An ion pump power supply circuit

Abstract

The application discloses an ion pump power supply circuit. The circuit comprises a battery pack, a voltage adjustment module, a beam current detection module, a switching control module and a battery mode switching module; the output end of the battery pack is electrically connected with the input end of the voltage adjustment module; the high-voltage output end of the voltage adjustment module is connected with the cathode of the ion pump; the output return end of the voltage adjustment module is electrically connected with the first input end of the beam current detection module; the anode of the ion pump is electrically connected with the second input end of the beam current detection module; the output end of the beam current detection module is electrically connected with the input end of the switching control module; the output end of the switching control module is electrically connected with the input end of the battery pack through the battery mode switching module; the beam current detection module detects the working current in the ion pump cavity; the switching control module outputs a control signal to the battery mode switching module according to the size so that the battery pack is switched to the corresponding mode and outputs the corresponding voltage; and the voltage adjustment module adjusts the voltage and outputs the same to the ion pump.

Description

Technical Field

[0001] This invention relates to the field of ion pump technology, and more particularly to an ion pump power supply circuit. Background Technology

[0002] The electron source of a transmission electron microscope needs to operate in an ultra-high vacuum environment (1E-7 Pa ~ 1E-8 Pa) to ensure electron beam stability and imaging resolution. An ion pump is a key component in achieving this ultra-high vacuum. A high-voltage power supply generates a strong electric field within the pump, causing ionized residual gas molecules to be adsorbed by the titanium film, thus creating an ultra-high vacuum environment.

[0003] Currently, traditional ion pump power circuits typically rely on the power grid. In situations requiring disconnection from the grid, such as during equipment transportation, the ion pump stops working due to the loss of power, resulting in the inability to maintain the vacuum level within the vacuum chamber. Once the ion pump stops operating, gas leakage and outgassing of internal materials gradually occur within the chamber, causing a decrease in the vacuum level. Summary of the Invention

[0004] This invention provides an ion pump power supply circuit that avoids the problem of not being able to guarantee the vacuum level inside the ion pump when using the power grid as the energy input of the ion pump power supply circuit and when it is disconnected from the grid.

[0005] To achieve the above objectives, embodiments of the present invention provide an ion pump power supply circuit, which includes: a battery pack, a voltage adjustment module, a beam current detection module, a switching control module, and a battery mode switching module.

[0006] The output terminal of the battery pack is electrically connected to the input terminal of the voltage adjustment module; the high-voltage output terminal of the voltage adjustment module is connected to the cathode of the ion pump; the output return terminal of the voltage adjustment module is electrically connected to the first input terminal of the beam detection module; the anode of the ion pump is electrically connected to the second input terminal of the beam detection module; the output terminal of the beam detection module is electrically connected to the input terminal of the switching control module; the output terminal of the switching control module is electrically connected to the input terminal of the battery pack through the battery mode switching module.

[0007] The beam detection module is used to detect the operating current inside the ion pump cavity;

[0008] The switching control module is used to output a control signal to the battery mode switching module according to the magnitude of the working current in the ion pump chamber, so that the battery pack switches to the corresponding mode and outputs the corresponding voltage.

[0009] The voltage adjustment module is used to boost the voltage and output the boosted voltage to the ion pump.

[0010] Optionally, the switching control module includes: a voltage comparison unit and a switching control unit;

[0011] The first input terminal of the voltage comparison unit is electrically connected to the output terminal of the beam detection module; the output terminal of the voltage comparison unit is electrically connected to the input terminal of the switching control unit; the output terminal of the switching control unit is electrically connected to the battery mode switching module.

[0012] The voltage comparison unit is used to output a switching signal to the switching control unit based on the actual voltage output by the beam detection module and the reference voltage.

[0013] The switching control unit is used to output a control signal to the battery mode switching module according to the switching signal so that the battery pack is switched to the corresponding mode and outputs the corresponding voltage.

[0014] Optionally, the beam detection module includes: an operational amplifier unit and an IV conversion resistor;

[0015] The output return terminal of the voltage adjustment module is electrically connected to the first input terminal of the operational amplifier unit and the first terminal of the IV conversion resistor; the second input terminal of the operational amplifier unit is electrically connected to the anode of the ion pump and grounded; the second terminal of the IV conversion resistor is electrically connected to the output terminal of the operational amplifier unit; the output terminal of the operational amplifier unit is also electrically connected to the input terminal of the switching control module.

