Multi-channel short-wavelength characteristic X-ray nondestructive testing device and testing method

Abstract

The invention discloses a multi-channel short-wavelength characteristic X-ray nondestructive testing device and a testing method, which are applied to the technical field of short-wavelength characteristic X-rays, a receiving focusing collimator comprises a plurality of light-passing slits arranged along a scanning direction, and the light-passing slits all point to the center of a diffractometer circle. The included angle of the light-passing slits is not greater than a preset included angle, so that the plurality of light-passing slits correspond to diffraction data of the same diffraction crystal face; the small array detector is located on the light emitting side of the receiving focusing collimator so as to obtain diffraction data of the multiple light-passing slits through exposure of the receiving focusing collimator. The diffraction data of one diffraction crystal face is obtained at the same time by arranging a plurality of light passing slits of the receiving focusing collimator, and the diffraction data is obtained in combination with the small array detector, so that the diffraction peak of one diffraction crystal face can be quickly measured, and the internal diffraction information test can be quickly carried out.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of short wavelength characteristic X-ray technology, in particular to a multi-channel short wavelength characteristic X-ray nondestructive testing device and a testing method. BACKGROUND

[0002] The short wavelength characteristic X-ray diffraction technology can nondestructively detect the internal residual stress, texture and phase of a material workpiece by using a heavy metal target X-ray tube as a radiation source. For example, the short wavelength characteristic X-ray diffraction technology can nondestructively detect and analyze the internal residual stress, texture, phase and orientation of a crystal material (such as steel, aluminum alloy, titanium alloy and ceramic).

[0003] The short wavelength characteristic X-ray diffraction technology uses strong penetrating characteristic X-rays (such as WKα, AuKα, AgKα, UKα and WKβ) emitted by a heavy metal target X-ray tube to penetrate materials such as aluminum alloy with a thickness of centimeters. In combination with a slit and a collimator, the internal diffraction information can be tested and analyzed by a small laboratory instrument in a fixed position and direction, and the stress, phase, texture and single crystal orientation can be nondestructively measured.

[0004] However, the short wavelength characteristic X-ray diffraction technology has the problem of low efficiency of scanning and testing diffraction spectrum by a single-point detector. The single-point detector scanning refers to the internal diffraction information testing by step scanning with a single-point detector. The testing efficiency is low, so it is urgent for those skilled in the art to provide a high-efficiency short wavelength characteristic X-ray diffraction device. SUMMARY

[0005] The present application aims to provide a multi-channel short wavelength characteristic X-ray nondestructive testing device which can quickly test the internal diffraction information, and another purpose is to provide a testing method which can quickly test the internal diffraction information.

[0006] To solve the above technical problems, the present application provides a multi-channel short wavelength characteristic X-ray nondestructive testing device, comprising an X-ray source, an incident collimator, a sample stage, a receiving and focusing collimator and a small array detector. The sample stage is used to fix the measured part of the sample at the center of the diffractometer circle, the X-ray source is used to emit short wavelength characteristic X-rays, and the incident collimator is located between the X-ray source and the sample stage to irradiate the short wavelength characteristic X-rays to the center of the diffractometer circle. The receiving focusing collimator is located on the other side of the sample stage relative to the incident collimator, and comprises a plurality of light transmission slits arranged along a scanning direction, each of the light transmission slits being directed to the center of the diffractometer circle, and the included angle of the light transmission slits being not greater than a preset included angle, so that the plurality of light transmission slits are used to acquire diffraction data of the same diffraction crystal face. The small array detector is located on the light exit side of the receiving focusing collimator to acquire the diffraction data of the plurality of light transmission slits through the receiving focusing collimator.

[0007] Optionally, the width of each light transmission slit near the side of the sample stage ranges from 0.03 mm to 0.06 mm.

[0008] Optionally, the receiving focusing collimator and the small array detector are fixed to a detection system support, the detection system support is fixedly connected with a goniometer, and the goniometer is used to drive the receiving focusing collimator and the small array detector to rotate around the center of the goniometer circle.

[0009] Optionally, the angle interval between adjacent light transmission slits ranges from 0.03° to 0.06°.

[0010] Optionally, the goniometer is used to step move the detection system support 3 to 10 times within the angle interval between the light transmission slits, so as to obtain a continuous diffraction spectrum including background with an angle resolution of 0.003° to 0.02°.

[0011] Optionally, the angle interval between adjacent light transmission slits is equal to the angle moved each time when the goniometer drives the detection system support to step move.

[0012] Optionally, the angle interval between adjacent light transmission slits ranges from 0.005° to 0.02°.

[0013] The application further provides a testing method, which applies the multi-channel short-wavelength characteristic X-ray nondestructive testing device. The sample is fixed at the center of the diffractometer circle through the sample stage; Short-wavelength characteristic X-rays are emitted to the sample through the X-ray source, and diffraction data are acquired through the small array detector; The acquired diffraction data are processed to analyze the diffraction data corresponding to the same diffraction crystal face.

[0014] Optionally, the angle interval between adjacent light transmission slits ranges from 0.03° to 0.06°. The diffraction data are acquired through the small array detector, including: The receiving focusing collimator and the small array detector are driven by the goniometer to step through an angular interval range between adjacent light transmission slits, and diffraction data is acquired by exposure of the small array detector after each step.

