High-stability laser beam pupil optical axis measuring device and adjustment method thereof

Abstract

The invention relates to a laser beam pupil optical axis measuring device and an adjusting method thereof, in particular to a high-stability laser beam pupil optical axis measuring device and an adjusting method thereof, and aims to solve the problems that a traditional laser beam pupil optical axis measuring device is low in measuring precision and unstable in measuring data, and high-precision capturing of a pupil optical axis cannot be achieved. The high-stability laser beam pupil optical axis measuring device comprises a box body, a beam shrinking system, a pupil measuring system and an optical axis measuring system, is used for carrying out optical axis monitoring and pupil parameter measurement on a laser beam, and can display the position and change of the pupil optical axis in real time by combining with corresponding software. Therefore, the optical axis position, pupil size and uniformity of the tested system are monitored, a user can conveniently adjust the optical system in time, and the system performance is ensured.

Description

Technical Field

[0001] This invention relates to a laser beam pupil optical axis measuring device and its assembly and adjustment method, specifically to a high-stability laser beam pupil optical axis measuring device and its assembly and adjustment method. Background Technology

[0002] The measurement and control of laser beam quality is crucial for the efficient operation of laser systems. Laser beam quality directly determines the system's focusing capability, transmission efficiency, and power density distribution; these parameters affect energy utilization and overall performance. However, traditional laser beam pupil and optical axis measurement devices are often only suitable for static environments and cannot meet the precise measurement needs in complex dynamic environments, exhibiting limitations such as low measurement accuracy, poor stability, and low integration.

[0003] Laser beam pupil axis measuring devices measure parameters such as the size and uniformity of the laser beam's pupil, providing a basis for monitoring the laser beam's transmission status and dynamically adjusting system parameters. However, in complex environments such as temperature and humidity variations and vibrations, these devices are susceptible to external factors. For example, temperature fluctuations may cause thermal expansion or contraction of optical components, leading to laser beam deflection or focus drift, while humidity changes may cause condensation on optical surfaces, reducing the system's measurement accuracy and transmission efficiency.

[0004] Furthermore, traditional laser beam pupil optical axis measurement devices lack real-time monitoring and feedback capabilities in high and low temperature environments, making it difficult to adjust in a timely manner during system operation to avoid focus shift and reduced transmission efficiency. Therefore, developing a high-precision laser beam pupil measurement device capable of stable operation in complex environments is crucial for solving these problems and improving laser system performance. Summary of the Invention

[0005] The purpose of this invention is to solve the problems of low measurement accuracy, unstable measurement data, and inability to achieve high-precision capture of the optical axis of the pupil in traditional laser beam optical beam measuring devices, and to provide a highly stable laser beam optical beam optical axis measuring device and its assembly and adjustment method.

[0006] To address the shortcomings of the existing technology, the present invention provides the following technical solution: A high-stability laser beam pupil optical axis measuring device is characterized by comprising a housing, a beam-shrinking system disposed on and inside the housing, and an attenuation mirror group, a beam splitter group, a reflector group, a pupil measuring mirror group, a pupil detector, an optical axis measuring mirror group, and an optical axis detector disposed inside the housing. The enclosure adopts an integrated frame structure; The beam-shrinking system is used to receive the incident laser beam, and adjust the laser beam through transmission, reflection and focusing before outputting it to the attenuation lens group; the attenuation lens group is used to attenuate the laser beam output from the beam-shrinking eyepiece group of the beam-shrinking system; the beam splitter group is set in the output optical path of the attenuation lens group and is used to transmit and reflect the laser beam output from the attenuation lens group respectively. The beam-shrinking system, the attenuating mirror group, the beam-splitter group, and the reflecting mirror group, the pupil measuring mirror group, and the pupil detector located sequentially on the reflected light path of the beam-splitter group constitute the pupil measuring system; the beam-shrinking system, the attenuating mirror group, the beam-splitter group, and the optical axis measuring mirror group and the optical axis detector located sequentially on the transmitted light path of the beam-splitter group constitute the optical axis measuring system. The reflector group is used to reflect the laser beam reflected by the beam splitter group to the pupil measuring mirror group; the pupil measuring mirror group is used to further compress the laser beam; the pupil detector is used to receive the laser beam emitted from the pupil measuring mirror group and to collect the pupil data of the system under test in real time. The optical axis measuring mirror assembly is used to output the laser beam transmitted by the beam splitter assembly to the optical axis detector; the optical axis detector is used to acquire the diffuse spot image of the focused laser beam output by the optical axis measuring mirror assembly in real time.

