A machine tool integrating resonator measurement and trimming and an application method thereof
By adopting a single-axis design and a shared optical path in the integrated machine tool for measuring and adjusting resonators, the problems of low efficiency and accuracy degradation of traditional machine tools are solved, and efficient and accurate resonator processing and adjustment are achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- NAT UNIV OF DEFENSE TECH
- Filing Date
- 2026-02-11
- Publication Date
- 2026-06-26
AI Technical Summary
Traditional machine tools that separate measurement and adjustment of the resonator result in low processing efficiency, and dynamic adjustments of the ion source or workpiece cause accuracy degradation and limitations.
Design a machine tool that integrates measurement and adjustment of a resonator. The resonator clamping and motion mechanism is designed with a single axis. The laser interferometer and the ion source share the same optical path. The ion beam is blocked by a variable aperture and excitation mechanism is used to provide excitation, so as to achieve seamless connection between measurement and processing.
It improves processing accuracy, shortens processing cycle, reduces gas load in vacuum environment, improves pumping efficiency, avoids accuracy decay caused by dynamic adjustment, and achieves atomic-level material removal and adjustment.
Smart Images
Figure CN121677669B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of ultra-precision machining technology, specifically relating to a machine tool integrating resonator measurement and adjustment, and its application method. Background Technology
[0002] The resonator is a key component of the hemispherical resonant gyroscope (HRG). Its material is usually fused silica crystal. During the processing of the resonator, it is necessary to remove or reconstruct the mass distribution defects (such as surface roughness and mass non-uniformity) of the resonator through physical methods (such as ion beam etching) at the micro-nano level to optimize its vibration characteristics (such as frequency splitting and quality factor Q value). The traditional process of the resonator generally includes multiple iterations of processing and testing. The testing of multiple iterations requires multiple clamping and positioning and repeated vacuuming, so there are the following defects and shortcomings: (1) The separation of processing and testing leads to low efficiency: it is necessary to switch the processing and testing cavities multiple times (such as the main / auxiliary vacuum cavity design in the patent of Tianchuang Precision). Each switch is time-consuming and increases the risk of contamination. (2) Dynamic adjustment of ion source or workpiece causes accuracy decay: in precision processing scenarios such as four-point adjustment of the resonator, the traditional process achieves multi-position processing by mechanically moving the ion source or rotating the workpiece. This dynamic adjustment method will lead to a longer residence time of the ion beam at some processing points, resulting in excessive removal and ultimately causing the processing size error to increase nonlinearly, which seriously restricts the realization of nanoscale processing accuracy. (3) Processing efficiency loss: Traditional ion beam processing relies on a multi-axis motion platform, but moving the ion source will result in a large space for its movement, which is not conducive to structural compactness and the large volume cavity significantly prolongs the pumping time, affecting processing efficiency. Summary of the Invention
[0003] The technical problem to be solved by this invention is to provide a machine tool integrating resonator measurement and adjustment, and its application method, in view of the above-mentioned problems in the prior art. This invention aims to solve the problems of low resonator processing efficiency, accuracy decay caused by dynamic adjustment of ion source or workpiece, and limited accuracy caused by traditional machine tools that separate resonator measurement and adjustment.
[0004] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows:
[0005] A machine tool integrating resonator measurement and adjustment includes a vibration isolation table, a height adjustment platform and a vacuum tank with a vacuum pump assembly on the vibration isolation table, a laser interferometer mounted on the height adjustment platform, and a single-axis resonator clamping and motion mechanism, an ion source for ion beam processing of the resonator mounted on the resonator clamping and motion mechanism, and an excitation mechanism for providing excitation to the resonator mounted on the resonator clamping and motion mechanism. The laser interferometer and the ion source share the same optical path to ensure seamless measurement and processing of the resonator without switching optical paths. A variable aperture is provided at the ion beam emission window of the ion source to block the ion beam emitted by the ion source during the stabilization process and when switching different processing positions to avoid accuracy attenuation caused by dynamic adjustment.
[0006] Optionally, the machine tool further includes a water chiller, the water chiller's water cooling pipes being connected to the water cooling interface of the ion source for water cooling heat dissipation of the ion source.
[0007] Optionally, the resonator clamping and motion mechanism includes a resonator clamp, an electric rotary table, an xyz three-coordinate displacement stage, and a pad connected in sequence. The pad is installed and fixed on the vibration isolation table. An argon gas hood is fitted around the electric rotary table and the resonator clamp. An argon gas nozzle is installed inside the argon gas hood. An opening is provided at the top of the argon gas hood. The lower part of the resonator clamp is connected to the electric rotary table and passes through the opening at the top of the argon gas hood to clamp and fix the resonator. The opening on the inner wall of the clamped and fixed resonator is connected to the opening at the top of the argon gas hood, thereby forming a local inert gas environment at the resonator being processed. The argon gas flows from the inside to the outside of the resonator in a laminar flow mode, carrying away the microparticles generated during processing away from the processing sensitive area without interfering with the focusing path of the ion beam of the ion source or the laser of the laser interferometer.
