A chamber vacuum testing apparatus and method for a remote plasma module

Abstract

The present application relates to the technical field of vacuum cavity testing, and discloses a cavity vacuum testing device and method for a remote plasma module, wherein the cavity vacuum testing device for the remote plasma module comprises a testing machine main body, a motor arranged outside the testing machine main body, and a detection mechanism arranged on the top of the workbench of the testing machine main body; the detection mechanism comprises a support plate arranged on the top of the workbench of the testing machine main body, a workpiece arranged at the bottom of the support plate, a bidirectional screw rod arranged on the side of the motor close to the support plate, a plurality of slotted grooves symmetrically and obliquely arranged on the side of the support plate close to the bidirectional screw rod, a sliding block arranged in the slotted groove, a lower vertical rod arranged at the bottom of the sliding block, and an upper connecting rod arranged at the top of the sliding block. Through the arrangement of the detection mechanism, the workstations can be flexibly increased, the user can adjust the number of workstations according to actual needs, the testing efficiency is improved, and the device has the ability to adapt to cavities with different diameters.

Description

Technical Field

[0001] This invention relates to the field of vacuum cavity testing technology, and in particular to a cavity vacuum testing device and method for a remote plasma module. Background Technology

[0002] The cavity vacuum testing device for the remote plasma module is a core piece of equipment for ensuring the stability of the plasma process. Its key function is to ensure the sealing performance and vacuum environment reliability of the cavity under extreme process conditions through precise simulation and testing. This device uses a high-precision vacuum pump assembly and molecular pump system to perform ultimate vacuum extraction on the cavity. Combined with real-time monitoring of pressure changes within the cavity by a vacuum gauge, it can accurately assess the cavity sealing performance, such as leakage rate and outgassing rate, avoiding problems like abnormal plasma excitation, uneven energy distribution, or process contamination caused by insufficient vacuum.

[0003] Traditional testing machines are widely used in the field of vacuum testing, but due to limitations in their structure and working principle, they often have some unavoidable problems. These are mainly reflected in two aspects: poor adaptability to station switching and insufficient workpiece compatibility. First, the device cannot quickly switch between multi-station and single-station operation, usually requiring the reconstruction of the testing platform or adjustment of the mechanical structure, resulting in low testing efficiency and difficulty in meeting the flexible testing needs of multi-variety, small-batch production scenarios. This fixed design limits the equipment's versatility in the production line, increasing debugging time and labor costs when switching between different processes. Second, the device establishes a vacuum environment through a closed cavity end face, resulting in poor adaptability to workpiece aperture sizes. When facing cavities with different aperture specifications, custom-made sealing fixtures are required; otherwise, problems such as incomplete sealing and unstable vacuum levels are likely to occur. Furthermore, this design has extremely high requirements for end face flatness. If the workpiece end face has deformation, scratches, or processing errors, it will directly affect the sealing effect, leading to air leakage or distorted test data, making it unsuitable for workpieces with uneven end faces or irregular shapes. These limitations make the device less flexible in dealing with diverse and complex plasma process requirements, especially in multi-specification co-line production or non-standard cavity testing scenarios, where its applicability and testing efficiency are significantly restricted. Summary of the Invention

[0004] In view of the problems of existing technology, such as the inconvenience of switching the number of testing stations and the insufficient adaptability to the diameter of workpiece holes, a cavity vacuum testing device for remote plasma modules is proposed.

[0005] Its purpose is to enable the testing machine to quickly switch the number of stations and adapt to cavities with different diameters.

[0006] The technical solution of the present invention is a cavity vacuum testing device for a remote plasma module, including a testing machine body, a motor disposed on the outside of the testing machine body, and a detection mechanism disposed on the top of the worktable of the testing machine body;

[0007] The testing mechanism includes a support plate set on the top of the main worktable of the testing machine, a workpiece set at the bottom of the support plate, a bidirectional lead screw set on the side of the motor near the support plate, several obliquely symmetrically opened grooves on the side of the support plate near the bidirectional lead screw, a slider set inside the groove, a pendant rod set at the bottom of the slider, an upper connecting rod set at the top of the slider, the middle part of the bidirectional lead screw being threadedly connected to the two closest pendant rods, a connecting unit set at the top of the upper connecting rod, and a docking unit set on the side of the slider away from the support plate.