[0007] Furthermore, the beam-contraction system includes a window lens group, a parabolic lens group, and a folding-axis lens group disposed on the housing, as well as a beam-contraction eyepiece group disposed inside the housing; The window mirror group is used to receive the incident laser beam and transmit it to the parabolic mirror group, and to reflect the laser beam emitted from the parabolic mirror group to the folding mirror group. The parabolic mirror assembly is used to reflect and focus the laser beam onto the window mirror assembly; The folding-axis lens group is used to reflect and focus the laser beam onto the beam-contracting eyepiece group; The beam-shrinking eyepiece group is used to compress the laser beam to the required aperture range and then output it to the attenuation eyepiece group.

[0008] Furthermore, the attenuation mirror assembly includes a first attenuator, a second attenuator, and a third attenuator arranged sequentially along the optical path. The angle between the central axis of the first attenuator, the second attenuator, and the third attenuator and the optical axis is 3° to 5°. The overall structure of the first attenuator, the second attenuator, and the third attenuator is Z-shaped.

[0009] Furthermore, the top of the enclosure is equipped with a hoisting device, and the bottom is equipped with multiple adjustable feet; Each of the adjustable feet includes a foot base and a first screw, a second screw, and a third screw sequentially fitted from the inside out; The base is connected to the lower end of the first screw, and the inner and outer walls of the second screw are threaded to the outer wall of the first screw and the inner wall of the third screw, respectively, with the thread directions being opposite. A limit block is provided at the top of the third screw to limit the tops of the first screw and the second screw from extending out of the third screw; The adjustable feet are made of at least one of steel and copper.

[0010] Furthermore, a test port is provided on the side wall of the housing, directly opposite the pupil exit position of the pupil measurement lens group, for use in conjunction with an external interferometer to measure the wavefront aberration of the system formed by the optical components on and inside the housing.

[0011] Furthermore, an aviation insertion plate is provided on the side wall of the box; The aviation insert board is equipped with a pupil detector network port, a first optical axis detector network port, and a second optical axis detector network port; The pupil detector is connected to the pupil detector network port and is used to upload the pupil data of the system under test to the host computer for analysis. The optical axis detector is connected to the first network port and the second network port of the optical axis detector, respectively, and is used to upload the diffuse spot image to the host computer for analysis.

[0012] Furthermore, a power module is installed inside the enclosure; The aviation plug board is also equipped with a main power switch, a pupil detector power switch, and an optical axis detector power switch. The input terminal of the power module is connected to the main power switch, which is used to connect to an external power supply system. The output terminal of the power module is connected to the power supply port of the pupil detector and the power supply port of the optical axis detector through the power switch of the pupil detector and the power switch of the optical axis detector, respectively.