[0016] Optionally, the battery mode switching module includes: a double-pole double-throw relay; the battery pack includes a first battery and a second battery;

[0017] The double-pole double-throw relay includes: a start-up coil, a first single-pole double-throw switch, and a second single-pole double-throw switch; the input terminal of the start-up coil is electrically connected to the output terminal of the switching control module; the output terminal of the start-up coil is grounded; the stationary contact of the first single-pole double-throw switch and the first moving contact of the second single-pole double-throw switch are both electrically connected to the first terminal of the first battery; the second terminal of the first battery is electrically connected to the second moving contact of the second single-pole double-throw switch.

[0018] The first moving contact of the first single-pole double-throw switch is electrically connected to the second terminal of the second battery and is grounded; the second moving contact of the first single-pole double-throw switch and the stationary contact of the second single-pole double-throw switch are both electrically connected to the first terminal of the second battery.

[0019] Optionally, the voltage comparison unit includes: an operational amplifier, a first capacitor, a Zener diode, a current-limiting resistor, and a first resistor;

[0020] The first terminal of the operational amplifier is electrically connected to the first terminal of the Zener diode and to the battery pack through the current-limiting resistor; the second terminal of the Zener diode is grounded; the second terminal of the operational amplifier is electrically connected to the first terminal of the first capacitor and the output terminal of the beam current detection module; the second terminal of the first capacitor is electrically connected to the output terminal of the operational amplifier; and the second terminal of the first resistor is electrically connected to the input terminal of the switching control unit.

[0021] Optionally, the switching control unit includes: a second resistor and a first transistor;

[0022] The first end of the second resistor is electrically connected to the output end of the voltage comparison unit and the control end of the first transistor; the second end of the second resistor is electrically connected to the first end of the first transistor; the second end of the first transistor serves as the output end of the switching control unit and is electrically connected to the battery mode switching module.

[0023] Optionally, the voltage adjustment module includes: a first-stage boost inverter unit and a second-stage boost rectifier unit;

[0024] The input terminal of the first-stage boost inverter unit is electrically connected to the output terminal of the battery pack; the output terminal of the first-stage boost inverter unit is electrically connected to the input terminal of the second-stage boost rectifier unit; the output terminal of the second-stage boost rectifier unit is electrically connected to the cathode of the ion pump.

[0025] The first-stage boost inverter unit is used to invert the voltage output by the battery pack and boost the voltage after inversion.

[0026] The secondary boost rectifier unit is used to rectify and boost the voltage output by the primary boost inverter unit.

[0027] Optionally, the first-stage boost inverter unit includes a self-excited oscillation subunit; the self-excited oscillation subunit includes: a first inductor, a second capacitor, a second transistor, a third resistor, and a transformer;

[0028] The input terminal of the first inductor is electrically connected to the output terminal of the battery pack; the second terminal of the first inductor is electrically connected to the first terminal of the second capacitor, the first terminal of the second transistor, and the first terminal of the first primary coil of the transformer; the second terminal of the second capacitor is grounded; the second terminal of the second transistor is electrically connected to the first terminal of the second primary coil of the transformer; the second terminal of the second primary coil of the transformer is grounded; the control terminal of the second transistor is electrically connected to the second terminal of the first primary coil of the transformer through the third resistor; the first terminal of the secondary coil of the transformer is electrically connected to the first input terminal of the second-stage boost rectifier unit; the second terminal of the secondary coil of the transformer is electrically connected to the output return terminal of the second-stage boost rectifier unit.

[0029] Optionally, the secondary boost rectifier unit includes a multi-stage voltage multiplier rectifier unit;

[0030] The voltage doubler rectifier unit includes a third capacitor and a first unidirectional diode; the first end of the third capacitor is electrically connected to the first output end of the first-stage boost inverter unit; the second end of the third capacitor is electrically connected to the first end of the first unidirectional diode; and the second end of the first unidirectional diode is electrically connected to the first input end of the beam current detection module.

[0031] Optionally, the circuit further includes a filter module; the voltage adjustment module is electrically connected to the cathode of the ion pump through the filter module.

