An ion pump power supply circuit

By using battery pack and modular circuit design, the operating current inside the ion pump chamber is detected and the battery mode is switched, which solves the problem of vacuum drop when the ion pump is disconnected from the power grid, and achieves vacuum maintenance and power consumption reduction when the power grid is cut off.

CN121075891BActive Publication Date: 2026-02-10SUZHOU BOZHON LNSTRUMENTS TECH CO LTD
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Patent Information

Application Number
CN202511588595.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-11-03
Publication Date
2026-02-10
Estimated Expiration
2045-11-03

AI Technical Summary

Technical Problem

Traditional ion pump power circuits rely on the power grid for power supply. When disconnected from the power grid, they cannot guarantee the vacuum level inside the ion pump, resulting in a decrease in vacuum level.

Method used

The system employs a battery pack, voltage adjustment module, beam current detection module, switching control module, and battery mode switching module. By detecting the operating current inside the ion pump chamber, it switches the battery pack to the corresponding mode and outputs the corresponding voltage to ensure the vacuum level inside the ion pump.

Benefits of technology

When disconnected from the power grid, the battery pack is used as the energy input to maintain the vacuum level inside the ion pump and reduce the power consumption of the overall circuit.

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Abstract

The application discloses an ion pump power supply circuit. The circuit comprises a battery pack, a voltage adjustment module, a beam current detection module, a switching control module and a battery mode switching module; the output end of the battery pack is electrically connected with the input end of the voltage adjustment module; the high-voltage output end of the voltage adjustment module is connected with the cathode of the ion pump; the output return end of the voltage adjustment module is electrically connected with the first input end of the beam current detection module; the anode of the ion pump is electrically connected with the second input end of the beam current detection module; the output end of the beam current detection module is electrically connected with the input end of the switching control module; the output end of the switching control module is electrically connected with the input end of the battery pack through the battery mode switching module; the beam current detection module detects the working current in the ion pump cavity; the switching control module outputs a control signal to the battery mode switching module according to the size so that the battery pack is switched to the corresponding mode and outputs the corresponding voltage; and the voltage adjustment module adjusts the voltage and outputs the same to the ion pump.
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