Excimer lamp power supply intelligent control method and system

By extending the Kalman filter model and using a proportional-integral controller, combined with nonlinear feedforward compensation and asymmetric drive, the problems of poor power regulation and unreliable lighting of the excimer lamp power supply under drastic load impedance changes were solved, improving control accuracy and reducing switching losses, and realizing a fast and stable lighting process and smooth switching.

CN121098091AActive Publication Date: 2025-12-09SUZHOU HUI YING OPTICAL TECH CO LTD
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Patent Information

Application Number
CN202511587509.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-11-03
Publication Date
2025-12-09
Estimated Expiration
2045-11-03

AI Technical Summary

Technical Problem

Existing excimer lamp power supplies suffer from problems such as poor power regulation, unreliable lamp start-up, low compensation accuracy, and increased switching losses when the load impedance changes drastically. In particular, under light load or load impedance changes, the lagging arm of the phase-shifted full-bridge is prone to losing the zero-voltage turn-on condition, resulting in increased switching losses.

Method used

An extended Kalman filter model is used to estimate the equivalent complex impedance amplitude, phase angle, and phase angle change rate of the excimer lamp. Combined with a proportional-integral controller and nonlinear feedforward compensation, the asymmetric drive of the phase-shifting full bridge is achieved by monitoring the cross-correlation coefficient of voltage and current and the amplitude of the third harmonic of voltage, ensuring the rapid and successful lighting process and smooth switching to closed-loop control.

Benefits of technology

It improves the accuracy of power control, suppresses load disturbances and voltage fluctuations, reduces switching losses, ensures the rapid success and stability of the lighting process, and achieves a smooth switching from open loop to closed loop.

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Abstract

The invention belongs to the technical field of power supply control, and particularly relates to an excimer lamp power supply intelligent control method and system, and the method comprises the following steps: S1, obtaining the real-time output voltage and output current of an excimer lamp and the DC bus voltage of a phase-shifted full bridge; estimating an equivalent complex impedance amplitude, a phase angle and a phase angle change rate of the excimer lamp in a next switching period according to voltage and current sampling values in a plurality of continuous switching periods by adopting an extended Kalman filtering model; and S2, according to the deviation between the target output power and the real-time power, a basic phase shift angle is calculated through a proportional-integral controller, and the gain of the proportional-integral controller is determined according to the change rate of the phase angle. According to the invention, the accuracy of power control and the inhibition capability on load disturbance and voltage fluctuation are improved, the stability of output power is ensured, the switching loss is reduced, the rapid success of the lighting process is ensured, and the stable switching to closed-loop control is realized.
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