[0008] After the motor starts, it drives the bidirectional lead screw to rotate. After the bidirectional lead screw rotates, it drives the two pendant rods connected to it to move. The two pendant rods can only move in the direction away from each other. The pendant rods drive the slider connected to them to move. The slider is constrained by the corresponding groove and can only move in the horizontal direction.

[0009] Furthermore, the front of the support plate is linearly arrayed with several sets of claws, each set of claws consisting of two obliquely symmetrical protrusions, with the side of the protrusions that are close to each other engaging with the workpiece.

[0010] Furthermore, the two sliders at the highest point of the support plate are not provided with upper connecting rods, and the bottom of the two drooping rods at the lowest point are provided with screw holes, which are all threaded to a bidirectional lead screw.

[0011] Furthermore, the connecting unit includes a pin disposed at the top of the upper connecting rod, a telescopic hole opened at the bottom of the lower rod, a button disposed inside the telescopic hole, and an ejector spring disposed on the side of the button near the support plate, with the two ends of the ejector spring being fixedly connected to the button and the lower rod respectively.

[0012] Furthermore, a slot is provided at the top of the pin near the support plate, and a block is provided at the bottom of the button, with the slot engaging with the bottom of the block.

[0013] Furthermore, the docking unit includes a sleeve disposed on the side of the slider away from the support plate, a connector disposed on the inner side of the sleeve, a return spring sleeved on the outer side of the connector, a sealing ring disposed on the inner wall of the sleeve near the return spring, the two ends of the return spring being fixedly connected to the connector and the sleeve respectively, guide posts symmetrically disposed on the top and bottom of the connector, a fixing ring disposed on the end of the guide post away from the sleeve, a rubber sleeve disposed on the inner side of the fixing ring, several annular arrays of air holes opened on the side of the connector near the sleeve, and air pipes symmetrically disposed on both sides of the support plate.

[0014] Furthermore, the middle section of the trachea is linearly arrayed with several branches, the ends of which are fixedly connected to corresponding sleeves.

[0015] Furthermore, a tapered hole is provided on the inner side of the rubber sleeve, and the inner wall of the tapered hole is sleeved with the connector.

[0016] Another objective of this invention is to provide a cavity vacuum testing method for a remote plasma module, the purpose of which is to perform vacuum testing on the cavity of the plasma module.

[0017] To achieve the above objectives, the present invention provides the following technical solution: a cavity vacuum testing method for a remote plasma module, comprising the following steps:

[0018] First, place the workpiece on the support plate and use the chucks to initially fix it;

[0019] Then, start the motor to drive the bidirectional lead screw to rotate, which will drive all the sliders and their docking units to move outward horizontally in sync until the connector of the docking unit is tightly abutted against the test interface of the workpiece, thus completing the automatic docking and sealing.

[0020] Continue by introducing test gas into the workpiece cavity through the air tube or by drawing a vacuum, while the pressure data inside the cavity is monitored and recorded in real time by the main body of the testing machine.

[0021] Finally, after the test is completed, the motor is started in reverse to detach the docking unit from the workpiece, the workpiece is removed, and the test data is analyzed.

[0022] Furthermore, the vacuum sealing performance is evaluated by monitoring the pressure changes in the workpiece cavity during the vacuuming or pressure holding process.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] 1. By setting up a testing mechanism, the number of workstations can be flexibly increased. Users can adjust the number of workstations according to actual needs to improve testing efficiency. The device also has the ability to adapt to cavities with different apertures and is compatible with various cavity structures. The design of the testing mechanism enables the equipment to automatically match cavities of different sizes without frequent component replacement. This adaptability expands the scope of application of the equipment, enabling it to cope with diverse testing needs. By increasing the number of workstations and adapting to different apertures, the device significantly improves its applicability, meets vacuum testing tasks in multiple scenarios, and enhances the versatility and practicality of the equipment.

[0025] 2. By setting up connection units, the linkage between different workstations can be realized. The opening and closing of the connection units can control the number of workstations used to adapt to different working conditions. Users can open or close the connection units according to the testing needs and adjust the number of workstations participating in the test. This design enables the device to cope with a variety of testing tasks, avoid resource waste, and improve operating efficiency. The connection unit has a simple and reliable structure, is easy to operate, and ensures stable linkage switching between workstations. By controlling the linkage status of workstations, the device can flexibly adapt to testing needs of different scales and complexities, enhancing the adaptability of the equipment under changing working conditions.

