An ion receiving device

Abstract

This invention belongs to the field of mass spectrometry analysis instruments, specifically relating to an ion receiving device designed to solve the signal crosstalk problem between multiple channels of a combined receiver. The ion receiving device provided by this invention includes a receiver body and a signal detection cup unit, a slit, a suppression grid unit, a Faraday cup unit, and an electron multiplier unit mounted on the receiver body. The slit, suppression grid, and Faraday cup units are arranged along a first direction, and the ion beam sequentially passes through the slit, the receiver body, and the suppression grid unit before entering the Faraday cup unit. The signal detection cup unit, Faraday cup unit, and electron multiplier unit are arranged at intervals along a second direction, which is perpendicular to the first direction. By arranging the signal detection cup unit, Faraday cup unit, and electron multiplier unit at intervals along a direction perpendicular to the ion beam incident direction, the ion receiving device provided by this invention avoids signal crosstalk between channels.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of mass spectrometry instruments, and particularly relates to an ion receiving device. BACKGROUND

[0002] In mass spectrometry, the performance of the ion receiver plays a decisive role in the overall analysis capability of the instrument. Traditional detectors such as Faraday cups and electron multipliers have their own advantages, but they have shortcomings in dealing with the needs of wide dynamic range sample analysis and instrument performance online diagnosis. The existing combined receiver has a prominent signal crosstalk problem between multiple channels, which affects the accuracy of the results. SUMMARY

[0003] In order to solve the above-mentioned problems in the prior art, i.e. the signal crosstalk problem between multiple channels of the combined receiver, the present application provides an ion receiving device.

[0004] In order to solve the above-mentioned technical problems, the technical scheme provided by the present application is as follows:

[0005] An ion receiving device, comprising a receiver body and a signal detection cup unit, a slit sheet, a suppression grid unit, a Faraday cup unit and an electron multiplier unit mounted on the receiver body;

[0006] The slit sheet, the suppression grid unit and the Faraday cup unit are arranged along a first direction, and the ion beam passes through the slit sheet, the receiver body and the suppression grid unit in sequence and then enters the Faraday cup unit;

[0007] The signal detection cup unit, the Faraday cup unit and the electron multiplier unit are arranged in intervals along a second direction perpendicular to the first direction.

[0008] Further, the slit sheet is provided with a beam channel, the receiver body is provided with a Faraday cup channel, and the suppression grid unit is provided with a communication channel;

[0009] The Faraday cup unit comprises at least two Faraday cups, and a grounding plate is arranged between adjacent Faraday cups;

[0010] The beam channel, the communication channel and the Faraday cup correspond one by one, and the ion beam passes through the beam channel, the Faraday cup channel and the communication channel in sequence and then enters the Faraday cup.

[0011] Further, the inner wall bottom of the Faraday cup is provided with a plurality of barbs, and the cross-sectional area of the barbs increases along the direction of ion beam incidence.

[0012] Further, the Faraday cup unit further comprises a Faraday cup fixing seat, and the Faraday cup, the grounding plate and the Faraday cup fixing seat are connected.

[0013] The Faraday cup fixing seat is connected with the receiver body.

[0014] Further, the receiver body is provided with a moving limiting block, and the Faraday cup fixing seat is provided with a limiting slot extending in a second direction, the moving limiting block is inserted into the limiting slot and can move along the limiting slot.

[0015] Further, the signal detection cup unit comprises a signal detection cup mounting seat, a signal detection cup and a first signal lead-out end.

[0016] The signal detection cup is mounted on the signal detection cup mounting seat, and the signal detection cup mounting seat is mounted on the receiver body.

[0017] The ion flow collected by the signal detection cup is connected to an amplifier through the first signal lead-out end.

[0018] Further, the electron multiplier unit comprises an electron multiplier body, an electron multiplier mounting seat and a second signal lead-out end.