[0032] In this embodiment of the invention, the output terminal of the battery pack is electrically connected to the input terminal of the voltage adjustment module; the high-voltage output terminal of the voltage adjustment module is connected to the cathode of the ion pump; the output return terminal of the voltage adjustment module is electrically connected to the first input terminal of the beam current detection module; the anode of the ion pump is electrically connected to the second input terminal of the beam current detection module; the output terminal of the beam current detection module is electrically connected to the input terminal of the switching control module; the output terminal of the switching control module is electrically connected to the input terminal of the battery pack through the battery mode switching module; thus, the beam current detection module can detect the operating current inside the ion pump chamber; and the switching control module outputs power according to the magnitude of the operating current inside the ion pump chamber. A control signal is sent to the battery mode switching module to switch the battery pack to the corresponding mode and output the corresponding voltage; the voltage adjustment module then boosts and adjusts the voltage and outputs the boosted and adjusted voltage to the ion pump; in this way, the battery pack is used as the energy input of the ion pump power circuit, avoiding the problem of not being able to guarantee the vacuum degree inside the ion pump when it is off-grid, which is caused by using the grid as the energy input of the ion pump power circuit; at the same time, the battery mode switching module allows the battery pack to switch to different modes under different ion pump vacuum degrees, thereby outputting different voltages to the ion pump, thus ensuring the vacuum degree inside the ion pump and reducing the power consumption of the overall circuit.

[0033] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the structure of an ion pump power supply circuit provided in an embodiment of the present invention;

[0036] Figure 2 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention;

[0037] Figure 3 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention;

[0038] Figure 4 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention;

[0039] Figure 5 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention;

[0040] Figure 6 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention;

[0041] Figure 7 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention. Detailed Implementation

[0042] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0043] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0044] Figure 1 This is a schematic diagram of the structure of an ion pump power supply circuit provided in an embodiment of the present invention, as shown below. Figure 1 As shown, the ion pump power supply circuit includes: a battery pack 10, a voltage adjustment module 20, a beam current detection module 30, a switching control module 40, and a battery mode switching module 50; the output terminal of the battery pack 10 is electrically connected to the input terminal of the voltage adjustment module 20; the high-voltage output terminal of the voltage adjustment module 20 is connected to the cathode of the ion pump; the output return terminal of the voltage adjustment module 20 is electrically connected to the first input terminal of the beam current detection module 30; the anode of the ion pump is electrically connected to the second input terminal of the beam current detection module 30; the output terminal of the beam current detection module 30 is electrically connected to the input terminal of the switching control module 40; the output terminal of the switching control module 40 is electrically connected to the input terminal of the battery pack 10 through the battery mode switching module 50.

[0045] The beam detection module 30 is used to detect the working current in the ion pump chamber; the switching control module 40 is used to output a control signal to the battery mode switching module 50 according to the magnitude of the working current in the ion pump chamber so that the battery pack 10 switches to the corresponding mode and outputs the corresponding voltage; the voltage adjustment module 20 is used to boost the voltage and output the boosted voltage to the ion pump.

[0046] In this embodiment, the battery pack 10 is composed of multiple dry cells; the number of dry cells is not limited; the voltage adjustment module 20 can boost and adjust the voltage output by the battery pack 10 so that the boosted and adjusted voltage meets the ionization requirements of the ion pump; the voltage adjustment module 20 can be any boost module, and this embodiment does not limit its specific configuration.

[0047] The beam detection module 30 can be a current-to-voltage conversion module, which can convert the working current in the ion pump chamber into a certain voltage, and thus detect the working current in the ion pump chamber based on the voltage; this embodiment does not limit the specific configuration of the beam detection module 30.

[0048] The switching control module 40 can output a control signal to the battery mode switching module 50 based on the magnitude of the operating current in the ion pump chamber, so that the battery pack 10 switches to the corresponding mode and outputs the corresponding voltage. Specifically, when the vacuum level in the ion pump is poor, and the beam current detection module 30 detects a large operating current in the ion pump chamber, the switching control module 40, upon determining that the operating current in the ion pump chamber is greater than the preset operating current, outputs a first control signal to the battery mode switching module 50, thereby switching the battery pack 10 to the series mode and outputting the corresponding series voltage. The voltage adjustment module 20 then adjusts the series voltage and outputs the adjusted series voltage to the ion pump. This improves the vacuum level inside the ion pump. When the vacuum level inside the ion pump is low, and the working current detected by the beam detection module 30 inside the ion pump cavity is low, the switching control module 40 outputs a second control signal to the battery mode switching module 50 when it determines that the working current inside the ion pump cavity is less than the preset working current. The battery pack 10 then switches to parallel mode and outputs the corresponding parallel voltage. The voltage adjustment module 20 adjusts the parallel voltage and outputs the adjusted parallel voltage to the ion pump, thereby ensuring the vacuum level inside the ion pump with low power consumption. This embodiment does not limit the specific configuration of the switching control module 40 and the battery mode switching module 50.