[0008] Optionally, the excitation mechanism includes a base plate, a connecting plate, a small hammer motor, a steel wire rope, and an excitation hammer. The base plate is mounted and fixed on the vibration isolation platform. The housing of the small hammer motor is connected to the base plate through the connecting plate. The output shaft of the small hammer motor is connected to the excitation hammer through the steel wire rope to provide excitation by striking the resonator with the excitation hammer.
[0009] Optionally, when the hammer motor drives the wire rope and the vibrating hammer to strike the resonator to provide excitation, the hammer motor rotates alternately around the axis in the forward and reverse directions, and the magnitude of the excitation applied when the vibrating hammer strikes the resonator is controlled by the size of the rotation angle.
[0010] Optionally, the base plate is provided with two symmetrically arranged arc-shaped grooves, and the connecting plate is an L-shaped plate. One side of the L-shaped plate is fixed in the two arc-shaped grooves by fasteners, and the other side is connected to the housing of the hammer motor.
[0011] Optionally, the ion source housing is provided with a clamp and a base, the base is installed and fixed on the vibration isolation platform, a circular positioning hole is provided between the clamp and the base and they are connected to each other by a connector, and the ion source housing is clamped and fixed in the circular positioning hole between the clamp and the base.
[0012] Optionally, the variable aperture includes a base with an inner hole, on which multiple molybdenum blades are arranged around the inner hole to form the aperture diameter. One end of each molybdenum blade is rotatably fixed to the base, and the other end is slidably arranged in a groove on the base via a slider and connected to a piezoelectric ceramic actuator on the base so as to adjust the size of the aperture diameter by adjusting the sliding position of the slider. The surface of the molybdenum blade is coated with a titanium nitride coating.
[0013] Furthermore, this embodiment also provides an application method for the aforementioned integrated machine tool for measuring and adjusting the resonator, including:
[0014] S101, the resonator is installed on the resonator clamping and moving mechanism, and the resonator clamping and moving mechanism aligns the axis of the resonator with the optical path shared by the laser interferometer and the ion source; the vacuum tank is evacuated to a preset pressure or maintained for a preset time by the vacuum pump group;
[0015] S102, the resonator is driven to rotate along a single axis by a resonator clamping and motion mechanism and the resonator is detected by a laser interferometer;
[0016] S103: Based on the detection results of the resonator by the laser interferometer, determine whether the quality of the resonator meets the requirements. If it does not meet the requirements, drive the resonator to rotate along the single axis of the axis through the resonator clamping and motion mechanism, and use the ion source to perform in-situ processing on the resonator. Adjust the correct adjustment time of the corresponding position of the lip of the resonator by controlling the speed of the resonator clamping and motion mechanism driving the resonator to rotate along the single axis of the axis and the opening and closing time of the variable aperture. After the processing is completed, jump to step S102; if the requirements are met, end and exit.
[0017] Optionally, in step S103, when adjusting the correct adjustment time of the corresponding position of the lip edge of the resonator by controlling the speed at which the resonator is driven to rotate along the single axis by the resonator clamping and motion mechanism, and the opening and closing time of the variable aperture, the calculation function expression for the opening and closing time of the variable aperture is:
[0018] t open =t current +(p k+1 p target ) / v k ;
[0019] Among them, t opent is the opening and closing time of the variable aperture. current p is the current time. k+1 To predict the position at time k+1 based on the output of the Kalman filter algorithm, the Kalman filter algorithm uses the position of the harmonic oscillator, the velocity and acceleration of the harmonic oscillator rotating along the axis as the system state vector, p target For the target position, v k Let k be the speed at which the harmonic oscillator rotates along a single axis around its center.
[0020] Compared with the prior art, the present invention can mainly achieve the following beneficial effects:
[0021] 1. This invention features a single-axis resonator clamping and motion mechanism within the vacuum chamber. This unique single-axis design simplifies the moving axis system, improving machining accuracy. During machining and measurement, only the rotating axis needs to be moved to complete the workpiece processing. The laser interferometer and ion source share the same optical path, allowing for real-time monitoring without switching chambers during processing, avoiding efficiency losses caused by repeated vacuuming in traditional processes (processing cycle shortened by 70%). Measurement data directly drives ion beam parameter adjustments, achieving seamless integration of "measurement-machining-measurement". The volume is 50% smaller than similar equipment, reducing gas load and further improving pumping efficiency. Traditional equipment suffers from vacuum fluctuations due to frequent chamber openings, requiring tens of minutes to recover. This embodiment integrates machining and detection, with the laser interferometer and ion source sharing the same optical path, allowing for real-time monitoring without switching chambers during processing, avoiding efficiency losses caused by repeated vacuuming in traditional processes.