[0019] The electron multiplier body is mounted on the electron multiplier mounting seat, and the electron multiplier mounting seat is mounted on the receiver body; the electrical signal amplified by the electron multiplier body is led out through the second signal lead-out end.

[0020] Further, the suppression grid unit comprises a suppression grid, which is provided as a molybdenum plate and is provided with the communication channel.

[0021] Further, the receiver body is further provided with a signal detection cup channel and an electron multiplier channel.

[0022] The signal detection cup unit is inserted into the signal detection cup channel, and the electron multiplier unit is inserted into the electron multiplier channel.

[0023] Further, the ion receiving device further comprises a support unit, and two support units are connected with the receiver body.

[0024] The support unit comprises a support rod and a spring, the support rod extends in a first direction and is threadedly connected with the receiver body, and the spring is sleeved on the support rod, one end of the spring abuts against the receiver body, and the other end of the spring abuts against the support rod, so as to apply a pushing force to the receiver body.

[0025] The above technical solutions are combined, and the technical effects that can be achieved by the application are as follows:

[0026] The ion receiving device provided by the application comprises a receiver body, a signal detection cup unit, a slit sheet, a suppression grid unit, a Faraday cup unit and an electron multiplier unit installed on the receiver body; the slit sheet, the suppression grid unit and the Faraday cup unit are arranged along a first direction, and an ion beam sequentially passes through the slit sheet, the receiver body and the suppression grid unit and then enters the Faraday cup unit; the signal detection cup unit, the Faraday cup unit and the electron multiplier unit are arranged along a second direction, and the second direction is perpendicular to the first direction.

[0027] The ion receiving device provided by the application avoids signal crosstalk between channels by arranging the signal detection cup unit, the Faraday cup unit and the electron multiplier unit along a direction perpendicular to the ion beam incident direction. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the specific embodiments of the application or the technical solutions in the prior art, the drawings needed in the specific embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0029] Figure 1 The structure schematic diagram of the ion receiving device provided by the embodiment of the application is shown in the figure.

[0030] Figure 2 The structure schematic diagram of the ion receiving device provided by the embodiment of the application is shown in the figure.

[0031] Figure 3 The structure schematic diagram of the ion receiving device provided by the embodiment of the application is shown in the figure.

[0032] Figure 4 The structure schematic diagram of the ion receiving device provided by the embodiment of the application is shown in the figure.

[0033] Figure 5 The structure schematic diagram of the ion receiving device provided by the embodiment of the application is shown in the figure.

[0034] Figure 6 The structure schematic diagram of the ion receiving device provided by the embodiment of the application is shown in the figure.

[0035] Figure 7 The structure schematic diagram of the ion receiving device provided by the embodiment of the application is shown in the figure.

[0036] Figure 8 The structure schematic diagram of the ion receiving device provided by the embodiment of the application is shown in the figure.

[0037] Figure 9 The structure schematic diagram of the ion receiving device provided by the embodiment of the application is shown in the figure.

[0038] Figure 10 The structure schematic diagram of the ion receiving device provided by the embodiment of the application is shown in the figure.

[0039] Figure 11 This is a schematic diagram of the electron multiplier unit.

[0040] Icons: 100, Receiver body; 110, Moving limit block; 101, Faraday cup channel; 102, Signal detection cup channel; 103, Electron multiplier channel; 104, Identifier line; 200, Signal detection cup unit; 210, Signal detection cup mounting base; 220, Signal detection cup; 230, First signal lead-out terminal; 240, Signal detection cup fixing base; 250, First ceramic washer; 300, Slit plate; 301, Beam channel; 400, Suppression grid unit; 410, Suppression grid; 420, External power supply connection terminal; 430, Second ceramic... Washer; 401, Connecting channel; 500, Faraday cup unit; 510, Faraday cup; 520, Grounding plate; 530, Faraday cup mounting base; 511, Barb; 531, Limiting groove; 540, First screw; 550, Second screw; 560, Third signal lead-out terminal; 600, Electron multiplier unit; 610, Electron multiplier body; 620, Electron multiplier mounting base; 630, Second signal lead-out terminal; 640, Electron multiplier mounting base; 650, Ceramic gasket; 700, Support unit; 710, Support rod; 720, Spring. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0043] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0044] In mass spectrometry, the performance of the ion receiver plays a decisive role in the overall analytical capability of the instrument. Traditional detectors such as Faraday cups and electron multipliers each have their advantages, but they have shortcomings when dealing with the needs of wide dynamic range sample analysis and online instrument performance diagnostics. Existing combined receivers suffer from significant signal crosstalk between multiple channels, affecting the accuracy of the results.