[0049] In this embodiment of the invention, the beam current detection module 30 detects the operating current inside the ion pump chamber; the switching control module 40 outputs a control signal to the battery mode switching module 50 based on the magnitude of the operating current inside the ion pump chamber, causing the battery pack 10 to switch to the corresponding mode and output the corresponding voltage; the voltage adjustment module 20 then boosts and adjusts the voltage and outputs the boosted and adjusted voltage to the ion pump; thus, the battery pack 10 is used as the energy input for the ion pump power circuit, avoiding the problem of not being able to guarantee the vacuum level inside the ion pump when the grid is disconnected; at the same time, the battery mode switching module 50 allows the battery pack 10 to switch to different modes under different ion pump vacuum levels, thereby outputting different voltages to the ion pump, thus ensuring the vacuum level inside the ion pump and reducing the overall power consumption of the circuit.

[0050] It should be noted that in this embodiment, the voltage adjustment module 20 can boost and adjust the voltage output by the battery pack 10, so that the boosted and adjusted voltage meets the ionization requirements of the ion pump. The voltage adjustment module 20 adopts open-loop control, which further avoids the problem of large overall circuit loss caused by the use of a closed-loop module in the prior art (e.g., the voltage adjustment module 20 in the prior art can be composed of a high-voltage sampling resistor and a switching circuit) to adjust the output voltage.

[0051] Optionally, based on the above embodiments, the ion pump power supply circuit can be further refined. Figure 2This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention; as shown. Figure 2 As shown, the switching control module 40 in the ion pump power supply circuit includes: a voltage comparison unit 41 and a switching control unit 42; the input terminal of the voltage comparison unit 41 is electrically connected to the output terminal of the beam detection module 30; the output terminal of the voltage comparison unit 41 is electrically connected to the input terminal of the switching control unit 42; the output terminal of the switching control unit 42 is electrically connected to the battery mode switching module 50; the voltage comparison unit 41 is used to output a switching signal to the switching control unit 42 according to the actual voltage and reference voltage output by the beam detection module 30; the switching control unit 42 is used to output a control signal to the battery mode switching module 50 according to the switching signal so that the battery pack 10 switches to the corresponding mode and outputs the corresponding voltage.

[0052] Specifically, the beam detection module 30 can detect the working current in the ion pump working chamber based on the actual output voltage; in this embodiment, when the actual voltage output by the beam detection module 30 is greater than the reference voltage, the voltage comparison unit 41 outputs a first switching signal to the switching control unit 42; the switching control unit 42 then outputs a first control signal to the battery mode switching module 50 based on the first switching signal to switch the battery pack 10 to the series mode and output the corresponding series voltage; when the actual voltage output by the beam detection module 30 is less than the reference voltage, the voltage comparison unit 41 outputs a second switching signal to the switching control unit 42; the switching control unit 42 then outputs a second control signal to the battery mode switching module 50 based on the second switching signal to switch the battery pack 10 to the parallel mode and output the corresponding parallel voltage.

[0053] Optionally, the voltage comparison unit 41 and the switching control unit 42 can be further refined. Figure 3 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention; as shown. Figure 3 As shown, the voltage comparison unit 41 includes: an operational amplifier U1, a first capacitor C1, a Zener diode D0, a current-limiting resistor R11, and a first resistor R1; the first terminal of the operational amplifier U1 is electrically connected to the first terminal of the Zener diode D0 and to the battery pack 10 through the current-limiting resistor R11; the second terminal of the Zener diode D0 is grounded; the second terminal of the operational amplifier U1 is electrically connected to the first terminal of the first capacitor C1 and the output terminal of the beam current detection module 30; the second terminal of the first capacitor C1 is electrically connected to the output terminal of the operational amplifier U1; the second terminal of the first capacitor C1 is electrically connected to the first terminal of the first resistor R1; and the second terminal of the first resistor R1 is electrically connected to the input terminal of the switching control unit 42.