[0015] Optionally, the angular interval between adjacent light transmission slits is equal to an angle moved each time the goniometer drives the detection system support to step through. The diffraction data acquired by detection of the small array detector includes: The small array detector is rotated to a theoretical angle of a diffraction peak, and exposure is performed at the theoretical angle of the diffraction peak to acquire diffraction data. The processing of the diffraction data includes analysis based on diffraction data of a same diffraction crystal face. The processing of the diffraction data obtains a diffraction peak including a single diffraction crystal face, and analysis is performed based on the diffraction peak.

[0016] The multi-channel short-wavelength characteristic X-ray nondestructive testing device provided by the application includes an X-ray source, an incident collimator, a sample table, a receiving focusing collimator, and a small array detector. The sample table is used to fix a measured part of a sample at the center of a diffractometer circle. The X-ray source is used to emit short-wavelength characteristic X-rays. The incident collimator is located between the X-ray source and the sample table to irradiate the short-wavelength characteristic X-rays to the center of the diffractometer circle. The receiving focusing collimator is located on the other side of the sample table relative to the incident collimator. The receiving focusing collimator includes a plurality of light transmission slits arranged along a scanning direction. The light transmission slits are all directed to the center of the diffractometer circle. The included angle of the light transmission slits is not greater than a preset included angle, so that the plurality of light transmission slits are used to acquire diffraction data of a same diffraction crystal face. The small array detector is located on the light exit side of the receiving focusing collimator to acquire the diffraction data of the plurality of light transmission slits by exposure of the receiving focusing collimator.

[0017] By setting the plurality of light transmission slits of the receiving focusing collimator to simultaneously acquire the diffraction data of a diffraction crystal face, and combining the small array detector to acquire the diffraction data, the diffraction peak of a diffraction crystal face can be quickly measured, and then internal diffraction information testing can be quickly performed.

[0018] The application also provides a testing method, which also has the beneficial effects described above, and will not be described here. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to make the technical solutions of the embodiments of the present application or the prior art clearer, the accompanying drawings needed in the embodiments or prior art description will be briefly introduced. Obviously, the accompanying drawings in the following description only show some embodiments of the present application, and for those skilled in the art, other drawings can be obtained from these drawings without any creative effort.

[0020] Figure 1 A structural schematic diagram of a multi-channel short-wavelength characteristic X-ray nondestructive testing device provided by the embodiment of the present application; Figure 2 A structural schematic diagram of a receiving focusing collimator in the embodiment of the present application; Figure 1 A structural schematic diagram of a receiving focusing collimator in the embodiment of the present application; Figure 3 A structural schematic diagram of an incident collimator in the embodiment of the present application; Figure 1 A structural schematic diagram of an incident collimator in the embodiment of the present application; Figure 4 A flow chart of a test method provided by the embodiment of the present application; Figure 5 A flow chart of a specific test method provided by the embodiment of the present application; Figure 6 A generated diffraction peak schematic diagram in the embodiment of the present application; Figure 5 A generated diffraction peak schematic diagram in the embodiment of the present application; Figure 7 A flow chart of another specific test method provided by the embodiment of the present application; Figure 8 A generated diffraction peak schematic diagram in the embodiment of the present application; Figure 7 A generated diffraction peak schematic diagram in the embodiment of the present application.

[0021] In the figure: 1. X-ray source, 2. Incident collimator, 21. Adjusting track, 22. Adjusting block, 3. Sample table, 4. Receiving focusing collimator, 41. Light passing slit, 5. Small array detector, 6. Goniometer, 7. Detection system support, 8. Light source system support. DETAILED DESCRIPTION

[0022] The core of the present application is to provide a multi-channel short-wavelength characteristic X-ray nondestructive testing device. In the prior art, the short-wavelength characteristic X-ray diffraction technology has the problem of low efficiency of scanning test diffraction spectrum by a single-point detector.

[0023] The multi-channel short-wavelength characteristic X-ray nondestructive testing device provided by the application comprises an X-ray source, an incident collimator, a sample table, a receiving and focusing collimator and a small array detector; the sample table is used for fixing the measured part of a sample at the center of a diffractometer circle, the X-ray source is used for emitting short-wavelength characteristic X-rays, and the incident collimator is located between the X-ray source and the sample table to irradiate the short-wavelength characteristic X-rays to the center of the diffractometer circle; the receiving and focusing collimator is located on the other side of the sample table relative to the incident collimator, the receiving and focusing collimator comprises a plurality of light transmission slits arranged along a scanning direction, the light transmission slits are all directed to the center of the diffractometer circle, and the included angle of the light transmission slits is not greater than a preset included angle, so that the plurality of light transmission slits are used for acquiring diffraction data of the same diffraction crystal face; and the small array detector is located on the light exit side of the receiving and focusing collimator to acquire the diffraction data of the plurality of light transmission slits through exposure of the receiving and focusing collimator.

[0024] By setting the plurality of light transmission slits of the receiving and focusing collimator to simultaneously acquire the diffraction data of one diffraction crystal face and combining the small array detector to acquire the diffraction data, the diffraction peak of one diffraction crystal face can be quickly measured, and then the internal diffraction information test can be quickly performed.

[0025] In order for those skilled in the art to better understand the present application, the application will be further described in detail below in combination with the drawings and specific embodiments. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. Embodiment one

[0026] Please refer to Figures 1 to 3 , Figure 1 The structure schematic diagram of the multi-channel short-wavelength characteristic X-ray nondestructive testing device provided by the embodiment of the present application; Figure 2 is Figure 1 The structure schematic diagram of the receiving and focusing collimator in the embodiment; Figure 3 is Figure 1 The structure schematic diagram of the incident collimator in the embodiment.