[0045] In view of this, the present invention provides an ion receiving device, including a receiver body 100 and a signal detection cup unit 200, a slit plate 300, a suppression grid unit 400, a Faraday cup unit 500, and an electron multiplier unit 600 installed on the receiver body 100; the slit plate 300, the suppression grid unit 400, and the Faraday cup unit 500 are arranged along a first direction, and the ion beam passes through the slit plate 300, the receiver body 100, and the suppression grid unit 400 in sequence before entering the Faraday cup unit 500; the signal detection cup unit 200, the Faraday cup unit 500, and the electron multiplier unit 600 are arranged at intervals along a second direction, the second direction being perpendicular to the first direction.

[0046] The ion receiving device provided by the present invention avoids signal crosstalk between channels by arranging the signal detection cup unit 200, the Faraday cup unit 500 and the electron multiplier unit 600 at intervals along a direction perpendicular to the incident direction of the ion beam.

[0047] The following combination Figures 1-11 The structure and shape of the ion receiving device provided in this embodiment will be described in detail below:

[0048] In this embodiment, a beam channel 301 is provided on the slit plate 300, a Faraday cup channel 101 is provided on the receiver body 100, and a communication channel 401 is provided on the suppression grid unit 400; the Faraday cup unit 500 includes at least two Faraday cups 510, and a ground plane 520 is provided between adjacent Faraday cups 510; the beam channel 301, the communication channel 401 and the Faraday cup 510 correspond one-to-one, and the ion beam enters the Faraday cup 510 after passing through the beam channel 301, the Faraday cup channel 101 and the communication channel 401 in sequence.

[0049] Specifically, the slit 300, as the first barrier for the ion beam to enter the detection region, can improve resolution and signal-to-noise ratio. The slit 300 is manufactured using a high-precision laser-cut thin stainless steel sheet process, and its surface undergoes planing and cleaning treatment to reduce surface charge accumulation and scattering effects. In this embodiment, the slit 300 is provided with two beam channels 301 that control the width, length, and parallelism, such as... Figure 7 As shown. The core function of the slit 300 is to spatially shape and filter the ion beam from the mass analyzer, thereby effectively filtering out diffuse ions, neutral particles, and scattered ions that may cause background interference. By replacing slits 300 with different specifications, the resolution and sensitivity of the instrument can be flexibly adjusted to adapt to different analytical tasks.

[0050] The Faraday cup unit 500 is a core detection unit for high-precision, high-content ion quantitative analysis, especially suitable for applications requiring extremely high accuracy and stability, such as isotope ratio measurement. In this embodiment, the Faraday cup unit 500 comprises two Faraday cups 510 arranged along a second direction with highly consistent geometry and material properties, allowing for the simultaneous reception and measurement of two ion currents with different mass-to-charge ratios, such as... Figure 9 As shown. To minimize signal crosstalk between the two Faraday cups 510, a ground plane 520 is inserted between them. The upper end of the ground plane 520 is slightly higher than the Faraday cups 510 and is well connected to the system, effectively absorbing any ions or secondary electrons that may scatter from one Faraday cup 510 to the other, and shielding the electrostatic coupling between them.