[0026] 3. By setting up docking units, the device can adapt to cavities with different apertures, ensuring airtightness during the testing process. The docking units can adapt to the cavity aperture without manual adjustment. This design ensures no gas leakage during the test and maintains the stability of the vacuum environment. The docking unit has a compact structure and can respond to the sealing requirements of cavities of different specifications. Through the adaptability of the docking unit, the device can be compatible with cavities of various apertures, improving the versatility of the equipment. The guarantee of airtightness makes the test results more reliable and meets the testing requirements under different application scenarios. The application of docking units enhances the adaptability of the device under changing operating conditions and improves the practicality and reliability of the equipment. Attached Figure Description

[0027] Figure 1 This is a three-dimensional structural diagram of the testing device of the present invention;

[0028] Figure 2 This is a schematic diagram of the overall structure of the detection mechanism of the testing device of the present invention;

[0029] Figure 3 This is an exploded view of the detection mechanism of the testing device of the present invention;

[0030] Figure 4 This is a schematic diagram showing the relative positions of the slide and the support plate of the testing device of the present invention;

[0031] Figure 5 This is a schematic diagram showing the connection between the lead screw and the corresponding pendulum rod of the testing device of the present invention;

[0032] Figure 6 This is a schematic diagram showing the connection between the slider and the upper connecting rod of the testing device of the present invention;

[0033] Figure 7 This is a schematic diagram showing the connection between the upper connecting rod, the lower hanging rod, and the pin of the testing device of the present invention.

[0034] Figure 8 This is a schematic diagram showing the connection between the fixing ring and the connector of the testing device of the present invention;

[0035] Figure 9 This is a schematic diagram of the internal structure of the connector of the testing device of the present invention;

[0036] Figure 10 This is a schematic diagram of the sealing ring and sleeve of the testing device of the present invention;

[0037] Figure 11 This is a schematic diagram of the connector structure of the testing device of the present invention;

[0038] Figure 12 This is a schematic diagram of the connection between the air tube and the sleeve of the testing device of the present invention.

[0039] In the picture:

[0040] 1. Testing machine body; 2. Motor; 3. Detection mechanism; 31. Support plate; 32. Workpiece; 33. Two-way lead screw; 34. Slide groove; 35. Slider; 36. Drooping rod; 37. Upper connecting rod; 38. Pin; 39. Telescopic hole; 310. Button; 311. Ejection spring; 312. Sleeve; 313. Connector; 314. Return spring; 315. Sealing ring; 316. Guide post; 317. Fixing ring; 318. Rubber sleeve; 319. Air hole; 320. Air pipe. Detailed Implementation

[0041] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0042] Example 1, referring to Figures 1-12 This invention provides a cavity vacuum testing device for a remote plasma module, comprising a testing machine body 1, a motor 2 fixedly connected to the outside of the testing machine body 1, and a detection mechanism 3 mounted on the top of the worktable of the testing machine body 1. The detection mechanism 3 includes a support plate 31 fixedly connected to the top of the worktable of the testing machine body 1, a workpiece 32 clamped to the bottom of the support plate 31, a bidirectional lead screw 33 fixedly connected to the side of the motor 2 near the support plate 31, several obliquely symmetrically formed grooves 34 on the side of the support plate 31 near the bidirectional lead screw 33, sliders 35 slidably connected inside the grooves 34, and a fixedly connected... The bottom of the slider 35 has a hanging rod 36, which is fixedly connected to the top of the slider 35 and the upper connecting rod 37. The middle part of the bidirectional lead screw 33 is threadedly connected to the two closest hanging rods 36. A connecting unit is assembled at the top of the upper connecting rod 37, and a docking unit is assembled on the side of the slider 35 away from the support plate 31. After the motor 2 starts, it drives the bidirectional lead screw 33 to rotate. After the bidirectional lead screw 33 rotates, it drives the two hanging rods 36 connected to it to move. The two hanging rods 36 can only move in the direction away from each other. The hanging rods 36 drive the slider 35 connected to them to move. The slider 35 is constrained by the corresponding slide groove 34 and can only move in the horizontal direction.

[0043] Specifically, the workpiece 32 is clamped onto the support plate 31, and the motor 2 is started to drive the bidirectional lead screw 33 to rotate. While the bidirectional lead screw 33 rotates, it drives the two pendant rods 36 connected to it to move closer to each other. The pendant rods 36 drive the slider 35 connected to them to move. During the movement of the slider 35, it will drive the upper connecting rod 37 connected to it to move together. While the slider 35 moves, it drives the corresponding docking unit to dock with the cavity of the workpiece 32 at the end, and then performs a vacuum test.

