisfy:

[0071] h y =L bc tanα y 3);

[0072] S5 height adjustment amount h x satisfy:

[0073] h x =L a tanα x 4).

[0074] The displacement sensor 60 is a contact probe or a non-contact laser displacement sensor, which is fixed to the end of the machine tool spindle and measures along the Z-axis.

[0075] This invention corrects the YOZ plane alignment by using the ay mechanism and lifting locking mechanisms B / C to change the support height of the worktable on the negative / positive Y-axis side, directly correcting the axial deviation within the YOZ plane. XOZ plane alignment is achieved by using the ax mechanism. After completing the dual-plane adjustment with three-point coordinated locking, the locking bolts of the three lifting locking mechanisms are tightened, and the mechanism is rigidly fixed via T-slots: lifting locking mechanisms B / C maintain the height after YOZ plane alignment; lifting locking mechanism A maintains the height after XOZ plane alignment; the three points together constrain and ensure that the rotation axis remains perpendicular to the XOY coordinate plane for an extended period.

[0076] This invention decomposes the spatial perpendicularity deviation into the YOZ / XOZ plane through geometric error decoupling (Formulas 1-4), calculates the height adjustment amount (hy, hx) separately, and achieves high-precision correction by using three-point independent fine-tuning + rigid locking, reducing the perpendicularity error from ±0.5″ to ±0.1″; long-term stability, resisting vibration interference in ultra-precision machining; engineering practicality, requiring only a single sensor and mechanical adjustment mechanism, with cost and reliability superior to multi-sensor solutions.

[0077] Specifically, such as Figure 4 and 5 Place the CNC rotary table 40 in the center of the X-axis slide 10. Place three lifting and locking mechanisms 50 (referred to as lifting and locking mechanism A, lifting and locking mechanism B, and lifting and locking mechanism C for distinction; each lifting and locking mechanism 50 has a locking bolt 30, referred to as locking bolt A, locking bolt B, and locking bolt C for distinction; the correspondence is that lifting and locking mechanism A has locking bolt A, lifting and locking mechanism B has locking bolt B, and lifting and locking mechanism C has locking bolt C) at 120° intervals. Lifting and locking mechanism A is placed on the positive side of the X-axis, with the line connecting the center of locking bolt A and the center of the CNC rotary table parallel to the X-axis. Lifting and locking mechanisms B and C are placed on the positive and negative sides of the Y-axis, respectively, with the line connecting the center of locking bolt B and the center of locking bolt C parallel to the Y-axis. After placement, loosen the three locking bolts. Record the center distance L between locking bolts B and C at this time. bcAnd the distance L from the center of locking bolt A to the line connecting the centers of locking bolts B and C. a .

[0078] See appendix Figure 5 The displacement sensor 60 is fixed at the end of the main shaft, and the measuring optical path of the probe or displacement sensor is downward along the Z-axis.

[0079] Rotate the CNC rotary table 40 until it is at the 0° position of the machine tool coordinate system. Mark a point 10mm to 20mm from the right edge of the CNC rotary table 40 on a diameter parallel to the X-axis. This mark is for spatial attitude measurement. Figure 5 (The black dots on the CNC rotary table are spatial attitude measurement markers).

[0080] Rotate the CNC rotary table 40 to a 90° position in the machine tool coordinate system. Move the X and Y axes of the ultra-precision grinding machine so that the displacement sensor 60 is directly above the spatial attitude measurement mark on the surface of the CNC rotary table 40. Slowly lower the Z-axis so that the displacement sensor 60 measures the CNC rotary table surface and the reading is 0. Record the Z-axis and Y-axis coordinates of the machine tool coordinate system at this time, which are z y1 y y1 See appendix. Figure 7 (The black dots on the CNC rotary table are spatial attitude measurement markers).

[0081] See appendix Figure 8 Rotate the CNC rotary table 40 to position it at 270° in the machine tool coordinate system. Move the X and Y axes of the ultra-precision grinding machine so that the displacement sensor 60 is directly above the spatial attitude measurement mark on the surface of the CNC rotary table. Slowly lower the Z axis so that the displacement sensor measures the CNC rotary table surface and the reading is 0. Record the Z-axis and Y-axis coordinates of the machine tool coordinate system at this time, which are z y2 y y2 .

[0082] According to Formula 1), calculate the perpendicularity error αy of the rotation axis of the CNC rotary table 40 in the YOZ plane, and calculate the relative height hy of the lifting locking mechanism B and the lifting locking mechanism C in the Z-axis direction according to Formula 3).

[0083] Adjust the relative height of lifting locking mechanism B or lifting locking mechanism C, and repeat the steps at 90° and 270° positions in the machine tool coordinate system until the perpendicularity error αy of the CNC rotary table 40 rotation axis in the YOZ plane meets the machining process requirements.

[0084] Then, rotate the CNC rotary table 40 to its 0° position in the machine coordinate system. Move the X and Y axes of the ultra-precision grinding machine so that the displacement sensor 60 is directly above the spatial attitude measurement mark on the surface of the CNC rotary table 40. Slowly lower the Z axis so that the displacement sensor measures the CNC rotary table surface and the reading is 0. Record the Z-axis and X-axis coordinates of the machine coordinate system at this time, which are z x1 x x1 See appendix. Figure 5 Corresponding position.