[0013] A method for assembling and adjusting the aforementioned high-stability laser beam pupil optical axis measuring device is characterized by comprising the following steps: Step 1: Place an interferometer outside the box, directly opposite the pupil exit of the pupil measurement lens group. Using the formula F-number = focal length / effective aperture of the system, select a suitable interferometer lens, align and adjust the interferometer to ensure that the laser beam correctly illuminates the pupil exit of the pupil measurement lens group and maintains a suitable angle. Step 2: Place a plane mirror at the corresponding position of the incident end of the beam-shrinking system outside the box. The plane mirror is perpendicular to the light path, so that the reflected light from the plane mirror enters the interferometer to form interference fringes, thus obtaining the system wavefront aberration. Then, based on the system wavefront aberration, adjust the position of the beam-shrinking system and fix the structure of the beam-shrinking system at the optimal position of the system wavefront aberration. The system wavefront aberration refers to the wavefront aberration of the system composed of optical components on and inside the box. Step 3: Install the attenuation mirror group, beam splitter group, reflecting mirror group, and pupil measuring mirror group on the output optical path of the beam-shrinking system, and install the optical axis measuring mirror group on the transmission optical path of the beam splitter group. Make the reflected light from the plane reflecting mirror enter the interferometer to form interference fringes and obtain the system wavefront aberration. Then, according to the system wavefront aberration, adjust the attenuation mirror group, beam splitter group, reflecting mirror group, pupil measuring mirror group, and optical axis measuring mirror group to fix each optical component at the optimal position of the system wavefront aberration. Step 4: Remove the interferometer and plane mirror, then install a pupil detector at the optical path exit of the pupil measurement mirror group and an optical axis detector at the optical path exit of the optical axis measurement mirror group to complete the assembly and adjustment of the high-stability laser beam pupil optical axis measurement device.

[0014] Compared with the prior art, the beneficial effects of the present invention are: (1) The present invention provides a high-stability laser beam pupil optical axis measuring device, including a housing, a beam contraction system, a pupil measuring system and an optical axis measuring system, which is used to monitor the optical axis of the laser beam and measure the pupil parameters. Combined with the corresponding software, the position and change of the pupil optical axis can be displayed in real time, thereby monitoring the optical axis position, pupil size and uniformity of the system under test, so as to facilitate the user to adjust the optical system in time and ensure the system performance.

[0015] (2) The present invention adopts an integrated frame structure, which ensures the overall stability and durability, effectively reduces the impact of environmental factors on the monitoring results, and guarantees the stability of the monitoring results; the present invention has the characteristics of compact structure, small size and light weight, and is easy to integrate into various optical systems to meet the needs of different scenarios.

[0016] (3) The housing of the present invention adopts a three-point support design, combined with the high-precision adjustable function of the adjustable feet, to ensure the stability of the housing and facilitate users to adjust the center height of the light spot to meet the needs of various optical systems; in addition, the material selection fully considers the vibration adaptability requirements, effectively reducing the impact of external vibration on the monitoring data and improving the accuracy of the data.

[0017] (4) The present invention provides a method for assembling and adjusting a high-stability laser beam pupil optical axis measuring device. The method adopts a phased assembly and adjustment method, which divides the debugging process of the device into multiple steps: first, adjust the beam shrinking system, then adjust the pupil measuring system and the optical axis measuring system, and finally install the detector. In each stage, the optical components are adjusted according to the wavefront aberration data of the system, and the structure is fixed in the optimal aberration state to avoid errors introduced by subsequent adjustments and ensure the overall debugging accuracy.

[0018] (5) The present invention uses an interferometer and a plane mirror at the test port and the window mirror group respectively. By forming interference fringes, the wavefront aberration of the system is obtained. The interferometer can provide real-time feedback on the changes in the wavefront aberration of the system, guide the adjustment of each optical component, and make the debugging process efficient and accurate.

[0019] (6) The present invention installs the pupil detector and the optical axis detector in the last step, avoiding damage to the detector when adjusting the optical components or using a strong laser beam. Furthermore, before the detector is installed, the adjustment of the interferometer and optical components is not limited by the position of the detector, making the debugging more flexible. Attached Figure Description

[0020] Figure 1 This is an isometric schematic diagram of an embodiment of a high-stability laser beam pupil optical axis measuring device of the present invention; Figure 2 This is a cross-sectional schematic diagram of an embodiment of the present invention; Figure 3 This is a schematic diagram of the adjustable feet structure in an embodiment of the present invention; Figure 4 This is a schematic diagram illustrating the principle of step 3 in an embodiment of the assembly and adjustment method of a high-stability laser beam pupil optical axis measuring device of the present invention.

[0021] Figure 5 This is a schematic diagram of the attenuation lens assembly in an embodiment of the present invention. Figure 1 ; Figure 6 This is a schematic diagram of the attenuation lens assembly in an embodiment of the present invention. Figure 2 .