[0022] 2. The rigid axis of the resonator is the axis with the smallest deformation in its vibration modes, directly determining the dynamic equilibrium characteristics of the resonator. To address the issue of the need for continuous scanning along the lip edge and the high requirements for speed and irradiation time matching, the ion source of this invention is equipped with a variable aperture at the ion beam emission window. This aperture is used to block the ion beam emitted by the ion source during the stabilization process and when switching between different processing positions to avoid accuracy degradation caused by dynamic adjustment. By controlling the rotation speed of the electric rotary table, the opening and closing size of the variable aperture blades, and the blocking time, the correct adjustment time at the corresponding position of the lip edge is ensured. This allows for atomic-level material removal through continuous adjustment of the entire lip edge or processing of the resonator through four-point adjustment. Attached Figure Description
[0023] Figure 1 This is a schematic diagram of the overall structure of the machine tool in an embodiment of the present invention.
[0024] Figure 2 This is a schematic diagram of the internal structure of the vacuum tank in an embodiment of the present invention.
[0025] Figure 3 This is a schematic diagram of the installation structure of the argon gas hood in an embodiment of the present invention.
[0026] Legend: 1. Vibration isolation table; 11. Water chiller; 2. Height adjustment table; 3. Vacuum tank; 31. Vacuum pump group; 4. Laser interferometer; 5. Resonator clamping and motion mechanism; 51. Resonator clamp; 52. Electric rotary table; 53. XYZ three-coordinate displacement stage; 54. Pad block; 55. Argon gas hood; 551. Argon gas nozzle; 6. Ion source; 61. Clamp; 62. Base; 7. Vibration excitation mechanism; 71. Base plate; 711. Arc groove; 72. Connecting plate; 73. Hammer motor; 74. Steel wire rope; 75. Vibration hammer; 8. Variable aperture; 81. Base; 82. Molybdenum blade; 83. Piezoelectric ceramic actuator. Detailed Implementation
[0027] To enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions of the present invention will be further described in detail below with reference to the accompanying drawings in the embodiments of the present invention.
[0028] like Figure 1 and Figure 2 As shown, the integrated machine tool for measuring and adjusting the resonator in this embodiment includes a vibration isolation table 1, a height adjustment table 2 and a vacuum tank 3 with a vacuum pump group 31 on the vibration isolation table 1, a laser interferometer 4 installed on the height adjustment table 2, and a single-axis resonator clamping and motion mechanism 5 inside the vacuum tank 3 for clamping and moving the resonator ( ) on the resonator clamping and motion mechanism 5. Figure 2 The diagram shows an ion source 6 (labeled A) for ion beam processing and an excitation mechanism 7 for providing excitation to the resonator mounted on the resonator clamping and motion mechanism 5. The laser interferometer 4 and the ion source 6 share the same optical path, enabling seamless measurement and processing of the resonator without switching optical paths. A variable aperture 8 is provided at the ion beam emission window of the ion source 6 to block the ion beam emitted by the ion source 6 during the stabilization process and when switching between different processing positions, so as to avoid the accuracy attenuation problem caused by dynamic adjustment. The ion beam irradiation time of the ion source 6 can be controlled by the variable aperture 8 to ensure that the ion beam dwell time deviation is small. The following working modes are supported: continuous adjustment mode: the variable aperture 8 is fully open, and the ion beam scans at a uniform speed, which is suitable for continuous adjustment; pulse adjustment mode: the variable aperture 8 opens and closes pulsedly at a preset frequency, which, together with the ion beam, achieves high-precision boundary point adjustment.
[0029] In this embodiment, the vibration isolation table 1 uses air springs or active vibration isolation technology to isolate external vibration sources (such as ground vibration and equipment operation vibration). The height adjustment table 2 can quickly adjust the relative position of the laser beam path and the workpiece to ensure detection accuracy. The vacuum tank 3 is used to ensure a vacuum environment during measurement and adjustment (the measurement of the resonator and the processing of the ion source 6 both need to be performed in a vacuum environment). The laser interferometer 4 is used to detect the surface morphology and vibration characteristics of the resonator in real time. The vacuum pump group 31 consists of a Roots pump and a molecular pump, which is responsible for quickly extracting the gas in the tank to the required vacuum level. The ion source 6 is used for ion beam processing and can be an argon ion source. The excitation mechanism 7 is used to provide excitation for the resonator clamping and motion mechanism 5. The variable aperture 8 is mainly used to solve the problem of accuracy decay caused by dynamic adjustment of the workpiece. During the stabilization process of the ion source 6 and the switching of different processing positions, it blocks the ion beam emitted by the ion source 6 to avoid the increased adjustment error caused by the prolonged residence time of the ion beam at some processing points.
[0030] like Figure 1 As shown, the machine tool in this embodiment also includes a water chiller 11, which is a cooling device for the ion source 6. The water cooling pipes of the water chiller 11 are connected to the water cooling interface of the ion source 6 for water cooling heat dissipation of the ion source 6. As an optional implementation, in this embodiment, the water chiller 11 is installed on one side of the vibration isolation table 1. In addition, an electrical cabinet and a control terminal (an interface responsible for integrated circuit control and operation) are also installed on the other side of the vibration isolation table 1, specifically located at... Figure 1 On the right side.