[0027] See Figure 1 In the embodiment, the multi-channel short-wavelength characteristic X-ray nondestructive testing device comprises an X-ray source 1, an incident collimator 2, a sample table 3, a receiving and focusing collimator 4 and a small array detector 5; the sample table 3 is used for fixing the measured part of a sample at the center of a diffractometer circle, the X-ray source 1 is used for emitting short-wavelength characteristic X-rays, and the incident collimator 2 is located between the X-ray source 1 and the sample table 3 to irradiate the short-wavelength characteristic X-rays to the center of the diffractometer circle; The receiving focusing collimator 4 is located on the other side of the sample stage 3 relative to the incident collimator 2, the receiving focusing collimator 4 comprises a plurality of light transmission slits 41 arranged along the scanning direction, the light transmission slits 41 are all directed to the center of the diffractometer circle, the included angle of the light transmission slits 41 is not greater than a preset included angle, so that the plurality of light transmission slits 41 are used to obtain diffraction data of the same diffraction plane; the small array detector 5 is located on the light exit side of the receiving focusing collimator 4, so as to obtain the diffraction data of the plurality of light transmission slits 41 through exposure of the receiving focusing collimator 4.

[0028] The sample stage 3 is used to fix the measured part of the sample at the center of the diffractometer circle, and the specific structure of the sample stage 3 can refer to the prior art, which will not be repeated here. The X-ray source 1 is used to emit short-wavelength characteristic X-rays, and the emission direction of the X-ray source 1 needs to be directed to the center of the diffractometer circle, so that the short-wavelength characteristic X-rays can irradiate the measured part of the sample fixed on the sample stage 3, i.e. the part to be measured of the sample. The specific structure of the X-ray source 1 can refer to the prior art, which will not be repeated here. In the embodiment, an incident collimator 2 is usually arranged between the X-ray source 1 and the sample stage 3, and the function of the incident collimator 2 is to limit the propagation path of the short-wavelength characteristic X-rays, so as to ensure that the short-wavelength characteristic X-rays emitted by the X-ray source 1 can accurately irradiate the center of the diffractometer circle. That is, in the embodiment, the X-ray source 1 will emit short-wavelength characteristic X-rays, the short-wavelength characteristic X-rays irradiate the center of the diffractometer circle through the collimation of the incident collimator 2, and the measured part of the sample is fixed at the center of the diffractometer circle by the sample stage 3. The wavelength range of the short-wavelength characteristic X-rays is usually 0.01nm to 0.1nm, which is not limited in the embodiment. In the embodiment, it is usually required that the short-wavelength characteristic X-rays can penetrate to a certain thickness of the sample, so as to analyze the material structure at a certain depth of the sample. The X-ray source 1 and the incident collimator 2 are usually fixed on the light source system support 8.

[0029] For the sample table 3, the short wavelength characteristic X-rays will be incident from one side thereof, and the diffraction X-rays carrying sample information will be emitted from the other side of the sample table 3. Therefore, in the present embodiment, the receiving focusing collimator 4 is located on the other side of the sample table 3 relative to the incident collimator 2, and the light entrance side of the receiving focusing collimator 4 is directed to the center of the diffraction circle. The receiving focusing collimator 4 is used to focus and propagate the diffraction X-rays carrying sample information to the small array detector 5 for detection, and therefore the light entrance side of the receiving focusing collimator 4 needs to be directed to the center of the diffraction circle to ensure that the diffraction X-rays can be incident to the receiving focusing collimator 4. The small array detector 5 needs to be located on the light exit side of the receiving focusing collimator 4, so that the receiving focusing collimator 4 can transmit the diffraction X-rays to the receiving focusing collimator 4, i.e. the small array detector 5 can acquire diffraction data by exposure through the receiving focusing collimator 4. Generally, the short wavelength characteristic X-rays irradiated to the sample are also referred to as incident rays, and the diffraction X-rays emitted from the sample are referred to as diffraction rays.

[0030] It should be noted that the detector used in the present embodiment is the small array detector 5. The array detector means that the detector can not only perform single-point detection, i.e. it can not only detect the diffraction X-rays of one point, but also can detect the diffraction X-rays within a certain range along the scanning direction, i.e. the direction of circumferential movement around the center of the diffraction circle. For example, if the length of the small array detector 5 along the scanning direction is 4 mm, the small array detector 5 can detect the diffraction X-rays within a range of 4 mm along the scanning direction. Compared with the single-point detector, the small array detector 5 can detect more data in one exposure process.

[0031] The small array detector 5 can only acquire part of the diffraction Debye ring in one exposure process compared with the large array detector which does not move and can acquire the entire diffraction Debye ring, and therefore the array detector used in the present embodiment is the small array detector 5.

[0032] Referring to Figure 2In the embodiment, the receiving focusing collimator 4 includes a plurality of light transmission slits 41 arranged along the scanning direction, each of the light transmission slits 41 is directed to the center of the diffractometer circle, and the included angle of the light transmission slits 41 is not greater than a preset included angle, so that the plurality of light transmission slits 41 are used to obtain diffraction data of the same diffraction crystal face. The plurality of light transmission slits 41 arranged in the receiving focusing collimator 4 are generally arranged along the scanning direction, and the plurality of light transmission slits 41 are generally parallel to each other and extend along a direction perpendicular to the scanning direction. In the embodiment, the light transmission section of each light transmission slit 41 is generally a vertical line, and the plurality of light transmission slits 41 are integrated in the same receiving focusing collimator 4. In order to ensure that the small array detector 5 can be exposed to obtain diffraction data through each light transmission slit 41, it is necessary to ensure that all light transmission slits 41 are directed to the center of the diffractometer circle, and therefore the plurality of light transmission slits 41 need to be arranged along the scanning direction, and the corresponding light transmission slits 41 need to be parallel to each other and extend along a direction perpendicular to the scanning direction.