[0022] The annotations in the attached figures are explained as follows: 1-Box body; 2-Aircraft insert plate; 3-Test port; 4-Adjustable feet; 401-Foot base; 402-First screw; 403-Second screw; 404-Third screw; 405-Limit block; 5-Lifting device; 7-Window mirror group; 8-Parabolic mirror group; 9-Folded axis mirror group; 10-Band-constriction eyepiece group; 11-Attenuation mirror group; 111-First attenuator; 112-Second attenuator; 113-Third attenuator; 12-Beam splitter group; 13-Reflecting mirror group; 14-Pupil measuring mirror group; 15-Optical axis measuring mirror group; 16-Power module; 17-Pupil detector; 18-Optical axis detector; 19-Plane reflecting mirror; 20-Interferometer. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings and exemplary embodiments.

[0024] Reference Figures 1-4 A high-stability laser beam pupil optical axis measuring device includes a housing 1, a beam-shrinking system disposed on and inside the housing 1, and an attenuation mirror group 11, a beam splitter group 12, a reflector group 13, a pupil measuring mirror group 14, a pupil detector 17, an optical axis measuring mirror group 15, an optical axis detector 18, and a power supply module 16 disposed inside the housing 1.

[0025] See Figure 2 The beam-shrinking system is used to receive the incident laser beam and adjust the laser beam through transmission, reflection and focusing before it is emitted to the attenuation lens group 11, which includes a window lens group 7, a parabolic lens group 8, a folding-axis lens group 9 set on the housing 1, and a beam-shrinking eyepiece group 10 set inside the housing 1.

[0026] The window lens group 7 is used to receive the incident laser beam and transmit it to the parabolic lens group 8, and to reflect the laser beam emitted from the parabolic lens group 8 to the folding-axis lens group 9; the parabolic lens group 8 is used to reflect and focus the laser beam to the window lens group 7; the folding-axis lens group 9 is used to reflect and focus the laser beam to the beam-contracting eyepiece group 10; the beam-contracting eyepiece group 10 is used to compress the laser beam to the required aperture range and emit it to the attenuating lens group 11.

[0027] The beam-shrinking system, attenuating mirror group 11, beam splitter group 12, reflecting mirror group 13, pupil measuring mirror group 14, and pupil detector 17 are arranged sequentially along the optical path to form a pupil measuring system; the beam-shrinking system, attenuating mirror group 11, beam splitter group 12, optical axis measuring mirror group 15, and optical axis detector 18 are arranged sequentially along the optical path to form an optical axis measuring system.

[0028] Reference Figure 5 , Figure 6 The attenuation lens group 11 is used to attenuate the laser beam emitted from the beam-shrinking eyepiece group 10 of the beam-shrinking system. It includes a first attenuator 111, a second attenuator 112, and a third attenuator 113 arranged sequentially along the optical path. The angles between the first attenuator 111, the second attenuator 112, and the third attenuator 113 and the optical axis are all 3° to 5°, and in this embodiment, it is 3°. The overall structure of the first attenuator 111, the second attenuator 112, and the third attenuator 113 is Z-shaped to reduce stray light in the system.

[0029] The beam splitter group 12 is used to reflect the laser beam emitted from the attenuation mirror group 11 to the reflecting mirror group 13 and transmit it to the optical axis measuring mirror group 15.

[0030] The reflector group 13 is used to reflect the laser beam reflected by the beam splitter group 12 to the pupil measuring mirror group 14; the pupil measuring mirror group 14 is used to further compress the laser beam; and the pupil detector 17 is used to receive the laser beam emitted from the pupil measuring mirror group 14 and collect the pupil data of the system under test in real time.

[0031] The optical axis measuring mirror group 15 is used to output the laser beam transmitted by the beam splitter group 12 to the optical axis detector 18; the optical axis detector 18 is used to acquire the diffuse spot image of the laser beam output from the optical axis measuring mirror group 15 after focusing in real time.

[0032] See Figure 1The housing 1 adopts an integrated frame structure, with a hoisting device 5 (four lifting rings) on the top, three adjustable feet 4 on the bottom, and a flight insertion plate 2 and a test port 3 on the side wall.