[0031] like Figure 2 and Figure 3 As shown, the resonator clamping and motion mechanism 5 of this embodiment includes a resonator clamp 51, an electric rotary table 52, an xyz three-coordinate displacement stage 53, and a pad 54 connected in sequence. The pad 54 is mounted and fixed on the vibration isolation table 1. Resonator detection and processing both target the low-frequency axis, and both need to be performed in the same coordinate system. Ensuring the alignment of the two coordinate systems is a major challenge. This embodiment's resonator clamping and motion mechanism 5, through a single-axis rotation design, only requires adjusting the resonator angle via the electric rotary table 52 and positioning it with the xyz three-coordinate displacement stage 53. Alignment of the resonator processing and detection optical paths only needs to be completed during the assembly stage. Subsequent processing and measurement can be controlled solely by the rotary axis, simplifying the moving axis system, reducing multi-axis linkage errors, and improving processing accuracy. The pad 54 allows for approximate height adjustment, the xyz three-coordinate displacement stage 53 enables precise positioning of the workpiece in three-dimensional space, and the electric rotary table 52 ensures accurate processing of different points on the resonator. The resonator clamp 51 is used to hold the resonator (… Figure 2 (As shown in A) is fixed on the electric rotary table 52.
[0032] like Figure 3As shown, in this embodiment, an argon gas hood 55 is fitted around the electric rotary table 52 and the resonator fixture 51. An argon gas nozzle 551 is located inside the argon gas hood 55, and an opening is provided at the top of the argon gas hood 55. The lower part of the resonator fixture 51 is connected to the electric rotary table 52 and passes through the opening at the top of the argon gas hood 55 to clamp and fix the resonator. The opening on the inner wall of the clamped and fixed resonator is connected to the opening at the top of the argon gas hood 55, thereby forming a local inert gas environment at the resonator being processed. Argon gas flows from the inside to the outside of the resonator in a laminar flow mode, carrying away the microparticles generated during processing from the processing sensitive area without interfering with the focusing path of the ion beam of the ion source 6 or the laser of the laser interferometer 4. In this embodiment, an argon gas hood 55 is set around the processing area of the resonator fixture 51, and its shape matches the processing surface of the resonator. The argon gas hood 55 is fixed on the electric rotary table 52, ensuring a small gap between it and the surface of the resonator, which both blocks the diffusion of sputtering material and does not affect the path of the processing tool. High-purity argon gas is introduced through a micro-nozzle inside the resonator, creating a localized inert gas environment. The argon gas flows from the inside to the outside of the resonator in laminar flow mode (flow rate 5 sccm / s), carrying away the microparticles generated during processing from the sensitive area. The nozzle angle of the argon nozzle 551 is coordinated with the electric rotary table 52 to ensure that the airflow does not interfere with the focusing path of the ion beam or laser. The argon gas flow rate of 5 sccm / s provides a certain degree of protection for the inside of the resonator without affecting the vacuum environment.
[0033] like Figure 2As shown, the excitation mechanism 7 in this embodiment includes a base plate 71, a connecting plate 72, a small hammer motor 73, a steel wire rope 74, and an excitation hammer 75. The base plate 71 is mounted and fixed on the vibration isolation table 1. The housing of the small hammer motor 73 is connected to the base plate 71 through the connecting plate 72. The output shaft of the small hammer motor 73 is connected to the excitation hammer 75 through the steel wire rope 74 to provide excitation by striking the resonator with the excitation hammer 75. The small hammer motor 73 drives the rotation of the excitation hammer 75. The excitation hammer 75 provides excitation to the resonator. The resonator is a vibration system with a natural frequency, and its vibration characteristics are determined by its mass, stiffness, and damping. When an external excitation force is applied to the resonator, the system will generate vibration through energy exchange, and the vibration frequency tends to the natural frequency of the resonator. This characteristic makes the resonator an ideal element for high-precision measurement, especially in vibration detection, frequency measurement, and other fields where it has unique advantages. When the resonator is excited by striking it with a vibrating hammer 75, excessive striking force can damage the resonator, while insufficient striking force can cause the resonator to decay too quickly, reaching zero before the measurement is completed. Traditional methods require strict control of the motor's striking angle, placing high demands on motor performance and necessitating numerous experiments to find the appropriate force. In this embodiment, the hammer motor 73, when driving the steel wire rope 74 and the vibrating hammer 75 to excite the resonator, rotates alternately in both forward and reverse directions around its axis. The magnitude of the excitation applied when the vibrating hammer 75 strikes the resonator is controlled by the rotation angle. For example, as an optional implementation, the hammer motor 73 in this embodiment rotates alternately in both forward and reverse directions around its axis, with a rotation angle of ±45°. A pulsed current can be used to drive the rotation of the hammer motor 73, utilizing its kinetic energy during inertia to drive the steel wire and hammer head to achieve pulse excitation of the resonator. This adapts to different excitation angle requirements while avoiding the problem of directly striking the resonator and potentially breaking it.