[0051] In this embodiment, the three core components—Faraday cup 510, ground plane 520, and the first screw 540—are assembled in a stacked and fastened manner. High-purity ceramic insulating sleeves are installed between all conductive components and between the conductive components and the fixing screw to ensure the absolute electrical independence of each Faraday cup 510 signal. Figure 9 As shown, both the Faraday cup 510 and the ground plane 520 are provided with through holes that mate with the first screws 540. The two first screws 540 are arranged along a first direction. A ceramic insulating spacer is fitted onto the first screws 540 and positioned between the Faraday cup 510 and the ground plane 520. Furthermore, a nut is fitted onto the first screw 540 for locking. Ceramic insulating spacers are provided between the nut and the Faraday cup 510, and between the screw head and the Faraday cup 510. Figure 2 , Figure 9 As shown. Furthermore, an auxiliary ceramic spacer is also fitted on the first screw 540, and the auxiliary ceramic spacer is inserted into the through hole of the Faraday cup 510 and the ground plate 520. The length of the auxiliary ceramic spacer is less than the thickness of the corresponding Faraday cup 510 or ground plate 520.

[0052] In this embodiment, the bottom of the inner wall of the Faraday cup 510 is provided with multiple barbs 511. The cross-sectional area of ​​the barbs 511 increases along the ion beam incident direction, which is the first direction. Specifically, the barbs 511 can be configured as conical, frustum-shaped, or pyramidal structures. In this embodiment, the barbs 511 at the bottom of the inner wall of the Faraday cup 510 are arranged in an array, such as... Figure 10As shown, this structure consumes the energy of secondary electrons and changes their escape direction through multiple reflections and collisions, greatly increasing the probability of secondary electrons being reabsorbed by the cup wall. Furthermore, the entire inner surface of the Faraday cup 510 is uniformly covered with a deposited high-performance, low work function metal oxide film. This film possesses an ultra-low secondary electron emission coefficient, excellent conductivity, and long-term stability under vacuum and ion bombardment environments, significantly reducing the generation of secondary electrons at the source and efficiently absorbing residual secondary electrons, ensuring the purity of the measured ion current. Specifically, the metal oxide film is made of yttrium oxide.

[0053] In this embodiment, the Faraday cup unit 500 further includes a Faraday cup fixing seat 530, with the Faraday cup 510 and the ground plate 520 connected to the Faraday cup fixing seat 530; the Faraday cup fixing seat 530 is connected to the receiver body 100. Specifically, the Faraday cup unit 500 also includes a second screw 550. The Faraday cup 510 and the ground plate 520 are provided with through holes that cooperate with the second screw 550. The two second screws 550 are arranged horizontally and pass through the Faraday cup fixing seat 530. The Faraday cup fixing seat 530 is provided with through holes corresponding to the second screws 550 and is locked with the second screws 550 by a nut. Ceramic insulating spacers are provided between the nut and the Faraday cup 510, and between the screw head and the Faraday cup 510. Furthermore, an auxiliary ceramic spacer is also fitted on the second screw 550. The auxiliary ceramic spacer is inserted into the through holes of the Faraday cup 510, the ground plate 520, and the Faraday cup fixing seat 530. The length of the auxiliary ceramic spacer is less than the thickness of the corresponding Faraday cup 510, the ground plate 520, or the Faraday cup fixing seat 530.

[0054] In this embodiment, to ensure the positioning of the Faraday cup 510, the Faraday cup unit 500 further includes positioning rods. Two positioning rods pass through the Faraday cup 510, the ground plate 520, and the Faraday cup fixing seat 530 to ensure that their relative positions remain unchanged, avoiding misalignment caused by the gap between the screw and the through hole. Specifically, the Faraday cup 510, the ground plate 520, and the Faraday cup fixing seat 530 are all provided with positioning through holes that cooperate with the positioning rods, and the diameter of the positioning rods is equal to the diameter of the positioning through holes.