[0054] Optional, continue to refer to Figure 3The switching control unit 42 includes a second resistor R2 and a first transistor Q1; the first end of the second resistor R2 is electrically connected to the output end of the voltage comparison unit 41 (i.e., to the second end of the first resistor R1) and the control end of the first transistor Q1; the second end of the second resistor R2 is electrically connected to the first end of the first transistor Q1; the second end of the first transistor Q1 serves as the output end of the switching control unit 42 and is electrically connected to the battery mode switching module 50.

[0055] More specifically, the Zener diode D0 stabilizes the second terminal of the operational amplifier U1 at a reference voltage; this reference voltage can be understood as the voltage of the battery pack 10 after passing through the current-limiting resistor R11. The beam current detection module 30 can detect the operating current in the ion pump working chamber based on the actual output voltage. When the actual voltage output by the beam current detection module 30 is greater than the reference voltage at the second terminal of the operational amplifier U1, the operational amplifier U1 outputs a low level. After the low level is current-limited by the first resistor R1, it will cause the first transistor Q1 to conduct, thus causing the switching control unit 42 to output a high level to the battery mode switching module 50, which in turn causes the battery pack 10 to switch to series mode. When the actual voltage output by the beam current detection module 30 is less than the reference voltage at the second terminal of the operational amplifier U1, the operational amplifier U1 outputs a high level. After the high level is current-limited by the first resistor R1, it will cause the first transistor Q1 to turn off, thus causing the switching control unit 42 to output a low level to the battery mode switching module 50, which in turn causes the battery pack to switch to parallel mode. The second resistor R2 acts as a pull-up resistor, ensuring that the first transistor Q1 is off when the voltage is high; the first capacitor C1 filters the output level of the operational amplifier U1.

[0056] Optionally, the beam detection module 30 can be further refined. Figure 4 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention; as shown. Figure 4 As shown, the beam detection module 30 includes: an operational amplifier unit U2 and an IV conversion resistor R0; the output return terminal of the voltage adjustment module 20 is electrically connected to the first input terminal of the operational amplifier unit U2 and the first terminal of the IV conversion resistor R0; the second input terminal of the operational amplifier unit U2 is electrically connected to the anode of the ion pump and grounded; the second terminal of the IV conversion resistor R0 is electrically connected to the output terminal of the operational amplifier unit U2; the output terminal of the operational amplifier unit U2 is also electrically connected to the input terminal of the switching control module 40 (i.e., the first terminal of the operational amplifier U1).

[0057] Specifically, the voltage adjustment module 20 outputs a negative voltage. In this embodiment, the current return path is as follows: the negative voltage output by the voltage adjustment module 20 is sent to the cathode of the ion pump, generating a working current within the ion pump chamber. This working current flows through the anode of the ion pump into the ground terminal of the operational amplifier unit U2, and then flows back to the output return terminal of the voltage adjustment module 20 after passing through the output terminal of the operational amplifier unit U2 and the IV conversion resistor R0, thus forming a complete current feedback loop. The voltage signal generated by the current signal flowing through the IV conversion resistor R0 is the voltage signal output by the operational amplifier unit U2. Therefore, the working current within the ion pump chamber can be reflected by the voltage signal output by the operational amplifier unit U2. Furthermore, based on the voltage-vacuum model, the vacuum level within the ion pump chamber can be determined by the voltage signal output by the operational amplifier unit U2.

[0058] Optionally, the battery mode switching module 50 can be further refined. Figure 5 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention; as shown. Figure 5 As shown, the battery mode switching module 50 includes: a double-pole double-throw relay; the double-pole double-throw relay includes: a start coil 51, a first single-pole double-throw switch K1, and a second single-pole double-throw switch K2; the battery pack 10 includes a first battery V1 and a second battery V2; the input terminal of the start coil 51 is electrically connected to the output terminal of the switching control module 40 (i.e., electrically connected to the second terminal of the first transistor Q1); the output terminal of the start coil 51 is grounded; the stationary contact of the first single-pole double-throw switch K1 and the first moving contact of the second single-pole double-throw switch K2 are both electrically connected to the first terminal of the first battery V1; the second terminal of the first battery V1 is electrically connected to the second moving contact of the second single-pole double-throw switch K2; the first moving contact of the first single-pole double-throw switch K1 is electrically connected to the second terminal of the second battery V2 and is grounded; the second moving contact of the first single-pole double-throw switch K1 and the stationary contact of the second single-pole double-throw switch K2 are both electrically connected to the first terminal of the second battery V2.