[0033] See Figure 3 Each adjustable foot 4 includes a foot base 401 and a first screw 402, a second screw 403, and a third screw 404, which are sequentially sleeved from the inside out. The foot base 401 is connected to the lower end of the first screw 402. The inner and outer walls of the second screw 403 are threadedly connected to the outer wall of the first screw 402 and the inner wall of the third screw 404, respectively, with opposite thread directions. When the second screw 403 is rotated, the first screw 402 and the third screw 404 move closer or further apart simultaneously, allowing for rapid adjustment of the center height of the housing 1. A limit block 405 is provided at the top of the third screw 404 to prevent the tops of the first screw 402 and the second screw 403 from protruding from the third screw 404. The adjustable foot 4 is made of at least one of steel and copper, which can withstand weight and reduce vibration, ensuring the accuracy of monitoring data. In this embodiment, the adjustable foot 4 supports a height adjustment range of not less than ±40mm.

[0034] The aviation plug board 2 is equipped with a power switch for the pupil detector, a power switch for the optical axis detector, a network port for the pupil detector, a first network port for the optical axis detector, a second network port for the optical axis detector, and a main power switch.

[0035] The pupil detector 17 is connected to the first network port of the pupil detector. It is used to upload the pupil data of the system under test to the host computer through the first network port of the pupil detector. By analyzing the pupil data of the system under test through software, parameters such as the pupil size and uniformity of the laser beam can be obtained, and the beam cross-section position of the laser beam at a certain location can be determined.

[0036] The optical axis detector 18 is connected to the first network port and the second network port of the optical axis detector respectively, and is used to upload the diffuse spot image to the host computer. Through software analysis, it is found that since the diffuse spot image after the laser beam is focused has a large resolution, both network ports need to be transmitted simultaneously to achieve full frame rate.

[0037] A test port 3 is provided on the side wall of the housing 1, directly opposite the pupil measurement mirror group 14, for use in conjunction with the external interferometer 20 to measure the wavefront aberration of the system composed of optical components on and inside the housing 1.

[0038] The input terminal of power module 16 is connected to the main power switch, which is used to connect to an external power supply system. The output terminal of power module 16 is connected to the power supply port of pupil detector 17 and the power supply port of optical axis detector 18 through the power switch of pupil detector and the power switch of optical axis detector, respectively. The power switch of pupil detector and the power switch of optical axis detector are used to control whether to supply power to the power supply port of pupil detector 17 and the power supply port of optical axis detector 18, thereby controlling the opening and closing of pupil detector 17 and optical axis detector 18.

[0039] Reference Figure 4 The assembly and adjustment method of the above-mentioned high-stability laser beam pupil measurement device includes the following steps: Step 1: Place the interferometer 20 outside the housing 1, directly opposite the pupil exit position of the pupil measuring mirror group 14. Using the formula F number = focal length / effective aperture of the system, select a suitable interferometer lens, align and adjust the interferometer 20 to ensure that the laser beam correctly illuminates the pupil exit position of the pupil measuring mirror group 14 and maintains a suitable angle. Step 2: Place a plane mirror 19 at the corresponding position of the window mirror group 7 outside the housing 1. The plane mirror 19 is perpendicular to the light path, so that the reflected light from the plane mirror 19 enters the interferometer 20 to form interference fringes, thus obtaining the system wavefront aberration. Then, based on the system wavefront aberration, adjust the positions of the window mirror group 7, the parabolic mirror group 8, the folding-axis mirror group 9, and the beam-constricting eyepiece group 10 to fix the structure of the beam-constricting system at the optimal position of the system wavefront aberration. The system wavefront aberration is the system wavefront aberration formed by the optical components on and inside the housing 1. Step 3: Install the attenuation mirror group 11, beam splitter group 12, reflector group 13, and pupil measuring mirror group 14 on the optical path of the beam-shrinking system, and install the optical axis measuring mirror group 15 on the transmission optical path of the beam splitter group 12, so that the reflected light from the plane reflector 19 enters the interferometer 20 to form interference fringes, and obtain the system wavefront aberration; then, according to the system wavefront aberration, adjust the attenuation mirror group 11, beam splitter group 12, reflector group 13, pupil measuring mirror group 14, and optical axis measuring mirror group 15, and fix each optical component at the optimal position of the system wavefront aberration; Step 4: Remove the interferometer 20 and the plane mirror 19, then install the pupil detector 17 at the optical path exit of the pupil measuring mirror group 14, and install the optical axis detector 18 at the optical path exit of the optical axis measuring mirror group 15 to complete the assembly and adjustment of the high-stability laser beam pupil optical axis measuring device.