[0044] Reference Figures 2-4 The front of the support plate 31 is linearly arrayed with several sets of claws. Each set of claws consists of two obliquely symmetrical protrusions. The side of the protrusions that are close to each other engages with the workpiece 32.

[0045] Specifically, the chuck consists of two protrusions, and the workpiece 32 is fixed by inserting it into the station formed by the two protrusions.

[0046] Reference Figures 2-5 The two sliders 35 at the highest point of the support plate 31 are not provided with upper connecting rods 37, and the bottom of the two hanging rods 36 at the lowest point are provided with screw holes, which are threaded to the two-way lead screw 33.

[0047] Specifically, the two pendant rods 36 at the lowest position are connected to the double-acting screw 33 through screw holes. When the double-acting screw 33 rotates, the two pendant rods 36 move in opposite directions.

[0048] Reference Figures 1-7 The connecting unit includes a pin 38 slidably connected to the top of the upper connecting rod 37, a telescopic hole 39 opened at the bottom of the lower rod 36, a button 310 slidably connected inside the telescopic hole 39, and an ejector spring 311 fixedly connected to the side of the button 310 near the support plate 31. The two ends of the ejector spring 311 are fixedly connected to the button 310 and the lower rod 36 respectively.

[0049] Specifically, pressing button 310 causes the ejector spring 311 to retract. After being pressed, button 310 enters the interior of the corresponding drooping rod 36, thereby releasing the constraint on pin 38. At this time, pin 38 moves downward, releasing the constraint of pin 38 on the corresponding drooping rod 36 and upper connecting rod 37, allowing upper connecting rod 37 and drooping rod 36 to move independently. By aligning upper connecting rod 37 with drooping rod 36, pin 38 is then pushed upward to its maximum stroke. At this time, the slot of pin 38 engages with the locking block of button 310, fixing pin 38 so that it cannot move up or down. When upper connecting rod 37 moves, it transmits force through pin 38 to drooping rod 36, and drooping rod 36 drives another slider 35 to move.

[0050] Reference Figure 7The top of the pin 38 near the support plate 31 has a slot, and the bottom of the button 310 has a block. The slot engages with the bottom of the block.

[0051] Specifically, the pin 38 is connected to the corresponding card block through the card slot. When the card block and the card slot are in a mutually cooperating state, the pin 38 loses the freedom to move up and down.

[0052] Example 2, refer to Figures 1-12 This is the second embodiment of the present invention. This embodiment differs from the first embodiment in that: the docking unit includes a sleeve 312 fixedly connected to the side of the slider 35 away from the support plate 31, a connector 313 slidably connected to the inner side of the sleeve 312, a return spring 314 sleeved on the outer side of the connector 313, a sealing ring 315 fixedly connected to the inner wall of the sleeve 312 near the return spring 314, the two ends of the return spring 314 being fixedly connected to the connector 313 and the sleeve 312 respectively, guide posts 316 symmetrically fixedly connected to the top and bottom of the connector 313, a fixing ring 317 jointly fixedly connected to the end of the guide post 316 away from the sleeve 312, a rubber sleeve 318 fixedly connected to the inner side of the fixing ring 317, several annular arrays of air holes 319 opened on the side of the connector 313 near the sleeve 312, and air pipes 320 symmetrically fixedly connected to both sides of the support plate 31.

[0053] Specifically, during the test, the control rod 36 moves towards the workpiece 32. As the slider 35 moves with the rod 36, it drives the sleeve 312 connected to it to move synchronously. The sleeve 312 drives the connector 313 and the rubber sleeve 318 to move together. As the movement continues, the rubber sleeve 318 contacts the end of the cavity of the workpiece 32 and stops moving. At this time, the fixing ring 317 and the guide post 316 also stop moving. Meanwhile, the connector 313 continues to move closer to the workpiece 32, squeezing the rubber sleeve 318 as it moves, causing the rubber sleeve 318 to undergo elastic deformation. The expansion continues until the resistance encountered by the connector 313 causes the return spring 314 to contract and stop moving. At this time, the rubber sleeve 318 uses its own elasticity to seal the gap between the connector 313 and the cavity, ensuring airtightness during the test. While the connector 313 stops moving, the sleeve 312 continues to move towards the workpiece 32. After the sleeve 312 moves a certain distance, the seal on the air hole 319 is released, allowing the space inside the connector 313 and the sleeve 312 to communicate. At this time, the air in the cavity of the workpiece 32 is extracted through the air pipe 320, or gas is injected into the cavity to conduct a sealing test.