[0059] Specifically, when the first transistor Q1 is closed, the starting coil 51 is energized, and the first single-pole double-throw switch K1 and the second single-pole double-throw switch K2 are activated. The stationary contact of the first single-pole double-throw switch K1 is connected to the second moving contact of the first single-pole double-throw switch K1, and the stationary contact of the second single-pole double-throw switch K2 is connected to the first moving contact of the second single-pole double-throw switch K2. In this way, the first battery V1 and the second battery V2 in the battery pack 10 are connected in series. When the first transistor Q1 is open, the starting coil 51 is not energized, the first single-pole double-throw switch K1 is not activated, and the stationary contact of the first single-pole double-throw switch K1 and the first moving contact of the first single-pole double-throw switch K1 remain normally closed. The stationary contact of the second single-pole double-throw switch K2 and the second moving contact of the second single-pole double-throw switch K2 remain normally closed. In this way, the first battery V1 and the second battery V2 in the battery pack 10 are connected in parallel.

[0060] Optionally, the voltage adjustment module 20 can be further refined. Figure 6 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention; as shown. Figure 6 As shown, the voltage adjustment module 20 includes: a first-stage boost inverter unit 21 and a second-stage boost rectifier unit 22; the input terminal of the first-stage boost inverter unit 21 is electrically connected to the output terminal of the battery pack 10; the output terminal of the first-stage boost inverter unit 21 is electrically connected to the input terminal of the second-stage boost rectifier unit 22; the output return terminal of the second-stage boost rectifier unit 22 is electrically connected to the first input terminal of the beam current detection module 30; the first-stage boost inverter unit 21 is used to invert the voltage output by the battery pack 10 and boost the voltage after inversion; the second-stage boost rectifier unit 22 is used to rectify the voltage output by the first-stage boost inverter unit 21 and boost it a second time.

[0061] The first-stage boost inverter unit 21 can invert the voltage output by the battery pack 10 and boost the inverted voltage. The first-stage boost inverter unit 21 can be a DC-AC conversion boost unit. The second-stage boost rectifier unit 22 can rectify the voltage output by the first-stage boost inverter unit 21 and boost it again to finally output a high-voltage DC voltage signal. In this embodiment, the voltage adjustment module 20 composed of the first-stage boost inverter unit 21 and the second-stage boost rectifier unit 22 adopts open-loop control, which avoids the problem of large overall circuit loss caused by the closed-loop module used in the voltage adjustment module 20 in the prior art (e.g., the voltage adjustment module 20 in the prior art can be composed of a high-voltage sampling resistor and a switching circuit) adjusting the output voltage.

[0062] Optionally, the first-stage boost inverter unit 21 and the second-stage boost rectifier unit 22 can be further refined. Figure 7 This is a schematic diagram of another ion pump power supply circuit provided in an embodiment of the present invention; as shown. Figure 7As shown, the first-stage boost inverter unit 21 includes a self-excited oscillation subunit; the self-excited oscillation subunit includes: a first inductor L11, a second capacitor C2, a second transistor Q2, a third resistor R3, and a transformer T; the input terminal of the first inductor L11 is electrically connected to the output terminal of the battery pack 10; the second terminal of the first inductor L11 is electrically connected to the first terminal of the second capacitor C2, the first terminal of the second transistor Q2, and the first terminal of the first primary coil L1 of the transformer T; the second terminal of the second capacitor C2 is grounded; the second terminal of the second transistor Q2 is electrically connected to the first terminal of the second primary coil L2 of the transformer T; the second terminal of the second primary coil L2 of the transformer T is grounded; the control terminal of the second transistor Q2 is electrically connected to the second terminal of the first primary coil L1 of the transformer T through the third resistor R3; the first terminal of the secondary coil L3 of the transformer T is electrically connected to the first input terminal of the second-stage boost rectifier unit 22; the second terminal of the secondary coil L3 of the transformer T is electrically connected to the second input terminal of the second-stage boost rectifier unit 22.

[0063] In this embodiment, the first-stage boost inverter unit 21 adopts a self-excited oscillation subunit. This self-excited oscillation subunit does not require a dedicated drive circuit and has fewer components, thus further reducing the overall circuit loss. Specifically, the self-excited oscillation subunit, composed of the first inductor L11, the second capacitor C2, the second transistor Q2, the third resistor R3, and the transformer T, continuously switches between switching states without relying on external control signals, thereby converting the DC power output from the battery pack 10 into high-frequency AC power, and can boost the high-frequency AC power.