[0034] like Figure 2 As shown, the base plate 71 of this embodiment is provided with two symmetrically arranged arc-shaped grooves 711. The connecting plate 72 is an L-shaped plate used to adjust the height of the excitation hammer 75. One side of the L-shaped plate is fixed in the two arc-shaped grooves 711 by fasteners, and the other side is connected to the housing of the hammer motor 73, so that the direction of the excitation hammer 75 can be finely adjusted in the plane.
[0035] like Figure 2 As shown, the outer shell of the ion source 6 in this embodiment is provided with a clamp 61 and a base 62. The base 62 is installed and fixed on the vibration isolation table 1. A circular positioning hole is provided between the clamp 61 and the base 62 and they are connected to each other by a connector. The outer shell of the ion source 6 is clamped and fixed in the circular positioning hole between the clamp 61 and the base 62.
[0036] like Figure 2As shown, the variable aperture 8 in this embodiment includes a base 81 with an inner hole. Multiple molybdenum blades 82 are arranged around the inner hole on the base 81 to form the aperture diameter. One end of each molybdenum blade 82 is rotatably fixed to the base 81, while the other end is slidably arranged in a groove on the base 81 via a slider and connected to a piezoelectric ceramic actuator 83 on the base 81. The size of the aperture diameter is adjusted by changing the sliding position of the slider. The surface of the molybdenum blades 82 is coated with a titanium nitride coating. It should be noted that the arrangement of multiple molybdenum blades 82 around the inner hole on the base 81 to form the aperture diameter is an existing structure, similar to the variable aperture of a camera lens; therefore, its specific structure will not be detailed here. In this embodiment, the molybdenum blades 82 utilize the molybdenum-based variable aperture 8 to control the ion beam flux. By adjusting the aperture diameter, the ion beam residence time is precisely controlled. The high-temperature resistance and sputtering resistance of molybdenum material ensure the aperture's lifespan under ion bombardment, allowing for both continuous and point-to-point adjustments. The local temperature of an ion beam can reach hundreds of degrees Celsius. Traditional stainless steel apertures experience thermal expansion, leading to aperture deviations exceeding 10%. In this embodiment, the molybdenum blade 82 is coated with a titanium nitride layer, enhancing its resistance to ion sputtering and extending its lifespan. Furthermore, to address the issue of blurred trimming edges caused by ion beam switching delay, this embodiment directly drives the molybdenum blade 82 using a piezoelectric ceramic actuator 83, reducing the mechanical response time to less than 0.1 seconds. This effectively solves the problem of blurred trimming edges caused by ion beam switching delay.
[0037] Furthermore, this embodiment also provides an application method for the aforementioned integrated machine tool for measuring and adjusting the resonator, including:
[0038] S101, the resonator (such as fused silica or single-crystal silicon) is mounted onto the resonator clamping and moving mechanism 5. The resonator clamping and moving mechanism 5 aligns the axis of the resonator with the optical path shared by the laser interferometer 4 and the ion source 6, ensuring that the concentricity error of the resonator clamp 51 is minimized. The vacuum pump group 31 evacuates the vacuum tank 3 to a preset pressure or maintains the evacuation for a preset time, for example, evacuating the pressure inside the vacuum tank 3 to less than 5 × 10⁻⁶. - 3 Pa, or maintain the vacuum for about 15-35 minutes to eliminate the interference of air damping on vibration measurement;
[0039] S102, the resonator is driven to rotate along a single axis by the resonator clamping and motion mechanism 5 and the resonator is detected by the laser interferometer 4;
[0040] S103: Based on the detection results of the resonator by the laser interferometer 4, determine whether the quality of the resonator meets the requirements. If it does not meet the requirements, drive the resonator to rotate along the axis of the center using the resonator clamping and motion mechanism 5, and use the ion source 6 to perform in-situ processing on the resonator. Adjust the correct adjustment time of the corresponding position of the lip of the resonator by controlling the speed of the resonator rotation along the axis of the center by the resonator clamping and motion mechanism 5 and the opening and closing time of the variable aperture 8. After the processing is completed, jump to step S102; if the requirements are met, end and exit.
[0041] The measurement steps in step S102 include: (1) excitation and modal analysis, including: applying micro-vibration through excitation hammer 75 to excite the free vibration mode of the resonator. (2) detection by laser interferometer 4, including: capturing the surface vibration signal of the resonator in real time through the coaxial integrated laser interferometer 4, and accurately calculating the rigid shaft position and initial frequency splitting value by combining Doppler vibration measurement technology. (3) data feedback: the measurement results are marked by the control system in the operating cabinet to mark the surface quality defect area (such as protrusion or depression). In step S103, when the resonator is driven to rotate along the axis by the resonator clamping and motion mechanism 5 and the resonator is processed in situ by the ion source 6, it includes: (1) starting the ion source 6: turning on the ion source 6 fixed on the base, turning on the water cooler to maintain the temperature of the ion source 6 and avoid thermal drift. (2) dynamic processing: using the rotary table (360° continuous rotation), the defect area of the resonator is accurately moved to the focal position of the ion beam. (3) The harmonic oscillator is fabricated using a four-point adjustment method. During the movement, the ion source 6 is shielded by a variable aperture to avoid errors caused by the ion beam irradiating other points that do not need adjustment. (4) Elimination of frequency fragmentation: For the four-point adjustment process, the mass imbalance areas in the four rigid axis directions are etched sequentially. After each adjustment, the frequency fragmentation value is remeasured until the atomic-level precision requirement is met.