[0033] In order to ensure that the plurality of light transmission slits 41 can be used to obtain diffraction data of the same diffraction crystal face, the distance or the included angle between the light transmission slits 41 needs to be limited in the embodiment, so that the distance between the adjacent light transmission slits 41 is close and can be used to obtain diffraction data of the same diffraction crystal face. The preset included angle is the maximum included angle at which two light transmission slits 41 can obtain diffraction data of the same diffraction crystal face. When the included angle between two light transmission slits 41 is greater than the preset included angle, it means that the included angle between the two light transmission slits 41 is too large to obtain diffraction data of the same diffraction crystal face, and only diffraction data of a plurality of diffraction crystal faces can be obtained. Therefore, the included angle between the light transmission slits 41 needs to be limited in the embodiment, so that it is not greater than the preset included angle, so that the plurality of light transmission slits 41 are used to obtain diffraction data of the same diffraction crystal face. The specific size of the preset included angle is not limited in the embodiment, as long as it is the maximum included angle corresponding to the diffraction peak of the same diffraction crystal face.

[0034] Specifically, in the embodiment, the light transmission section of the light transmission slit 41 is generally rectangular, and the width of each light transmission slit 41 near the sample table 3 is in the range of 0.03mm to 0.06mm. In the embodiment, the light transmission section of the light transmission slit 41 is the section along the direction perpendicular to the light propagation direction, which is generally rectangular. However, the section of the light transmission slit 41 along the light propagation direction is generally trapezoidal, and the size of the light transmission slit 41 near the sample table 3 is generally smaller than the size away from the sample table 3. Specifically, in the embodiment, the width of each light transmission slit 41 near the sample table 3 is generally in the range of 0.03mm to 0.06mm, and the width away from the sample table 3 needs to be determined according to the opening angle of the light transmission slit 41. In the embodiment, it is necessary to ensure that the extension lines of all light transmission slits 41 are focused on a point, and the small array detector 5 can rotate around the point.

[0035] In this embodiment, the angular spacing between adjacent light-transmitting slits 41 is 0.03° to 0.06°. This angular spacing is the degree of the angle formed when adjacent light-transmitting slits 41 extend to the center of the diffractometer circle. That is, the value of the angle formed when adjacent light-transmitting slits 41 extend to the center of the diffractometer circle is usually between 0.03° and 0.06°, so as to ensure that multiple light-transmitting slits 41 can be used to obtain diffraction data of the same diffraction crystal plane. That is, it ensures that the small array detector 5 can obtain the diffraction data of the diffraction peak of a diffraction crystal plane at multiple diffraction angles 2θ in one exposure process through the receiving focusing collimator 4 of this structure.

[0036] In this embodiment, after the small array detector 5 and the receiving focusing collimator 4 are adjusted to a preset angle, the diffraction data of the diffraction peak of a diffraction crystal plane at multiple diffraction angles 2θ can be obtained by a single exposure. However, it will not obtain the diffraction peaks of all diffraction crystal planes. That is, in this embodiment, the small array detector 5 can only obtain a portion of the diffraction Debye rings by a single exposure, and will not obtain all of the diffraction Debye rings.

[0037] Specifically, in this embodiment, the pixel size range of the miniature array detector 5 along the scanning direction is 0.01mm to 0.02mm. The scanning direction is the lateral direction. Limiting the pixel size range of the miniature array detector along the scanning direction to 0.01mm to 0.02mm ensures the accuracy of diffraction data acquisition. However, perpendicular to the scanning direction, the pixel size of the miniature array detector 5 can be equal to its length in that direction, specifically 5mm to 30mm. In this case, a single pixel typically has a linear structure, and the miniature array detector 5 can be considered a linear array detector. Alternatively, the pixel size of the miniature array detector 5 perpendicular to the scanning direction can also be equal to its length in the scanning direction, i.e., 0.01mm to 0.02mm, in which case the miniature array detector 5 can be considered a pixel array detector.

[0038] The diffraction data passing through the two outermost light-transmitting slits 41 of the aforementioned receiving focusing collimator 4 correspond to the positions in the diffraction pattern, and the spacing between them is typically 2 to 4 times the peak width. The size of the corresponding miniature array detector 5 also needs to match the size of the aforementioned receiving focusing collimator 4. That is, in this embodiment, the length of the miniature array detector 5 along the scanning direction is typically 4 mm to 10 mm, and the length perpendicular to the scanning direction is typically 10 mm to 30 mm. Of course, in this embodiment, the size of the miniature array detector 5 is not specifically limited and depends on the specific situation. The specific number of light-transmitting slits 41 of the aforementioned receiving focusing collimator 4 can be set according to the actual situation and is not specifically limited here.