[0064] Optional, continue to refer to Figure 7 The secondary boost rectifier unit 22 includes a multi-stage voltage multiplier rectifier unit; the voltage multiplier rectifier unit includes a third capacitor C3 and a first unidirectional diode D1; the first end of the third capacitor C3 is electrically connected to the first output end of the primary boost inverter unit 21 (i.e., the first end of the secondary coil L3 of the transformer T); the second end of the third capacitor C3 is electrically connected to the first end of the first unidirectional diode D1; the second end of the first unidirectional diode D1 is electrically connected to the first input end of the beam current detection module 30.

[0065] The secondary boost rectifier unit 22 includes a multi-stage voltage multiplier rectifier unit; the number of stages in the voltage multiplier rectifier circuit is not limited in this embodiment. The voltage multiplier rectifier unit composed of the third capacitor C3 and the first unidirectional diode D1 can rectify and boost the voltage output from the primary boost inverter unit. In some embodiments, the voltage multiplier rectifier unit further includes a fourth capacitor C4 and a second unidirectional diode D2. The first terminal of the fourth capacitor C4 is electrically connected to the second terminal of the first unidirectional diode D1, and the second terminal of the fourth capacitor C4 is electrically connected to the second terminal of the second unidirectional diode D2; the first terminal of the second unidirectional diode D2 is electrically connected to the first terminal of the first unidirectional diode D1.

[0066] Optional, continue to refer to Figure 7 It also includes: a filter module 60; the voltage adjustment module 20 is electrically connected to the cathode of the ion pump through the filter module 60. The filter module 60 can filter the high-voltage output DC voltage signal; in some embodiments, the filter module 60 includes a filter resistor R10 and a filter capacitor C10. The first end of the filter resistor R10 is electrically connected to the second end of the second unidirectional diode D2; the second end of the filter resistor R10 is electrically connected to the first end of the filter capacitor C10 and the cathode of the ion pump; the second end of the filter capacitor C10 is electrically connected to the second end of the secondary coil L3 of the transformer T.

[0067] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. An ion pump power supply circuit, characterized in that, include: Battery pack, voltage adjustment module, beam current detection module, switching control module and battery mode switching module; The output terminal of the battery pack is electrically connected to the input terminal of the voltage adjustment module; the high-voltage output terminal of the voltage adjustment module is connected to the cathode of the ion pump; the output return terminal of the voltage adjustment module is electrically connected to the first input terminal of the beam detection module; the anode of the ion pump is electrically connected to the second input terminal of the beam detection module; the output terminal of the beam detection module is electrically connected to the input terminal of the switching control module; the output terminal of the switching control module is electrically connected to the input terminal of the battery pack through the battery mode switching module. The beam detection module is used to detect the operating current inside the ion pump cavity; The switching control module is used to output a control signal to the battery mode switching module according to the magnitude of the working current in the ion pump chamber, so that the battery pack switches to the corresponding mode and outputs the corresponding voltage; wherein, the mode includes parallel mode and series mode; The voltage adjustment module is used to boost the voltage and output the boosted voltage to the ion pump.

2. The ion pump power supply circuit according to claim 1, characterized in that, The switching control module includes: a voltage comparison unit and a switching control unit; The first input terminal of the voltage comparison unit is electrically connected to the output terminal of the beam detection module; the output terminal of the voltage comparison unit is electrically connected to the input terminal of the switching control unit; the output terminal of the switching control unit is electrically connected to the battery mode switching module. The voltage comparison unit is used to output a switching signal to the switching control unit based on the actual voltage output by the beam detection module and the reference voltage. The switching control unit is used to output a control signal to the battery mode switching module according to the switching signal so that the battery pack switches to the corresponding mode and outputs the corresponding voltage.

3. The ion pump power supply circuit according to claim 1, characterized in that, The beam detection module includes: an operational amplifier unit and an IV conversion resistor; The output return terminal of the voltage adjustment module is electrically connected to the first input terminal of the operational amplifier unit and the first terminal of the IV conversion resistor; the second input terminal of the operational amplifier unit is electrically connected to the anode of the ion pump and grounded; the second terminal of the IV conversion resistor is electrically connected to the output terminal of the operational amplifier unit; the output terminal of the operational amplifier unit is also electrically connected to the input terminal of the switching control module.