[0040] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit them. For those skilled in the art, modifications can be made to the specific technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. However, these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions protected by the present invention.

Claims

1. A high-stability laser beam pupil optical axis measuring device, characterized in that: Includes a housing (1), a beam-shrinking system installed on and inside the housing (1), and an attenuation mirror group (11), a beam splitter group (12), a reflector group (13), a pupil measuring mirror group (14), a pupil detector (17), an optical axis measuring mirror group (15), and an optical axis detector (18) installed inside the housing (1). The box (1) adopts an integrated frame structure; The beam-shrinking system is used to receive the incident laser beam and adjust the laser beam through transmission, reflection and focusing before it is emitted to the attenuation lens group (11); the attenuation lens group (11) is used to attenuate the laser beam emitted from the beam-shrinking eyepiece group (10) of the beam-shrinking system; the beam splitter group (12) is set in the output optical path of the attenuation lens group (11) and is used to transmit and reflect the laser beam emitted from the attenuation lens group (11) respectively. The beam-shrinking system, the attenuating mirror group (11), the beam-splitter group (12), and the reflecting mirror group (13), the pupil measuring mirror group (14), and the pupil detector (17) located sequentially on the reflected light path of the beam-splitter group (12) constitute the pupil measuring system; the beam-shrinking system, the attenuating mirror group (11), the beam-splitter group (12), and the optical axis measuring mirror group (15) and the optical axis detector (18) located sequentially on the transmitted light path of the beam-splitter group (12) constitute the optical axis measuring system; The reflector group (13) is used to reflect the laser beam reflected by the beam splitter group (12) to the pupil measuring mirror group (14); the pupil measuring mirror group (14) is used to further compress the laser beam; the pupil detector (17) is used to receive the laser beam emitted from the pupil measuring mirror group (14) and collect the pupil data of the system under test in real time. The optical axis measuring mirror group (15) is used to output the laser beam transmitted by the beam splitter group (12) to the optical axis detector (18); the optical axis detector (18) is used to acquire the diffuse spot image of the laser beam output by the optical axis measuring mirror group (15) after focusing in real time.

2. The high-stability laser beam pupil optical axis measuring device according to claim 1, characterized in that: The beam-contraction system includes a window lens group (7), a parabolic lens group (8), and a folding-axis lens group (9) disposed on the housing (1), and a beam-contraction eyepiece group (10) disposed inside the housing (1); The window mirror group (7) is used to receive the incident laser beam and transmit it to the parabolic mirror group (8), and to reflect the laser beam emitted from the parabolic mirror group (8) to the folding mirror group (9). The parabolic mirror assembly (8) is used to reflect and focus the laser beam onto the window mirror assembly (7); The folding lens group (9) is used to reflect and focus the laser beam onto the beam-contracting eyepiece group (10); The beam-reducing eyepiece group (10) is used to compress the laser beam to the required aperture range and exit to the attenuation lens group (11).

3. The high-stability laser beam pupil optical axis measuring device according to claim 2, characterized in that: The attenuation mirror group (11) includes a first attenuator (111), a second attenuator (112), and a third attenuator (113) arranged sequentially along the optical path. The central axis of the first attenuator (111), the second attenuator (112), and the third attenuator (113) all form an angle of 3° to 5° with the optical axis. The overall structure of the first attenuator (111), the second attenuator (112), and the third attenuator (113) is Z-shaped.