[0039] Specifically, in this embodiment, the receiving focusing collimator 4 and the small array detector 5 can be fixed to the detection system bracket 7. The detection system bracket 7 is fixedly connected to the goniometer 6, and the goniometer 6 is used to drive the receiving focusing collimator 4 and the small array detector 5 to rotate around the center of the goniometer 6. In this embodiment, in order to ensure that the receiving focusing collimator 4 and the small array detector 5 can rotate synchronously around the center of the diffractometer, it is necessary to first fix the receiving focusing collimator 4 and the small array detector 5 to the detection system bracket 7. The detection system bracket 7 usually has a platform, and the receiving focusing collimator 4 and the small array detector 5 can be fixed to the surface of the platform by bolts or other structures. The fixing structure or fixing method between the receiving focusing collimator 4 and the small array detector 5 and the detection system bracket 7 can be set according to the actual situation, and no specific limitation is made here.

[0040] The aforementioned detection system support 7 is fixedly connected to the goniometer 6, which drives the receiving focusing collimator 4 and the miniature array detector 5 to rotate around the center of the goniometer 6. Typically, the center of the goniometer 6 coincides with the center of the diffractometer. Specifically, the goniometer 6 can adjust the angle between the receiving focusing collimator 4 and the miniature array detector 5 and the short-wavelength characteristic X-rays incident on the sample, allowing the miniature array detector 5 to detect raw diffraction data at different diffraction angles 2θ. The diffractometer can typically move the detection system support 7 in a step-by-step manner along an arc-shaped path, driving the receiving focusing collimator 4 and the miniature array detector 5, with the center of this arc-shaped path being the center of the goniometer 6. That is, in this embodiment, rotating the goniometer 6 can drive the receiving focusing collimator 4 and the miniature array detector 5 to any angle. The specific structure of the goniometer 6 can be found in existing technology and will not be elaborated further here. Specifically, in this embodiment, the length of the receiving focusing collimator 4 is typically 100mm to 1000mm, and each of the light-transmitting slits 41 is focused on the center of the diffractometer circle, and the focal point of each light-transmitting slit 41 remains unchanged as the goniometer 6 rotates.

[0041] Specifically, in one feasible scheme, the angular spacing between adjacent light-transmitting slits 41 can be from 0.03° to 0.06°. This angular spacing range facilitates the fabrication of the receiving focusing collimator 4. However, to obtain a diffraction peak with a complete diffraction crystal plane, the goniometer 6 needs to drive the detection system support 7 to move stepwise 3 to 10 times within the angular spacing between the light-transmitting slits 41, and after each stepwise movement, the diffraction data is acquired through exposure by the small array detector 5. At this point, angular resolution can be obtained, i.e., a continuous diffraction spectrum including the background with a step angle of 0.003° to 0.02°. Then, the diffraction peaks are fitted to form a diffraction peak image with a complete diffraction crystal plane.

[0042] In another feasible solution, the angular spacing between adjacent light-transmitting slits 41 is equal to the angle moved by the goniometer 6 each time it moves the detection system support 7 in a stepping motion. Specifically, the angular spacing between adjacent light-transmitting slits 41 can be between 0.005° and 0.02°. Since the angular spacing between adjacent light-transmitting slits 41 is equal to the step angle of the goniometer 6 each time it moves, the small array detector 5 does not need to move and undergo multiple exposures. It only needs to perform one exposure at a fixed position or angle to obtain a complete diffraction peak image of the diffraction crystal plane. This is equivalent to obtaining a continuous diffraction spectrum including the background with a step angle of 0.005° to 0.02°, and then fitting the diffraction peaks.

[0043] It should be noted that, before use, the diffraction data collected by each light-transmitting slit 41 of the receiving focusing collimator 4 in this embodiment needs to be calibrated and corrected. After calibration and correction, the consistency of diffraction intensity values ​​of each channel can be achieved. The specific process of this calibration and correction can be referred to the prior art, and will not be elaborated here.

[0044] Typically, the aforementioned miniature array detector 5 and goniometer 6 need to be connected to a main control computer, which directly controls the movement of the goniometer 6 and receives the data received by the miniature array detector 5. The main control computer also usually needs to be connected to a remote terminal to receive control from the remote terminal.

[0045] See Figure 3In this embodiment, the light-transmitting cross-section of the aforementioned incident collimator 2 is typically rectangular. An adjustment track 21 is provided at the light-exit port of the incident collimator 2, extending perpendicular to the scanning direction. An adjustment block 22 is provided on the adjustment track 21, and the adjustment block 22 moves along the adjustment track 21. The adjustment block 22 can move along the adjustment track 21 perpendicular to the scanning direction. This adjustment block 22 has a blocking effect on short-wavelength characteristic X-rays, thus blocking short-wavelength characteristic X-rays and adjusting the size of the light-transmitting cross-section of the incident collimator 2. The specific material of the adjustment block 22 can be set according to actual conditions and is not specifically limited here.

[0046] The multi-channel short-wavelength characteristic X-ray non-destructive testing device provided in this embodiment can simultaneously acquire diffraction data of a diffraction crystal plane by setting multiple light-passing slits 41 of the receiving focusing collimator 4, and combining the acquisition of diffraction data with a small array detector 5. This allows for rapid measurement of the diffraction peaks of a diffraction crystal plane, thereby enabling rapid testing of internal diffraction information. Example 2

[0047] Please refer to Figure 4 , Figure 4 This is a flowchart of a testing method provided in an embodiment of the present invention.