[0055] In this embodiment, the ion current signal collected by each Faraday cup 510 is connected to an external ultra-low noise, high input impedance transimpedance amplifier through the third signal lead 560 and shielded wires, so as to accurately convert the weak current signal in the picoampere to nanoampere range into a measurable voltage signal.

[0056] In this embodiment, a movable limiting block 110 is provided on the receiver body 100, and a limiting groove 531 is provided on the Faraday cup fixing seat 530. The limiting groove 531 extends along the second direction, and the movable limiting block 110 is inserted into the limiting groove 531 and can move along the limiting groove 531. Through the cooperation of the movable limiting block 110 and the limiting groove 531, the Faraday cup unit 500 can move stably along the second direction to adjust the position of the Faraday cup 510. Specifically, the Faraday cup fixing seat 530 has an L-shaped structure, and the two sides of the L-shaped structure are respectively connected to the Faraday cup 510 and the receiver body 100. Furthermore, in order to achieve precise alignment of the Faraday cup unit 500, a high-contrast marking line 104 is etched on the surface of the receiver body 100. With the combination of the movable limiting block 110 and the limiting groove 531, the two work together to make the fine-tuning process of the Faraday cup unit 500 along the second direction intuitive and controllable, effectively compensating for assembly errors. It has fine-tuning capabilities to compensate for minor alignment deviations caused by manufacturing, assembly or thermal effects, ensuring that the ion beam can be accurately incident on the central effective area of ​​the Faraday cup 510, thereby maximizing collection efficiency and measurement accuracy.

[0057] In this embodiment, the signal detection cup unit 200 includes a signal detection cup mounting base 210, a signal detection cup 220, and a first signal output terminal 230. The signal detection cup 220 is mounted on the signal detection cup mounting base 210, and the signal detection cup mounting base 210 is mounted on the receiver body 100. The ion flow collected by the signal detection cup 220 is connected to an amplifier through the first signal output terminal 230. The signal detection cup unit 200 is a key subsystem specifically designed for instrument performance diagnosis and rapid tuning. Its core component, the signal detection cup 220, is designed with a significantly larger effective receiving area and incident aperture than other detection channels. This design enables it to efficiently capture ion beams that may be somewhat divergent or poorly positioned during the initial commissioning phase. Specifically, the incident aperture of the signal detection cup 220 is at least twice the incident aperture of the electron multiplier unit 600, and at least ten times the incident aperture of the Faraday cup 510. In practical operation, such as when the mass spectrometer is first started or when the vacuum is restored after maintenance, the operator usually uses the nitrogen in the residual air in the vacuum system as a target without introducing an actual sample. By scanning the mass number, the operator can find the characteristic ion peak. At this time, the signal detection cup 220 can provide a clear signal response, which helps to quickly determine whether the ion source is ignited normally, whether the ions are successfully generated, whether the mass analyzer is working normally, and the approximate deflection path and efficiency of the ion beam, saving a lot of time for subsequent fine tuning.

[0058] To ensure the accuracy of signal measurement, the signal detection cup unit 200 also includes a signal detection cup holder 240 and a first ceramic washer 250, such as... Figure 6As shown, the signal detection cup 220 is strictly electrically isolated from the receiver body 100 and the signal detection cup fixing base 240 through an insulation system consisting of the signal detection cup mounting base 210 and the first ceramic washer 250. The signal detection cup 220 is securely and insulatedly mounted on the receiver body 100 through the signal detection cup mounting base 210, and the weak ion current collected by it is connected to a high-sensitivity external amplifier through a dedicated first signal lead 230.

[0059] Specifically, the signal detection cup mounting base 210 is made of ceramic. The signal detection cup 220 is installed in the inner cavity of the signal detection cup mounting base 210. The signal detection cup fixing base 240 has an L-shaped structure, with one side of the L-shaped structure connected to the signal detection cup mounting base 210 by a screw, and the other side connected to the receiver body 100 by a screw. First ceramic washers 250 are provided between the screw head and the signal detection cup fixing base 240, and between the signal detection cup fixing base 240 and the signal detection cup mounting base 210. Simultaneously, the signal detection cup mounting base 210 is installed to the receiver body 100 by screws.