4. The ion pump power supply circuit according to claim 1, characterized in that, The battery mode switching module includes a double-pole double-throw relay; the battery pack includes a first battery and a second battery. The double-pole double-throw relay includes: a start-up coil, a first single-pole double-throw switch, and a second single-pole double-throw switch; the input terminal of the start-up coil is electrically connected to the output terminal of the switching control module; the output terminal of the start-up coil is grounded; the stationary contact of the first single-pole double-throw switch and the first moving contact of the second single-pole double-throw switch are both electrically connected to the first terminal of the first battery; the second terminal of the first battery is electrically connected to the second moving contact of the second single-pole double-throw switch. The first moving contact of the first single-pole double-throw switch is electrically connected to the second terminal of the second battery and is grounded; the second moving contact of the first single-pole double-throw switch and the stationary contact of the second single-pole double-throw switch are both electrically connected to the first terminal of the second battery.

5. The ion pump power supply circuit according to claim 2, characterized in that, The voltage comparison unit includes: an operational amplifier, a first capacitor, a Zener diode, a current-limiting resistor, and a first resistor; The second terminal of the operational amplifier is electrically connected to the first terminal of the Zener diode; the second terminal of the operational amplifier is electrically connected to the battery pack through the current-limiting resistor; the second terminal of the Zener diode is grounded; the first terminal of the operational amplifier is electrically connected to the first terminal of the first capacitor and the output terminal of the beam current detection module; the second terminal of the first capacitor is electrically connected to the output terminal of the operational amplifier; the first terminal of the first resistor is electrically connected to the second terminal of the first capacitor; the second terminal of the first resistor is electrically connected to the input terminal of the switching control unit.

6. The ion pump power supply circuit according to claim 2, characterized in that, The switching control unit includes a second resistor and a first transistor. The first end of the second resistor is electrically connected to the output end of the voltage comparison unit and the control end of the first transistor; the second end of the second resistor is electrically connected to the first end of the first transistor; the second end of the first transistor serves as the output end of the switching control unit and is electrically connected to the battery mode switching module.

7. The ion pump power supply circuit according to claim 2, characterized in that, The voltage adjustment module includes: a first-stage boost inverter unit and a second-stage boost rectifier unit; The input terminal of the first-stage boost inverter unit is electrically connected to the output terminal of the battery pack; the output terminal of the first-stage boost inverter unit is electrically connected to the input terminal of the second-stage boost rectifier unit; the output terminal of the second-stage boost rectifier unit is electrically connected to the cathode of the ion pump. The first-stage boost inverter unit is used to invert the voltage output by the battery pack and boost the voltage after inversion. The secondary boost rectifier unit is used to rectify and boost the voltage output by the primary boost inverter unit.

8. The ion pump power supply circuit according to claim 7, characterized in that, The first-stage boost inverter unit includes a self-excited oscillation subunit; the self-excited oscillation subunit includes: a first inductor, a second capacitor, a second transistor, a third resistor, and a transformer; The input terminal of the first inductor is electrically connected to the output terminal of the battery pack; the second terminal of the first inductor is electrically connected to the first terminal of the second capacitor, the first terminal of the second transistor, and the first terminal of the first primary coil of the transformer; the second terminal of the second capacitor is grounded; the second terminal of the second transistor is electrically connected to the first terminal of the second primary coil of the transformer; the second terminal of the second primary coil of the transformer is grounded; the control terminal of the second transistor is electrically connected to the second terminal of the first primary coil of the transformer through the third resistor; the first terminal of the secondary coil of the transformer is electrically connected to the first input terminal of the second-stage boost rectifier unit; the second terminal of the secondary coil of the transformer is electrically connected to the output return terminal of the second-stage boost rectifier unit.

9. The ion pump power supply circuit according to claim 8, characterized in that, The secondary boost rectifier unit includes a multi-stage voltage multiplier rectifier unit; The voltage doubler rectifier unit includes a third capacitor and a first unidirectional diode; the first end of the third capacitor is electrically connected to the first output end of the first-stage boost inverter unit; the second end of the third capacitor is electrically connected to the first end of the first unidirectional diode; and the second end of the first unidirectional diode is electrically connected to the first input end of the beam current detection module.

10. The ion pump power supply circuit according to claim 5, characterized in that, Also includes: A filtering module; the voltage adjustment module is electrically connected to the cathode of the ion pump through the filtering module.

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