[0048] The testing method provided in this embodiment is specifically based on the steps performed on the sample by the multi-channel short-wavelength characteristic X-ray non-destructive testing device provided in the above embodiments. It specifically requires the use of the multi-channel short-wavelength characteristic X-ray non-destructive testing device provided in the above embodiments. The specific structure of the multi-channel short-wavelength characteristic X-ray non-destructive testing device has been described in detail in the above embodiments and will not be repeated here.

[0049] See Figure 4 In this embodiment, the testing method includes: S101: Fix the part of the sample to be tested at the center of the diffractometer using the sample stage.

[0050] In this embodiment, after the X-ray source 1, incident collimator 2, sample stage 3, receiving focusing collimator 4 and small array detector 5 are installed and the optical paths between each structure are debugged, the sample is first fixed on the sample stage 3 and the part of the sample to be tested is placed at the center of the diffractometer.

[0051] Afterwards, it is usually necessary to move the receiving focusing collimator 4 and the miniature array detector 5 to position them at the diffraction angle theoretically corresponding to the diffraction crystal plane to be detected. Of course, if the angles of the receiving focusing collimator 4 and the miniature array detector 5 have already been adjusted when installing the multi-channel short-wavelength characteristic X-ray non-destructive testing device, this step can be omitted.

[0052] S102: Short-wavelength characteristic X-rays are emitted to the sample through an X-ray source and detected by a small array detector to obtain diffraction data.

[0053] In this step, it is necessary to control the X-ray source 1 to emit short-wavelength characteristic X-rays towards the sample, and acquire diffraction data through a small array detector at a preset angle. This preset angle can be the theoretical diffraction angle corresponding to the diffraction crystal plane to be detected. Due to the structure of the small array detector 5 in this embodiment, combined with the structure of the receiving focusing collimator 4 described above, it is possible to acquire a complete diffraction peak image of the detected diffraction crystal plane in a single exposure, or to acquire a complete diffraction peak image of the detected diffraction crystal plane through multiple exposures with step-by-step movement. Specific details will be described in detail in the following embodiments, and will not be repeated here.

[0054] S103: Process the diffraction data to perform analysis based on diffraction data corresponding to the same diffraction crystal plane.

[0055] In this step, the diffraction data needs to be processed. The specific processing procedure can be found in existing technologies and will not be elaborated here. In this embodiment, diffraction data corresponding to the same diffraction crystal plane can be obtained through a single exposure of the small array detector 5. This step specifically processes this diffraction data to perform analysis based on the diffraction data corresponding to the same diffraction crystal plane. This diffraction data can form a complete diffraction peak image or only a partial diffraction peak image; the specific details will be described in detail in the following embodiments and will not be repeated here. In this step, the internal residual stress, texture, phase, and orientation information can be analyzed based on the information from the diffraction data. For example, by correcting the diffraction data, subtracting the background, and fitting diffraction peaks, strain, stress, etc., can be calculated. The specific analysis content is not specifically limited here. In this step, it is usually necessary to combine the sample angle and position movement to obtain diffraction data from different directions and positions of the sample, and further calculate strain and stress for analysis.

[0056] The testing method provided in this embodiment allows for the rapid measurement of the diffraction peaks of a diffraction crystal plane by setting multiple light-passing slits 41 of the receiving focusing collimator 4 to simultaneously acquire diffraction data of a single diffraction crystal plane, and by combining this with the acquisition of diffraction data using a small array detector 5. This enables rapid testing of internal diffraction information.

[0057] The specific details of the testing method provided in this application will be described in detail in the following embodiments of the invention. Example 3

[0058] Please refer to Figure 5 as well as Figure 6 , Figure 5A flowchart illustrating a specific testing method provided in an embodiment of the present invention; Figure 6 for Figure 5 A schematic diagram of the generated diffraction peaks.

[0059] See 5. In this embodiment, the test method includes: S201: Fix the part of the sample to be tested at the center of the diffractometer using the sample stage.

[0060] This step is basically the same as S101 in the above embodiment. For details, please refer to the above embodiment. It will not be repeated here.

[0061] S202: The goniometer drives the receiving focusing collimator and the miniature array detector to move step by step within the angular spacing between adjacent light-transmitting slits, and after each step, the miniature array detector is exposed to obtain diffraction data.

[0062] See Figure 6 In this embodiment, the angular spacing between adjacent light-transmitting slits 41 is 0.03° to 0.06°. Since the angular spacing between adjacent light-transmitting slits 41 is relatively large in this embodiment, it is necessary to obtain complete diffraction data for a single diffraction peak by stepping along the receiving focusing collimator 4 and the small array detector 5. Accordingly, in this step, the goniometer 6 drives the receiving focusing collimator 4 and the small array detector 5 to step along within the angular spacing between adjacent light-transmitting slits 41. By stepping along within the angular spacing between adjacent light-transmitting slits 41 6 to 10 times, continuous diffraction data including the background with a step angle of 0.005° to 0.01° can be obtained. Based on all this diffraction data, a complete diffraction peak image for a single diffraction crystal plane can be generated. Figure 6 The numbers 1 to 7 represent the positions corresponding to a single light-transmitting slit 41 scan.

[0063] S203: Process the diffraction data to perform analysis based on diffraction data corresponding to the same diffraction crystal plane.

[0064] In this embodiment, based on the aforementioned diffraction data, data corresponding to the entire diffraction peak of the detected diffraction crystal plane can be obtained, thereby obtaining an image of the diffraction peak including a diffraction crystal plane, which can then be analyzed. Specifically, the internal residual stress, texture, phase, and orientation information can be analyzed based on the information of the diffraction peak; the specific analysis content is not specifically limited here.