[0060] In this embodiment, the electron multiplier unit 600 includes an electron multiplier body 610, an electron multiplier mounting base 620, and a second signal output terminal 630; the electron multiplier body 610 is mounted on the electron multiplier mounting base 620, and the electron multiplier mounting base 620 is mounted on the receiver body 100; the electrical signal amplified by the electron multiplier body 610 is output through the second signal output terminal 630, such as... Figure 11 As shown.

[0061] The electron multiplier unit 600 is the core unit for achieving high-sensitivity trace ion detection. It is mainly used to analyze specific compounds present in extremely low concentrations in samples, typically light impurities and process-introduced halogenated hydrocarbon impurities. The core of the electron multiplier unit 600 is the electron multiplier body 610, a precision vacuum electronic device capable of amplifying the signal of a single ion by millions of times. The electron multiplier body 610 is securely and insulatedly mounted to the receiver body 100 via an electron multiplier mounting base 620, an electron multiplier fixing base 640, and a ceramic gasket 650. Specifically, the electron multiplier body 610 is inserted into the inner cavity of the electron multiplier mounting base 620, and the ceramic gasket 650 is positioned between the electron multiplier mounting base 620 and the electron multiplier fixing base 640. The electron multiplier fixing base 640 has an L-shaped structure, with its two sides connected to the electron multiplier mounting base 620 and the receiver body 100 respectively by screws. Meanwhile, the electron multiplier mounting base 620 is also mounted to the receiver body 100 with screws. The amplified electrical signal is output through the well-shielded second signal lead 630 and then connected to an external amplifier. The electron multiplier mounting base 620 is made of ceramic.

[0062] In this embodiment, the suppression gate unit 400 includes a suppression gate 410, which is a molybdenum plate with a connecting channel 401. The suppression gate 410 is used to actively control and reduce secondary electron interference. Installed in front of the ion entrance of the Faraday cup 510, it further enhances the control of secondary electrons, ensures the purity of the measured ion current, reduces background noise, and improves the signal-to-noise ratio. A negative bias voltage relative to the Faraday cup unit 500 is applied to the suppression gate 410 through an external power supply connection terminal 420, forming an electrostatic barrier between it and the Faraday cup 510. This electrostatic barrier effectively repels and prevents low-energy secondary electrons generated from ion bombardment on the inner wall of the Faraday cup 510 from escaping the collection area, while also preventing low-energy electrons from the external environment from accidentally entering the Faraday cup 510. The suppression gate 410 is electrically isolated from the receiver body 100 by a high-insulation-strength second ceramic gasket 430.

[0063] In this embodiment, the receiver body 100 is further provided with a signal detection cup channel 102 and an electron multiplier channel 103; the signal detection cup unit 200 is inserted into the signal detection cup channel 102, and the electron multiplier unit 600 is inserted into the electron multiplier channel 103, such as... Figure 4 As shown. Specifically, the signal detector cup mounting base 210 is inserted into the signal detector cup channel 102, and the electron multiplier mounting base 620 is inserted into the electron multiplier channel 103.

[0064] Specifically, the receiver body 100 is made of stainless steel with a low gas release rate, such as 316L, providing a stable mounting surface and precise positioning reference for all related components. In addition, the receiver body 100 has threaded holes for fixing various components, such as... Figure 4 , Figure 5 As shown.

[0065] In this embodiment, the ion receiving device further includes support units 700. Two support units 700 are connected to the receiver body 100 to achieve precise three-dimensional spatial positioning of the entire ion receiving device in the vacuum system. Each support unit 700 includes a support rod 710 and a spring 720. The support rod 710 extends along a first direction and is threadedly connected to the receiver body 100. The spring 720 is fitted onto the support rod 710, with one end abutting against the receiver body 100 and the other end abutting against the support rod 710, for applying a pushing force to the receiver body 100.