[0042] When adjusting the correct adjustment time of the lip edge corresponding to the resonator by controlling the speed of the resonator's rotation along a single axis driven by the resonator clamping and motion mechanism 5 and the opening and closing time of the variable aperture 8, the opening and closing demand of the aperture within 0.1ms in the future can be predicted based on the real-time position and speed of the resonator clamping and motion mechanism 5, and the control signal can be sent in advance. In this embodiment, the motion trajectory is predicted by the Kalman filter algorithm, and the aperture action timing is dynamically adjusted, reducing the edge blurring error. Specifically, in step S103 of this embodiment, when adjusting the correct adjustment time of the lip edge corresponding to the resonator by controlling the speed of the resonator's rotation along a single axis driven by the resonator clamping and motion mechanism 5 and the opening and closing time of the variable aperture 8, the calculation function expression of the opening and closing time of the variable aperture 8 is:
[0043] t open =t current +(p k+1 p target ) / v k ;
[0044] Among them, t open t is the opening and closing time of the variable aperture 8. current p is the current time. k+1 For the predicted position at time k+1 based on the Kalman filter algorithm output, p target For the target position, v k Let k be the velocity of the resonator rotating along a single axis at time k. The resonator clamping and motion mechanism 5's displacement stage (xyz three-coordinate displacement stage 53) and electric rotary stage 52 are equipped with high-precision encoders and Hall sensors to provide real-time feedback of position and velocity data. The position of the aperture blades is monitored by a displacement sensor. The encoder and sensor data are fused using a Kalman filter to eliminate noise (such as mechanical vibration and electromagnetic interference) and generate real-time state vectors (position, velocity, and acceleration) for the displacement stage and aperture. The Kalman filter algorithm uses the resonator's position, velocity, and acceleration along a single axis as the system state vector, which can be expressed as:
[0045] x k =[p k v k a k ] T ;
[0046] Where, x k Let p be the system state vector at time k. k v is the predicted position at time k based on the Kalman filter algorithm output. k Let a be the velocity of the harmonic oscillator rotating along a single axis at time k. k Let be the acceleration of the harmonic oscillator rotating along a single axis at time k, where T in the superscript is the transpose. The Kalman filter algorithm is a well-known existing method. The functional expression of the state transition equation (discrete time) used in the Kalman filter algorithm is:
[0047] x k+1 =F xk +w k ;
[0048] Where, x k+1 Let F be the system state vector at time k+1. xk Here is the state transition matrix (derived based on Newton's laws of motion), w k Let k be the process noise at time k. The functional expression of the observation equation used in the Kalman filter algorithm is:
[0049] Z k =H xk +n k ;
[0050] Among them, Z k Let H be the observation vector at time k. xk Let n be the observation matrix. k To observe noise.
[0051] The Kalman filter algorithm consists of a prediction phase and an update phase. The prediction phase estimates the next state and covariance based on the current state, and its functional expression is:
[0052] x k∣k 1=Fx k 1∣k 1;
[0053] P k∣k 1=FP k 1∣k 1F T +Q;
[0054] Where, x k∣k 1 represents the system state vector at time k predicted based on information from time k-1 and earlier, F is the state transition matrix, and x k 1∣k 1 represents the system state vector estimated at time k-1, P k∣k 1 is the covariance matrix of the system state vector at time k predicted based on information from time k-1 and earlier. k 1∣k 1 represents the covariance matrix of the estimated system state vector at time k-1, and Q represents the process noise covariance matrix; the update stage is used to correct the predicted values by combining the actual observations, and its function expression is:
[0055] K k =P k∣k 1H T HP k∣k 1H T +R) 1 ;
[0056] x k∣k =x k∣k 1+K k (Z k Hx k∣k 1);
[0057] P k∣k =(I K k H)P k∣k 1;
[0058] Among them, K k Let H be the Kalman gain at time k, H be the observation matrix, R be the observation noise covariance matrix, and x be the Kalman gain at time k. k∣k Let be the system state vector estimated at time k. Finally, the control signal, after passing through the Kalman filter algorithm, advances the opening and closing time t of the variable aperture 8. open Send to piezoelectric ceramic driver 83 to ensure that the aperture is precisely opened when the ion beam reaches the target position.