4. A high-stability laser beam pupil optical axis measuring device according to any one of claims 1 to 3, characterized in that: The top of the box (1) is equipped with a hoisting device (5), and the bottom is equipped with multiple adjustable feet (4); Each of the aforementioned adjustable feet (4) includes a foot base (401) and a first screw (402), a second screw (403), and a third screw (404) sequentially arranged from the inside to the outside; The base (401) is connected to the lower end of the first screw (402), and the inner and outer walls of the second screw (403) are threadedly connected to the outer wall of the first screw (402) and the inner wall of the third screw (404) respectively, with the thread directions being opposite. The third screw (404) is provided with a limit block (405) at its top end to limit the top ends of the first screw (402) and the second screw (403) from extending out of the third screw (404); The adjustable foot (4) is made of at least one of steel and copper.

5. The high-stability laser beam pupil optical axis measuring device according to claim 4, characterized in that: A test port (3) is provided on the side wall of the housing (1) at the pupil exit position opposite to the pupil measurement lens group (14), which is used to cooperate with the external interferometer (20) to measure the wavefront aberration of the system formed by the optical components on the housing (1) and inside the housing (1).

6. The high-stability laser beam pupil optical axis measuring device according to claim 5, characterized in that: The side wall of the box (1) is provided with a flight insertion plate (2); The flight board (2) is equipped with a pupil detector network port, a first optical axis detector network port, and a second optical axis detector network port; The pupil detector (17) is connected to the pupil detector network port and is used to upload the pupil data of the system under test to the host computer for analysis. The optical axis detector (18) is connected to the first network port and the second network port of the optical axis detector, respectively, and is used to upload the diffuse spot image to the host computer for analysis.

7. The high-stability laser beam pupil optical axis measuring device according to claim 6, characterized in that: A power module (16) is installed inside the housing (1); The flight board (2) is also equipped with a main power switch, a pupil detector power switch, and an optical axis detector power switch; The input terminal of the power module (16) is connected to the main power switch, which is used to connect to the external power supply system. The output terminal of the power module (16) is connected to the power supply port of the pupil detector (17) and the power supply port of the optical axis detector (18) through the pupil detector power switch and the optical axis detector power switch, respectively.

8. A method for assembling and adjusting the high-stability laser beam pupil optical axis measuring device as described in claim 1, characterized in that, Includes the following steps: Step 1: Place the interferometer (20) outside the box (1) directly opposite the pupil exit position of the pupil measuring mirror group (14). Using the F number = focal length / effective aperture of the system, select a suitable interferometer lens, align and adjust the interferometer (20) to ensure that the laser beam correctly illuminates the pupil exit of the pupil measuring mirror group (14) and maintains a suitable angle. Step 2: Place a plane mirror (19) at the corresponding position of the incident end of the beam-shrinking system outside the box (1). The plane mirror (19) is perpendicular to the light path, so that the reflected light from the plane mirror (19) enters the interferometer (20) to form interference fringes and obtain the system wavefront aberration. Then, according to the system wavefront aberration, adjust the position of the beam-shrinking system and fix the structure of the beam-shrinking system at the optimal position of the system wavefront aberration. The system wavefront aberration is the wavefront aberration of the system composed of optical components on the box (1) and inside the box (1). Step 3: Install the attenuation mirror group (11), beam splitter group (12), reflector group (13), and pupil measuring mirror group (14) on the outgoing light path of the beam-shrinking system, and install the optical axis measuring mirror group (15) on the transmission light path of the beam splitter group (12) so that the reflected light from the plane reflector (19) enters the interferometer (20) to form interference fringes and obtain the system wavefront aberration; then, according to the system wavefront aberration, adjust the attenuation mirror group (11), beam splitter group (12), reflector group (13), pupil measuring mirror group (14), and optical axis measuring mirror group (15) to fix each optical component at the optimal position of the system wavefront aberration; Step 4: Remove the interferometer (20) and the plane mirror (19), then install the pupil detector (17) at the optical path exit of the pupil measuring mirror group (14), and install the optical axis detector (18) at the optical path exit of the optical axis measuring mirror group (15) to complete the assembly and adjustment of the high-stability laser beam pupil optical axis measuring device.

Images