[0085] See appendix Figure 6 Rotate the CNC rotary table to 40°, positioning it at 180° in the machine coordinate system. Move the X and Y axes of the ultra-precision grinding machine so that the displacement sensor 60 is directly above the spatial attitude measurement mark on the surface of the CNC rotary table. Slowly lower the Z-axis until the displacement sensor 60 measures the CNC rotary table surface and the reading is 0. Record the Z-axis and X-axis coordinates of the machine coordinate system at this moment, which are z x2 x x2 .

[0086] According to formula 2), calculate the perpendicularity error αx of the rotation axis of the CNC rotary table in the XOZ plane, and calculate the relative height hx of the lifting locking mechanism A and the lifting locking mechanisms B and C in the Z-axis direction according to formula 4).

[0087] Adjust only the support height of the lifting and locking mechanism A, and repeat the steps at the 0° position and 180° position in the mechanical coordinate system until the perpendicularity error αx of the rotation axis of the CNC rotary table in the XOZ plane meets the machining process requirements, thus completing the measurement and adjustment of the spatial posture error of the CNC rotary table.

[0088] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0089] The present invention also provides a lifting and locking mechanism for the above method, see appendix. Figure 1-3 It includes a base 51, a sliding block 55, a supporting top plate 56, etc.

[0090] The base 51 is mounted on the X-axis slide table 10, and its top has two parallel first flat guide rails 511 arranged along the length of the X-axis slide table 10; the bottom of the sliding block 55 has two second flat guide rails (second flat guide rail one 551, second flat guide rail two 552) that cooperate with the two first flat guide rails 511, and the top has two parallel first inclined guide rails 554. The base 51 and the sliding block 55 are driven to move relative to each other by an adjustment component; the bottom of the supporting top plate 56 has second inclined guide rails (second inclined guide rail one 561, second inclined guide rail two 562) that slide with the first inclined guide rails 554; its top plane 564 lifts and supports the CNC rotary table 40.

[0091] The base 51, the sliding block 55 and the supporting top plate 56 are respectively provided with a first long groove 513, a second long groove 555 and a third long groove 563 for the locking bolt 30 to pass through to connect the T-shaped block 20 and the CNC rotary table 40.

[0092] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0093] See appendix Figure 4 When the above-mentioned mechanisms are used in the method of the present invention, they are arranged in three 120° intervals. The lifting and locking mechanisms A, B, and C have the same structure. The X-axis slide 10 is provided with a T-slot, and a T-block 20 is installed inside. The lifting and locking mechanism 50 is placed above the T-slot. After the CNC rotary table is placed on the lifting and locking mechanism and the spatial posture measurement and adjustment are completed, the locking bolt 30 is passed through the mounting hole of the CNC rotary table base 51 and the "long slot" in the center of the lifting and locking mechanism, and is connected to the threaded hole on the T-block 20 to complete the locking of the CNC rotary table.

[0094] The adjustment assembly includes an adjustment screw 53. The base 51 corresponding to the first flat guide rail 511 has side plates at both ends. One side plate has a shaft hole 512 for mounting a bearing 54. One end of the sliding block 55 has a threaded hole 553 connected to the adjustment screw 53. One end of the adjustment screw 53 passes through the bearing 54 and extends out of the side plate section as the adjustment end.

[0095] When the adjusting end of the rotating adjusting screw 53 is rotated, the sliding block 55 moves along the axis of the adjusting screw on the flat guide rail of the base. Through the inclined guide rail, the horizontal movement of the sliding block 55 is converted into the lifting and lowering motion of the supporting top plate, thus realizing the height adjustment of the CNC rotary table.

[0096] The bearing 54 is a thrust bearing, and its corresponding side plate has a bearing limiting plate 52 on the outer side to constrain the radial displacement of the thrust bearing.

[0097] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0098] See appendix Figure 3 During the lifting and adjusting process, the sliding block 55 moves along the axis of the adjusting screw 53 by rotating the adjusting screw, and there is a relative lateral movement between the sliding block 55 and the base 51. To reduce the resistance during lifting and adjusting, the inclination angle of the first inclined guide rail 554 and the second inclined guide rail is 2°-3°; the surface roughness of the first flat guide rail 511, the second flat guide rail, the first inclined guide rail 554, and the second inclined guide rail is ≤Ra0.8, and an oil reservoir is provided for adding grease.

[0099] Adjustment process: Rotate the adjusting screw 53 → slide block 55 moves horizontally → inclined guide rail converts the horizontal displacement into vertical lifting of the support plate 56 (proportion: tan(2.5°)≈0.0436).

[0100] Locking process: After adjustment, the locking bolt 30 passes through the following in sequence: workbench mounting hole → support top plate long slot 563 → sliding block long slot 555 → base long slot 513 → T-block 20, and the locking bolt 30 is tightened to force each component to press together and eliminate micro-movement gaps.