[0059] The post-processing in step S103 includes: (1) Terminating the ion beam: turning off the ion source 6 and stopping the processing. (2) Final inspection: scanning the entire surface again using the laser interferometer 4 to verify whether the frequency meets the requirements. (3) Releasing the vacuum and removing the workpiece: restoring the normal pressure and removing the processed resonator, which takes about 3 minutes (traditional processes require multiple switching of the cavity, with a total time of more than 1 hour), and finally obtaining the processed resonator.
[0060] In summary, this embodiment of the integrated resonator measurement and adjustment machine tool coaxially integrates the laser interferometer 4 and the ion source 6, sharing the optical path and vacuum environment, eliminating the need for cavity switching and repetitive positioning in traditional processes. The vacuum chamber 3, specifically designed for 20 and 30 model resonators, is shared by the ion source 6 and the laser interferometer 4. This simplified design integrates processing and inspection, resulting in a more compact and powerful machine that reduces efficiency losses due to repeated clamping. All key components of this embodiment (resonator clamping and motion mechanism 5, ion source 6, excitation mechanism 7, etc.) are integrated within the vacuum chamber 3, avoiding the repetitive clamping caused by environmental changes (such as atmospheric and vacuum) in traditional separate equipment. The vacuum environment not only reduces air disturbance interference with laser measurement but also ensures the stability of ion beam adjustment. The combination of the electric rotary table 52 and the xyz three-coordinate displacement stage 53 provides four-degree-of-freedom adjustment capability, allowing the resonator to complete positioning, excitation, measurement, and adjustment at the same workstation. Process switching can be achieved through program control without disassembly, significantly shortening the workflow. The laser interferometer 4 flexibly aligns with the target via a height adjustment platform, while the ion source 6 is fixed to the base to ensure processing stability. The excitation hammer 75 and the resonator fixture 51 are configured close together, forming a compact "excitation-measurement-adjustment" closed-loop space, reducing mechanical redundancy. The laser interferometer 4 acquires the vibration mode data of the resonator in real time, quickly identifies the position of the rigid axis through an algorithm, and feeds the results back to the control system. The system automatically adjusts the displacement stage and rotary stage, ensuring the ion source 6 is precisely aligned with the adjustment area, achieving full automation of "detection-positioning-processing." After the excitation hammer 75 applies controllable excitation, the laser interferometer 4 immediately captures the dynamic response, avoiding data lag caused by equipment switching in traditional methods. Based on the measurement results, the ion source 6 directly removes atomic-level materials in a vacuum environment without transferring the workpiece, ensuring adjustment accuracy. The vibration isolation stage 1 and the vacuum pump group 31 work together to eliminate the effects of external vibration and thermal drift, ensuring high-precision measurement and processing. The water chiller 11 maintains the temperature stability of the ion source 6, extending equipment life and ensuring processing consistency. The resonator only needs to be clamped into the resonator fixture 51 once. All subsequent processes (positioning, excitation, measurement, adjustment, and retesting) are completed inside the machine, completely eliminating positioning errors caused by repeated clamping and saving operation time. The operating cabinet and computer integrate dedicated software, reducing manual intervention and lowering the risk of human error. In this embodiment, the integrated resonator measurement and adjustment machine tool adopts a modular design, allowing for quick replacement of the excitation hammer 75 or the target material of the ion source 6, and is compatible with both 20 and 30 model resonators. The rigid axis of the resonator is the axis with the smallest deformation in its vibration modes, directly determining the dynamic equilibrium characteristics of the resonator.Traditional methods require correction of multiple regions to indirectly approximate the position of the rigid axis. However, the method in this embodiment directly locks the rigid axis through dynamic excitation and modal analysis. By performing atomic-level material removal on the continuous adjustment domain of the entire lip, it can effectively solve the problems of low resonator processing efficiency, accuracy decay caused by dynamic adjustment of ion source 6 or workpiece, and limited accuracy caused by the separation of measurement and adjustment of traditional resonator machines.
[0061] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.