[0066] The support unit 700 is a key mechanical component for achieving precise positioning of the entire ion receiving device within the vacuum chamber of the mass spectrometer. The support rod 710 is made of metal, utilizing the high rigidity and low coefficient of thermal expansion of metal to provide stable support. The threaded connection between the support rod 710 and the receiver body 100 allows adjustment of the ion receiving device's position in the first direction. The spring 720 provides a smoother adjustment feel when rotating the support rod 710, eliminates thread backlash, and enhances the stability of the position lock, thereby ensuring optimal alignment between the slit 300 and the ion beam emitted from the mass analyzer.

[0067] In this embodiment, various components are precisely integrated onto a robust receiver body 100 according to requirements, and strict electrical isolation is achieved through high-quality ceramic insulating components, ensuring low gas release, high insulation strength, and good mechanical stability in a high vacuum environment. That is, component materials are rationally selected or insulating components are used for isolation based on insulation requirements.

[0068] The ion receiving device provided in this embodiment integrates three independent ion incident channels: a Faraday cup channel 101 for high-content ion measurement, a signal detection cup channel 102 with a large-aperture design for instrument debugging and ion source / mass analyzer efficiency evaluation, and an electron multiplier channel 103 for high-sensitivity detection of trace ions. This integrated design enables the coexistence and coordinated operation of multiple detection modes within a single compact structure.

[0069] Secondly, the Faraday cup unit 500 features a crosstalk suppression and high-efficiency secondary electron suppression structure, enabling accurate differentiation and measurement of even weak ion signals in high dynamic range sample analysis, significantly improving the accuracy of quantitative analysis and the reliability of trace detection. Specifically, a ground plane 520 is provided between two parallel Faraday cups 510 to absorb scattered ions and isolate signal crosstalk; the bottom of the inner wall of the Faraday cup 510 is provided with an array of barbs 511, and the inner wall surface is covered with a conductive film with a low secondary electron emission coefficient to synergistically and efficiently suppress the generation and escape of secondary electrons; and strict electrical isolation is achieved between the Faraday cup 510 and the ground plane 520 through a ceramic insulator.

[0070] Third, the Faraday cup unit 500 achieves precise positional adjustment relative to the receiver body 100 through a combination of the marking line 104, the moving limit block 110, and the limiting groove 531. This compensates for installation and manufacturing errors, ensuring optimal alignment with the incident ion beam. This design effectively overcomes alignment deviations between the critical detection unit and the incident ion beam caused by manufacturing, assembly errors, or long-term use, ensuring that the ion beam accurately enters the effective area of ​​the detector. This maximizes ion receiving efficiency and guarantees the long-term stability and repeatability of measurement results.

[0071] Fourth, the signal detection cup unit 200 with a large-diameter channel is used to evaluate the particle generation and deflection efficiency of the ion source and mass analyzer by detecting the background gas nitrogen ion peak during the pre-sample-injection and commissioning stage of the mass spectrometer. This provides a convenient and effective means for the rapid commissioning, fault diagnosis and performance evaluation of the mass spectrometer, and significantly shortens the instrument preparation time.

[0072] Fifth, the Faraday cup unit 500, signal detection cup unit 200, electron multiplier unit 600, slit plate 300, and suppression grid 410 are modularly integrated into the receiver body 100 through precision machining. The overall position is precisely adjusted via the support unit 700. This modular design not only simplifies initial assembly but also facilitates subsequent maintenance, upgrades, or replacement of individual components, reducing the instrument's total lifecycle cost, improving assembly efficiency and maintainability, and ensuring the coordinated accuracy of each functional unit. Users can flexibly select or simultaneously use different detection channels according to their analytical needs, such as high-content precision measurement, instrument status diagnosis, and high-sensitivity detection of trace components, greatly expanding the application range and analytical flexibility of the mass spectrometer.