[0065] When it is necessary to detect a complete diffraction pattern including diffraction peaks of multiple diffraction crystal planes, it is necessary to move the above-mentioned receiving focusing collimator 4 and small array detector 5 over a large range. However, since this embodiment uses a receiving focusing collimator 4 with multiple light-passing slits 41 and a small array detector 5, the number of exposures of the small array detector 5 can be greatly reduced compared to single-point detection, thus improving detection efficiency.

[0066] The testing method provided in this embodiment allows for the rapid measurement of the diffraction peaks of a diffraction crystal plane by setting multiple light-passing slits 41 of the receiving focusing collimator 4 to simultaneously acquire diffraction data of a single diffraction crystal plane, and by combining this with the acquisition of diffraction data using a small array detector 5. This enables rapid testing of internal diffraction information.

[0067] The specific details of the testing method provided in this application will be described in detail in the following embodiments of the invention. Example 4

[0068] Please refer to Figures 7 to 8 , Figure 7 A flowchart illustrating another specific testing method provided in an embodiment of the present invention; Figure 8 for Figure 7 A schematic diagram of the generated diffraction peaks.

[0069] See Figure 7 In this embodiment, the testing method includes: S301: Fix the part of the sample to be tested at the center of the diffractometer using the sample stage.

[0070] The above S301 is basically the same as S101 in the above embodiments. For details, please refer to the above embodiments, which will not be repeated here.

[0071] S302: Rotate the small array detector to the theoretical angle of the diffraction peak and expose it at the theoretical angle of the diffraction peak to obtain diffraction data.

[0072] See Figure 8 In this embodiment, the angular spacing between adjacent light-transmitting slits 41 is equal to the angle moved by the goniometer 6 each time it moves the detection system support 7 in a stepping motion. Specifically, the angular spacing between adjacent light-transmitting slits 41 in this embodiment can be between 0.005° and 0.02°. Since the angular spacing between adjacent light-transmitting slits 41 is equal to the step angle of the goniometer 6 each time it moves, the small array detector 5 does not need to move and undergo multiple exposures. It only needs to perform one exposure at a fixed position or angle to obtain a complete diffraction peak image of the diffraction crystal plane, which is equivalent to obtaining a continuous diffraction spectrum including the background with a step angle of 0.005° to 0.02°. Figure 8The position of each vertical line can be the position corresponding to a light-transmitting slit 41 scan.

[0073] Therefore, before this step, it is necessary to first determine the theoretical diffraction angle corresponding to the desired diffraction peak, i.e., the aforementioned theoretical diffraction peak angle. Then, in this step, the small array detector 5 and its matching receiving focusing collimator 4 need to be rotated to this theoretical diffraction peak angle for exposure, thereby acquiring diffraction data including the desired diffraction peak information.

[0074] S303: Process the diffraction data to obtain diffraction peaks including single diffraction crystal planes for analysis based on diffraction peaks.

[0075] In this embodiment, data of the entire diffraction peak corresponding to the detected diffraction crystal plane can be obtained through a single exposure of the small array detector 5. This step specifically involves processing the diffraction data to obtain an image of the diffraction peak including a single diffraction crystal plane, which can then be used for analysis. Specifically, the information from the diffraction peak can be used to analyze internal residual stress, texture, phase composition, and orientation information; the specific content of the analysis is not limited here.

[0076] When it is necessary to detect a complete diffraction pattern including diffraction peaks of multiple diffraction crystal planes, it is necessary to move the above-mentioned receiving focusing collimator 4 and small array detector 5 over a large range. However, since this embodiment uses a receiving focusing collimator 4 with multiple light-passing slits 41 and a small array detector 5, the number of exposures of the small array detector 5 can be greatly reduced compared to single-point detection, thus improving detection efficiency.

[0077] The testing method provided in this embodiment allows for the rapid measurement of the diffraction peaks of a diffraction crystal plane by setting multiple light-passing slits 41 of the receiving focusing collimator 4 to simultaneously acquire diffraction data of a single diffraction crystal plane, and by combining this with the acquisition of diffraction data using a small array detector 5. This enables rapid testing of internal diffraction information. Example 5

[0078] This embodiment utilizes the strong penetrating power of short-wavelength characteristic X-rays to conduct internal stress testing on aluminum alloy sheets using a multi-channel short-wavelength characteristic X-ray non-destructive testing device consisting of a receiving focusing collimator 4 with multiple light-passing slits 41 and a small array detector 5. The specific steps are as follows: S1: Install a receiving focusing collimator 4 with multiple light-passing slits 41, and adjust the distance and angle of the receiving focusing collimator 4 to ensure that the focal point is located at the center of the diffractometer circle.

[0079] S2: Place the part of the aluminum alloy plate to be tested at the center of the diffraction circle, and then select the diffraction crystal plane to be tested. In this example, the Al (311) crystal plane is selected.

[0080] S3: Rotate the detection system bracket 7, which will drive the receiving focusing collimator 4 and the small array detector 5 on it to rotate, so that the angle of the central light-transmitting slit 41 is Al(311) theoretical diffraction angle 2θ=9.819°, and rotate the aluminum alloy sample to half of the diffraction angle 2θ, θ=4.909°.

[0081] S4: The detection system support 7 is rotated using a step-scan method, and the diffraction data is acquired by exposing the small array detector 5 after each step. The diffraction data from different light-transmitting slits 41 are then corrected to obtain the corrected diffraction spectrum, such as... Figure 6 As shown.