Claims
1. An application method for a machine tool integrating resonator measurement and adjustment, characterized in that, The machine tool includes a vibration isolation table (1), on which a height adjustment table (2) and a vacuum tank (3) with a vacuum pump group (31) are provided. A laser interferometer (4) is installed on the height adjustment table (2). The vacuum tank (3) contains a single-axis resonator clamping and motion mechanism (5), an ion source (6) for ion beam processing of the resonator mounted on the resonator clamping and motion mechanism (5), and an excitation mechanism (7) for providing excitation to the resonator mounted on the resonator clamping and motion mechanism (5). The laser interferometer (4) and the ion source (6) share the same optical path to enable The measurement and processing of the resonator can be seamlessly connected without switching the optical path. The ion source (6) is provided with a variable aperture (8) at the ion beam emission window to block the ion beam emitted by the ion source (6) during the stabilization process of the ion source (6) and during the switching of different processing positions to avoid the accuracy decay problem caused by dynamic adjustment. The resonator clamping and motion mechanism (5) includes a resonator clamp (51), an electric rotary table (52), an xyz three-coordinate displacement stage (53), and a pad (54) connected in sequence. The pad (54) is installed and fixed on the vibration isolation table (1). The electric rotary table (52) An argon gas hood (55) is fitted around the resonator fixture (51). An argon gas nozzle (551) is installed inside the argon gas hood (55). The top of the argon gas hood (55) has an opening. The lower part of the resonator fixture (51) is connected to the electric rotary table (52) and passes through the opening at the top of the argon gas hood (55) to clamp and fix the resonator. The opening on the inner wall of the clamped and fixed resonator is connected to the opening at the top of the argon gas hood (55), thereby forming a local inert gas environment at the resonator being processed. Argon gas flows from the inside to the outside of the resonator in a laminar flow mode, carrying away the microparticles generated during processing away from the processing sensitive area without interfering with the process. The focusing path of the ion beam of the ion source (6) or the laser of the laser interferometer (4); the application method includes: S101, installing the resonator onto the resonator clamping and moving mechanism (5), aligning the axis of the resonator with the optical path shared by the laser interferometer (4) and the ion source (6) through the resonator clamping and moving mechanism (5); evacuating the vacuum tank (3) to a preset pressure or maintaining the evacuation for a preset time through the vacuum pump group (31); S102, driving the resonator to rotate along the axis in a single axis through the resonator clamping and moving mechanism (5) and using the laser interferometer (4) to detect the resonator;S103, based on the detection results of the resonator by the laser interferometer (4), determine whether the quality of the resonator meets the requirements. If it does not meet the requirements, drive the resonator to rotate along the axis of the center by the resonator clamping and motion mechanism (5) and use the ion source (6) to process the resonator in situ. Adjust the correct adjustment time of the lip edge corresponding to the resonator by controlling the speed of the resonator clamping and motion mechanism (5) driving the resonator to rotate along the axis of the center and the opening and closing time of the variable aperture (8). The calculation function expression of the opening and closing time of the variable aperture (8) is: t open =t current +(p k+1 p target ) / v k ; Among them, t open t is the aperture opening and closing time of the variable aperture (8). current p is the current time. k+1 To predict the position at time k+1 based on the output of the Kalman filter algorithm, the Kalman filter algorithm uses the position of the harmonic oscillator, the velocity and acceleration of the harmonic oscillator rotating along the axis as the system state vector, p target For the target position, v k The speed at which the resonator rotates along the single axis at time k is the speed at which it rotates. After processing is completed, jump to step S102. If the requirements are met, the process ends and exits.
2. The application method of the integrated machine tool for measuring and adjusting the resonator according to claim 1, characterized in that, The machine tool also includes a water chiller (11), whose water cooling pipes are connected to the water cooling interface of the ion source (6) for water cooling heat dissipation of the ion source (6).
3. The application method of the integrated machine tool for measuring and adjusting the resonator according to claim 1, characterized in that, The excitation mechanism (7) includes a base plate (71), a connecting plate (72), a small hammer motor (73), a steel wire rope (74), and an excitation hammer (75). The base plate (71) is mounted and fixed on the vibration isolation table (1). The outer shell of the small hammer motor (73) is connected to the base plate (71) through the connecting plate (72). The output shaft of the small hammer motor (73) is connected to the excitation hammer (75) through the steel wire rope (74) to provide excitation by striking the resonator with the excitation hammer (75).
4. The application method of the integrated machine tool for measuring and adjusting the resonator according to claim 3, characterized in that, When the hammer motor (73) drives the wire rope (74) and the vibrating hammer (75) to strike the resonator to provide excitation, the hammer motor (73) rotates alternately around the axis in the forward and reverse directions, and the magnitude of the excitation applied when the vibrating hammer (75) strikes the resonator is controlled by the size of the rotation angle.
5. The application method of the integrated machine tool for measuring and adjusting the resonator according to claim 3, characterized in that, The base plate (71) is provided with two symmetrically arranged arc grooves (711), and the connecting plate (72) is an L-shaped plate. One side of the L-shaped plate is fixed in the two arc grooves (711) by fasteners, and the other side is connected to the outer shell of the hammer motor (73).
6. The application method of the integrated machine tool for measuring and adjusting the resonator according to claim 1, characterized in that, The outer shell of the ion source (6) is provided with a clamp (61) and a base (62). The base (62) is installed and fixed on the vibration isolation table (1). A circular positioning hole is provided between the clamp (61) and the base (62) and they are connected to each other by a connector. The outer shell of the ion source (6) is clamped and fixed in the circular positioning hole between the clamp (61) and the base (62).
7. The application method of the integrated machine tool for measuring and adjusting the resonator according to claim 1, characterized in that, The variable aperture (8) includes a base (81) with an inner hole. The base (81) is provided with multiple molybdenum blades (82) arranged around the inner hole to form the aperture diameter. One end of the molybdenum blade (82) is rotatably fixed on the base (81), and the other end is slidably arranged in a groove on the base (81) by a slider and connected to a piezoelectric ceramic actuator (83) on the base (81) so as to adjust the size of the aperture diameter by adjusting the sliding position of the slider. The surface of the molybdenum blade (82) is coated with titanium nitride.