[0054] Reference Figure 12 The trachea 320 has several branch tubes arranged in a linear array in the middle, and the ends of the branch tubes are fixedly connected to the corresponding sleeves 312.

[0055] Specifically, the equipment controls the pressure inside the workpiece 32 through the air pipe 320. When there is no relative movement between the connector 313 and the sleeve 312, the connector 313 maintains a tendency to move away from the sleeve 312 under the action of the return spring 314. At this time, the sleeve 312 blocks the air hole 319, so that the internal space of the sleeve 312 and the connector 313 are not connected.

[0056] Reference Figures 8-11 The inner side of the rubber sleeve 318 is provided with a tapered hole, and the inner wall of the tapered hole is sleeved with the connector 313.

[0057] Specifically, the rubber sleeve 318 adapts to the shape of the connector 313 through the tapered hole and can fit cavities of different diameters through its own deformation. The rest of the structure is the same as that of Embodiment 1.

[0058] Based on embodiments 1-2, the working principle of this invention is as follows: When testing one workpiece 32 at a time, the workpiece 32 is clamped at the lowest claw of the support plate 31. Then, the motor 2 and the bidirectional lead screw 33 drive the corresponding pendant rods 36 to move closer to each other. The pendant rods 36 drive the top slider 35 to move simultaneously. The slider 35 drives the sleeve 312 to move. The sleeve 312 drives the rubber sleeve 318 and the connector 313 to move simultaneously. When the rubber sleeve 318 and the connector 313 have both moved to their maximum stroke to mate with the cavity, and the sleeve 312 has released its obstruction of the air hole 319, air is drawn through the air pipe 320 or air is injected into the cavity for testing. For cavities of different diameters, the operation is carried out in the same manner as described above. The end of the rubber sleeve 318 near the workpiece 32 is tapered, so it can adapt to different hole diameters through its gradual contour and elastic deformation characteristics. When multiple workpieces 32 need to be tested, all the upper connecting rods 37 and the lower hanging rods 36 are aligned, and all the pins 38 are moved upward to their limit positions so that the pins 38 are fixed by the locking blocks. At this time, the upper connecting rods 37, the lower hanging rods 36 and the sliders 35 on the same side become a whole that can transmit force and move synchronously. At this time, the lead screw 33 can drive all the sliders 35 to move, so that all the claws on the support plate 31 can be inserted into the workpieces 32 for testing. By controlling the cooperation of different pins 38 with the locking blocks from bottom to top, different workstations can be put into use.

[0059] Example 3, referring to Figures 1-12 The third embodiment of the present invention provides a cavity vacuum testing method for a remote plasma module, comprising the following steps:

[0060] S1. First, place the workpiece 32 on the support plate 31 and use the chucks to initially fix it, so as to facilitate the next step of the operation.

[0061] S2, then, start motor 2, drive bidirectional lead screw 33 to rotate, drive all sliders 35 and their docking units to move outward horizontally in sync until the connector 313 of the docking unit abuts against the test interface of workpiece 32, complete automatic docking and sealing, and ensure that the interior of the cavity is isolated from the outside through docking.

[0062] S3, continue, introduce test gas into the cavity of workpiece 32 through air tube 320 or perform vacuuming, while the pressure data in the cavity is monitored and recorded in real time by the main body of the testing machine 1, and the sealing test is performed by reducing or increasing the pressure in the cavity.

[0063] S4. Finally, after the test is completed, reverse the motor 2 to detach the docking unit from the workpiece 32, remove the workpiece 32 and analyze the test data. After the test is completed, reset each component to facilitate the test of the next workpiece 32.

[0064] S5 assesses the vacuum sealing performance of the workpiece 32 cavity by monitoring the pressure change during the vacuuming or pressure holding process, and determines whether the cavity leaks by comparing the pressure change in the cavity during the test.