[0101] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0102] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A method for measuring and adjusting the spatial attitude of a CNC rotary table, characterized in that, Includes the following steps: S1 installs the CNC rotary table in the center of the X-axis slide table through three lifting and locking mechanisms spaced 120° apart. Lifting and locking mechanism A is located on the positive side of the X-axis, while lifting and locking mechanisms B and C are located on the positive and negative sides of the Y-axis, respectively. S2 fixes the displacement sensor to the end of the machine tool spindle, with the measurement direction arranged downward along the Z-axis. The measurement point is marked on the surface of the CNC rotary table. The displacement sensor is moved to measure the Z-axis coordinate value of the marked measurement point at the 90° and 270° positions of the CNC rotary table in the machine tool coordinate system in sequence. S3 calculates the YOZ plane perpendicularity error ay based on the Z-axis coordinate difference between 90° and 270°, and adjusts the height of lifting locking mechanism B or lifting locking mechanism C until ay meets the processing requirements. The S4 motion displacement sensor measures the Z-axis coordinates of the marked measurement points on the CNC rotary table at 0° and 180° positions in the machine tool coordinate system. S5 calculates the XOZ plane perpendicularity error ax based on the Z-axis coordinate difference between 0° and 180°, and adjusts the height of the lifting and locking mechanism A until ax meets the processing requirements. S6 locks all lifting and locking mechanisms, completing the measurement and adjustment of the spatial posture error of the CNC rotary table.

2. The method for measuring and adjusting the spatial attitude of a CNC rotary table according to claim 1, characterized in that, In S1, the line connecting the center of locking bolt A and the center of the CNC rotary table is parallel to the X-axis, and the line connecting the centers of locking bolts B and C is parallel to the Y-axis. Loosen the three locking bolts and record the center distance L between locking bolts B and C. bc And the distance L from the center of locking bolt A to the line connecting the centers of locking bolts B and C. a .

3. The method for measuring and adjusting the spatial attitude of a CNC rotary table according to claim 1, characterized in that, The measurement point in S2 is located on a diameter parallel to the X-axis, at the 0° position of the machine tool coordinate system when the CNC rotary table is rotated. It is 10mm to 20mm away from the edge of the CNC rotary table.

4. The method for measuring and adjusting the spatial attitude of a CNC rotary table according to claim 1, characterized in that, The calculation formula in S3 is: The calculation formula in S5 is: Among them, (z y1 ,y y1 (z) represents the 90° position coordinate. y2 ,y y2 (z) represents the 270° position coordinates. x1 ,x x1 ) represents the 0° position coordinate, (z) represents the position coordinate. x2 ,x x2 () represents the 180° position coordinates.

5. The method for measuring and adjusting the spatial attitude of a CNC rotary table according to claim 4, characterized in that, S3 height adjustment amount h y satisfy: h y =L bc tanα y 3); S5 height adjustment amount h x satisfy: h x =L a tanα x 4) 6. The method for measuring and adjusting the spatial attitude of a CNC rotary table according to any one of claims 1-5, characterized in that, The displacement sensor is either a contact probe or a non-contact laser displacement sensor, fixed to the end of the machine tool spindle and measuring along the Z-axis.

7. A lifting and locking mechanism, used in the method according to any one of claims 1-6, characterized in that, include: The base (51) is mounted on the X-axis slide (10), and two parallel first flat guide rails (511) are arranged on its top along the length of the X-axis slide (10); The sliding block (55) has a second flat guide rail at the bottom that mates with the first flat guide rail (511), and two parallel first inclined guide rails (554) at the top. The base (51) and the sliding block (55) are driven to move relative to each other by an adjustment assembly. The top plate (56) is supported, and the bottom has a second inclined guide rail that slides with the first inclined guide rail (554); its top plane (564) lifts and supports the CNC rotary table (40); Among them, the base (51), sliding block (55) and supporting top plate (56) are respectively provided with a first long groove (513), a second long groove (555) and a third long groove (563) for the locking bolt (30) to pass through to connect the T-shaped block (20) and the CNC rotary table (40).

8. A lifting and locking mechanism according to claim 7, characterized in that, The adjustment assembly includes an adjustment screw (53), and the base (51) corresponding to the first flat guide rail (511) has side plates at both ends. One side plate has a shaft hole (512) for mounting a bearing (54). One end of the sliding block (55) has a threaded hole (553) connected to the adjustment screw (53). One end of the adjustment screw (53) passes through the bearing (54) and extends out of the side plate section as the adjustment end.

9. A lifting and locking mechanism according to claim 8, characterized in that, The bearing (54) is a thrust bearing, and its corresponding side plate has a bearing limiting plate (52) on the outside to constrain the radial displacement of the thrust bearing.

10. A lifting and locking mechanism according to claim 8, characterized in that, The inclined angle of the first inclined guide rail (554) is 2°-3°; the surface roughness of the first flat guide rail (511), the second flat guide rail, the first inclined guide rail (554), and the second inclined guide rail is ≤Ra0.8, and an oil storage tank is provided.

Citation Information

Patent Citations

  • Semiconductor grinding device

    CN110842676A