[0073] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An ion receiving device, characterized by, The receiver body (100) and the signal detection cup unit (200), the slit sheet (300), the suppression grid unit (400), the Faraday cup unit (500) and the electron multiplier unit (600) installed on the receiver body (100) are included. The slit sheet (300), the suppression grid unit (400) and the Faraday cup unit (500) are arranged along a first direction, and the ion beam sequentially passes through the slit sheet (300), the receiver body (100) and the suppression grid unit (400) and then enters the Faraday cup unit (500). The signal detection cup unit (200), the Faraday cup unit (500) and the electron multiplier unit (600) are arranged along a second direction. The Faraday cup unit (500) includes at least two Faraday cups (510), and a grounding plate (520) is arranged between adjacent Faraday cups (510). The inner wall bottom of the Faraday cup (510) is provided with a plurality of barbs (511), and the cross-sectional area of the barbs (511) increases along the ion beam incident direction.

2. The ion receiving device of claim 1, wherein, The slit sheet (300) is provided with a beam channel (301), the receiver body (100) is provided with a Faraday cup channel (101), and the suppression grid unit (400) is provided with a communication channel (401). The beam channel (301), the communication channel (401) and the Faraday cup (510) correspond one by one, and the ion beam sequentially passes through the beam channel (301), the Faraday cup channel (101) and the communication channel (401) and then enters the Faraday cup (510).

3. The ion receiving device of claim 2, wherein, The Faraday cup unit (500) further includes a Faraday cup fixing seat (530), and the Faraday cup (510) and the grounding plate (520) are connected with the Faraday cup fixing seat (530). The Faraday cup fixing seat (530) is connected with the receiver body (100).

4. The ion receiving device of claim 3, wherein, The receiver body (100) is provided with a moving limiting block (110), the Faraday cup fixing seat (530) is provided with a limiting groove (531), the limiting groove (531) extends along the second direction, and the moving limiting block (110) is inserted into the limiting groove (531) and can move along the limiting groove (531).

5. The ion receiving device of claim 4, wherein, The signal detection cup unit (200) includes a signal detection cup mounting seat (210), a signal detection cup (220) and a first signal lead-out end (230). The signal detection cup (220) is installed on the signal detection cup mounting seat (210), and the signal detection cup mounting seat (210) is installed on the receiver body (100). The ion flow collected by the signal detection cup (220) is connected to an amplifier through the first signal lead-out end (230).

6. The ion receiving device of claim 2, wherein, The electron multiplier unit (600) includes an electron multiplier body (610), an electron multiplier mounting seat (620) and a second signal lead-out end (630). The electron multiplier body (610) is mounted on the electron multiplier mounting seat (620), and the electron multiplier mounting seat (620) is mounted on the receiver body (100); the electric signal amplified by the electron multiplier body (610) is led out through the second signal leading end (630).

7. The ion receiving device of claim 2, wherein, The suppression grid unit (400) comprises a suppression grid (410), which is arranged as a molybdenum plate and is provided with the communication channel (401).

8. The ion receiving device of claim 2, wherein, The receiver body (100) is further provided with a signal detection cup channel (102) and an electron multiplier channel (103). The signal detection cup unit (200) is inserted into the signal detection cup channel (102), and the electron multiplier unit (600) is inserted into the electron multiplier channel (103).

9. The ion receiving device of claim 2, wherein, The support unit (700) is further provided, and two support units (700) are connected with the receiver body (100). The support unit (700) comprises a support rod (710) and a spring (720), the support rod (710) extends along a first direction and is threadedly connected with the receiver body (100); the spring (720) is sleeved on the support rod (710), one end of the spring (720) abuts against the receiver body (100), and the other end of the spring (720) abuts against the support rod (710), so as to apply a pushing force to the receiver body (100).

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