[0065] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A cavity vacuum testing device for a remote plasma module, comprising a testing machine body (1) and a motor (2) disposed outside the testing machine body (1), characterized in that, It also includes a testing mechanism (3) located on the top of the workbench of the main body (1) of the testing machine; The testing mechanism (3) includes a support plate (31) set on the top of the worktable of the main body (1) of the testing machine, a workpiece (32) set at the bottom of the support plate (31), a double-acting screw (33) set on the side of the motor (2) near the support plate (31), several obliquely symmetrically opened grooves (34) on the side of the support plate (31) near the double-acting screw (33), a slider (35) set inside the groove (34), a pendant rod (36) set at the bottom of the slider (35), an upper connecting rod (37) set at the top of the slider (35), the middle part of the double-acting screw (33) is threadedly connected to the two closest pendant rods (36), a connecting unit set at the top of the upper connecting rod (37), and a docking unit set on the side of the slider (35) away from the support plate (31). After the motor (2) starts, it drives the bidirectional lead screw (33) to rotate. After the bidirectional lead screw (33) rotates, it drives the two pendant rods (36) connected to it to move. The two pendant rods (36) can only move in the direction away from each other. The pendant rods (36) drive the slider (35) connected to them to move. The slider (35) is constrained by the corresponding groove (34) and can only move in the horizontal direction. The connecting unit includes a pin (38) set at the top of the upper connecting rod (37), a telescopic hole (39) opened at the bottom of the lower rod (36), a button (310) set inside the telescopic hole (39), and a push-out spring (311) set on the side of the button (310) near the support plate (31). The two ends of the push-out spring (311) are fixedly connected to the button (310) and the lower rod (36) respectively. The docking unit includes a sleeve (312) disposed on the side of the slider (35) away from the support plate (31), a connector (313) disposed on the inner side of the sleeve (312), a return spring (314) sleeved on the outer side of the connector (313), a sealing ring (315) disposed on the inner wall of the sleeve (312) near the return spring (314), the two ends of the return spring (314) being fixedly connected to the connector (313) and the sleeve (312) respectively, guide posts (316) symmetrically disposed on the top and bottom of the connector (313), a fixing ring (317) disposed on the end of the guide post (316) away from the sleeve (312), a rubber sleeve (318) disposed on the inner side of the fixing ring (317), several annular arrays of air holes (319) opened on the side of the connector (313) near the sleeve (312), and air pipes (320) symmetrically disposed on both sides of the support plate (31).

2. The cavity vacuum testing device for a remote plasma module according to claim 1, characterized in that, The front of the support plate (31) is linearly arrayed with several sets of claws. Each set of claws consists of two obliquely symmetrical protrusions. The side of the protrusions that are close to each other engages with the workpiece (32).

3. The cavity vacuum testing device for a remote plasma module according to claim 1, characterized in that, The two sliders (35) at the highest point of the support plate (31) are not provided with upper connecting rods (37) at the top, and the bottom of the two lowering rods (36) at the lowest point are provided with screw holes, which are threaded to the two-way lead screw (33).

4. The cavity vacuum testing device for a remote plasma module according to claim 1, characterized in that, The top of the pin (38) near the support plate (31) has a slot, and the bottom of the button (310) has a block, with the slot engaging with the bottom of the block.

5. The cavity vacuum testing device for a remote plasma module according to claim 1, characterized in that, The trachea (320) has a number of branch tubes arranged in a linear array in the middle, and the ends of the branch tubes are fixedly connected to the corresponding sleeves (312).

6. The cavity vacuum testing device for a remote plasma module according to claim 1, characterized in that, The inner side of the rubber sleeve (318) is provided with a tapered hole, and the inner wall of the tapered hole is sleeved with the connector (313).

7. A cavity vacuum testing method for a remote plasma module, applied to the cavity vacuum testing device for a remote plasma module as described in claim 1, characterized in that, Includes the following steps: First, place the workpiece (32) on the support plate (31) and fix it in place using the chucks; Then, start the motor (2) to drive the bidirectional lead screw (33) to rotate, which will drive all the sliders (35) and their docking units to move outward horizontally in sync until the connector (313) of the docking unit is tightly abutted against the test interface of the workpiece (32) to complete the automatic docking and sealing. Continue, test gas is introduced into the cavity of workpiece (32) through the air tube (320) or a vacuum is drawn, while the pressure data in the cavity is monitored and recorded in real time by the main body of the test machine (1); Finally, after the test is completed, the motor (2) is started in reverse to make the docking unit detach from the workpiece (32), the workpiece (32) is removed and the test data is analyzed.

8. The cavity vacuum testing method for a remote plasma module according to claim 7, characterized in that, The vacuum sealing performance of the workpiece (32) cavity is evaluated by monitoring the pressure change during the vacuuming or pressure holding process.

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