[0082] S5: Conduct peak determination analysis of diffraction patterns.

[0083] S6: Move the sample.

[0084] S7: Repeat steps S4-S6 to obtain diffraction peaks at different locations.

[0085] S8: Based on Bragg's formula and stress calculation formula, the stress in different parts can be calculated.

[0086] The testing method provided in this embodiment, by setting multiple light-passing slits 41 of the receiving focusing collimator 4 to simultaneously acquire diffraction data of a diffraction crystal plane, and combining it with a small array detector 5 to acquire diffraction data, can quickly measure the diffraction peaks of a diffraction crystal plane, and thus quickly test the internal diffraction information.

[0087] The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0088] Those skilled in the art will further recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of both. To clearly illustrate the interchangeability of hardware and software, the components and steps of the various examples have been generally described in terms of functionality in the foregoing description. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementations should not be considered beyond the scope of this invention.

[0089] The steps of the methods or algorithms described in conjunction with the embodiments disclosed herein can be implemented directly by hardware, a software module executed by a processor, or a combination of both. The software module can be located in random access memory (RAM), main memory, read-only memory (ROM), electrically programmable ROM, electrically erasable programmable ROM, registers, hard disk, removable disk, CD-ROM, or any other form of storage medium known in the art.

[0090] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0091] The foregoing has provided a detailed description of the multi-channel short-wavelength characteristic X-ray nondestructive testing device and method provided by the present invention. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are merely for the purpose of helping to understand the method and core ideas of the present invention. It should be noted that those skilled in the art can make various improvements and modifications to the present invention without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. A multi-channel short wavelength characteristic X-ray non-destructive testing apparatus, characterized by, The device comprises an X-ray source, an incident collimator, a sample stage, a receiving focusing collimator and a small array detector. The sample stage is used to fix the measured part of a sample at the center of a diffractometer circle, the X-ray source is used to emit short-wavelength characteristic X-rays, and the incident collimator is located between the X-ray source and the sample stage to irradiate the short-wavelength characteristic X-rays to the center of the diffractometer circle. The receiving focusing collimator is located on the other side of the sample stage relative to the incident collimator, and comprises a plurality of light transmission slits arranged along a scanning direction, each of the light transmission slits is directed to the center of the diffractometer circle, and the included angle of the light transmission slits is not greater than a preset included angle, so that the plurality of light transmission slits are used to acquire diffraction data of the same diffraction crystal face. The small array detector is located on the light exit side of the receiving focusing collimator to acquire the diffraction data of the plurality of light transmission slits through exposure of the receiving focusing collimator.

2. The multi-channel short wavelength feature X-ray non-destructive testing apparatus of claim 1, wherein, The width of each light transmission slit near the sample stage side is in the range of 0.03mm to 0.06mm.

3. The multi-channel short wavelength feature X-ray non-destructive inspection apparatus of claim 1, wherein, The receiving focusing collimator and the small array detector are fixed to a detection system support, the detection system support is fixedly connected with a goniometer, and the goniometer is used to drive the receiving focusing collimator and the small array detector to rotate around the center of the goniometer.

4. The multi-channel short wavelength characteristic x-ray non-destructive testing apparatus according to claim 3, characterized by, The angle interval between adjacent light transmission slits is 0.03° to 0.06°.

5. The multi-channel short wavelength feature X-ray non-destructive testing apparatus of claim 4, wherein, The goniometer is used to drive the detection system support to step move 3 to 10 times within the angle interval between the light transmission slits, so as to obtain a continuous diffraction spectrum including background with an angle resolution of 0.003° to 0.02°.

6. The multi-channel short wavelength feature X-ray non-destructive inspection apparatus of claim 3, wherein, The angle interval between adjacent light transmission slits is equal to the angle moved each time when the detection system support is step moved by the goniometer.

7. The multi-channel short wavelength feature X-ray non-destructive inspection apparatus of claim 6, wherein, The angle interval between adjacent light transmission slits is 0.005° to 0.02°.

8. A test method characterized by, The internal diffraction information testing device is used for internal diffraction information testing, and comprises the multi-channel short-wavelength characteristic X-ray nondestructive testing device according to any one of claims 1 to 7. The measured part of a sample is fixed at the center of a diffractometer circle by a sample stage. Short-wavelength characteristic X-rays are emitted to the sample by an X-ray source, and diffraction data are acquired by a small array detector. The acquired diffraction data are processed to analyze the diffraction data corresponding to the same diffraction crystal face.

9. The method of claim 8, wherein, The angle interval between adjacent light transmission slits is 0.03° to 0.06°. The diffraction data acquired by the small array detector include: The receiving focusing collimator and the small array detector are step moved within the angle interval between adjacent light transmission slits by a goniometer, and diffraction data are acquired by the small array detector after each step movement.

10. The method of claim 8, wherein, The angle interval between adjacent light transmission slits is equal to the angle moved each time when the detection system support is step moved by the goniometer. The diffraction data acquired by the small array detector include: The small array detector is rotated to a diffraction peak theoretical angle, and diffraction data are acquired by exposure at the diffraction peak theoretical angle. The processing of the diffraction data to analyze based on diffraction data corresponding to the same diffraction plane includes: The processing of the diffraction data obtains diffraction peaks including a single diffraction plane to analyze based on the diffraction peaks.

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